Vacuum outgassing rate testing device

Abstract

The utility model discloses a vacuum outgassing rate testing device, and relates to the field of semiconductor devices. The vacuum outgassing rate testing device comprises a vacuum cavity, a molecular pump and a mechanical pump which are connected in sequence. A plurality of first flange windows, a plurality of second flange windows, a sample inlet door and a vacuum gauge are arranged on the vacuum cavity. Wherein the molecular pump and the sample injection door are respectively connected with the vacuum cavity through different first flange windows, and the vacuum gauge is connected with the vacuum cavity through a second flange window. Through the arrangement, the device realizes the test of the vacuum outgassing rate of each part in the opposite detector, and the device is relatively simple in structure and relatively convenient to operate.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor devices, in particular to a vacuum outgassing rate testing device. Background Art

[0002] The vacuum outgassing rate of a material refers to the rate at which gas molecules are released per unit surface area of the material per unit time under vacuum conditions. It is usually expressed by the number of gas molecules released per unit surface area per unit time. The magnitude of the vacuum outgassing rate depends on factors such as the nature and surface state of the material, as well as environmental conditions. Generally speaking, the lower the outgassing rate, the slower the rate at which the material releases gas under vacuum conditions, and the better the performance of the vacuum system. For applications that require high vacuum, such as particle accelerators, semiconductor manufacturing, etc., materials with extremely low outgassing rates usually need to be selected to ensure that the vacuum system can reach the required vacuum degree.

[0003] In a surface detector, studying and measuring the outgassing rate of materials is crucial for designing and optimizing the vacuum system of the surface detector. Considering the complexity of the surface detector structure and issues such as power consumption and heat dissipation, generally only the detection panel (i.e., the front-end module) is integrated into the vacuum, and other components are located in the atmospheric environment. Even so, the vacuum environment of the surface detector is already complex enough, and it is necessary to consider the vacuum adaptability and outgassing rate of components such as chips, encapsulation glue, printed circuit boards, mechanical supports, cooling components, vacuum moving components, various electronic components, high-density adapters, and high-density signal cables. It is very difficult to obtain the vacuum outgassing rate of these components through data search, calculation, and simulation. An effective way is to actually test through experiments.

[0004] In summary, there is an urgent need for a testing device that can test the vacuum outgassing rate of each component in a surface detector, and the device has a relatively simple structure and is relatively convenient to operate. Summary of the Utility Model

[0005] The utility model provides a vacuum outgassing rate testing device, which solves the problem of difficult testing of the vacuum outgassing rate of each component in a surface detector, and realizes the testing of the vacuum outgassing rate of each component in a surface detector, and the device has a relatively simple structure and is relatively convenient to operate.

[0006] A vacuum outgassing rate testing device of the utility model includes a vacuum chamber, a molecular pump, and a mechanical pump that are connected in sequence. The vacuum chamber is provided with a plurality of first flange windows, a plurality of second flange windows, a sample inlet door, and a vacuum gauge. Among them, the molecular pump and the sample inlet door are respectively connected to the vacuum chamber through different first flange windows, and the vacuum gauge is connected to the vacuum chamber through the second flange window.

[0007] In a feasible implementation manner, the sample inlet door is provided with an observation window, and the observation window is transparent.

[0008] In a feasible embodiment, the sample injection door is connected to the vacuum chamber through an O-ring seal.

[0009] In a feasible embodiment, one side of the sample injection door is hinged to the first flange window, and the other side is detachably connected to the first flange window.

[0010] In a feasible embodiment, the number of the first flange windows is [number], and they are evenly arranged on the vacuum chamber; and / or, the number of the second flange windows is [number], and they are evenly arranged on the vacuum chamber.

[0011] In a feasible embodiment, the molecular pump and the mechanical pump are connected through a bellows.

[0012] In a feasible embodiment, it further includes a bracket, which includes a lower storage plate and an upper storage plate. The lower storage plate and the upper storage plate are connected by multiple connecting rods; the vacuum chamber and the molecular pump are both arranged on the upper storage plate, and the mechanical pump is arranged on the lower storage plate.

[0013] In a feasible embodiment, there is also a bellows opening in the upper storage plate, and the bellows passes through the bellows opening.

[0014] In a feasible embodiment, there is also a support plate above the bellows opening. The support plate is connected to the upper storage plate by multiple support rods, and the vacuum chamber is arranged on the support plate.

[0015] In a feasible embodiment, there are also multiple moving wheels and multiple fixing parts at the bottom of the lower storage plate.

[0016] The vacuum outgassing rate testing device of the present utility model has the following beneficial effects:

[0017] The present utility model forms a pump group by connecting the mechanical pump and the molecular pump in series to extract the gas in the vacuum chamber. At the same time, various flange windows are opened on the vacuum chamber to access various test modules. The vacuum gauge connected therein can measure the vacuum rate in the vacuum chamber, thereby realizing the test of the vacuum outgassing rate of each component in the face detector, and the device has a relatively simple structure and is relatively convenient to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present utility model.

[0019] Figure 2 It is a side view of the present utility model.

[0020] REFERENCE NUMERALS

[0021] Vacuum chamber 1

[0022] First flange window 11

[0023] Second flange window 12

[0024] Sample injection door 13

[0025] Observation window 13.1

[0026] Vacuum gauge 14

[0027] Molecular pump 2

[0028] Mechanical pump 3

[0029] Bracket 4

[0030] Lower layer storage board 41

[0031] Moving wheel 41.1

[0032] Fixing part 41.2

[0033] Connecting rod 42

[0034] Upper layer storage board 43

[0035] Bellows opening 43.1

[0036] Support plate 44

[0037] Support rod 45 Specific embodiments

[0038] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention. In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "left side", "right side", "upper side", "lower side", "above", "below", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0039] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0040] In addition, in the description of the present utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0041] The present utility model provides a vacuum outgassing rate testing device. Referring to Figure 1 , it includes a vacuum chamber 1, a molecular pump 2, and a mechanical pump 3 connected in sequence. The vacuum chamber 1 is provided with a plurality of first flange windows 11, a plurality of second flange windows 12, a sample inlet door 13, and a vacuum gauge 14. The model of the vacuum gauge 14 can generally adopt PKR251. Among them, the molecular pump 2 and the sample inlet door 13 are respectively connected to the vacuum chamber 1 through different first flange windows 11, and the vacuum gauge 14 is connected to the vacuum chamber 1 through the second flange window 12. It is worth noting that the vacuum chamber 1 is used to provide a vacuum environment for the sample. The molecular pump 2 and the mechanical pump 3 are connected in series through a bellows to form a pump group to extract the gas in the vacuum chamber 1, so that the vacuum chamber 1 can maintain a high vacuum environment. The sample inlet door 13 can be opened or closed to realize the entry and exit of the sample. The vacuum gauge 14 is used to measure the vacuum degree in the vacuum chamber 1. The extra first flange windows 11 and second flange windows 12 can reserve installation modules to expand functions and can be used for more other experimental studies, such as installing a thermocouple to conduct research on the vacuum heat dissipation of the detector. In the present utility model, by the way of connecting the molecular pump 2 and the mechanical pump 3 in series, the vacuum degree of the vacuum chamber 1 can be maintained at 10 -7 ~10 -12 mbar. Preferably, the vacuum degree is maintained at 10 - 12 mbar. Through the above settings, the present utility model realizes the testing of the vacuum outgassing rates of various components in the face detector, and the device has a relatively simple structure and is relatively convenient to operate.

[0042] Supplementary, the mechanical pump 3 uses mechanical motion (such as blades or screws) to generate gas flow, quickly discharge a large amount of gas, and reduce the pressure of the present utility model to a range where the molecular pump 2 can effectively operate. The molecular pump 2 uses the high-speed rotation of turbine blades to extract gas molecules from the system, usually having a high pumping speed and a low compression ratio, and can effectively operate at a high vacuum. As the main pump for high vacuum, the molecular pump can further reduce the pressure of the system to meet the requirements of ultra-high vacuum. Preferably, the model of the mechanical pump 3 is PFEIFFER VACUUM HISCROLL 12, and the model of the molecular pump 2 is PFEIFFER VACUUM HIPACE 300.

[0043] Further, referring to Figure 1 , an observation window 13.1 is provided on the sample inlet door 13. The observation window 13.1 is a transparent observation window, through which the operator can grasp the state of the sample in the vacuum chamber 1 in real time, making the entire experimental process in a controllable and safe state. Even further, continuing to refer to Figure 1 , the sample inlet door 13 is connected to the vacuum chamber 1 through an O-ring seal, which facilitates the quick replacement of the sample and further improves the tightness between the sample inlet door 13 and the vacuum chamber 1.

[0044] In a feasible embodiment, the vacuum chamber 1 is a sphere. The number of the first flange windows 11 is 6, and they are evenly arranged on the vacuum chamber 1. The number of the second flange windows 12 is 8, and they are evenly arranged on the vacuum chamber 1.

[0045] In a feasible embodiment, one side of the sample inlet door 13 is hinged to the first flange window 11, and the other side is detachably connected to the first flange window 11. Preferably, the detachable connection between the sample inlet door 13 and the first flange window 11 uses a buckle. Through the above settings, the quick opening and closing of the sample inlet door 13 are realized, which helps to frequently replace the test samples.

[0046] In a specific embodiment, referring to Figure 1, further comprising a bracket 4, the bracket 4 includes a lower storage plate 41 and a lower storage plate 43, the lower storage plate 41 and the upper storage plate 43 are connected by a plurality of connecting rods 42, the vacuum chamber 1 and the molecular pump 2 are both arranged on the upper storage plate 43, and the mechanical pump 3 is arranged on the lower storage plate 41. The bracket 4 can further improve the fixation and stability during the operation of the whole set of device. Further, a plurality of moving wheels 41.1 and a plurality of fixing members 41.2 are further provided at the bottom of the lower storage plate 41. The bracket 4 equipped with the moving wheels 41.1 is more convenient for moving the bracket 4, improves the flexibility of the whole set of device, and is convenient for transferring and replacing the experimental site of the whole set of device. Matched with the function of the moving wheels 41.1 is the fixing member 41.2. When the bracket 4 moves to the designated position, the fixing member 41.2 can fix the bracket 4 in place. The fixing member 41.2 includes a fixing screw and a fixing head with a screw hole. When fixing the bracket 4, the fixing head can be rotated towards the ground direction and made to contact the ground. The surface of the fixing head in contact with the ground is made of a material with a relatively large friction coefficient, so as to ensure the stability and safety of the bracket 4. In a preferred embodiment, four moving wheels 41.1 are arranged at the four corners of the lower storage plate 41, and the moving wheels 41.1 are selected as universal wheels. A fixing member 41.2 is correspondingly arranged near each moving wheel 41.1 to fix the bracket 4.

[0047] Further, referring to Figure 1 , a bellows opening 43.1 is further provided in the upper storage plate 43, and the bellows is passed through the bellows opening 43.1. A support plate 44 is further provided above the bellows opening 43.1. The support plate 44 is connected to the upper storage plate 43 by a plurality of support rods 45, and the vacuum chamber 1 is arranged on the support plate 44.

[0048] The present utility model further provides a usage method of the vacuum outgassing rate testing device, which is specifically described as follows: 1) Move the bracket 4 to a suitable position; 2) According to requirements, install a test module, such as a thermocouple, etc., on the reserved first flange window 11 or the second flange window 12; 3) Open the sample inlet door 13, put the sample to be tested into the vacuum chamber 1, and then close the sample inlet door 13; 4) Start the molecular pump 2 and the mechanical pump 3 to evacuate the vacuum chamber 1, and obtain the current vacuum degree through the vacuum gauge 14. Further, the sample can be observed through the observation window 13.1.

[0049] The above description is only a preferred embodiment of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present utility model, several improvements and replacements can still be made, and these improvements and replacements should also be regarded as the protection scope of the present utility model.

Claims

1. A vacuum outgassing rate testing device, characterized in that: It comprises a vacuum chamber (1), a molecular pump (2) and a mechanical pump (3) which are connected in sequence; the vacuum chamber (1) is provided with a plurality of first flange windows (11), a plurality of second flange windows (12), an injection door (13) and a vacuum gauge (14); The molecular pump (2) and the injection door (13) are respectively connected to the vacuum chamber (1) through different first flange windows (11), and the vacuum gauge (14) is connected to the vacuum chamber (1) through the second flange window (12).

2. The vacuum outgassing rate testing device according to claim 1, characterized in that: The sample injection door (13) is provided with an observation window (13.1), and the observation window (13.1) is a transparent observation window.

3. The vacuum outgassing rate testing device according to claim 1, characterized in that: The sample injection door (13) is connected to the vacuum chamber (1) via an O-ring.

4. The vacuum outgassing rate testing device according to claim 1, characterized in that: One side of the sample injection door (13) is hinged to the first flange window (11), and the other side is detachably connected to the first flange window (11).

5. The vacuum outgassing rate testing device according to claim 1, characterized in that: The number of the first flange windows (11) is 4 to 8, and they are evenly arranged on the vacuum chamber (1); and / or the number of the second flange windows (12) is 3 to 6, and they are evenly arranged on the vacuum chamber (1).

6. The vacuum outgassing rate testing device according to claim 1, characterized in that: The molecular pump (2) and the mechanical pump (3) are connected via a bellows.

7. The vacuum outgassing rate testing device according to claim 1, characterized in that: The invention also comprises a support (4), wherein the support (4) comprises a lower storage plate (41) and an upper storage plate (43), wherein the lower storage plate (41) and the upper storage plate (43) are connected via a plurality of connecting rods (42); the vacuum chamber (1) and the molecular pump (2) are both arranged on the upper storage plate (43), and the mechanical pump (3) is arranged on the lower storage plate (41).

8. The vacuum outgassing rate testing device according to claim 7, characterized in that: The upper storage plate (43) is also provided with a bellows opening (43.1), and the bellows is passed through the bellows opening (43.1).

9. The vacuum outgassing rate testing device according to claim 8, characterized in that: A support plate (44) is also provided above the bellows opening (43.1), and the support plate (44) is connected to the upper storage plate (43) via a plurality of support rods (45); the vacuum chamber (1) is provided on the support plate (44).

10. The vacuum outgassing rate testing device according to claim 7, characterized in that: The bottom of the lower storage plate (41) is also provided with a plurality of moving wheels (41.1) and a plurality of fixing members (41.2).

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