Lifting device for assembling lifting suction cup of single crystal furnace

Abstract

The utility model discloses a lifting device for assembling a lifting sucker of a single crystal furnace, which comprises an annular base, a plurality of hydraulic rods are arranged above the base, the telescopic ends of the hydraulic rods are provided with placing rings coaxial with the base, and the placing rings are used for placing the lifting sucker. A containing groove is formed in the top of the containing ring towards the bottom, and the material lifting suction cup is located in the containing groove. Therefore, the hydraulic rod is lowered to enable the material lifting suction cup and the crucible to be assembled in a centering mode, the crucible is prevented from being knocked out, and the service life of the crucible is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of the assembly of a lifting suction cup for a single crystal furnace, and particularly relates to a lifting device for the assembly of a lifting suction cup for a single crystal furnace. Background Art

[0002] At present, in the single crystal silicon manufacturing industry, when assembling a lifting suction cup frame of a single crystal furnace, it is placed manually above a quartz crucible, or mechanically placed above the quartz crucible by using a simple rotating crane. This often causes a risk of chipping the upper edge of the crucible, and being misaligned with the crucible easily leads to misalignment of the crucible during charging and furnace closing, resulting in damage to the bottom of the quartz crucible. At the same time, multiple workers are required to operate together, and there are risks during charging and furnace closing.

[0003] In view of this, this application is proposed. Content of the Utility Model

[0004] The purpose of the utility model is to provide a lifting device for the assembly of a lifting suction cup for a single crystal furnace. By setting a base, a hydraulic rod located above the base, a placing ring, and a movable scale, the centering assembly between the lifting suction cup and the crucible is realized, and the problems existing in the prior art are solved.

[0005] To solve the above technical problems, the utility model adopts the following solutions:

[0006] A lifting device for the assembly of a lifting suction cup for a single crystal furnace includes an annular base. A plurality of hydraulic rods are arranged above the base, and a placing ring coaxial with the base is arranged at the telescopic end of the hydraulic rod. The placing ring is used for placing the lifting suction cup.

[0007] The utility model mainly realizes the centering assembly between the lifting suction cup and the crucible by setting a base, a hydraulic rod above the base, and a placing ring connected to the hydraulic rod. The base is sleeved on the outer periphery of the crucible. By starting an external control device, multiple hydraulic rods move upward synchronously. The bottom of the placing ring is higher than the top of the crucible. Then, the lifting suction cup is placed in the placing ring, and the hydraulic rods are synchronously controlled to descend, so that the inner arc of the lifting suction cup fits with the inner arc of the crucible, that is, the assembly of the lifting suction cup above the crucible is completed. The upper part of the lifting device can move longitudinally to ensure that the descending lifting suction cup is centered and fitted with the quartz crucible.

[0008] Preferably, a placing groove is formed from the top to the bottom of the placing ring, and the lifting suction cup is located in the placing groove.

[0009] Preferably, the vertical cross-section of the placing ring is L-shaped.

[0010] Preferably, the inner diameter of the placing ring is smaller than the outer diameter of the lifting suction cup, and the groove diameter of the placing groove is larger than the outer diameter of the lifting suction cup.

[0011] Preferably, a buffer pad is arranged in the placing groove.

[0012] Preferably, a movable scale is provided at the top of the telescopic end. Scale lines are provided on the surface of the scale, and a buffer pad is provided at the end of the scale adjacent to the crucible.

[0013] Preferably, it further includes a plurality of sleeves. The sleeves penetrate through the top of the telescopic end, and the scale is located inside the sleeves and moves left and right.

[0014] Preferably, it further includes screws. The screws penetrate through the sleeves and the scale.

[0015] The beneficial effects of the present utility model are as follows:

[0016] By providing a base, a hydraulic rod located above the base, and a placement ring, and placing the lifting suction cup in the placement ring, the coaxiality of the lifting suction cup and the base is achieved, so that the hydraulic rod is lowered to align and assemble the lifting suction cup with the crucible, avoiding breakage of the crucible and extending its service life.

[0017] By providing sleeves and a scale at the top of the telescopic end of the hydraulic rod, the scale moves left and right inside the sleeves, so that multiple scales are at the same scale line, thereby making the crucible coaxial with the base and enabling the lifting suction cup to be aligned with the crucible during the descending assembly. Description of the Drawings

[0018] Figure 1 is a schematic structural diagram of the present utility model;

[0019] Figure 2 is a schematic cross-sectional structural diagram of the present utility model;

[0020] Figure 3 is of the present utility model Figure 2 a partially enlarged schematic structural diagram of circle A;

[0021] Figure 4 is a schematic structural diagram of the hydraulic rod of the present utility model rising;

[0022] Figure 5 is a schematic structural diagram of the hydraulic rod of the present utility model descending.

[0023] Reference numerals: 1 - base, 2 - hydraulic rod, 20 - telescopic end, 21 - scale, 22 - sleeve, 23 - screw, 3 - placement ring, 30 - placement groove, 31 - buffer pad, 4 - lifting suction cup, 5 - crucible. Detailed Embodiments

[0024] The following further describes the present utility model in detail in conjunction with embodiments and the drawings, but the embodiments of the present utility model are not limited thereto.

[0025] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present utility model is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0026] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "set", "provided with", "installed", "connected", "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0027] Embodiment 1

[0028] Embodiment 1 of the present utility model is a lifting device for the assembly of a single crystal furnace charging suction cup, including an annular base 1. Above the base 1, a plurality of hydraulic rods 2 are provided. The telescopic end 20 of the hydraulic rod 2 is provided with a placement ring 3 coaxial with the base 1, and the placement ring 3 is used to place the charging suction cup 4.

[0029] Referring to Figure 1 , the present utility model mainly sets the base 1, the hydraulic rods 2 above the base 1, and the placement ring 3 connected to the hydraulic rods 2. The base 1 is sleeved on the outer periphery of the crucible 5. By starting the external control device, the plurality of hydraulic rods 2 move upward synchronously. Referring to Figure 4 . The bottom of the placement ring 3 is made higher than the top of the crucible 5, and then the charging suction cup 4 is placed in the placement ring 3. The hydraulic rods 2 are synchronously controlled to descend. Referring to Figure 5 , the inner arc of the charging suction cup 4 is made to fit the inner arc of the crucible 5, that is, the assembly of the charging suction cup 4 above the crucible 5 is completed, and the upper half of the lifting device can move longitudinally to ensure that the descending charging suction cup 4 fits the quartz crucible 5.

[0030] In some preferred embodiments, a placement groove 30 is opened from the top to the bottom of the placement ring 3, and the charging suction cup 4 is located in the placement groove 30. The opening of the placement groove 30 mainly provides conditions for the installation of the charging suction cup 4 in the placement ring 3, so as to avoid deviation during its descent and cause misalignment with the crucible 5.

[0031] In some preferred embodiments, the vertical cross-section of the placement ring 3 is L-shaped. After the placement groove 30 is opened, the placement ring 3 presents an L-shape, and its horizontal part is mainly for installing the lifting suction cup 4, so that the surface of its horizontal part contacts the bottom surface of the lifting suction cup 4.

[0032] In some preferred embodiments, the inner diameter of the placement ring 3 is smaller than the outer diameter of the lifting suction cup 4, and the groove diameter of the placement groove 30 is larger than the outer diameter of the lifting suction cup 4. A buffer pad 31 is provided in the placement groove 30.

[0033] Specifically, the placement ring 3 mainly provides an installation condition for the bottom of the lifting suction cup 4, so its inner diameter should be smaller than the outer diameter of the lifting suction cup 4; since a buffer pad 31 needs to be provided on the inner peripheral surface of the placement groove 30, the groove diameter of the placement groove 30 needs to be larger than the diameter of the lifting suction cup 4, so that the lifting suction cup 4 contacts the buffer pad 31. On the one hand, it ensures that the lifting suction cup 4 and the placement ring 3 are in a coaxial state, and on the other hand, it ensures that the lifting suction cup 4 is prevented from directly contacting the placement groove 30, which may cause damage to the lifting suction cup 4, so as to extend the service life of the lifting suction cup 4.

[0034] Embodiment 2

[0035] This Embodiment 2 is implemented on the basis of Embodiment 1. A movable scale 21 is provided at the top of the telescopic end 20. Scale lines are provided on the surface of the scale 21, and a buffer pad 31 is provided at the end of the scale 21 adjacent to the crucible 5. A plurality of sleeves 22 are further included. The sleeves 22 penetrate through the top of the telescopic end 20, and the scale 21 is located inside the sleeves 22 and moves left and right. A screw 23 is further included. The screw 23 penetrates through the sleeve 22 and the scale 21.

[0036] Specifically, referring to FIGS. 2 and Figure 3 ., sleeves 22 are provided at the top of the telescopic end 20 of the hydraulic rod 2. A scale 21 is provided inside the sleeves 22, and the scale 21 moves left and right inside the sleeves 22 to adjust the distance between the scale 21 and the outer peripheral surface of the crucible 5. The scale lines (not shown in the figure) on the surface of the scale 21 are used for reference of the same distance, so that the distance between each scale 21 and the crucible 5 is the same, thereby assisting in making the crucible 5 and the lifting device coaxial, and finally realizing the centering assembly of the lifting suction cup 4 and the crucible 5.

[0037] It should be noted that there are at least four scales 21, so that the horizontal lines of adjacent scales 21 are perpendicular to each other, improving the coaxial auxiliary adjustment of the crucible 5 and the lifting device; at the same time, buffer pads 31 are provided to prevent the scales 21 from directly contacting the outer surface of the crucible 5 and causing scratches. A plurality of screw holes are provided in the scale 21 and the sleeves 22 for the screw 23 to pass through for fixation.

[0038] The working principle of the present utility model is as follows: during use, the base 1 of the lifting device is sleeved on the outer peripheral surface of the crucible 5, the distance of the scale 21 in the sleeve 22 is adjusted for auxiliary coaxial adjustment of the crucible 5, then the hydraulic rod 2 is started, so that the top of the telescopic end 20 of the hydraulic rod 2 is higher than the top end of the crucible 5, and then the lifting suction cup 4 is placed in the placement groove 30 in the placement ring 3. Then, the hydraulic rod 2 is started to descend synchronously, so that the inner arc surface of the lifting suction cup 4 is in contact with the inner arc surface of the crucible 5, thereby completing the assembly of the lifting suction cup 4, realizing the centering assembly of the lifting suction cup 4 above the crucible 5, reducing the damage rate of the crucible 5, and prolonging the service life of the crucible 5.

[0039] The above are only the preferred embodiments of the present utility model, and do not impose any form of limitation on the present utility model. Based on the technical essence of the present utility model, any simple modifications, equivalent replacements, and improvements made to the above embodiments within the spirit and principle of the present utility model still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A lifting device for assembling a single crystal furnace material suction cup, characterized in that: The invention comprises a ring-shaped base (1), a plurality of hydraulic rods (2) are arranged above the base (1), and a placement ring (3) coaxial with the base (1) is arranged at the telescopic end (20) of the hydraulic rod (2), and the placement ring (3) is used for placing a material hanging suction cup (4).

2. The lifting device for assembling the single crystal furnace material lifting suction cup according to claim 1 is characterized in that: A placement groove (30) is formed from the top of the placement ring (3) to the bottom, and the material hanging suction cup (4) is located in the placement groove (30).

3. The lifting device for assembling the single crystal furnace material lifting suction cup according to claim 2 is characterized in that: The vertical cross section of the placement ring (3) is L-shaped.

4. The lifting device for assembling the single crystal furnace material lifting suction cup according to claim 2, characterized in that: The inner diameter of the placement ring (3) is smaller than the outer diameter of the material hanging suction cup (4), and the groove diameter of the placement groove (30) is larger than the outer diameter of the material hanging suction cup (4).

5. The lifting device for assembling the single crystal furnace material lifting suction cup according to claim 2, characterized in that: A buffer pad (31) is provided in the placement groove (30).

6. The lifting device for assembling the single crystal furnace material lifting suction cup according to claim 2, characterized in that: A movable ruler (21) is provided on the top of the telescopic end (20), scale lines are provided on the surface of the ruler (21), and a buffer pad (31) is provided at the end of the ruler (21) adjacent to the crucible (5).

7. The lifting device for assembling the single crystal furnace material lifting suction cup according to claim 6, characterized in that: It also includes a plurality of sleeves (22), wherein the sleeves (22) penetrate the top of the telescopic end (20), and the scale (21) is located in the sleeves (22) and moves left and right.

8. The lifting device for assembling the single crystal furnace material lifting suction cup according to claim 7, characterized in that: The utility model also comprises a screw (23), wherein the screw (23) passes through the sleeve (22) and the scale (21).

Images