Bearing device and processing equipment

Abstract

The utility model provides a bearing device and machining equipment, the bearing device is used for bearing a plurality of workpieces, and the bearing device comprises a carrying mechanism used for abutting against one faces of the workpieces and bearing pressure applied by the workpieces; the multiple pressing pieces are separably arranged on the carrying mechanism, the multiple pressing pieces are used for being arranged on the peripheral sides of the corresponding workpieces, and each pressing piece is used for abutting against the other face of the corresponding workpiece so as to be matched with the carrying mechanism to clamp the corresponding workpiece; and the multiple sealing gaskets are arranged on the carrying mechanism, and each sealing gasket is used for abutting against the face, facing the carrying mechanism, of the workpiece so as to block gas. According to the bearing device and the machining equipment provided by the invention, when the pressing piece and the carrying mechanism are matched to clamp the workpiece, the sealing gasket and the carrying mechanism are matched to form a closed space on the surface, which does not need to be machined, of the workpiece, so that gas is prevented from getting close to the surface, which does not need to be machined, of the workpiece, and the winding plating condition of the workpiece in the coating process is reduced.

Description

Technical Field

[0001] This application relates to the technical field of photovoltaic and semiconductor product production, and particularly relates to a carrying device and a processing apparatus. Background Art

[0002] During the production of photovoltaic and semiconductor products, sheet materials need to undergo atomic layer deposition (ALD) to form multiple atomic layers on the sheet materials. Currently, the sheet materials can be first placed flat on a carrier, and then enter the reaction chamber synchronously with the carrier. Two precursors can be sequentially introduced into the reaction chamber to form an atomic layer on the top surface of the sheet materials.

[0003] Some precursors will flow to the back surface of the sheet materials when flowing in the reaction chamber, resulting in the formation of atomic layers on the back surfaces of some sheet materials, causing the phenomenon of overcoating, which affects the application of the sheet materials after coating. Summary of the Utility Model

[0004] In view of the above, it is necessary to provide a carrying device and a processing apparatus to solve the above defects.

[0005] In a first aspect, an embodiment of the present application provides a carrying device for carrying a plurality of workpieces. The carrying device includes: a supporting mechanism for abutting against one side of the workpiece and bearing the pressure exerted by the workpiece; a plurality of pressing members detachably disposed on the supporting mechanism, the plurality of pressing members being used to be disposed on the peripheries of the corresponding workpieces, and each pressing member being used to abut against the other side of the corresponding workpiece to cooperate with the supporting mechanism to clamp the corresponding workpiece; and a plurality of sealing gaskets disposed on the supporting mechanism, each sealing gasket being used to abut against the side of the workpiece facing the supporting mechanism to block gas.

[0006] Optionally, among the two opposite sides of the supporting mechanism in the thickness direction, at least one side is provided with a plurality of first receiving grooves, each first receiving groove being used to partially receive the corresponding workpiece, and each sealing gasket being at least partially received in the corresponding first receiving groove.

[0007] Optionally, the supporting mechanism includes: a carrier plate, a plurality of first receiving grooves being provided on at least one side of the carrier plate, a plurality of second receiving grooves being provided on the carrier plate, each second receiving groove communicating with the corresponding first receiving groove, and each second receiving groove being located on the side of the corresponding first receiving groove in the length direction and / or height direction of the supporting mechanism; a plurality of cushion blocks, each cushion block being received in the corresponding second receiving groove, each cushion block being used to abut against the corresponding workpiece and cooperate with the corresponding pressing member to clamp the corresponding workpiece; and in the thickness direction of the supporting mechanism, the side of each cushion block for abutting against the workpiece protrudes from the bottom wall of the corresponding first receiving groove in the thickness direction.

[0008] Optionally, a plurality of third receiving grooves are formed in the carrier plate, each third receiving groove is formed in the bottom wall of the corresponding first receiving groove, each gasket is partially received in the corresponding third receiving groove, and the portion of each gasket protruding from the corresponding third receiving groove in the thickness direction is used to abut against the corresponding workpiece.

[0009] Optionally, the plurality of pressing members include: a plurality of pressing plates, in the length direction of the carrying mechanism, the plurality of pressing plates are arranged on at least one side of the corresponding first receiving groove; a plurality of pressing sheets, in the height direction of the carrying mechanism, the plurality of pressing sheets are arranged on at least one side of the corresponding first receiving groove, the number of pressing sheets on the same side of the same first receiving groove is multiple, and the multiple pressing sheets on the same side of the same first receiving groove are arranged in the length direction.

[0010] Optionally, a plurality of first receiving grooves are formed on both surfaces of the carrying mechanism in the thickness direction, and a plurality of pressing members and a plurality of gaskets are arranged; on each surface of the carrying mechanism, at least two of the plurality of first receiving grooves are arranged in the height direction of the carrying mechanism, and at least two of the plurality of first receiving grooves are arranged in the length direction of the carrying mechanism.

[0011] Optionally, the carrying device further includes: a guiding member, the guiding member is arranged at one end of the carrying mechanism in the height direction of the carrying mechanism, the guiding member extends in the length direction of the carrying mechanism, and the guiding member is used to abut against a transmission device to move the carrying device in the length direction.

[0012] Optionally, the carrying device further includes: a plurality of identifying members, the plurality of identifying members are arranged on both sides of the carrying mechanism in the length direction of the carrying mechanism, and each identifying member is used to cooperate with the detection of a detection member to enable the detection member to detect the position of the carrying mechanism.

[0013] Optionally, the carrying device further includes: a blocking member, the blocking member is arranged on one side of the carrying mechanism in the length direction of the carrying mechanism, and the blocking member is used to abut against the side wall of a cavity to close the cavity; wherein, the cavity is used to receive the carrying device.

[0014] In a second aspect, an embodiment of the present application provides a processing device, including: a cavity, in which a gas is filled; a carrying device as described in any one of the above, the carrying device is used to enter the cavity so that a plurality of workpieces enter the cavity, thereby processing the plurality of workpieces through the gas.

[0015] Through the carrying device and the processing device provided by the present application, while the pressing member cooperates with the carrying mechanism to clamp the workpiece, the gasket cooperates with the carrying mechanism to form a sealed space on the side of the workpiece that does not need to be processed, blocking the gas from approaching the side of the workpiece that does not need to be processed, and reducing the circumferential plating situation of the workpiece during the coating process. Description of the Drawings

[0016] Figure 1It is a schematic structural diagram of the processing equipment in the embodiment of the present application.

[0017] Figure 2 It is a front view of the carrying device in the embodiment of the present application.

[0018] Figure 3 It is a schematic structural diagram of the carrying device in the embodiment of the present application.

[0019] Figure 4 It is Figure 2 an enlarged view of part IV in

[0020] Figure 5 It is a partial cross-sectional view taken along V-V in Figure 2

[0021] Figure 6 It is a schematic structural diagram of the carrying device, the workpiece and the transmission device in the embodiment of the present application.

[0022] Figure 7 It is a schematic structural diagram of the carrying device, the jig and the workpiece in the embodiment of the present application.

[0023] Main element symbol description:

[0024] 100, processing equipment; 101, carrying device; 10, supporting mechanism; 11, carrier plate; 111, first receiving groove; 112, second receiving groove; 113, third receiving groove; 114, through groove; 115, weight reduction groove; 12, cushion block; 121, positioning groove; 20, pressing member; 21, pressing plate; 211, first through hole; 212, first screw; 22, pressing piece; 221, second through hole; 222, second screw; 30, sealing gasket; 40, filling block; 50, guiding member; 60, identifying member; 70, blocking member; 102, cavity; 103, transmission device; 200, workpiece; 300, jig; 301, loading groove. Detailed implementation manners

[0025] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments.

[0026] The multiple involved in the present application means two or more. In addition, it should be understood that in the description of the present application, words such as "first" and "second" are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying order.

[0027] ​In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to represent examples, illustrations, or explanations. Any embodiment or design solution described as "exemplary" or "for example" in the embodiments of the present application should not be construed as being more preferred or having more advantages than other embodiments or design solutions. Rather, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific manner.

[0028] Please refer to Figure 1 , Figure 1 which shows a processing device 100 provided by an embodiment of the present application.

[0029] In an embodiment of the present application, the processing device 100 may include a carrying device 101, a cavity 102, and a transmission device 103. The carrying device 101 can carry a plurality of vertically placed workpieces 200 ( Figure 6 shown in). The transmission device 103 can support the carrying device 101 and can drive the transmission device 103 to move in a first direction. An opening for the carrying device 101 to enter and exit the cavity 102 is provided on one side of the cavity 102 in the first direction. The transmission device 103 can be fixedly installed on the wall of the cavity 102, and the carrying device 101 can enter or exit the cavity 102 under the drive of the transmission device 103.

[0030] Among them, the length direction of the carrying device 101 can be defined as the first direction, the thickness direction as the second direction, and the height direction as the third direction. The first direction, the second direction, and the third direction are perpendicular to each other. For example, as Figure 1 shown, the first direction can be the X direction and its opposite direction, the second direction can be the Y direction and its opposite direction, and the third direction can be the Z direction and its opposite direction.

[0031] It can be understood that the workpiece 200 can be in the shape of a rectangular sheet. When the workpiece 200 is vertically placed, the length direction or the width direction of the workpiece 200 can coincide with the third direction or form an acute angle with the third direction. In the embodiments of the present application, the type of the workpiece 200 is not specifically limited. For example, the workpiece 200 can be coated glass, silicon wafers, silicon carbide wafers, etc. applied to photovoltaic products.

[0032] In the embodiments of the present application, the type of processing of the workpiece 200 by the processing device 100 is not specifically limited. For example, the processing device 100 can perform coating processing on the workpiece 200 through an atomic layer deposition (ALD) process.

[0033] In some cases, the workpiece 200 can be directly loaded on the carrying device 101 for processing. In other cases, the workpiece 200 is first loaded on a jig 300 ( Figure 7After being loaded onto the carrier device 101 (as shown in the figure), the jig 300 is then loaded onto the carrier device 101, thereby enabling the carrier device 101 to carry the workpiece 200.

[0034] In the embodiments of the present application, the positional relationship between the cavity 102 and the transmission device 103 is not specifically limited. For example, a part of the transmission device 103 can be located inside the cavity 102, and the remaining part can be located outside the cavity 102.

[0035] It can be understood that the transmission device 103 can be a device with a linear transmission function. In the embodiments of the present application, the type of the transmission device 103 is not specifically limited. For example, the transmission device 103 can include a motor, a transmission mechanism, and a plurality of conveyor wheels. The axial directions of the plurality of conveyor wheels can coincide with the second direction, and the plurality of conveyor wheels can be arranged at intervals along the first direction. The plurality of conveyor wheels are all rotatably connected to the wall of the cavity 102. The transmission mechanism is connected to the motor. When the motor operates, it can drive the transmission mechanism to move. The transmission mechanism can drive the plurality of conveyor wheels to rotate based on the principle of belt transmission. The plurality of conveyor wheels can all abut against the carrier device 101 located inside the cavity 102 and support the carrier device 101. When the plurality of conveyor wheels rotate, they can drive the carrier device 101 to move in the first horizontal direction.

[0036] Among them, the rotational connection can be achieved through a rotational connection member, which is a connection method that enables two components to rotate relative to each other. In the embodiments of the present application, the type of the rotational connection member is not specifically limited. For example, the rotational connection member can be, but is not limited to, bearings, hinges, hinges, pin shafts, etc.

[0037] It can be understood that a designated part of the carrier device 101 can be made of ferromagnetic material or provided with magnets. A plurality of magnetic members (not shown in the figure) can be provided inside the cavity 102. The plurality of magnetic members can be arranged at intervals in the second direction and are arranged to align with the designated part of the carrier device 101 in the first direction and the third direction. In this way, after the carrier device 101 enters the cavity 102, the plurality of magnetic members are respectively distributed on both sides of the carrier device 101, and can support the carrier device 101 from the two sides in the second direction by the mutual repulsion of the magnets, so that the carrier device 101 maintains a spaced arrangement from the inner wall of the cavity 102 on the two opposite sides in the second direction of the cavity 102, and enables the carrier device 101 to be vertically arranged inside the cavity 102. In this way, the probability of the carrier device 101 flipping when the transmission device 103 drives the carrier device 101 to move can be reduced.

[0038] Please refer to Figure 2 and Figure 3, in some embodiments, the carrying device 101 may include a carrying mechanism 10, a plurality of pressing members 20, and a plurality of sealing gaskets 30. At least one surface of the carrying mechanism 10 in the second direction may abut against one surface of a plurality of workpieces 200 in the second direction. The plurality of pressing members 20 may be disposed on the other surface of the carrying mechanism 10 for abutting against the workpieces 200. The plurality of pressing members 20 are each detachably connected to the carrying mechanism 10 and may abut against the surface of the workpiece 200 facing away from the carrying mechanism 10. The carrying mechanism 10 can bear the pressure of the plurality of workpieces 200 on the carrying mechanism 10. The plurality of pressing members 20 and the carrying mechanism 10 can cooperate to clamp and fix the plurality of workpieces 200.

[0039] The plurality of sealing gaskets 30 may be disposed on the surface of the carrying mechanism 10 for abutting against the workpieces 200, and each sealing gasket 30 may correspond to each workpiece 200 carried on the carrying mechanism 10. Each sealing gasket 30 may abut against the surface of the workpiece 200 facing the carrying mechanism 10. When the pressing member 20 and the carrying mechanism 10 cooperate to clamp the workpiece 200, the sealing gasket 30 is squeezed by the workpiece 200 and the carrying mechanism 10 and thus deforms. The deformed sealing gasket 30 can fill the gap between the surface of the workpiece 200 facing the carrying mechanism 10 and the carrying mechanism 10. The sealing gasket 30 can block the gas flowing in the cavity 102, so that the gas cannot flow to the surface of the workpiece 200 facing the carrying mechanism 10.

[0040] It can be understood that the surface of the workpiece 200 facing away from the carrying mechanism 10 can contact the gas in the cavity 102 and perform coating processing. That is, the surface of the workpiece 200 facing away from the carrying mechanism 10 is the surface to be processed, and the surface facing the carrying mechanism 10 is the surface that does not need to be processed. Thus, while the pressing member 20 and the carrying mechanism 10 cooperate to clamp the workpiece 200, the sealing gasket 30 and the carrying mechanism 10 cooperate to form a sealed space on the surface of the workpiece 200 that does not need to be processed, blocking the gas from approaching the surface of the workpiece 200 that does not need to be processed and reducing the overplating situation of the workpiece 200 during the coating process.

[0041] In the embodiments of the present application, the connection manner of the detachable connection is not specifically limited. For example, the connection manner of the detachable connection may include, but is not limited to, screw connection, bolt connection, snap connection, etc.

[0042] In some cases, among the two opposite surfaces of the carrying mechanism 10 in the thickness direction, one surface bears the workpiece 200. In other cases, both opposite surfaces of the carrying mechanism 10 in the thickness direction can bear the workpiece 200, and the pressing members 20 and the sealing gaskets 30 are disposed on both surfaces. The following embodiments will take the case where both opposite surfaces of the carrying mechanism 10 in the thickness direction can bear the workpiece 200 as an example for illustration.

[0043] Please refer to Figures 4 to 6In some embodiments, the supporting mechanism 10 may include a carrier plate 11 and a plurality of pads 12. The carrier plate 11 is provided with a plurality of first receiving grooves 111 on both sides in the second direction. The first receiving grooves 111 are grooves, and each first receiving groove 111 can receive a partial structure of at least one workpiece 200. When the workpiece 200 is received in the first receiving groove 111, one side of the workpiece 200 in the thickness direction extends out of the first receiving groove 111.

[0044] The carrier plate 11 is also provided with a plurality of second receiving grooves 112, which are grooves. Each first receiving groove 111 is provided with second receiving grooves 112 on both sides in the first direction and on both sides in the third direction, and each second receiving groove 112 is connected with the corresponding first receiving groove 111. The depth of each second receiving groove 112 in the second direction may be greater than the depth of the corresponding first receiving groove 111 in the second direction. Each cushion block 12 may be accommodated in the corresponding second receiving groove 112, and each second receiving groove 112 may accommodate one cushion block 12, and the side wall of the second receiving groove 112 may limit the movement of the cushion block 12. The cushion block 12 may protrude from the bottom wall of the corresponding first receiving groove 111 in the second direction in the second direction, and the cushion block 12 may abut against the surface of the workpiece 200 that does not need to be processed. In this way, the four cushion blocks 12 may abut against the workpiece 200 from the four sides of the workpiece 200, and a spacing may exist between the workpiece 200 and the bottom wall of the corresponding first receiving groove 111 in the second direction.

[0045] When a workpiece 200 is carried on the carrier 11, the middle of the workpiece 200 enters the corresponding first receiving groove 111, and the four sides of the workpiece 200 enter the corresponding second receiving groove 112 and abut against the corresponding cushion block 12. The pressing members 20 and cushion blocks 12 corresponding to the same first receiving groove 111 can be arranged correspondingly. The projections of the plurality of pressing members 20 in the second direction can overlap with the projections of the second receiving groove 112 in the second direction, so that the pressing members 20 cooperate with the corresponding cushion blocks 12 to clamp the corresponding workpiece 200, and the carrying device 101 receives the workpiece 200.

[0046] It can be understood that the length of the workpiece 200 in the first direction can be greater than the length of the corresponding first receiving groove 111 in the first direction, and less than or equal to the sum of the lengths of the corresponding first receiving groove 111 and the two second receiving grooves 112 on both sides of the first direction in the first direction. The height of the workpiece 200 in the third direction can be greater than the height of the corresponding first receiving groove 111 in the third direction, and less than or equal to the sum of the heights of the corresponding first receiving groove 111 and the two second receiving grooves 112 on both sides of the third direction in the third direction.

[0047] In some embodiments, each spacer 12 may be provided with a positioning groove 121. The positioning groove 121 may be formed on a side of the spacer 12 facing away from the carrier plate 11 in the second direction, and the positioning groove 121 may penetrate through the side of the spacer 12 facing the first receiving groove 111. When the spacer 12 is received in the corresponding second receiving groove 112, the positioning groove 121 communicates with the corresponding first receiving groove 111, and the bottom wall of the positioning groove 121 in the second direction protrudes from the bottom wall of the first receiving groove 111 in the second direction. The positioning groove 121 may receive the corresponding workpiece 200. The bottom wall of the positioning groove 121 in the second direction may abut against a surface of the corresponding workpiece 200 that does not need to be processed, and the surface of the workpiece 200 that does not need to be processed is spaced apart from the bottom wall of the corresponding first receiving groove 111 in the second direction; the side walls of the positioning groove 121 in the first direction or the third direction may abut against the workpiece 200, and the side walls of the four positioning grooves 121 corresponding to the same workpiece 200 may cooperate to limit the movement of the workpiece 200 in the first direction and the third direction.

[0048] It can be understood that the surface of each spacer 12 may be sprayed with a Teflon coating, thereby reducing the hardness of the surface of the spacer 12 in contact with the workpiece 200 and reducing the burrs on the spacer 12, and reducing the probability of scratching the workpiece 200 when the spacer 12 abuts against the workpiece 200.

[0049] When the spacer 12 and the pressing member 20 cooperate to clamp the workpiece 200, and the positioning groove 121 limits the workpiece 200 in the first direction and the third direction, the workpiece 200 is spaced apart from the bottom wall of the first receiving groove 111 that has not been spray-processed, which can reduce the probability of the carrier plate 11 scratching the workpiece 200 caused by the direct contact between the workpiece 200 and the carrier plate 11.

[0050] In the embodiments of the present application, the material of the carrier plate 11 is not specifically limited. For example, the material of the carrier plate 11 may be, but is not limited to, stainless steel.

[0051] In some embodiments, a plurality of third receiving grooves 113 are formed on the carrier plate 11. The plurality of third receiving grooves 113 correspond to the plurality of first receiving grooves 111 one by one. Each third receiving groove 113 is formed on the bottom wall of the corresponding first receiving groove 111 in the second direction. The plurality of third receiving grooves 113 correspond to the plurality of gaskets 30 one by one. Each gasket 30 is partially received in the corresponding third receiving groove 113, and one side of each gasket 30 in the second direction extends out of the third receiving groove 113 in the second direction and enters the first receiving groove 111. The portion of each gasket 30 entering the first receiving groove 111 may abut against the corresponding workpiece 200 and form a sealed space on the surface of the corresponding workpiece 200 that does not need to be processed to block gas.

[0052] In the embodiments of the present application, the shape of the gasket 30 is not specifically limited. For example, the gasket 30 may be annular, and the third receiving groove 113 is annular.

[0053] In the embodiments of the present application, the material of the gasket 30 is not specifically limited. For example, the material of the gasket 30 may be, but is not limited to, silicone, rubber, etc.

[0054] In some embodiments, the plurality of pressing members 20 may include a plurality of pressing plates 21 and a plurality of pressing sheets 22. One pressing plate 21 may be disposed on each side of each first receiving groove 111 in the first direction, and a plurality of pressing sheets 22 may be disposed on at least one side of each first receiving groove 111 in the third direction. That is, the plurality of pressing plates 21 and the plurality of pressing sheets 22 are disposed on two opposite surfaces of the carrier plate 11 in the second direction.

[0055] When the pressing plate 21 is installed on the carrier plate 11, the length direction of the pressing plate 21 coincides with the third direction. A plurality of first through holes 211 are formed in each pressing plate 21, and the first through holes 211 extend along the width direction of the pressing plate 21. The pressing plate 21 can be detachably connected to the carrier plate 11 by a first screw 212 that is threadedly connected to the carrier plate 11. The threaded portion of the first screw 212 can pass through the first through hole 211 and can move relative to the pressing plate 21 along the width direction of the pressing plate 21 within the through hole; the diameter of the head of the first screw 212 is greater than the width of the first through hole 211. After the first screw 212 is tightened on the carrier plate 11, the head of the first screw 212 can abut against the pressing plate 21 so that the pressing plate 21 approaches the corresponding workpiece 200 in the second direction and abuts against the corresponding workpiece 200, and the movement of the pressing plate 21 can be restricted. When the plurality of first screws 212 corresponding to one pressing plate 21 pass through the corresponding first through holes 211 but are not tightened, the pressing plate 21 can move in the first direction, so that the projection of the pressing plate 21 in the second direction can coincide with the projection of the second receiving groove 112 in the second direction, so that the pressing plate 21 can abut against the workpiece 200 in the corresponding first receiving groove 111 in the second direction; the pressing plate 21 can also move in the first direction, so that the projection of the pressing plate 21 in the second direction is separated from the projection of the second receiving groove 112 in the second direction, releasing the blocking of the second receiving groove 112 by the pressing plate 21, so that the workpiece 200 can enter or exit the corresponding first receiving groove 111.

[0056] When the pressing piece 22 is mounted on the carrier plate 11, the length direction of the pressing piece 22 coincides with the third direction. On one side of each first receiving groove 111 in the third direction, a plurality of pressing pieces 22 are arranged at intervals along the first direction. A plurality of second through holes 221 are formed in each pressing piece 22, and the second through holes 221 extend along the length direction of the pressing piece 22. The pressing piece 22 can be detachably connected to the carrier plate 11 by a second screw 222 that is threadedly connected to the carrier plate 11. The threaded portion of the second screw 222 can pass through the second through hole 221 and can move relative to the pressing piece 22 in the width direction of the pressing piece 22 within the through hole; the diameter of the head of the second screw 222 is greater than the width of the second through hole 221. After the second screw 222 is tightened on the carrier plate 11, the head of the second screw 222 can abut against the pressing piece 22, so that the pressing piece 22 approaches the corresponding workpiece 200 in the second direction and abuts against the corresponding workpiece 200, and can limit the movement of the pressing piece 22. When the second screw 222 corresponding to a pressing piece 22 passes through the corresponding second through hole 221 but is not tightened, the pressing piece 22 can move and rotate in the third direction, so that the projection of the pressing piece 22 in the second direction can coincide with the projection of the first receiving groove in the third direction, so that the pressing piece 22 can abut against the workpiece 200 in the corresponding first receiving groove 111 in the second direction; the pressing piece 22 can also move and rotate in the third direction, so that the projection of the pressing piece 22 in the second direction is separated from the projection of the second receiving groove 112 in the second direction, removing the blocking of the pressing piece 22 on the second receiving groove 112, so that the workpiece 200 can enter or exit the corresponding first receiving groove 111.

[0057] It can be understood that the surfaces of each pressing piece 22 and the pressing plate 21 can be sprayed with a Teflon coating, so as to reduce the hardness of the surfaces of the pressing piece 22 and the pressing plate 21 that contact the workpiece 200, and reduce the burrs on the pressing piece 22 and the pressing plate 21, and reduce the probability of scratching the workpiece 200 when the pressing piece 22 and the pressing plate 21 abut against the workpiece 200.

[0058] In the embodiment of the present application, the number of pressing pieces 22 on one side of the first receiving groove 111 in the third direction is not specifically limited. For example, on one side of the first receiving groove 111 in the third direction, two pressing pieces 22 are arranged at intervals along the first direction on each side.

[0059] It can be understood that on two opposite surfaces of the carrier plate 11 in the second direction, at least two of the plurality of first receiving grooves 111 are spaced apart in the first direction, and at least two of the plurality of first receiving grooves 111 are spaced apart in the third direction. In the embodiments of the present application, the number of the first receiving grooves 111 on the carrier plate 11 is not specifically limited. For example, on two opposite surfaces of the carrier plate 11 in the second direction, each surface is provided with two rows of first receiving grooves 111. The two rows of first receiving grooves 111 are spaced apart in the first direction, and the number of the first receiving grooves 111 in each row of the first receiving grooves 111 is two. The two first receiving grooves 111 in each row of the first receiving grooves 111 are spaced apart in the third direction.

[0060] In some embodiments, when a plurality of first receiving grooves 111 are provided on both opposite surfaces of the carrier plate 11 in the second direction, the plurality of first receiving grooves 111 on one surface of the carrier plate 11 correspond to the plurality of first receiving grooves 111 on the other surface one by one, and a through groove 114 is provided in each first receiving groove 111 in the second direction. The through groove 114 penetrates the bottom walls of the two corresponding first receiving grooves 111, thereby communicating the two corresponding first receiving grooves 111. The third receiving groove 113 can be provided around the corresponding through groove 114, and the through groove 114 is spaced apart from the corresponding third receiving groove 113.

[0061] It can be understood that the provision of the through groove 114 can reduce the weight of the carrier plate 11, and the gasket 30 in the third receiving groove 113 can block the gas so that the gas cannot enter the through groove 114. In this way, while reducing the case of workpiece 200 being circumferentially plated, the smoothness of the movement of the carrying device 101 can be improved.

[0062] In some embodiments, a plurality of weight reduction grooves 115 can also be provided on the carrier plate 11. The plurality of weight reduction grooves 115 can penetrate the carrier plate 11 in the second direction, and at least two of the plurality of weight reduction grooves 115 are spaced apart in the first direction, and at least two of the plurality of weight reduction grooves 115 are spaced apart in the third direction. Each weight reduction groove 115 can receive a filling block 40.

[0063] It can be understood that the weight of each filling block 40 can be less than the weight of the material of the carrier plate 11 with the same volume. In this way, the provision of the weight reduction grooves 115 and the filling blocks 40 can reduce the weight of the carrier plate 11 and improve the smoothness of the movement of the carrying device 101. When the carrying device 101 is located in the cavity 102, the filling block 40 can seal the corresponding weight reduction groove 115, thereby reducing the probability of gas passing through the weight reduction groove 115 and reducing the probability of the weight reduction groove 115 guiding the gas to move away from the workpiece 200.

[0064] Exemplarily, the material of the carrier plate 11 can be stainless steel, and the material of the filling block 40 can be plastic or the like.

[0065] In the embodiments of the present application, the number of the weight reduction grooves 115 is not specifically limited. For example, two rows of weight reduction grooves 115 may be arranged at intervals in the third direction, and all the first receiving grooves 111 on the carrier plate 11 are located between the two rows of weight reduction grooves 115. Each row of weight reduction grooves 115 includes a plurality of weight reduction grooves 115 arranged at intervals in the first direction.

[0066] In some embodiments, the carrying device 101 further includes a guiding member 50. The guiding member 50 is fixedly connected to one side of the carrier plate 11 in the third direction. The guiding member 50 can abut against the transmission device 103 and cooperate with the transmission device 103 to move the carrying device 101 in the first direction when the transmission device 103 is working.

[0067] It can be understood that grooves can be formed on the arc surfaces of the plurality of conveyor wheels of the transmission device 103, and the guiding member 50 can enter the grooves on the plurality of conveyor wheels, and the rotation of the conveyor wheels can drive the guiding member 50 to move in the first direction, so that the carrying device 101 moves in the first direction.

[0068] In some embodiments, the carrying device 101 may further include a plurality of identification members 60, and the plurality of identification members 60 may be fixedly connected to both sides of the carrier plate 11 in the first direction. On each side of the carrier plate 11 in the first direction, a plurality of identification members 60 may be arranged at intervals in the third direction.

[0069] It can be understood that a plurality of detection members (not shown in the figure) may be provided on the inner wall of the cavity 102. Among the plurality of detection members, at least two detection members are arranged at intervals in the first direction, and at least two detection members are arranged at intervals in the third direction. The plurality of detection members can respectively detect whether the plurality of identification members 60 enter the detection areas of the detection members to determine whether the carrying device 101 reaches the position corresponding to the detection members when moving.

[0070] In the embodiments of the present application, the type of the detection member is not specifically limited. For example, the detection member may be, but is not limited to, an infrared sensor, a photoelectric sensor, a proximity switch, etc. Exemplarily, the detection member may be a photoelectric sensor. When the light output by the detection member is blocked by the identification member 60, it may indicate that the carrying device 101 has moved to a specified position.

[0071] In some embodiments, the carrying device 101 may further include a blocking member 70. The blocking member 70 may be fixedly installed on one side of the carrier plate 11 in the first direction. Both sides of the blocking member 70 in the second direction may protrude from both ends of the carrier plate 11 in the second direction, and the width of the blocking member 70 in the second direction is greater than the distance between the two inner walls of the cavity 102 in the second direction.

[0072] It can be understood that when the carrying device 101 moves in the first direction and the carrier plate 11 completely enters the cavity 102 and moves to a specified position within the cavity 102, one side of the blocking member 70 facing the carrier plate 11 in the first direction can abut against one end of the cavity 102 where an opening is provided in the first direction to seal the cavity 102. Then, gas can be introduced into the cavity 102, thereby performing coating processing on a plurality of workpieces 200 on the carrier plate 11 at the specified position.

[0073] It can be understood that a sealing layer can be provided on one side of the blocking member 70 facing the carrier plate 11 in the first direction and / or one end of the cavity 102 where the opening is provided, so that when the blocking member 70 abuts against the cavity 102, the cavity 102 is in a sealed state.

[0074] It can be understood that a through hole for the identification member 60 to pass through can be provided on the blocking member 70, and the inner wall of the through hole and the identification member 60 passing through the through hole are subjected to sealing treatment.

[0075] Please refer to Figure 7 , in some other embodiments, a plurality of workpieces 200 can be loaded on corresponding fixtures 300, and one side of the workpiece 200 to be processed is exposed from the fixture 300. The fixture 300 can be received in corresponding first receiving grooves 111 and second receiving grooves 112 and abut against corresponding cushion blocks 12, pressing plates 21, and pressing pieces 22. In this way, a plurality of fixtures 300 loaded with workpieces 200 can be clamped and fixed on the carrier plate 11. After the carrying device 101 enters the cavity 102, the workpieces 200 on the fixture 300 are processed within the cavity 102.

[0076] In some cases, a plurality of loading grooves 301 are provided on the fixture 300. The loading grooves 301 penetrate through the fixture 300 in the second direction, and each loading groove 301 can hold one workpiece 200. The fixture 300 can be in contact with a corresponding sealing gasket 30, and the projections of the plurality of loading grooves 301 in the second direction are all located within the ring formed by the sealing gasket 30. The sealing gasket 30 can form a sealed space on one side of the fixture 300 facing the bottom wall of the first receiving groove 111 to block the gas so that the gas cannot flow into the loading groove 301 to contact the surface of the workpiece 200 that does not need to be processed.

[0077] In some cases, a plurality of loading grooves 301 for loading a plurality of workpieces 200 can be provided on one side of the fixture 300 in the second direction, and the loading grooves 301 are grooves. A sealing layer is provided in each loading groove 301 so that the workpiece 200 loaded in the loading groove 301 can be hermetically arranged on the inner peripheral wall of the loading groove 301, so that the gas cannot flow into the loading groove 301 to contact the surface of the workpiece 200 that does not need to be processed.

[0078] The carrier device 101 and the processing equipment 100 provided by the embodiments of the present application can clamp and fix a plurality of workpieces 200 through the cooperation of a plurality of pressing members 20 and cushion blocks 12. The transmission device 103 can transmit the carrier device 101 into the cavity 102. After the cavity 102 is filled with the gas required for processing, the workpieces 200 on the carrier device 101 can be processed, so that a film is formed on the exposed surface of the workpieces 200 from the carrier device 101, and the gasket 30 can block the gas, preventing the gas from entering the space sealed by the gasket 30, thereby reducing the film formed on the surface of the workpieces 200 that does not need to be processed.

[0079] In this way, while the pressing member 20 and the supporting mechanism 10 cooperate to clamp the workpiece 200, the gasket 30 and the supporting mechanism 10 cooperate to form a closed space on the surface of the workpiece 200 that does not need to be processed, blocking the gas from approaching the surface of the workpiece 200 that does not need to be processed, and reducing the situation of film deposition around the workpiece 200 during the film coating process.

[0080] For those skilled in the art, it is obvious that the present application is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present application, the present application can be implemented in other specific forms. Therefore, from any point of view, the above embodiments of the present application should be regarded as exemplary and non-limiting. The scope of the present application is defined by the appended claims rather than the above description. Therefore, it is intended to cover all changes falling within the meaning and scope of the equivalent elements of the claims in the present application.

Claims

1. A carrying device for carrying a plurality of workpieces, characterized in that: The carrying device comprises: A supporting mechanism, the supporting mechanism is used to stop against one side of the workpiece and to withstand the pressure applied by the workpiece; A plurality of pressing members, wherein the plurality of pressing members are detachably disposed on the supporting mechanism, and the plurality of pressing members are used to be disposed on the circumference of the corresponding workpiece, and each of the pressing members is used to stop against the other side of the workpiece to cooperate with the supporting mechanism to clamp the corresponding workpiece; A plurality of sealing pads are arranged on the supporting mechanism, and each of the sealing pads is used to support a side of the workpiece facing the supporting mechanism to block gas.

2. The carrying device according to claim 1, characterized in that: At least one of the two opposite sides of the supporting mechanism in the thickness direction is provided with a plurality of first receiving grooves, each of the first receiving grooves is used to partially receive the corresponding workpiece, and each of the sealing gaskets is at least partially received in the corresponding first receiving groove.

3. The carrying device according to claim 2, characterized in that: The supporting mechanism comprises: A carrier plate, a plurality of the first receiving grooves are provided on at least one side of the carrier plate, a plurality of second receiving grooves are provided on the carrier plate, each of the second receiving grooves is communicated with the corresponding first receiving groove, and each of the second receiving grooves is located at the side of the corresponding first receiving groove in the length direction and / or height direction of the supporting mechanism; A plurality of pads, each of which is received in the corresponding second receiving groove, and each of which is used to abut against the corresponding workpiece and cooperate with the corresponding pressing member to clamp the corresponding workpiece; in the thickness direction of the supporting mechanism, each of the pads is used to abut against a side of the workpiece protruding from the bottom wall of the first receiving groove in the thickness direction.

4. The carrying device according to claim 3, characterized in that: A plurality of third receiving grooves are provided on the carrier plate, each of the third receiving grooves is provided on the bottom wall of the corresponding first receiving groove, each of the sealing gaskets is partially received in the corresponding third receiving groove, and each of the sealing gaskets protrudes from the corresponding third receiving groove along the thickness direction for supporting the corresponding workpiece.

5. The carrying device according to claim 2, characterized in that: The plurality of pressing members include: A plurality of pressing plates, wherein in the length direction of the supporting mechanism, the plurality of pressing plates are arranged on at least one side of the corresponding first receiving groove; Multiple pressing plates, in the height direction of the supporting mechanism, multiple pressing plates are arranged on at least one side of the corresponding first receiving groove, the number of pressing plates located on the same side of the same first receiving groove is multiple, and the multiple pressing plates located on the same side of the same first receiving groove are arranged along the length direction.

6. The carrying device according to claim 2, characterized in that: The supporting mechanism is provided with a plurality of the first receiving grooves on both sides in the thickness direction, and is provided with a plurality of the pressing members and a plurality of the sealing pads; On each side of the supporting mechanism, at least two of the plurality of first receiving grooves are arranged along a height direction of the supporting mechanism, and at least two of the first receiving grooves are arranged along a length direction of the supporting mechanism.

7. The carrying device according to claim 1, characterized in that: The carrying device also includes: A guide member, wherein the guide member is arranged at one end of the supporting mechanism in the height direction of the supporting mechanism, the guide member extends along the length direction of the supporting mechanism, and the guide member is used to abut against a transmission device to enable the supporting device to move along the length direction.

8. The carrying device according to claim 1, characterized in that: The carrying device also includes: A plurality of identification members are arranged on both sides of the supporting mechanism in the length direction of the supporting mechanism, and each of the identification members is used to cooperate with the detection of the detection member so that the detection member detects the position of the supporting mechanism.

9. The carrying device according to claim 1, characterized in that: The carrying device also includes: A sealing member is arranged on one side of the supporting mechanism in the length direction of the supporting mechanism, and the sealing member is used to abut against a side wall of a cavity to close the cavity; wherein the cavity is used to accommodate the carrying device.

10. A processing equipment, characterized in that: include: A cavity, wherein the cavity is used to be filled with gas; The carrier device according to any one of claims 1 to 9, wherein the carrier device is used to enter the cavity to allow a plurality of workpieces to enter the cavity, thereby processing the plurality of workpieces by the gas.

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