Swing cleaning device

Abstract

The utility model discloses a swing cleaning device, which relates to the technical field of semiconductor substrate material manufacturing, and comprises a cleaning tank with a liquid medicine cavity, a swing rod, a bracket and a driver, the swing rod is rotationally mounted on the bracket through a rotating shaft; the driver is used for driving the swing rod to swing. The driver drives the swing rod to swing left and right in the cleaning tank, so that the liquid medicine flushes the substrate slice of the jig on the swing rod back and forth, the cleaning of the substrate slice is more thorough, and the cleaning effect and the cleaning efficiency are improved. Moreover, the support adopts the design that a closed mounting cavity is formed inside, so that the driver is integrally mounted conveniently, and the structure is more compact; and moreover, the bracket adopts a detachable mounting design, can be integrally mounted or taken out, and is more convenient to maintain.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor substrate material manufacturing, and particularly to a swing cleaning device. Background Art

[0002] Indium phosphide substrates have a wide application market in the fields of radio frequency devices such as manufacturing high-frequency and high-power devices, optical fiber communication, wireless transmission, and radio astronomy.

[0003] In the manufacturing of indium phosphide substrate materials, the polished indium phosphide substrate wafers need to be cleaned. Immersion cleaning is a relatively common cleaning method for indium phosphide substrate wafers. However, the existing immersion cleaning methods mostly involve static immersion in the cleaning liquid, resulting in relatively low cleaning efficiency. Therefore, there is an urgent need to provide a new solution to solve the above problems. Summary of the Utility Model

[0004] In view of this, the purpose of this application is to provide a swing cleaning device to solve the technical problem of low cleaning efficiency of the existing static immersion cleaning method.

[0005] To achieve the above technical purpose, this application provides a swing cleaning device, including a cleaning tank, a swing rod, a bracket, and a driver;

[0006] A liquid medicine chamber for accommodating cleaning liquid medicine is provided inside the cleaning tank;

[0007] An opening communicating with the liquid medicine chamber is provided on the cleaning tank;

[0008] The bracket is detachably installed in the liquid medicine chamber, and a closed installation cavity is provided inside it;

[0009] A plurality of jigs for fixing the substrate wafer are provided on the first surface of the swing rod;

[0010] A rotating shaft is provided at the center of the second surface of the swing rod opposite to the first surface;

[0011] The swing rod is rotatably installed on the bracket through the rotating shaft;

[0012] The driver is installed in the installation cavity and is connected to the rotating shaft for driving the swing rod to swing around the rotating shaft.

[0013] Further, a first plug-in part is provided on an inner side wall of the installation cavity;

[0014] A second plug-in part that is in plug-in fit with the first plug-in part is provided on the bracket.

[0015] Further, the first plug-in part is a limit guide rail, and the second plug-in part is a limit groove for inserting the limit guide rail;

[0016] Alternatively, the first plugging part is a limiting groove, and the second plugging part is a limiting guide rail inserted into the limiting groove.

[0017] Furthermore, there are multiple fixtures, which are distributed at stepped intervals along the length direction of the swing rod.

[0018] Furthermore, an installation inclined surface is provided on the bracket;

[0019] The swing rod is parallel to the installation inclined surface, and the rotating shaft is rotationally connected to the installation inclined surface.

[0020] Furthermore, the bracket includes a triangular frame;

[0021] The triangular frame is provided with a through cavity;

[0022] Side sealing plates for closing the through cavity are provided on both sides of the triangular frame;

[0023] An installation cavity is formed between the two side sealing plates and the through cavity.

[0024] Furthermore, a wiring pipe is provided at the top of the triangular frame for the power cord to pass through.

[0025] Furthermore, the driver is a rotary motor;

[0026] The output shaft of the driver is connected to the rotating shaft through a coupling.

[0027] Furthermore, a card slot for inserting the substrate wafer is provided on the fixture.

[0028] Furthermore, the fixture has a U-shaped block-like structure;

[0029] The card slot is opened at both ends of the top surface of the fixture.

[0030] It can be seen from the above technical solutions that the designed swing cleaning device of the present application drives the swing rod to swing left and right in the cleaning tank through the driver, so that the liquid medicine forms a back-and-forth flushing on the substrate wafers of the fixtures on the swing rod, the cleaning of the substrate wafers is more thorough, and the cleaning effect and efficiency are improved. Moreover, the bracket adopts a design with a closed installation cavity inside, which is convenient for the integrated installation of the driver and the structure is more compact; furthermore, the bracket adopts a detachable installation design, which can be installed or taken out as a whole, and the maintenance is more convenient. Description of the Drawings

[0031] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0032] Figure 1 It is a three-dimensional view of a swing cleaning device provided in the present application;

[0033] Figure 2 It is a schematic structural view of the cooperation between the bracket and the swing rod of a swing cleaning device provided in the present application;

[0034] Figure 3 It is a schematic structural view of the cooperation between the fixture and the substrate wafer of a swing cleaning device provided in the present application;

[0035] In the figure: 1. Cleaning tank; 11. Liquid medicine chamber; 2. Bracket; 20. Installation inclined plane; 21. Triangular frame; 3. Swing rod; 4. Fixture; 5. Driver; 6. Substrate wafer. Detailed implementation manners

[0036] The following will clearly and completely describe the technical solutions of the embodiments of the present application with reference to the drawings. Obviously, the described embodiments are some, rather than all, of the embodiments of the present application. Based on the embodiments in the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope protected by the embodiments of the present application.

[0037] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0038] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0039] The embodiments of the present application disclose a swing cleaning device.

[0040] Please refer to Figure 1 , an embodiment of a swing cleaning device provided in the embodiments of the present application includes:

[0041] A cleaning tank 1, a swing rod 3, a bracket 2, and a driver 5.

[0042] A liquid medicine chamber 11 for containing cleaning liquid medicine is provided in the cleaning tank 1, and an opening communicating with the liquid medicine chamber 11 is provided at the top of the cleaning tank 1; to facilitate the loading and unloading of the substrate wafer 6. In order to facilitate the replenishment or discharge of the liquid medicine in the liquid medicine chamber 11, corresponding liquid replenishing ports and liquid discharging ports can be further provided on the cleaning tank 1, and specific limitations are not made.

[0043] The bracket 2 is detachably installed in the liquid medicine chamber 11, and a closed installation cavity is provided inside it.

[0044] A plurality of jigs 4 for fixing the substrate wafer 6 are provided on the first surface of the swing rod 3, and a rotating shaft (not shown in the figure) is provided at the center of the second surface opposite to the first surface of the swing rod 3; the swing rod 3 is rotatably installed on the bracket 2 through the rotating shaft.

[0045] The driver 5 is installed in the installation cavity and is connected to the rotating shaft for driving the swing rod 3 to swing around the rotating shaft.

[0046] In the swing cleaning device designed by the present application, the driver 5 drives the swing rod 3 to swing left and right in the cleaning tank 1, so that the liquid medicine forms a back-and-forth flushing on the substrate wafer 6 of the jig 4 on the swing rod, and the cleaning of the substrate wafer 6 is more thorough, improving the cleaning effect and cleaning efficiency. Moreover, the bracket 2 adopts a design with a closed installation cavity inside, which is convenient for the integrated installation of the driver 5 and the structure is more compact; furthermore, the bracket 2 adopts a detachable installation design, which can be integrally installed or taken out, and the maintenance is more convenient.

[0047] The swing rod 3, the jig 4, and the cleaning tank 1 in the present application can all be prepared from PEEK materials, and no limitations are made.

[0048] The above is Embodiment 1 of a swing cleaning device provided by the embodiments of the present application. The following is Embodiment 2 of a swing cleaning device provided by the embodiments of the present application. For details, please refer toFigures 1 to 3 。

[0049] Based on the solution of the above-mentioned first embodiment:

[0050] Furthermore, a first insertion part (not shown in the figure) is provided on an inner side wall of the installation cavity, and a second insertion part (not shown in the figure) that is inserted and cooperates with the first insertion part is provided on the bracket 2; by using the insertion and cooperation of the first insertion part and the second insertion part, the quick-disassembly cooperation between the bracket 2 and the cleaning tank 1 is realized, and the installation and disassembly are more convenient.

[0051] Furthermore, for the first insertion part, specifically, it can be a limit guide rail. Correspondingly, the second insertion part is a limit groove for inserting the limit guide rail;

[0052] Of course, the first insertion part can be a limit groove, and correspondingly, the second insertion part is a limit guide rail inserted into the limit groove. Those skilled in the art can make appropriate variation designs based on this.

[0053] Furthermore, preferably, there are multiple fixtures 4 to realize the cleaning operation of multiple substrate wafers 6 at one time, improving the efficiency. The multiple fixtures 4 are designed to be distributed at stepped intervals along the length direction of the swing rod 3. The stepped interval distribution design can make the adjacent substrate wafers 6 staggered, ensuring that each substrate wafer 6 can fully contact the cleaning liquid.

[0054] Furthermore, as Figure 2 shown, the bracket 2 is provided with an installation inclined surface 20, the swing rod 3 is parallel to the installation inclined surface 20, and the rotating shaft is rotationally connected to the installation inclined surface 20. The whole swing rod 3 is inclined. In this way, the required length / height of the multiple fixtures 4 distributed at stepped intervals is less than the required length / height of the multiple fixtures 4 distributed at stepped intervals when the swing rod 3 is vertically arranged, which is beneficial to optimizing the space occupation in the height direction.

[0055] Furthermore, as Figure 1 and Figure 2 shown, for the structural design of the bracket 2, it is designed to include a triangular frame 21. The triangular frame 21 is provided with a through cavity. On both sides of the triangular frame 21, there are side sealing plates (not shown in the figure) for closing the through cavity. The two side sealing plates and the through cavity enclose an installation cavity.

[0056] Furthermore, a wiring pipe (not shown in the figure) is provided at the top of the triangular frame 21 for the power line to pass through to facilitate wiring.

[0057] Furthermore, the driver 5 can be a rotary motor with forward and reverse functions, such as a servo motor. Taking this as an example, the output shaft of the driver 5 is connected to the rotating shaft through a coupling.

[0058] Furthermore, as Figure 3As shown, in order to fix the substrate sheet 6, the fixture 4 is provided with a card slot for the substrate sheet 6 to be inserted.

[0059] Furthermore, the fixture 4 is designed as a U-shaped block structure. Correspondingly, the card slots are opened at both ends of the top surface of the fixture 4. Two card slots are used to limit and fix the substrate sheet 6. This design has a simple structure, saves materials, and can play a good fixing role. Regarding the fixing method between the fixture 4 and the swing rod 3, it can be integrally formed, glued with glue, or connected and fixed through a connecting piece, and no specific limitation is made.

[0060] Working principle:

[0061] 1. The driver 5 drives the swing rod 3 to rotate until both sides of the swing rod 3 are parallel to both sides of the bracket 2.

[0062] 2. Manually install the substrate sheet 6 into the fixture 4 on the swing rod 3.

[0063] 3. Add cleaning liquid medicine into the cleaning tank 1.

[0064] 4. The driver 5 drives the swing rod 3 to swing reciprocally by 360°, so as to drive the fixture 4 and the substrate sheet 6 to swing reciprocally by 60° in the cleaning liquid medicine, and the cleaning operation is realized.

[0065] The above has introduced in detail a swing cleaning device provided by the present application. For those of ordinary skill in the art, according to the idea of the embodiments of the present application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A swing cleaning device, characterized in that: It comprises a cleaning tank (1), a swing arm (3), a bracket (2) and a driver (5); The cleaning tank (1) is provided with a liquid chamber (11) for containing a cleaning liquid; The cleaning tank (1) is provided with an opening communicating with the liquid medicine chamber (11); The bracket (2) is detachably mounted in the liquid medicine chamber (11), and a closed mounting chamber is provided inside the bracket; The first surface of the swing rod (3) is provided with a plurality of jigs (4) for fixing the substrate sheet (6); A rotating shaft is provided at the center of a second surface of the swing rod (3) opposite to the first surface; The swing rod (3) is rotatably mounted on the bracket (2) via the rotating shaft; The driver (5) is installed in the installation cavity and connected to the rotating shaft, and is used to drive the swing rod (3) to swing around the rotating shaft.

2. A swing cleaning device according to claim 1, characterized in that: A first plug-in portion is provided on an inner side wall of the installation cavity; The bracket (2) is provided with a second plug-in portion which is plug-matched with the first plug-in portion.

3. A swing cleaning device according to claim 2, characterized in that: The first plug-in portion is a limiting guide rail, and the second plug-in portion is a limiting groove for the limiting guide rail to be inserted into; Alternatively, the first plug-in portion is a limiting groove, and the second plug-in portion is a limiting guide rail inserted into the limiting groove.

4. The oscillating cleaning device according to claim 1, characterized in that: The jigs (4) are multiple and are distributed at intervals in a stepped manner along the length direction of the swing rod (3).

5. A swing cleaning device according to claim 4, characterized in that: The bracket (2) is provided with a mounting inclined surface (20); The swing rod (3) is parallel to the installation inclined surface (20), and the rotating shaft is rotationally connected to the installation inclined surface (20).

6. A swing cleaning device according to claim 5, characterized in that: The support (2) comprises a triangular frame (21); The triangular frame (21) is provided with a central through cavity; Side sealing plates for sealing the central through cavity are provided on both sides of the triangular frame (21); The installation cavity is formed between the two side sealing plates and the central through cavity.

7. A swing cleaning device according to claim 6, characterized in that: A wiring tube is provided on the top of the triangular frame (21) for the power line to pass through.

8. The oscillating cleaning device according to claim 1, characterized in that: The driver (5) is a rotating motor; The output shaft of the driver (5) is connected to the rotating shaft via a coupling.

9. The oscillating cleaning device according to claim 1, characterized in that: The jig (4) is provided with a slot for inserting the substrate sheet (6).

10. The swing cleaning device according to claim 9, characterized in that: The jig (4) is a U-shaped block structure; The clamping slots are arranged at two ends of the top surface of the fixture (4).

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