Exhaust device of etching machine

Abstract

The utility model discloses an exhaust device of an etching machine, which comprises an absorption component, a gas inlet pipe, a gas outlet component and a gas outlet component, wherein the gas inlet pipe communicated with the inside of the etching machine is fixed on one side wall of the absorption component so as to absorb and purify exhaust gas; the axial flow fan is arranged on the inner side of the air inlet pipe; wherein the absorption assembly comprises an absorption chamber, a driving chamber, a shaft rod, fiber cloth and an air plate, the absorption chamber and the driving chamber are connected through a partition plate, and the interiors of the corresponding same ends of the absorption chamber and the driving chamber are communicated; by arranging the absorption chamber, the driving chamber, the shaft rod, the fiber cloth and the air plate, the situation that when waste gas of the etching machine is purified, an absorbent needs to be additionally pumped through a pump body to move upwards to be in contact with incoming waste gas for absorption is avoided, the device can achieve opposite movement of the absorbent and the waste gas without the additional pump body, and the waste gas purification efficiency is improved. Therefore, the waste gas is purified by using the absorbent, the usage amount of equipment is reduced, the cost is saved, and the device is easy to use.

Description

Technical Field

[0001] The utility model specifically relates to an exhaust device of an etching machine. Background Technique

[0002] A plasma etching machine is a key device for micro-nano processing, mainly used for manufacturing semiconductor chips, optical devices, etc. The plasma etching machine generates plasma in a vacuum environment by adding high-energy ions or exciting gas molecules. These ions or excited gas molecules undergo chemical reactions or physical collisions with the surface of the processing target, thereby causing the dissolution or removal of the surface material. The plasma etching machine generates acidic gases during use. In order to reduce environmental pollution to the surrounding area, it needs to be purified before being discharged.

[0003] When the existing etching machine exhausts, in order to remove acidic gases, the gas is usually exported by a blower, and then the absorbent is pumped upward into the spray pipe by a pump body. Through the opposite movement of the gas and the absorbent, the gas is absorbed and a neutralization reaction is carried out to complete purification. The operation is rather laborious. It is necessary to use a pump body to move the absorbent upward, which is not convenient for reducing the number of power equipment used, resulting in high production costs. Moreover, a large number of power equipment will also cause a relatively high frequency of later maintenance. For this reason, we propose an exhaust device for an etching machine. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an exhaust device for an etching machine to solve the problem proposed in the above background technique that when removing acidic gases discharged from the etching machine, it is necessary to use power equipment such as a blower and a pump body for purification, which is not convenient for reducing the number of power equipment used, thereby reducing production costs.

[0005] To achieve the above purpose, the utility model provides the following technical solution: An exhaust device for an etching machine, comprising:

[0006] An absorption assembly, one side wall of the absorption assembly is fixedly provided with an air inlet pipe communicated with the inside of the etching machine to absorb and purify waste gas;

[0007] An axial flow fan, arranged inside the air inlet pipe;

[0008] Wherein, the absorption assembly includes an absorption chamber, a driving chamber, a shaft rod, a fiber cloth and a wind plate. The absorption chamber is connected to the driving chamber through a partition, and the interiors of the two corresponding ends are communicated. The fiber cloth is rotatably installed inside the absorption chamber through a bracket and a shaft rod, and one end of the shaft rod extends into the inside of the driving chamber and is matched with the wind plate.

[0009] Preferably, another side wall of the absorption assembly is fixedly provided with an adsorption chamber, the adsorption chamber is communicated with the inside of the absorption assembly, and an activated carbon plate is arranged inside the adsorption chamber.

[0010] Preferably, two exhaust ports are provided on one side wall of the adsorption chamber.

[0011] Preferably, a connecting housing is fixed at one end of the driving chamber, and the driving chamber and the absorption chamber are internally connected through the connecting housing.

[0012] Preferably, ventilation holes are provided inside the fiber cloth, and a plurality of ventilation holes are provided and distributed in a matrix.

[0013] Preferably, the wind plate is rectangular, and the number of the wind plates is greater than the number of the fiber cloths.

[0014] Preferably, a liquid inlet and outlet pipe is fixed on the lower surface of the absorption chamber.

[0015] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0016] By providing an absorption chamber, a driving chamber, a shaft rod, a fiber cloth and a wind plate, when purifying the waste gas of the etching machine, it is avoided that an additional pump is required to pump the absorbent upward to contact and absorb the incoming waste gas. This device can achieve the opposite movement of the absorbent and the waste gas without an additional pump, so as to purify the waste gas with the absorbent, reduce the usage of equipment, save costs and is easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic structural diagram of the present utility model;

[0018] Figure 2 is a schematic cross-sectional structure diagram of the absorption chamber of the present utility model;

[0019] Figure 3 is a schematic cross-sectional structure diagram of the adsorption chamber of the present utility model;

[0020] Figure 4 is a schematic structure diagram of the wind plate of the present utility model;

[0021] Figure 5 is a schematic cross-sectional structure diagram of the driving chamber of the present utility model.

[0022] In the figure: 1, intake pipe; 2, axial flow fan; 3, absorption assembly; 301, absorption chamber; 302, driving chamber; 304, shaft rod; 305, fiber cloth; 306, liquid inlet and outlet pipe; 307, wind plate; 308, connecting housing; 4, adsorption chamber; 401, activated carbon plate; 5, exhaust port. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0024] Please refer to Figures 1 - 5 , the present invention provides a technical solution: an exhaust device of an etching machine, including:

[0025] An absorption component 3, with an intake pipe 1 fixed to one side wall of the absorption component 3 and communicating with the inside of the etching machine to absorb and purify the waste gas;

[0026] An axial flow fan 2, arranged inside the intake pipe 1;

[0027] Among them, the absorption component 3 includes an absorption chamber 301, a driving chamber 302, a shaft rod 304, a fiber cloth 305 and a wind plate 307. The absorption chamber 301 is connected to the driving chamber 302 through a partition, and the interiors of the two corresponding ends are communicated, facilitating communication through the ends, so that the waste gas enters the inside of the absorption chamber 301 after driving the wind plate 307 to move, and then contacts the fiber cloth 305 stained with the absorbent coming, thereby absorbing and neutralizing the waste gas through the absorbent to complete purification. The fiber cloth 305 is rotatably installed inside the absorption chamber 301 through a bracket and a shaft rod 304, and one end of the shaft rod 304 extends into the driving chamber 302 and cooperates with the wind plate 307, facilitating driving the shaft rod 304 to rotate through the wind plate 307, thereby driving the fiber cloth 305 stained with the absorbent to move, avoiding the inconvenience of additionally requiring a pump body to make the absorbent move.

[0028] In this embodiment, preferably, an adsorption chamber 4 is fixed to the other side wall of the absorption component 3. The adsorption chamber 4 is internally communicated with the absorption component 3, and an activated carbon plate 401 is arranged inside the adsorption chamber 4, facilitating better adsorption and purification of the waste gas.

[0029] In this embodiment, preferably, two exhaust ports 5 are provided on one side wall of the adsorption chamber 4, facilitating the discharge of the purified gas.

[0030] In this embodiment, preferably, a communication housing 308 is fixed to one end of the driving chamber 302. The driving chamber 302 is internally communicated with the absorption chamber 301 through the communication housing 308, facilitating introducing the waste gas from the driving chamber 302 into the inside of the absorption chamber 301.

[0031] In this embodiment, preferably, ventilation holes are formed in the inner side of the fiber cloth 305. A plurality of ventilation holes are provided and are distributed in a matrix, facilitating better contact between the waste gas and the fiber cloth 305 coated with the absorbent. The material of the fiber cloth 305 is preferably cotton fiber or polyamide fiber.

[0032] In this embodiment, preferably, the wind plate 307 is rectangular, and the number of wind plates 307 is greater than the number of fiber cloths 305, facilitating better driving of the shaft rod 304 to rotate through the wind plate 307, thereby driving the fiber cloth 305 to move.

[0033] In this embodiment, preferably, a liquid inlet and outlet pipe 306 is fixed to the lower surface of the absorption chamber 301, facilitating the replacement and maintenance of the absorbent inside the absorption chamber 301. There are two absorption chambers 301. The absorbent in one of them is sodium hydroxide, and the absorbent in the other is ammonia water, facilitating the absorption of acidic or alkaline gases.

[0034] The working principle and usage process of the present utility model: When in use, the intake pipe 1 is connected to the inside of the etching machine, and the waste gas discharged from the etching machine is introduced into the inside of the driving chamber 302 through the axial flow fan 2, blowing the driving chamber 302 to rotate. Since the fiber cloth 305 and the driving chamber 302 are coaxial, the fiber cloth 305 is driven to rotate. The lower end inside the absorption chamber 301 is filled with an absorbent through the liquid inlet and outlet pipe 306. When the fiber cloth 305 moves, the absorbent is driven to move upward to the upper end of the absorption chamber 301. When the waste gas moves from the driving chamber 302 to the inside of the absorption chamber 301 through the connecting housing 308, it contacts the oncoming fiber cloth 305, and the waste gas is absorbed and neutralized, and then flows into the adsorption chamber 4. The waste gas is further adsorbed and purified by the activated carbon plate 401. Finally, the purified gas is discharged to the outside through the exhaust port 5.

[0035] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. An exhaust device for an etching machine, characterized in that: include: An absorption component (3), wherein an air intake pipe (1) connected to the interior of the etching machine is fixed on one side wall of the absorption component (3) to absorb and purify the exhaust gas; An axial flow fan (2) is arranged inside the air inlet pipe (1); The absorption assembly (3) comprises an absorption chamber (301), a driving chamber (302), a shaft (304), a fiber cloth (305) and a wind plate (307); the absorption chamber (301) and the driving chamber (302) are connected via a partition, and the corresponding ends of the two are internally connected; the fiber cloth (305) is rotatably installed on the inner side of the absorption chamber (301) via a bracket and the shaft (304), and one end of the shaft (304) extends into the inner side of the driving chamber (302) and cooperates with the wind plate (307).

2. The exhaust device of an etcher according to claim 1, characterized in that: An adsorption chamber (4) is fixed to the other side wall of the absorption component (3); the adsorption chamber (4) is connected to the interior of the absorption component (3); and an activated carbon plate (401) is arranged inside the adsorption chamber (4).

3. The exhaust device of an etching machine according to claim 2, characterized in that: An exhaust port (5) is provided on one side wall of the adsorption chamber (4), and the exhaust port (5) is provided at two locations.

4. The exhaust device of an etching machine according to claim 1, characterized in that: A communication shell (308) is fixed to one end of the driving chamber (302), and the driving chamber (302) and the absorption chamber (301) are internally connected via the communication shell (308).

5. The exhaust device of an etcher according to claim 1, characterized in that: The fiber cloth (305) is provided with ventilation holes on the inner side, and a plurality of ventilation holes are provided and distributed in a matrix.

6. The exhaust device of an etcher according to claim 1, characterized in that: The wind plates (307) are rectangular, and the number of the wind plates (307) is greater than the number of the fiber cloths (305).

7. The exhaust device of an etcher according to claim 1, characterized in that: A liquid inlet and outlet pipe (306) is fixed on the lower surface of the absorption chamber (301).

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