Clamping mechanism and clamping equipment

Abstract

The utility model discloses a clamping mechanism and clamping equipment, and relates to the technical field of semiconductor equipment. The clamping mechanism comprises a clamp body, the clamp body is provided with at least two clamping arms, the at least two clamping arms are oppositely arranged, each clamping arm has an extending state in which the clamping arm extends out of the clamp body and a retracting state in which the clamping arm retracts into the clamp body, and the clamping arms are in the extending state so that the clamp body can be arranged outside the photomask in a covering mode. And the clamping arms are in a retracted state, so that the clamping arms are jointly matched and supported below the outer edge of the photomask. According to the clamping mechanism and the clamping equipment, the photomask can be taken, so that the damage to the photomask is avoided, the operation is simple and convenient, and the equipment fault processing efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, and particularly relates to a clamping mechanism and a clamping device. Background Art

[0002] Photolithography is an important step in the manufacturing process of semiconductor devices, and this step is used to transfer the device graphic structure to the substrate. In this step, the carrier for carrying the device graphic structure is the photomask. At present, most of the storage and transmission of photomasks are realized by machine automation. However, sometimes there will inevitably be a failure in the photolithography process machine, resulting in the photomask staying in the equipment and unable to be automatically transmitted. It is necessary to manually take out the photomask and transfer it into the photomask box.

[0003] Since the gap between the photomask and the photomask box is relatively small, during the process of manually taking the photomask, it is easy for the photomask to touch the photomask box, which will cause scratches on the photomask and may even cause injury to the worker's hand. Moreover, when taking the photomask by hand, it is easy to cause pollution to the graphic structure on the surface of the photomask, resulting in the photomask being unable to be used normally, thus affecting the normal production of the factory. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a clamping mechanism and a clamping device, which can take the photomask, thus avoiding damage to the photomask, being simple and convenient to operate, and improving the efficiency of equipment fault handling.

[0005] The embodiments of the utility model are implemented as follows:

[0006] In the first aspect of the embodiments of the utility model, a clamping mechanism is provided, which includes a fixture body. At least two clamping arms are arranged on the fixture body, and at least two of the clamping arms are arranged oppositely. Each clamping arm has an extended state extending out of the fixture body and a retracted state retracting into the fixture body. When the clamping arm is in the extended state, the fixture body covers the outside of the photomask. When the clamping arm is in the retracted state, the clamping arms cooperate together to support under the outer edge of the photomask. This clamping mechanism can take the photomask, thus avoiding damage to the photomask, being simple and convenient to operate, and improving the efficiency of equipment fault handling.

[0007] As an implementable way, it further includes a button and an elastic member fixedly connected between the button and the clamping arm. The elastic member is used to provide elastic force for the movement of the clamping arm relative to the fixture body, and pressing the button drives the movement of the clamping arm.

[0008] As an implementable manner, it further includes a handle, the handle is located at the center of the fixture body, the handle is internally connected to the fixture body, the button is movably arranged on the handle, and the elastic member is arranged in the handle and the fixture body.

[0009] As an implementable manner, the fixture body includes a cover plate and at least two folding arms arranged along the outer edge of the cover plate, the clamping arms are correspondingly arranged at one ends of the folding arms away from the cover plate, and the wall surfaces of the clamping arms close to the photomask side are coplanar.

[0010] As an implementable manner, the clamping arm is slidably connected to one end of the folding arm away from the cover plate, and the clamping arm is driven to slide relative to the folding arm so that the clamping arms approach each other and gradually switch from the extended state to the retracted state.

[0011] As an implementable manner, the clamping arm is rotatably connected to one end of the folding arm away from the cover plate, and the clamping arm is driven to rotate relative to the folding arm so that the clamping arms gather together and gradually switch from the extended state to the retracted state.

[0012] As an implementable manner, the cover plate has a rectangular structure, the number of the folding arms and the clamping arms is four each, and the folding arms are arranged along the four sides of the cover plate.

[0013] As an implementable manner, along the connection direction of at least two relatively arranged clamping arms, the length of the fixture body is adapted to the length of the photomask.

[0014] As an implementable manner, the elastic member is a spring or an elastic cord.

[0015] In the second aspect of the embodiments of the present invention, a clamping device is provided, including the above-mentioned clamping mechanism. This clamping mechanism can pick up the photomask, thus avoiding damage to the photomask, is simple and convenient to operate, and improves the equipment fault handling efficiency.

[0016] The beneficial effects of the embodiments of the present invention include:

[0017] The clamping mechanism includes a fixture body, on which at least two clamping arms are arranged. The at least two clamping arms are arranged oppositely. Each clamping arm has an extended state extending outside the fixture body and a retracted state retracting into the fixture body. When the clamping arm is in the extended state, the fixture body covers outside the photomask. When the clamping arm is in the retracted state, the clamping arms cooperate to support under the outer edge of the photomask. During actual use, the clamping arms can be first in the extended state. At this time, the fixture body can be gradually moved closer to the photomask so that the fixture body covers outside the photomask. Then, the clamping arms are switched from the extended state to the retracted state. At this time, the clamping arms gradually approach the photomask and support under the outer edge of the photomask. Then, the clamping arms are continuously kept in the retracted state. At this time, the fixture body can be gradually moved away from the machine table, and the photomask can be lifted by the clamping arms to leave the machine table. After the equipment maintenance is completed, the clamping arms are still continuously kept in the retracted state. At this time, the fixture body can be gradually moved closer to the machine table, and the photomask can be lifted by the clamping arms and placed back on the machine table again. Then, the clamping arms are switched from the retracted state to the extended state. At this time, the clamping arms gradually move away from the photomask, releasing the lifting effect on the photomask. Then, the clamping arms are continuously kept in the extended state. At this time, the fixture body can be gradually moved away from the photomask so that the photomask is exposed outside the fixture body for continuous production. In summary, through the relative movement of the fixture body and the clamping arms, the clamping arms can be switched back and forth between the extended state and the retracted state, so that the clamping arms can lift the photomask, and thus the operation of taking the photomask away from the machine table or placing the photomask back on the machine table can be realized. Compared with the prior art, the clamping mechanism provided by the present application uses tools to take the photomask, eliminating the need for workers to take it by hand, preventing contamination and scratches on the photomask, with simple and convenient operation, and improving the efficiency of equipment fault handling. Description of the Drawings

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0019] Figure 1 Structural schematic diagram of the clamping mechanism provided by the embodiment of the present invention in the extended state;

[0020] Figure 2 Structural schematic diagram of the clamping mechanism provided by the embodiment of the present invention in the retracted state.

[0021] Icons: 100 - clamping mechanism; 10 - fixture body; 11 - cover plate; 12 - folding arm; 13 - clamping arm; 20 - button; 30 - elastic member; 40 - handle; 200 - photomask; 300 - machine platform. Detailed implementation manners

[0022] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Generally, the components of the embodiments of the present utility model described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed present utility model, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without making creative efforts fall within the scope of protection of the present utility model.

[0024] It should be noted that: Similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0025] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this utility model is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.

[0026] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0027] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "arranged", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the connection inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0028] Please refer to Figure 1 and Figure 2 , an embodiment of the present application provides a clamping mechanism 100, including a fixture body 10. At least two clamping arms 13 are arranged on the fixture body 10. The at least two clamping arms 13 are arranged oppositely. Each clamping arm 13 has an extended state extending outside the fixture body 10 and a retracted state retracting into the fixture body 10. When the clamping arm 13 is in the extended state, the fixture body 10 covers outside the reticle 200. When the clamping arm 13 is in the retracted state, the clamping arms 13 cooperate with each other to support under the outer edge of the reticle 200. Through this clamping mechanism 100, the reticle 200 can be picked up, and it is no longer necessary for workers to pick it up by hand, thereby avoiding damage such as pollution and scratches to the reticle 200. The operation is simple and convenient, the equipment failure handling efficiency is improved, and it is ensured that the workshop can produce.

[0029] It should be noted that as Figure 1 and Figure 2 shown, the clamping mechanism 100 includes a fixture body 10 to use the fixture body 10 as the material basis for installation and support. Among them, at least two clamping arms 13 are arranged on the fixture body 10, and the at least two clamping arms 13 are arranged oppositely to support the reticle 200 through the mutual cooperation of the at least two clamping arms 13, so that the clamping mechanism 100 can realize the picking operation of the reticle 200.

[0030] Exemplarily, in some embodiments, the number of the clamping arms 13 is two, and the two clamping arms 13 are arranged oppositely, so that the fixture body 10 and the two clamping arms 13 together form a U-shaped structure, and the two side arms of the U-shaped structure (i.e., the two clamping arms 13) respectively support the photomask 200 at two positions; or, in other embodiments, the number of the clamping arms 13 is three, two of the clamping arms 13 are arranged oppositely, and the other clamping arm 13 is arranged along the connecting line direction of the two clamping arms 13, so that the three clamping arms 13 together form a U-shaped structure, and the U-shaped structure (i.e., the three clamping arms 13) respectively supports the photomask 200 at three positions; or, in other embodiments, the number of the clamping arms 13 is four, two of the clamping arms 13 are arranged oppositely, and the other two clamping arms 13 are also arranged oppositely, so that the four clamping arms 13 together form an annular structure, and the annular structure (i.e., the four clamping arms 13) respectively supports the photomask 200 at four positions.

[0031] The working principle of supporting the photomask 200 by the cooperation of at least two clamping arms 13 is as follows: each of the above-mentioned clamping arms 13 has an extended state extending out of the fixture body 10 and a retracted state retracted into the fixture body 10. Specifically, as Figure 1 shown, when each of the above-mentioned clamping arms 13 is in the extended state, the fixture body 10 can be sleeved outside the photomask 200, and the movement process of the fixture body 10 sleeved outside the photomask 200 can be prevented from being interfered by the clamping arms 13; as Figure 2 shown, when each of the above-mentioned clamping arms 13 is in the retracted state, at least two clamping arms 13 can cooperate to support under the outer edge of the photomask 200 to play a lifting role, so that the photomask 200 can be taken away from the machine table 300 or the photomask 200 can be placed back on the machine table 300 again.

[0032] During the actual use of the clamping mechanism 100, as Figure 1 shown, the clamping arms 13 can be first in the extended state. At this time, the fixture body 10 can be gradually moved closer to the photomask 200 so that the fixture body 10 is sleeved outside the photomask 200; as Figure 2 shown, then the clamping arms 13 are switched from the extended state to the retracted state. At this time, the clamping arms 13 gradually move closer to the photomask 200 and support under the outer edge of the photomask 200; as Figure 2 shown, then the clamping arms 13 are continuously kept in the retracted state. At this time, the fixture body 10 can be gradually moved away from the machine table 300, and the photomask 200 can be lifted by the clamping arms 13 to leave the machine table 300; after the equipment maintenance is completed, as Figure 2As shown, the clamping arm 13 still continues to be held in the retracted state. At this time, the fixture body 10 can be gradually moved closer to the machine table 300, and then the mask 200 can be lifted by the clamping arm 13 and placed back on the machine table 300 again; as Figure 1 shown, then the clamping arm 13 is switched from the retracted state to the extended state. At this time, the clamping arm 13 gradually moves away from the mask 200, releasing the lifting effect on the mask 200; as Figure 1 shown, then the clamping arm 13 continues to be held in the extended state. At this time, the fixture body 10 can be gradually moved away from the mask 200 so that the mask 200 is exposed outside the fixture body 10, facilitating continuous production.

[0033] To sum up, in this application, through the relative movement of the fixture body 10 and the clamping arm 13, the clamping arm 13 is switched back and forth between the extended state and the retracted state, so that the clamping arm 13 can lift the mask 200, thereby realizing the operation of taking the mask 200 away from the machine table 300 or placing the mask 200 back on the machine table 300 again. Compared with the prior art, the clamping mechanism 100 provided in this application takes the mask 200 with a tool, no longer requires workers to take it by hand, will not cause pollution or scratches to the mask 200, and the operation is simpler and more convenient.

[0034] As an implementable embodiment, as Figure 1 and Figure 2 shown, the clamping mechanism 100 further includes a button 20 and an elastic member 30 fixedly connected between the button 20 and the clamping arm 13. The elastic member 30 is used to provide an elastic force for the relative movement of the clamping arm 13 with respect to the fixture body 10, so as to drive the clamping arm 13 to move under the action of the elastic force. In actual use, by pressing the button 20, the clamping arm 13 can be driven to move relative to the fixture body 10, so that the clamping arm 13 is switched between the extended state and the retracted state. Optionally, the elastic member 30 is a spring or an elastic cord.

[0035] As an implementable embodiment, as Figure 1 and Figure 2 shown, the clamping mechanism 100 further includes a handle 40. The handle 40 is located at the center of the fixture body 10 so that the distance between the handle 40 and each clamping arm 13 is equal. The handle 40 is in communication with the interior of the fixture body 10. The button 20 is movably arranged on the handle 40, and the elastic member 30 is arranged inside the handle 40 and the fixture body 10 to hide the elastic member 30 inside the handle 40 and the fixture body 10, improving the aesthetics of the clamping mechanism 100.

[0036] As an implementable embodiment, as Figure 1 and Figure 2As shown in the figure, the fixture body 10 includes a cover plate 11 and at least two folding arms 12 arranged along the outer edge of the cover plate 11. The clamping arms 13 are correspondingly arranged at the ends of the folding arms 12 away from the cover plate 11. When the clamping arms 13 are in the retracted state, the wall surfaces of the clamping arms 13 on the side close to the photomask 200 are coplanar, so as to ensure that when the clamping arms 13 cooperate to support the photomask 200 under the outer edge, the photomask 200 can always be in a horizontal state.

[0037] As an implementable manner, for example, as Figure 1 and Figure 2 shown, in this embodiment, the clamping arm 13 may be slidably connected to the end of the folding arm 12 away from the cover plate 11, and the clamping arm 13 is driven to slide relative to the folding arm 12, so that the clamping arms 13 approach each other and gradually switch from the extended state to the retracted state; of course, in other embodiments, the clamping arm 13 may also be rotatably connected to the end of the folding arm 12 away from the cover plate 11, and the clamping arm 13 is driven to rotate relative to the folding arm 12, so that the clamping arms 13 converge and gradually switch from the extended state to the retracted state. Those skilled in the art should be able to make reasonable selections and designs according to actual needs, and no specific limitations are made here.

[0038] As an implementable manner, for example, as Figure 1 and Figure 2 shown, in this embodiment, considering that the photomask 200 has a rectangular structure, correspondingly, the cover plate 11 also has a rectangular structure, and the number of folding arms 12 and clamping arms 13 is four each. The folding arms 12 are arranged along the four sides of the cover plate 11 to ensure the stability when the clamping arms 13 support.

[0039] As an implementable manner, for example, as Figure 1 and Figure 2 shown, along the direction of the connection line of at least two relatively arranged clamping arms 13, the length of the fixture body 10 is adapted to the length of the photomask 200. For example, the length of the fixture body 10 is slightly greater than the length of the photomask 200 to ensure that the fixture body 10 can cover the photomask 200. In addition, when the clamping arms 13 are in the retracted state, along the direction of the connection line of at least two relatively arranged clamping arms 13, the distance between the two clamping arms 13 is less than the length of the photomask 200 to ensure that the two clamping arms 13 can cooperate to support the photomask 200.

[0040] The embodiment of the present application also provides a clamping device, including the above-mentioned clamping mechanism 100. Since the structure and beneficial effects of the clamping mechanism 100 have been described in detail in the foregoing embodiments, they will not be elaborated here.

[0041] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, the present utility model may have various modifications and variations. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

[0042] In addition, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without conflict. To avoid unnecessary repetition, the present utility model will not separately describe various possible combination methods.

Claims

1. A clamping mechanism, characterized in that: It includes a clamp body, on which at least two clamping arms are arranged, and the at least two clamping arms are arranged opposite to each other, and each of the clamping arms has an extended state extending out of the clamp body and a retracted state retracted into the clamp body. The clamping arms are in the extended state so that the clamp body is covered outside the light shield, and the clamping arms are in the retracted state so that the clamping arms cooperate to support below the outer edge of the light shield.

2. The clamping mechanism according to claim 1, characterized in that: It also includes a button and an elastic member fixedly connected between the button and the clamping arm, wherein the elastic member is used to provide elastic force for the clamping arm to move relative to the clamp body, and the button is pressed to drive the clamping arm to move.

3. The clamping mechanism according to claim 2, characterized in that: It also includes a handle, which is located at the center of the clamp body and is communicated with the inside of the clamp body. The button is movably arranged on the handle, and the elastic member is arranged in the handle and the clamp body.

4. The clamping mechanism according to claim 1, characterized in that: The clamp body includes a cover plate and at least two folding arms arranged along the outer edge of the cover plate, the clamping arms are arranged one by one at one end of the folding arms away from the cover plate, and the wall surface of the clamping arms close to the light mask is coplanar.

5. The clamping mechanism according to claim 4, characterized in that: The clamping arm is slidably connected to one end of the folding arm away from the cover plate, and the clamping arm is driven to slide relative to the folding arm, so that the clamping arms approach each other and gradually switch from an extended state to a retracted state.

6. The clamping mechanism according to claim 4, characterized in that: The clamping arm is rotatably connected to one end of the folding arm away from the cover plate, and the clamping arm is driven to rotate relative to the folding arm, so that the clamping arms gather together and gradually switch from an extended state to a retracted state.

7. The clamping mechanism according to claim 4, characterized in that: The cover plate is in a rectangular structure, the number of the folding arms and the number of the clamping arms are both four, and the folding arms are arranged along the four sides of the cover plate.

8. The clamping mechanism according to claim 1, characterized in that: Along the connecting direction of at least two clamping arms arranged opposite to each other, the length of the clamp body is matched with the length of the light mask.

9. The clamping mechanism according to claim 2, characterized in that: The elastic member is a spring or an elastic rope.

10. A clamping device, characterized in that: It comprises the clamping mechanism described in any one of claims 1 to 9.

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