Wafer sorting machine convenient to convey

Abstract

The utility model discloses a wafer sorting machine convenient to convey, which comprises a bottom plate, a first conveying device, a second conveying device, a third conveying device, a conveying device, a sensor and an operation display, and is characterized in that the first conveying device and the second conveying device are arranged on one side of the bottom plate side by side; the third conveying devices are arranged on the other side of the bottom plate side by side. The conveying device comprises a supporting frame and a conveying assembly, and the supporting frame is arranged on the bottom plate; the conveying assembly is arranged on the supporting frame in a sliding mode. Therefore, the wafers can be rapidly screened, it is ensured that each wafer can be accurately conveyed to the designated processing position, rapid identification and accurate classification can be achieved on the basis of tiny size differences, surface characteristics, material characteristics or different production stages, high efficiency and accuracy of the production process are ensured, and the production efficiency is improved. Due to the efficient conveying capacity and the accurate recognition system, the overall efficiency and the product quality of semiconductor manufacturing are greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of sorting machines, in particular to a wafer sorting machine which is convenient for conveying. Background Art

[0002] In a busy semiconductor manufacturing workshop, wafer sorting machines play a crucial role. However, existing technical bottlenecks make these sorting machines unable to cope when faced with a large number of wafers. When a large number of wafers are slowly moving on the production line, each with its own unique characteristics and requirements, waiting to be accurately allocated to each processing link.

[0003] However, existing sorting machines cannot meet this high-efficiency and high-precision requirement. Some wafers may need to be sent to specific equipment for fine processing due to minor size differences or surface features, while others may need to be guided to another production line due to their material properties or different production stages. However, under the current operation of sorting machines, these subtle differences are often difficult to be quickly identified and accurately classified.

[0004] This not only leads to a reduction in production efficiency but also increases the uncertainty in the production process. Wafers may be confused, delayed, or misallocated during the sorting process, all of which will have a negative impact on the entire production process. Therefore, although existing wafer sorting machines have completed their basic screening tasks to a certain extent, their limitations and deficiencies are obvious when dealing with large quantities and high-efficiency wafer processing. Summary of the Utility Model

[0005] The utility model aims to solve at least one of the technical problems in the related technologies to a certain extent.

[0006] For this reason, the purpose of the utility model is to provide a wafer sorting machine which is convenient for conveying, which can quickly screen wafers, ensure that each wafer can be accurately conveyed to its designated processing position. Whether based on minor size differences, surface features, material properties, or different production stages, it can quickly identify and accurately classify, ensuring the high efficiency and precision of the production process. Its high-efficiency conveying ability and precise identification system greatly improve the overall efficiency and product quality of semiconductor manufacturing.

[0007] To achieve the above object, the present utility model provides a wafer sorter facilitating transportation, which includes a bottom plate, a first conveying device, a second conveying device, a third conveying device, a conveying device, a sensor and an operation display. Among them, the first conveying device and the second conveying device are arranged side by side on one side of the bottom plate; the third conveying device is arranged side by side on the other side of the bottom plate; the conveying device includes a support frame and a conveying component, wherein the support frame is arranged on the bottom plate; the conveying component is slidably arranged on the support frame; the sensor is arranged on the conveying component; the operation display is arranged on one side of the bottom plate.

[0008] A wafer sorter facilitating transportation according to the present utility model can quickly screen wafers, ensuring that each wafer can be accurately conveyed to its designated processing position. Whether it is based on minute size differences, surface features, material properties or different production stages, it can quickly identify and accurately classify them, ensuring the efficiency and precision of the production process. Its high-efficiency conveying ability and precise identification system greatly improve the overall efficiency and product quality of semiconductor manufacturing.

[0009] In addition, a wafer sorter facilitating transportation according to the above application may further have the following additional technical features:

[0010] Specifically, the first conveying device includes a first driving motor and a first conveying plate. Among them, the first driving motor is arranged on the bottom plate; the first conveying plate is arranged on the bottom plate, and the first conveying plate is connected to the first driving motor.

[0011] Specifically, the second conveying device includes a second driving motor and a second conveying plate. Among them, the second driving motor is arranged on the bottom plate; the second conveying plate is arranged on the bottom plate, and the second conveying plate is connected to the second driving motor.

[0012] Specifically, the third conveying device includes a third driving motor and a third conveying plate. Among them, the third driving motor is arranged on the bottom plate; the third conveying plate is arranged on the bottom plate, and the third conveying plate is connected to the third driving motor.

[0013] Specifically, the conveying component includes an electric slide rail, a sliding table, a sliding plate, an electric push rod and an electric clamping block. Among them, the electric slide rail is arranged on the support frame; the sliding table is slidably arranged on the electric slide rail; the sliding plate is arranged on one side of the support frame; one end of the electric push rod is connected to one side of the sliding table; the electric clamping block is connected to the output end of the electric push rod, the electric clamping block is slidably arranged in the middle of the sliding plate, and the electric clamping block is electrically connected to the sensor.

[0014] Specifically, the electric slide rail, the electric push rod, and the sensor are all electrically connected to the operation display.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description, will become apparent in part from the following description, or will be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and be readily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0017] Figure 1 is a perspective view of a wafer sorter for easy transportation according to an embodiment of the present invention;

[0018] Figure 2 is a perspective view of a wafer sorter for easy transportation according to another embodiment of the present invention;

[0019] Figure 3 is a perspective view of a wafer sorter for easy transportation according to another embodiment of the present invention.

[0020] As shown in the figure: 1, bottom plate; 2, first conveying device; 3, second conveying device; 4, third conveying device; 5, conveying device; 6, sensor; 7, operation display; 51, support frame; 52, conveying component; 21, first driving motor; 22, first conveying plate; 31, second driving motor; 32, second conveying plate; 41, third driving motor; 42, third conveying plate; 521, electric slide rail; 522, sliding table; 523, sliding plate; 524, electric push rod; 525, clamping block. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are intended to explain the present invention, and should not be construed as limiting the present invention. On the contrary, the embodiments of the present invention include all changes, modifications, and equivalents falling within the spirit and scope of the appended claims.

[0022] The following describes a wafer sorter for easy transportation according to an embodiment of the present invention in conjunction with the accompanying drawings.

[0023] As Figures 1-3As shown in the figure, a wafer sorter for facilitating transportation according to an embodiment of the present invention includes a bottom plate 1, a first conveyor 2, a second conveyor 3, a third conveyor 4, a conveying device 5, a sensor 6, and an operation display 7. Among them, the first conveyor 2 and the second conveyor 3 are arranged side by side on one side of the bottom plate 1, and the third conveyor 4 is arranged side by side on the other side of the bottom plate 1. The conveying device 5 includes a support frame 51 and a conveying component 52. Among them, the support frame 51 is arranged on the bottom plate 1, and the conveying component 52 is slidably arranged on the support frame 51. The sensor 6 is arranged on the conveying component 52, and the operation display 7 is arranged on one side of the bottom plate 1.

[0024] Among them, it can be understood that the wafer is placed on the first conveyor 2 and conveyed backward. The wafer is identified by the sensor 6, and the conveying component 52 is controlled to clamp and convey the wafer backward. According to the sorting settings preset on the operation display 7, different wafers are placed on the second conveyor 3 and the third conveyor 4 with different conveying directions for rapid conveying and sorting.

[0025] In an embodiment of the present invention, as Figure 1 shown, the first conveyor 2 includes a first driving motor 21 and a first conveyor plate 22. Among them, the first driving motor 21 is arranged on the bottom plate 1, the first conveyor plate 22 is arranged on the bottom plate 1, and the first conveyor plate 22 is connected to the first driving motor 21.

[0026] Among them, it can be understood that the first driving motor 21 drives the first conveyor plate 22 to transmit, and the wafer is placed on the first conveyor plate 22 for backward conveying.

[0027] In an embodiment of the present invention, as Figure 1 shown, the second conveyor 3 includes a second driving motor 31 and a second conveyor plate 32. Among them, the second driving motor 31 is arranged on the bottom plate 1, the second conveyor plate 32 is arranged on the bottom plate 1, and the second conveyor plate 32 is connected to the second driving motor 31.

[0028] Among them, it can be understood that the second driving motor 31 rotates to drive the second conveyor plate 32 to transmit, and the wafer is conveyed and sorted.

[0029] In an embodiment of the present invention, as Figure 2 shown, the third conveyor 4 includes a third driving motor 41 and a third conveyor plate 42. Among them, the third driving motor 41 is arranged on the bottom plate 1, the third conveyor plate 42 is arranged on the bottom plate 1, and the third conveyor plate 42 is connected to the third driving motor 41.

[0030] Among them, it can be understood that the third driving motor 41 rotates to drive the third conveyor plate 42 to transmit, and the wafer is conveyed and sorted.

[0031] In an embodiment of the present utility model, as Figure 1 shown, the conveying assembly 52 includes an electric slide rail 521, a slide table 522, a sliding plate 523, an electric push rod 524 and an electric clamping block 525. Among them, the electric slide rail 521 is arranged on the support frame 51, the slide table 522 is slidably arranged on the electric slide rail 521, the sliding plate 523 is arranged on one side of the support frame 51, one end of the electric push rod 524 is connected to one side of the slide table 522, the electric clamping block 525 is connected to the output end of the electric push rod 524, the electric clamping block 525 is slidably arranged in the middle of the sliding plate 523, and the electric clamping block 525 is electrically connected to the sensor 6.

[0032] Among them, it can be understood that the wafer is identified by the sensor 6. After the identification is completed, the electric push rod 524 drives the electric clamping block 525 to rise, so as to realize the lifting of the wafer, and the electric slide rail 521 is controlled to drive the slide table 522 to move, and the wafer is placed at a specified position.

[0033] It should be noted that in the embodiment described, the electric clamping block 525 can clamp wafers of different sizes. When the wafer is conveyed backward on the first conveying device 2, the electric push rod 524 drives the electric clamping block 525 to descend. When the wafer is conveyed to the lower end of the electric clamping block 525, the electric clamping block 525 clamps it, and then the electric push rod 524 rising can drive the wafer to rise and fall synchronously.

[0034] It should be noted that placing the wafer at a specified position described in this embodiment can be the second conveying device 3 or the third conveying device 4. When reaching the second conveying device 3 or the third conveying device 4, the electric push rod 524 drives the electric clamping block 525 to move downward. When the wafer is placed on the second conveying device 3 or the third conveying device 4 in the conveying state, the electric clamping block 525 is immediately opened and conveyed backward following the conveying.

[0035] In an embodiment of the present utility model, as Figure 2 shown, the electric slide rail 521, the electric push rod 524 and the sensor 6 are all electrically connected to the operation display 7.

[0036] Among them, it can be understood that the operation of the device can be realized through the operation display 7, making the operation more convenient and fast. At the same time, the current latest state can be understood through the operation display 7.

[0037] Specifically, in the actual execution process, the wafer is placed on the first conveyor plate 22, and the first drive motor 21 drives the first conveyor plate 22 to transmit, so as to drive the wafer to be transmitted backward on the first conveyor plate 22, and the wafer is identified by the sensor 6. After the identification is completed, the electric clamp 525 is started, which can clamp wafers of different sizes. Then the electric push rod 524 drives the electric clamp 525 to rise upward to lift the wafer, and the electric slide rail 521 is controlled to drive the slide 522 to move, so as to place the wafer at the specified position.

[0038] The designated position for placing the wafer may be the second conveyor 3 or the third conveyor 4. When reaching the second conveyor 3 or the third conveyor 4, the electric push rod 524 drives the electric clamp 525 to move downward. When the wafer is placed on the second conveyor 3 or the third conveyor 4 in the conveying state, the electric clamp 525 is immediately opened and conveyed backward following the conveying.

[0039] In summary, the wafer sorting machine that is easy to transport in the embodiment of the utility model can quickly screen wafers to ensure that each wafer can be accurately transported to its designated processing position. Regardless of whether it is based on tiny size differences, surface features, material properties or different production stages, it can be quickly identified and accurately classified to ensure the efficiency and accuracy of the production process. Its efficient transportation capacity and accurate identification system have greatly improved the overall efficiency and product quality of semiconductor manufacturing.

[0040] In the description of this specification, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0041] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0042] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

Claims

1. A wafer sorting machine that is easy to transport, characterized in that: It comprises a base plate (1), a first conveying device (2), a second conveying device (3), a third conveying device (4), a conveying device (5), a sensor (6) and an operation display (7), wherein: The first conveying device (2) and the second conveying device (3) are arranged side by side on one side of the bottom plate (1); The third conveying device (4) is arranged side by side on the other side of the bottom plate (1); The conveying device (5) comprises a support frame (51) and a conveying assembly (52), wherein: The support frame (51) is arranged on the base plate (1); The conveying assembly (52) is slidably arranged on the supporting frame (51); The sensor (6) is arranged on the conveying component (52); The operation display (7) is arranged on one side of the base plate (1).

2. A wafer sorting machine that is easy to transport according to claim 1, characterized in that: The first conveying device (2) comprises a first driving motor (21) and a first conveying plate (22), wherein: The first driving motor (21) is arranged on the base plate (1); The first transmission plate (22) is arranged on the bottom plate (1), and the first transmission plate (22) is connected to the first driving motor (21).

3. The wafer sorting machine for easy transportation according to claim 1, characterized in that: The second conveying device (3) comprises a second driving motor (31) and a second conveying plate (32), wherein: The second driving motor (31) is arranged on the base plate (1); The second transmission plate (32) is arranged on the bottom plate (1), and the second transmission plate (32) is connected to the second driving motor (31).

4. The wafer sorting machine for easy transportation according to claim 1, characterized in that: The third conveying device (4) comprises a third driving motor (41) and a third conveying plate (42), wherein: The third driving motor (41) is arranged on the base plate (1); The third transmission plate (42) is arranged on the bottom plate (1), and the third transmission plate (42) is connected to the third driving motor (41).

5. The wafer sorting machine for easy transportation according to claim 1, characterized in that: The conveying assembly (52) comprises an electric slide rail (521), a slide table (522), a sliding plate (523), an electric push rod (524) and an electric clamping block (525), wherein: The electric slide rail (521) is arranged on the support frame (51); The slide table (522) is slidably arranged on the electric slide rail (521); The sliding plate (523) is arranged on one side of the supporting frame (51); One end of the electric push rod (524) is connected to one side of the slide table (522); The electric clamp (525) is connected to the output end of the electric push rod (524), the electric clamp (525) is slidably arranged in the middle of the sliding plate (523), and the electric clamp (525) is electrically connected to the sensor (6).

6. The wafer sorting machine for easy transportation according to claim 5, characterized in that: The electric slide rail (521), the electric push rod (524) and the sensor (6) are all electrically connected to the operation display (7).

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