Grinding fluid supply equipment cabinet

Abstract

The utility model relates to a grinding fluid supply equipment cabinet which comprises a cabinet body, baffles are arranged in the cabinet body, the baffles divide the cabinet body into a stock solution chamber, a mixing chamber and an electric control chamber which are used for containing a stock solution barrel, a mixing system and an electric control module respectively, and a first cabinet door, a second cabinet door and a third cabinet door are arranged corresponding to the stock solution chamber, the mixing chamber and the electric control chamber respectively. At least one of the first cabinet door and the second cabinet door adopts a translation type cabinet door; the stock solution chamber and the electric control chamber are located on the same side of the cabinet body, and the mixing chamber is located on the other side of the cabinet body. According to the grinding fluid supply equipment cabinet, the cabinet door which is turned outwards to be opened is replaced with the translation type cabinet door, on one hand, the requirement for the external space of the cabinet body when the cabinet door is opened is lowered, on the other hand, the translation type cabinet door is adopted, and when the cabinet door is opened, the cabinet body can be prevented from being opened difficultly when negative pressure exists in the cabinet body.

Description

Technical Field

[0001] The utility model relates to the technical field of abrasive liquid supply, and particularly relates to an abrasive liquid supply equipment cabinet. Background Art

[0002] Chemical mechanical polishing (CMP), as an essential process in chip processing, is not only used in the wafer preparation stage, but also in the overall planarization process of the wafer surface during the wafer processing technology. The supply of abrasive liquid is realized through an abrasive liquid supply equipment cabinet. Usually, the abrasive liquid supply cabinet uses stainless steel to make the skeleton, and PP plates are installed on the outside of the skeleton. The prior art, such as the abrasive liquid supply equipment disclosed in the patent document with the publication number of CN219925709U, has a stock solution barrel, a mixing system, and an electric control module arranged in the cabinet body. The stock solution barrel, the mixing system, and the electric control module are respectively placed in three chamber spaces of the cabinet body. Each chamber is respectively equipped with a cabinet door. The cabinet door is made of PP board (polypropylene board) and is installed on the cabinet body through hinge structures such as hinges. The cabinet doors corresponding to the mixing system and the stock solution barrel are relatively spacious, so the cabinet doors are relatively large. When the cabinet doors are opened, relatively large space is required. For users, the on-site space may be relatively limited. The existing abrasive liquid supply equipment cabinet is inconvenient to open, and because the inside of the cabinet body may be in a negative pressure state, the difficulty of opening is increased. Summary of the Utility Model

[0003] In order to solve the above technical problems, the utility model provides an abrasive liquid supply equipment cabinet, which adopts a translational cabinet door, reducing the requirement for the external space of the cabinet body and facilitating the opening of the cabinet door.

[0004] The technical purpose of the utility model is realized through the following technical solutions:

[0005] An abrasive liquid supply equipment cabinet includes a cabinet body. A baffle is arranged in the cabinet body, and the baffle divides the inside of the cabinet body into a stock solution chamber, a mixing chamber, and an electric control chamber respectively used for accommodating a stock solution barrel, a mixing system, and an electric control module. A first cabinet door, a second cabinet door, and a third cabinet door are respectively arranged corresponding to the stock solution chamber, the mixing chamber, and the electric control chamber. At least one of the first cabinet door and the second cabinet door adopts a translational cabinet door; the stock solution chamber and the electric control chamber are located on the same side of the cabinet body, and the mixing chamber is located on the other side of the cabinet body.

[0006] Furthermore, the cabinet body is provided with a door opening corresponding to the translational cabinet door. The translational cabinet door includes rails arranged in the cabinet body and distributed up and down along the door opening, and a door panel installed between the rails distributed up and down. The rails have two parallel guide grooves, and a door panel is respectively installed in each guide groove. The upper and lower ends of the door panel are respectively inserted into the guide grooves of the rails.

[0007] Further, the door panel includes a middle section and sliding ends disposed at the upper and lower ends of the middle section. The thickness of the middle section is greater than the width of the guiding groove, and the sliding ends are fitted and inserted into the guiding groove.

[0008] Further, a polytetrafluoroethylene gasket is disposed in the guiding groove of the track at the lower position of the door opening and / or at the sliding end of the lower end of the middle section.

[0009] Further, a plurality of rollers are disposed at the sliding end of the lower end of the middle section, and the rollers roll along the guiding groove of the track at the lower part of the door opening.

[0010] Further, limiting plates are respectively disposed on the left and right sides of the cabinet body close to the door opening, and the limiting plates are disposed between the tracks distributed up and down.

[0011] Further, transparent observation windows are respectively disposed on the first cabinet door, the second cabinet door, and the third cabinet door.

[0012] Further, traveling wheels for moving the cabinet body and telescopic feet for supporting the cabinet body are further disposed at the bottom of the cabinet body.

[0013] Further, an exhaust valve box is further disposed in the mixing chamber. The exhaust valve box is provided with an exhaust pipe, and the exhaust pipe extends outward to the outside of the cabinet body and forms an exhaust interface at the top end of the cabinet body.

[0014] Compared with the prior art, the grinding fluid supply equipment cabinet of the present utility model replaces the cabinet door that is opened by outward flipping with a translation type cabinet door. On the one hand, the requirement for the external space of the cabinet body when the cabinet door is opened is reduced. On the other hand, with the translation type cabinet door, it is also possible to avoid the difficulty in opening when there is negative pressure in the cabinet body when the cabinet door is opened. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a schematic side view of the cabinet body provided with a stock solution chamber and an electric control chamber in the present utility model.

[0016] Figure 2 is a schematic side view of the cabinet body provided with a mixing system in the present utility model.

[0017] Figure 3 is a schematic structural view of the exhaust valve box in the present utility model.

[0018] Figure 4 is a schematic structural view at the position of the translation type cabinet door on the inner side of the cabinet body in the present utility model.

[0019] Figure 5 is a partial sectional view of the translation type cabinet door in the present utility model.

[0020] Figure 6 is an enlarged schematic view of the track at the lower position in the present utility model.

[0021] Figure 7It is a schematic diagram of the roller setting at the sliding end in the present utility model.

[0022] In the figure:

[0023] 1. Cabinet body; 2. First cabinet door; 3. Second cabinet door; 4. Third cabinet door; 5. Transparent observation window; 6. Traveling wheel; 7. Supporting leg during expansion and contraction; 8. Exhaust valve box; 9. Exhaust pipe; 10. Exhaust interface; 11. Wheel disc; 12. Track; 13. Door panel; 14. Guide groove; 15. Middle section; 16. Sliding end; 17. Polytetrafluoroethylene gasket; 18. Roller; 19. Limit plate. Specific embodiments

[0024] The technical solutions of the present utility model will be further described below in conjunction with specific embodiments:

[0025] A grinding fluid supply equipment cabinet, as Figure 1 and Figure 2 shown, includes a cabinet body. A baffle is arranged in the cabinet body, and the baffle divides the inside of the cabinet body 1 into a stock solution chamber, a mixing chamber, and an electric control chamber for accommodating the stock solution barrel, the mixing system, and the electric control module respectively. The first cabinet door 2, the second cabinet door 3, and the third cabinet door 4 are respectively arranged corresponding to the stock solution chamber, the mixing chamber, and the electric control chamber. At least one of the first cabinet door 2 and the second cabinet door 3 is a translational cabinet door; the stock solution chamber and the electric control chamber are located on the same side of the cabinet body 1, and the mixing chamber is located on the other side of the cabinet body 1.

[0026] The cabinet body is made of a steel frame and a PP board. The PP board is fixed outside the steel frame, and the corner positions of the PP board are connected by hot air gun welding; the first cabinet door 2, the second cabinet door 3, and the third cabinet door 4 are also made of PP board. Transparent observation windows 5 are respectively arranged on the first cabinet door 2, the second cabinet door 3, and the third cabinet door 4. The transparent observation windows 5 are made of transparent PVC boards bonded to the PP board to facilitate observing the situation inside the cabinet.

[0027] The bottom of the cabinet body 1 is also provided with traveling wheels 6 for moving the cabinet body and telescopic supporting legs 7 for supporting the cabinet body. The telescopic supporting legs 7 are adjusted for expansion and contraction by means of thread fitting. When the cabinet body needs to be moved, the telescopic supporting legs 7 are retracted to disengage from the ground support, and the cabinet body is pushed to move through the traveling wheels 6; after the movement is completed, the telescopic supporting legs 7 are extended to abut against the ground to complete the support and position fixation of the cabinet body 1.

[0028] Preferably, an exhaust valve box 8 is also arranged in the mixing chamber, as Figure 3As shown, an exhaust pipe 9 is provided in the exhaust valve box 8. The exhaust pipe extends outward to the outside of the cabinet body and forms an exhaust interface 10 at the top of the cabinet body. The exhaust valve box 8 is welded into a box body with a PP board. An exhaust hole is provided on the box body, and a rotatable disk 11 is installed at the exhaust hole. A number of openings are provided on the disk 11. When the openings on the disk 11 are aligned with the exhaust hole, the exhaust valve box is in gas communication with the cabinet body. When the openings on the disk rotate to be misaligned with the exhaust hole, the exhaust valve box is disconnected from the gas inside the cabinet body. The ventilation size is controlled by the corresponding area size of the openings and the exhaust hole. The exhaust and ventilation effects inside the cabinet body are achieved through the exhaust valve box 8.

[0029] Specifically, a door opening is provided on the cabinet body corresponding to the translational door. As Figure 4 and Figure 5 shown, the translational door includes tracks 12 provided inside the cabinet body and distributed up and down along the door opening, and a door panel 13 installed between the tracks 12 distributed up and down. The tracks 12 have two parallel guiding grooves 14, and a door panel 13 is respectively installed in each of the guiding grooves 14. The upper and lower ends of the door panel 13 are respectively inserted into the guiding grooves 14 of the tracks. The tracks 12 can also be made of PP board, and the tracks are welded to the inner side of the cabinet body by a hot air gun. The guiding grooves 14 are formed by engraving processes such as a milling cutter.

[0030] More specifically, the door panel 13 includes a middle section 15 and sliding ends 16 provided at the upper and lower ends of the middle section 15. The thickness of the middle section 15 is greater than the width of the guiding groove 14. For example, the thickness of the middle section is 7 mm, and the thickness of the sliding end is 4 mm. The sliding ends 16 are fitted and inserted into the guiding grooves 14. The middle sections of adjacent two door panels are arranged in contact with each other to reduce the gap between the door panels.

[0031] As a preference, a polytetrafluoroethylene gasket 17 is provided in the guiding groove 14 of the track at the lower position of the door opening and / or at the sliding end 16 at the lower end of the middle section. As Figure 6 shown, Figure 6 only a polytetrafluoroethylene gasket 17 is provided in the guiding groove 14 in , which facilitates the sliding of the door panel, reduces friction, and increases wear resistance.

[0032] In another embodiment, as Figure 7 shown, a number of rollers 18 are provided at the sliding end 16 at the lower end of the middle section 15. The rollers 18 freely roll along the guiding groove of the track at the lower part of the door opening. When rollers are provided, the thicknesses of the sliding end and the middle section need to be appropriately increased. For example, the thickness of the middle section is 10 mm, and the thickness of the sliding end is 6 mm. The rollers can be cylindrical rollers or spherical balls.

[0033] As a preference, as Figure 4As shown in the figure, limiting plates 19 are respectively arranged on the left and right sides near the door opening inside the cabinet body. The limiting plates 19 are arranged between the tracks 12 distributed vertically. By arranging the limiting plates, it can provide a limit for the movement of the door panel towards the end of the track 12. On the other hand, since the door panels are arranged in a staggered manner front and back, there is a large gap between the door panel near the inner side and the cabinet body. The arrangement of the limiting plates 19 can play a role in sealing the gap.

[0034] This embodiment is only a further explanation of the present invention, rather than a limitation to the present invention. After reading this specification, those skilled in the art can make non-creative modifications to this embodiment as needed, but as long as it is within the scope of the claims of the present invention, it is protected by the patent law.

Claims

1. A grinding liquid supply equipment cabinet, characterized in that: The cabinet comprises a baffle plate, wherein the baffle plate is arranged in the cabinet, and the cabinet is divided into a raw liquid chamber, a mixing chamber and an electric control chamber for accommodating a raw liquid barrel, a mixing system and an electric control module respectively. A first cabinet door, a second cabinet door and a third cabinet door are arranged corresponding to the raw liquid chamber, the mixing chamber and the electric control chamber respectively, and at least one of the first cabinet door and the second cabinet door is a sliding cabinet door; the raw liquid chamber and the electric control chamber are located on the same side of the cabinet, and the mixing chamber is located on the other side of the cabinet.

2. A grinding liquid supply equipment cabinet according to claim 1, characterized in that: The cabinet body is provided with a door opening corresponding to the sliding cabinet door. The sliding cabinet door comprises a track arranged in the cabinet body and distributed along the upper and lower positions of the door opening, and a door panel installed between the upper and lower tracks. The track has two parallel guide grooves, and a door panel is installed in each of the guide grooves. The upper and lower ends of the door panel are respectively inserted into the guide grooves of the track.

3. A grinding liquid supply equipment cabinet according to claim 2, characterized in that: The door panel comprises a middle section and sliding ends arranged at the upper and lower ends of the middle section, the thickness of the middle section is greater than the width of the guide groove, and the sliding ends are inserted into the guide groove in a coordinated manner.

4. A grinding liquid supply equipment cabinet according to claim 3, characterized in that: A polytetrafluoroethylene gasket is arranged in the guide groove of the track below the door opening and / or at the sliding end of the lower end of the middle section.

5. The grinding liquid supply equipment cabinet according to claim 3, characterized in that: A plurality of rollers are arranged at the sliding end of the lower end of the middle section, and the rollers roll along the guide grooves of the track below the door opening.

6. The grinding liquid supply equipment cabinet according to claim 3, characterized in that: Limiting plates are respectively arranged on the left and right sides of the cabinet body near the door opening, and the limiting plates are arranged between the tracks distributed up and down.

7. The grinding liquid supply equipment cabinet according to claim 1, characterized in that: The first cabinet door, the second cabinet door and the third cabinet door are respectively provided with transparent observation windows.

8. The grinding liquid supply equipment cabinet according to claim 1, characterized in that: The bottom of the cabinet is also provided with running wheels for moving the cabinet and telescopic feet for supporting the cabinet.

9. The grinding liquid supply equipment cabinet according to claim 1, characterized in that: An exhaust valve box is also provided in the mixing chamber, and an exhaust pipe is provided in the exhaust valve box. The exhaust pipe extends outward to the outside of the cabinet and forms an exhaust interface at the top of the cabinet.

Images