In-line wet cleaning machine

Abstract

The utility model discloses an in-line wet-type cleaning machine which comprises a first cleaning cavity, a second cleaning cavity, a first rinsing cavity, a second rinsing cavity and a drying cavity which are arranged in sequence, and products pass through the cavities in sequence during cleaning. The counting sensor is arranged at an inlet of a first cleaning cavity of the in-line wet type cleaning machine and used for calculating the number of products entering the first cleaning cavity and sending the number to the logic unit; the first valve is connected to an external pipeline of the first rinsing cavity; an external pipeline of the first rinsing cavity is connected with a high-concentration waste liquid collecting device; the second valve is connected between the first rinsing cavity external pipeline and the second rinsing cavity external pipeline; an external pipeline of the second rinsing cavity is connected with a low-concentration waste liquid collecting device; the logic unit is used for comparing the product quantity with a pre-stored threshold value and sending an electric signal to the first valve and the second valve according to a comparison result, so that the first valve and the second valve execute opening and closing actions corresponding to the electric signal; the first valve and the second valve are always kept in a mutual exclusion state in the cleaning process.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, and particularly to an in-line wet cleaning machine. Background Art

[0002] An in-line wet cleaning machine is a device used in the semiconductor manufacturing process, mainly for wet cleaning of ceramic copper clad laminates (DBC or DCB) welded with power chips. The existing in-line wet cleaning machine arranges the cleaning, rinsing, and drying function modules in a straight line, and the product completes the entire process flow at one time. When in use, the product is first placed in a carrier, and then the carrier is transported to the cleaning chamber by the conveying device of the cleaning machine. The flux after welding of the semiconductor power device is washed off with a water-based cleaning liquid. Then, the rinsing chamber sprays pure water to wash away the remaining cleaning liquid, and then enters the drying chamber to dry the product. Finally, the carrier is transported to the outlet. The waste water from the first rinsing chamber and the second rinsing chamber is discharged to the sewage treatment station together.

[0003] In actual production, the concentration of pollutants (COD) in the waste water generated in the rinsing chamber will vary irregularly with the number of products input during the operation of the cleaning machine, showing high and low pollution levels. The existing waste water treatment process mainly adopts the biochemical system + Fenton + electrochemical process. The stable operation of the biochemical system and the Fenton process depends on a stable influent COD value. Because the biochemical system mainly relies on microorganisms in the activated sludge to decompose and treat organic matter, large fluctuations in the influent COD will impact the biochemical system and even cause a large number of microorganisms to disintegrate and die. At the same time, the dosing value of the Fenton system needs to be adjusted according to the COD concentration at any time, and the COD fluctuation will make it difficult to stabilize the water quality after waste water treatment. Therefore, separately collecting high-concentration and low-concentration waste water can effectively stabilize the COD concentration of the influent water of the waste water station and ensure the stable and efficient operation of the waste water treatment system. Summary of the Utility Model

[0004] A series of simplified concepts are introduced in the summary of the utility model. These simplified concepts are all simplified from the prior art in this field and will be further detailed in the specific implementation part. The summary of the utility model does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the protection scope of the claimed technical solution.

[0005] The technical problem to be solved by the utility model is to provide an in-line wet cleaning machine that can automatically judge the concentration of waste liquid according to the number of products input for cleaning and automatically control the separate collection of high-concentration waste liquid.

[0006] To solve the above technical problems, the in-line wet cleaning machine provided by the present utility model includes: a first cleaning chamber, a second cleaning chamber, a first rinsing chamber, a second rinsing chamber, and a drying chamber arranged in sequence. The first cleaning chamber, the second cleaning chamber, the first rinsing chamber, the second rinsing chamber, and the drying chamber all adopt technical structures, and the structures of these chambers are not the key points of improvement in this application. During cleaning, the product passes through each chamber in sequence, and further includes:

[0007] A counting sensor, arranged at the entrance of the first cleaning chamber of the in-line wet cleaning machine, which is used to calculate the number of products entering the first cleaning chamber and send it to the logic unit;

[0008] A first valve, which is connected to the external pipeline of the first rinsing chamber;

[0009] The external pipeline of the first rinsing chamber is connected to a high-concentration waste liquid collection device;

[0010] A second valve, which is connected between the external pipeline of the first rinsing chamber and the external pipeline of the second rinsing chamber;

[0011] The external pipeline of the second rinsing chamber is connected to a low-concentration waste liquid collection device. It should be noted that high concentration and low concentration are relative and are the comparison of the concentrations in the two chambers;

[0012] A logic unit, which can be implemented by a hardware circuit or existing hardware. It compares the number of products with a pre-stored threshold value and sends an electrical signal to the first valve and the second valve according to the comparison result, so that the first valve and the second valve perform the switching actions corresponding to the electrical signal;

[0013] Among them, the first valve and the second valve always maintain a mutually exclusive state during the cleaning process.

[0014] Preferably, further improving the in-line wet cleaning machine, the counting sensor is an infrared counting sensor or a laser counting sensor.

[0015] Preferably, further improving the in-line wet cleaning machine, the logic unit is a comparator, a comparison circuit, a multiplexing circuit, a multiplexer, a PLC or a single-chip microcomputer.

[0016] Preferably, further improving the in-line wet cleaning machine, the first valve and the second valve are electric valves.

[0017] Preferably, further improving the in-line wet cleaning machine, the first valve and the second valve are pneumatic valves

[0018] Preferably, further improving the in-line wet cleaning machine, when the number of products is greater than or equal to the pre-stored threshold value, the logic unit sends a first electrical signal to the first valve and the second valve, the first valve opens, and the second valve closes;

[0019] When the product quantity is less than the pre - stored threshold value, the logic unit sends a second electrical signal to the first valve and the second valve. The first valve closes and the second valve opens. Exemplarily, the number of products to be cleaned in one batch is A, and the pre - stored threshold value is 1 / 2*A, that is, the threshold value is 50% of the number of products in this batch. That is to say, when the cleaning quantity reaches more than 50% of the number of products to be cleaned in the current batch, high - concentration waste liquid collection needs to be performed.

[0020] Preferably, further improving the in - line wet cleaning machine, the logic unit sends a first electrical signal to the first valve and the second valve. After delaying for the first duration, the first valve opens and the second valve closes;

[0021] The logic unit sends a first electrical signal to the first valve and the second valve. After delaying for the first duration, the first valve closes and the second valve opens.

[0022] The first duration can be calibrated according to the running speed of the products on the production line, that is, according to the conveying speed of the carrier, the time for the products to reach the first rinsing chamber is calibrated or calculated, and then the valve action is performed.

[0023] The working principle of the present utility model: Since the first rinsing chamber is adjacent to the second cleaning chamber, the residual amount of cleaning liquid on the products is high, resulting in a high pollution concentration of the wastewater in the first rinsing chamber. In comparison, the pollution concentration of the wastewater in the second rinsing chamber is low. The wastewater discharge pipelines of the first rinsing chamber and the second rinsing chamber are separated and controlled separately. A counting sensor is set at the entrance of the cleaning machine to detect the number of products in the carrier entering the cleaning machine. According to the number of products entering the cleaning machine, the pollution concentration of the wastewater is judged, and then the waste liquid discharge and collection of the first rinsing chamber are controlled through the first valve and the second valve.

[0024] The beneficial effects of the present utility model are as follows. Installing the counting sensor at the entrance of the cleaning machine can extend the service life of the counting sensor, avoid the harsh environment inside the cleaning machine, and the influence of the cleaning water flow on the sensing detection accuracy. Through the automatic control collection of high - concentration waste liquid, the pollution concentration of the discharged waste liquid is kept with low fluctuations, which is beneficial to the stable operation of the sewage treatment system. The collected high - concentration waste liquid can be redistributed for treatment when the load of the sewage station is low. The present utility model realizes the function of "peak shaving and valley filling". BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The drawings of the present utility model are intended to show the general characteristics of the methods, structures, and / or materials used in specific exemplary embodiments according to the present utility model to supplement the description in the specification. However, the drawings of the present utility model are schematic diagrams not drawn to scale, and thus may not be able to accurately reflect the precise structure or performance characteristics of any given embodiment. The drawings of the present utility model should not be construed as limiting or restricting the scope of the values or properties covered by the exemplary embodiments according to the present utility model. The following further details the present utility model in conjunction with the drawings and the specific embodiments:

[0026] Figure 1 Schematic structural diagram of an embodiment of the present utility model.

[0027] Explanation of reference numerals

[0028] First cleaning chamber 1

[0029] Second cleaning chamber 2

[0030] First rinsing chamber 3

[0031] Second rinsing chamber 4

[0032] Drying chamber 5

[0033] Counting sensor 6

[0034] First valve 7

[0035] High-concentration waste liquid collection device 8

[0036] Second valve 9

[0037] Low-concentration waste liquid collection device 10. Specific implementation manners

[0038] The following describes the implementation manners of the present utility model through specific specific examples. Those skilled in the art can fully understand other advantages and technical effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through different specific implementation manners, and the details in this specification can also be applied based on different viewpoints, with various modifications or changes made without departing from the overall design concept of the utility model. It should be noted that, without conflict, the following examples and the features in the examples can be combined with each other. The following exemplary embodiments of the present utility model can be implemented in many different forms and should not be construed as being limited only to the specific embodiments described herein. It should be understood that these embodiments are provided to make the disclosure of the present utility model complete and thorough, and to fully convey the technical solutions of these exemplary specific embodiments to those skilled in the art. It should be understood that when an element is referred to as being "connected" or "coupled" to another element, the element can be directly connected or coupled to the other element, or there can be an intermediate element. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there is no intermediate element. In all the drawings, the same reference numerals always represent the same elements.

[0039] First embodiment;

[0040] Reference Figure 1As shown in the figure, the present utility model provides a vertical wet cleaning machine, which includes: a first cleaning chamber 1, a second cleaning chamber 2, a first rinsing chamber 3, a second rinsing chamber 4, and a drying chamber 5 arranged in sequence. During cleaning, the product passes through each chamber in sequence, and further includes:

[0041] A counting sensor 6, arranged at the entrance of the first cleaning chamber of the vertical wet cleaning machine, which is used to calculate the number of products entering the first cleaning chamber and send it to the logic unit;

[0042] A first valve 7, which is connected to the external pipeline of the first rinsing chamber 3;

[0043] The external pipeline of the first rinsing chamber 3 is connected to a high-concentration waste liquid collection device 8;

[0044] A second valve 9, which is connected between the external pipeline of the first rinsing chamber 3 and the external pipeline of the second rinsing chamber 4;

[0045] The external pipeline of the second rinsing chamber 4 is connected to a low-concentration waste liquid collection device 10;

[0046] A logic unit (not shown in the figure), which compares the number of products with a pre-stored threshold value, and sends an electrical signal to the first valve and the second valve according to the comparison result, so that the first valve and the second valve perform the switching actions corresponding to the electrical signal;

[0047] Wherein, the first valve and the second valve always maintain a mutually exclusive state during the cleaning process;

[0048] Optionally, the counting sensor is an infrared counting sensor or a laser counting sensor;

[0049] Optionally, the logic unit is a comparator, a comparison circuit, a multiplexing circuit, a multiplexer, a PLC or a single-chip microcomputer.

[0050] Optionally, the first valve and the second valve are electric valves;

[0051] Optionally, the first valve and the second valve are pneumatic valves;

[0052] Wherein, when the number of products is greater than or equal to the pre-stored threshold value, the logic unit sends a first electrical signal to the first valve and the second valve, the first valve opens, and the second valve closes;

[0053] When the number of products is less than the pre-stored threshold value, the logic unit sends a second electrical signal to the first valve and the second valve, the first valve closes, and the second valve opens.

[0054] For further improvement of the above first embodiment, when the logic unit sends a first electrical signal to the first valve and the second valve, after a first time delay, the first valve opens and the second valve closes;

[0055] The logic unit sends a first electrical signal to the first valve and the second valve. After a first time delay, the first valve closes and the second valve opens.

[0056] In addition, it should also be understood that although the terms "first", "second", etc. can be used herein to describe different elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, or part from another element, component, region, layer, or part. Therefore, without departing from the teachings of the exemplary embodiments of the present invention, the first element, component, region, layer, or part discussed below can also be referred to as the second element, component, region, layer, or part.

[0057] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. It will also be understood that terms such as those defined in a general dictionary should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and not in an ideal or overly formal sense, unless expressly defined herein.

[0058] The present invention has been described in detail above through specific embodiments and examples, but these do not constitute a limitation to the present invention. Without departing from the principle of the present invention, those skilled in the art can also make many modifications and improvements, which should also be regarded as the protection scope of the present invention.

Claims

1. An in-line wet cleaning machine, characterized in that: include: The first cleaning chamber, the second cleaning chamber, the first rinsing chamber, the second rinsing chamber and the drying chamber are arranged in sequence, and the product passes through each chamber in sequence during cleaning, and further includes: A counting sensor is arranged at the entrance of the first cleaning chamber of the inline wet cleaning machine, and is used to count the number of products entering the first cleaning chamber and send it to the logic unit; A first valve connected to an external pipe of the first rinsing chamber; The external pipe of the first rinsing chamber is connected to the high-concentration waste liquid collection device; A second valve connected between the first rinsing chamber external pipe line and the second rinsing chamber external pipe line; The external pipe of the second rinsing chamber is connected to the low-concentration waste liquid collection device; A logic unit, which compares the product quantity with a pre-stored threshold value, and sends an electrical signal to the first valve and the second valve according to the comparison result, so that the first valve and the second valve perform a switching action corresponding to the electrical signal; The first valve and the second valve always maintain a mutually exclusive state during the cleaning process.

2. The in-line wet cleaning machine according to claim 1, characterized in that: The counting sensor is an infrared counting sensor or a laser counting sensor.

3. The in-line wet cleaning machine according to claim 1, characterized in that: The logic unit is a comparator, a comparison circuit, a multiplexer circuit, a multiplexer, a PLC or a single-chip microcomputer.

4. The in-line wet cleaning machine according to claim 1, characterized in that: The first valve and the second valve are electric valves.

5. The in-line wet cleaning machine according to claim 1, characterized in that: The first valve and the second valve are pneumatic valves.

6. The in-line wet cleaning machine according to claim 1, characterized in that: When the number of products is greater than or equal to a pre-stored threshold, the logic unit sends a first electrical signal to the first valve and the second valve, the first valve opens, and the second valve closes; When the product quantity is less than the pre-stored threshold, the logic unit sends a second electrical signal to the first valve and the second valve, the first valve is closed, and the second valve is opened.

7. The in-line wet cleaning machine according to claim 6, characterized in that: The logic unit sends a first electrical signal to the first valve and the second valve, and after a first delay, the first valve is opened and the second valve is closed; The logic unit sends a first electrical signal to the first valve and the second valve. After a first delay, the first valve is closed and the second valve is opened.

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