Evaporation chamber opening and closing baffle connecting piece, opening and closing baffle and opening and closing device

Abstract

The utility model relates to the technical field of evaporation equipment, and discloses an evaporation chamber opening and closing baffle connecting piece, an opening and closing baffle and an opening and closing device.The evaporation chamber opening and closing baffle connecting piece comprises a threaded column, the circumferential side wall of the threaded column is provided with threads, and the threaded column is suitable for being matched with a threaded hole in a motor shaft adapter; the first positioning boss and the threaded column are coaxially arranged, the first positioning boss is arranged at one end of the threaded column, and the first positioning boss is suitable for being matched with a positioning hole in the motor shaft adapter to achieve mutual positioning with the motor shaft adapter; the limiting end is arranged on the side, away from the threaded column, of the first positioning boss and suitable for pressing the opening and closing baffle on the motor shaft adapter piece, and the problem that a cavity door cannot be completely closed due to the fact that a threaded fastener deviates or inclines or the knife baffle deviates from the original position when the knife baffle is loosened is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation coating equipment, in particular to a connecting piece for an opening and closing baffle of an evaporation coating chamber, an opening and closing baffle and an opening and closing device. Background Technique

[0002] Evaporation coating is a processing method in which evaporation coating materials are evaporated and the vapor of the evaporation coating materials is attached to a workpiece to be coated to form a coating to meet the performance requirements of parts. On evaporation coating equipment, an evaporation coating chamber is usually provided, and a chamber door that can be opened and closed is provided on the lower side of the evaporation coating chamber to control the opening and closing of the evaporation coating chamber.

[0003] In the related art, a motor is usually provided on the evaporation coating equipment, and the baffle is directly mounted on the motor shaft of the motor through at least two threaded fasteners, or indirectly mounted on the motor shaft through a component connected to other components mounted on the motor shaft, so that the baffle rotates under the drive of the motor, thereby forming an opening and closing chamber door.

[0004] However, in the above related art, since the baffle is mounted on the motor shaft through threaded connection of the threaded fasteners, during the process of tightening the threaded fasteners and under the inertial impact of the baffle rotating with the motor shaft, the threaded fasteners may shift or tilt to a certain extent in the threaded holes, or become loose, thereby indirectly causing the baffle to deviate from its original position, resulting in the situation that the chamber door cannot be completely closed. Summary of the Utility Model

[0005] In view of this, the utility model provides a connecting piece for an opening and closing baffle of an evaporation coating chamber, an opening and closing baffle and an opening and closing device to solve the problem that the threaded fasteners shift, tilt or become loose, causing the baffle to deviate from its original position and resulting in the chamber door not being able to be completely closed.

[0006] In a first aspect, the utility model provides a connecting piece for an opening and closing baffle of an evaporation coating chamber, comprising: a threaded column, the circumferential side wall of which is provided with threads and is adapted to be matched with a threaded hole on a motor shaft adapter; a first positioning boss, coaxially arranged with the threaded column and provided at one end of the threaded column, and the first positioning boss is adapted to realize mutual positioning with the motor shaft adapter by cooperating with a positioning hole on the motor shaft adapter; a limiting end, provided on the side of the first positioning boss away from the threaded column, and is adapted to press the opening and closing baffle on the motor shaft adapter.

[0007] Beneficial effects: By matching the threaded post with the threaded hole on the motor shaft adapter, the connecting piece can be installed and fixed on the motor shaft adapter, providing a connection basis for connecting the baffle plate and the motor shaft adapter. The first positioning boss of the first positioning boss is arranged at one end of the threaded post and matches with the positioning hole on the motor shaft adapter, restricting the relative position of the threaded post in the threaded hole, thus making up for the defects of possible inclination or deviation that may occur during the matching process of the threaded post and the threaded hole. Then, the opening and closing baffle plate is pressed tightly on the motor shaft adapter through the limiting end. On the basis that the threaded post is not prone to deviation or inclination in the threaded hole, the position of the opening and closing baffle plate is not prone to deviation either, ensuring the opening and closing position of the opening and closing baffle plate and reducing the situation where the chamber door cannot be completely closed.

[0008] In an alternative embodiment, the limiting end includes a second positioning boss. The second positioning boss is located on the side of the first positioning boss away from the threaded post. The diameter of the second positioning boss is larger than that of the first positioning boss. The second positioning boss is adapted to position the plate body and press the baffle plate tightly on the motor shaft adapter.

[0009] Beneficial effects: Since the diameter of the second positioning boss is larger than that of the first positioning boss, after the first positioning boss passes through the opening and closing baffle plate and extends into the positioning hole on the motor shaft adapter, the second positioning boss abuts against the surface of the opening and closing baffle plate. As the threaded post advances in the threaded hole, the second positioning boss gradually presses the baffle plate and makes the baffle plate abut tightly on the motor shaft adapter, thereby realizing the positioning of the baffle plate.

[0010] In an alternative embodiment, the limiting end includes an operating part arranged on the side of the second positioning boss away from the first positioning boss. The operating part is a prism protruding in a direction away from the second positioning boss.

[0011] Beneficial effects: By arranging an operating part on the side of the second positioning boss away from the first positioning boss and making the operating part protrude from the surface of the second positioning boss to form a prism, the connecting piece is rotated through a tool such as a wrench that matches the operating part, thereby realizing the installation and disassembly between the connecting piece, the baffle plate and the motor shaft adapter. Since the operating part is protruding, during long-term use, it will not be the same as the connecting piece with an internal hexagonal groove at the end in the related art, where the inner diameter of the internal hexagonal groove decreases due to the adhesion of the coating material vapor, making it impossible to match the hexagonal wrench, improving the convenience and extending the service life of the component.

[0012] In an alternative embodiment, the first positioning boss is frustum-shaped, and the smaller diameter end of the frustum-shaped first positioning boss is connected to the threaded post.

[0013] Beneficial effects: By setting the first positioning boss as a frustum of a cone with a gradually changing diameter, the positioning hole adapted to the first positioning boss guides the positioning boss, thereby reducing the resistance when the threaded post enters the threaded hole. Moreover, the frustum-shaped first positioning boss and the adapted positioning hole can fit better, further reducing the possibility of the threaded post being skewed.

[0014] In a second aspect, the present utility model also provides an opening and closing baffle, including: the above-mentioned evaporation chamber opening and closing baffle connecting member; a plate body provided with a connecting portion, and a communication hole penetrating through the plate body is provided on the connecting portion. The first positioning boss passes through the communication hole, and the limiting end abuts against the plate body and presses the plate body against the motor shaft adapter.

[0015] Beneficial effects: By using the above-mentioned evaporation chamber opening and closing baffle connecting member to connect the opening and closing baffle with the motor shaft adapter, since the first positioning boss passes through the communication hole and extends into the positioning hole of the motor shaft adapter, the correct fitting position is maintained between the threaded post and the threaded hole. Then, the plate body is pressed by the limiting end. Without the threaded post and the threaded hole being skewed in the fitting position, the limiting end restricts the position of the plate body, thereby keeping the position of the plate body correct, and further reducing the situation where the opening and closing baffle cannot be completely closed.

[0016] In an optional implementation manner, the communication hole is adapted to the first positioning boss.

[0017] Beneficial effects: By the communication hole being adapted to the first positioning boss, part of the first positioning boss extends into the first positioning hole and part remains in the communication hole, thereby relatively positioning the opening and closing baffle and the motor shaft adapter, and further improving the reliability of positioning the opening and closing baffle.

[0018] In an optional implementation manner, the limiting end includes a second positioning boss. The second positioning boss is located on the side of the first positioning boss away from the threaded post. The diameter of the second positioning boss is larger than that of the first positioning boss. The second positioning boss is adapted to position the plate body and press the baffle against the motor shaft adapter. It is characterized in that a second positioning hole is provided on the connecting portion. The second positioning hole is a blind hole, and the communication hole is provided at the bottom of the second positioning hole.

[0019] Beneficial effects: By providing the second positioning boss, the second positioning boss cooperates with the second positioning hole provided on the connecting portion of the plate body, thereby further positioning the position of the plate body. At the same time, the second positioning boss presses the bottom of the second positioning hole, and then presses the plate body against the motor shaft adapter, realizing the installation and positioning of the plate body and the motor shaft adapter.

[0020] In an alternative embodiment, the connecting portion is located on one side of the edge of the plate body, and the number of the second positioning holes is at least three.

[0021] Advantageous effects: By providing at least three positioning holes, the torque received at the connecting member of the opening and closing baffle of each evaporation chamber when the plate body rotates with the motor shaft adapter is shared, further reducing the skew between the threaded post and the threaded hole, and improving the structural life, making the structure more reliable and stable.

[0022] In a third aspect, the present invention further provides an opening and closing device, including a base frame; a motor disposed on the base frame, and a motor shaft adapter is provided on the motor shaft of the motor; at least one of the above-mentioned opening and closing baffles, a threaded hole adapted to the threaded post is provided on the motor shaft adapter, and a first positioning hole adapted to the first positioning boss is provided at the orifice of the threaded hole. The threaded post extends into the threaded hole, the first positioning boss extends into the first positioning hole, and the limiting end presses the plate body against the motor shaft adapter.

[0023] Advantageous effects: By providing a motor shaft adapter on the motor shaft of the motor, it is convenient to install and link the opening and closing baffle with the motor shaft. A threaded hole is provided on the motor shaft adapter to facilitate matching with the threaded post. At the same time, the first positioning hole is adapted to the first positioning boss. Thus, after the first positioning boss extends into the positioning hole, the positions of the threaded post and the threaded hole are limited, maintaining the coaxiality of the threaded post and the threaded hole, and avoiding the offset of the threaded post, which may cause the plate body to move synchronously and affect the closing of the opening and closing baffle.

[0024] In an alternative embodiment, there are two motors, and the motor shafts of the two motors are respectively provided with the motor shaft adapters. Two opening and closing baffles are provided and are respectively installed at the ends of different motor shaft adapters. The motor shafts of the motors have a closed position and an open position. In the open position, the two plate bodies are separated. In the closed position, the two plate bodies are joined together to close the opening of the evaporation chamber.

[0025] Advantageous effects: By driving the two opening and closing baffles respectively with two motors, the two opening and closing baffles move in a direction away from each other under the drive of the corresponding motors, thereby opening the chamber door of the evaporation chamber. The two opening and closing baffles move in a direction close to each other and close, thereby closing the chamber door of the evaporation chamber. Description of the Drawings

[0026] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0027] Figure 1 It is a schematic diagram of the overall structure of a connecting member for the opening and closing baffle of an evaporation chamber according to an embodiment of the present invention;

[0028] Figure 2 It is another schematic diagram of the overall structure of a connecting member for the opening and closing baffle of an evaporation chamber according to an embodiment of the present invention;

[0029] Figure 3 It is a schematic diagram of the structure of an opening and closing baffle according to an embodiment of the present invention;

[0030] Figure 4 It is a cross-sectional schematic diagram of the connection structure between the opening and closing baffle and the motor shaft adapter in an opening and closing device according to an embodiment of the present invention;

[0031] Figure 5 It is another cross-sectional schematic diagram of the connection structure between the opening and closing baffle and the motor shaft adapter in an opening and closing device according to an embodiment of the present invention.

[0032] Explanation of reference numerals:

[0033] 100, threaded post; 200, first positioning boss; 300, limiting end; 301, second positioning boss; 302, operating part; 400, plate body; 402, second positioning hole; 4021, communication hole; 500, motor shaft adapter; 501, first positioning hole; 502, threaded hole. Specific embodiments

[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

[0035] The following will be combined with Figures 1 to 5 , to describe the embodiments of the present invention.

[0036] According to an embodiment of the present invention, on the one hand, a connecting member for the opening and closing baffle of an evaporation chamber is provided. Please refer to Figure 1, including: a threaded post 100, provided with threads on its circumferential side wall, adapted to be fitted with a threaded hole 502 on a motor shaft adapter 500; a first positioning boss 200, coaxially arranged with the threaded post 100 and provided at one end of the threaded post 100, and the first positioning boss 200 is adapted to achieve mutual positioning with the motor shaft adapter 500 by cooperating with a positioning hole on the motor shaft adapter 500; a limiting end 300, provided on the side of the first positioning boss 200 away from the threaded post 100, adapted to press the opening and closing baffle against the motor shaft adapter 500.

[0037] In this embodiment, through the cooperation of the threaded post 100 with the threaded hole 502 on the motor shaft adapter 500, the connector can be installed and fixed on the motor shaft adapter 500, providing a connection basis for connecting the baffle to the motor shaft adapter 500. The first positioning boss 200 of the first positioning boss 200 is provided at one end of the threaded post 100 and cooperates with the positioning hole on the motor shaft adapter 500, restricting the relative position of the threaded post 100 in the threaded hole 502, thus making up for the possible defects of inclination or deviation during the cooperation between the threaded post 100 and the threaded hole 502. Then, the opening and closing baffle is pressed against the motor shaft adapter 500 by the limiting end 300. On the basis that the threaded post 100 is not prone to deviation or inclination in the threaded hole 502, the position of the opening and closing baffle is not prone to deviation either, ensuring the opening and closing position of the opening and closing baffle and reducing the situation where the chamber door cannot be fully closed.

[0038] Specifically, the specific form of the limiting end 300 is not restricted in the above embodiment. In some embodiments not shown, the limiting end 300 can be a hexagonal nail cap provided at the end of the threaded post 100, or other shaped structures, as long as it can press the opening and closing baffle as the threaded post 100 penetrates into the threaded hole 502.

[0039] In one embodiment, the limiting end 300 includes a second positioning boss 301. The second positioning boss 301 is located on the side of the first positioning boss 200 away from the threaded post 100. The diameter of the second positioning boss 301 is larger than that of the first positioning boss 200. The second positioning boss 301 is adapted to position the opening and closing baffle and press the baffle against the motor shaft adapter 500.

[0040] In this embodiment, since the diameter of the second positioning boss 301 is larger than that of the first positioning boss 200, after the first positioning boss 200 passes through the opening and closing baffle and extends into the positioning hole on the motor shaft adapter 500, the second positioning boss 301 abuts against the surface of the opening and closing baffle. As the threaded post 100 advances in the threaded hole 502, the second positioning boss 301 gradually presses the baffle and makes the baffle abut tightly against the motor shaft adapter 500, thereby realizing the positioning of the baffle.

[0041] Specifically, the second positioning boss 301 can be integrally provided with the first positioning boss 200 and the threaded post 100, or can be installed on the second positioning boss 301 by means of threaded connection or the like.

[0042] In one embodiment, the limiting end 300 includes an operating portion 302 provided on a side of the second positioning boss 301 away from the first positioning boss 200, and the operating portion 302 is a prism protruding in a direction away from the second positioning boss 301.

[0043] Specifically, the specific form of the operating portion 302 is not limited in this embodiment. The operating portion 302 can be a triangular prism or a hexagonal prism, as long as it belongs to a non-rotary body and can cooperate with a general wrench or a specially designed wrench to facilitate the staff to rotate the threaded post 100.

[0044] In this embodiment, by providing the operating portion 302 on a side of the second positioning boss 301 away from the first positioning boss 200 and making the operating portion 302 protrude from the surface of the second positioning boss 301 to form a prism, a wrench or other tool matching the operating portion 302 is used to rotate the connecting member, so as to realize the installation and disassembly between the connecting member, the baffle plate and the motor shaft adapter 500. Since the operating portion 302 is protruding, during long-term use, it will not be the same as the connecting member with an internal hexagonal groove at the end in the related art, where the inner diameter of the internal hexagonal groove is reduced due to the adhesion of the plating material vapor, making it impossible to match the hexagonal wrench, improving the convenience and extending the service life of the component.

[0045] In one embodiment, please refer to Figure 2 , the first positioning boss 200 is frustum-shaped, and the smaller diameter end of the frustum shape of the first positioning boss 200 is connected to the threaded post 100.

[0046] In this embodiment, by setting the first positioning boss 200 as a frustum shape with a gradually changing diameter, the positioning hole adapted to the first positioning boss 200 plays a guiding role for the positioning boss, thereby reducing the resistance when the threaded post 100 enters the threaded hole 502. Moreover, the frustum-shaped first positioning boss 200 and the adapted positioning hole can be better matched, further reducing the possibility of the threaded post 100 being deflected.

[0047] According to an embodiment of the present invention, on the other hand, an opening and closing baffle is also provided. Please refer to Figures 3 to 5 , including: the above-mentioned vapor deposition chamber opening and closing baffle connecting member; a plate body 400 provided with a connecting portion, and a communication hole 4021 penetrating through the plate body 400 is provided on the connecting portion. The first positioning boss 200 passes through the communication hole 4021, and the limiting end 300 abuts against the plate body 400 and presses the plate body 400 against the motor shaft adapter 500.

[0048] In this embodiment, by using the above-mentioned evaporation chamber opening and closing baffle connecting member to connect the opening and closing baffle with the motor shaft adapter 500, since the first positioning boss 200 passes through the communication hole 4021 and extends into the positioning hole of the motor shaft adapter 500, the threaded column 100 and the threaded hole 502 maintain a correct mating position. Then, the plate body 400 is pressed tightly by the limiting end 300. When the mating position of the threaded column 100 and the threaded hole 502 is not skewed, the limiting end 300 restricts the position of the plate body 400, thereby keeping the position of the plate body 400 correct, and further reducing the situation where the opening and closing baffle cannot be completely closed.

[0049] In one embodiment, the communication hole 4021 is adapted to the first positioning boss 200.

[0050] In this embodiment, by adapting the communication hole 4021 to the first positioning boss 200, part of the first positioning boss 200 extends into the first positioning hole 501, and part remains in the communication hole 4021, thereby relatively positioning the opening and closing baffle and the motor shaft adapter 500, and further improving the reliability of positioning the opening and closing baffle.

[0051] In one embodiment, the limiting end 300 includes a second positioning boss 301. The second positioning boss 301 is located on the side of the first positioning boss 200 away from the threaded column 100. The diameter of the second positioning boss 301 is larger than that of the first positioning boss 200. The second positioning boss 301 is adapted to position the opening and closing baffle and press the baffle tightly on the motor shaft adapter 500. It is characterized in that a second positioning hole 402 is provided on the connecting portion. The second positioning hole 402 is a blind hole, and the communication hole 4021 is provided at the bottom of the second positioning hole 402.

[0052] In this embodiment, by providing the second positioning boss 301, the second positioning boss 301 cooperates with the second positioning hole 402 provided on the connecting portion of the plate body 400, thereby further positioning the position of the plate body 400. At the same time, the second positioning boss 301 presses the bottom of the second positioning hole 402, and further presses the plate body 400 tightly on the motor shaft adapter 500, realizing the installation and positioning of the plate body 400 and the motor shaft adapter 500.

[0053] In one embodiment, the connecting portion is located on one side of the edge of the plate body 400, and the number of the second positioning holes 402 is at least three.

[0054] In this embodiment, by providing at least three positioning holes, the torque received at each evaporation chamber opening and closing baffle connecting member when the plate body 400 rotates with the motor shaft adapter 500 is shared, further reducing the situation where the threaded column 100 and the threaded hole 502 are skewed, and improving the structural life, making the structure more reliable and stable.

[0055] According to an embodiment of the present invention, in a third aspect, an opening and closing device is further provided. Please refer to Figure 4 and Figure 5 , which includes a base frame; a motor disposed on the base frame, and a motor shaft adapter 500 is provided on the motor shaft of the motor; at least one of the above-mentioned opening and closing baffles, a threaded hole 502 adapted to the threaded post 100 is provided on the motor shaft adapter 500, and a first positioning hole 501 adapted to the first positioning boss 200 is provided at the orifice of the threaded hole 502. The threaded post 100 extends into the threaded hole 502, the first positioning boss 200 extends into the first positioning hole 501, and the limiting end 300 presses the plate body 400 against the motor shaft adapter 500.

[0056] In this embodiment, by providing a motor shaft adapter 500 on the motor shaft of the motor, it is convenient to install and link the opening and closing baffle with the motor shaft. A threaded hole 502 is provided on the motor shaft adapter 500 to facilitate matching with the threaded post 100. At the same time, the first positioning hole 501 is adapted to the first positioning boss 200. Thus, after the first positioning boss 200 extends into the positioning hole, the positions of the threaded post 100 and the threaded hole 502 are restricted, keeping the coaxiality of the threaded post 100 and the threaded hole 502, and avoiding the deviation of the threaded post 100, which may cause the synchronous movement of the plate body 400 and affect the closing of the opening and closing baffle.

[0057] In one embodiment, there are two motors, and motor shaft adapters 500 are respectively provided on the motor shafts of the two motors. Two opening and closing baffles are provided and are respectively installed at the ends of different motor shaft adapters 500. The motor shafts of the motors have a closed position and an open position. In the open position, the two plate bodies 400 are separated. In the closed position, the two plate bodies 400 are joined together to close the opening of the evaporation chamber.

[0058] In this embodiment, the two opening and closing baffles are respectively driven by two motors. The two opening and closing baffles move in a direction away from each other under the drive of the corresponding motors, thereby opening the chamber door of the evaporation chamber. The two opening and closing baffles move in a direction close to each other and close, thereby closing the chamber door of the evaporation chamber.

[0059] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention. Such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A vapor deposition chamber opening and closing baffle connecting piece, characterized in that: include: A threaded column (100) having a threaded portion on its circumferential side wall, adapted to be matched with a threaded hole (502) on a motor shaft adapter (500); A first positioning boss (200) is coaxially arranged with the threaded column (100) and is arranged at one end of the threaded column (100), and the first positioning boss (200) is suitable for realizing mutual positioning with the motor shaft adapter (500) by cooperating with the positioning hole on the motor shaft adapter (500); The limiting end (300) is arranged on a side of the first positioning boss (200) away from the threaded column (100), and is suitable for pressing the opening and closing baffle onto the motor shaft adapter (500).

2. The vapor deposition chamber opening and closing baffle connecting piece according to claim 1, characterized in that: The limiting end (300) includes a second positioning boss (301), and the second positioning boss (301) is located on a side of the first positioning boss (200) away from the threaded column (100). The diameter of the second positioning boss (301) is larger than that of the first positioning boss (200). The second positioning boss (301) is suitable for positioning the opening and closing baffle and pressing the baffle onto the motor shaft adapter (500).

3. The vapor deposition chamber opening and closing baffle connecting piece according to claim 2, characterized in that: The limiting end (300) comprises an operating portion (302) arranged on a side of the second positioning boss (301) away from the first positioning boss (200), and the operating portion (302) is a prism protruding in a direction away from the second positioning boss (301).

4. The vapor deposition chamber opening and closing baffle connecting piece according to claim 1, characterized in that: The first positioning boss (200) is in the shape of a truncated cone, and the truncated cone end with a smaller diameter of the first positioning boss (200) is connected to the threaded column (100).

5. An opening and closing baffle, characterized in that: include: The vapor deposition chamber opening and closing baffle connecting member according to any one of claims 1 to 4; The plate body (400) is provided with a connecting portion, the connecting portion is provided with a connecting hole (4021) penetrating the plate body (400), the first positioning boss (200) passes through the connecting hole (4021), the limiting end (300) abuts against the plate body (400) and presses the plate body (400) onto the motor shaft adapter (500).

6. The opening and closing baffle according to claim 5, characterized in that: The communicating hole (4021) is adapted to fit the first positioning boss (200).

7. The opening and closing baffle according to claim 5, characterized in that: The limiting end (300) includes a second positioning boss (301), and the second positioning boss (301) is located on a side of the first positioning boss (200) away from the threaded column (100). The diameter of the second positioning boss (301) is larger than that of the first positioning boss (200). The second positioning boss (301) is suitable for positioning the plate body (400) and pressing the baffle onto the motor shaft adapter (500), and is characterized in that a second positioning hole (402) is opened on the connecting portion, the second positioning hole (402) is a blind hole, and the connecting hole (4021) is arranged at the bottom of the second positioning hole (402).

8. The opening and closing baffle according to claim 7, characterized in that: The connecting portion is located on one side of the edge of the plate body (400), and the number of the second positioning holes (402) is at least three.

9. An opening and closing device, characterized in that: include Scaffolding; A motor is arranged on the base frame, and a motor shaft adapter (500) is arranged on the motor shaft of the motor; At least one opening and closing baffle as described in any one of claims 5 to 8, the motor shaft adapter (500) is provided with a threaded hole (502) adapted to the threaded column (100), and the opening of the threaded hole (502) is provided with a first positioning hole (501) adapted to the first positioning boss (200), the threaded column (100) extends into the threaded hole (502), the first positioning boss (200) extends into the first positioning hole (501), and the limiting end (300) presses the plate body (400) onto the motor shaft adapter (500).

10. The opening and closing device according to claim 9, characterized in that: The motors are provided with two, and the motor shafts of the two motors are respectively provided with the motor shaft adapter (500), the opening and closing baffles are provided with two and are respectively installed at different ends of the motor shaft adapter (500), and the motor shaft of the motor has a closed position and an open position. In the open position, the two plate bodies (400) are separated, and in the closed position, the two plate bodies (400) are joined together to seal the opening of the evaporation chamber.

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