Vacuum stabilizing device for cutting disc

Abstract

The utility model discloses a vacuum stabilizing device for a cutting disc, which comprises the cutting disc, a first vacuum generator and a water-gas separating device, the water-gas separating device is arranged between the cutting disc and the first vacuum generator, the water-gas separating device is provided with a container, and the container is provided with a water-gas inlet, an exhaust port and a water outlet. The steam inlet and the exhaust port are higher than the water outlet, and a liquid level indicator is arranged on the outer side of the container; the steam inlet is connected with the vacuum chuck through a pipeline, and the exhaust port is connected with a first negative pressure suction port of the first vacuum generator. The water-gas separation device is used for achieving separation of liquid and gas, cutting water is prevented from entering the first vacuum generator through small holes in the cutting disc in the wafer cutting process, the vacuum adsorption stability of the vacuum suction cup is guaranteed, and the wafer cutting quality is guaranteed. And a second vacuum generator is further arranged, so that water in the water-gas separation device can be rapidly discharged, and the water-gas separation effect and the water discharging effect of the water-gas separation device are improved.

Description

Technical Field

[0001] The utility model relates to the field of wafer or package cutting, and specifically discloses a vacuum stabilizing device for a cutting disc. Background Art

[0002] In the semiconductor manufacturing process, on a single wafer, there are usually hundreds to thousands or even tens of thousands of chips. In order to perform operations such as pasting and bonding on individual chips in subsequent packaging, each chip in the wafer needs to be separated. Wafer cutting is an essential process in the manufacturing process. The purpose of cutting is to cut each independent chip on the entire wafer through a high-speed rotating blade to prepare for subsequent processes.

[0003] Currently, mechanical diamond cutting is the mainstream technology in the wafer cutting process. During the cutting process, a vacuum is required to fix the wafer on the cutting disc. There are many fine holes on the cutting disc to adsorb the product for accurate cutting. Since surfactants, pure water, etc. are needed to clean the cutting residues during the cutting process, during the cutting process, the cutting water enters the vacuum generator through the holes on the cutting disc. When a small amount of water enters the vacuum, the water will be discharged through the exhaust port; when the water inflow exceeds the processing capacity of the vacuum generator, water droplets or ice crystals (when the temperature is too low) may condense at the vacuum port, resulting in unstable vacuum, and in severe cases, it may cause batch scrapping.

[0004] After the cut wafer is divided into independent chips and processed into independent products according to the product model and function requirements, the same problem will also occur during the cutting of the product package. Once the vacuum is unstable, batch cutting abnormalities will occur. Summary of the Utility Model

[0005] In order to solve the above technical problems, the utility model provides a vacuum stabilizing device for a cutting disc to ensure the stability of vacuum adsorption and fixation during the wafer cutting process.

[0006] The technical solution adopted by the utility model is: a vacuum stabilizing device for a cutting disc, including

[0007] a cutting disc having a porous platform and a vacuum chuck for adsorbing a wafer or a semiconductor product;

[0008] a first vacuum generator having a first air supply port, a first exhaust port, and a first negative pressure suction port, wherein the first air supply port is connected to a compressed air source to provide a stable vacuum environment for the cutting disc; and

[0009] A water-vapor separation device is installed between the cutting disc and the first vacuum generator. The water-vapor separation device has a container, and the container is provided with a water-vapor inlet, an exhaust port, and a drain port. The positions of the water-vapor inlet and the exhaust port are higher than the position of the drain port; the water-vapor inlet is connected to the vacuum suction cup through a pipeline, and the exhaust port is connected to the first negative pressure suction port of the first vacuum generator.

[0010] Further, inside the first vacuum generator, a first nozzle, a first negative pressure chamber, and a first receiving pipe are sequentially arranged along the flow direction of the compressed air; the first nozzle is located at the first air supply port end, and the inner diameter of the first nozzle gradually contracts along the air flow direction and forms a nozzle at the end; the first negative pressure chamber is connected to the first negative pressure suction port; the port of the first receiving pipe is the first exhaust port, and the compressed air is ejected through the first nozzle to form a jet flow towards the first receiving pipe.

[0011] Further, a second vacuum generator is arranged at the drain port of the water-vapor separation device. The second vacuum generator has a second air supply port, a second exhaust port, and a second negative pressure suction port. The second air supply port is connected to a compressed air source, and the second negative pressure suction port is connected to the drain port of the water-vapor separation device.

[0012] Further, a liquid level display meter is arranged on the outer side of the container.

[0013] Further, inside the second vacuum generator, a second nozzle, a second negative pressure chamber, and a second receiving pipe are sequentially arranged along the flow direction of the compressed air; the second nozzle is located at the second air supply port end, and the inner diameter of the second nozzle gradually contracts along the air flow direction and forms a nozzle at the end; the second negative pressure chamber is connected to the second negative pressure suction port; the port of the second receiving pipe is the second exhaust port, and the compressed air is ejected through the second nozzle to form a jet flow towards the second receiving pipe.

[0014] Further, a liquid level alarm is arranged inside the container.

[0015] Further, the liquid level alarm includes a non-magnetic guide rod, a floating switch device, a wire, an alarm, a power supply, and a limit structure. The non-magnetic guide rod is fixed to the container, and the top end of the non-magnetic guide rod is connected to the limit mechanism; the alarm is connected to the power supply by a wire. The wire has two connectors, and the connectors are fixedly installed on the limit mechanism and protrude from the bottom surface of the limit mechanism; the floating switch device includes a float and a switch. The float is slidably and cooperatively connected to the non-magnetic guide rod, the switch is fixedly connected to the float and protrudes from the top surface of the float, and the switch is arranged corresponding to the connector.

[0016] Furthermore, the vertical distance between the bottom surface of the joint and the extension line of the bottom edge of the exhaust port is less than the height of the floating switch device.

[0017] The beneficial effects of the present utility model are as follows: By using a water-gas separation device, the separation of liquid and gas is achieved, avoiding the entry of cutting water into the first vacuum generator through the small holes on the cutting disc during the wafer cutting process, ensuring the stability of the vacuum adsorption of the vacuum chuck, and guaranteeing the wafer cutting quality.

[0018] A second vacuum generator is provided to enable the rapid discharge of water in the water-gas separation device, improving the water-gas separation effect and drainage effect of the water-gas separation device.

[0019] A liquid level alarm is provided, which plays a reminder role when the drainage function of the water-gas separation device is affected, facilitating the timely troubleshooting and further ensuring the stability of the vacuum adsorption of the vacuum chuck. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 FIG. is a schematic structural diagram of the first embodiment of the vacuum stability device for a cutting disc according to the present utility model;

[0021] Figure 2 FIG. is an internal structural diagram of the first vacuum generator 2 in the first embodiment of the present utility model;

[0022] Figure 3 FIG. is a schematic structural diagram of the second embodiment of the vacuum stability device for a cutting disc according to the present utility model;

[0023] Figure 4 FIG. is an internal structural diagram of the second vacuum generator 4 in the second embodiment of the present utility model;

[0024] Figure 5 FIG. is a schematic structural diagram of the fourth embodiment of the vacuum stability device for a cutting disc according to the present utility model;

[0025] Figure 6 FIG. is a structural diagram of the liquid level alarm 32 in the fourth embodiment of the present utility model;

[0026] Figure 7 FIG. is a schematic structural diagram of the fifth embodiment of the vacuum stability device for a cutting disc according to the present utility model.

[0027] In the figure, 1 - cutting disc, 11 - porous platform, 12 - vacuum chuck;

[0028] 2 - first vacuum generator, 21 - first air supply port, 22 - first exhaust port, 23 - first negative pressure suction port 23, 24 - first nozzle, 25 - first negative pressure chamber, 26 - first receiving pipe;

[0029] 3 - Water-vapor separation device, 31 - Container, 311 - Water-vapor inlet, 312 - Exhaust port, 313 - Drain port, 32 - Liquid level alarm, 321 - Non-magnetic guide rod, 322 - Floating switch device, 3221 - Float, 3222 - Switch, 323 - Wire, 3231 - Connector, 324 - Alarm, 325 - Power supply, 326 - Limit structure; 33 - Liquid level display meter;

[0030] 4 - Second vacuum generator, 41 - Second air supply port, 42 - Second exhaust port, 43 - Second negative pressure suction port, 44 - Second nozzle, 45 - Second negative pressure chamber, 46 - Second receiving pipe. Specific implementation mode

[0031] The present utility model will be further described below in conjunction with the drawings and embodiments. The specific embodiments described below only show the specific ways of using the embodiments, and are not used to limit the scope of the embodiments or claims.

[0032] First embodiment

[0033] Reference Figure 1 , this embodiment provides a feasible implementation mode. A vacuum stability device for a cutting disc includes a cutting disc 1, a first vacuum generator 2 and a water-vapor separation device 3.

[0034] The cutting disc 1 has a porous platform 11 and a vacuum chuck 12, and the vacuum chuck 12 is used to adsorb wafers or semiconductor products. The vacuum chuck 12 is sequentially connected to the water-vapor separation device 3 and the first vacuum generator 2 through pipelines.

[0035] Reference Figure 2, the first vacuum generator 2 is provided with a first air supply port 21, a first exhaust port 22, and a first negative pressure suction port 23, but not limited thereto. Inside the first vacuum generator 2, a first nozzle 24, a first negative pressure chamber 25, and a first receiving pipe 26 are sequentially arranged along the direction of compressed air flow; the first nozzle 24 is located at the first air supply port 21 end, and the inner diameter of the first nozzle 24 gradually contracts along the air flow direction and forms a nozzle at the end; the first negative pressure chamber 25 is connected to the first negative pressure suction port 23; the port of the first receiving pipe 26 is the first exhaust port 22. The first air supply port 21 is connected to a compressed air source, and the first negative pressure suction port 23 is connected to the water-air separation device 3. The first air supply port 21 sprays compressed air through the first nozzle 24 towards the first receiving pipe 26. When the air pressure at the first air supply port 21 is higher than a specific value, the first nozzle 24 emits a supersonic high-speed jet. Due to the viscosity of the gas, the high-speed jet entrains the gas in the first negative pressure chamber 25 and the first receiving pipe 26, causing a very high vacuum degree to be formed in the first negative pressure chamber 25 and the first receiving pipe 26. Then, the gas in the vacuum chuck 12 is sucked in through the first negative pressure suction port 23, mixed with the high-speed jet and flows out, providing a stable vacuum environment for the cutting disc 1. The water-air separation device 3 is connected between the cutting disc 1 and the first vacuum generator 2. The water-air separation device 3 has a container 31. The container 31 is provided with a water-air inlet 311, an exhaust port 312, and a drain port 313. The positions of the water-air inlet 311 and the exhaust port 312 are set higher than the position of the drain port 313; a liquid level display 33 is arranged on the outer side of the container 31; the water-air inlet 311 is connected to the vacuum chuck 12 through a pipeline, and the exhaust port 312 is connected to the first negative pressure suction port 23 of the first vacuum generator 2.

[0036] Second Embodiment

[0037] Reference Figure 3 , based on the first embodiment, this embodiment provides a feasible implementation. A vacuum stability device for a cutting disc includes a cutting disc 1, a first vacuum generator 2, a water-air separation device 3, and a second vacuum generator 4.

[0038] Reference Figure 4, the second vacuum generator 4 is provided with a second air supply port 41, a second exhaust port 42 and a second negative pressure suction port 43. The second air supply port 42 is connected to a compressed air source, and the second negative pressure suction port 43 is connected to the drain port 313 of the water-air separation device 3. Inside the second vacuum generator 4, a second nozzle 44, a second negative pressure chamber 45 and a second receiving pipe 46 are sequentially arranged along the flowing direction of the compressed air. The second nozzle 44 is located at the end of the second air supply port 41. The inner diameter of the second nozzle 44 gradually shrinks along the flowing direction of the air flow and forms a nozzle at the end. The second negative pressure chamber 45 is connected to the second negative pressure suction port 43. The port of the second receiving pipe 46 is the second exhaust port 42. The second air supply port 41 is connected to a compressed air source, and the second negative pressure suction port 43 is connected to the drain port 313 of the water-air separation device 3. The second air supply port 41 sprays the compressed air through the second nozzle 44 towards the second receiving pipe 46. When the air pressure at the second air supply port 41 is higher than a specific value, the second nozzle 44 ejects a supersonic high-speed jet. Due to the viscosity of the gas, the high-speed jet entrains the gas in the second negative pressure chamber 45 and the second receiving pipe 46, causing a very high vacuum degree to be formed in the second negative pressure chamber 45 and the second receiving pipe 46. The liquid in the container 31 of the water-air separation device 3 is sucked into the second negative pressure chamber 45 and is quickly discharged under the drive of the strong air flow.

[0039] Third Embodiment

[0040] Reference Figure 5 , based on the first embodiment, this embodiment provides a feasible implementation manner. A vacuum stability device for a cutting disc includes a cutting disc 1, a first vacuum generator 2 and a water-air separation device 3. The water-air separation device 3 includes a container 31, a liquid level display 33 and a liquid level alarm 32.

[0041] Reference Figure 6 , the liquid level alarm 32 includes a non-magnetic guide rod 321, a floating switch device 322, a wire 323, an alarm 324, a power supply 325 and a limit structure 326. The non-magnetic guide rod 321 is fixed to the container 31, and the top end of the non-magnetic guide rod 321 is connected to the limit mechanism 326. The alarm 324 is connected to the power supply 325 by the wire 323. The wire 323 has two connectors 3231, and the connectors 3231 are fixedly installed on the limit mechanism 326 and protrude from the bottom surface of the limit mechanism 326. The floating switch device 322 includes a float 3221 and a switch 3222. The float 3221 is slidably and cooperatively connected to the non-magnetic guide rod 321. The switch 3222 is fixedly connected to the float 3221 and protrudes from the top surface of the float 3221. The switch 3222 is arranged corresponding to the connector 3231. The vertical distance between the bottom surface of the connector 3231 and the extension line of the bottom edge of the exhaust port 312 is less than the height of the floating switch device 322.

[0042] When the solution in the container 31 rises, the floating switch device 322 moves upward along the non-magnetic guide rod 321 until the switch 3222 contacts the joint 3231, the circuit is turned on, and the alarm 324 emits an alarm reminder.

[0043] Fourth Embodiment

[0044] As Figure 7 shown, based on the second embodiment, this embodiment provides a feasible implementation. A vacuum stabilizing device for a cutting disc includes a cutting disc 1, a first vacuum generator 2, a water-vapor separation device 3, and a second vacuum generator 4. The water-vapor separation device 3 includes a container 31, a liquid level display 33, and a liquid level alarm 32.

[0045] The liquid level alarm 32 includes a non-magnetic guide rod 321, a floating switch device 322, a wire 323, an alarm 324, a power supply 325, and a limit structure 326. The non-magnetic guide rod 321 is fixed to the container 31, and the top end of the non-magnetic guide rod 321 is connected to the limit mechanism 326. The alarm 324 is connected to the power supply 325 by the wire 323. The wire 323 has two joints 3231, and the joints 3231 are fixedly installed on the limit mechanism 326 and protrude from the bottom surface of the limit mechanism 326. The floating switch device 322 includes a float 3221 and a switch 3222. The float 3221 is slidably connected to the non-magnetic guide rod 321, and the switch 3222 is fixedly connected to the float 3221 and protrudes from the top surface of the float 3221. The switch 3222 is arranged corresponding to the joint 3231. The vertical distance between the bottom surface of the joint 3231 and the extension line of the bottom edge of the exhaust port 312 is less than the height of the floating switch device 322.

[0046] When the solution in the container 31 rises, the floating switch device 322 moves upward along the non-magnetic guide rod 321 until the switch 3222 contacts the joint 3231, the circuit is turned on, and the alarm 324 emits an alarm reminder.

[0047] The above-mentioned alarm 324 can be a sound alarm, a photoelectric alarm, or an audible and visual combined alarm, which can be selected according to actual needs.

Claims

1. A vacuum stabilization device for a cutting disc, comprising: a cutting disc having a porous platform and a vacuum suction cup; The first vacuum generator has a first air supply port, a first exhaust port and a first negative pressure suction port, wherein the first air supply port is connected to a compressed air source; and is characterized in that: Also includes A water vapor separation device is installed between the cutting disk and the first vacuum generator, and the water vapor separation device has a container, and the container is provided with a water vapor inlet, an exhaust port and a drain port, and the positions of the water vapor inlet and the exhaust port are higher than the position of the drain port; the water vapor inlet is connected to the vacuum suction cup through a pipeline, and the exhaust port is connected to the first negative pressure suction port of the first vacuum generator.

2. A vacuum stabilization device for a cutting disc according to claim 1, characterized in that: The first vacuum generator is provided with a first nozzle, a first negative pressure chamber and a first receiving pipe in sequence along the flow direction of compressed air; the first nozzle is located at the end of the first air supply port, and the inner diameter of the first nozzle gradually shrinks along the flow direction of the airflow to form a nozzle at the end; the first negative pressure chamber is connected to the first negative pressure suction port; The port of the first receiving tube is the first exhaust port, and the compressed air is ejected through the first nozzle to form a jet that is ejected toward the first receiving tube.

3. A vacuum stabilization device for a cutting disc according to claim 1, characterized in that: A second vacuum generator is arranged at the drain port of the water-gas separation device, and the second vacuum generator has a second air supply port, a second exhaust port and a second negative pressure suction port. The second air supply port is connected to a compressed air source, and the second negative pressure suction port is connected to the drain port of the water-gas separation device.

4. A vacuum stabilization device for a cutting disc according to claim 3, characterized in that: A liquid level indicator is arranged on the outer side of the container.

5. A vacuum stabilization device for a cutting disc according to claim 3, characterized in that: The second vacuum generator is provided with a second nozzle, a second negative pressure chamber and a second receiving pipe in sequence along the flow direction of the compressed air; the second nozzle is located at the second air supply port end, the inner diameter of the second nozzle gradually shrinks along the flow direction of the airflow, and a nozzle is formed at the end; the second negative pressure chamber is connected to the second negative pressure suction port; The port of the second receiving tube is the second exhaust port, and the compressed air is ejected through the second nozzle to form a jet that is ejected toward the second receiving tube.

6. A vacuum stabilization device for a cutting disc according to claim 1, 2, 3, 4 or 5, characterized in that: A liquid level alarm is arranged in the container.

7. A vacuum stabilization device for a cutting disc according to claim 6, characterized in that: The liquid level alarm includes a non-magnetic guide rod, a floating switch device, a wire, an alarm, a power supply and a limiting structure. The non-magnetic guide rod is fixed to the container, and the top end of the non-magnetic guide rod is connected to the limiting mechanism; the alarm is connected to the power supply by a wire, and the wire has two connectors, which are fixedly mounted on the limiting mechanism and protrude from the bottom surface of the limiting mechanism.

8. A vacuum stabilization device for a cutting disc according to claim 7, characterized in that: The floating switch device comprises a float and a switch. The float is connected to the non-magnetic guide rod in a sliding manner. The switch is fixedly connected to the float and protrudes from the top surface of the float. The switch is arranged correspondingly to the joint.

9. A vacuum stabilization device for a cutting disc according to claim 7, characterized in that: The vertical distance between the bottom surface of the joint and the extension line of the bottom edge of the exhaust port is smaller than the height of the floating switch device.

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