Bias voltage sample table device with electromagnetic shielding groove

Abstract

The utility model discloses a bias sample table device with an electromagnetic shielding groove, which relates to the technical field of microwave plasma chemical vapor deposition and comprises a base table, a ceramic tube arranged in the sample table, a sliding sleeve mounted in the ceramic tube, a fastening screw arranged at the bottom of the sliding sleeve, a reset spring arranged in the sliding sleeve and a piston column arranged on the reset spring. A guide wire is arranged at the bottom of the sliding sleeve and sleeved with a guide wire protection sleeve. A limiting pin is movably installed on the piston column. A driving rod is movably installed in the piston column. A winding disc is fixedly installed at the lower end of the driving rod and provided with a steel wire rope. According to the bias voltage sample table device with the electromagnetic shielding groove, the piston column can abut against the bottom of the groove molybdenum table, a bias voltage power source is applied to the groove molybdenum table, a user can conveniently replace an aged reset spring, and it is guaranteed that the piston column can stably abut against the bottom of the groove molybdenum table.

Description

Technical Field

[0001] The utility model relates to the technical field of microwave plasma chemical vapor deposition, and particularly relates to a bias sample stage device with an electromagnetic shielding groove. Background Art

[0002] Microwave plasma chemical vapor deposition (MPCVD) technology is an advanced material preparation method that uses microwave energy to excite gas molecules to form plasma, and then decomposes carbon-containing gases under high temperature and high pressure conditions and deposits them on a substrate to form diamond films or crystals. By precisely controlling the reaction conditions, this technology can efficiently and high-quality grow a uniform and dense diamond layer, with advantages such as fast growth rate, high purity, and good crystal morphology.

[0003] The diamond surface produced by existing MPCVD equipment is coarse and not delicate. The main reason is that the nucleation density is small at the beginning of growth. Therefore, a bias power supply needs to be applied to diamond nucleation. The existing bias power supply application device cannot ensure that the bias power supply is stably applied to diamond nucleation. Therefore, a bias sample stage device with an electromagnetic shielding groove is proposed. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a bias sample stage device with an electromagnetic shielding groove to solve the problems raised in the prior art.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A bias sample stage device with an electromagnetic shielding groove, including a base, a sample stage is arranged inside the base, a sample stage rod is arranged at the bottom of the sample stage, a grooved molybdenum stage is arranged at the upper end of the sample stage, a molybdenum disk is arranged above the grooved molybdenum stage, a ceramic sheet is arranged below the grooved molybdenum stage, a ceramic tube is arranged inside the sample stage, a sliding sleeve is installed inside the ceramic tube, a fastening screw is arranged at the bottom of the sliding sleeve, a return spring is arranged inside the sliding sleeve, a piston rod is arranged on the return spring, a wire is arranged at the bottom of the sliding sleeve, a wire protection sleeve is sleeved on the wire, a limit pin is movably installed on the piston rod, a driving rod is movably installed inside the piston rod, a winding disc is fixedly installed at the lower end of the driving rod, a steel wire rope is arranged on the winding disc, a spring seat is fixedly installed on the limit pin, and a limit spring is arranged on one side of the spring seat, and the limit spring provides elastic force for the spring seat.

[0006] Preferably, a moving hole is opened on the piston rod, and the driving rod is movably installed inside the piston rod through the moving hole, and the driving rod can rotate inside the piston rod.

[0007] Preferably, a moving groove is opened inside the piston rod, and the spring seat is movably installed inside the piston rod through the moving groove, and the spring seat can drive the limit pin to move.

[0008] Preferably, the limit pin is movably mounted on the piston rod through a spring seat. One end of the limit spring is connected to the spring seat, and the other end of the limit spring is connected to the movable groove. The winding disc is movably mounted in the piston rod through a driving rod. One end of the steel wire rope is fixed on the winding disc, and the other end of the steel wire rope is fixed on the spring seat. The steel wire rope can pull the spring seats closer to each other.

[0009] Preferably, a first molybdenum ring is provided outside the groove molybdenum table, a second molybdenum ring is sleeved outside the first molybdenum ring, a first water cooling cavity is provided on the base, a second water cooling cavity is provided on the sample table, and a shielding groove is provided at the edge of the sample table. The first water cooling cavity can cool the base, and the second water cooling cavity can cool the sample table.

[0010] Preferably, a sealing ring is provided between the sample table and the sample table rod, and the sealing ring can prevent the second water cooling cavity from leaking water.

[0011] Preferably, the sliding sleeve is installed in the sample table through a ceramic tube, the piston rod is movably installed on the sample table through the sliding sleeve, through holes are provided on the ceramic sheet, the upper end of the piston rod passes through the ceramic sheet through the through holes, and the upper end of the piston rod abuts against the bottom of the groove molybdenum table. The limit pin can limit the upward movement of the piston rod.

[0012] Compared with the prior art, the beneficial effects of the present utility model are:

[0013] 1. In this application, the molybdenum disc is placed in the groove of the groove molybdenum table. The groove molybdenum table and the sample table are separated by a ceramic sheet to play an insulating role. The return spring will provide elastic force for the piston rod, so that it moves upward and abuts against the bottom of the groove molybdenum table. The wire is fixed on the sliding sleeve through a fastening screw, and both the sliding sleeve and the piston rod are made of conductive materials, so as to apply a bias voltage to the groove molybdenum table through the wire, and increase the nucleation density during the diamond nucleation process.

[0014] 2. In this application, a screwdriver can be used to rotate the driving rod. After rotating the driving rod, it will drive the winding disc to rotate. After the winding disc rotates, it will wind up the steel wire rope, thereby driving the spring seats closer to each other, so that the limit pin retracts into the piston rod. After the limit pin retracts into the piston rod, the piston rod in the sliding sleeve can be taken out, which is convenient for the user to replace the old spring with a new spring, and ensures that the piston rod can stably abut against the bottom of the groove molybdenum table. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is the overall structural schematic diagram of the present utility model;

[0016] Figure 2 is the present utility model Figure 1 the enlarged view of part A in;

[0017] Figure 3Schematic diagram of the assembly of the piston column and the sliding sleeve of the present utility model;

[0018] Figure 4 Cross-sectional view of the sliding sleeve of the present utility model;

[0019] Figure 5 Cross-sectional view of the piston column of the present utility model.

[0020] Reference numerals in the figure: 1, molybdenum disc; 2, grooved molybdenum platform; 3, ceramic sheet; 4, piston column; 401, movable hole; 5, sliding sleeve; 6, first molybdenum ring; 7, second molybdenum ring; 8, return spring; 9, ceramic tube; 10, wire; 11, wire protection sleeve; 12, first water-cooling cavity; 13, base; 14, shielding groove; 15, second water-cooling cavity; 16, sample stage rod; 17, sample stage; 18, sealing ring; 19, limit pin; 191, driving rod; 192, spring seat; 193, limit spring; 194, winding disc; 195, steel wire rope; 20, fastening screw. Detailed implementation manners

[0021] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0022] As Figure 1 and Figure 2 shown, the present utility model provides a technical solution for a biased sample stage device with an electromagnetic shielding groove, including a base 13. A sample stage 17 is provided inside the base 13. A sample stage rod 16 is provided at the bottom of the sample stage 17. A grooved molybdenum platform 2 is provided at the upper end of the sample stage 17. A molybdenum disc 1 is provided above the grooved molybdenum platform 2. A ceramic sheet 3 is provided below the grooved molybdenum platform 2. A first molybdenum ring 6 is provided outside the grooved molybdenum platform 2. A second molybdenum ring 7 is sleeved outside the first molybdenum ring 6. A first water-cooling cavity 12 is opened on the base 13. A second water-cooling cavity 15 is opened on the sample stage 17. A shielding groove 14 is opened at the edge of the sample stage 17. A sealing ring 18 is provided between the sample stage 17 and the sample stage rod 16. The shielding groove 14 on the sample stage 17 can prevent microwaves from being fed into the ceramic sheet 3. The first water-cooling cavity 12 can cool the base 13. The second water-cooling cavity 15 can cool the sample stage 17. The ceramic sheet 3 can prevent the short circuit of the bias power supply.

[0023] As Figure 1 , Figure 2 and Figure 3As shown in the figure, a ceramic tube 9 is provided inside the sample stage 17. A sliding sleeve 5 is installed inside the ceramic tube 9. A fastening screw 20 is provided at the bottom of the sliding sleeve 5. A return spring 8 is provided inside the sliding sleeve 5. A piston rod 4 is provided on the return spring 8. A wire 10 is provided at the bottom of the sliding sleeve 5. A wire protection sleeve 11 is sleeved on the wire 10. A limit pin 19 is movably installed on the piston rod 4. A through hole is provided on the ceramic sheet 3. The upper end of the piston rod 4 passes through the ceramic sheet 3 through the through hole, and the upper end of the piston rod 4 abuts against the bottom of the groove molybdenum table 2.

[0024] Specifically, the molybdenum disc 1 is placed in the groove of the groove molybdenum table 2. The groove molybdenum table 2 and the sample stage 17 are separated by the ceramic sheet 3 to play an insulating role. The return spring 8 will provide elastic force for the piston rod 4 to make it move upward and abut against the bottom of the groove molybdenum table 2. The wire 10 is fixed on the sliding sleeve 5 through the fastening screw 20. Both the sliding sleeve 5 and the piston rod 4 are made of conductive materials, so that a bias voltage is applied to the groove molybdenum table 2 by using the wire 10 to increase the nucleation density during the diamond nucleation process.

[0025] As Figure 3 , Figure 4 and Figure 5 shown in the figure, a drive rod 191 is movably installed inside the piston rod 4. A winding disc 194 is fixedly installed at the lower end of the drive rod 191. A steel wire rope 195 is provided on the winding disc 194. A spring seat 192 is fixedly installed on the limit pin 19. A limit spring 193 is provided on one side of the spring seat 192. An activity hole 401 is provided on the piston rod 4. The drive rod 191 is movably installed inside the piston rod 4 through the activity hole 401.

[0026] Specifically, a screwdriver can be used to rotate the drive rod 191. After rotating the drive rod 191, it will drive the winding disc 194 to rotate. After the winding disc 194 rotates, it will wind the steel wire rope 195, thereby driving the spring seats 192 to approach each other, so that the limit pin 19 contracts into the piston rod 4. After the limit pin 19 contracts into the piston rod 4, the piston rod 4 inside the sliding sleeve 5 can be taken out, which is convenient for the user to take out the old spring and replace it with a new spring, ensuring that the piston rod 4 can stably abut against the bottom of the groove molybdenum table 2.

[0027] Working principle: When in use, first place the sample into the molybdenum disk 1, and then place the grooved molybdenum table 2 together with the molybdenum disk 1 above the ceramic sheet 3. After the grooved molybdenum table 2 together with the molybdenum disk 1 is placed above the ceramic sheet 3, the return spring 8 will push the piston rod 4 to move upward, causing the piston rod 4 to abut against the bottom of the grooved molybdenum table 2. Both the sliding sleeve 5 and the piston rod 4 are made of conductive materials, so that a bias voltage is applied to the grooved molybdenum table 2 by using the wire 10 to increase the nucleation density during the diamond nucleation process. During the use process, the return spring 8 will be reciprocally compressed. After long-term use, the return spring 8 will age and its elasticity will weaken. After the elasticity of the return spring 8 weakens, a screwdriver can be connected to the groove at the upper end of the driving rod 191, and then the driving rod 191 is rotated by using the screwdriver. After the driving rod 191 is rotated, it will drive the winding disc 194 to rotate. After the winding disc 194 rotates, it will wind up the steel wire rope 195. After the steel wire rope 195 is wound up, it will drive the spring seats 192 to approach each other. After the spring seats 192 approach each other, the limit pin 19 will contract into the piston rod 4. After the limit pin 19 contracts into the piston rod 4, the piston rod 4 in the sliding sleeve 5 can be taken out. After the piston rod 4 in the sliding sleeve 5 is taken out, the old spring can be taken out and a new spring can be replaced to ensure that the piston rod 4 can stably abut against the bottom of the grooved molybdenum table 2.

[0028] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above-described exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present utility model. Any reference signs in the claims should not be regarded as limiting the claimed rights.

Claims

1. A biased sample stage device with an electromagnetic shielding slot, comprising a base (13), a sample stage (17) being arranged inside the base (13), and a sample stage rod (16) being arranged at the bottom of the sample stage (17), characterized in that: The upper end of the sample table (17) is provided with a grooved molybdenum table (2), a molybdenum plate (1) is provided above the grooved molybdenum table (2), a ceramic sheet (3) is provided below the grooved molybdenum table (2), a ceramic tube (9) is provided inside the sample table (17), a sliding sleeve (5) is installed inside the ceramic tube (9), a fastening screw (20) is provided at the bottom of the sliding sleeve (5), a return spring (8) is provided inside the sliding sleeve (5), a piston column (4) is provided on the return spring (8), and a wire is provided at the bottom of the sliding sleeve (5). (10), a wire protection sleeve (11) is sleeved on the wire (10), a limit pin (19) is movably installed on the piston column (4), a driving rod (191) is movably installed in the piston column (4), a winding disk (194) is fixedly installed at the lower end of the driving rod (191), a steel wire rope (195) is provided on the winding disk (194), a spring seat (192) is fixedly installed on the limit pin (19), and a limit spring (193) is provided on one side of the spring seat (192).

2. The biased sample stage device with electromagnetic shielding slot according to claim 1, characterized in that: The piston column (4) is provided with a movable hole (401), and the driving rod (191) is movably mounted in the piston column (4) through the movable hole (401).

3. The biased sample stage device with electromagnetic shielding slot according to claim 2, characterized in that: A movable groove is provided in the piston column (4), and the spring seat (192) is movably mounted in the piston column (4) through the movable groove.

4. The biased sample stage device with electromagnetic shielding slot according to claim 3, characterized in that: The limit pin (19) is movably mounted on the piston column (4) via a spring seat (192); one end of the limit spring (193) is connected to the spring seat (192); the other end of the limit spring (193) is connected to the movable groove; the winding disk (194) is movably mounted in the piston column (4) via a driving rod (191); one end of the steel wire rope (195) is fixed to the winding disk (194); the other end of the steel wire rope (195) is fixed to the spring seat (192).

5. The biased sample stage device with electromagnetic shielding slot according to claim 1, characterized in that: A molybdenum ring 1 (6) is provided on the outer side of the groove molybdenum platform (2), a molybdenum ring 2 (7) is sleeved on the outer side of the molybdenum ring 1 (6), a water cooling cavity 1 (12) is provided on the base platform (13), a water cooling cavity 2 (15) is provided on the sample platform (17), and a shielding groove (14) is provided at the edge of the sample platform (17).

6. The biased sample stage device with electromagnetic shielding slot according to claim 1, characterized in that: A sealing ring (18) is provided between the sample stage (17) and the sample stage rod (16).

7. The biased sample stage device with electromagnetic shielding slot according to claim 1, characterized in that: The sliding sleeve (5) is installed in the sample table (17) through the ceramic tube (9), and the piston column (4) is movably installed on the sample table (17) through the sliding sleeve (5). A through hole is opened on the ceramic sheet (3), and the upper end of the piston column (4) passes through the ceramic sheet (3) through the through hole, and the upper end of the piston column (4) abuts against the bottom of the grooved molybdenum table (2).

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