Large dust collecting structure of tail gas processor
By designing a large dust collection structure for the exhaust gas processor including a hollow box, an intake pipe, an acid discharge pipe and a defogging device, the problem of dust accumulation in the exhaust gas during semiconductor production is solved, and the equipment maintenance cycle is extended and the processing efficiency is improved.
Patent Information
- Application Number
- CN202422029214.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-21
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-08-21
AI Technical Summary
In the exhaust gas generated during semiconductor production, dust particles accumulate in large quantities, resulting in a shorter maintenance cycle of the equipment, and it is difficult for conventional equipment to effectively solve this problem when dealing with large flows or special gases.
A large dust collection structure of the exhaust gas processor is designed, including a hollow box, an intake pipe, an acid discharge pipe and a mist defogging device. After the gas with wet dust condenses through the intake pipe, it enters the acid discharge pipe. The dust is adsorbed on the Ball ring, and the remaining gas is discharged through the defog degasser.
It effectively solves the problem of shortening maintenance cycles caused by large accumulation of dust in the equipment, improves the maintenance cycle to more than one week, and is simple to install and low cost, without external energy support, and is suitable for various large dust treatment scenarios.
Smart Images
Figure CN222984025U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of tail gas treatment, specifically to a large dust collection structure of a tail gas processor. Background Art
[0002] During the semiconductor production process, various types of waste gases are generated, including toxic and harmful gases such as fluorine-containing, chlorine-containing, and sulfur-containing gases, as well as dust particles. If directly discharged without treatment, it will cause serious pollution and even threaten human health and ecological safety.
[0003] During the tail gas treatment process, dust is generated. When dealing with large flow rates or special gases, more dust will be generated, and using conventional equipment will shorten the equipment maintenance cycle. Summary of the Utility Model
[0004] The utility model provides a large dust collection structure of a tail gas processor to solve the problems in related technologies, and this device solves the problem of a large amount of dust accumulation.
[0005] To solve the above problems, the following technical solutions are provided:
[0006] The large dust collection structure of the tail gas processor of the utility model includes a box body. The box body is arranged in a hollow shape. A first through hole and a second through hole connected to the inside of the box body are provided at the top of the box body. An air inlet pipe is connected to the first through hole, and a vertically arranged acid discharge pipe is connected to the second through hole. The bottom end of the acid discharge pipe is connected to the box body, and a demister is provided at the top end of the acid discharge pipe. The demister is connected to an acid discharge pipe.
[0007] In the above solution, after the gas with wet dust passes through the air inlet pipe, part of the water vapor naturally condenses into the box body. The gas reaches the acid discharge pipe after passing through the box body. The acid discharge pipe is used to block the dust in the gas, and the dust adsorbs inside the acid discharge pipe. The remaining gas continues to pass through the acid discharge pipe to reach the demister. The demister is used to isolate the water vapor from the wet gas, and finally the gas is discharged. This structure can effectively solve the problem that the maintenance cycle is shortened due to a large amount of dust accumulation in the equipment. The equipment is simple to install, has a low manufacturing cost, does not require external energy supply, and can be used in various places where it is not convenient to replace equipment for large dust.
[0008] The air inlet pipe includes an air inlet vertical pipe. One end of the air inlet vertical pipe is connected to the first through hole, and the other end of the air inlet vertical pipe is connected to an arc-shaped pipe. The arc-shaped pipe bends upward in an arc shape, and an air inlet horizontal pipe is connected to the upper port of the arc-shaped pipe.
[0009] In the above solution, through the setting of the air inlet pipe, it is used to introduce the gas with wet dust. The gas passes through the air inlet horizontal pipe into the air inlet vertical pipe, and part of the water vapor naturally condenses and flows into the box body through the air inlet vertical pipe.
[0010] Inside the acid discharge pipe, a Pall ring is provided for blocking dust in the gas.
[0011] In the above solution, through the setting of the Pall ring, the Pall ring has a large number of pores and surface areas, and can effectively adsorb dust in the waste gas.
[0012] Inside the demister, a corrugated plate is provided for water-vapor isolation of the moisture.
[0013] In the above solution, through the setting of the corrugated plate, it is used to dehumidify the gas.
[0014] On the outer side wall of the box body, a water outlet is provided, and on the front end face of the box body, a window for observing the water level is provided.
[0015] In the above solution, through the setting of the water outlet, observe the water level in the box body through the window, and open the water outlet to remove the condensed water in the box body.
[0016] At the lower end of the intake horizontal pipe, an installation pipe is provided. The installation pipe is arranged vertically downward and is communicated with the intake horizontal pipe.
[0017] Adopting the above solution, there are the following specific advantages:
[0018] 1. Since the large-dust collection structure of the tail gas processor of the present utility model includes a box body, the box body is arranged in a hollow shape. A first through hole and a second through hole are provided at the top of the box body and are communicated with the inside of the box body. An intake pipe is connected to the first through hole, and a vertically arranged acid discharge pipe is connected to the second through hole. The bottom end of the acid discharge pipe is connected to the box body, and a demister is provided at the top end of the acid discharge pipe. The demister is communicated with the acid discharge pipe. After the gas with wet dust passes through the intake pipe, part of the water vapor naturally condenses into the box body. After the gas passes through the box body, it reaches the acid discharge pipe. The acid discharge pipe is used to block the dust in the gas, and the dust is adsorbed in the acid discharge pipe. The remaining gas continues to pass through the acid discharge pipe to reach the demister. The demister is used for water-vapor isolation of the moisture, and finally the gas is discharged. This structure can effectively solve the problem that the maintenance cycle is shortened due to a large amount of dust accumulation in the equipment. The equipment is simple to install, has a low manufacturing cost, does not require external energy supply, and can be used in various places where it is not convenient to replace the equipment for large dust.
[0019] 2. The intake pipe contains an intake vertical pipe. One end of the intake vertical pipe is connected to the first through hole, and the other end of the intake vertical pipe is connected to an arc-shaped pipe. An intake horizontal pipe is connected to the upper port of the arc-shaped pipe for introducing gas with wet dust. The gas passes through the intake horizontal pipe into the intake vertical pipe. Part of the water vapor in the gas naturally condenses and flows into the box body. Inside the acid discharge pipe, there is a Pall ring for blocking dust in the gas. The Pall ring has a large number of pores and surface areas, which can effectively adsorb dust in the waste gas. Inside the demister, there is a corrugated plate for separating water vapor from the moisture. On the outer side wall of the box body, there is a water outlet. On the front end face of the box body, there is a window for observing the water level. By observing the water level in the box body through the window and opening the water outlet, the condensed water in the box body can be removed. Description of the Drawings
[0020] Figure 1 It is a schematic structural diagram of the large dust collection structure of the tail gas processor;
[0021] Figure 2 It is a top view of the large dust collection structure of the tail gas processor;
[0022] Figure 3 It is a cross-sectional view of the large dust collection structure A-A of the tail gas processor;
[0023] Description of the reference numerals: 1. Box body; 2. First through hole; 3. Second through hole; 4. Intake pipe; 401. Intake vertical pipe; 402. Arc-shaped pipe; 403. Intake horizontal pipe; 5. Acid discharge pipe; 501. Pall ring; 6. Demister; 601. Corrugated plate; 7. Water outlet; 8. Window; 9. Installation pipe. Detailed implementation manners
[0024] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0025] Such as Figures 1 to 3As shown in the figure, the large dust collection structure of the tail gas processor of the present utility model includes a box body 1. The box body 1 is provided in a hollow shape. A first through hole 2 and a second through hole 3 are provided at the top end of the box body 1 and are connected to the inside of the box body 1. An air inlet pipe 4 is connected to the first through hole 2, and a vertically arranged acid discharge pipe 5 is connected to the second through hole 3. The bottom end of the acid discharge pipe 5 is connected to the box body 1, and a demister 6 is provided at the top end of the acid discharge pipe 5. The demister 6 is connected to an acid discharge pipe. This structure can effectively solve the problem that a large amount of dust accumulates in the equipment, resulting in a shortened maintenance cycle. The maintenance cycle is effectively increased to more than one week. The equipment is simple to install, has a low manufacturing cost, and does not require external energy supply. It can be used in places where it is not convenient to replace equipment for various large dusts.
[0026] The air inlet pipe 4 includes an air inlet vertical pipe 401. One end of the air inlet vertical pipe 401 is connected to the first through hole 2, and the other end of the air inlet vertical pipe 401 is connected to an arc-shaped pipe 402. The arc-shaped pipe 402 is bent upward in an arc shape. An air inlet horizontal pipe 403 is connected to the upper port of the arc-shaped pipe 402. An installation pipe 9 is provided at the lower end of the air inlet horizontal pipe 403. The installation pipe 9 is arranged vertically downward and is connected to the air inlet horizontal pipe 403 for introducing gas with wet dust. The gas passes through the air inlet horizontal pipe 403 into the air inlet vertical pipe 401, and part of the water vapor in the air inlet vertical pipe 401 naturally condenses and flows into the box body 1.
[0027] Bauer rings 501 for blocking dust in the gas are arranged inside the acid discharge pipe. The Bauer rings 501 have a large number of pores and surface areas and can effectively adsorb dust in the waste gas.
[0028] Corrugated plates 601 for water-vapor isolation of moisture are arranged inside the demister 6 for dehumidifying the gas.
[0029] A water outlet 7 is provided on the outer side wall of the box body 1. A window 8 for observing the water level is provided on the front end face of the box body 1. By observing the water level in the box body 1 through the window 8 and timely opening the water outlet 7, the condensed water in the box body 1 can be removed.
[0030] Gas with wet dust is introduced from the air inlet pipe opening. The gas passes through the air inlet horizontal pipe 403, the arc-shaped pipe 402, and the air inlet vertical pipe 401 into the box body 1 in sequence. Part of the water vapor in the air inlet vertical pipe 401 naturally condenses and flows into the box body 1, and the other part of the gas reaches the acid discharge pipe 5 after passing through the box body 1. Bauer rings 501 are arranged in the acid discharge pipe 5. The Bauer rings 501 can block dust in the gas, and the dust can be adsorbed in the acid discharge pipe 5. The remaining gas continues to pass through the acid discharge pipe 5 to reach the demister 6. Corrugated plates 601 are arranged in the demister 6. The corrugated plates 601 can be used for water-vapor isolation of moisture, and then the gas can be discharged.
[0031] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In the description of the present utility model, unless otherwise specified and defined, it should be noted that the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a mechanical connection or an electrical connection, or it can be the communication inside two elements. It can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.
[0032] The above are only the preferred embodiments of the present utility model, and are not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.
Claims
1. The large dust collection structure of the exhaust gas processor is characterized by: The invention comprises a box body (1), wherein the box body (1) is arranged in a hollow shape, and a first through hole (2) and a second through hole (3) which are connected to the interior of the box body (1) are arranged at the top of the box body (1), an air inlet pipe (4) is connected to the first through hole (2), and a vertically arranged acid discharge pipe (5) is connected to the second through hole (3), the bottom end of the acid discharge pipe (5) is connected to the box body (1), and a demister (6) is arranged at the top of the acid discharge pipe (5), and the demister (6) is connected to the acid discharge pipe.
2. The large dust collection structure of the exhaust gas processor according to claim 1, characterized in that: The air intake pipe (4) comprises an air intake vertical pipe (401), one end of the air intake vertical pipe (401) is connected to the first through hole (2), the other end of the air intake vertical pipe (401) is connected to the arc-shaped pipe (402), the arc-shaped pipe (402) is bent upward in an arc shape, and the upper end of the arc-shaped pipe (402) is connected to the air intake cross pipe (403).
3. The large dust collection structure of the exhaust gas processor according to claim 1, characterized in that: A ball ring (501) is arranged inside the acid discharge pipe to block dust in the gas.
4. The large dust collection structure of the exhaust gas processor according to claim 1, characterized in that: The demister (6) is provided with a corrugated plate (601) inside for isolating moisture from the humid air.
5. The large dust collection structure of the exhaust gas processor according to claim 1, characterized in that: A water outlet (7) is provided on the outer side wall of the box body (1), and a window (8) for observing the water level is provided on the front end surface of the box body (1).
6. The large dust collection structure of the exhaust gas processor according to claim 2, characterized in that: A mounting pipe (9) is provided at the lower end of the air intake cross pipe (403); the mounting pipe (9) is arranged vertically downward and is in communication with the air intake cross pipe (403).