Improved linear source evaporation crucible

Abstract

The utility model discloses an improved line source evaporation crucible, which is characterized in that angle external members are arranged on nozzles of a line source crucible cover, so that inclined openings of the angle external members I on the outermost two sides of the line source crucible cover corresponding to the edge of a substrate face the middle part of the substrate, and when the line source evaporation crucible is used for carrying out evaporation on the substrate, the inclined openings of the angle external members I on the outermost two sides of the line source crucible cover face the middle part of the substrate; when the evaporation material in the crucible body is heated to be melted and volatilized, the evaporation material escaping from the inclined opening in the top of the first angle sleeve piece is obliquely arranged towards the middle of the base plate, so that the evaporation angle of the evaporation material correspondingly inclines towards the middle of the base plate; therefore, the evaporation material can be more fully evaporated to the edge part of the substrate, part of waste of the evaporation material can be reduced, and the evaporation cost is reduced.

Description

Technical Field

[0001] This application relates to the technical field of wire source crucibles, and specifically relates to an improved wire source evaporation crucible. Background Art

[0002] In the current vacuum evaporation preparation of OLED devices, the wire source crucible, as the evaporation source of the evaporation equipment, places the material to be evaporated in the crucible of the vacuum evaporation source device. By heating the crucible, the material changes from a solid state to gaseous atoms, atomic groups or molecules and diffuses upward through the nozzle opening on the upper cover of the crucible, and then condenses on the surface of the substrate to be coated to form a film, so as to realize the light emission of the OLED device.

[0003] As Figure 1 shown, in the prior art when using an evaporation crucible, especially when evaporating the corner parts of the substrate 10, in order to ensure that the corner parts can be evenly covered, the nozzle opening centers on the outermost two sides of the upper cover of the wire source crucible are usually arranged corresponding to the edges of the substrate 10 in the vertical direction. This setting method can make the evaporated material diffused from the opening of the evaporation crucible cover the corner parts of the substrate 10 more evenly, but this will also cause waste of some evaporated materials and increase the evaporation cost. Summary of the Utility Model

[0004] Aiming at the deficiencies of the prior art, the purpose of this application is to provide an improved wire source evaporation crucible to solve the problems raised in the above background art.

[0005] According to one aspect of this application, an improved wire source evaporation crucible includes a crucible body, a wire source crucible cover and an angle kit. A wire source crucible cover is arranged on the top of the crucible body. A plurality of nozzles are arranged on the wire source crucible cover along its length direction. An angle kit is sleeved on each nozzle. The middle channel of the angle kit is communicated with the nozzle. The angle kits on the nozzles on the outermost two sides of the wire source crucible cover are angle kit one. The plane where the top opening of the angle kit one is located is inclined with respect to the horizontal direction and forms an included angle α therewith. The angle kits on the nozzles in the middle of the wire source crucible cover are angle kit two. The plane where the top opening of the angle kit two is located is in the horizontal direction. The angle kits on the nozzles between the outermost and the middle of the wire source crucible cover are angle kit three. The plane where the top opening of the angle kit three is located is inclined with respect to the horizontal direction and forms an included angle β therewith. And the inclined planes of the angle kit one and the angle kit three both face the middle of the substrate.

[0006] Preferably, a groove is provided at the bottom opening of each angle kit. The outer diameter dimension of the nozzle is adapted to the inner diameter dimension of the groove. The angle kit is sleeved on the nozzle through the groove.

[0007] Preferably, a sealing ring is embedded between the bottom of the groove and the top of the nozzle.

[0008] Preferably, an anti-slip ring is embedded between the groove wall and the side wall of the nozzle.

[0009] Preferably, limiting opening grooves are formed through both sides of the bottom of the angle kit, limiting blocks are fixedly arranged at positions corresponding to the limiting opening grooves on both sides of the bottom of the nozzle, and the shape and size of the limiting blocks are adapted to the shape and size of the limiting opening grooves.

[0010] Preferably, the included angle α satisfies: 30° ≤ α ≤ 60°.

[0011] Preferably, the included angle β satisfies: 10° ≤ β ≤ 25°

[0012] The advantages of the present application compared with the prior art are as follows: For an improved wire source evaporation crucible of the present application, through the angle kit arranged on the nozzle of the wire source crucible cover, the inclined openings of the outermost two angle kits I on the wire source crucible cover corresponding to the edge of the substrate are arranged to face the middle of the substrate. When using this wire source evaporation crucible to evaporate the substrate, when the evaporation material in the crucible body is heated to melt and volatilize, the evaporation material escaping from the inclined opening at the top of the angle kit I, due to the inclined opening at the top of the angle kit I being inclined towards the middle of the substrate, further makes the evaporation angle of the evaporation material also inclined towards the middle of the substrate, so that the evaporation material can be more fully evaporated onto the edge part of the substrate, and part of the evaporation material waste can be reduced, and the evaporation cost can be reduced. Description of the Drawings

[0013] Figure 1 is a schematic structural diagram during evaporation of a wire source evaporation crucible in the prior art.

[0014] Figure 2 is a schematic structural diagram during evaporation of an improved wire source evaporation crucible according to an embodiment of the present application.

[0015] Figure 3 is Figure 2 a schematic enlarged view of the structure of part A in, which shows the structure of the angle kit I.

[0016] Figure 4 is Figure 2 a schematic enlarged view of the structure of part B in, which shows the structure of the angle kit III.

[0017] Figure 5 is Figure 2 a schematic enlarged view of the structure of part C in, which shows the structure of the angle kit II.

[0018] Figure 6It is a three-dimensional exploded view of an improved linear source evaporation crucible according to an embodiment of the present application.

[0019] Reference numerals: 1, crucible body; 2, linear source crucible cover; 3, angle kit; 31, angle kit one; 32, angle kit two; 33, angle kit three; 4, nozzle; 5, groove; 6, sealing ring; 7, anti-slip ring; 8, limit opening groove; 9, limit block; 10, substrate. Detailed implementation manners

[0020] In order to make the content of the present application more clearly understood, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present application. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the directions in the Figure 2 accompanying drawings, and the words "inner" and "outer" respectively refer to the directions towards or away from the geometric center of a specific component.

[0021] As Figures 2 to 6As shown, an improved linear source evaporation crucible comprises a crucible body 1, a linear source crucible cover 2 and an angle sleeve 3. The top of the crucible body 1 is provided with a linear source crucible cover 2, and a plurality of nozzles 4 are provided on the linear source crucible cover 2 along its length direction, each nozzle 4 is sleeved with an angle sleeve 3, and a groove 5 is provided at the bottom opening of each angle sleeve 3. The outer diameter of the nozzle 4 is matched with the inner diameter of the groove 5. The angle sleeve 3 is sleeved on the nozzle 4 through the groove 5, and the middle channel of the angle sleeve 3 is connected with the nozzle 4 and the inner side walls of the two are aligned. A sealing ring 6 is embedded between the bottom of the groove 5 and the top of the nozzle 4 to ensure that after the angle sleeve 3 is installed on the nozzle 4, the bottom of the groove 5 and the top surface of the nozzle 4 have good sealing performance to prevent evaporation of vapor. The plating material escapes from the gap between the bottom of the groove 5 and the top surface of the nozzle 4 and pollutes the crucible; in addition, an anti-slip ring 7 is embedded between the groove wall of the groove 5 and the side wall of the nozzle 4. On the one hand, this arrangement can further enhance the sealing between the groove wall of the groove 5 and the side wall of the nozzle 4, and on the other hand, it can also increase the axial friction between the groove wall of the groove 5 and the side wall of the nozzle 4 to prevent the angle kit 3 from falling off the nozzle 4 when in use; in addition, limited opening grooves 8 are provided on both sides of the bottom of the angle kit 3, and limit blocks 9 are fixedly provided at the positions corresponding to the limit opening grooves 8 on both sides of the bottom of the nozzle 4. The shape and size of the limit blocks 9 are adapted to the shape and size of the limit opening grooves 8. When the angle kit 3 is installed on the nozzle 4, the limit opening grooves 8 on the angle kit 3 are aligned with the limit blocks 9 and inserted, thereby limiting the circumferential movement of the angle kit 3, and preventing the angle kit 3 from rotating circumferentially during use and affecting the evaporation effect; wherein, the angle kit 3 on the nozzles 4 on the outermost sides of the line source crucible cover 2 is an angle kit 31, and the plane where the top opening of the angle kit 31 is located is inclined to the horizontal direction and the two form an angle α, and the angle α satisfies: 30°≤α≤60°, and the inclined opening of the angle kit 31 is arranged toward the middle of the substrate 10. When the linear source evaporation crucible is used to evaporate the substrate 10, when the evaporation material in the crucible body is heated to melt and volatilize, the evaporation material that escapes from the inclined opening at the top of the angle kit 31, because the inclined opening at the top of the angle kit 31 is toward the middle of the substrate 10 The portion is tilted, so that the evaporation angle of the evaporation material will also be tilted toward the middle of the substrate 10 accordingly, so that the evaporation material can be more fully evaporated to the edge of the substrate 10, and the waste of some evaporation materials can be reduced, thereby reducing the evaporation cost; the angle kit 3 on the nozzle 4 located between the outermost side and the middle of the line source crucible cover 2 is the angle kit three 33, and the plane where the top opening of the angle kit three 33 is located is tilted to the horizontal direction and the two form an angle β, and the angle β satisfies: 10°≤β≤25°, and the angle β is less than the angle α. This setting can reduce the overlap of the evaporation material emitted from the top opening of the angle kit one 31 and the evaporation material emitted from the top opening of the angle kit two 32 during evaporation, thereby reducing the waste of evaporation materials;The angle kit 3 on the nozzle 4 in the middle on the linear source crucible cover 2 is the angle kit two 32. The plane where the top opening of the angle kit two 32 is located is in the horizontal direction. This setting makes the evaporation angle escaping from the top opening of the angle kit two 32 face the middle of the substrate 10, so as to balance the evaporation materials escaping from the top openings of the angle kits two 32 on both sides.

[0022] In summary, when using this linear source evaporation crucible to evaporate the substrate 10, when the evaporation material in the crucible body is heated to melt and volatilize, the evaporation material escaping from the inclined opening at the top of the angle kit one 31, because the inclined opening at the top of the angle kit one 31 is inclined towards the middle of the substrate 10, the evaporation angle of the evaporation material will also be inclined towards the middle of the substrate 10 accordingly, so that the evaporation material can be more fully evaporated onto the edge part of the substrate 10, and part of the evaporation material waste can be reduced, and the evaporation cost can be reduced; the included angle of the top opening of the angle kit three 33 is smaller than the included angle of the top opening of the angle kit one 31, so that the overlapping amount of the evaporation material escaping from the top opening of the angle kit one 31 and the evaporation material escaping from the top opening of the angle kit two 32 during evaporation can be reduced, and the waste of evaporation material can be reduced; the plane where the top opening of the angle kit two 32 is located is in the horizontal direction, so that the evaporation angle escaping from the top opening of the angle kit two 32 faces the middle of the substrate 10, and thus the evaporation materials escaping from the top openings of the angle kits two 32 on both sides can be balanced.

[0023] The above embodiments are only used to illustrate the technical solutions of the embodiments of the present application, and are not intended to limit them. Although the embodiments of the present application have been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that without departing from the spirit and scope defined by the claims of the present application, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features.

Claims

1. An improved linear source evaporation crucible, comprising a crucible body (1), a linear source crucible cover (2) and an angle kit (3), wherein the top of the crucible body (1) is provided with a linear source crucible cover (2), and the linear source crucible cover (2) is provided with a plurality of nozzles (4) along its length direction, characterized in that: Each of the nozzles (4) is sleeved with an angle sleeve (3), the middle channel of the angle sleeve (3) is connected to the nozzle (4), and the inner side walls of the two are aligned. The angle sleeve (3) on the nozzles (4) on the outermost sides of the line source crucible cover (2) is an angle sleeve one (31), the plane where the top opening of the angle sleeve one (31) is located is inclined with the horizontal direction, and the two form an angle α. The angle sleeve (3) on the nozzle (4) in the middle of the line source crucible cover (2) is an angle sleeve two (32), and the plane where the top opening of the angle sleeve two (32) is located is in the horizontal direction. The angle sleeve (3) on the nozzle (4) between the outermost and the middle of the line source crucible cover (2) is an angle sleeve three (33), the plane where the top opening of the angle sleeve three (33) is located is inclined with the horizontal direction, and the two form an angle β, and the inclined planes of the angle sleeve one (31) and the angle sleeve three (33) are both arranged toward the middle of the substrate.

2. The improved linear source evaporation crucible according to claim 1, characterized in that: A groove (5) is provided at the bottom opening of each angle sleeve (3); the outer diameter of the nozzle (4) matches the inner diameter of the groove (5); and the angle sleeve (3) is sleeved onto the nozzle (4) through the groove (5).

3. The improved linear source evaporation crucible according to claim 2, characterized in that: A sealing ring (6) is embedded between the bottom of the groove (5) and the top of the nozzle (4).

4. The improved linear source evaporation crucible according to claim 2, characterized in that: An anti-slip ring (7) is embedded between the groove wall of the groove (5) and the side wall of the nozzle (4).

5. The improved linear source evaporation crucible according to claim 2, characterized in that: Limit opening grooves (8) are provided through both sides of the bottom of the angle kit (3), and limit blocks (9) are fixedly provided at positions corresponding to the limit opening grooves (8) on both sides of the bottom of the nozzle (4), and the shape and size of the limit blocks (9) are compatible with the shape and size of the limit opening grooves (8).

6. The improved linear source evaporation crucible according to claim 1, characterized in that: The angle α satisfies: 30°≤α≤60°.

7. The improved linear source evaporation crucible according to claim 1, characterized in that: The angle β satisfies: 10°≤β≤25°.

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