Flow uniformizing device and processing equipment

Abstract

The utility model provides a flow uniformizing device and machining equipment, and the flow uniformizing device comprises an air inlet pipe, a flow uniformizing device and a flow uniformizing device, the flow dividing pipe assembly is connected with the gas inlet pipe and is used for dividing the gas; the spraying pipe assembly comprises at least one spraying pipe, and the spraying pipe is connected with the flow dividing pipe assembly so as to be connected with the air inlet pipe; a plurality of first air outlet holes are formed in the spraying pipe, and the first air outlet holes are used for outputting air; the gas uniformizing assembly is used for containing the spraying pipe, the spraying pipe is communicated with the gas uniformizing assembly through a plurality of first gas outlet holes, a plurality of second gas outlet holes are formed in the gas uniformizing assembly, and gas in the gas uniformizing assembly is sprayed out of the gas uniformizing assembly through the second gas outlet holes. According to the flow uniformizing device and the processing equipment provided by the invention, gas introduced from the gas inlet pipe is shunted through the shunting pipe assembly and the spraying pipe assembly, and then is uniformized through the gas uniformizing assembly, so that the uniformity of the gas during injection can be improved, and the processing effect of the processing equipment on sheet materials is improved.

Description

Technical Field

[0001] This application relates to the technical field of photovoltaic and semiconductor product production, and particularly relates to a flow equalizing device and processing equipment. Background Art

[0002] In the process of photovoltaic and semiconductor product production, sheet materials need to be coated through atomic layer deposition (ALD) to form multiple atomic layers on the sheet materials. The sheet materials are processed by ALD in a reaction chamber. The reaction chamber can be provided with gas injection ports, and the precursor can enter the reaction chamber through the gas injection ports. At present, it is difficult for the precursor to be evenly distributed in the reaction chamber after entering through the gas injection ports, which affects the coating effect of some sheet materials. Summary of the Utility Model

[0003] In view of the above, it is necessary to provide a flow equalizing device and processing equipment to solve the above defects.

[0004] In a first aspect, an embodiment of the present application provides a flow equalizing device, including: an intake pipe for connecting to a gas; a flow dividing pipe assembly connected to the intake pipe for dividing the gas; a spray pipe assembly including at least one spray pipe connected to the flow dividing pipe assembly to achieve connection with the intake pipe; a plurality of first air outlet holes are provided on the spray pipe for outputting the gas; a gas equalizing assembly for housing the spray pipe, the spray pipe is in communication with the gas equalizing assembly through a plurality of first air outlet holes, and a plurality of second air outlet holes are provided on the gas equalizing assembly for the gas in the gas equalizing assembly to be ejected from the gas equalizing assembly.

[0005] Optionally, a housing cavity is provided in each gas equalizing assembly for housing the spray pipe and communicating with the first air outlet holes, and the housing cavity is in communication with the second air outlet holes, wherein the number of the second air outlet holes is greater than the number of the first air outlet holes.

[0006] Optionally, each gas equalizing assembly includes: a housing box with the housing cavity provided therein, and a plurality of spray holes are provided at the bottom of the housing box; a flow dividing plate housed in the housing cavity, the flow dividing plate is spaced from the bottom wall of the housing cavity to form a first cavity between the flow dividing plate and the bottom wall of the housing cavity, the flow dividing plate is located between the spray pipe and the bottom wall of the housing cavity, and a plurality of through holes are provided on the flow dividing plate for the gas to pass through, the plurality of through holes are arranged in a staggered manner with the plurality of air outlet holes and also arranged in a staggered manner with the plurality of spray holes.

[0007] Optionally, a plurality of grooves are provided on the bottom wall of the housing cavity, each spray hole is provided on the bottom wall of the corresponding groove, each spray hole is in communication with the housing cavity through the corresponding groove, and each groove is used for converging the gas to make the gas flow towards the spray hole.

[0008] Optionally, a plurality of first air outlets are arranged at intervals in the first horizontal direction; among the plurality of second air outlets communicated with the same accommodation cavity, at least two second air outlets are arranged at intervals in the first horizontal direction, and at least two second air outlets are arranged at intervals in the second horizontal direction; wherein, the first horizontal direction is perpendicular to the second horizontal direction.

[0009] Optionally, the air distribution component includes: a housing box, an accommodation cavity is formed in the housing box, and a plurality of second air outlets are formed in the bottom of the housing box; a diversion cover, the diversion cover is arranged on the housing box, the diversion cover is used for partially blocking one side of the housing box where the second air outlets are formed, and the diversion cover is used for blocking part of the gas ejected from the plurality of second air outlets and guiding this part of the gas to flow in a direction close to the preset area.

[0010] Optionally, a guiding wall is arranged on one side of the diversion cover, the top and bottom of the guiding wall in the vertical direction are arranged at intervals in the second horizontal direction, and the guiding wall is used for blocking part of the second air outlets and guiding the gas to flow in a direction close to the preset area; wherein, the vertical direction is perpendicular to the second horizontal direction, the preset area is arranged at intervals with the guiding wall in the vertical direction and is arranged at intervals with the guiding wall in the second horizontal direction.

[0011] Optionally, the uniform flow device is used to be partially arranged in the reaction cavity of the processing equipment, the number of the spray pipe assemblies and the air distribution assemblies is two, the two spray pipe assemblies and the two air distribution assemblies are both used to be arranged in the reaction cavity, and the two air distribution assemblies are arranged at intervals in the second horizontal direction; the two spray pipe assemblies are connected to the shunt pipe assembly, at least part of the second air outlets are arranged towards the preset area, and the spray pipes of each spray pipe assembly are all accommodated in the corresponding air distribution assembly to jet air towards the preset area; wherein, the preset area is located in the reaction cavity; the projection of the preset area in the vertical direction coincides with the projection of the two air distribution assemblies in the vertical direction, or the preset area is located between the two air distribution assemblies in the second horizontal direction; the vertical direction is perpendicular to the second horizontal direction.

[0012] Optionally, the number of the spray pipes is multiple, and the shunt pipe assembly includes: a plurality of first shunt pipes, each first shunt pipe is communicated with the corresponding spray pipe, and the number of the spray pipes corresponding to each first shunt pipe is multiple; a plurality of intake air shunt pipes, the plurality of intake air shunt pipes are all communicated with the intake pipe, each intake air shunt pipe is communicated with the corresponding first shunt pipe, and the number of the first shunt pipes corresponding to each intake air shunt pipe is multiple; a plurality of second shunt pipes, each second shunt pipe is communicated with the corresponding spray pipe, and the number of the spray pipes corresponding to each second shunt pipe is multiple; each second shunt pipe is communicated with the corresponding first shunt pipe, and the number of the second shunt pipes corresponding to each first shunt pipe is multiple.

[0013] Second aspect, an embodiment of the present application provides a processing device, which includes: a reaction chamber for accommodating a plurality of sheet materials; a uniform flow device as described in any one of the above, connected to the reaction chamber, and the uniform flow device is used to inject gas into the reaction chamber so that the plurality of sheet materials receive the gas.

[0014] Through the uniform flow device and the processing device provided by the present application, the gas introduced from the intake pipe is first shunted through the shunt pipe assembly, then enters the uniform gas assembly through a plurality of first air outlets on the spray pipe, and finally the gas is ejected through a plurality of second air outlets of the uniform gas assembly, thereby achieving uniform flow of the gas, improving the uniformity during gas injection, and improving the processing effect of the processing device on the sheet materials. Description of the Drawings

[0015] Figure 1 It is a schematic diagram of the processing device in the embodiment of the present application.

[0016] Figure 2 It is a schematic structural diagram of the uniform flow device in the embodiment of the present application.

[0017] Figure 3 It is a first structural disassembly diagram of the uniform flow device in the embodiment of the present application.

[0018] Figure 4 It is a partial schematic structural diagram of the uniform flow device in the embodiment of the present application.

[0019] Figure 5 It is Figure 3 An enlarged view of part V in

[0020] Figure 6 It is a second structural disassembly diagram of the uniform flow device in the embodiment of the present application.

[0021] Figure 7 It is a schematic internal structure diagram of the uniform gas assembly in the embodiment of the present application.

[0022] Figure 8 It is Figure 7 An enlarged view of part IIX in

[0023] Figure 9 It is Figure 7 A cross-sectional view taken along IX-IX in

[0024] Main Element Symbol Description:

[0025] 100, uniform flow device; 200, reaction chamber; 201, preset area; 101, diversion mechanism; 10, air inlet pipe; 20, diversion pipe assembly; 21, air inlet diversion pipe; 22, first diversion pipe; 23, second diversion pipe; 231, spray connection; 30, spray pipe; 30A1, spray pipe; 30A2, spray pipe; 30B1, spray pipe; 30B2, spray pipe; 30C1, spray pipe; 30C2, spray pipe; 30D1, spray pipe; 30D2, spray pipe; 30E1, spray pipe; 30E 2. Spray pipe; 30F1. Spray pipe; 30F2. Spray pipe; 30G1. Spray pipe; 30G2. Spray pipe; 30H1. Spray pipe; 30H2. Spray pipe; 31. First air outlet; 40. Air homogenizing assembly; 41. Receiving box; 411. Receiving cavity; 4111. First cavity; 4112. Second cavity; 412. Second air outlet; 413. Groove; 42. Cover; 421. Clearance hole; 43. Diverter plate; 431. Through hole; 44. Air guide cover; 441. Guide wall; 300. Carrier. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0027] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0028] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0029] See also Figure 1 , Figure 1 A processing device provided by an embodiment of the present application is shown. The processing device can accommodate a plurality of sheet materials and deliver gas to the plurality of sheet materials to realize processing of the plurality of sheet materials.

[0030] In the embodiments of the present application, the type of sheet material is not specifically limited. For example, the sheet material can be a silicon wafer, a silicon carbide wafer, a coated glass, etc. used in photovoltaic products.

[0031] In the embodiments of the present application, no specific limitation is imposed on the processing type of the processing equipment for the sheet materials. For example, the processing equipment can coat multiple sheet materials through the Atomic Layer Deposition (ALD) process.

[0032] It can be understood that when the processing equipment processes the sheet materials through the ALD process, the gas transported by the processing equipment to the accommodated sheet materials can be a precursor or an inert gas. Among them, the precursor can be, but is not limited to, water and trimethylaluminum.

[0033] (Trimethyl Aluminum, TMA); the inert gas can be, but is not limited to, nitrogen, and the embodiments of the present application do not make any limitation in this regard.

[0034] In the embodiments of the present application, the processing equipment can include a flow homogenizing device 100 and a reaction chamber 200. The reaction chamber 200 can accommodate a carrier 300, and multiple sheet materials (not shown in the figure) can be vertically placed on the carrier 300, and the carrier 300 can move along the first horizontal direction to enter or exit the reaction chamber 200. At least a part of the flow homogenizing device 100 is located inside the reaction chamber 200. It can be arranged at one end of the reaction chamber 200 in the vertical direction and fixedly connected to the wall of the reaction chamber 200. The flow homogenizing device 100 can inject gas into a preset area 201 inside the reaction chamber 200. The preset area 201 is the position that the sheet materials need to reach inside the reaction chamber 200 when the processing equipment processes the sheet materials; when the processing equipment processes the sheet materials, at least a part of the carrier 300 is located in the preset area 201.

[0035] Please refer to Figure 2 , Figure 2 which shows a flow homogenizing device 100 provided by the embodiments of the present application. In the embodiments of the present application, the height direction of the flow homogenizing device 100 can be defined as the vertical direction, and the length direction and the width direction are the first horizontal direction and the second horizontal direction respectively. The vertical direction, the first horizontal direction, and the second horizontal direction are perpendicular to each other. For example, the first horizontal direction can be Figure 2 the X direction shown and its opposite direction, the second horizontal direction can be Figure 1 and Figure 2 the Y direction shown and its opposite direction, and the vertical direction can be Figure 1 and Figure 2 the Z direction shown and its opposite direction.

[0036] It can be understood that when the sheet materials are vertically placed, the length direction or the width direction of the sheet materials can coincide with the vertical direction or form an acute angle with the vertical direction.

[0037] For example, the uniform flow device 100 can be located at the top of the reaction chamber 200, and the carrier 300 can enter the middle of the reaction chamber 200. The uniform flow device 100 can spray the precursor downward to make the precursor contact the sheet material on the carrier 300, so as to realize the coating of the sheet material. The carrier 300 can be a vertical carrier plate.

[0038] In some embodiments, the uniform flow device 100 can include a flow splitting mechanism 101 and a gas homogenizing assembly 40. The flow splitting mechanism 101 is connected to the gas homogenizing assembly 40 and partially received in the gas homogenizing assembly 40. The flow splitting mechanism 101 can intake gas through an intake end, split the gas into multiple strands, and then transmit the multiple strands of gas to the gas homogenizing assembly 40. The gas homogenizing assembly 40 can spray the split multiple strands of gas toward a preset area 201. Among them, the gas homogenizing assembly 40 is spaced apart from the preset area 201 in the vertical direction.

[0039] For example, the gas homogenizing assembly 40 is located above the preset area 201 in the vertical direction.

[0040] In the embodiments of the present application, the numbers of the flow splitting mechanism 101 and the gas homogenizing assembly 40 in the uniform flow device 100 are not specifically limited. For example, the number of the flow splitting mechanisms 101 can be two, and the number of the gas homogenizing assemblies 40 can be one. The two flow splitting mechanisms 101 are both connected to the gas homogenizing assembly 40, and the gas homogenizing assembly 40 can spray the multiple gases output by the two flow splitting mechanisms 101 toward the position of the carrier 300. Another example is as Figure 2 shown, the number of the flow splitting mechanisms 101 is two, and the number of the gas homogenizing assemblies 40 is two. The following embodiments are exemplified according to the situation where the numbers of the flow splitting mechanism 101 and the gas homogenizing assembly 40 are both two.

[0041] Please refer to Figure 3 and Figure 4 together. In the embodiments of the present application, each flow splitting mechanism 101 can include an intake pipe 10, a flow splitting pipe assembly 20, and a spray pipe assembly. The spray pipe assembly can include at least one spray pipe 30. The intake pipe 10, the flow splitting pipe assembly 20, and the spray pipe 30 are arranged in sequence in the vertical direction. The intake pipe 10 is connected and communicated with the flow splitting pipe assembly 20, and the spray pipe 30 is connected and communicated with the flow splitting pipe assembly 20.

[0042] In the embodiments of the present application, the numbers of the intake pipe 10, the flow splitting pipe assembly 20, and the spray pipe 30 in one flow splitting mechanism 101 are not specifically limited. The following embodiments are exemplified according to the situation where each flow splitting mechanism 101 includes one intake pipe 10, one flow splitting pipe assembly 20, and multiple spray pipes 30.

[0043] In some embodiments, among the multiple spray pipes 30 of each diversion mechanism 101 , some of the spray pipes 30 are connected to the first gas homogenizing component 40 , and the remaining spray pipes 30 are connected to the second gas homogenizing component 40 .

[0044] The air inlet pipe 10 may extend along a first horizontal direction, and gas may be introduced into the air inlet pipe 10. The manifold assembly 20 may be fixedly connected to the air inlet pipe 10 and communicate with the air inlet pipe 10. The gas in the air inlet pipe 10 may enter the manifold assembly 20, and the manifold assembly 20 may divide the gas into multiple streams. The manifold assembly 20 may include multiple spray connection parts 231, and each spray connection part 231 corresponds to a stream of gas after being diverted by the manifold assembly 20.

[0045] A plurality of spray pipes 30 can be fixedly connected to the corresponding spray connection part 231 with the shunt pipe assembly 20, and communicated with the shunt pipe assembly 20; and all the spray pipes 30 in each spray pipe assembly are connected to the same spray connection part 231. The multiple streams of gas diverted in the shunt pipe assembly 20 can enter the spray pipe 30. The multiple streams of gas diverted in the shunt pipe assembly 20 can enter the spray pipe 30. Each spray pipe 30 can extend in a direction perpendicular to the vertical direction (for example, a first horizontal direction and a second horizontal direction). In this way, the multiple spray pipes 30 connected to the same spray connection part 231 can divert the gas entering the spray pipe 30 into multiple streams of gas in multiple directions. Each spray pipe 30 is provided with a plurality of first air outlet holes 31 on a side away from the air inlet pipe 10 in the vertical direction, and the plurality of first air outlet holes 31 are arranged at intervals in the first horizontal direction. The gas in the spray pipe 30 can flow to the outside of the spray pipe 30 through the first air outlet holes 31.

[0046] Please also read Figure 5 and Figure 6, each gas homogenizing assembly 40 may include a storage box 41 and a cover 42. The storage box 41 may extend along a first horizontal direction. The storage box 41 is arranged with an opening on one side of the air inlet pipe 10 in the vertical direction, and a storage chamber 411 is provided in the storage box 41. The spray pipe 30 may enter the storage chamber 411 through the opening on the storage box 41 and be accommodated in the storage chamber 411. The cover 42 is detachably connected to the storage box 41 and may close the opening of the storage box 41. Among them, a clearance hole 421 for the passage of the diverter pipe assembly 20 may be provided on the cover 42. When the spray pipe 30 is accommodated in the storage chamber 411, the components in the diverter pipe assembly 20 connected to the spray pipe 30 may pass through the clearance hole 421 to maintain the connection with the spray pipe 30. The side of the receiving box 41 facing away from the air inlet pipe 10 in the vertical direction may face the preset area 201, and a plurality of second air outlet holes 412 are provided on the side of the receiving box 41 facing away from the air inlet pipe 10 in the vertical direction. At least some of the plurality of second air outlet holes 412 are arranged toward the preset area 201. The second air outlet holes 412 are connected to the receiving chamber 411. The gas in the spray pipe 30 may enter the receiving chamber 411 through the plurality of first air outlet holes 31, and after being filled in the receiving chamber 411, it flows evenly into the reaction chamber 200 through the plurality of second air outlet holes 412. Among them, the number of second air outlet holes of each uniform gas component 40 may be greater than the number of first air outlet holes 31 on all the spray pipes 30 received in the corresponding receiving box 41.

[0047] It can be understood that the flow splitter assembly 20 and the spray pipe assembly can split the gas connected from the air inlet pipe 10 into multiple streams of gas, and the gas can enter the receiving chamber 411. The inner wall of the receiving chamber 411 can block the gas to reduce the flow rate of the gas. The gas can be filled in the receiving chamber 411 and then freely diffused to the outside of the receiving chamber 411 through the second gas outlet 412. In this way, the uniform flow assembly 40 can achieve uniform flow of the gas and increase the uniformity of the gas flow in the reaction chamber 200.

[0048] In the embodiments of the present application, there is no specific limitation on the fixing method during the fixed connection and fixed installation. For example, the fixing method may include welding fixing, screw fixing, integral molding fixing, etc.

[0049] In the embodiments of the present application, the detachable connection method is not specifically limited. For example, the detachable connection method may include, but is not limited to, screw connection, bolt connection, snap connection, etc.

[0050] It can be understood that a sealing ring (not shown) can be provided at the clearance hole 421 , and the sealing ring can be sleeved on the portion of the manifold assembly 20 passing through the clearance hole 421 to reduce leakage of gas in the gas homogenizing assembly 40 .

[0051] It can be understood that sealing treatment can be performed between the lid 42 and the receiving box 41 to reduce the leakage of gas in the gas distribution assembly.

[0052] In the embodiments of the present application, the number of spray pipes 30 connected to the same spray connection part 231 is not specifically limited, that is, the number of spray pipes 30 in each spray pipe assembly is not specifically limited. For example, the number of spray pipes 30 connected to the same spray connection part 231 is two, that is, the number of spray pipes 30 in the spray pipe assembly is two. The two spray pipes 30 are arranged in the first horizontal direction and are both connected along the first horizontal direction; the spray connection part 231 can be a three-way joint, one end of the spray connection part 231 is connected to other components in the shunt pipe assembly 20, and the remaining two ends are respectively connected to the two spray pipes 30.

[0053] In the embodiments of the present application, the layout of the second air outlet holes 412 is not specifically limited. For example, on each receiving box 41, the second air outlet holes 412 can be arranged in four rows at intervals in the second horizontal direction, and the number of second air outlet holes 412 in each row of second air outlet holes 412 is multiple, and the multiple second air outlet holes 412 in each row of second air outlet holes 412 are arranged at intervals in the first horizontal direction. The number of second air outlet holes 412 in each receiving box 41 can be greater than the number of first air outlet holes 31 on all the spray pipes 30 in the corresponding receiving cavity 411.

[0054] For example, the spray pipe 30 and the receiving box 41 can be located below the intake pipe 10. A plurality of first air outlet holes 31 are all opened at the bottom of the spray pipe 30. The opening of the receiving box 41 can be opened at the top of the receiving box 41, and the lid 42 can be arranged on the top of the receiving box 41. A plurality of second air outlet holes 412 are all opened at the bottom of the receiving box 41, and gas can be ejected downward from the plurality of second air outlet holes 412 to be sprayed or flow onto the sheet material on the carrier 300.

[0055] It can be understood that when the number of the shunt mechanisms 101 is two, the intake pipes 10 in the two shunt mechanisms 101 can be arranged at intervals in the vertical direction and can extend respectively in the positive and negative directions in the first horizontal direction to avoid each other. The plurality of spray pipes 30 in the two shunt mechanisms 101 can be arranged side by side in the first horizontal direction and / or the second horizontal direction.

[0056] For example, as Figure 4As shown, the number of spray pipes 30 in each flow splitting mechanism 101 is eight groups, and all the spray pipes 30 in each group of spray pipes 30 are connected to the same spray connection part 231. The eight groups of spray pipes 30 are arranged at intervals in the second horizontal direction into two rows, and each row of spray pipes 30 includes four groups of spray pipes 30 arranged at intervals in the first horizontal direction. Thus, when the number of flow splitting mechanisms 101 is two, the two flow splitting mechanisms 101 include sixteen groups of spray pipes 30. The eight groups of spray pipes 30 in the first flow splitting mechanism 101 can be respectively defined as two spray pipes 30A1, two spray pipes 30B1, two spray pipes 30C1, two spray pipes 30D1, two spray pipes 30E1, two spray pipes 30F1, two spray pipes 30G1 and two spray pipes 30H1, and the eight groups of spray pipes 30 in the second flow splitting mechanism 101 are two spray pipes 30A2, two spray pipes 30B2, two spray pipes 30C2, two spray pipes 30D2, two spray pipes 30E2, two spray pipes 30F2, two spray pipes 30G2 and two spray pipes 30H2.

[0057] Each group of spray pipes 30 in the first flow splitting mechanism 101 and the corresponding spray pipes 30 in the second flow splitting mechanism 101 are arranged in the second horizontal direction, that is, in the second horizontal direction, the spray pipe 30A1 in the first flow splitting mechanism 101 is located on one side of the spray pipe 30A2 in the second flow splitting mechanism 101, the spray pipe 30B1 in the first flow splitting mechanism 101 is located on one side of the spray pipe 30B2 in the second flow splitting mechanism 101, and so on. The spray pipes 30C1, 30D1, 30E1, 30F1, 30G1 and 30H1 in the first flow splitting mechanism 101 are respectively located on one side of the spray pipes 30C2, 30D2, 30E2, 30F2, 30G2 and 30H2 in the second flow splitting mechanism 101.

[0058] Exemplarily, the eight groups of spray pipes 30 in the first flow splitting mechanism 101 can enclose a setting space, and the eight groups of spray pipes 30 in the second flow splitting mechanism 101 can be located within the setting space.

[0059] In other embodiments, the flow homogenizing device may include a plurality of intake pipes 10, a shunt pipe assembly 20, a plurality of spray pipe assemblies, and a plurality of air homogenizing assemblies 40. The number of spray pipes 30 in each spray pipe assembly is at least one. The plurality of intake pipes 10 may all be connected to the shunt pipe assembly 20, and the plurality of spray pipes 40 may all be connected to the shunt pipe assembly 20. That is, the shunt pipe assembly 20 can shunt the multiple gas streams introduced through the plurality of intake pipes 10, and then transmit them to the plurality of spray pipe assemblies, and then the gas can enter the corresponding air homogenizing assemblies 40. Exemplarily, when the flow homogenizing device includes only one shunt pipe assembly 20, the number of intake pipes 10, spray pipe assemblies, and air homogenizing assemblies 40 can all be two. The two intake pipes 10 correspond to the two spray pipe assemblies one by one, and the two spray pipe assemblies correspond to the two air homogenizing assemblies 40 one by one; the spray pipes 30 of each spray pipe assembly are received in the corresponding air homogenizing assembly 40.

[0060] In the embodiments of the present application, the number of receiving boxes 41 in each air homogenizing assembly 40 is not specifically limited. For example, each air homogenizing assembly 40 may include one receiving box 41. For another example, each air homogenizing assembly 40 may include a plurality of receiving boxes 41 arranged along the first horizontal direction.

[0061] In the embodiments of the present application, the number of receiving cavities 411 in each receiving box 41 is not specifically limited. For example, two receiving cavities 411 may be opened in each receiving box 41. The two receiving cavities 411 may be spaced apart in the second horizontal direction, and each receiving cavity 411 may receive a plurality of spray pipes 30 arranged along the first horizontal direction.

[0062] Please refer to Figure 7 and Figure 8 , Figure 7 which shows two air homogenizing assemblies 40 provided by the embodiments of the present application, and shows the local structure inside one of the air homogenizing assemblies 40, Figure 8 is Figure 7 a partial enlarged view of

[0063] In some embodiments, a plurality of grooves 413 are formed in the bottom wall of each receiving cavity 411. The plurality of grooves 413 may be spaced apart along the first horizontal direction, and each groove 413 communicates with at least one second air outlet hole 412.

[0064] For example, each groove 413 may communicate with two second air outlet holes 412 spaced apart in the second horizontal direction.

[0065] It can be understood that the gas can first enter the groove 413 and then be ejected to the outside of the receiving box 41 through the second air outlet 412 corresponding to the groove 413. The side wall of the groove 413 can block the flow of the gas in the direction perpendicular to the vertical direction (for example, the first horizontal direction and the second horizontal direction), reduce the crosstalk of the gas in the horizontal direction in the receiving cavity 411, and improve the smoothness of the gas passing through the second air outlet 412.

[0066] It can be understood that when the number of the air distribution components 40 is two, the two air distribution components 40 can be symmetrically arranged according to the plane where the first horizontal direction and the vertical direction coexist, and the two air distribution components 40 are arranged at intervals; at this time, the preset area 201 can be located between the two air distribution components 40, or the projection of the preset area 201 in the vertical direction can coincide with the projection of the two air distribution components 40 in the vertical direction. The spray pipes 30 in the two flow distribution mechanisms 101 can be received in the receiving cavity 411 of each air distribution component 40 at the same time.

[0067] For example, the two air distribution components 40 are symmetrically arranged, and the number of the receiving boxes 41 in each air distribution component 40 is one, and the number of the receiving cavities 411 in each receiving box 41 is one. The spray pipes 30A1, 30A2, 30B1, and 30B2 in the two flow distribution mechanisms 101 can be received in one of the receiving boxes 41, and the spray pipes 30C1, 30C2, 30D1, and 30D2 in the two flow distribution mechanisms 101 can be received in the other receiving box 41. The number of the spray pipe assemblies can be two. The two spray pipe assemblies and the two air distribution components 40 are all located in the reaction chamber 200. The two air distribution components 40 are spaced and symmetrically arranged in the second horizontal direction. The two spray pipe assemblies are connected to the flow distribution pipe assembly 20. The spray pipes 30 of each spray pipe assembly are received in the corresponding air distribution component 40 to jet air to the carrier 300 in the preset area 201 from both sides spaced in the second horizontal direction, thereby improving the coating uniformity of the process in the reaction chamber 200. In addition, sheet materials can be placed on both opposite sides of the carrier 300 in the second horizontal direction. Therefore, the sheet materials on both sides of the carrier 300 can be coated with the gas ejected by the two air distribution components 40, which can not only ensure the coating uniformity but also improve the production yield.

[0068] It can be understood that in the uniform flow device 100, the gas is divided by the flow dividing pipe assembly 20 and the spray pipe 30, so that a stream of gas entering the intake pipe 10 can be divided into multiple streams of gas, and enter the receiving box 41 through a plurality of first air outlet holes 31 arranged on the spray pipe 30. The number of the second air outlet holes 412 on the receiving box 41 is greater than the number of the first air outlet holes 31 on all the spray pipes 30 in the receiving box 41, so that the receiving box 41 can divide the gas entering the receiving box 41, and then spray the gas into the reaction chamber 200 through a plurality of second air outlet holes 412. In this way, the uniformity of the gas injection into the reaction chamber 200 can be improved, and the situation that some sheet materials in the reaction chamber 200 have poor processing effects due to insufficient gas contact can be reduced.

[0069] In some embodiments, each flow dividing pipe assembly 20 may include a plurality of intake air flow dividing pipes 21, a plurality of first flow dividing pipes 22, and a plurality of second flow dividing pipes 23. Among them, the number of the first flow dividing pipes 22 is greater than the number of the intake air flow dividing pipes 21, and the number of the second flow dividing pipes 23 is greater than the number of the first flow dividing pipes 22. The following embodiments take the number of the intake air flow dividing pipes 21 as two, the number of the first flow dividing pipes 22 as twice the number of the intake air flow dividing pipes 21 (i.e., four), and the number of the second flow dividing pipes 23 as twice the number of the first flow dividing pipes 22 (i.e., eight) as an example for illustration.

[0070] Both of the two intake air flow dividing pipes 21 are fixedly connected to the intake pipe 10, and the two intake air flow dividing pipes 21 can be symmetrically arranged according to the plane where the vertical direction and the first horizontal direction coexist. Both of the two intake air flow dividing pipes 21 are communicated with the intake pipe 10. Each intake air flow dividing pipe 21 may include a horizontal pipeline extending along the second horizontal direction and a vertical pipeline extending along the vertical direction and towards the air equalizing assembly 40, and the intake air flow dividing pipe 21 is connected to the intake pipe 10 on the horizontal pipeline of the intake air flow dividing pipe 21.

[0071] Each intake air flow dividing pipe 21 corresponds to two first flow dividing pipes 22. Each first flow dividing pipe 22 is fixedly connected to the corresponding intake air flow dividing pipe 21 on the vertical pipeline of the intake air flow dividing pipe 21 and is communicated with the corresponding intake air flow dividing pipe 21. The two first flow dividing pipes 22 corresponding to the same intake air flow dividing pipe 21 can be symmetrically arranged according to the plane where the vertical direction and the second horizontal direction coexist. Each first flow dividing pipe 22 includes a main pipeline extending along the first horizontal direction and a branch pipeline extending along the vertical direction and / or the second horizontal direction. The main pipeline of each first flow dividing pipe 22 is connected to the corresponding intake air flow dividing pipe 21.

[0072] Each first shunt pipe 22 corresponds to two second shunt pipes 23. Each second shunt pipe 23 is fixedly connected to the corresponding first shunt pipe 22 at one end of the branch pipe of the first shunt pipe 22 away from the corresponding intake shunt pipe 21 and is in communication with the corresponding first shunt pipe 22. The two second shunt pipes 23 corresponding to the same first shunt pipe 22 can be symmetrically arranged according to the plane where the vertical direction and the second horizontal direction coexist. Each second shunt pipe 23 includes a main pipe extending along the first horizontal direction and a branch pipe extending along the vertical direction / and or the second horizontal direction. The main pipe of each second shunt pipe 23 is connected to the corresponding second shunt pipe 23, and a spray connection part 231 is fixedly connected to one end of the branch pipe of each second shunt pipe 23 away from the corresponding first shunt pipe 22. The spray pipe 30 corresponding to the same second shunt pipe 23 can be fixedly connected to the corresponding spray connection part 231.

[0073] It can be understood that the intake shunt pipe 21, the first shunt pipe 22, and the second shunt pipe 23 can perform three - stage gas shunting on the gas entering the shunt mechanism 101 from the intake pipe 10, and each stage of shunting divides at least one gas stream into two gas streams. The spray pipe 30 can further divide the gas in the second shunt pipe 23 into multiple streams. In this way, multi - layer shunting of the gas introduced into the intake pipe 10 can be achieved. The gas flows along the first horizontal direction during the gas shunting process, which can increase the coverage area during gas spraying and improve the uniformity of gas spraying.

[0074] It can be understood that the intake shunt pipe 21 and the intake pipe 10 can be connected through a multi - way joint (such as a three - way joint), the first shunt pipe 22 and the intake shunt pipe 21 can be connected through a multi - way joint (such as a three - way joint), and the second shunt pipe 23 and the first shunt pipe 22 can be connected through a multi - way joint (such as a three - way joint).

[0075] It can be understood that flanges can be fixedly connected to the peripheral walls of the intake shunt pipe 21, the first shunt pipe 22, and / or the second shunt pipe 23, and the flanges can be fixedly connected to the wall of the reaction chamber 200 to realize the fixed connection of the flow - equalizing device 100 and the reaction chamber 200.

[0076] In the embodiments of the present application, the relative positional relationship between the intake shunt pipe 21, the first shunt pipe 22, and the second shunt pipe 23 and the reaction chamber 200 is not specifically limited. For example, the intake shunt pipe 21 is located outside the reaction chamber 200, the second shunt pipe 23 is located inside the reaction chamber 200, and a part of the first shunt pipe 22 is located inside the reaction chamber 200 and the remaining part is located outside the reaction chamber 200.

[0077] It can be understood that when the number of the flow splitting mechanisms 101 is two, the intake air flow splitting pipes 21, the first flow splitting pipes 22, and the second flow splitting pipes 23 of the two flow splitting mechanisms 101 can be arranged at intervals or staggered in the vertical direction, the second horizontal direction, and the first horizontal direction. The embodiments of the present application do not limit this. For example, the two intake air flow splitting pipes 21 of the first flow splitting mechanism 101 are located on both sides of the two intake air flow splitting pipes 21 of the second flow splitting mechanism 101 in the second horizontal direction; the main pipelines of the two first flow splitting pipes 22 of the first flow splitting mechanism 101 are located on both sides of the main pipelines of the two first flow splitting mechanisms 101 of the second flow splitting mechanism 101 in the second horizontal direction; at least part of the branch pipelines of the four first flow splitting pipes 22 of the second flow splitting mechanism 101 are located on both sides of at least part of the branch pipelines of the four first flow splitting pipes 22 of the second flow splitting mechanism 101 in the first horizontal direction; the eight second flow splitting pipes 23 of the second flow splitting mechanism 101 are located within the space surrounded by the eight second flow splitting pipes 23 of the first flow splitting mechanism 101.

[0078] In some other embodiments, each flow splitting mechanism 101 may include an intake air flow splitting pipe 21 and the first flow splitting pipe 22 to the Nth flow splitting pipe, and the Nth flow splitting pipe is connected to the spray pipe 30, where N is an integer greater than one. Define M as any integer in the interval (1, N]. In each flow splitting mechanism 101, the number of the Mth flow splitting pipes is greater than the number of the (M - 1)th flow splitting pipes, and the number of the Mth flow splitting pipes can be an integer multiple of the number of the (M - 1)th flow splitting pipes. The Mth flow splitting pipe is located on the side away from the intake pipe 10 of the (M - 1)th flow splitting pipe in the vertical direction. In each flow splitting mechanism 101, the number of the spray pipes 30 is greater than the number of the Nth flow splitting pipes, and the number of the spray pipes 30 can be an integer multiple of the number of the Nth flow splitting pipes.

[0079] It can be understood that the staff can determine the specific value of N according to the space of the reaction chamber 200, the specifications of the sheet materials, and the types of processing of the sheet materials. The intake air flow splitting pipe 21, the spray pipe 30, and the first flow splitting pipe 22 to the Nth flow splitting pipe can achieve at least N + 2 times of gas flow splitting.

[0080] In some embodiments, each air distribution component 40 may further include a flow splitting plate 43. The flow splitting plate 43 is fixedly installed in the receiving box 41, and the flow splitting plate 43 is located in the receiving cavity 411. The flow splitting plate 43 is arranged at an interval from the spray pipe 30 in the receiving cavity 411 in the vertical direction, and is arranged at an interval from the bottom wall of the receiving cavity 411. A plurality of through holes 431 are formed in the flow splitting plate 43, and the through holes 431 penetrate through the flow splitting plate 43 in the vertical direction. The plurality of through holes 431 are arranged in a staggered manner with the plurality of second air outlet holes 412 on the receiving box 41, and are arranged in a staggered manner with the plurality of first air outlet holes 31 on the spray pipe 30 in the receiving cavity 411.

[0081] Please refer to Figure 9, it can be understood that the flow dividing plate 43 can divide the corresponding accommodation cavity 411 into a first cavity 4111 and a second cavity 4112. The first cavity 4111 and the second cavity 4112 are arranged at intervals in the vertical direction. The first cavity 4111 is located on the side of the flow dividing plate 43 away from the bottom of the accommodation box 41, and the second cavity 4112 is located on the side of the flow dividing plate 43 close to the bottom of the accommodation box 41. The first cavity 4111 and the second cavity 4112 can be communicated through a plurality of through holes 431 on the flow dividing plate 43. The first cavity 4111 can accommodate the spray pipe 30.

[0082] It can be understood that as Figure 7 and Figure 8 shown, Figure 7 and Figure 8 show a partial structure inside a gas distribution assembly 40. Two accommodation cavities 411 are provided in the accommodation box 41 of the gas distribution assembly 40 and are arranged at intervals in the second horizontal direction. Figure 7 and Figure 8 show the bottom wall of one of the accommodation cavities 411 and a part of the spray pipe 30 accommodated in the accommodation cavity 411, and show the flow dividing plate 43 in the other accommodation cavity 411 and a part of the spray pipe 30 accommodated in the accommodation cavity 411.

[0083] It can be understood that the aperture of the through hole 431 can be equal to or smaller than the aperture of the first air outlet 31, and the aperture of the second air outlet 412 can be equal to or smaller than the aperture of the through hole 431.

[0084] It can be understood that the through hole 431 can be arranged offset from the second air outlet 412 and the first air outlet 31 in the first horizontal direction and / or the second horizontal direction. The embodiments of the present application do not limit this.

[0085] It can be understood that after the gas in the spray pipe 30 enters the accommodation cavity 411 through the first air outlet 31, the gas decelerates due to the blockage of the flow dividing plate 43, and the gas flowing at a low speed can freely flow in the accommodation cavity 411. The gas flowing out of the first air outlet 31 of the spray pipe 30 can fill the space between the lid 42 and the flow dividing plate 43 in the accommodation cavity 411, and then enter the space between the flow dividing plate 43 and the bottom wall of the accommodation cavity 411 through the through hole 431. When the gas fills the space between the flow dividing plate 43 and the bottom wall of the accommodation cavity 411, the gas can be sprayed into the reaction cavity 200 through the second air outlet 412. In this way, when the gas is sprayed into the reaction cavity 200, it can freely diffuse into the reaction cavity 200, and the uniformity of gas spraying can be improved.

[0086] In the embodiment of the present application, there is no specific limitation on the number of the diverter plates 43 in each gas homogenizing assembly 40. For example, there are two diverter plates 43 in each gas homogenizing assembly 40, the two diverter plates 43 are arranged in the same receiving cavity 411, and the two diverter plates 43 are arranged along the second horizontal direction, and each first diverter plate 43 can be arranged corresponding to two spray pipes 30 in one diverter mechanism 101.

[0087] In the embodiment of the present application, there is no specific limitation on the layout of the through holes 431 on the diverter plate 43. For example, when each receiving cavity 411 receives two diverter plates 43 arranged along the second horizontal direction, two rows of through holes 431 may be provided on each diverter plate 43, the two rows of through holes 431 are arranged at intervals along the second horizontal direction, and each row of through holes 431 includes a plurality of through holes 431 arranged at intervals along the first horizontal direction.

[0088] In some embodiments, each air-leveling assembly 40 may further include a guide cover 44. The guide cover 44 may be disposed on the corresponding receiving box 41 and fixedly connected to the receiving box 41. The guide cover 44 may shield the receiving box 41 from a side close to the air inlet pipe 10 in the vertical direction and from a side away from another air-leveling assembly 40 in the second horizontal direction, and a notch corresponding to the clearance hole 421 is provided on the guide cover 44.

[0089] A guide wall 441 is provided on one side of the air guide cover 44 in the second horizontal direction. The guide wall 441 has a top end close to the air inlet pipe 10 in the vertical direction and a bottom end away from the air inlet pipe 10. The distance between the top end of the guide wall 441 and another air leveling component 40 in the second horizontal direction is greater than the distance between the bottom end and another air leveling component 40 in the second horizontal direction. The guide wall 441 can partially block the side of the receiving box 41 on which the second air outlet holes 412 are provided in the vertical direction. Among the four rows of second air outlet holes 412 provided in the second horizontal direction on the receiving box 41, the S rows of second air outlet holes 412 away from another air leveling component 40 are blocked by the guide wall 441 in the vertical direction. After the gas ejected from the S rows of second air outlet holes 412 flows to the guide wall 441, the flow direction can be adjusted in the direction close to another adjacent air leveling component 40. Wherein, S is greater than or equal to 1 and less than 4.

[0090] It can be understood that the guide wall 441 in the two gas leveling components 40 can guide the gas ejected from the second gas outlet 412 to eject the gas toward the lower portion of the interval area between the two gas leveling components 40, that is, can guide the gas to flow toward the preset area 201. The direction of gas injection is aligned with the carrier 300, which can reduce the probability that the sheet material on the carrier 300 cannot contact sufficient gas.

[0091] In the embodiments of the present application, the shape of the guiding wall 441 is not specifically limited. For example, the guiding wall 441 can be a wall that is inclined and has two planar surfaces. Another example is that the guiding wall 441 can be an arc-shaped wall.

[0092] It can be understood that the branch pipeline of the second shunt pipe 23 can enter the receiving box 41 through the notch and the relief hole 421.

[0093] The flow equalizing device 100 and the processing equipment provided by the embodiments of the present application can convey the gas introduced from the intake pipe 10 downward in the vertical direction, and during the gas conveyance process, change the gas passage from one to multiple through the pipes extending along the first horizontal direction and the second horizontal direction, so as to realize multiple shunts of the gas through the shunt pipe assembly 20 and the spray pipe 30. The gas in the spray pipe 30 can enter the receiving cavity 411, and after filling the receiving cavity 411, flow into the reaction cavity 200 through the second air outlet hole 412. After the gas enters the reaction cavity 200, it can flow to the preset area 201 and contact the sheet material at the preset area 201, thereby realizing the coating processing of the sheet material.

[0094] In this way, the multiple shunts of the gas by the shunt pipe assembly 20 and the spray pipe 30, and the flow equalization of the gas by the flow equalizing assembly 40 can increase the moving range of the gas after entering the reaction cavity 200 and the uniformity of the distribution in the reaction cavity 200, and improve the processing effect of the sheet material.

[0095] For those skilled in the art, it is obvious that the present application is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present application, the present application can be implemented in other specific forms. Therefore, from any point of view, the above embodiments of the present application should be regarded as exemplary and non-limiting. The scope of the present application is defined by the appended claims rather than the above description. Therefore, it is intended to cover all changes falling within the meaning and scope of the equivalent elements of the claims in the present application.

Claims

1. A flow equalizing device, characterized in that: include: An air intake pipe, the air intake pipe is used to receive gas; A flow diverter assembly, the flow diverter assembly is connected to the air inlet pipe and is used to divert the gas; A spray pipe assembly, comprising at least one spray pipe, wherein the spray pipe is connected to the diverter pipe assembly to achieve connection with the air inlet pipe; a plurality of first air outlet holes are provided on the spray pipe, and the first air outlet holes are used to output the gas; The gas leveling component is used to accommodate the spray pipe, and the spray pipe is connected with the gas leveling component through multiple first air outlet holes. The gas leveling component is provided with multiple second air outlet holes, and the multiple second air outlet holes are used to allow the gas in the gas leveling component to be sprayed out of the gas leveling component.

2. The flow equalizing device according to claim 1, characterized in that: A receiving cavity is provided in each of the air homogenizing components. The receiving cavity is used to receive the spray pipe and is connected to the first air outlet. The receiving cavity is connected to the second air outlet, wherein the number of the second air outlets is greater than the number of the first air outlets.

3. The flow equalizing device according to claim 2, characterized in that: Each of the gas homogenizing components comprises: A storage box, wherein the storage chamber is opened in the storage box, and a plurality of the second air outlets are opened at the bottom of the storage box; A diverter plate is received in the receiving chamber, the diverter plate is spaced apart from the bottom wall of the receiving chamber to form a first cavity between the diverter plate and the bottom wall of the receiving chamber, the diverter plate is located between the spray pipe and the bottom wall of the receiving chamber, a plurality of through holes are provided on the diverter plate, the plurality of through holes are used for the gas to pass through, the plurality of through holes are staggered with the plurality of first air outlets, and are staggered with the plurality of second air outlets.

4. The flow equalizing device according to claim 2, characterized in that: A plurality of grooves are provided on the bottom wall of the receiving cavity, and each of the second air outlets is provided on the bottom wall of the corresponding groove. Each of the second air outlets is connected with the receiving cavity through the corresponding groove, and each of the grooves is used to gather the gas so that the gas flows toward the second air outlet.

5. The flow equalizing device according to claim 2, characterized in that: The plurality of first air outlet holes are arranged at intervals in the first horizontal direction; Among the plurality of second air outlet holes connected to the same receiving cavity, at least two of the second air outlet holes are spaced apart in the first horizontal direction, and at least two of the second air outlet holes are spaced apart in the second horizontal direction; The first horizontal direction is perpendicular to the second horizontal direction.

6. The flow equalizing device according to claim 2, characterized in that: The gas homogenizing component comprises: A storage box, wherein the storage chamber is opened in the storage box, and a plurality of the second air outlets are opened at the bottom of the storage box; A flow guide cover is arranged on the storage box, and the flow guide cover is used to partially cover the side of the storage box where the second air outlet is opened. The flow guide cover is used to block part of the gas ejected from multiple second air outlets and guide the part of the gas to flow in a direction close to a preset area.

7. The flow equalizing device according to claim 6, characterized in that: A guide wall is provided on one side of the air guide cover, and the top and bottom ends of the guide wall in the vertical direction are spaced apart in the second horizontal direction, and the guide wall is used to cover part of the second air outlet hole and guide the gas to flow in a direction close to the preset area; The vertical direction is perpendicular to the second horizontal direction, and the preset area is spaced apart from the guide wall in the vertical direction and spaced apart from the guide wall in the second horizontal direction.

8. The flow equalizing device according to claim 1, characterized in that: The flow homogenizing device is used to be partially arranged in the reaction chamber of the processing equipment, the number of the spray pipe assembly and the gas homogenizing assembly is two, the two spray pipe assemblies and the two gas homogenizing assemblies are used to be arranged in the reaction chamber, and the two gas homogenizing assemblies are arranged at intervals in the second horizontal direction; The two spray pipe assemblies are connected to the diverter pipe assembly, at least part of the second air outlet holes are arranged toward a preset area, and the spray pipe of each spray pipe assembly is accommodated in the corresponding air homogenizing assembly to spray air toward the preset area; Wherein, the preset area is located in the reaction chamber; the projection of the preset area in the vertical direction coincides with the projection of the two gas uniforming components in the vertical direction, or the preset area is located between the two gas uniforming components in the second horizontal direction; the vertical direction is perpendicular to the second horizontal direction.

9. The flow equalizing device according to claim 1, characterized in that: There are multiple spray pipes, and the diverter pipe assembly includes: A plurality of first shunt pipes, each of which is connected to a corresponding spray pipe, and each of which corresponds to a plurality of spray pipes; A plurality of air intake manifolds, each of which is connected to the air intake pipe, each of which is connected to the corresponding first manifold, and each of which corresponds to a plurality of the first manifolds; There are multiple second diverter pipes, each of which is connected to the corresponding spray pipe, and each of the second diverter pipes corresponds to multiple spray pipes; each of the second diverter pipes is connected to the corresponding first diverter pipe, and each of the first diverter pipes corresponds to multiple second diverter pipes.

10. A processing equipment, characterized in that: The processing equipment includes: A reaction chamber, the reaction chamber is used to accommodate a plurality of sheet materials; The flow equalizing device according to any one of claims 1 to 9, wherein the flow equalizing device is connected to the reaction chamber, and the flow equalizing device is used to spray the gas into the reaction chamber so that the plurality of sheet materials receive the gas.

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