Rolling brush equipment suitable for wafer scrubbing

Abstract

The utility model relates to rolling brush equipment suitable for wafer scrubbing, which comprises a driving device, an extension butt joint device is arranged at the driving end of the driving device, a roller brush is sleeved at the front end of the extension butt joint device, a fixing assembly is arranged on the roller brush, and the roller brush and the extension butt joint device are relatively locked through the fixing assembly. The driving device comprises a fixing base, a servo motor is installed on the fixing base, a coupler is arranged at the driving end of the servo motor, a connecting shaft is arranged on the coupler, the connecting shaft is connected with the extension butt joint device, and the connecting shaft penetrates through the fixing base. Therefore, the driving device is provided with the independent fixing base, stable installation of the servo motor can be achieved, and unnecessary resonance cannot occur in the use period. And the coupling is arranged, so that better driving guide of the servo motor can be met, unnecessary hard plugging combination is avoided, and the driving end of the servo motor is not damaged.

Description

Technical Field

[0001] The utility model relates to a roller brush device, in particular to a roller brush device suitable for wafer scrubbing. Background Art

[0002] For the existing wafer cleaning and processing, the surface of the wafer is often cleaned by a chemical solution. At present, during the cleaning, items such as brushes are used to contact the surface of the wafer to make the chemical solution evenly distributed on the wafer. Then, through the rotation of the brush, the dirt is taken away.

[0003] Specifically, the existing brush is a traditional roller brush structure, which is integrally designed with the driving motor. Thus, the roller brush is driven by the motor to rotate for effective cleaning. However, if the roller brush needs to be adjusted for different wafers, it is necessary to cooperate with components such as the driving motor to synchronously remove and replace them, which has many operation steps and is easy to cause damage.

[0004] At the same time, the existing roller brush structure is mainly a soft brush or a flocked brush, which is easy to cause local accumulation of the chemical solution and uneven distribution of the chemical solution. Therefore, it is necessary to additionally adapt multiple spray heads, and the implementation cost of cleaning is relatively high.

[0005] In view of the above defects, the designer actively conducts research and innovation in order to create a roller brush device suitable for wafer scrubbing, making it more valuable in industry. Summary of the Utility Model

[0006] In order to solve the above technical problems, the purpose of the utility model is to provide a roller brush device suitable for wafer scrubbing.

[0007] The roller brush device suitable for wafer scrubbing of the utility model includes a driving device, wherein: an extension docking device is arranged at the driving end of the driving device, a roller brush is sleeved at the front end of the extension docking device, a fixing component is arranged on the roller brush, and the roller brush and the extension docking device are relatively locked through the fixing component. The driving device includes a fixing seat, a servo motor is installed on the fixing seat, a coupling is arranged at the driving end of the servo motor, a connecting shaft is arranged on the coupling, and the connecting shaft is connected with the extension docking device and passes through the fixing seat.

[0008] Further, in the above-mentioned roller brush device suitable for wafer scrubbing, the fixing seat includes a seat body, a contact groove is arranged on the seat body, the servo motor is arranged in the contact groove, a guiding channel is arranged on the seat body, and the driving end of the servo motor is inserted into the guiding channel and then connected with the extension docking device.

[0009] Further, for the above-mentioned rotary brush device applicable to wafer scrubbing, an auxiliary connecting plate is provided on the fixed seat. The auxiliary connecting plate includes a plate body, a shaft passing hole is provided on the plate body, and a plurality of mounting holes are further provided on the plate body.

[0010] Further, for the above-mentioned rotary brush device applicable to wafer scrubbing, the connecting shaft and the extension docking device are fixedly connected by locking screws.

[0011] Further, for the above-mentioned rotary brush device applicable to wafer scrubbing, the extension docking device includes a connecting seat, a limiting groove is provided on the connecting seat, a fixing rod is inserted into the limiting groove, the roller brush is installed on the fixing rod, and a fixing component is threadedly connected to the front end of the fixing rod. The roller brush and the fixing rod are in a relatively fixed state.

[0012] Further, for the above-mentioned rotary brush device applicable to wafer scrubbing, an expansion end is provided at the tail end of the fixing rod, the expansion end is inserted into the limiting groove, and the expansion end is in interference fit with the limiting groove, or the expansion end and the limiting groove are locked by screws.

[0013] Further, for the above-mentioned rotary brush device applicable to wafer scrubbing, a plurality of contact mechanisms are provided outside the fixing rod, and the contact mechanisms are anti-slip grooves.

[0014] Further, for the above-mentioned rotary brush device applicable to wafer scrubbing, the fixing component is a locking nut, the locking nut is provided with an internal threaded hole, and the internal threaded hole is threadedly connected to the extension docking device; a threaded locking hole is provided at the front end of the roller brush, a limiting edge is provided on the outside of the locking nut, and an external thread is provided on the outside of the limiting edge. The locking nut is simultaneously threadedly connected to the threaded locking hole.

[0015] Furthermore, for the above-mentioned rotary brush device applicable to wafer scrubbing, the roller brush includes a roller body, and a plurality of brush head protrusions are distributed outside the roller, and the brush head protrusions are staggered with each other.

[0016] By means of the above solution, the present utility model has at least the following advantages:

[0017] 1. The driving device is provided with an independent fixed seat, which can realize the stable installation of the servo motor and will not cause unnecessary resonance during use.

[0018] 2. A coupling is provided, which can better meet the driving guidance of the servo motor and avoid unnecessary hard plugging and unplugging combinations, without damaging the driving end of the servo motor.

[0019] 3. An extended docking device is used to participate in the combined positioning of the drum brush. According to the model of the drum brush, a corresponding fixed rod can be adapted to meet the stable combination of the drum brush and facilitate the replacement of the drum brush.

[0020] 4. The drum brush can make better contact with the wafer and meet the need for the diversion of cleaning liquid in wet cleaning.

[0021] 5. The overall structure is simple, easy to manufacture, can be adapted to conventional wafer cleaning equipment for use, and has good versatility.

[0022] The above description is only an overview of the technical solution of the present invention. In order to be able to more clearly understand the technical means of the present invention and implement it according to the content of the description, the following takes the preferred embodiment of the present invention and combines the accompanying drawings to describe in detail as follows. Brief Description of the Drawings

[0023] Figure 1 is an exploded structural schematic diagram of a roller brush device suitable for wafer brushing.

[0024] Figure 2 is a structural schematic diagram of the drum brush.

[0025] The meanings of the reference numerals in the drawings are as follows.

[0026] 1 Drum brush 2 Fixed component

[0027] 3 Fixed seat 4 Servo motor

[0028] 5 Coupling 6 Connecting shaft

[0029] 7 Guide channel 8 Auxiliary connecting plate

[0030] 9 Connecting seat 10 Fixed rod

[0031] 11 Expansion end 12 Brush head protrusion

[0032] 13 Thread locking hole Detailed Description of the Preferred Embodiment

[0033] The following combines the accompanying drawings and embodiments to further describe in detail the specific implementation manners of the present invention. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0034] As Figures 1 to 2A roller brush device applicable to wafer brushing, including a driving device, is characterized in that: an extended docking device is arranged at the driving end of the driving device, and a roller brush 1 is sleeved at the front end of the extended docking device. In this way, the replaceable installation of the roller brush 1 is realized to meet the requirements of different wafer cleaning. At the same time, a fixing component 2 is arranged on the roller brush 1, and the roller brush 1 and the extended docking device are relatively locked through the fixing component 2. In this way, after being installed in place, it can ensure that the roller brush 1 does not shake or fall during use, has better bonding stability, and will not cause improper extrusion to the wafer. Considering the subsequent stable combination with the corresponding wafer cleaning device, the driving device includes a fixed seat 3, and a servo motor 4 is installed on the fixed seat 3. In this way, the fixed seat 3 is connected to the corresponding cleaning device and meets the stable installation of the servo motor 4 itself. Specifically, a coupling 5 is arranged at the driving end of the servo motor 4, and a connecting shaft 6 is arranged on the coupling 5. During installation, according to needs, screw connection or threaded connection can be selected, as long as the stable combination of the coupling 5 and the connecting shaft 6 is satisfied. With the existence of the coupling, the combination and pairing of the driving ends of different models of servo motors 4 can be satisfied without replacing the servo motor 4. And, the connecting shaft 6 is connected to the extended docking device, and the connecting shaft 6 passes through the fixed seat 3. In this way, the stable rotation of the connecting shaft 6 during subsequent use is satisfied, and the steering drive of the servo motor 4 is finally transmitted to the roller brush 1.

[0035] Combined with a preferred embodiment of the present utility model, the fixed seat 3 includes a seat body, and a contact groove (not shown in the figure) is arranged on the seat body, and the servo motor 4 is arranged in the contact groove. During installation, according to needs, the servo motor 4 can be connected to the seat body through corresponding screws to avoid unnecessary displacement. At the same time, considering the guiding need of driving docking, a guiding channel 7 is arranged on the seat body, and the driving end of the servo motor 4 is inserted into the guiding channel 7 and then connected to the extended docking device.

[0036] And for the need to adjust the working area of the roller brush 1, an auxiliary connecting plate 8 can be arranged on the fixed seat 3. The auxiliary connecting plate 8 includes a plate body, and a shaft passing hole is arranged on the plate body to avoid the driving end of the servo motor 4. Moreover, a plurality of mounting holes are also arranged on the plate body. In this way, according to needs, the auxiliary connecting plate 8 can be connected to the subsequent displacement adjustment device, and the whole of the present utility model is driven to perform an overall displacement adjustment through the auxiliary connecting plate 8, so as to facilitate the better cooperation between the roller brush 1 and the wafer. In this way, the fixed seat 3 is not directly connected to the reserved combination position of the wafer cleaning device and has a certain adjustability. The corresponding displacement adjustment device can be selected from conventional devices in the industry such as linear motors, which will not be elaborated here.

[0037] Furthermore, the connecting shaft 6 and the extended docking device are fixedly connected by locking screws to achieve a stable combination and meet effective driving and guiding requirements. At the same time, the extended docking device includes a connecting seat 9, which can be combined with the connecting shaft 6. And, a limiting groove is provided on the connecting seat 9, and a fixing rod 10 is inserted into the limiting groove. During implementation, the roller brush 1 is installed on the fixing rod 10, and the front end of the fixing rod 10 is threadedly connected with a fixing component 2. The roller brush 1 and the fixing rod 10 are in a relatively fixed state. In this way, along with the rotation of the fixing rod 10, the roller brush 1 can rotate synchronously. Specifically, an expansion end 11 is provided at the tail end of the fixing rod 10, and the expansion end 11 is inserted into the limiting groove, and the expansion end 11 and the limiting groove are in interference fit. Or, the expansion end 11 and the limiting groove are locked by screws, as long as it can ensure that the fixing rod 10 does not shake after installation.

[0038] In view of the actual implementation, the fixing component 2 adopted in the present utility model is a locking nut. The locking nut is provided with an internal threaded hole, and the internal threaded hole is threadedly connected with the fixing rod 10 to which the extended docking device belongs. At the same time, a threaded locking hole 13 is provided at the front end of the roller brush 1, a limiting edge is provided on the outer side of the locking nut, and an external thread is provided on the outer side of the limiting edge. The locking nut is also threadedly connected with the threaded locking hole 13. In this way, a stable combination of the extended docking device and the roller brush 1 can be ensured. During preparation, a contact mechanism composed of a plurality of anti-slip grooves can be provided outside the fixing rod 10 to enable better contact and combination between the fixing rod 10 and the inner wall of the roller brush 1, and the two have better integrity. And, as needed, the fixing component 2 can be removed to achieve a more convenient replacement of the roller brush 1 (the contact mechanism will not cause the combination to be stuck), and there is no need to disassemble and replace one by one from the driving end of the servo motor 4.

[0039] Looking further, the adopted roller brush 1 includes a roller body, and a plurality of brush head protrusions 12 are distributed outside the roller. The brush head protrusions 12 are staggered with each other. In this way, the wafer can be flexibly contacted through the brush head protrusions 12 to realize the cleaning of its surface. At the same time, through the staggered distribution of the brush head protrusions 12, a diversion channel can be formed to facilitate the flow of the cleaning liquid and meet the needs of wet cleaning. During manufacturing, the brush head protrusions 12 can preferably be made of PVA material. Of course, other materials can also be used.

[0040] From the above text description and in combination with the drawings, it can be seen that after adopting the present utility model, the following advantages are obtained:

[0041] 1. The driving device is provided with an independent fixing seat, which can realize the stable installation of the servo motor and will not cause unnecessary resonance during use.

[0042] 2. A coupling is provided, which can meet better driving and guiding of the servo motor and avoid unnecessary hard plugging and unplugging combinations, without damaging the driving end of the servo motor.

[0043] 3. An extended docking device is adopted to participate in the combined positioning of the drum brush. According to the model of the drum brush, a corresponding fixed rod can be adapted to meet the stable combination of the drum brush and facilitate the replacement of the drum brush.

[0044] 4. The drum brush can make better contact with the wafer and meet the need for the diversion of cleaning liquid in wet cleaning.

[0045] 5. The overall structure is simple, easy to manufacture, can be adapted to conventional wafer cleaning equipment for use, and has good versatility.

[0046] In addition, the indicated orientation or positional relationship described in the present utility model is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or structure referred to must have a specific orientation, or be operated in a specific orientation structure. Therefore, it should not be construed as a limitation to the present utility model.

[0047] The above description is only a preferred embodiment of the present utility model and is not used to limit the present utility model. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the technical principle of the present utility model, several improvements and modifications can still be made, and these improvements and modifications should also be regarded as the protection scope of the present utility model.

Claims

1. A roller brush device suitable for wafer scrubbing, including a driving device, characterized in that: The driving end of the driving device is provided with an extended docking device, the front end of the extended docking device is sleeved with a roller brush, the roller brush is provided with a fixing component, the roller brush and the extended docking device are relatively locked through the fixing component, the driving device includes a fixing seat, a servo motor is installed on the fixing seat, the driving end of the servo motor is provided with a coupling, the coupling is provided with a connecting shaft, the connecting shaft is connected to the extended docking device, and the connecting shaft passes through the fixing seat.

2. The roller brush device suitable for wafer scrubbing according to claim 1 is characterized in that: The fixing seat comprises a seat body, a contact groove is arranged on the seat body, the servo motor is arranged in the contact groove, a guide channel is arranged on the seat body, and the driving end of the servo motor is connected with the extension docking device after being inserted into the guide channel.

3. The roller brush device suitable for wafer scrubbing according to claim 1 is characterized in that: The fixing seat is provided with an auxiliary connecting plate, which includes a plate body. The plate body is provided with an axle hole, and the plate body is also provided with a plurality of mounting holes.

4. The rolling brush device suitable for wafer scrubbing according to claim 1 is characterized in that: The connecting shaft and the extended docking device are connected and fixed by locking screws.

5. The rolling brush device suitable for wafer scrubbing according to claim 1 is characterized in that: The extended docking device includes a connecting seat, a limiting groove is arranged on the connecting seat, a fixing rod is inserted in the limiting groove, the roller brush is installed on the fixing rod, a fixing component is threadedly connected to the front end of the fixing rod, and the roller brush and the fixing rod are in a relatively fixed state.

6. The rolling brush device suitable for wafer scrubbing according to claim 5, characterized in that: The tail end of the fixing rod is provided with an expansion end head, the expansion end head is inserted into the limiting groove, the expansion end head and the limiting groove are interference fit, or the expansion end head and the limiting groove are locked by screws.

7. The rolling brush device suitable for wafer scrubbing according to claim 5, characterized in that: A plurality of contact mechanisms are arranged outside the fixing rod, and the contact mechanisms are anti-slip grooves.

8. The rolling brush device suitable for wafer scrubbing according to claim 1, characterized in that: The fixing component is a locking nut, which is provided with an internal threaded hole, and the internal threaded hole is threadedly connected to the extended docking device; the front end of the roller brush is provided with a threaded locking hole, the outer side of the locking nut is provided with a limited edge, the outer side of the limited edge is provided with an external thread, and the locking nut is threadedly connected to the threaded locking hole at the same time.

9. The rolling brush device suitable for wafer scrubbing according to claim 1, characterized in that: The roller brush comprises a roller body, and a plurality of brush head protrusions are distributed outside the roller, and the brush head protrusions are distributed alternately with each other.

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