Ion reflection mechanism for ion source device

Abstract

The utility model provides an ion reflection mechanism for an ion source device, which comprises a reflection main body assembly, a switching conduction assembly, a radial locking assembly, an axial locking assembly, a radial positioning assembly and an axial positioning assembly. The connection between the reflection main body assembly and the switching conduction assembly is firm and convenient to disassemble, installation, debugging and maintenance are convenient, the radial positioning assembly and the axial positioning assembly ensure accurate positioning of the whole mechanism in the ion source device, the stability of the whole structure is improved, and the service life of the ion source device is prolonged. The working environment and requirements of the ion source device are fully considered, and the overall performance and stability of the ion source device can be improved through accurate positioning, stable connection and efficient reflection, so that the operation efficiency and reliability of the whole system are improved.

Description

Technical Field

[0001] The utility model relates to integrated circuit production equipment, in particular to an ion reflection mechanism for an ion source device. Background Art

[0002] Patent document CN101752796B discloses an ion generator which removes static electricity by supplying ions generated around a discharge electrode to an object to be removed of static electricity through corona discharge. The corona discharge type ion generator has an ion reflection part electrically connected to the discharge electrode. Through an electric field generated by applying a voltage of the same polarity as the discharge electrode to the ion reflection part, the ions are moved toward the object to be removed of static electricity. At the same time, the ion reflection part is formed into a hollow hemispherical shape and the end part of the ion reflection part forming a ventilation port is formed into an arc shape. Through the ventilation port between the discharge electrode and the end part of the ion reflection part, clean air is sent toward the object to be removed of static electricity. However, the installation structure of the ion reflection part adopted by this kind of ion generator is unstable and is prone to looseness after long-term operation, affecting the operation stability of the whole ion generator. Therefore, it is necessary to optimize its structure to overcome the above defects. Summary of the Utility Model

[0003] The purpose of the utility model is to provide an ion reflection mechanism for an ion source device to improve its operation stability.

[0004] The technical solution adopted by the utility model to solve its technical problems is as follows:

[0005] An ion reflection mechanism for an ion source device, which comprises:

[0006] A reflection main body assembly, which is installed in the arc starting cavity of the ion source device and corresponds to the position of the emission end head, and can reflect the ions formed by the emission end head;

[0007] A transfer conduction assembly, which is connected to the reflection main body assembly through a detachable connection structure and is electrically connected, can position the reflection main body assembly, and supply power to the reflection main body assembly;

[0008] A radial locking assembly, which is installed in the transfer conduction assembly and corresponds to the position of the reflection main body assembly, and the connection position between the reflection main body assembly and the transfer conduction assembly is radially locked by the radial locking assembly;

[0009] An axial locking assembly, which is installed in the reflection main body assembly and cooperates with the transfer conduction assembly, and the connection position between the reflection main body assembly and the transfer conduction assembly is axially locked by the axial locking assembly;

[0010] A radial positioning component, which is installed in the base of the ion source device and cooperates with the transfer and conduction component, and the radial positioning component radially positions the transfer and conduction component;

[0011] An axial positioning component, which is installed in the base of the ion source device, cooperates with and is electrically connected to the transfer and conduction component, axially positions the transfer and conduction component by the axial positioning component, and supplies power to the transfer and conduction component.

[0012] Specifically, the reflection main body component includes:

[0013] A reflection seat plate, which is installed in the arc starting cavity through a detachable connection structure, has a reflection shell cover made of insulating material on its outer wall, and has an avoidance through hole opened inside it, the avoidance through hole penetrates through both ends of the reflection seat plate, and the diameter of its inner end is larger than that of its outer end;

[0014] A conducting core column, which is made of conductive material and penetrates through the avoidance through hole, and there is a gap between its outer wall and the inner wall of the avoidance through hole;

[0015] A reflection end plate, which is made of conductive material and is located inside the reflection seat plate, the reflection end plate is connected and electrically connected to the inner end of the conducting core column, and there is a gap between the reflection seat plate and the reflection end plate;

[0016] An isolation gasket, which is made of insulating material and is located between the reflection end plate and the reflection seat plate, and insulates and isolates between the reflection end plate and the reflection seat plate by the isolation gasket;

[0017] An isolation tube sleeve, which is made of insulating material, is formed on the back of the isolation gasket and extends backward from the isolation gasket, the isolation tube sleeve covers the outside of the conducting core column and penetrates through the avoidance through hole, and its outer wall has a mating conical surface adapted to the shape of the avoidance through hole, and insulates and isolates between the conducting core column and the reflection seat plate by the isolation tube sleeve.

[0018] The transfer and conduction component includes:

[0019] A transfer plate strip, which is made of conductive material, has an opening and closing through slot opened at its inner end, the opening and closing through slot penetrates through the radial two ends of the transfer plate strip and extends along its axis, so that the inner end of the transfer plate strip can perform an opening and closing action;

[0020] A transfer notch, which is opened at the inner end of the transfer plate strip and is located on the inner wall of the opening and closing through slot, the middle section of the conducting core column penetrates through the transfer notch, and its outer end extends to the outside of the transfer notch, and the transfer plate strip supplies power to the conducting core column.

[0021] In one embodiment of the present invention, a tightening convex pattern is provided in the middle section of the conductive core column, and the tightening convex pattern abuts against the inner wall of the transfer recess, so that the electrical connection state between the conductive core column and the transfer strip is more complete.

[0022] The radial locking assembly includes:

[0023] A locking clamp spring spans across the opening and closing seam, and a locking recess that matches the shape of the locking clamp spring is provided at the inner end of the adapter strip. Both ends of the locking clamp spring are embedded in the locking recess to apply a radial locking force to the adapter strip, so that the adapter strip clamps and positions the guide core column.

[0024] In one embodiment of the utility model, a radial locking bolt is provided in the middle section of the adapter strip. The radial locking bolt spans across the opening and closing seam and is screwed into the adapter strip through a thread to apply a radial locking force to the adapter strip so that the adapter strip clamps and positions the guide core column.

[0025] The axial locking assembly includes:

[0026] The locking nut is screwed to the outer end of the guide core column through a thread and abuts against the outer wall of the adapter plate. The locking nut applies an axial locking force to the adapter plate to clamp the adapter plate between the locking nut and the reflective seat plate.

[0027] The radial positioning assembly includes:

[0028] A radial carrier plate, the radial carrier plate is located inside the adapter strip, and the edge of the radial carrier plate is fixed in the base of the ion source device by connecting bolts;

[0029] The radial seat block is made of insulating material and is fixed to the radial carrier plate by connecting bolts. A positioning slot is opened at the outer end of the radial seat block. The adapter plate is placed in the positioning slot and fixed by connecting bolts. The radial seat block radially positions the adapter plate and insulates it.

[0030] The axial positioning assembly includes:

[0031] An axial seat block, which is located at the outer end of the adapter strip and is fixed to the base of the ion source device by connecting bolts, and has an axial opening inside;

[0032] A positioning sleeve, which is made of insulating material and fixed in the axial opening by a bonding structure;

[0033] The axial core column is made of conductive material and passes through the positioning sleeve. The middle section is fixedly engaged with the positioning sleeve, and the inner end thereof has a matching inner plate. The outer end of the adapter strip is provided with an axial sleeve hole. The matching inner plate extends into the axial sleeve hole and is fixed by connecting bolts. The adapter strip is axially positioned by the axial core column. The outer end of the axial core column has a matching outer plate, which can be connected to the power supply through the matching outer plate, so that the axial core column can supply power to the adapter strip.

[0034] The advantages of the utility model are:

[0035] The ion reflection mechanism uses a radial locking component and an axial locking component to ensure that the connection between the reflection main body component and the transfer conduction component is both firm and easy to disassemble, which is convenient for installation, debugging and maintenance. The radial positioning component and the axial positioning component ensure the precise positioning of the entire mechanism in the ion source device, and improve the stability of the overall structure. The close contact between the conduction core column and the transfer plate strip ensures the adequacy of the electrical connection, so that the current can be transmitted smoothly. The use of insulating materials for components such as the reflection seat plate, the reflection end plate, the isolation liner and the isolation tube sleeve effectively prevents current leakage and short circuit, and improves the safety of the equipment. The ion reflection mechanism fully considers the working environment and requirements of the ion source device, and can improve the overall performance and stability of the ion source device through precise positioning, stable connection and efficient reflection, thereby improving the operating efficiency and reliability of the entire system. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a front structural schematic diagram of the ion reflection mechanism for the ion source device proposed by the utility model;

[0037] Figure 2 is a schematic diagram of the back structure of the ion reflection mechanism;

[0038] Figure 3 is an exploded view of the ion reflection mechanism. DETAILED DESCRIPTION

[0039] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. The components of the embodiments of the present utility model described and illustrated herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present utility model provided in the drawings is not intended to limit the scope of the claimed present utility model, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the scope of protection of the present utility model.

[0040] As Figures 1 to 3 shown, the ion reflection mechanism for an ion source device proposed by the present utility model includes a reflection main body assembly, a transfer and conduction assembly, a radial locking assembly, an axial locking assembly, a radial positioning assembly, and an axial positioning assembly. The reflection main body assembly is installed in the arc starting cavity of the ion source device and corresponds to the position of the emission end, and can reflect the ions formed by the emission end. The transfer and conduction assembly is connected to the reflection main body assembly through a detachable connection structure and is electrically connected, and can position the reflection main body assembly and supply power to the reflection main body assembly. The radial locking assembly is installed in the transfer and conduction assembly and corresponds to the position of the reflection main body assembly. The radial locking assembly radially locks the connection position between the reflection main body assembly and the transfer and conduction assembly. The axial locking assembly is installed in the reflection main body assembly and cooperates with the transfer and conduction assembly. The axial locking assembly axially locks the connection position between the reflection main body assembly and the transfer and conduction assembly. The radial positioning assembly is installed in the base of the ion source device and cooperates with the transfer and conduction assembly. The radial positioning assembly radially positions the transfer and conduction assembly. The axial positioning assembly is installed in the base of the ion source device, cooperates with the transfer and conduction assembly and is electrically connected. The axial positioning assembly axially positions the transfer and conduction assembly and supplies power to the transfer and conduction assembly.

[0041] In this embodiment, the reflector main body assembly includes a reflector seat plate 110, a conductive core column 120, a reflector end plate 130, an isolation pad 140 and an isolation sleeve 150. The reflector seat plate is installed in the arc starting cavity through a detachable connection structure, and its outer wall has a reflector shell made of insulating material, and a position avoidance opening is opened inside the reflector seat plate. The position avoidance opening passes through both ends of the reflector seat plate, and the diameter of the inner end is larger than the diameter of the outer end. The conductive core column is made of conductive material and passes through the position avoidance opening, and a gap is left between the outer wall and the inner wall of the position avoidance opening. The reflector end plate is made of conductive material and is located at the reflector seat. On the inner side of the plate, the reflective end disk is joined to the inner end of the conductive core column and is electrically connected, and a gap is left between the reflective seat plate and the reflective end disk. The isolation pad is made of insulating material and is located between the reflective end disk and the reflective seat plate. The reflective end disk and the reflective seat plate are insulated by the isolation pad. The isolation sleeve is made of insulating material, which is formed on the back of the isolation pad and extends to the rear of the isolation pad. The isolation sleeve is covered on the outside of the conductive core column and passes through the avoidance opening. The outer wall of the isolation sleeve has a matching cone surface that matches the shape of the avoidance opening, and the isolation sleeve and the conductive core column are insulated from the reflective seat plate.

[0042] The transfer conductive component includes a transfer strip 210 and a transfer recess 220. The transfer strip is made of conductive material, and an opening and closing seam 211 is provided at its inner end. The opening and closing seam passes through the radial ends of the transfer strip and extends along its axial direction, so that the inner end of the transfer strip can perform an opening and closing action. The transfer recess is provided at the inner end of the transfer strip and is located on the inner wall of the opening and closing seam. The middle section of the conductive core column passes through the transfer recess, and its outer end extends to the outside of the transfer recess. The transfer strip supplies power to the conductive core column.

[0043] In this embodiment, a tightening convex pattern is provided in the middle section of the conductive core column, and the tightening convex pattern abuts against the inner wall of the transfer recess, so that the electrical connection state between the conductive core column and the transfer strip is more complete.

[0044] The radial locking assembly includes a locking clamp spring 300, which spans across the opening and closing seam. A locking recess 212 matching the shape of the locking clamp spring is provided at the inner end of the adapter strip. Both ends of the locking clamp spring are embedded in the locking recess to apply a radial locking force to the adapter strip, so that the adapter strip clamps and positions the guide column.

[0045] In this embodiment, a radial locking bolt 213 is provided in the middle section of the adapter strip. The radial locking bolt spans across the opening and closing seam and is screwed into the adapter strip through threads to apply a radial locking force to the adapter strip so that the adapter strip clamps and positions the guide column.

[0046] The axial locking assembly includes a locking nut 400, which is screwed to the outer end of the guide column through a thread and abuts against the outer wall of the adapter plate. The locking nut applies an axial locking force to the adapter plate to clamp the adapter plate between the locking nut and the reflector seat plate.

[0047] The radial positioning assembly includes a radial carrier plate 510 and a radial seat block 520. The radial carrier plate is located on the inner side of the adapter plate, and its edge is fixed to the base of the ion source device by connecting bolts. The radial seat block is made of insulating material and is fixed to the radial carrier plate by connecting bolts. A positioning groove is provided at the outer end of the radial carrier plate. The adapter plate is placed in the positioning groove and fixed by connecting bolts. The radial seat block radially positions the adapter plate and insulates it.

[0048] The axial positioning assembly includes an axial seat block 610, a positioning sleeve 620 and an axial core column 630. The axial seat block is located at the outer end of the adapter plate and is fixed in the base of the ion source device by connecting bolts. An axial through hole is opened inside the axial seat block. The positioning sleeve is made of insulating material and is fixed in the axial through hole by an adhesive structure. The axial core column is made of conductive material and passes through the positioning sleeve. The middle section is fixedly engaged with the positioning sleeve, and the inner end thereof has a matching inner plate 631. An axial sleeve hole is opened at the outer end of the adapter plate. The matching inner plate extends into the axial sleeve hole and is fixed by connecting bolts. The adapter plate is axially positioned by the axial core column. The outer end of the axial core column has a matching outer plate 632, which can be connected to a power source through the matching outer plate so that the axial core column supplies power to the adapter plate.

[0049] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. An ion reflection mechanism for an ion source device, characterized in that: include: A reflective body component, which is installed in the arc-starting cavity of the ion source device and corresponds to the position of the emission end head, and can reflect ions formed by the emission end head; A transfer conductive component, which is connected to the reflective main body component through a detachable connection structure and is electrically connected to the reflective main body component, can position the reflective main body component, and supply power to the reflective main body component; A radial locking assembly, which is installed in the transition conductive assembly and corresponds to the position of the reflective main assembly, and is used to radially lock the connection position between the reflective main assembly and the transition conductive assembly; An axial locking assembly, which is installed in the reflective main assembly and cooperates with the transition conductive assembly, and the axial locking assembly axially locks the connection position between the reflective main assembly and the transition conductive assembly; A radial positioning component is installed in the base of the ion source device and cooperates with the transition conduction component. The radial positioning component radially positions the transition conduction component. The axial positioning component is installed in the base of the ion source device, cooperates with and is electrically connected to the transition conduction component, and the axial positioning component axially positions the transition conduction component and supplies power to the transition conduction component.

2. An ion reflection mechanism for an ion source device according to claim 1, characterized in that: Reflector Body Assembly includes: A reflective seat plate, which is installed in the arc-starting cavity through a detachable connection structure, and has an outer wall with a reflective shell made of insulating material, and an avoidance opening is opened inside the reflective seat plate. The avoidance opening runs through both ends of the reflective seat plate, and the diameter of the inner end is greater than the diameter of the outer end; The conducting core column is made of conductive material and passes through the avoidance opening, with a gap between its outer wall and the inner wall of the avoidance opening; A reflective end plate, which is made of conductive material and is located inside the reflective base plate. The reflective end plate is connected to the inner end of the conductive core column and is electrically connected. A gap is left between the reflective base plate and the reflective end plate. An isolation pad, which is made of insulating material and is located between the reflective end plate and the reflective seat plate, and the isolation pad is used to insulate the reflective end plate and the reflective seat plate; The isolation sleeve is made of insulating material, formed on the back of the isolation pad and extending to the rear of the isolation pad. The isolation sleeve is wrapped around the outside of the conductive core column and passes through the avoidance opening. The outer wall of the isolation sleeve has a matching cone surface that matches the shape of the avoidance opening, and the isolation sleeve and the conductive core column are insulated from the reflective seat plate.

3. An ion reflection mechanism for an ion source device according to claim 2, characterized in that: The transfer conduction components include: The transfer strip is made of conductive material, and an opening and closing seam is provided at the inner end thereof. The opening and closing seam runs through the radial ends of the transfer strip and extends along the axial direction thereof, so that the inner end of the transfer strip can perform an opening and closing action; The transfer recess is formed at the inner end of the transfer strip and is located on the inner wall of the opening and closing seam. The middle section of the conductive core column passes through the transfer recess, and its outer end extends to the outside of the transfer recess. The conductive core column is powered by the transfer strip.

4. The ion reflection mechanism for an ion source device according to claim 3, characterized in that: The radial locking assembly includes: A locking clamp spring spans across the opening and closing seam, and a locking recess that matches the shape of the locking clamp spring is provided at the inner end of the adapter strip. Both ends of the locking clamp spring are embedded in the locking recess to apply a radial locking force to the adapter strip, so that the adapter strip clamps and positions the guide core column.

5. The ion reflection mechanism for an ion source device according to claim 3, characterized in that: The axial locking assembly includes: The locking nut is screwed to the outer end of the guide core column through a thread and abuts against the outer wall of the adapter plate. The locking nut applies an axial locking force to the adapter plate to clamp the adapter plate between the locking nut and the reflective seat plate.

6. The ion reflection mechanism for an ion source device according to claim 3, characterized in that: The radial positioning assembly includes: A radial carrier plate, the radial carrier plate is located inside the adapter strip, and the edge of the radial carrier plate is fixed in the base of the ion source device by connecting bolts; The radial seat block is made of insulating material and is fixed to the radial carrier plate by connecting bolts. A positioning slot is opened at the outer end of the radial seat block. The adapter plate is placed in the positioning slot and fixed by connecting bolts. The radial seat block radially positions the adapter plate and insulates it.

7. The ion reflection mechanism for an ion source device according to claim 3, characterized in that: The axial positioning assembly includes: An axial seat block, which is located at the outer end of the adapter strip and is fixed to the base of the ion source device by connecting bolts, and has an axial opening inside; A positioning sleeve, which is made of insulating material and fixed in the axial opening by a bonding structure; The axial core column is made of conductive material and passes through the positioning sleeve. The middle section is fixedly engaged with the positioning sleeve, and the inner end thereof has a matching inner plate. The outer end of the adapter strip is provided with an axial sleeve hole. The matching inner plate extends into the axial sleeve hole and is fixed by connecting bolts. The adapter strip is axially positioned by the axial core column. The outer end of the axial core column has a matching outer plate, which can be connected to the power supply through the matching outer plate, so that the axial core column can supply power to the adapter strip.

Images