Force tactile sensor, manipulator and robot

Abstract

The utility model discloses a force tactile sensor, a manipulator and a robot, the force tactile sensor comprises a housing, a circuit board and an MEMS pressure sensor, and the housing is provided with an accommodating cavity; the circuit board is accommodated in the accommodating cavity; the MEMS pressure sensor is connected to the circuit board and supports the housing. The MEMS pressure sensor is used for sensing external acting force applied to the housing along the direction of the housing towards the circuit board. Therefore, by utilizing the characteristics of high detection precision and stability of the MEMS pressure sensor, the influence of the external environment on the detection of the external acting force applied to the shell cover is reduced, and the detection precision is favorably improved.

Description

Technical Field

[0001] The embodiments of the present utility model relate to the field of sensors, and in particular to a force tactile sensor, a manipulator, and a robot. Background Art

[0002] As a key sensing element, the force tactile sensor plays an important role in the fields of robotics, human-computer interaction, education and scientific research, medical equipment, and wearable devices. For example, piezoresistive sensors, capacitive sensors, etc. However, these sensors are limited by the environment. For example, the capacitance in the capacitive sensor is easily interfered with, which affects the detection result. The piezoresistive sensor is related to the contact area during detection, and the detection accuracy is relatively limited. Therefore, it is necessary to design a force tactile sensor to reduce the influence of the external environment. Summary of the Utility Model

[0003] In order to solve the above technical problems, the embodiments of the present utility model provide a force tactile sensor, a manipulator, and a robot.

[0004] The embodiments of the present utility model solve their technical problems by adopting the following technical solutions:

[0005] A force tactile sensor includes a housing, a circuit board, and a MEMS pressure sensor. The housing is provided with a receiving cavity; the circuit board is received in the receiving cavity; the MEMS pressure sensor is connected to the circuit board and supports the housing, and the MEMS pressure sensor is used to sense an external force applied to the housing along the direction from the housing towards the circuit board. In this way, by utilizing the characteristics of high detection accuracy and stability of the MEMS pressure sensor, the influence of the external environment on the detection of the external force applied to the housing is reduced, which is beneficial to improving the detection accuracy.

[0006] Optionally, define the direction from the housing towards the circuit board as the first direction. Along the direction perpendicular to the first direction, at least one MEMS pressure sensor is provided at both opposite ends of the circuit board. In this way, the applied external force is shared by the housing to multiple MEMS pressure sensors. The multiple MEMS pressure sensors located at both opposite ends of the circuit board can jointly detect the force applied to the housing, and the position of the force application point and the magnitude of the acting force of the housing can be analyzed by combining the force-bearing conditions of the multiple MEMS pressure sensors.

[0007] Optionally, the number of the MEMS pressure sensors is four, and the four MEMS pressure sensors are respectively located at four corners of the same end face of the circuit board. The common detection by the MEMS pressure sensors at the four corners is beneficial to increasing the detection range. The detection range of the four MEMS pressure sensors 4 can be increased compared with the detection range of setting one MEMS pressure sensor 4, which is beneficial to sensing the external force applied to the housing 2.

[0008] Optionally, the four MEMS pressure sensors are symmetrically arranged in pairs.

[0009] Optionally, the housing includes a top plate and a surrounding plate connected to each other. The top plate and the surrounding plate jointly enclose the accommodation cavity, and the top plate covers the MEMS pressure sensor.

[0010] Optionally, a protrusion is provided on one end face of the top plate facing the circuit board. Along the direction of the top plate facing the circuit board, the protrusion abuts against the MEMS pressure sensor.

[0011] Optionally, there are multiple MEMS pressure sensors, and the number of the protrusions is four. The four protrusions are respectively located at four corners of one end face of the top plate facing the circuit board. Along the direction of the top plate facing the circuit board, each protrusion abuts against the MEMS pressure sensor. In this way, except for the area occupied by the protrusions on one end face of the top plate facing the circuit board, other areas of this end face can avoid the electrical components on the circuit board, reducing the risk that the top plate presses the electrical components on the circuit board when an external force acts on the top plate, and facilitating the detection of the force tactile sensor.

[0012] Optionally, the housing further includes a protruding portion, the protruding portion is connected to the surrounding plate and extends in a direction away from the top plate, and the protruding portion is provided with a connection hole.

[0013] The embodiment of the present invention also adopts the following technical solution to solve its technical problems:

[0014] A manipulator includes mechanical fingers and the above-mentioned force tactile sensor.

[0015] The embodiment of the present invention also adopts the following technical solution to solve its technical problems:

[0016] A robot includes a robot body and the above-mentioned force tactile sensor.

[0017] The beneficial effects of the embodiments of the present utility model are as follows: The force tactile sensor provided by the embodiments of the present application includes a housing, a circuit board, and a MEMS pressure sensor. The housing is provided with a receiving cavity; the circuit board is received in the receiving cavity; the MEMS pressure sensor is connected to the circuit board and supports the housing, and the MEMS pressure sensor is used to sense an external force applied to the housing in the direction from the housing towards the circuit board. In this way, by utilizing the characteristics of high detection accuracy and stability of the MEMS pressure sensor, the influence of the external environment on the detection of the external force applied to the housing is reduced, which is beneficial to improving the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] One or more embodiments are exemplarily illustrated by the pictures in the corresponding drawings. These exemplary illustrations do not limit the embodiments. Elements with the same reference numerals in the drawings are represented as similar elements, unless otherwise stated, and the drawings in the figures do not constitute a proportional limitation.

[0019] Figure 1 is a schematic diagram of the force tactile sensor of one embodiment of the present application;

[0020] Figure 2 is Figure 1 a schematic diagram of another perspective;

[0021] Figure 3 is Figure 1 a cross-sectional view of;

[0022] Figure 4 is Figure 1 a structural decomposition diagram of;

[0023] Figure 5 is Figure 1 a schematic diagram of another perspective of the housing in;

[0024] Figure 6 is Figure 2 a front view of the circuit board in;

[0025] In the figure: 1, force tactile sensor; 2, housing; 3, circuit board; 4, MEMS pressure sensor;

[0026] 201, receiving cavity; 21, top plate; 22, side plate; 23, protruding part;

[0027] 211, protrusion; 231, connection hole. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0028] For the convenience of understanding the present utility model, the present utility model will be described in more detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that when an element is expressed as "fixed to" another element, it can be directly on the other element, or there can be one or more intermediate elements therebetween. When an element is expressed as "connected to" another element, it can be directly connected to the other element, or there can be one or more intermediate elements therebetween. The terms "upper", "lower", "inner", "outer", "vertical", "horizontal", etc. used in this specification indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0029] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by those skilled in the technical field to which the present utility model belongs. The terms used in the specification of the present utility model are only for the purpose of describing specific embodiments and are not used to limit the present utility model. The term "and / or" used in this specification includes any and all combinations of one or more of the related listed items.

[0030] In addition, the technical features involved in different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0031] As Figure 1-3 shown, a force tactile sensor 1 provided in one embodiment of the present application includes a housing 2, a circuit board 3, and a MEMS (Micro-Electro-Mechanical Systems) pressure sensor 4. The housing 2 is provided with a receiving cavity 201. The circuit board 3 is received in the receiving cavity 201. The MEMS pressure sensor 4 is connected to the circuit board 3 and supports the housing 2. The MEMS pressure sensor 4 is used to sense an external force applied to the housing 2 in the direction from the housing 2 towards the circuit board 3. In this way, by utilizing the characteristics of high detection accuracy and stability of the MEMS pressure sensor 4, the influence of the external environment on the detection of the external force applied to the housing is reduced, which is beneficial to improving the detection accuracy.

[0032] It should be understood that in addition to the shape shown in Figure 1 , the housing 2 can also be of other shapes, as long as it can cover the MEMS pressure sensor 4 on the circuit board 3. For the convenience of description, the shape structure of the housing 2 in one of the cases shown in Figure 1 will be described below.

[0033] In some embodiments, as Figure 3-4 shown, the housing cover 2 includes a top plate 21 and a surrounding plate 22 which are connected to each other. The top plate 21 and the surrounding plate 22 jointly enclose a receiving cavity 201. The top plate 21 covers the MEMS pressure sensor 4. When an external force is applied in the direction from the top plate 21 towards the circuit board 3, the top plate 21 conducts the applied external force to the MEMS pressure sensor 4, so as to obtain the magnitude of the applied external force. It can be understood that the part of the top plate 21 in contact with the MEMS pressure sensor 4 is a flat surface, so as to avoid the unevenness at the contact position between the top 21 and the MEMS pressure sensor 4 from affecting the detection result.

[0034] In some embodiments, please refer to Figure 3 and Figure 5 , a protrusion 211 is provided on one end surface of the top plate 21 facing the circuit board 3. Along the direction of the top plate 21 towards the circuit board 3 (i.e., Figure 3 the direction Z shown), the protrusion 211 abuts against the MEMS pressure sensor 4. In this way, it is beneficial for the external force applied to the top plate 21 to press the MEMS pressure sensor 4 through the protrusion 211, facilitating the detection of the MEMS pressure sensor 4. In this embodiment, the number of MEMS pressure sensors 4 is multiple, and the number of protrusions 211 is four. The four protrusions 211 are respectively located at the four corners of one end surface of the top plate 21 facing the circuit board 3. Along the direction of the top plate 21 towards the circuit board 3, each protrusion 211 abuts against the MEMS pressure sensor 4. Among them, except for the area occupied by the protrusions 211 in one end surface of the top plate 21 facing the circuit board 3, the other areas of this end surface can avoid the electrical components on the circuit board 3, reducing the risk that the top plate 21 presses the electrical components on the circuit board 3 when an external force acts on the top plate 21, and facilitating the detection of the force tactile sensor 1.

[0035] In some embodiments, the area of the end surface of the protrusion 211 for contacting the MEMS pressure sensor 4 is larger than the area of the surface of the MEMS pressure sensor 4 facing the protrusion 211, which is beneficial for the MEMS pressure sensor 4 to be pressed more evenly.

[0036] In some embodiments, please refer to again Figure 4, the housing 2 further includes a protruding portion 23. The protruding portion 23 is connected to the peripheral plate 22 and extends in a direction away from the top plate 21. The protruding portion 23 is provided with a connection hole 231 for connecting with the object to which the force tactile sensor 1 is to be installed. Among them, the two sides of the protruding portion 23 are rounded to prevent the protruding portion 23 from being sharp and affecting the assembly personnel, and at the same time, it can also prevent scratching the object connected to the protruding portion 23. In this embodiment, the number of the protruding portions 23 is two, and the two protruding portions 23 are respectively located at opposite ends of the peripheral plate 22, and each protruding portion 23 is provided with two connection blocks 231 to evenly distribute the force during connection and installation. The protruding portion 23 can be connected to the target to be installed. For example, the force tactile sensor 1 can be installed on the finger of the manipulator through the connection hole 231 of the protruding portion 23.

[0037] It can be understood that the housing 2 can be made by an integral molding method, such as injection molding, die casting molding or others. That is, the top plate 21, the peripheral plate 22 and the protruding portion 23 are integrally connected, which is beneficial to improving the assembly efficiency of the force tactile sensor 1. The housing 2 can be made of plastic or metal materials, and the specific material selection depends on the deformation caused by the force and the range of the external force to be measured. If the deformation caused by the force is small, plastic can be selected, and if the deformation caused by the force is large, metal can be selected.

[0038] In some embodiments, the end face of the circuit board 3 away from the top plate 21 is subjected to back glue treatment so that the circuit board 3 can be pasted onto the object to be installed and relatively fixed.

[0039] In some embodiments, taking the direction of the housing 2 facing the circuit board 3 as the first direction Z, as Figure 3 shown, along the direction perpendicular to the first direction Z, at least one MEMS pressure sensor 4 is provided at both opposite ends of the circuit board 3. That is, as Figure 6 shown, the direction perpendicular to the first direction Z refers to the direction X or the direction Y shown in Figure 6 , and at least one MEMS pressure sensor 4 is provided at both ends of the circuit board 3 in the direction X and / or the direction Y. The MEMS pressure sensors 4 at both ends in the direction X and / or the direction Y can be on the same straight line or not on the same straight line, and can be specifically selected and set according to needs. In this way, the external force applied is shared by the housing 2 to multiple MEMS pressure sensors 4. By combining the force conditions of the multiple MEMS pressure sensors 4, the position of the force application point and the magnitude of the acting force of the housing 2 can be analyzed. At the same time, the common detection of multiple MEMS pressure sensors 4 is beneficial to improving the detection accuracy, reducing the influence of the external environment on the external force applied to the housing 2, and is beneficial to improving the detection accuracy.

[0040] It should be understood that when there are multiple MEMS pressure sensors 4, the distances between the sides of the multiple MEMS pressure sensors 4 facing the top plate 21 and the circuit board 3 should be as the same as possible to ensure that when a normal external force is applied to the top plate 21, the top plate 21 can press against the multiple MEMS pressure sensors 4, enabling the multiple MEMS pressure sensors 4 to jointly perform detection, which is beneficial to improving the detection results.

[0041] In some embodiments, the MEMS pressure sensor 4 includes four MEMS pressure sensors 4, and the four MEMS pressure sensors 4 are respectively located at the four corners of the same end face of the circuit board 3. In this way, the detection range of the four MEMS pressure sensors 4 can be increased compared to the detection range of setting one MEMS pressure sensor 4, which is beneficial to sensing the external force applied to the housing 2. In this embodiment, the four MEMS pressure sensors 4 are symmetrically arranged in pairs.

[0042] It can be understood that if there is only one MEMS pressure sensor 4, the magnitude of the force exerted by the external force on the housing can be directly obtained through this MEMS pressure sensor at this time. If the number of MEMS pressure sensors 4 is two or more, the magnitude and position of the external force received on the housing 2 can be determined through the detection results of the multiple MEMS pressure sensors 4. The specific details can be referred to the following description:

[0043] For the convenience of understanding the force tactile sensor in this application, Figure 6 taking the four MEMS pressure sensors 4 shown as an example, but this does not mean that the number of MEMS pressure sensors can only be four. It can be any number as long as the compressive external force can be obtained.

[0044] During use, the coordinate positions (X1, Y1), (X2, Y2), (X3, Y3), and (X4, Y4) of the four MEMS pressure sensors 4 can be obtained after pre-calibration.

[0045] Since the external force applied to the housing 2 is a normal force perpendicular to the housing 2, the moment on the surface of the housing 2 is balanced. That is, the moments in the X direction and the Y direction are balanced, and thus the position coordinates of the touch point can be deduced as follows:

[0046] Let the resultant force Fc = F1 + F2 + F3 + F4, where Fc is the external force, and F1, F2, F3, and F4 are the forces borne by the four MEMS pressure sensors 4 respectively. The magnitude of the resultant force Fc is the magnitude of the external force.

[0047] According to the moment balance, the position (Xc, Yc) of the resultant force Fc can be calculated according to the following calculation method:

[0048] The position of Fc in the X direction is: Xc = (F1 * X1 + F2 * X2 + F3 * X3 + F4 * X4) / Fc;

[0049] The position of Fc in the Y direction is: Yc = (F1 * Y1 + F2 * Y2 + F3 * Y3 + F4 * Y4) / Fc.

[0050] In this way, through the detection of the four MEMS sensors, the position where the external force acts on the housing and the magnitude of the external force can be obtained, thereby realizing the detection of the force tactile sensor 1.

[0051] The force tactile sensor 1 provided by the embodiment of the present application includes a housing 2, a circuit board 3, and a MEMS pressure sensor 4. The housing 2 is provided with a receiving cavity 201; the circuit board 3 is received in the receiving cavity 201; the MEMS pressure sensor 4 is connected to the circuit board 3 and abuts against the housing 2. The MEMS pressure sensor 4 is used to sense the external force applied to the housing 2 in the direction from the housing 2 towards the circuit board 3. In this way, by utilizing the characteristics of high detection accuracy and stability of the MEMS pressure sensor 4, the influence of the external environment on the external force applied to the housing 2 is reduced, which is beneficial to improving the detection accuracy. Moreover, when there are multiple MEMS pressure sensors 4, the housing 2 is used to distribute the applied external force to the multiple MEMS pressure sensors 4. By combining the force-receiving conditions of the multiple MEMS pressure sensors 4, the position of the force-receiving point on the housing 2 and the magnitude of the acting force can be analyzed, facilitating the detection of the force tactile sensor 1.

[0052] The manipulator provided by another embodiment of the present application includes the force tactile sensor 1 in the above embodiment. The installation position of the force tactile sensor 1 can be selected according to needs. For example, the force tactile sensor 1 can be installed at the finger joint of the manipulator, or can be installed at the palm of the manipulator. Of course, it can also be installed at other positions as long as it is a position where it is necessary to detect whether there is a force acting.

[0053] The robot provided by yet another embodiment of the present application includes the force tactile sensor 1 in the above embodiment.

[0054] The above are only the embodiments of the present utility model, and do not limit the patent scope of the present utility model. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present utility model, or directly or indirectly applied to other related technical fields, shall be equally included in the patent protection scope of the present utility model.

Claims

1. A force tactile sensor (1), characterized in that: include: The housing (2) is provided with a receiving cavity (201); A circuit board (3) is accommodated in the accommodating cavity (201); A MEMS pressure sensor (4), the MEMS pressure sensor (4) being connected to the circuit board (3) and supporting the shell (2), the MEMS pressure sensor (4) being used to sense an external force applied to the shell (2) in a direction from the shell (2) toward the circuit board (3).

2. The force tactile sensor (1) according to claim 1, characterized in that: The direction of the housing (2) toward the circuit board (3) is defined as a first direction, and along a direction perpendicular to the first direction, at least one MEMS pressure sensor (4) is provided at opposite ends of the circuit board (3).

3. The force tactile sensor (1) according to claim 1, characterized in that: The number of the MEMS pressure sensors (4) is four, and the four MEMS pressure sensors are respectively located at four corners of the same end surface of the circuit board (3).

4. The force tactile sensor (1) according to claim 3, characterized in that: The four MEMS pressure sensors (4) are arranged symmetrically between each other.

5. The force tactile sensor (1) according to any one of claims 1 to 4, characterized in that: The housing (2) comprises a top plate (21) and a surrounding plate (22) which are connected to each other, wherein the top plate (21) and the surrounding plate (22) together enclose the accommodating cavity (201), and the top plate (21) covers the MEMS pressure sensor (4).

6. The force tactile sensor (1) according to claim 5, characterized in that: A protrusion (211) is provided on one end surface of the top plate (21) facing the circuit board (3); along the direction of the top plate (21) toward the circuit board (3), the protrusion (211) abuts against the MEMS pressure sensor (4).

7. The force tactile sensor (1) according to claim 6, characterized in that: There are a plurality of the MEMS pressure sensors (4), the number of the protrusions (211) is four, the four protrusions (211) are respectively located at four corners of an end surface of the top plate (21) facing the circuit board (3), and along the direction from the top plate (21) toward the circuit board (3), each of the protrusions (211) abuts against at least one of the MEMS pressure sensors (4).

8. The force tactile sensor (1) according to claim 5, characterized in that: The shell cover (2) further comprises a protruding portion (23), wherein the protruding portion (23) is connected to the enclosure plate (22) and extends in a direction away from the top plate (21), and the protruding portion (23) is provided with a connecting hole (231).

9. A robot, characterized in that: The method comprises a force tactile sensor (1) as claimed in any one of claims 1 to 8.

10. A robot, characterized in that: The method comprises a force tactile sensor (1) as claimed in any one of claims 1 to 8.

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