Processing device and coating equipment

Abstract

The utility model discloses a processing device and coating equipment, and relates to but is not limited to the technical field of processing. The machining device comprises a shell and a first blocking piece. A cavity and an air inlet through hole are formed in the shell, a machining area is arranged in the cavity, the air inlet through hole is formed in the cavity wall of the cavity, and an air outlet of the air inlet through hole faces the machining area. The first blocking piece is arranged in the cavity and opposite to the air outlet, a gap exists between the first blocking piece and the cavity wall where the air outlet is located, and the gap communicates with the machining area. According to the machining device provided by the embodiment of the invention, the air inflation efficiency can be improved while the impact force of airflow on the machining area can be reduced.

Description

Technical Field

[0001] The present application relates to, but is not limited to, the field of processing technologies, and particularly relates to a processing device and a coating device. Background Art

[0002] The vacuum-breaking operation is to fill the vacuum chamber with gas to restore the atmospheric pressure in the vacuum chamber. In related technologies, improving the gas filling effect will impact the workpieces in the vacuum chamber and affect the processing quality. Summary of the Utility Model

[0003] The processing device provided by the embodiments of the present application can reduce the impact force of the airflow on the processing area while improving the gas filling efficiency.

[0004] In a first aspect, the embodiments of the present application provide a processing device, including a housing and a first blocking member. The housing forms a chamber and an air inlet through-hole. A processing area is provided in the chamber. The air inlet through-hole is opened on the chamber wall of the chamber, and the air outlet of the air inlet through-hole faces the processing area. The first blocking member is disposed in the chamber and is opposite to the air outlet. There is a gap between the first blocking member and the chamber wall where the air outlet is located, and the gap communicates with the processing area.

[0005] For the processing device provided by the embodiments of the present application, the air inlet through-hole is used to convey airflow into the chamber. When the gas flows into the air inlet through-hole, due to the setting of the first blocking member, the airflow will not directly impact the processing area. Since there is a gap between the first blocking member and the chamber wall, the airflow flows towards the edge of the first blocking member and diffuses into the chamber from the gap between the first blocking member and the chamber wall where the air outlet is located. During this process, due to the blocking effect of the first blocking member, the airflow flowing out of the air outlet will not directly spray on the processing area in the chamber. Therefore, the impact force of the airflow on the processing area can be reduced, and the influence of the gas filling efficiency on the processing area is relatively small. Compared with the scheme in related technologies where the airflow impacts the processing area through the ventilation holes of the air distribution structure, in the embodiments of the present application, the air inlet through-hole and the first blocking member can make the airflow diffuse into the chamber from the gap between the first blocking member and the chamber wall where the air outlet is located, so that the airflow flowing out of the air outlet will not directly spray on the processing area in the chamber, thereby reducing the impact force of the airflow on the processing area while improving the gas filling efficiency.

[0006] Another embodiment of the present application provides a processing device. The air inlet through-hole includes a guiding surface that extends towards the edge of the first blocking member and is connected to the chamber wall where the air outlet is provided to guide the airflow to flow along the gap.

[0007] For the processing device provided by the embodiments of the present application, by setting the guiding surface that extends towards the edge of the first blocking member, the airflow in the air inlet through-hole can be guided towards the edge of the first blocking member, that is, the airflow is guided into the gap.

[0008] Another embodiment of the present application provides a processing device, in which the guiding surface is arranged around the central axis of the air intake through hole. Or, the air intake through hole includes at least two guiding surfaces, and the at least two guiding surfaces are arranged at an included angle.

[0009] In the processing device provided by the embodiment of the present application, different setting manners of the guiding surface can make the air intake through hole in different shapes, so as to facilitate the design of the shape of the air intake through hole according to actual requirements, thereby improving the design flexibility of the air intake through hole.

[0010] Another embodiment of the present application provides a processing device, in which the housing includes a housing body and a filling part, the filling part protrudes towards the processing area relative to the inner wall of the housing body, and the air intake through hole penetrates through the housing body and the filling part in sequence. Wherein, the filling part is integrally formed with the housing body; or, the filling part is detachably connected to the housing body.

[0011] In the processing device provided by the embodiment of the present application, the setting of the filling part can strengthen the housing body, and can also reduce the volume inside the housing body to reduce the inflation time of the chamber, thereby improving the inflation efficiency. Moreover, when the filling part is integrally formed with the housing body, it is convenient for the processing and manufacturing of the housing; when the filling part is detachably connected to the housing body, it is convenient to change the volume inside the housing body by installing or disassembling the filling part.

[0012] Another embodiment of the present application provides a processing device, in which the guiding surface is located in the filling part; or, the guiding surface extends to the filling part.

[0013] In the processing device provided by the embodiment of the present application, since the guiding surface extends towards the edge of the first blocking part, that is, the guiding surface extends obliquely, the part of the air intake through hole provided with the guiding surface is a variable-diameter hole section. The guiding surface is located in the filling part, or the guiding surface extends to the filling part, so that the part of the air intake through hole located on the filling part is a variable-diameter hole section. When the filling part is detachably connected to the housing body, the guiding surface can be processed on the filling part first, and then the filling part can be connected to the housing body, thereby facilitating the processing and manufacturing of the guiding surface.

[0014] Another embodiment of the present application provides a processing device, in which the first blocking part is provided with at least one first ventilation hole, and the first ventilation hole communicates the air intake through hole with the processing area. Wherein, the sum of the radial cross-sectional areas of the at least one first ventilation hole is a first area, the surface area of the first blocking part facing the air intake through hole is a second area, and the ratio of the first area to the second area is less than 1 / 3.

[0015] In the processing device provided by the embodiment of the present application, the arrangement of the first ventilation holes enables part of the airflow flowing to the first blocking member to diffuse into the chamber through the first ventilation holes, so as to accelerate the diffusion speed of the airflow in the chamber, and further improve the inflation efficiency. Moreover, since the first ventilation holes communicate the intake through-holes with the processing area, the ratio of the first area to the second area is less than 1 / 3, so that the airflow flowing to the processing area through the first ventilation holes will not cause a large impact on the processing area.

[0016] Another embodiment of the present application provides a processing device, and the projection of the intake through-hole along its axial direction is located at the central position corresponding to the first blocking member.

[0017] In the processing device provided by the embodiment of the present application, the projection of the intake through-hole along its axial direction is located at the central position corresponding to the first blocking member, so that the first blocking member can better block the airflow flowing out of the air outlet of the intake through-hole, so as to better reduce the impact force of the airflow on the processing area.

[0018] Another embodiment of the present application provides a processing device, at least two intake through-holes are provided on the chamber wall, and each intake through-hole is correspondingly provided with a first blocking member.

[0019] In the processing device provided by the embodiment of the present application, the arrangement of at least two intake through-holes can accelerate the inflation speed of the intake through-holes to inflate the chamber, and further improve the inflation efficiency. Each intake through-hole is correspondingly provided with a first blocking member, so that the first blocking member cooperates with the guiding surface of the intake through-hole to reduce the impact force of the airflow flowing out of the air outlet on the processing area.

[0020] Another embodiment of the present application provides a processing device, corresponding to the same chamber wall, a second blocking member is provided on the side of the first blocking member facing another first blocking member, and the second blocking member is used to block at least part of the gap on the corresponding side.

[0021] In the processing device provided by the embodiment of the present application, the arrangement of the second blocking member can block at least part of the gaps at the opposite sides of different first blocking members on the same chamber wall of the housing, so as to reduce the airflow counter-flush between the gaps at the opposite sides of different first blocking members, and further reduce the impact caused by the airflow counter-flush on the processing area.

[0022] Another embodiment of the present application provides a processing device, the second blocking member is provided with at least one second ventilation hole, and the sum of the radial cross-sectional areas of the at least one second ventilation hole is the third area, and the surface area of the second blocking member corresponding to the gap is the fourth area, and the ratio of the third area to the fourth area is less than 1 / 2.

[0023] In the processing device provided by the embodiment of the present application, the setting of the second ventilation hole enables part of the air flow flowing to the second blocking member to diffuse into the chamber through the second ventilation hole, so as to accelerate the diffusion speed of the air flow in the chamber, and further improve the inflation efficiency. Moreover, since the second ventilation hole communicates with at least part of the gaps at the opposite side edges of different first blocking members on the same chamber wall of the housing, the ratio of the third area to the fourth area is less than 1 / 2, so that there will be no large air flow impact on the air flow at the second ventilation hole on the second blocking member, thereby reducing the impact on the processing area caused by the air flow impact.

[0024] Another embodiment of the present application provides a processing device, which further includes a pipeline assembly and a connection assembly. The pipeline assembly includes at least two ventilation pipes, and the connection assembly connects adjacent two ventilation pipes, and / or the connection assembly connects the ventilation pipes to the positions corresponding to the air inlet through holes of the housing. The connection assembly includes a first connecting member and a second connecting member. The first connecting member and the second connecting member are respectively connected to the corresponding ventilation pipes or the housing, and the area of the assembly region of the first connecting member is different from the area of the assembly region of the second connecting member, so that one of the first connecting member and the second connecting member can adjust its position radially along the corresponding ventilation pipe relative to the other.

[0025] In the processing device provided by the embodiment of the present application, when there is an installation error between two ventilation pipes, and / or there is an installation error between the ventilation pipe and the air inlet through hole of the housing, due to the different areas of the assembly regions of the first connecting member and the second connecting member, the relative positions of the assembly regions of the first connecting member and the second connecting member can be adjusted radially along the corresponding ventilation pipe to compensate for the error, thereby improving the installation convenience.

[0026] In a second aspect, the embodiment of the present application provides a coating device, which includes a coating device and the processing device according to any one of the first aspect, and the coating device is arranged in the chamber of the processing device.

[0027] The coating device provided by the embodiment of the present application includes the processing device provided by the first aspect of the present application, and thus can achieve the same effect, that is, the guiding surface of the air inlet through hole cooperates with the first blocking member to enable the air flow to diffuse into the chamber from the gap between the first blocking member and the chamber wall where the air outlet is located, so that the air flow flowing out from the air outlet will not directly spray on the processing area in the chamber, while reducing the impact force of the air flow on the processing area and improving the inflation efficiency. Description of the Drawings

[0028] Figure 1 is a cross-sectional view in the thickness direction of the processing device provided by the embodiment of the present application;

[0029] Figure 2 is a cross-sectional view in the length direction of the processing device provided by the embodiment of the present application;

[0030] Figure 3 Schematic diagram of the internal structure of the upper housing of the processing device provided by the embodiment of the present application;

[0031] Figure 4 Schematic diagram of the first blocking member and the second blocking member of the processing device provided by the embodiment of the present application;

[0032] Figure 5 Axonometric view of the processing device provided by the embodiment of the present application from a top view angle;

[0033] Figure 6 Axonometric view of the processing device provided by the embodiment of the present application from a bottom view angle;

[0034] Figure 7 Top view of the processing device provided by the embodiment of the present application;

[0035] Figure 8 Front view of the connection assembly on the processing device provided by the embodiment of the present application;

[0036] Figure 9 Cross-sectional view of the connection assembly on the processing device provided by the embodiment of the present application.

[0037] Reference numerals:

[0038] 1 - housing; 11 - chamber; 111 - processing area; 12 - intake through-hole; 121 - outlet; 122 - guiding surface; 123 - intake port; 13 - housing body; 14 - filling part; 15 - intake nozzle; 2 - first blocking member; 21 - first ventilation hole; 3 - gap; 4 - second blocking member; 41 - second ventilation hole; 5 - pipe assembly; 51 - ventilation pipe; 52 - switch member; 6 - connection assembly; 61 - first connecting member; 62 - second connecting member. Detailed implementation manners

[0039] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will further describe the specific technical solutions of the present application in detail with reference to the accompanying drawings in the embodiments of the present application. The following embodiments are used to illustrate the present application but are not used to limit the scope of the present application.

[0040] In the embodiments of the present application, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present application, unless otherwise stated, the meaning of "a plurality" is two or more.

[0041] In addition, in the embodiments of the present application, orientation terms such as "upper", "lower", "left", and "right" are defined relative to the orientation in which the components in the drawings are schematically placed. It should be understood that these directional terms are relative concepts, which are used for relative description and clarification, and they can change accordingly with the change of the orientation in which the components in the drawings are placed.

[0042] In the embodiments of the present application, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral body; it can be directly connected or indirectly connected through an intermediate medium.

[0043] In the embodiments of the present application, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, the element defined by the statement "including one..." does not exclude the existence of additional identical elements in the process, method, article or device including the element.

[0044] In the embodiments of the present application, words such as "exemplary" or "for example" are used to represent examples, illustrations or explanations. Any embodiment or design solution described as "exemplary" or "for example" in the embodiments of the present application should not be construed as being more preferred or having more advantages than other embodiments or design solutions. Rather, the use of words such as "exemplary" or "for example" is intended to present relevant concepts in a specific manner.

[0045] During the coating production process of solar cells, the process of the cells entering and leaving the coating equipment requires vacuum pumping and vacuum breaking operations on the vacuum chamber of the coating equipment. Among them, the vacuum breaking operation is to fill the vacuum chamber with gas to restore the atmospheric pressure in the vacuum chamber.

[0046] In the related art, a gas is filled into the vacuum chamber through an inflation valve to achieve the vacuum breaking operation. A gas distribution structure is provided in the vacuum chamber. The gas distribution structure is provided with a plurality of ventilation holes, and the ventilation holes face the processing area for accommodating the workpiece. At a relatively high inflation rate, after the gas is filled into the processing area through the ventilation holes, a large impact force will be generated in the vacuum chamber, which is likely to blow up the dust in the vacuum chamber and is also likely to blow off or blow up the cells (workpieces) placed on the coating carrier plate, thereby affecting the coating quality.

[0047] In view of this, with reference to Figure 1 、 Figure 2 and Figure 3, an embodiment of the present application provides a processing device, including a housing 1 and a first blocking member 2. The housing 1 forms a chamber 11 and an air inlet through hole 12. A processing area 111 is provided in the chamber 11. The air inlet through hole 12 is opened on the wall of the chamber 11, and the air outlet 121 of the air inlet through hole 12 faces the processing area 111. The first blocking member 2 is disposed in the chamber 11 and is disposed opposite to the air outlet 121. There is a gap 3 between the first blocking member 2 and the wall where the air outlet 121 is located, and the gap 3 communicates with the processing area 111.

[0048] In the embodiment of the present application, the first blocking member 2 can be fixedly connected to the housing 1 by means of snap connection, screw connection, etc. The cross-sectional shape of the first blocking member 2 along the radial direction of the air inlet through hole 12 can be set as a rectangle, a circle, etc., which can be specifically set according to actual needs.

[0049] In the embodiment of the present application, the first blocking member 2 and the wall where the air outlet 121 is located can be arranged in parallel at intervals or arranged obliquely at intervals. Moreover, the projected area of the first blocking member 2 along the axial direction of the air inlet through hole 12 needs to be larger than the radial cross-sectional area of the air outlet 121 to block the airflow flowing out from the air outlet 121.

[0050] In the processing device provided by the embodiment of the present application, the air inlet through hole 12 is used to convey airflow into the chamber 11. When the gas flows into the air inlet through hole 12, due to the setting of the first blocking member 2, the airflow will not directly impact the processing area 111, and there is a gap 3 between the first blocking member 2 and the chamber wall. The airflow flows towards the edge of the first blocking member 2 and diffuses into the chamber 11 from the gap 3 between the first blocking member 2 and the wall where the air outlet 121 is located. During this process, due to the blocking effect of the first blocking member 2, the airflow flowing out from the air outlet 121 will not directly spray at the processing area 111 in the chamber 11. Therefore, the impact force of the airflow on the processing area 111 can be reduced, and the influence of the inflation efficiency on the processing area 111 is relatively small. Compared with the solution in the related art where the airflow impacts the processing area through the ventilation holes of the air distribution structure, in the embodiment of the present application, the air inlet through hole 12 cooperates with the first blocking member 2 to enable the airflow to diffuse into the chamber 11 from the gap 3 between the first blocking member 2 and the wall where the air outlet 121 is located, so that the airflow flowing out from the air outlet 121 will not directly spray at the processing area 111 in the chamber 11, thereby reducing the impact force of the airflow on the processing area 111 while improving the inflation efficiency.

[0051] Refer to Figure 1 , Figure 2 and Figure 3 , the air inlet through hole 12 includes a guiding surface 122. The guiding surface 122 extends towards the edge of the first blocking member 2 and is connected to the wall where the air outlet 121 is provided to guide the airflow to flow along the gap 3.

[0052] In the embodiment of the present application, the guiding surface 122 extends towards the edge of the first blocking member 2, that is, the guiding surface 122 extends in a direction away from the central axis of the air intake through hole 12, so that the radial cross-sectional area of the air inlet 123 of the air intake through hole 12 is smaller than the radial cross-sectional area of the air outlet 121.

[0053] In the embodiment of the present application, the entire side wall surface of the air intake through hole 12 can be set as the guiding surface 122, so that the air intake through hole 12 is a variable-diameter through hole, that is, the radial dimension of the air intake through hole 12 gradually increases from its air inlet 123 to the air outlet 121; alternatively, a partial side wall surface in the axial direction of the air intake through hole 12 can be set as the guiding surface 122, so that the air intake through hole 12 can include an equal-diameter pipe section and a variable-diameter pipe section. For example, if the side wall surface between the middle position in the axial direction of the air intake through hole 12 and the air outlet 121 is the guiding surface 122, then the pipe section between the air inlet 123 of the air intake through hole 12 and the middle position in the axial direction can be an equal-diameter pipe section, and the pipe section between the middle position in the axial direction of the air intake through hole 12 and the air outlet 121 is a variable-diameter pipe section.

[0054] In the processing device provided by the embodiment of the present application, by setting the guiding surface 122, the guiding surface 122 extends towards the edge of the first blocking member 2, so that the air flow in the air intake through hole 12 can be guided to the edge of the first blocking member 2, that is, guide the air flow into the gap 3.

[0055] Refer to Figure 1 , in some possible embodiments of the present application, the guiding surface 122 is arranged around the central axis of the air intake through hole 12. Or, the air intake through hole 12 includes at least two guiding surfaces 122, and the at least two guiding surfaces 122 are arranged at an included angle.

[0056] In the embodiment of the present application, when the guiding surface 122 is arranged around the central axis of the air intake through hole 12, the guiding surface 122 is a curved surface. At this time, at least a part of the pipe section of the air intake through hole 12 provided with the guiding surface 122 can be in a frustum shape.

[0057] In the embodiment of the present application, when the air intake through hole 12 includes at least two guiding surfaces 122 and the at least two guiding surfaces 122 are arranged at an included angle, the number of guiding surfaces 122 included in the air intake through hole 12 can be set to two, three, four, etc., which can be specifically set according to actual needs. At this time, at least a part of the pipe section of the air intake through hole 12 provided with the guiding surface 122 can be in a prism shape.

[0058] In the processing device provided by the embodiment of the present application, different setting methods of the guiding surface 122 can make the air intake through hole 12 in different shapes, so as to facilitate the design of the shape of the air intake through hole 12 according to actual needs, and further improve the design flexibility of the air intake through hole 12.

[0059] Refer to Figure 1 , Figure 2 andFigure 3 In some possible embodiments of the present application, the housing 1 includes a housing body 13 and a filling portion 14. The filling portion 14 protrudes toward the processing area 111 relative to the inner wall of the housing body 13, and the air intake through hole 12 sequentially penetrates through the housing body 13 and the filling portion 14. Among them, the filling portion 14 and the housing body 13 are integrally formed; or, the filling portion 14 is detachably connected to the housing body 13.

[0060] In the embodiments of the present application, one filling portion 14 can be provided on the same cavity wall of the housing body 13, or multiple filling portions 14 can be provided. Refer to Figure 1 and Figure 2 , in one example, four air intake through holes 12 and four filling portions 14 are provided on the same cavity wall of the housing body 13, and the filling portions 14 are correspondingly provided at the positions where the air intake through holes 12 are provided on the housing body 13.

[0061] In the embodiments of the present application, when the filling portion 14 is detachably connected to the housing body 13, the filling portion 14 and the housing body 13 can be connected by means such as snap connection or screw connection.

[0062] For the processing device provided in the embodiments of the present application, the setting of the filling portion 14 can strengthen the housing body 13 and also reduce the volume inside the housing body 13 to reduce the inflation time of the chamber 11, thereby improving the inflation efficiency. Moreover, when the filling portion 14 and the housing body 13 are integrally formed, it is convenient for the processing and manufacturing of the housing 1; when the filling portion 14 is detachably connected to the housing body 13, it is convenient to change the volume inside the housing body 13 by installing or removing the filling portion 14.

[0063] Refer to Figure 1 , in some possible embodiments of the present application, the guiding surface 122 is located in the filling portion 14; or, the guiding surface 122 extends to the filling portion 14.

[0064] In the embodiments of the present application, the part of the air intake through hole 12 located on the housing body 13 is the first pipe section, and the part of the air intake through hole 12 located on the filling portion 14 is the second pipe section. When the guiding surface 122 is located on the filling portion 14, the guiding surface 122 is the side wall surface of the second pipe section, so that the second pipe section is a variable diameter pipe section; when the guiding surface 122 extends to the filling portion 14, the guiding surface 122 includes at least part of the side wall surface of the first pipe section and the side wall surface of the second pipe section, so that at least part of the first pipe section close to the second pipe section and the second pipe section are both variable diameter pipe sections.

[0065] In the processing device provided by the embodiment of the present application, since the guiding surface 122 extends towards the edge of the first blocking member 2, that is, the guiding surface 122 extends obliquely, the part of the air intake through-hole 12 provided with the guiding surface 122 is a variable-diameter hole section. The guiding surface 122 is located in the filling portion 14, or the guiding surface 122 extends to the filling portion 14, so that the part of the air intake through-hole 12 located on the filling portion 14 is a variable-diameter hole section. When the filling portion 14 is detachably connected to the housing body 13, the guiding surface 122 can be processed on the filling portion 14 first, and then the filling portion 14 can be connected to the housing body 13, thereby facilitating the processing and manufacturing of the guiding surface 122.

[0066] Referring to Figure 1 , in some possible embodiments of the present application, the first blocking member 2 is provided with at least one first ventilation hole 21, and the first ventilation hole 21 communicates the air intake through-hole 12 with the processing area 111. Wherein, the sum of the radial cross-sectional areas of at least one first ventilation hole 21 is the first area, and the surface area of the first blocking member 2 facing the air intake through-hole 12 is the second area, and the ratio of the first area to the second area is less than 1 / 3.

[0067] In the embodiment of the present application, the number of the first ventilation holes 21 provided in the first blocking member 2 can be one or multiple, such as eight, sixteen, etc. And when the number of the first ventilation holes 21 is multiple, the multiple first ventilation holes 21 are uniformly arranged on the first blocking member 2, so that part of the air flow flowing to the first blocking member 2 can be uniformly diffused into the chamber 11 through the first ventilation holes 21.

[0068] In the processing device provided by the embodiment of the present application, the arrangement of the first ventilation holes 21 enables part of the air flow flowing to the first blocking member 2 to be diffused into the chamber 11 through the first ventilation holes 21, so as to accelerate the diffusion speed of the air flow in the chamber 11, and further accelerate the inflation efficiency. And, since the first ventilation hole 21 communicates the air intake through-hole 12 with the processing area 111, the ratio of the first area to the second area is less than 1 / 3, so that the air flow flowing to the processing area 111 through the first ventilation hole 21 will not cause a large impact on the processing area 111.

[0069] Referring to Figure 1 , in some possible embodiments of the present application, the projection of the air intake through-hole 12 along its axial direction is located at the central position of the corresponding first blocking member 2.

[0070] In the processing device provided by the embodiment of the present application, the projection of the air intake through-hole 12 along its axial direction is located at the central position of the corresponding first blocking member 2, so that the first blocking member 2 can better block the air flow flowing out of the air outlet 121 of the air intake through-hole 12, so as to better reduce the impact force of the air flow on the processing area 111.

[0071] Referring to Figure 1 and Figure 2, in some possible embodiments of the present application, at least two air inlet through holes 12 are formed in the cavity wall, and a first blocking member 2 is correspondingly arranged for each air inlet through hole 12.

[0072] In the embodiments of the present application, the at least two air inlet through holes 12 can be respectively arranged on different cavity walls of the housing 1, or can be all arranged on the same cavity wall of the housing 1. Refer to Figure 1 and Figure 2 , in an example, four air inlet through holes 12 are respectively arranged on the opposite top and bottom cavity walls of the housing 1, the four air inlet through holes 12 on the same cavity wall are arranged at intervals, and a first blocking member 2 is connected to the position corresponding to each air inlet through hole 12 on both the top and bottom cavity walls.

[0073] For the processing device provided by the embodiments of the present application, the arrangement of the at least two air inlet through holes 12 can accelerate the inflation speed of the air inlet through holes 12 for inflating the cavity 11, and thus accelerate the inflation efficiency. A first blocking member 2 is correspondingly arranged for each air inlet through hole 12, so that the first blocking member 2 and the guiding surface 122 of the air inlet through hole 12 can reduce the impact force of the airflow flowing out from the air outlet 121 on the processing area 111.

[0074] Refer to Figure 3 and Figure 4 , in some possible embodiments of the present application, corresponding to the same cavity wall, a second blocking member 4 is arranged on the side of the first blocking member 2 facing another first blocking member 2, and the second blocking member 4 is used to block at least part of the gap 3 on the corresponding side.

[0075] In the embodiments of the present application, the first blocking member 2 can be arranged in a circular structure, a rectangular structure, etc., and the second blocking member 4 is arranged in a structure adapted to the shape of the first blocking member 2. Refer to Figure 3 and Figure 4 , in an example, the first blocking member 2 is arranged in a circular plate-like structure. Four air inlet through holes 12 are arranged on the same cavity wall of the housing 1, and the four air inlet through holes 12 are arranged in a rectangular shape on the same cavity wall, that is, the four air inlet through holes 12 are respectively located at the four corners of a rectangle on the same cavity wall. Therefore, the number of the first blocking members 2 correspondingly arranged at each air inlet through hole 12 is four, and the four first blocking members 2 are also arranged in a rectangular shape. At this time, there is a relatively arranged area between any two of the four first blocking members 2. Therefore, a second blocking member 4 is arranged on the side of each first blocking member 2 opposite to the other three first blocking members 2, so that the second blocking member 4 is an arc-shaped baffle.

[0076] In the embodiment of the present application, in the direction of the first blocking member 2 toward the air outlet 121, the size of the second blocking member 4 can be less than or equal to the size of the gap 3 between the side of the first blocking member 2 toward the other first blocking member 2 and the cavity wall where the air outlet 121 is located, so that the second blocking member 4 partially covers or completely covers the gap 3 between the side of the first blocking member 2 toward the other first blocking member 2 and the cavity wall where the air outlet 121 is located.

[0077] In the embodiment of the present application, the first blocking member 2 and the second blocking member 4 can be integrally formed, or can be fixedly connected by bonding, welding, screwing, snapping, etc., which can be specifically set according to actual needs.

[0078] In the processing device provided in the embodiment of the present application, the second blocking member 4 is arranged to block at least part of the gap 3 at the opposite sides of different first blocking members 2 on the same cavity wall of the shell 1, so as to reduce the airflow collision between the gaps 3 at the opposite sides of different first blocking members 2, thereby reducing the impact of the airflow collision on the processing area 111.

[0079] Reference Figure 4 In some possible embodiments of the present application, the second blocking member 4 is provided with at least one second air vent 41, and the sum of the radial cross-sectional areas of at least one second air vent 41 is a third area, the surface area of ​​the second blocking member 4 corresponding to the gap 3 is a fourth area, and the ratio of the third area to the fourth area is less than 1 / 2.

[0080] In the embodiment of the present application, the number of the second vent holes 41 provided on the second blocking member 4 may be one or more, for example, three, nine, etc. When the number of the second vent holes 41 is more than one, the plurality of second vent holes 41 are evenly arranged on the second blocking member 4, so that part of the airflow flowing to the second blocking member 4 can be evenly diffused into the chamber 11 through the second vent holes 41.

[0081] In the processing device provided in the embodiment of the present application, the second vent hole 41 is arranged so that part of the airflow flowing to the second blocking member 4 can be diffused into the chamber 11 through the second vent hole 41, so as to accelerate the diffusion speed of the airflow in the chamber 11, thereby accelerating the charging efficiency. In addition, since the second vent hole 41 is connected to at least part of the gap 3 at the opposite sides of different first blocking members 2 on the same cavity wall of the shell 1, the ratio of the third area to the fourth area is less than 1 / 2, so that the airflow at the second vent hole 41 on the second blocking member 4 will not produce a large airflow collision, thereby reducing the impact of the airflow collision on the processing area 111.

[0082] Reference Figure 5 , Figure 6 , Figure 7 and Figure 8, in some possible embodiments of the present application, the processing device further includes a pipeline assembly 5 and a connection assembly 6. The pipeline assembly 5 includes at least two ventilation pipes 51. The connection assembly 6 connects two adjacent ventilation pipes 51, and / or the connection assembly 6 connects the ventilation pipes 51 to the positions of the housing 1 corresponding to the air intake through holes 12. The connection assembly 6 includes a first connection member 61 and a second connection member 62. The first connection member 61 and the second connection member 62 are respectively connected to the corresponding ventilation pipes 51 or the housing 1, and the area of the assembly region of the first connection member 61 is different from the area of the assembly region of the second connection member 62, so that one of the first connection member 61 and the second connection member 62 can adjust its position radially relative to the other along the corresponding ventilation pipe 51.

[0083] In the embodiments of the present application, the pipeline assembly 5 is used to convey air flow into the air intake through holes 12 of the housing 1. Therefore, the arrangement mode of the ventilation pipes 51 of the pipeline assembly 5 is associated with the arrangement mode of the air intake through holes 12. And to control the on-off of the air flow in the ventilation pipes 51, the pipeline assembly 5 may include a switching member 52. Refer to Figure 3 , Figure 5 and Figure 6 , in one example, the switching member 52 is set as a valve body. Four air intake through holes 12 are respectively arranged on the opposite top side cavity wall and bottom side cavity wall of the housing 1. Therefore, ventilation pipes 51 are respectively connected to the four air intake through holes 12 corresponding to the top side cavity wall and the bottom side cavity wall. To simplify the structure of the pipeline assembly 5, so that the air flow on-off of the ventilation pipes 51 connecting the four air intake through holes 12 on the top side cavity wall and the bottom side cavity wall is controlled by one valve body. The valve body is arranged at the air intake end of the ventilation pipe 51, and the ventilation pipe 51 can be branched into two through a pipe joint and extended to the top side and the bottom side of the housing 1. The ventilation pipes 51 extended to the top side and the bottom side of the housing 1 can be respectively branched into two through a pipe joint, and then branched into four and extended to the four air intake through holes 12 corresponding to the top side cavity wall and the bottom side cavity wall, and are connected to the corresponding air intake through holes 12 to complete the arrangement of the pipeline assembly 5.

[0084] In the embodiments of the present application, the connection assembly 6 can be arranged between two adjacent ventilation pipes 51, or between the ventilation pipe 51 and the position of the housing 1 corresponding to the air intake through hole 12, or the connection assembly 6 can be arranged both between two adjacent ventilation pipes 51 and between the ventilation pipe 51 and the position of the housing 1 corresponding to the air intake through hole 12. It can be specifically set according to actual requirements.

[0085] In the embodiments of the present application, a sealing structure can be arranged between the first connection member 61 and the second connection member 62, and the sealing structure also needs to reserve assembly allowance. For example, when the sealing structure is set as a sealing ring, the sealing ring is arranged on the outer periphery of the assembly regions of the first connection member 61 and the second connection member 62, so as to maintain its sealing performance during the process of adjusting the radial position of the first connection member 61 relative to the second connection member 62.

[0086] In the embodiments of the present application, the first connecting member 61 and the second connecting member 62 can be connected by structures such as snap connection and screw connection to connect two adjacent ventilation pipes 51, or to connect the ventilation pipe 51 to the position of the housing 1 corresponding to the air inlet through hole 12. Refer to Figure 5 , Figure 8 and Figure 9 , in one example, an air inlet nozzle 15 is protrudingly provided on the outer side wall of the housing 1 in the circumferential direction of the air inlet 123 of the air inlet through hole 12 in a direction away from the housing 1, so as to facilitate the connection of the ventilation pipe 51 to the position of the housing 1 corresponding to the air inlet through hole 12. The connecting assembly 6 is arranged between the ventilation pipe 51 and the air inlet nozzle 15 of the housing 1, the first connecting member 61 is arranged on the ventilation pipe 51, and the second connecting member 62 is arranged on the air inlet nozzle 15. Moreover, the first connecting member 61 and the second connecting member 62 can be respectively arranged as flange plates, the two flange plates are respectively sleeved and fixed on the outer circumferences of the ventilation pipe 51 and the air inlet nozzle 15, and the two flange plates are respectively provided with through holes for assembly. Bolts sequentially pass through the through holes of the two flange plates and are fixedly connected with nuts to connect the ventilation pipe 51 to the air inlet nozzle 15 of the housing 1. It should be noted that the radial dimensions of the through holes on the two flange plates are different to form an assembly allowance between the ventilation pipe 51 and the air inlet nozzle 15 of the housing 1. Furthermore, when there is an assembly error between the ventilation pipe 51 and the air inlet nozzle 15 of the housing 1, only by adjusting the relative positions of the through holes on the two flange plates, the assembly error can be compensated.

[0087] In the processing device provided by the embodiments of the present application, when there is an installation error between the two ventilation pipes 51 and / or between the ventilation pipe 51 and the air inlet through hole 12 of the housing 1, since the areas of the assembly regions of the first connecting member 61 and the second connecting member 62 are different, the relative positions of the assembly regions of the first connecting member 61 and the second connecting member 62 can be adjusted along the radial direction of the corresponding ventilation pipe 51 to compensate for the error, thereby improving the installation convenience.

[0088] Referring to Figure 1 , Figure 2 and Figure 3 , the embodiments of the present application further provide a coating device, including a coating device and any one of the above-mentioned processing devices, and the coating device is arranged in the chamber 11 of the processing device.

[0089] In the embodiments of the present application, the coating device includes a coating carrier plate for placing battery wafers, and the coating carrier plate is arranged at the processing area 111 of the chamber 11.

[0090] The coating equipment provided by the embodiment of the present application includes a processing device. The air inlet through-hole 12 of the processing device is directly communicated with the chamber 11, so that the gas transported into the air inlet through-hole 12 can be directly transported into the chamber 11. Therefore, the inflation speed in the chamber 11 can be accelerated, and further the inflation efficiency can be accelerated. Moreover, the guiding surface 122 of the air inlet through-hole 12 and the first blocking member 2 can enable the air flow to diffuse into the chamber 11 from the gap 3 between the first blocking member 2 and the chamber wall where the air outlet 121 is located. Therefore, the air flow flowing out from the air outlet 121 will not directly spray on the coating device at the processing area 111 in the chamber 11, so that the impact force of the air flow on the coating device can be reduced.

[0091] Refer to Figure 1 , Figure 3 , Figure 4 , Figure 5 and Figure 9 , in a possible embodiment of the present application, the processing device of the coating equipment includes a housing 1, at least two first blocking members 2, a pipe assembly 5 and a connection assembly 6. The housing 1 forms a chamber 11 and at least two air inlet through-holes 12. At least two first blocking members 2 are respectively connected to the housing 1 at positions corresponding to each air inlet through-hole 12, and there is a gap 3 between the first blocking member 2 and the chamber wall where the air outlet 121 of the air inlet through-hole 12 is located. The projection of the air inlet through-hole 12 along its axial direction is located at the central position of the corresponding first blocking member 2. The air inlet through-hole 12 includes a guiding surface 122, and the guiding surface 122 extends towards the edge of the first blocking member 2 and is arranged around the central axis of the air inlet through-hole 12. The housing 1 includes a housing body 13 and a filling part 14. The air inlet through-hole 12 sequentially penetrates through the housing body 13 and the filling part 14, and the guiding surface 122 is located in the filling part 14. The first blocking member 2 is provided with at least one first ventilation hole 21. On the same chamber wall of the housing 1, a second blocking member 4 is arranged on the side of the first blocking member 2 facing another first blocking member 2. The second blocking member 4 is used to block at least part of the gap 3 on the corresponding side, and the second blocking member 4 is provided with at least one second ventilation hole 41.

[0092] The above are only the preferred embodiments of the present application, and do not limit the patent scope of the present application accordingly. Any equivalent structure or equivalent process transformation made by using the specification and drawings of the present application, or directly or indirectly applied to other related technical fields, shall be equally included in the patent protection scope of the present application.

Claims

1. A processing device, characterized in that: include: A housing (1) is formed with a chamber (11) and an air inlet hole (12); a processing area (111) is provided in the chamber (11); the air inlet hole (12) is opened in the cavity wall of the chamber (11), and an air outlet (121) of the air inlet hole (12) faces the processing area (111); A first blocking member (2) is arranged in the chamber (11) and is arranged opposite to the gas outlet (121); a gap (3) exists between the first blocking member (2) and the chamber wall where the gas outlet (121) is located, and the gap (3) is connected to the processing area (111).

2. The processing device according to claim 1, characterized in that: The air inlet hole (12) comprises a guide surface (122), the guide surface (122) extending toward the edge of the first blocking member (2) and connected to the cavity wall provided with the air outlet (121) to guide the air flow to flow along the gap (3).

3. The processing device according to claim 2, characterized in that: The guide surface (122) is arranged around the central axis of the air inlet hole (12); or, The air intake hole (12) comprises at least two guide surfaces (122), and at least two guide surfaces (122) are arranged at an angle.

4. The processing device according to claim 2, characterized in that: The shell (1) comprises a shell body (13) and a filling portion (14); the filling portion (14) is arranged to protrude relative to the inner wall of the shell body (13) toward the processing area (111); and the air inlet hole (12) sequentially passes through the shell body (13) and the filling portion (14); Wherein, the filling portion (14) and the shell body (13) are integrally formed; or, the filling portion (14) is detachably connected to the shell body (13).

5. The processing device according to claim 4, characterized in that: The guide surface (122) is located at the filling portion (14); or, the guide surface (122) extends to the filling portion (14).

6. The processing device according to any one of claims 1 to 5, characterized in that: The first blocking member (2) is provided with at least one first vent hole (21), and the first vent hole (21) is connected with the air inlet hole (12) and the processing area (111); The sum of the radial cross-sectional areas of the at least one first ventilation hole (21) is a first area, the surface area of ​​the first blocking member (2) facing the air inlet hole (12) is a second area, and the ratio of the first area to the second area is less than 1 / 3.

7. The processing device according to any one of claims 1 to 5, characterized in that: The projection of the air inlet through hole (12) along its axial direction is located at a central position corresponding to the first blocking member (2).

8. The processing device according to any one of claims 1 to 5, characterized in that: The cavity wall is provided with at least two air inlet holes (12), and each of the air inlet holes (12) is correspondingly provided with the first blocking member (2).

9. The processing device according to claim 8, characterized in that: Corresponding to the same cavity wall, a second blocking member (4) is provided on the side of the first blocking member (2) facing the other first blocking member (2), and the second blocking member (4) is used to block at least part of the gap (3) corresponding to the side.

10. The processing device according to claim 9, characterized in that: The second blocking member (4) is provided with at least one second ventilation hole (41), and the sum of the radial cross-sectional areas of the at least one second ventilation hole (41) is a third area, the surface area of ​​the second blocking member (4) corresponding to the gap (3) is a fourth area, and the ratio of the third area to the fourth area is less than 1 / 2.

11. The processing device according to any one of claims 1 to 5, characterized in that: It also comprises a pipe assembly (5) and a connection assembly (6), wherein the pipe assembly (5) comprises at least two ventilation pipes (51), the connection assembly (6) connects two adjacent ventilation pipes (51), and / or the connection assembly (6) connects the ventilation pipe (51) to a position of the housing (1) corresponding to the air inlet hole (12); The connecting assembly (6) comprises a first connecting member (61) and a second connecting member (62), wherein the first connecting member (61) and the second connecting member (62) are respectively connected to the corresponding ventilation pipe (51) or the housing (1), and the area of ​​the assembly region of the first connecting member (61) is different from the area of ​​the assembly region of the second connecting member (62), so that one of the first connecting member (61) and the second connecting member (62) can be adjusted relative to the other along the radial direction of the corresponding ventilation pipe (51).

12. A coating device, characterized in that: include: Coating device; The processing device according to any one of claims 1 to 11, wherein the coating device is arranged in the chamber (11) of the processing device.

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