High-purity graphite piece treatment device

Abstract

The high-purity graphite piece processing device comprises a vacuum glue storage chamber, a glue draining basket, an air blower and a gas heater, the top of the vacuum glue storage chamber is provided with a glue injection opening and a pressure relief opening, the bottom of the vacuum glue storage chamber is provided with a glue leakage opening and an air inlet, the side wall of the vacuum glue storage chamber is provided with a vacuumizing opening and an air outlet, and the vacuumizing opening is communicated with the air outlet. The glue injection port, the pressure relief port, the glue leakage port, the air inlet, the vacuumizing port and the air outlet are all communicated with an inner cavity of the vacuum glue storage chamber, and first switch valves are arranged at the glue injection port, the pressure relief port, the glue leakage port, the air inlet, the vacuumizing port and the air outlet; the blower and the gas heater are arranged on the outer side of the vacuum glue storage chamber and are sequentially connected between the gas outlet and the gas inlet, a first air inlet is formed in the gas heater, and a second switch valve is arranged at the first air inlet; the glue draining basket is installed on the lower portion of an inner cavity of the vacuum glue storage chamber, and a plurality of glue draining holes are formed in the bottom and the side wall of the glue draining basket. According to the utility model, the internal porosity of the graphite material can be reduced, impurities and gas are removed, and the purity is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor materials, and particularly relates to a processing device for high-purity graphite parts. Background Art

[0002] In the efficient and fast-paced information society, high temperature, high pressure, high frequency, and high power have become a threshold that we must overcome in our development. As a representative of the third-generation wide-bandgap semiconductor materials - silicon carbide, due to the structural characteristics of its materials, it can almost perfectly meet the above-mentioned many advantages in applications. Especially in the emerging new energy market in recent years, it has initially witnessed its glorious moment.

[0003] Since there is no melt with stoichiometric ratio of silicon carbide at normal temperature and pressure, it is impossible to prepare and produce it by the mature and efficient Czochralski method. Currently, the most commonly used and mature method for preparing silicon carbide single crystals at home and abroad is the physical vapor transport (PVT) method. It is under the protection of high-purity dynamic inert gas. In a suitable temperature field established by induction heating or graphite resistance heating, after the high-purity silicon carbide powder decomposes and sublimes in the high-temperature source material area of the growth cavity, under the action of the temperature gradient of the thermal field and the gas-phase concentration gradient of the substance, it is transported to the low-temperature seed crystal guiding area, and atomic-level regular arrangement and crystal growth are carried out again in the low-temperature seed crystal guiding area.

[0004] The entire single crystal growth process is carried out in a high-temperature and low-pressure closed cavity, and there is always air leakage in the equipment or materials. Most of the thermal system materials used in growth are high-three graphite or high-purity carbon materials. There are pores inside the high-three graphite and high-purity carbon materials. Oxygen, nitrogen, moisture, etc. in the air are easily adsorbed repeatedly by these pores and are difficult to remove, which is easy to cause corrosion to the graphite materials, pollute the pure growth environment, and change the electrical parameters of the materials. Therefore, how to effectively remove impurities and gas is a major task and problem faced by high-purity semiconductor materials. Content of the Utility Model

[0005] The problem to be solved by the utility model is to provide a processing device for high-purity graphite parts, which can effectively reduce the internal porosity of graphite materials, reduce the specific surface area of graphite materials, is beneficial to removing impurities and gas, and improves the purity of graphite materials.

[0006] In order to solve the above technical problems, the technical scheme adopted by the utility model is as follows:

[0007] A high-purity graphite part processing device, characterized in that it includes a vacuum glue storage chamber, a glue draining basket, a hair dryer and a gas heater. The top of the vacuum glue storage chamber is provided with a glue injection port and a pressure relief port, the bottom of the vacuum glue storage chamber is provided with a glue leakage port and an air inlet, and the side wall of the vacuum glue storage chamber is provided with a vacuum pumping port and an air outlet. The glue injection port, the pressure relief port, the glue leakage port, the air inlet, the vacuum pumping port and the air outlet are all communicated with the inner cavity of the vacuum glue storage chamber, and first switching valves are provided at the glue injection port, the pressure relief port, the glue leakage port, the air inlet, the vacuum pumping port and the air outlet; The hair dryer and the gas heater are both arranged outside the vacuum glue storage chamber and are sequentially connected between the air outlet and the air inlet. The gas heater is provided with a first air inlet, and a second switching valve is provided at the first air inlet; The glue draining basket is installed in the lower part of the inner cavity of the vacuum glue storage chamber, and a plurality of glue draining holes are provided on the bottom and side walls of the glue draining basket.

[0008] Generally, a vacuum pump, a glue solution supply device and an automatic pressure relief and glue release device are also provided around the above-mentioned high-purity graphite part processing device. The air extraction port of the vacuum pump is connected to the above-mentioned vacuum pumping port, the glue outlet of the glue solution supply device is connected to the above-mentioned glue injection port, and the air extraction ports of the automatic pressure relief and glue release device are all connected to the above-mentioned pressure relief port and glue leakage port.

[0009] When the graphite part needs to be processed, open the vacuum glue storage chamber, place the graphite part on the glue draining basket and close the vacuum glue storage chamber; then, open the first switching valve, and use an external vacuum pump to evacuate the inner cavity of the entire vacuum glue storage chamber through the vacuum pumping port to exhaust all the gas inside the graphite part; Next, use an external glue solution supply device to inject glue solution into the inner cavity of the vacuum glue storage chamber through the glue injection port. When the graphite part is completely infiltrated with glue, the residual glue on the surface of the graphite part will drain out. The drained residual glue will gather at the bottom of the vacuum glue storage chamber through the multiple glue draining holes on the glue draining basket. After the residual glue on the surface of the graphite part has drained out, open the glue leakage port at the bottom of the vacuum glue storage chamber to allow the drained residual glue to drain out from the glue leakage port.

[0010] After the residual glue is drained, open the air inlet at the bottom of the vacuum glue storage chamber and the first air inlet of the gas heater, introduce new gas through the first air inlet of the gas heater, heat the new gas through the gas heater, and then use the hair dryer to transport the heated gas into the vacuum glue storage chamber through the air inlet to perform a primary curing treatment on the carbon glue on the graphite part. After a period of time, close the first air inlet of the gas heater, open the air inlet and air outlet at the bottom of the vacuum glue storage chamber respectively, so that the air outlet, the heater, the hair dryer, the air inlet and the inner cavity of the vacuum glue storage chamber are sequentially communicated, heat the gas coming out of the air outlet through the gas heater, and then use the hair dryer to continuously circulate and transport the heated gas into the vacuum glue storage chamber through the air inlet to perform a secondary curing treatment on the graphite part.

[0011] In a preferred embodiment, the air outlet is connected to the gas heater through a first gas pipeline, the gas heater is connected to the air inlet of the hair dryer through a second gas pipeline, and the air outlet of the hair dryer is connected to the air inlet through a third gas pipeline.

[0012] In a preferred embodiment, the vacuum glue storage chamber includes a glue storage cylinder and a glue storage cover. The glue storage cover covers the upper opening of the glue storage cylinder. The glue injection port and the pressure relief port are both arranged on the glue storage cover. The glue leakage port and the air inlet are both arranged at the bottom of the glue storage cylinder. The vacuum pumping port and the air outlet are both arranged on the side wall of the glue storage cylinder. By covering the upper opening of the glue storage cylinder with the glue storage cover, the vacuum glue storage chamber can be sealed, and the graphite parts can be normally taken and placed by opening the glue storage cover.

[0013] In a further preferred embodiment, the lower part of the glue storage cylinder is provided with an annular inclined surface that gradually slopes downward from outside to inside, and the glue leakage port is located at the center of the annular inclined surface. When the residual glue in the glue storage cylinder needs to be discharged, the residual glue can flow downward from outside to inside along the annular inclined surface and into the glue leakage port, and then be discharged through the glue leakage port.

[0014] In a preferred embodiment, the glue draining basket includes a glue draining cylinder and a glue draining plate. The glue draining cylinder is arranged above the glue draining plate, and the lower opening of the glue draining cylinder is installed on the outer edge of the glue draining plate; each of the glue draining holes is respectively arranged on the cylinder wall of the glue draining cylinder and the glue draining plate.

[0015] In a preferred embodiment, the materials of the vacuum glue storage chamber and the glue draining basket are both stainless steel. The stainless steel material has the characteristics of corrosion resistance and easy cleaning, which can ensure that the vacuum glue storage chamber and the glue draining basket are not affected by pollution during long-term use.

[0016] Compared with the prior art, the present invention has the following advantages:

[0017] By providing a glue injection port, a pressure relief port, a glue leakage port, an air inlet, a vacuum pumping port, and an air outlet on the vacuum glue storage chamber and cooperating with corresponding external devices, the high-purity graphite part processing device of the present invention has functions such as vacuum degassing, automatic infiltration and hanging glue, automatic glue draining, and automatic low-temperature curing, which can effectively reduce the internal porosity of the graphite material, reduce the specific surface area of the graphite material, facilitate the removal of impurities or gases, and improve the purity of the graphite material. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of a specific embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The present invention will be specifically described below in conjunction with the accompanying drawings and specific embodiments.

[0020] As Figure 1As shown in the figure, the high-purity graphite part processing device in this embodiment includes a vacuum glue storage chamber 1, a glue draining basket 2, a hair dryer 3, and a gas heater 4. The top of the vacuum glue storage chamber 1 is provided with a glue injection port 11 and a pressure relief port 12. The bottom of the vacuum glue storage chamber 1 is provided with a glue leakage port 13 and an air inlet 14. The side wall of the vacuum glue storage chamber 1 is provided with a vacuum pumping port 15 and an air outlet 16. The glue injection port 11, the pressure relief port 12, the glue leakage port 13, the air inlet 14, the vacuum pumping port 15, and the air outlet 16 are all communicated with the inner cavity of the vacuum glue storage chamber 1. First switching valves 17 are provided at the glue injection port 11, the pressure relief port 12, the glue leakage port 13, the air inlet 14, the vacuum pumping port 15, and the air outlet 16; the hair dryer 3 and the gas heater 4 are both arranged outside the vacuum glue storage chamber 1 and are sequentially connected between the air outlet 16 and the air inlet 14. The gas heater 4 is provided with a first air inlet 41, and a second switching valve 42 is provided at the first air inlet 41; the glue draining basket 2 is installed in the lower part of the inner cavity of the vacuum glue storage chamber 1, and a plurality of glue draining holes 21 are provided on the bottom and side wall of the glue draining basket 2.

[0021] Generally, a vacuum pump, a glue supply device, and an automatic pressure relief and glue release device are also provided around the above-mentioned high-purity graphite part processing device. The air extraction port of the vacuum pump is connected to the above-mentioned vacuum pumping port 15, the glue outlet of the glue supply device is connected to the above-mentioned glue injection port 11, and the air extraction ports of the automatic pressure relief and glue release device are all connected to the above-mentioned pressure relief port 12 and the glue leakage port 13.

[0022] When the graphite part needs to be processed, open the vacuum glue storage chamber 1, place the graphite part on the glue draining basket 2 and close the vacuum glue storage chamber 1; then, open the first switching valve 17, and use an external vacuum pump to evacuate the inner cavity of the entire vacuum glue storage chamber 1 through the vacuum pumping port 15 to exhaust all the gas inside the graphite part; then, use an external glue supply device to inject glue into the inner cavity of the vacuum glue storage chamber 1 through the glue injection port 11. When the graphite part is completely infiltrated with glue, the residual glue on the surface of the graphite part will drain out. The drained residual glue is collected at the bottom of the vacuum glue storage chamber 1 through the plurality of glue draining holes 21 on the glue draining basket 2. After the residual glue on the surface of the graphite part is drained, open the glue leakage port 13 at the bottom of the vacuum glue storage chamber 1 to discharge the drained residual glue from the glue leakage port 13.

[0023] After the residual glue is exhausted, open the air inlet 14 at the bottom of the vacuum glue storage chamber 1 and the first air inlet 41 of the gas heater 4. Pass new gas through the first air inlet 41 of the gas heater 4, heat the new gas through the gas heater 4, and then transport the heated gas to the vacuum glue storage chamber 1 through the blower 3 via the air inlet 14 for a primary curing treatment of the carbon glue on the graphite part. After a period of time, close the first air inlet 41 of the gas heater 4, and open the air inlet 14 and the air outlet 16 at the bottom of the vacuum glue storage chamber 1 respectively, so that the air outlet 16, the heater, the blower 3, the air inlet 14 and the inner cavity of the vacuum glue storage chamber 1 are connected in sequence. Heat the gas coming out of the air outlet 16 through the gas heater 4, and then continuously circulate and transport the heated gas to the vacuum glue storage chamber 1 through the blower 3 via the air inlet 14 for a secondary curing treatment of the graphite part.

[0024] The air outlet 16 is connected to the gas heater 4 through the first gas pipe 18, the gas heater 4 is connected to the air inlet of the blower 3 through the second gas pipe 19, and the air outlet of the blower 3 is connected to the air inlet 14 through the third gas pipe 10.

[0025] The vacuum glue storage chamber 1 includes a glue storage cylinder 101 and a glue storage cover 102. The glue storage cover 102 covers the upper opening of the glue storage cylinder 101. The glue injection port 11 and the pressure relief port 12 are both arranged on the glue storage cover 102. The glue leakage port 13 and the air inlet 14 are both arranged at the bottom of the glue storage cylinder 101. The vacuum extraction port 15 and the air outlet 16 are both arranged on the side wall of the glue storage cylinder 101. By covering the glue storage cover 102 on the upper opening of the glue storage cylinder 101, the vacuum glue storage chamber 1 can be sealed, and the graphite part can be normally taken and placed by opening the glue storage cover 102.

[0026] An annular inclined surface 103 that gradually slopes downward from the outside to the inside is provided at the lower part of the glue storage cylinder 101, and the glue leakage port 13 is located at the center of the annular inclined surface 103. When the residual glue in the glue storage cylinder 101 needs to be discharged, the residual glue can flow along the annular inclined surface 103 from the outside to the inside and gradually downward into the glue leakage port 13 and be discharged from the glue leakage port 13.

[0027] The glue draining basket 2 includes a glue draining cylinder 22 and a glue draining plate 23. The glue draining cylinder 22 is arranged above the glue draining plate 23, and the lower end opening of the glue draining cylinder 22 is installed on the outer edge of the glue draining plate 23; each of the glue draining holes 21 is respectively arranged on the barrel wall of the glue draining cylinder 22 and the glue draining plate 23.

[0028] The materials of the vacuum glue storage chamber 1 and the glue draining basket 2 are both stainless steel. The stainless steel material has the characteristics of corrosion resistance and easy cleaning, which can ensure that the long-term use of the vacuum glue storage chamber 1 and the glue draining basket 2 is not affected by pollution.

[0029] In addition, it should be noted that for the specific embodiments described in this specification, the names of their respective parts and the like can be different. Any equivalent or simple changes made according to the structure, features, and principles described in the inventive concept of this utility model are included within the protection scope of this utility model patent. Those skilled in the technical field to which this utility model pertains can make various modifications, supplements, or use similar methods for substitution to the specific embodiments described, as long as they do not deviate from the structure of this utility model or exceed the scope defined by this claims, they should all fall within the protection scope of this utility model.

Claims

1. A high-purity graphite parts processing device, characterized in that: It includes a vacuum glue storage chamber, a glue draining basket, a hair dryer and a gas heater. A glue injection port and a pressure relief port are provided on the top of the vacuum glue storage chamber, a glue leakage port and an air inlet are provided on the bottom of the vacuum glue storage chamber, and a vacuum port and an air outlet are provided on the side wall of the vacuum glue storage chamber. The glue injection port, the pressure relief port, the glue leakage port, the air inlet, the vacuum port and the air outlet are all connected with the inner cavity of the vacuum glue storage chamber, and the glue injection port, the pressure relief port, the glue leakage port, the air inlet, the vacuum port and the air outlet are all provided with a first switch valve; the hair dryer and the gas heater are both arranged on the outside of the vacuum glue storage chamber and are connected between the air outlet and the air inlet in sequence, the gas heater is provided with a first air inlet, and the first air inlet is provided with a second switch valve; the glue draining basket is installed in the lower part of the inner cavity of the vacuum glue storage chamber, and a plurality of glue draining holes are provided on the bottom and side walls of the glue draining basket.

2. The high-purity graphite parts processing device according to claim 1, characterized in that: The air outlet is connected to the gas heater via a first air pipe, the gas heater is connected to the air inlet of the hair dryer via a second air pipe, and the air outlet of the hair dryer is connected to the air inlet via a third air pipe.

3. The high-purity graphite parts processing device according to claim 1, characterized in that: The vacuum glue storage chamber includes a glue storage tube and a glue storage cover, the glue storage cover covers the upper end opening of the glue storage tube, the glue injection port and the pressure relief port are both arranged on the glue storage cover, the glue leakage port and the air inlet are both arranged at the bottom of the glue storage tube, and the vacuum port and the air outlet are both arranged on the side wall of the glue storage tube.

4. The high-purity graphite parts processing device according to claim 3, characterized in that: The lower part of the glue storage cylinder is provided with an annular inclined surface which gradually slopes downward from the outside to the inside, and the glue leakage port is located at the center of the annular inclined surface.

5. The high-purity graphite parts processing device according to claim 1, characterized in that: The drain glue basket includes a drain glue cylinder and a drain glue board. The drain glue cylinder is arranged above the drain glue board, and the lower end opening of the drain glue cylinder is installed on the outer edge of the drain glue board; each of the drain glue holes is respectively arranged on the cylinder wall of the drain glue cylinder and the drain glue board.

6. The high-purity graphite parts processing device according to claim 1, characterized in that: The vacuum glue storage chamber and the glue draining basket are both made of stainless steel.

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