Boat inlet and outlet circulation device and coating equipment

Abstract

The utility model discloses an in-out boat circulation device and coating equipment, and relates to the technical field of thin film deposition. The boat inlet and outlet circulation device is arranged in a rack and comprises a boat inlet conveying assembly, a boat outlet conveying assembly, a boat transfer table and a hot air circulation assembly, and the boat inlet conveying assembly is used for conveying a boat loaded with a to-be-coated product into the rack. And the boat outlet conveying assembly is used for conveying the boat loaded with the coated product out of the rack. The boat transfer table is arranged between the boat inlet conveying assembly and the boat outlet conveying assembly, the boat inlet conveying assembly conveys a boat loaded with a to-be-coated product to the boat transfer table, and the boat outlet conveying assembly is used for conveying the boat loaded with the coated product on the boat transfer table out of the rack. The hot air circulation assembly is arranged between the boat outlet conveying assembly and the boat inlet conveying assembly and used for circulating heat emitted by the boat loaded with the coated products to the boat loaded with the to-be-coated products so as to preheat the to-be-coated products, energy waste is avoided, and the coating efficiency can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film deposition, in particular to a boat in-and-out transfer device and a coating equipment. Background Technique

[0002] The thin film deposition technology is widely used in the production and manufacturing of microelectronic devices, TFTs, solar cell wafers, etc. In a vacuum chamber, chemical reaction gases are introduced, and chemical molecules are decomposed by thermal energy or plasma energy to form a thin film on the surface of a substrate.

[0003] Existing coating equipments generally use quartz boats as carriers for silicon wafers. Before coating, the products to be coated are loaded onto the boats by a wafer loader, and then transported into the coating equipment. The coating equipment includes a loading and unloading chamber and a coating chamber. The loading and unloading chamber is used to place the boats loaded with products to be coated and the boats loaded with coated products. The boats loaded with products to be coated wait to be transported into the coating chamber for coating; the boats loaded with coated products that have completed coating in the coating chamber are transported back to the loading and unloading chamber and wait to be transported out of the coating equipment. When coating in the coating chamber, the products to be coated need to be heated for a long time to rise to a relatively high temperature for chemical reaction. After being transported back to the loading and unloading chamber after coating, the temperature of the coated products is very high, and they need to be cooled in the loading and unloading chamber before being transported out. The heat dissipated after cooling directly enters the waste discharge pipeline, resulting in energy waste. Content of the Utility Model

[0004] The purpose of the utility model is to provide a boat in-and-out transfer device and a coating equipment, so as to effectively utilize the heat of the coated products, avoid energy waste and improve the production capacity of the coating equipment at the same time.

[0005] To achieve the above object, the utility model adopts the following technical solutions:

[0006] The boat in-and-out transfer device is arranged inside a frame, and includes:

[0007] An incoming boat transfer assembly for transferring the boat loaded with products to be coated into the frame;

[0008] An outgoing boat transfer assembly for transferring the boat loaded with coated products out of the frame;

[0009] A boat turntable is arranged between the incoming boat transfer assembly and the outgoing boat transfer assembly. The incoming boat transfer assembly transfers the boat loaded with products to be coated onto the boat turntable, and the boat turntable can transfer the boat loaded with coated products to the outgoing boat transfer assembly;

[0010] A hot air circulation assembly is arranged between the outgoing boat transfer assembly and the incoming boat transfer assembly, and is used for circulating the heat of the boat loaded with coated products to the boat loaded with products to be coated to preheat the products to be coated.

[0011] As an alternative to the boat transfer device, the boat transfer device further includes a boat loading buffer position and a boat unloading buffer position. The boat loading buffer position is used to buffer the boat loaded with the products to be coated waiting for the boat turntable to receive; the boat unloading buffer position is used to buffer the boat loaded with the coated products to be cooled; one end of the hot air circulation component is connected to the boat loading buffer position, and the other end is connected to the boat unloading buffer position.

[0012] As an alternative to the boat transfer device, the boat loading buffer position is arranged at one end of the boat loading transfer component close to the boat turntable, and the boat unloading buffer position is arranged at one end of the boat unloading transfer component close to the boat turntable;

[0013] Or, the boat loading buffer position is arranged between the boat loading transfer component and the boat turntable, and the boat unloading buffer position is arranged between the boat unloading transfer component and the boat turntable.

[0014] As an alternative to the boat transfer device, the hot air circulation component includes an air inlet hood, a circulation pipeline and an air outlet hood. The air inlet hood covers the boat unloading buffer position, the air outlet hood covers the boat loading buffer position, and the air inlet hood is communicated with the air outlet hood through the circulation pipeline.

[0015] As an alternative to the boat transfer device, the hot air circulation component further includes a circulation fan, and the circulation fan is arranged in the circulation pipeline.

[0016] As an alternative to the boat transfer device, the air inlet hood includes an air inlet, the air inlet is arranged facing the boat unloading buffer position, the air outlet hood includes an air outlet, the air outlet is arranged facing the boat loading buffer position, one end of the circulation pipeline is communicated with the air inlet, and the other end is communicated with the air outlet.

[0017] As an alternative to the boat transfer device, both the air inlet hood and the air outlet hood are arranged as hemispherical covers. The air inlet hood is the first hemispherical cover, and the air inlet is arranged at the center of the first hemispherical cover; the air outlet hood is the second hemispherical cover, and the air outlet is arranged at the center of the second hemispherical cover.

[0018] As an alternative solution for the boat turnover device, both the air inlet hood and the air outlet hood are provided as rectangular hoods. The air inlet hood is the first rectangular hood, and the air outlet hood is the second rectangular hood. One side of the first rectangular hood away from the circulation pipeline and the side facing the second rectangular hood, as well as one side of the second rectangular hood away from the circulation pipeline and the side facing the first rectangular hood, are all provided with openings. The air inlet is arranged on one side of the first rectangular hood close to the circulation pipeline, and the air outlet is arranged on one side of the second rectangular hood close to the circulation pipeline.

[0019] As an alternative solution for the boat turnover device, a negative pressure exhaust pipe is provided on the air outlet hood, and the negative pressure exhaust pipe is connected to the exhaust system.

[0020] A coating device, which includes a frame and the boat turnover device described in any of the above solutions.

[0021] Advantages of the present utility model:

[0022] For the boat turnover device provided by the present utility model, the boat loaded with products to be coated is conveyed to the boat turntable in the frame through the boat loading conveying component, and then transported to the coating chamber through the boat turntable for the coating process. After the boat loaded with the coated products is taken out of the coating chamber after the coating is completed, it is transported out of the frame through the boat turntable by the boat unloading conveying component. Since the temperature of the boat loaded with the coated products just after the coating process is very high, it can only be taken out of the frame after cooling. And the boat loaded with products to be coated needs to be heated for a long time to reach the reaction temperature after being transported to the coating chamber. The heat dissipated by the boat loaded with the coated products conveyed by the boat unloading conveying component is circulated to the boat loaded with products to be coated conveyed by the boat loading conveying component through the hot air circulation component to preheat the products to be coated, thereby reducing the heating time of the boat loaded with products to be coated in the coating chamber, avoiding energy waste, and improving the coating efficiency.

[0023] For the coating device provided by the present utility model, by adopting the above-mentioned boat turnover device, the heat of the boat loaded with the coated products is recycled through the hot air circulation component to preheat the boat loaded with products to be coated, which can not only avoid energy waste, but also improve the coating efficiency and increase the production capacity of the coating device. Description of the drawings

[0024] Figure 1 is the front view of the coating device provided by the embodiment of the present utility model;

[0025] Figure 2 is the layout schematic diagram of the boat turnover device in the frame provided by the embodiment of the present utility model;

[0026] Figure 3 is the structural schematic diagram of the hot air circulation component provided by the embodiment of the present utility model.

[0027] In the figure:

[0028] 100, frame; 101, support beam; 102, chassis; 103, side frame;

[0029] 200, reaction chamber device;

[0030] 300, handling manipulator; 301, robotic arm; 302, handling gripper;

[0031] 1, boat inlet transfer assembly; 11, boat inlet buffer position;

[0032] 2, boat outlet transfer assembly; 21, boat outlet buffer position;

[0033] 3, boat turntable;

[0034] 4, hot air circulation assembly; 41, air inlet hood; 42, circulation duct; 43, air outlet hood; 44, circulation fan; 45, negative pressure exhaust pipe. Detailed implementation manners

[0035] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present utility model and should not be construed as limiting the present utility model.

[0036] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0037] Unless otherwise clearly defined and limited, the terms "installed", "connected", "connected", "fixed" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0038] Unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may include direct contact between the first feature and the second feature, or may include contact between the first feature and the second feature through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0039] The technical solution of the present utility model will be further described below in conjunction with the accompanying drawings and through specific embodiments.

[0040] As Figure 1 shown, this embodiment provides a coating device, including a frame 100, a reaction chamber device 200, a boat transfer device for loading and unloading, and a handling robot 300. The reaction chamber device 200, the boat transfer device for loading and unloading, and the handling robot 300 are all installed inside the frame 100. The boat is a carrier for the coating product. The boat loaded with the product to be coated is transported into the frame 100 through the boat transfer device for loading and unloading, and the handling robot 300 transports the boat loaded with the product to be coated into the reaction chamber device 200 for the coating process. After the coating process is completed, after the boat loaded with the coated product is pushed out of the reaction chamber device 200, the handling robot 300 transports the boat loaded with the coated product to the boat transfer device for loading and unloading, and then the boat transfer device for loading and unloading transports the boat loaded with the coated product out of the frame 100.

[0041] During the coating process, it is necessary to heat the boat loaded with the product to be coated to a relatively high temperature to cause a chemical reaction. The temperature of the boat loaded with the coated product after coating is very high, and it needs to be cooled and dissipated before it can be transported out of the frame 100. In order to avoid energy waste and improve the coating efficiency. As Figure 1 and Figure 2 shown, this embodiment also provides a boat transfer device for loading and unloading, which is applied to the above coating device. The boat transfer device for loading and unloading includes a boat loading conveyor assembly 1, a boat unloading conveyor assembly 2, a boat transfer table 3, and a hot air circulation assembly 4. The boat loading conveyor assembly 1 is used to transport the boat loaded with the product to be coated into the frame 100. The boat unloading conveyor assembly 2 is used to transport the boat loaded with the coated product out of the frame 100. The boat transfer table 3 is arranged between the boat loading conveyor assembly 1 and the boat unloading conveyor assembly 2. The boat loading conveyor assembly 1 transports the boat loaded with the product to be coated onto the boat transfer table 3, and the boat transfer table 3 can transport the boat loaded with the coated product to the boat unloading conveyor assembly 2. The hot air circulation assembly 4 is arranged between the boat unloading conveyor assembly 2 and the boat loading conveyor assembly 1, and is used to circulate the heat dissipated by the boat loaded with the coated product to the boat loaded with the product to be coated to preheat the product to be coated.

[0042] The rack 100 includes a chassis 102 and two side frames 103. The two side frames 103 are respectively arranged at both ends of the chassis 102 along the width direction. The boat in-and-out transfer device is arranged at the front side of the reaction chamber device 200. The boat-in transfer assembly 1, the boat-out transfer assembly 2 and the boat transfer platform 3 are all arranged on the chassis 102. Moreover, the inlet of the boat-in transfer assembly 1 and the outlet of the boat-out transfer assembly 2 are both located at the front side of the rack 100. The boat-in transfer assembly 1 is arranged close to one of the side frames 103, and the boat-out transfer assembly 2 is arranged close to the other side frame 103. And both the boat-in transfer assembly 1 and the boat-out transfer assembly 2 extend towards the rear side of the rack 100. The boat transfer platform 3 is located in the middle and is below the handling manipulator 300. Two support beams 101 are arranged at the top of the rack 100. The two support beams 101 span across the two side frames 103, and a limiting groove is formed between the two support beams 101. The robotic arm 301 of the handling manipulator 300 slides in the limiting groove. The handling manipulator 300 can translate along the extending direction of the limiting groove. When the handling manipulator 300 is located at the middle position of the limiting groove, it is directly opposite to the boat transfer platform 3 located on the chassis 102, so as to facilitate the handling manipulator 300 to grab the boat loaded with the product to be coated or place the boat loaded with the coated product on the boat transfer platform 3 through lifting.

[0043] The boat-in transfer assembly 1 and the boat-out transfer assembly 2 can be belt conveyors or handling robots. The specific structures and working principles of the belt conveyor and the handling robot can be designed with reference to the prior art, which is not the improvement point of this embodiment and will not be elaborated here.

[0044] By setting the boat-in transfer assembly 1 and the boat-out transfer assembly 2, the boat-in streamline and the boat-out streamline are separately arranged. The boat loaded with the product to be coated and the boat loaded with the coated product can be separately conveyed, realizing circular transfer, improving the interaction efficiency, shortening the working cycle, saving the transfer time, and thus improving the production capacity.

[0045] Furthermore, the boat transfer platform 3 is liftably arranged in the rack 100. In order to further improve the transfer efficiency, the boat transfer platform 3 is also set to be liftable. When the handling manipulator 300 translates to the middle position of the limiting groove, while the handling gripper 302 of the handling manipulator 300 descends along the height direction of the rack 100, the boat transfer platform 3 ascends, so that the handling gripper 302 can quickly grab the boat loaded with the product to be coated on the boat transfer platform 3 and can quickly place the boat loaded with the coated product on the boat transfer platform 3, further improving the transfer efficiency and thus improving the production capacity.

[0046] The boat turntable 3 is lifted by a telescopic support or a linear drive. The handling robot 300 is a robot with two degrees of freedom. The lifting drive mode of the boat turntable 3 and the robot with two degrees of freedom can both be set with reference to the prior art and will not be elaborated here.

[0047] Since the temperature of the boat loaded with the coated products just after the coating process is very high, it can only be taken out of the frame 100 after cooling. And the boat loaded with the products to be coated needs to be heated for a long time before it can be heated up to the reaction temperature after being moved to the coating chamber. The heat dissipation of the boat loaded with the coated products conveyed by the boat-out conveying component 2 is circulated to the boat loaded with the products to be coated conveyed by the boat-in conveying component 1 through the hot air circulation component 4 to preheat the products to be coated, thereby reducing the heating time of the boat loaded with the products to be coated in the coating chamber, avoiding energy waste and improving the coating efficiency.

[0048] Specifically, the boat-in and boat-out transfer device further includes a boat-in buffer position 11 and a boat-out buffer position 21. The boat-in buffer position 11 is used to buffer the boat loaded with the products to be coated waiting for the boat turntable 3 to receive; the boat-out buffer position 21 is used to buffer the boat loaded with the coated products to be cooled; one end of the hot air circulation component 4 is connected to the boat-in buffer position 11, and the other end is connected to the boat-out buffer position 21. Since both the boat loaded with the products to be coated and the boat loaded with the coated products are handed over by the boat turntable 3 and the handling robot 300, and the boat turntable 3 cannot place the boat loaded with the products to be coated and the boat loaded with the coated products at the same time. To avoid process conflicts, it is necessary to set the boat-in buffer position 11 to buffer the boat loaded with the products to be coated waiting for the boat turntable 3 to receive. The boat loaded with the coated products needs to be cooled before it can be conveyed out of the frame 100 through the boat-out conveying component 2. To avoid waiting on the boat turntable 3, the boat-out buffer position 21 is set to buffer the boat loaded with the coated products to be cooled.

[0049] A transfer conveyor belt is provided on the boat turntable 3. The boat turntable 3 receives the boat loaded with the products to be coated at the boat-in buffer position 11 through the transfer conveyor belt, and the boat turntable 3 conveys the boat loaded with the coated products to the boat-out buffer position 21 through the transfer conveyor belt. By providing a transfer conveyor belt on the tabletop of the boat turntable 3, when the transfer conveyor belt receives the boat loaded with the products to be coated at the boat-in buffer position 11 and when the transfer conveyor belt conveys the boat loaded with the coated products to the boat-out buffer position 21, the transfer conveyor belt moves in a direction away from the boat-in buffer position 11.

[0050] The driving mode of the transfer conveyor belt can be designed with reference to the prior art, which is not an important improvement point of this embodiment and will not be elaborated here.

[0051] Specifically, the boat-in buffer position 11 is provided at one end of the boat-in transfer component 1 close to the boat transfer table 3, and the boat-out buffer position 21 is provided at one end of the boat-out transfer component 2 close to the boat transfer table 3. That is, the boat-in buffer position 11 is provided on the boat-in transfer component 1, and the boat-out buffer position 21 is provided on the boat-out transfer component 2. When the boat loaded with the products to be coated is transferred from the inlet of the boat-in transfer component 1 to the end of the boat-in transfer component 1 close to the boat transfer table 3, the transfer stops and waits. When the boat loaded with the coated products on the boat transfer table 3 is transferred onto the boat-out transfer component 2, the transfer is started again to transfer the waiting boat loaded with the products to be coated onto the boat transfer table 3. Similarly, when the boat loaded with the coated products is transferred onto the boat-out transfer component 2, the transfer stops, so that the boat loaded with the coated products cools and dissipates heat on the boat-out transfer component 2. When the boat loaded with the coated products has cooled, the boat-out transfer component 2 is started again to transfer the cooled boat loaded with the coated products out of the frame 100.

[0052] Of course, the boat-in buffer position 11 and the boat-out buffer position 21 can also be set separately. The boat-in buffer position 11 is provided between the boat-in transfer component 1 and the boat transfer table 3, and the boat-out buffer position 21 is provided between the boat-out transfer component 2 and the boat transfer table 3. By setting a buffer conveyor belt on the table surfaces of the boat-in buffer position 11 and the boat-out buffer position 21, the boat-in buffer position 11 can receive and transfer the boat loaded with the products to be coated through the buffer conveyor belt, and the boat-out buffer position 21 can receive and transfer the boat loaded with the coated products.

[0053] Specifically, as Figure 1 and Figure 3 shown, the hot air circulation component 4 includes an air inlet hood 41, a circulation duct 42, and an air outlet hood 43. The air inlet hood 41 covers the boat-out buffer position 21, the air outlet hood 43 covers the boat-in buffer position 11, and the air inlet hood 41 is communicated with the air outlet hood 43 through the circulation duct 42. The air inlet hood 41 can gather the heat dissipated by the boat loaded with the coated products on the boat-out buffer position 21 within a certain space, preventing the heat from dissipating everywhere and improving the recycling efficiency of the heat. The heat gathered by the air inlet hood 41 flows through the circulation duct 42 to the air outlet hood 43, and the air outlet hood 43 also gathers the heat flowing here within the covering space of the air outlet hood 43, so that all the gathered heat flows to the boat loaded with the products to be coated on the boat-in buffer position 11, thereby being able to preheat the products to be coated faster.

[0054] Furthermore, the hot air circulation component 4 further includes a circulation fan 44, and the circulation fan 44 is arranged in the circulation duct 42. By means of the circulation fan 44, the air flow can be accelerated, and the heat gathered by the air inlet hood 41 can be quickly guided into the circulation duct 42, with higher heat transfer efficiency, thereby reducing heat loss.

[0055] Specifically, the circulation fan 44 is arranged in the middle of the circulation pipeline 42 to accelerate the flow rate of the heat in the circulation pipeline 42 towards the air outlet hood 43 after sucking the heat gathered by the air inlet hood 41 into the circulation pipeline 42.

[0056] Specifically, the air inlet hood 41 includes an air inlet, the air inlet is arranged facing the outgoing boat buffer position 21, the air outlet hood 43 includes an air outlet, the air outlet is arranged facing the incoming boat buffer position 11, one end of the circulation pipeline 42 is communicated with the air inlet, and the other end is communicated with the air outlet. The diameters of the air inlet and the air outlet are both adapted to the pipe diameter of the circulation pipeline 42 to facilitate the connection between the air inlet hood 41 and the air outlet hood 43 and the circulation pipeline 42.

[0057] In one embodiment, both the air inlet hood 41 and the air outlet hood 43 are arranged as hemispherical hoods. The air inlet hood 41 is the first hemispherical hood, and an air inlet is arranged at the center of the first hemispherical hood; the air outlet hood 43 is the second hemispherical hood, and an air outlet is arranged at the center of the second hemispherical hood. The first hemispherical hood has only one opening facing the outgoing boat buffer position 21, and the heat entering the first hemispherical hood can only enter the second hemispherical hood through the air inlet via the circulation pipeline 42, and the heat entering the second hemispherical hood flows through the air outlet to the boat loaded with the product to be coated on the incoming boat buffer position 11.

[0058] In one embodiment, as Figure 3 shown, both the air inlet hood 41 and the air outlet hood 43 are arranged as rectangular hoods. The air inlet hood 41 is the first rectangular hood, and the air outlet hood 43 is the second rectangular hood. The side of the first rectangular hood away from the circulation pipeline 42 and the side facing the second rectangular hood, as well as the side of the second rectangular hood away from the circulation pipeline 42 and the side facing the first rectangular hood, are all arranged as openings; the air inlet is arranged on the side of the first rectangular hood close to the circulation pipeline 42, and the air outlet is arranged on the side close to the circulation pipeline 42. Since the incoming boat buffer position 11 and the outgoing boat buffer position 21 are arranged oppositely, part of the heat of the boat loaded with the coated product in the first rectangular hood enters the circulation pipeline 42 through the air inlet, and then enters the air outlet hood 43 through the air outlet, providing heat for the boat loaded with the product to be coated on the incoming boat buffer position 11; another part flows through the opening on the side of the first rectangular hood facing the second rectangular hood to the opening on the side of the second rectangular hood facing the first rectangular hood and enters the second rectangular hood, providing heat for the boat loaded with the product to be coated on the incoming boat buffer position 11.

[0059] Further, a negative pressure exhaust pipe 45 is provided on the air outlet hood 43, and the negative pressure exhaust pipe 45 is connected to the exhaust system. The negative pressure exhaust pipe 45 is connected to the factory exhaust system to discharge the exhausted gas after heat transfer through the factory exhaust system. A vacuum pump is provided in the factory exhaust system, and negative pressure exhaust in the negative pressure exhaust pipe 45 is achieved through the vacuum pump. When the air outlet hood 43 preheats the boat loaded with the product to be coated on the boat loading buffer position 11, a negative pressure is maintained in the negative pressure exhaust pipe 45, so that the gas with heat in the air outlet hood 43 cannot be discharged from the negative pressure exhaust pipe 45. After the boat loaded with the product to be coated on the boat loading buffer position 11 is preheated and transferred to the boat transfer table 3, at this time, the boat loading buffer position 11 is an empty position. When the boat loading buffer position 11 is an empty position, the vacuum pump stops pumping vacuum into the negative pressure exhaust pipe 45, so that the exhausted gas after heat transfer in the air outlet hood 43 enters the factory exhaust system through the negative pressure exhaust pipe 45 and is discharged.

[0060] The coating equipment provided in this embodiment adopts the above-mentioned boat loading and unloading transfer device, and recycles the heat of the boat loaded with the coated product through the hot gas circulation component 4 to preheat the boat loaded with the product to be coated, which can not only avoid energy waste, but also improve the coating efficiency and the production capacity of the coating equipment.

[0061] The above content is only the preferred embodiment of the present invention. For those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. The content of this specification should not be construed as a limitation to the present invention.

Claims

1. A boat in and out circulation device, arranged in the frame (100), characterized in that: include: A boat transfer assembly (1) for transferring a boat loaded with products to be coated into the frame (100); A boat out conveying assembly (2), used for conveying the boat loaded with the coated products out of the frame (100); The boat transfer table (3) is arranged between the boat inlet conveying assembly (1) and the boat outlet conveying assembly (2), the boat inlet conveying assembly (1) transfers the boat loaded with the products to be coated to the boat transfer table (3), and the boat transfer table (3) can transfer the boat loaded with the coated products to the boat outlet conveying assembly (2); A hot air circulation component (4) is arranged between the boat-exit conveying component (2) and the boat-in conveying component (1), and the hot air circulation component (4) includes a circulation fan (44). The circulation fan (44) is used to circulate the heat emitted from the boat loaded with the coated products to the boat loaded with the products to be coated, so as to preheat the products to be coated.

2. The in-and-out boat circulation device according to claim 1, characterized in that: The boat in and out transfer device further comprises a boat inlet buffer position (11) and a boat outlet buffer position (21), wherein the boat inlet buffer position (11) is used to buffer the boat loaded with the products to be coated waiting to be received by the boat transfer station (3); the boat outlet buffer position (21) is used to buffer the boat loaded with the coated products to be cooled; one end of the hot air circulation component (4) is connected to the boat inlet buffer position (11), and the other end is connected to the boat outlet buffer position (21).

3. The in-and-out boat circulation device according to claim 2, characterized in that: The boat entry buffer position (11) is arranged at one end of the boat entry conveying assembly (1) close to the boat transfer platform (3), and the boat exit buffer position (21) is arranged at one end of the boat exit conveying assembly (2) close to the boat transfer platform (3); Alternatively, the boat inlet buffer position (11) is arranged between the boat inlet conveying component (1) and the boat transfer platform (3), and the boat outlet buffer position (21) is arranged between the boat outlet conveying component (2) and the boat transfer platform (3).

4. The in-and-out boat circulation device according to claim 2, characterized in that: The hot air circulation component (4) comprises an air inlet hood (41), a circulation duct (42) and an air outlet hood (43); the air inlet hood (41) is arranged at the boat outlet buffer position (21); the air outlet hood (43) is arranged at the boat outlet buffer position (11); and the air inlet hood (41) is connected to the air outlet hood (43) via the circulation duct (42).

5. The in-and-out boat circulation device according to claim 4, characterized in that: The circulation fan (44) is arranged in the circulation duct (42).

6. The in-and-out boat circulation device according to claim 4, characterized in that: The air inlet cover (41) comprises an air inlet, which is arranged toward the boat discharge buffer position (21); the air outlet cover (43) comprises an air outlet, which is arranged toward the boat discharge buffer position (11); one end of the circulation pipe (42) is connected to the air inlet, and the other end is connected to the air outlet.

7. The in-and-out boat circulation device according to claim 6, characterized in that: The air inlet cover (41) and the air outlet cover (43) are both configured as hemispherical cover bodies, the air inlet cover (41) being a first hemispherical cover body, the center of which is provided with the air inlet; and the air outlet cover (43) being a second hemispherical cover body, the center of which is provided with the air outlet.

8. The in-and-out boat circulation device according to claim 6, characterized in that: The air inlet hood (41) and the air outlet hood (43) are both configured as rectangular hoods, the air inlet hood (41) being a first rectangular hood and the air outlet hood (43) being a second rectangular hood, the side of the first rectangular hood away from the circulation duct (42) and the side facing the second rectangular hood, as well as the side of the second rectangular hood away from the circulation duct (42) and the side facing the first rectangular hood are both configured as openings; the air inlet is provided on a side of the first rectangular hood close to the circulation duct (42), and the air outlet is provided on a side of the second rectangular hood close to the circulation duct (42).

9. The in-and-out boat circulation device according to claim 4, characterized in that: The air outlet cover (43) is provided with a negative pressure exhaust pipe (45), and the negative pressure exhaust pipe (45) is connected to the exhaust system.

10. A coating device, characterized in that: It comprises a frame (100) and a boat in and out circulation device as claimed in any one of claims 1 to 9.

Images