Observation device and molten pool control system

Abstract

The utility model belongs to the technical field of evaporation coating, and particularly relates to an observation device and a molten pool control system. The observation device comprises a shell, an image temperature acquisition module, a light path on-off roller and a driving module. A cavity is formed in the shell, and a first light path via hole communicated with the cavity is formed in the shell; the image temperature acquisition module is arranged in the shell and faces the first light path via hole; the light path on-off rotating roller is at least partially arranged in the cavity and is rotationally connected with the shell, and the light path on-off rotating roller is provided with a second light path via hole and is close to the first light path via hole relative to the image temperature acquisition module; the driving module is arranged outside the shell and connected to the light path on-off rotating roller so as to rotate the light path on-off rotating roller, and therefore the second light path via hole and the first light path via hole can be connected or disconnected. Therefore, the image temperature acquisition module is prevented from being continuously influenced by a high-temperature and high-light environment formed by the molten pool, so that the service life of the observation device is prolonged, and the accuracy of data acquired by the image temperature acquisition module is ensured.

Description

Technical Field

[0001] This application belongs to the technical field of evaporation coating, and in particular relates to an observation device and a molten pool control system. Background Art

[0002] The evaporation boat is an important working component of the evaporation source, usually used in metal evaporation coating equipment. During the evaporation process, the metal wire is sent to the upper surface of the evaporation boat and heated by an electric current. The evaporation boat vaporizes the metal wire on it into metal vapor, and then the metal vapor is evenly deposited on the substrate layer.

[0003] During this process, generally, the operator needs to monitor the state of the solution in the molten pool on the evaporation boat through an observation device or the naked eye. The operator judges the state of the molten pool according to experience to adjust parameters such as wire feeding parameters and heating power, so that the state of the molten pool is in the target state.

[0004] For the case of using an observation device to monitor the solution state, an image acquisition module is integrated inside the observation device. Since the metal solution in the molten pool will form strong light, when the image acquisition module is in a working environment of strong light and high temperature for a long time, it will cause damage to the sensing elements in the image acquisition module, and then the acquired image data will be distorted, shortening the service life of the image acquisition module. Summary of the Utility Model

[0005] This application provides an observation device and a molten pool control system to solve the technical problem that the image acquisition module has a high risk of damage due to being in a harsh working condition for a long time.

[0006] According to one aspect of this application, an observation device is provided, including a housing, an image temperature acquisition module, an optical path on-off roller, and a driving module. A cavity is formed inside the housing and a first optical path through hole communicating with the cavity is provided; the image temperature acquisition module is arranged inside the housing and faces the first optical path through hole; at least part of the optical path on-off roller is arranged inside the cavity and is rotationally connected to the housing. The optical path on-off roller is provided with a second optical path through hole and is relatively closer to the first optical path through hole than the image temperature acquisition module; the driving module is arranged outside the housing and is connected to the optical path on-off roller to rotate the optical path on-off roller so that the second optical path through hole communicates with or blocks the first optical path through hole.

[0007] In an optional solution of this application, when the second optical path through hole and the first optical path through hole are in a communicating state, the projection of the first optical path through hole on the optical path at least covers the second optical path through hole; or when the second optical path through hole and the first optical path through hole are in a communicating state, the projection of the second optical path through hole on the optical path at least covers the first optical path through hole.

[0008] In an alternative embodiment of the present application, the optical path on-off roller includes a roller body, a first rotating shaft, and a second rotating shaft; the first rotating shaft and the second rotating shaft are respectively disposed at two axial ends of the roller body and connected to the housing, and the first rotating shaft extends out of the housing.

[0009] In an alternative embodiment of the present application, the driving module includes a power unit and a transmission mechanism, and the power unit is connected to the first rotating shaft through the transmission mechanism.

[0010] In an alternative embodiment of the present application, it further includes a transparent plate, which is disposed in the cavity and divides the cavity into a first chamber and a second chamber in the optical path direction; the optical path on-off roller is located in the first chamber, and the image temperature acquisition module is located in the second chamber.

[0011] According to another aspect of the present application, a molten pool control system is provided, which includes at least one evaporation boat structure and at least one of the above-mentioned observation devices; the evaporation boat structure is provided with a molten pool, and the observation device is located above one side in the length direction of the evaporation boat structure; the first optical path through-hole is arranged facing the molten pool, and in a state where the second optical path through-hole communicates with the first optical path through-hole, the image temperature acquisition module can acquire the solution image data and the solution temperature in the molten pool.

[0012] In an alternative embodiment of the present application, the evaporation boat structure includes an evaporation boat body, an anode plate, and a cathode plate; the molten pool is located in the evaporation boat body and extends along the length direction of the evaporation boat body; the anode plate and the cathode plate are respectively disposed at two ends of the evaporation boat body in the length direction.

[0013] In an alternative embodiment of the present application, it further includes a first baffle and a second baffle; the first baffle is connected to the anode plate and is provided with at least one fuse through-hole, and the second baffle is connected to the cathode plate and is provided with at least one third optical path through-hole; the first baffle and the second baffle are used to block the droplets splashed from the molten pool, and the fuse through-hole is used to allow the fuse to pass through to form a solution in the molten pool; the observation device is located on the side of the second baffle away from the molten pool and the first optical path through-hole is arranged facing the third optical path through-hole.

[0014] In an alternative embodiment of the present application, the number of evaporation boat structures is multiple, and the multiple evaporation boat structures are arranged side by side in the width direction of the evaporation boat body; the number of observation devices, the number of third optical path through-holes, and the number of fuse through-holes are equal to the number of evaporation boat structures, and each observation device, each third optical path through-hole, and each fuse through-hole are arranged in alignment in the width direction of the evaporation boat body.

[0015] In an alternative embodiment of the present application, it further includes a processing module and an execution module; the processing module is connected to the execution module and the image temperature acquisition module in the observation device, and controls the execution module to adjust the solution state in the molten pool according to the solution image data and the solution temperature.

[0016] In summary, the observation device and the molten pool control system provided by the present application have at least the following beneficial effects:

[0017] The observation device can be applied to the molten pool control system to obtain the image data and temperature of the solution in the molten pool, so as to determine the state of the solution in the molten pool.

[0018] Specifically, the observation device includes a housing, an image temperature acquisition module, an optical path on-off roller, and a driving module. A cavity is formed inside the housing, and the image temperature acquisition module and the optical path on-off roller are both installed in the cavity. A first optical path through hole is provided on the housing, a second optical path through hole is provided on the optical path on-off roller, and the driving module is arranged outside the housing to drive the optical path on-off roller to rotate, so that the first optical path through hole and the second optical path through hole can be switched between a connected state and a disconnected state.

[0019] When the second optical path through hole rotates to be connected to the first optical path through hole, the light formed by the solution in the molten pool can be acquired by the image temperature acquisition module after passing through the first optical path through hole and the second optical path through hole, so that the image temperature acquisition module can acquire the image data and temperature of the solution in the molten pool.

[0020] In this way, the strong light formed by the solution in the molten pool is prevented from continuously irradiating the image temperature acquisition module, and the heat and steam formed by heating the solution can be blocked from entering the cavity, so as to reduce the risk of damage to the sensing element in the image temperature acquisition module, improve the service life of the entire observation device, and ensure the accuracy of the data collected by the image temperature acquisition module. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 FIG. is a partial structural schematic diagram of a molten pool control system provided according to one embodiment of the present application;

[0023] Figure 2 is Figure 1 a schematic diagram of the observation device in

[0024] Figure 3a is Figure 2 a cross-sectional view of the observation device in

[0025] Figure 3b is Figure 2 a cross-sectional view of the observation device in another perspective;

[0026] Figure 4 It is a block diagram of a molten pool control system provided according to one embodiment of the present application.

[0027] The reference signs are as follows:

[0028] 100, observation device;

[0029] 10, housing; 11, first bearing; 12, second bearing; H1, first light path through hole; R, cavity; R1, first chamber; R2, second chamber;

[0030] 20, image temperature acquisition module; 21, image acquisition unit; 22, temperature acquisition unit;

[0031] 30, optical path on-off roller; 31, roller body; 32, first rotating shaft; 33, second rotating shaft; H2, second light path through hole;

[0032] 40, drive module; 41, power unit; 42, transmission mechanism; 50, transparent plate;

[0033] 60, evaporation boat structure; 61, evaporation boat body; 62, anode plate; 63, cathode plate; P, molten pool;

[0034] 71, first baffle; H4, fuse through hole; 72, second baffle; H3, third light path through hole;

[0035] 200, processing module; 201, host computer unit; 202, lower computer unit;

[0036] 300, execution module; 301, evaporation boat power adjustment unit; 302, wire feeding speed adjustment unit; 303, wire feeding angle adjustment unit. Detailed implementation manners

[0037] In the description of the present application, it should be understood that when descriptions of orientation or positional relationships such as "center", "length", "width", "depth", "upper", "lower", "inner", "outer", "axial", "radial", "circumferential", etc. appear, without special instructions, they are understood as the orientation or positional relationships shown in the drawings. This is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0038] In addition, for features limited with "first" and "second" for descriptive purposes only, they shall not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Features limited with "first" and "second" may explicitly or implicitly include at least one of the limited features. When the description "a plurality" appears, it generally means including at least two, such as two, three, etc., unless otherwise specifically limited.

[0039] In this application, unless otherwise clearly specified and limited, terms such as "installed", "connected", "joined", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection, it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two components or the interaction relationship between two components. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0040] In the description of this specification, when terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" appear, it means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0041] Figure 1 FIG. is a schematic diagram of a partial structure of a molten pool control system provided according to one embodiment of this application. Please refer to Figure 1 , the molten pool control system includes at least one evaporation boat structure 60 and at least one observation device 100. The evaporation boat structure 60 is provided with a molten pool P, and the observation device 100 is located above one side in the length direction of the evaporation boat structure 60.

[0042] Figure 2 is Figure 1 a schematic diagram of the observation device 100 in Figure 3a is Figure 2 a cross-sectional view of the observation device 100 in Figure 3b is Figure 2 a cross-sectional view of the observation device 100 in another perspective in

[0043] Please refer to Figure 2 , Figure 3a andFigure 3b The observation device 100 includes a housing 10, an image temperature acquisition module 20, an optical path on-off roller 30, and a driving module 40.

[0044] Wherein, a cavity R is provided in the housing 10, and a first optical path through hole H1 communicating with the cavity R is provided. The image temperature acquisition module 20 is disposed in the housing 10 and is oriented towards the first optical path through hole H1.

[0045] At least a part of the optical path on-off roller 30 is disposed in the cavity R and is rotatably connected to the housing 10. The optical path on-off roller 30 is provided with a second optical path through hole H2 and is relatively closer to the first optical path through hole H1 than the image temperature acquisition module 20.

[0046] The driving module 40 is disposed outside the housing 10 and is connected to the optical path on-off roller 30 to rotate the optical path on-off roller 30 so that the second optical path through hole H2 communicates with or is blocked from the first optical path through hole H1.

[0047] Further, the first optical path through hole H1 is oriented towards the molten pool P. In a state where the second optical path through hole H2 communicates with the first optical path through hole H1, the image temperature acquisition module 20 can acquire the solution image data and solution temperature in the molten pool P.

[0048] In this embodiment, a cavity R is provided in the housing 10, and at least a part of the image temperature acquisition module 20 and the optical path on-off roller 30 are received in the cavity R to protect the image temperature acquisition module 20 and the optical path on-off roller 30.

[0049] Wherein, the optical path on-off roller 30 is provided with a second optical path through hole H2 and can rotate relative to the housing 10 under the drive of the driving module 40. It can be seen that under the action of the driving module 40, the position of the second optical path through hole H2 is variable.

[0050] The peripheral wall of the housing 10 is provided with a first optical path through hole H1, and the position of the first optical path through hole H1 is fixed and is oriented towards the molten pool P. It should be understood that when the second optical path through hole H2 rotates to communicate with the first optical path through hole H1, the light formed by the solution in the molten pool P can be acquired by the image temperature acquisition module 20 after passing through the first optical path through hole H1 and the second optical path through hole H2, so that the image temperature acquisition module 20 can acquire the solution image data and solution temperature in the molten pool P.

[0051] As can be seen from the above, under the action of the driving module 40, the second optical path through hole H2 and the first optical path through hole H1 are not always in a communicating state, but continuously switch between a communicating state and a blocking state, and the two switch states at a certain frequency.

[0052] In this way, the intense light formed by the solution in the molten pool P is prevented from continuously irradiating the image temperature acquisition module 20, and the heat and steam formed by heating the solution can be blocked from entering the cavity R, so as to reduce the risk of damage to the sensing element in the image temperature acquisition module 20, improve the service life of the entire observation device 100, and ensure the accuracy of the data collected by the image temperature acquisition module 20.

[0053] In the illustrated embodiment, the optical path on-off roller 30 adopts a hollow roller, and the second optical path through-hole H2 is a through-hole penetrating the opposite side walls, ensuring that light can pass through and reach the image temperature acquisition module 20. The use of a hollow structure means that the momentum required for starting and stopping is relatively small and is easier to control.

[0054] In an alternative embodiment, when the second optical path through-hole H2 and the first optical path through-hole H1 are in a communicating state, the projection of the first optical path through-hole H1 on the optical path at least covers the second optical path through-hole H2.

[0055] In other words, the opening size of the first optical path through-hole H1 is not less than the opening size of the second optical path through-hole H2. In the illustrated embodiment, the opening size of the first optical path through-hole H1 is larger than the opening size of the second optical path through-hole H2. In this way, in the communicating state, along the optical path direction, the projection of the first optical path through-hole H1 can completely cover the second optical path through-hole H2.

[0056] In another alternative embodiment, when the second optical path through-hole H2 and the first optical path through-hole H1 are in a communicating state, the projection of the second optical path through-hole H2 on the optical path at least covers the first optical path through-hole H1.

[0057] In other words, the opening size of the first optical path through-hole H1 is not greater than the opening size of the second optical path through-hole H2. Preferably, the opening size of the first optical path through-hole H1 is smaller than the opening size of the second optical path through-hole H2. In this way, in the communicating state, along the optical path direction, the projection of the second optical path through-hole H2 can completely cover the first optical path through-hole H1.

[0058] It should be understood that for the first optical path through-hole H2 and the first optical path through-hole H1, the one with the smaller opening size determines the duration of the optical path on and off. The opening size of the first optical path through-hole H1 can be set to be larger than the opening size of the second optical path through-hole H2, or the opening size of the second optical path through-hole H2 can be set to be larger than the opening size of the first optical path through-hole H1, or even the opening sizes of the first optical path through-hole H1 and the second optical path through-hole H2 can be set to be the same, which can be designed according to requirements.

[0059] In some alternative embodiments, the optical path on-off roller 30 includes a roller body 31, a first rotating shaft 32, and a second rotating shaft 33. The first rotating shaft 32 and the second rotating shaft 33 are respectively disposed at two axial ends of the roller body 31 and connected to the housing 10, and the first rotating shaft 32 extends out of the housing 10.

[0060] In this embodiment, the optical path on-off roller 30 is composed of a roller body 31, a first rotating shaft 32, and a second rotating shaft 33. The rotating shafts at two axial ends of the optical path on-off roller 30 are rotationally connected to the housing 10, wherein the first rotating shaft 32 extends out of the housing 10 for cooperating with the driving module 40.

[0061] That is, the optical path on-off roller 30 adopts a double-axis rotational connection, which can obtain better support and ensure connection reliability and rotational stability. Of course, it is not limited thereto, and the optical path on-off roller 30 can also adopt, for example, a single-axis rotational connection.

[0062] In specific applications, in order to ensure the rotational stability of the optical path on-off roller 30, a first bearing 11 and a second bearing 12 are provided on opposite side walls of the housing 10 to correspondingly cooperate with the first rotating shaft 32 and the second rotating shaft 33.

[0063] In a further alternative embodiment, the driving module 40 includes a power unit 41 and a transmission mechanism 42, and the power unit 41 is connected to the first rotating shaft 32 through the transmission mechanism 42.

[0064] In this embodiment, the driving module 40 is composed of a power unit 41 and a transmission mechanism 42. The power unit 41 provides a driving force to drive the first rotating shaft 32 to rotate through the transmission mechanism 42, and then the optical path on-off roller 30 rotates.

[0065] In the illustrated embodiment, the power unit 41 is a motor, and the transmission mechanism 42 is a synchronous belt. It should be understood that corresponding driving pulleys and driven pulleys are fixedly installed on the output shaft of the power unit 41 and the first rotating shaft 32, respectively, and different speed ratios can be formed. It can be understood that the rotational speed of the motor is generally relatively fast, and the speed reduction purpose can be achieved by setting the speed ratio between the driving pulley and the driven pulley.

[0066] Of course, the transmission mechanism 42 is not limited to the synchronous belt. For example, it can also be a gear transmission mechanism, a worm and worm gear transmission mechanism, etc., which can be designed according to requirements.

[0067] In some alternative embodiments, the observation device 100 further includes a transparent plate 50. The transparent plate 50 is disposed in the cavity R and divides the cavity R into a first cavity R1 and a second cavity R2 in the optical path direction. The optical path on-off roller 30 is located in the first cavity R1, and the image temperature acquisition module 20 is located in the second cavity R2.

[0068] In this embodiment, a transparent plate 50 is further accommodated in the cavity R. The transparent plate 50 allows light to pass through and divides the cavity R into a first cavity R1 and a second cavity R2. In this way, when the cavity R is divided into the first cavity R1 and the second cavity R2, the vapor formed by the solution in the molten pool P can enter at most only into the first cavity R1.

[0069] In other words, the hot vapor can at most only form a coating on the transparent plate 50, thus preventing the vapor from entering the second cavity R2 to damage the image temperature acquisition module 20.

[0070] In specific applications, the transparent plate 50 can be, for example, a highly transparent glass plate, a transparent plastic plate, an optical lens, etc. In actual use, it is inevitable that a coating will form on the transparent plate 50. To ensure the accuracy of the collected data, the transparent plate 50 can be used as a consumable and replaced regularly.

[0071] Figure 4 It is a block diagram of a molten pool control system provided according to one embodiment of the present application. Please refer to Figure 4 . This molten pool control system further includes a processing module 200 and an execution module 300.

[0072] The processing module 200 is connected to the execution module 300 and the image temperature acquisition module 20 in the observation device 100, and controls the execution module 300 to adjust the state of the solution in the molten pool P according to the solution image data and the solution temperature.

[0073] In this embodiment, the processing module 200 is respectively connected to the execution module 300 and the image temperature acquisition module 20. The image temperature acquisition module 20 can send the solution image data and the solution temperature it obtains to the processing module 200. The processing module 200 can analyze and process this information and issue corresponding control instructions to let the execution module 300 perform corresponding actions to achieve the purpose of controlling the state of the solution in the molten pool P.

[0074] In some alternative embodiments, the image temperature acquisition module 20 includes an image acquisition unit 21 and a temperature acquisition unit 22. The image acquisition unit 21 is used to acquire the solution image data in the molten pool P, and the temperature acquisition unit 22 is used to acquire the solution temperature in the molten pool P.

[0075] In specific applications, the image acquisition unit 21 can be an industrial camera, including, for example, a CCD camera, a CMOS camera, etc. The temperature acquisition unit 22 can be a non-contact temperature sensor, including, for example, an infrared temperature probe, etc. Of course, the image temperature acquisition module 20 can also be a camera integrated with an infrared detection function.

[0076] In some alternative embodiments, the processing module 200 includes a host computer unit 201 and a slave computer unit 202, and the host computer unit 201 and the slave computer unit 202 are communicatively connected.

[0077] In this embodiment, the host computer unit 201 is connected to the image temperature acquisition module 20, and the slave computer unit 202 is connected to the execution module 300. That is, the host computer unit 201 analyzes and processes the data sent by the image temperature acquisition module 20, and forms corresponding instructions to send to the slave computer unit 202, so that the slave computer unit 202 sends commands to control the execution module 300 to perform operations.

[0078] In a specific application, the host computer unit 201 can be, for example, a personal computer, an industrial control computer, etc. The slave computer unit 202 can be, for example, a programmable logic controller (PLC), an embedded controller, etc. In actual use, the host computer unit 201 is an industrial control computer, and the slave computer unit 202 is a programmable logic controller. This molten pool control system is a distributed control system built based on PLC.

[0079] In some alternative embodiments, the execution module 300 includes an evaporation boat power adjustment unit 301, a wire feeding speed adjustment unit 302, and a wire feeding angle adjustment unit 303.

[0080] The evaporation boat power adjustment unit 301 is used to adjust the heating power of the evaporation boat structure 60, the wire feeding speed adjustment unit 302 is used to adjust the wire feeding speed of the fuse wire, and the wire feeding angle adjustment unit 303 is used to adjust the wire feeding pitch angle of the fuse wire.

[0081] It should be noted that the evaporation boat structure 60 generally uses electric heating. The evaporation boat power adjustment unit 301 is mainly used to control the heating power of the evaporation boat structure 60. Specifically, the current passing through the evaporation boat structure 60 can be adjusted to achieve the control of the heating power.

[0082] The evaporation boat structure 60 heats the fuse wire to form a solution in the molten pool P, and continuously heats the solution in the molten pool P to form steam, thereby realizing evaporation coating. The transportation of the fuse wire is generally carried out through a transmission device with a motor as the power source. By controlling the operation of the motor in the transmission device, the wire feeding speed can be controlled. Therefore, the wire feeding speed adjustment unit 302 mainly refers to the power device unit in the transmission device for transporting the fuse wire.

[0083] The position of the fuse wire in the molten pool P is mainly achieved by adjusting the pitch angle of the fuse wire. The control of the pitch angle of the fuse wire is generally achieved through a pitch adjustment device with a motor as the power source. By controlling the operation of the motor in the pitch adjustment device, the pitch angle of the fuse wire can be controlled. Therefore, the wire feeding angle adjustment unit 303 mainly refers to the power device unit in the pitch adjustment device for adjusting the pitch angle of the fuse wire.

[0084] In a further optional embodiment, the evaporation boat structure 60 includes an evaporation boat body 61, an anode plate 62, and a cathode plate 63. The molten pool P is located in the evaporation boat body 61 and extends along the length direction of the evaporation boat body 61. The anode plate 62 and the cathode plate 63 are respectively disposed at both ends of the evaporation boat body 61 in the length direction.

[0085] In this embodiment, the evaporation boat structure 60 at least includes an evaporation boat body 61, an anode plate 62, and a cathode plate 63. The anode plate 62 and the cathode plate 63 are respectively connected to the two ends of the evaporation boat body 61 correspondingly. Here, the two electrode plates are used to connect to a power supply device, and the power supply device supplies power to the evaporation boat body 61 through the two electrode plates, thereby heating the evaporation boat body 61.

[0086] It can be understood that the evaporation boat power adjustment unit 301 is mainly used to adjust the current provided by the power supply device, thereby achieving the purpose of adjusting the heating power.

[0087] It should be noted that the evaporation boat body 61 is made of a high-resistance metal material and has an ultra-high melting point, excellent corrosion resistance, and dimensional stability, including, for example, evaporation boats made of tungsten, molybdenum, molybdenum lanthanum (ML), molybdenum yttrium oxide (MY), or tantalum.

[0088] In a further optional embodiment, the molten pool control system further includes a first baffle 71 and a second baffle 72. The first baffle 71 is connected to the anode plate 62 and is provided with at least one fuse through hole H4, and the second baffle 72 is connected to the cathode plate 63 and is provided with at least one third light path through hole H3.

[0089] The first baffle 71 and the second baffle 72 are used to block the droplets splashing out from the molten pool P, and the fuse through hole H4 is used to allow the fuse to pass through to form a solution in the molten pool P.

[0090] The observation device 100 is located on the side of the second baffle 72 away from the molten pool P, and the first light path through hole H1 is arranged facing the third light path through hole H3.

[0091] In this embodiment, the molten pool control system further includes baffles, specifically the first baffle 71 and the second baffle 72. The first baffle 71 is fixedly installed on the anode plate 62, and the second baffle 72 is fixedly installed on the cathode plate 63. The first baffle 71 and the second baffle 72 are used to prevent the solution in the molten pool P from splashing out due to boiling, which may damage the material to be evaporated and the surrounding components.

[0092] The first baffle 71 is provided with at least one fuse via hole H4 for allowing the fuse to pass through and reach the molten pool P, where it melts to form a solution. The second baffle 72 is provided with at least one third light path via hole H3, and the first light path via hole H1 is arranged facing the third light path via hole H3. Thus, when the first light path via hole H1 and the second light path via hole H2 are in a communicating state, the state of the solution in the molten pool P can be observed via the third light path via hole H3.

[0093] In a specific application, both the baffle and the electrode plate are internally provided with a cooling circulation water path. Although the temperature of the evaporation boat body 61 is relatively high, the temperatures of the surrounding components of the evaporation boat body 61 are not high. The cooling circulation water path is used to cool down to reduce the influence of thermal radiation on the observation device 100.

[0094] In a further optional embodiment, the number of evaporation boat structures 60 is multiple, and the multiple evaporation boat structures 60 are arranged side by side in the width direction of the evaporation boat body 61.

[0095] The number of the observation devices 100, the number of the third light path via holes H3, and the number of the fuse via holes H4 are equal to the number of the evaporation boat structures 60, and each observation device 100, each third light path via hole H3, and each fuse via hole H4 are arranged in alignment in the width direction of the evaporation boat body 61.

[0096] In this embodiment, the number of the evaporation boat structures 60 can be multiple and arranged side by side in its width direction. In order to ensure that each evaporation boat structure 60 device can correspond to and match an observation device 100, a transmission device for conveying the fuse, and a pitch adjustment device for adjusting the pitch angle of the fuse.

[0097] The number of the observation devices 100, the number of the third light path via holes H3, the number of the fuse via holes H4, and the number of the evaporation boat structures 60 are equal and arranged in one-to-one alignment.

[0098] In Figure 1 In the illustrated embodiment, the number of the observation devices 100, the number of the third light path via holes H3, and the number of the fuse via holes H4 are all 3 and arranged in one-to-one alignment with the number of the evaporation boat structures 60. Of course, it is not limited to the illustrated embodiment, and the number can be adjusted adaptively according to the width of the material to be evaporated.

[0099] It should be noted that the observation device 100 is not limited to being applied in the molten pool control system, and can also be applied to similar working conditions with strong light and high temperature.

[0100] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present application. Those skilled in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present application.

Claims

1. An observation device, characterized in that: include: A housing (10) having a cavity (R) formed therein and provided with a first light path hole (H1) communicating with the cavity (R); An image temperature acquisition module (20) is arranged in the housing (10) and is disposed toward the first light path hole (H1); an optical path on-off rotating roller (30), at least partially disposed in the cavity (R) and rotatably connected to the housing (10), the optical path on-off rotating roller (30) being provided with a second optical path through hole (H2) and being close to the first optical path through hole (H1) relative to the image temperature acquisition module (20); as well as A driving module (40) is arranged outside the housing (10) and connected to the light path on-off rotating roller (30) to rotate the light path on-off rotating roller (30) so that the second light path through hole (H2) is connected to or isolated from the first light path through hole (H1).

2. The observation device according to claim 1, characterized in that When the second light path hole (H2) is in a connected state with the first light path hole (H1), a projection of the first light path hole (H1) on the light path at least covers the second light path hole (H2); or When the second light path via hole (H2) is in a connected state with the first light path via hole (H1), a projection of the second light path via hole (H2) on the light path at least covers the first light path via hole (H1).

3. The observation device according to claim 1, characterized in that The optical path on-off rotating roller (30) comprises a rotating roller body (31), a first rotating shaft (32) and a second rotating shaft (33); The first rotating shaft (32) and the second rotating shaft (33) are respectively arranged at two axial ends of the roller body (31) and connected to the shell (10); the first rotating shaft (32) extends out of the shell (10).

4. The observation device according to claim 3, characterized in that The driving module (40) comprises a power unit (41) and a transmission mechanism (42); the power unit (41) is connected to the first rotating shaft (32) via the transmission mechanism (42).

5. The observation device according to any one of claims 1 to 4, characterized in that: It also includes a transparent plate (50), wherein the transparent plate (50) is disposed in the cavity (R) and divides the cavity (R) into a first cavity (R1) and a second cavity (R2) in the direction of the light path; The optical path on-off roller (30) is located in the first cavity (R1), and the image temperature acquisition module (20) is located in the second cavity (R2).

6. A molten pool control system, characterized in that: comprising at least one evaporation boat structure (60) and at least one observation device (100) according to any one of claims 1 to 5; The evaporation boat structure (60) is provided with a molten pool (P), and the observation device (100) is located above one side in the length direction of the evaporation boat structure (60); The first light path via hole (H1) is arranged toward the molten pool (P), and when the second light path via hole (H2) is connected to the first light path via hole (H1), the image temperature acquisition module (20) can acquire solution image data and solution temperature in the molten pool (P).

7. The molten pool control system according to claim 6, characterized in that: The evaporation boat structure (60) comprises an evaporation boat body (61), an anode plate (62) and a cathode plate (63); The molten pool (P) is located in the evaporation boat body (61) and extends along the length direction of the evaporation boat body (61); The anode plate (62) and the cathode plate (63) are respectively arranged at two ends of the evaporation boat body (61) in the length direction.

8. The molten pool control system according to claim 7, characterized in that: It also includes a first baffle (71) and a second baffle (72); The first baffle (71) is connected to the anode plate (62) and is provided with at least one fuse via hole (H4); the second baffle (72) is connected to the cathode plate (63) and is provided with at least one third light path via hole (H3); The first baffle (71) and the second baffle (72) are used to shield droplets splashing out of the molten pool (P), and the fuse via hole (H4) is used to allow the fuse to pass through to form a solution in the molten pool (P); The observation device (100) is located on a side of the second baffle (72) away from the molten pool (P), and the first light path hole (H1) is arranged toward the third light path hole (H3).

9. The molten pool control system according to claim 8, characterized in that: There are a plurality of evaporation boat structures (60), and the plurality of evaporation boat structures (60) are arranged side by side in the width direction of the evaporation boat body (61); The number of the observation devices (100), the number of the third light path through holes (H3), and the number of the fuse through holes (H4) are equal to the number of the evaporation boat structure (60), and each of the observation devices (100), each of the third light path through holes (H3), and each of the fuse through holes (H4) are aligned in the width direction of the evaporation boat body (61).

10. The molten pool control system according to any one of claims 6 to 9, characterized in that: It also includes a processing module (200) and an execution module (300); The processing module (200) is connected to the execution module (300) and the image temperature acquisition module (20) in the observation device (100), and controls the execution module (300) to adjust the solution state in the molten pool (P) according to the solution image data and the solution temperature.

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