Reflector assembly capable of avoiding liquid metal pollution

Abstract

The utility model discloses a reflector assembly capable of avoiding liquid metal pollution, which comprises a reflector, the reflector comprises a cuboid reflector body and L-shaped flanges which protrude from two sides of the reflector body and are bent downwards, and the upper surface of the reflector body is flush with the upper surfaces of the L-shaped flanges to form a mirror surface for reflecting light beams; the cooling modules extend on the two sides of the reflecting mirror in the length direction of the reflecting mirror, and each cooling module comprises a liquid metal groove formed in the top face of the reflecting mirror in the length direction and a water cooling flow channel which is arranged below the liquid metal groove and extends in parallel with the liquid metal groove; wherein the liquid metal groove is filled with indium gallium alloy, and the bottom of the L-shaped flange extends into the liquid metal groove and is immersed in the indium gallium alloy, so that cooling of the reflecting mirror is realized, and meanwhile, pollution of liquid metal to the mirror surface is avoided. According to the utility model, the liquid metal tank and the cooling module are creatively arranged at proper positions far away from the working surface of the reflecting mirror, so that the reflecting mirror is cooled, and the pollution of the liquid metal to the mirror surface is avoided.

Description

Technical Field

[0001] The utility model relates to the field of synchrotron radiation beam lines, and more specifically to a reflector assembly capable of avoiding liquid metal contamination. Background Art

[0002] The reflector is one of the key components in the synchrotron radiation beamline. Its function is to deflect, collimate, focus, etc. the beam, so that the beam propagates in a predetermined path and is ultimately used for experiments. Since synchrotron radiation has a high thermal power density, it will cause the temperature of the reflector to rise and produce a certain amount of thermal deformation, resulting in a decrease in the surface accuracy of the reflector, which in turn affects the beam quality. Therefore, it is necessary to design a reasonable cooling method for the reflector to effectively reduce the impact of heat deposition on the beam quality.

[0003] Generally speaking, the design of the mirror cooling structure mainly includes two methods: external cooling and internal cooling, in which deionized water is the main cooling medium. For a mirror with the reflective surface facing upward, it is also possible to groove both sides of the working area on the upper surface of the mirror and pour an appropriate amount of liquid metal (indium gallium alloy), while taking away the heat through a copper block containing cooling pipes immersed in the liquid metal at the bottom. This method can also avoid the influence of flow-induced vibration on the stability of the reflector. However, this method also has certain disadvantages, that is, during the process of adjusting the reflector posture or replacing certain equipment, the liquid metal is easy to overflow from the groove or be taken out, thereby contaminating the working surface of the reflector.

[0004] From the above, it can be seen that how to optimize the structural design to achieve a reasonable arrangement of the liquid metal tank and the cooling block of the reflector with the working surface facing upward to avoid liquid metal contamination is a technical problem that needs to be solved. Utility Model Content

[0005] The utility model aims to provide a reflector assembly which can avoid liquid metal contamination, thereby solving the problem in the prior art that the reflector is easily contaminated by liquid metal.

[0006] In order to solve the above problems, the utility model adopts the following technical solutions:

[0007] Provided is a mirror assembly that can avoid liquid metal contamination, comprising: a mirror, which includes: a rectangular parallelepiped mirror body, and L-shaped flanges protruding from both sides of the mirror body and bent downward, the upper surface of the mirror body being flush with the upper surface of the L-shaped flanges to form a mirror surface for reflecting light beams; and a pair of cooling modules extending along the length direction on both sides of the mirror, which include: a liquid metal groove opened along the length direction on the top surface thereof, and a water-cooling channel extending in parallel thereunder; wherein, indium gallium alloy is filled in the liquid metal groove, and the bottom of the L-shaped flange of the mirror extends into the liquid metal groove and is immersed in the indium gallium alloy, so as to achieve cooling of the mirror while avoiding contamination of the mirror surface by liquid metal.

[0008] Preferably, the relative positions of the cooling modules and the mirror are fixed, and when the mirror is adjusted in attitude, the cooling modules are adjusted together therewith.

[0009] Preferably, the cooling modules have counterbores, and the cooling modules and the mirror are fixed on the same platform by fasteners through the counterbores.

[0010] Preferably, the water-cooling channel is used to circulate cold water to achieve continuous cooling of the indium gallium alloy in the liquid metal groove.

[0011] Preferably, the liquid metal groove is a rectangular parallelepiped-shaped groove, and the water-cooling channel is a pipe having a circular cross-sectional shape.

[0012] Preferably, the mirror is made of single crystal silicon, and the cooling modules are made of oxygen-free copper. Oxygen-free copper has a high thermal conductivity, is a good conductor of heat, and has a low outgassing rate, so it is particularly suitable for the manufacture of cooling modules under vacuum conditions.

[0013] As described in the background section of the present invention, for a mirror with a working surface facing upward and a liquid metal groove on the reflecting surface, there is a problem that liquid metal is likely to overflow and contaminate the working surface of the mirror. The present invention adopts the method of processing L-shaped flanges on both sides of a rectangular parallelepiped mirror, and at the same time introducing a cooling module with an upper groove filled with liquid metal. By immersing the bottom of the L-shaped flange in the liquid metal, the cooling of the mirror can be achieved while avoiding contamination of the mirror surface by liquid metal. The present invention creatively arranges the liquid metal groove and the cooling module at an appropriate position far from the working surface of the mirror, so as to achieve cooling of the mirror while avoiding contamination of the mirror surface by liquid metal.

[0014] A mirror assembly that can avoid liquid metal contamination provided by the present invention has the following remarkable beneficial effects compared with the prior art:

[0015] 1) The utility model uses indium gallium alloy as the heat-conducting medium between the water-cooling channel and the mirror, improving the heat-conducting efficiency of the overall structure, effectively cooling the mirror, and improving the surface shape accuracy and beam position stability of the mirror.

[0016] 2) It is especially applicable to the cooling structure design of a mirror with the working surface facing upward.

[0017] 3) The indium gallium alloy used as the cooling medium is arranged at a position far from the working surface of the mirror, so that even if the alloy overflows, it will not cause pollution to the working surface of the mirror. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 FIG. shows the overall structural schematic diagram of a mirror assembly provided according to a preferred embodiment of the present utility model;

[0019] Figure 2 FIG. shows a sectional view taken along the Figure 1 A-A section in

[0020] Figure 3 FIG. shows the separate structural schematic diagram of the mirror;

[0021] Figure 4 FIG. shows the separate structural schematic diagram of the cooling module. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The following further describes the present utility model in conjunction with specific embodiments. It should be understood that the following embodiments are only used to illustrate the present utility model and not to limit the scope of the present utility model. Unless otherwise specified, the technical means used in the embodiments are conventional operations in the art or experimental methods recommended by the instrument and equipment manufacturers. The reagents and materials used in the embodiments can be obtained from commercial channels unless otherwise specified.

[0023] Combined with Figure 1 、 Figure 2 FIG. shows a mirror assembly provided according to a preferred embodiment of the present utility model, which is composed of a mirror 10 and a pair of cooling modules 20.

[0024] As shown in Figure 3 FIG., the mirror 10 includes: a rectangular parallelepiped mirror body 11, and L-shaped flanges 12 protruding from both sides of the top of the mirror body 11 and bent downward. The mirror 10 is integrally made of single-crystalline silicon material, and the upper surface of the mirror body 11 is flush with the upper surface of the L-shaped flanges 12. After polishing, a mirror surface 13 for reflecting light beams is formed.

[0025] As shown in Figure 4As shown, the cooling module 20 has an inverted T-shaped cross-sectional shape and extends along the length direction of the mirror 10 on the left and right sides of the mirror 10 respectively. Specifically, the cooling module 20 includes: a liquid metal groove 21 opened along the length direction on the top surface, and a water-cooling channel 22 extending in parallel with the liquid metal groove 21 below the liquid metal groove 21. The liquid metal groove 21 is a rectangular parallelepiped-shaped groove, and the water-cooling channel 22 is a pipe with a circular cross-sectional shape. The liquid metal groove 21 is filled with indium gallium alloy for cooling the mirror surface. At the same time, the water-cooling channel 22 is used to circulate cold water to continuously cool the indium gallium alloy.

[0026] It should be understood that the indium gallium alloy can remain liquid at room temperature, ensuring full contact between the cooling module 20 and the mirror 10, becoming a good heat medium, and enabling the overall structure to have better heat conduction efficiency. Therefore, it is used as a heat conduction medium between the water-cooling channel 22 (cold source) and the light-receiving mirror 10 (heat source) in this device to better cool the mirror.

[0027] According to such a mirror assembly provided by the present invention, as Figure 2 shown, by inserting the bottom of the L-shaped flange 12 of the mirror into the liquid metal groove 21 and submerging it in the indium gallium alloy, the cooling of the mirror can be achieved while avoiding the contamination of the mirror surface by the liquid metal.

[0028] Both ends of the cooling module 20 also have counterbores. By passing fasteners through the counterbores, the cooling module 20 and the mirror 20 can be fixed on the same plane. When the mirror 10 is adjusted in attitude, the cooling module 20 is adjusted together to ensure that their relative positions remain unchanged, and the bottom of the cooling module 20 is basically flush with the bottom of the mirror 10.

[0029] Preferably, the inner diameter dimension of the water-cooling channel 22 is slightly smaller than the width dimension of the liquid metal groove 21, and the width dimension of the liquid metal groove 21 is larger than the width dimension of the bottom of the L-shaped flange 12.

[0030] According to this preferred embodiment, the mirror body 11 has a rectangular parallelepiped shape with dimensions of 900×60×60 (mm 3 ), the upper half part of the L-shaped flange 12 has dimensions of 900×12×12 (mm 3 ), and the lower half part has dimensions of 900×6×20 (mm 3 ). The cooling module 20 has dimensions of 980×15×35 (mm 3 ), the inner diameter dimension of the water-cooling channel 22 is 8 mm, and the liquid metal groove 21 has dimensions of 10 mm in width and 11 mm in depth.

[0031] It should be understood that the above dimensions are a preferred embodiment of the present invention, but the present invention is not limited to the above dimensions.

[0032] The traditional way to cool a mirror is to slot the upper surface of the mirror, i.e., the working surface. When the mirror is adjusted in Pitch angle or Roll angle, the indium gallium alloy may overflow from the slot, thus contaminating the working surface of the mirror. However, with the mirror assembly provided by the present utility model, even if the indium gallium alloy overflows during the mirror adjustment process, it will not contaminate the working surface of the mirror.

[0033] The above are only the preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Various changes can be made to the above embodiments of the present utility model. All simple, equivalent changes and modifications made according to the claims and the content of the specification of the present utility model application fall within the scope of protection of the claims of the present utility model patent. Those not described in detail in the present utility model are all conventional technical contents.

Claims

1. A reflector assembly capable of avoiding liquid metal contamination, characterized in that: include: A reflector, comprising: a rectangular reflector body, and L-shaped flanges protruding from both sides of the reflector body and bent downward, wherein the upper surface of the reflector body is flush with the upper surface of the L-shaped flange to form a mirror surface for reflecting a light beam; and A pair of cooling modules extending along the length direction of the reflector on both sides thereof, comprising: a liquid metal tank opened along the length direction on the top surface thereof, and a water cooling channel extending parallel to the liquid metal tank below the liquid metal tank; The liquid metal tank is filled with indium gallium alloy, and the bottom of the L-shaped flange of the reflector extends into the liquid metal tank and is immersed in the indium gallium alloy, thereby cooling the reflector and avoiding contamination of the mirror surface by the liquid metal.

2. The reflector assembly according to claim 1, characterized in that The relative positions of the cooling module and the reflector are fixed, and when the reflector is adjusted in posture, the cooling module is adjusted accordingly.

3. The reflector assembly according to claim 1, characterized in that The cooling module is provided with a countersunk hole, and the cooling module and the reflector are fixed on the same plane by means of a fastener via the countersunk hole.

4. The reflector assembly according to claim 1, characterized in that The water cooling channel is used to circulate cold water to achieve continuous cooling of the indium gallium alloy in the liquid metal tank.

5. The reflector assembly according to claim 1, characterized in that The liquid metal tank is a rectangular parallelepiped slot, and the water cooling channel is a pipe with a circular cross-sectional shape.

6. The reflector assembly according to claim 1, characterized in that The width dimension of the liquid metal trough is greater than the width dimension of the bottom of the L-shaped flange.

7. The reflector assembly according to claim 1, characterized in that The reflecting mirror is made of single crystal silicon, and the cooling module is made of oxygen-free copper.

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