Efficient cleaning device

Abstract

The utility model discloses an efficient cleaning device, and relates to the technical field of semiconductor substrate material manufacturing, and the efficient cleaning device comprises a cleaning tank, a swing rod, a support, a swing driver and a linear driver; a liquid medicine cavity for accommodating cleaning liquid medicine is formed in the cleaning tank; an opening communicated with the liquid medicine cavity is formed in the cleaning tank; the bracket is movably mounted in the liquid medicine cavity; the first face of the swing rod is provided with a plurality of jigs used for fixing substrate slices. A rotating shaft is arranged in the center of a second surface opposite to the first surface on the oscillating bar. The swing rod is driven by the swing driver to swing left and right in the cleaning tank, and meanwhile, the support is driven by the linear driver to linearly move in the cleaning tank, so that liquid medicine sufficiently flushes a substrate slice of a jig on the swing rod back and forth, the substrate slice is cleaned more thoroughly, and the cleaning effect and the cleaning efficiency are effectively improved.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor substrate material manufacturing, and particularly to an efficient cleaning device. Background Art

[0002] Indium phosphide substrates have a wide application market in the fields of radio frequency devices such as the manufacture of high-frequency and high-power devices, optical fiber communication, wireless transmission, and radio astronomy.

[0003] In the manufacture of indium phosphide substrate materials, the polished indium phosphide substrate wafers need to be cleaned. Immersion cleaning is a relatively common cleaning method for indium phosphide substrate wafers. However, the existing immersion cleaning methods are mostly static immersion in the cleaning liquid, and such cleaning efficiency is relatively low. Therefore, there is an urgent need to provide a new solution to solve the above problems. Summary of the Utility Model

[0004] In view of this, the purpose of this application is to provide an efficient cleaning device to solve the technical problem of low cleaning efficiency of the existing static immersion cleaning method.

[0005] To achieve the above technical purpose, this application provides an efficient cleaning device, including a cleaning tank, a swing rod, a bracket, a swing driver, and a linear driver;

[0006] A liquid medicine chamber for accommodating cleaning liquid medicine is provided in the cleaning tank;

[0007] An opening communicating with the liquid medicine chamber is provided on the cleaning tank;

[0008] The bracket is movably installed in the liquid medicine chamber;

[0009] A plurality of jigs for fixing the substrate wafers are provided on the first surface of the swing rod;

[0010] A rotating shaft is provided at the center of the second surface of the swing rod opposite to the first surface;

[0011] The swing rod is rotatably installed on the bracket through the rotating shaft;

[0012] The swing driver is installed on the bracket and is connected to the rotating shaft for driving the swing rod to swing around the rotating shaft;

[0013] The linear driver is connected to the bracket for driving the bracket to move linearly in the liquid medicine chamber.

[0014] Further, a closed installation cavity is provided inside the bracket;

[0015] The swing driver is installed in the installation cavity.

[0016] Further, there are multiple of the jigs, which are distributed at stepped intervals along the length direction of the swing rod.

[0017] Further, an installation inclined surface is provided on the bracket;

[0018] The swing rod is parallel to the installation inclined surface, and the rotating shaft is rotationally connected to the installation inclined surface.

[0019] Further, the bracket includes a triangular frame;

[0020] The triangular frame is provided with a through cavity;

[0021] Side sealing plates for closing the through cavity are provided on both sides of the triangular frame;

[0022] An installation cavity is formed between the two side sealing plates and the through cavity.

[0023] Further, a wiring pipe is provided at the top of the triangular frame for the power supply line to pass through.

[0024] Further, the swing drive is a rotary motor;

[0025] The output shaft of the swing drive is connected to the rotating shaft through a coupling.

[0026] Further, the linear drive is a lead screw slider;

[0027] The slider on the linear drive is connected to the bracket.

[0028] Further, a card slot for inserting the lining film is provided on the jig.

[0029] Further, the jig has a U-shaped block-like structure;

[0030] The card slot is opened at both ends of the top surface of the jig.

[0031] As can be seen from the above technical solutions, the efficient cleaning device designed in this application drives the swing rod to swing left and right in the cleaning tank through the swing drive, and at the same time drives the bracket to move linearly in the cleaning tank through the linear drive, so that the liquid medicine fully flushes back and forth on the lining film of the jig on the swing rod, the cleaning of the lining film is more thorough, and the cleaning effect and cleaning efficiency are effectively improved. Description of the Drawings

[0032] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0033] Figure 1 A perspective view of an efficient cleaning device provided in the present application;

[0034] Figure 2 A perspective view of an efficient cleaning device provided in the present application without a cleaning tank;

[0035] Figure 3 A perspective view of an efficient cleaning device provided in the present application without a cleaning tank and a linear actuator;

[0036] Figure 4 A schematic diagram of the cooperation structure of the fixture and the wafer substrate in an efficient cleaning device provided in the present application;

[0037] In the figure: 1. Cleaning tank; 11. Liquid medicine chamber; 2. Bracket; 21. Triangular frame; 22. Installation inclined surface; 3. Swing rod; 4. Fixture; 41. Card slot; 5. Linear actuator; 51. Slide block; 52. Fixed rod; 6. Swing actuator; 7. Wafer substrate. Detailed implementation manners

[0038] The following will clearly and completely describe the technical solutions of the embodiments of the present application in conjunction with the accompanying drawings. Obviously, the described embodiments are some, rather than all, of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the embodiments of the present application.

[0039] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the embodiments of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0040] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0041] The embodiments of the present application disclose an efficient cleaning device.

[0042] Please refer to Figure 1 and Figure 2 One embodiment of an efficient cleaning device provided in the embodiments of the present application includes:

[0043] A cleaning tank 1, a swing rod 3, a bracket 2, a swing driver 6, and a linear driver 5.

[0044] A liquid medicine cavity 11 for containing cleaning liquid medicine is provided in the cleaning tank 1. An opening communicating with the liquid medicine cavity 11 is provided on the top of the cleaning tank 1 to facilitate the loading and unloading of the substrate wafer 7. In order to supplement or discharge the liquid medicine in the liquid medicine cavity 11, corresponding liquid replenishing ports and liquid discharging ports can be further provided on the cleaning tank 1, and specific limitations are not made.

[0045] The bracket 2 is movably installed in the liquid medicine cavity 11.

[0046] A plurality of fixtures 4 for fixing the substrate wafer 7 are provided on the first surface of the swing rod 3. A rotating shaft (not shown in the figure) is provided at the center of the second surface of the swing rod 3 opposite to the first surface. The swing rod 3 is rotatably installed on the bracket 2 through the rotating shaft.

[0047] The swing driver 6 is installed on the bracket 2 and connected to the rotating shaft for driving the swing rod 3 to swing around the rotating shaft; the linear driver 5 is connected to the bracket 2 for driving the bracket 2 to move linearly in the liquid medicine cavity 11. This linear motion is a motion along the horizontal linear direction. With the front facing the front surface of the fixture 4, the swing driver 6 also drives the swing rod 3 to swing left and right around the rotating shaft, and the linear driver 5 can drive the bracket 2 to move linearly left and right.

[0048] The efficient cleaning device designed in the present application drives the swing rod 3 to swing left and right in the cleaning tank 1 through the swing driver 6, and at the same time drives the bracket 2 to move linearly in the cleaning tank 1 through the linear driver 5, so that the liquid medicine fully flushes back and forth on the substrate wafer 7 of the fixture 4 on the swing rod, and the cleaning of the substrate wafer 7 is more thorough, effectively improving the cleaning effect and cleaning efficiency.

[0049] The fixture 4, the swing rod 3, and the cleaning tank 1 in the present application can all be prepared from PEEK materials.

[0050] The above is the first embodiment of an efficient cleaning device provided by the present application. The following is the second embodiment of an efficient cleaning device provided by the present application. For details, please refer to Figures 1 to 4 .

[0051] Based on the solution of the above first embodiment:

[0052] Furthermore, a closed installation cavity is provided inside the bracket 2, and the swing driver 6 is installed in the installation cavity to achieve an integrated installation, making the overall structure more compact.

[0053] Furthermore, as Figures 1 to 3 shown, preferably, there are multiple fixtures 4 to achieve the cleaning operation of multiple substrate wafers 7 at one time, improving the efficiency; the multiple fixtures 4 are distributed at stepped intervals along the length direction of the swing rod 3. The stepped interval distribution design can make the adjacent substrate wafers 7 staggered, ensuring that each substrate wafer 7 can fully contact the cleaning liquid.

[0054] Furthermore, as Figure 2 and Figure 3 shown, an installation inclined surface 22 is provided on the bracket 2, the swing rod 3 is parallel to the installation inclined surface 22, and the rotating shaft is rotationally connected to the installation inclined surface 22. The swing rod 3 is integrally inclined. In this way, the required length / height of the multiple fixtures 4 distributed at stepped intervals is less than the required length / height of the multiple fixtures 4 distributed at stepped intervals when the swing rod 3 is vertically arranged, which is beneficial to optimizing the space occupation in the height direction.

[0055] Furthermore, as Figure 2 and Figure 3 shown, for the structural design of the bracket 2, it is designed to include a triangular frame 21. The triangular frame 21 is provided with a through cavity. On both sides of the triangular frame 21, there are side sealing plates (not shown in the figure) for closing the through cavity. An installation cavity is formed between the two side sealing plates and the through cavity.

[0056] Furthermore, a wiring pipe (not shown in the figure) is provided at the top of the triangular frame 21 for the power line to pass through to facilitate wiring.

[0057] Furthermore, the swing driver 6 can be a rotary motor with forward and reverse functions, such as a servo motor. Taking this as an example, the output shaft of the swing driver 6 is connected to the rotating shaft through a coupling.

[0058] Furthermore, as Figure 1 and Figure 2 shown, the linear driver 5 is a lead screw slide table, and the slider 51 on the linear driver 5 is connected to the bracket 2. The linear driver 5 is fixed on the outer side wall of the cleaning tank 1 through a fixing rod 52.

[0059] Furthermore, as Figure 4As shown in the figure, in order to fix the column lining film 7, a card slot 41 for inserting the lining film 7 is provided on the jig 4.

[0060] Furthermore, as Figure 4 shown, the jig 4 is designed as a U-shaped block structure. Correspondingly, the card slots 41 are opened at both ends of the top surface of the jig 4. Two card slots 41 are used to limit and fix the lining film 7. This design has a simple structure, saves materials, and can play a good fixing role. As for the fixing method between the jig 4 and the swing rod 3, it can be integrally formed, glued with glue, or connected and fixed through a connecting piece, and no specific limitation is made.

[0061] Working principle:

[0062] 1. The swing driver 6 drives the swing rod 3 to rotate until both sides of the swing rod 3 are parallel to both sides of the bracket 2;

[0063] 2. Manually install the lining film 7 into the jig 4 on the swing rod 3;

[0064] 3. Add cleaning liquid medicine into the cleaning tank 1;

[0065] 4. The swing driver 6 drives the swing rod 3 to swing reciprocally by 360°, so as to drive the jig 4 and the lining film 7 to swing reciprocally by 60° in the cleaning liquid medicine. At the same time, the linear driver 5 drives the bracket 2 to move left and right reciprocally to realize the cleaning operation.

[0066] The above has introduced in detail an efficient cleaning device provided by the present application. For those of ordinary skill in the art, according to the idea of the embodiments of the present application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A high-efficiency cleaning device, characterized in that: It comprises a cleaning tank (1), a swing arm (3), a bracket (2), a swing drive (6) and a linear drive (5); The cleaning tank (1) is provided with a liquid chamber (11) for containing a cleaning liquid; The cleaning tank (1) is provided with an opening communicating with the liquid medicine chamber (11); The support (2) is movably mounted in the drug liquid chamber (11); The first surface of the swing rod (3) is provided with a plurality of jigs (4) for fixing the substrate sheet (7); A rotating shaft is provided at the center of a second surface of the swing rod (3) opposite to the first surface; The swing rod (3) is rotatably mounted on the bracket (2) via the rotating shaft; The swing driver (6) is mounted on the bracket (2) and connected to the rotating shaft, and is used to drive the swing rod (3) to swing around the rotating shaft; The linear drive (5) is connected to the support (2) and is used to drive the support (2) to move linearly in the drug liquid chamber (11).

2. A high-efficiency cleaning device according to claim 1, characterized in that: The bracket (2) is provided with a closed installation cavity; The swing drive (6) is installed in the installation cavity.

3. A high-efficiency cleaning device according to claim 1, characterized in that: There are a plurality of jigs (4), which are distributed at intervals in a stepped manner along the length direction of the swing rod (3).

4. A high-efficiency cleaning device according to claim 3, characterized in that: The bracket (2) is provided with a mounting inclined surface (22); The swing rod (3) is parallel to the installation inclined surface (22), and the rotating shaft is rotationally connected to the installation inclined surface (22).

5. A high-efficiency cleaning device according to claim 4, characterized in that: The support (2) comprises a triangular frame (21); The triangular frame (21) is provided with a central through cavity; Side sealing plates for sealing the central through cavity are provided on both sides of the triangular frame (21); The installation cavity is formed between the two side sealing plates and the central through cavity.

6. A high-efficiency cleaning device according to claim 5, characterized in that: A wiring tube is provided on the top of the triangular frame (21) for the power line to pass through.

7. The high-efficiency cleaning device according to claim 1, characterized in that: The swing drive (6) is a rotary motor; The output shaft of the swing drive (6) is connected to the rotating shaft via a coupling.

8. The high-efficiency cleaning device according to claim 1, characterized in that: The linear drive (5) is a screw slide; The slider (51) on the linear drive (5) is connected to the bracket (2).

9. The high-efficiency cleaning device according to claim 1, characterized in that: The jig (4) is provided with a slot (41) for inserting the substrate sheet (7).

10. The high-efficiency cleaning device according to claim 9, characterized in that: The jig (4) is a U-shaped block structure; The clamping slots (41) are disposed at two ends of the top surface of the fixture (4).

Images