Upper furnace body with magnet lifting device and single crystal furnace

Abstract

The utility model provides an upper furnace body with a magnet lifting device and a single crystal furnace, and the upper furnace body with the magnet lifting device comprises an upper furnace barrel body, a lower furnace barrel body and a magnet lifting device, the magnet is sleeved on the outer side wall of the upper furnace barrel body in a lifting manner relative to the upper furnace barrel body; the lifting device is fixed to the outer side wall of the upper furnace barrel body and connected with the magnet so as to drive the magnet to ascend and descend in the axial direction relative to the upper furnace barrel body. The guide mechanism is arranged between the magnet and the outer side wall of the upper furnace barrel body and fixedly connected with the magnet and the outer side wall of the upper furnace barrel body so as to guide lifting of the magnet. The upper furnace body with the magnet lifting device, provided by the utility model, can be flexibly adjusted according to crystal pulling requirements under the conditions that the daily cleaning and maintenance of the single crystal furnace are not influenced and the safety of operators is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of Czochralski single crystal equipment, and particularly relates to an upper furnace body with a magnet lifting device and a single crystal furnace. Background Technique

[0002] During the growth of Czochralski single crystal silicon, controlling the oxygen content in the crystal is crucial for improving the quality of Czochralski single crystal silicon. Oxygen mainly comes from the chemical reaction between the silicon melt and the quartz crucible. The generated silicon monoxide will dissolve in the melt, increasing the oxygen content of the single crystal silicon. Traditional control methods include adjusting the internal structure of the thermal field, changing the temperature gradient of the thermal field, changing the crystal rotation and crucible rotation, adjusting the pressure of the protective gas, and increasing the size of the deflector tube. These methods can control the oxygen concentration in the single crystal silicon to a certain extent and improve the oxygen content quality of the crystal rod, but the controllable range is small and it is difficult to meet the market requirements.

[0003] With the continuous increase in the market share of N-type batteries, higher quality requirements are also put forward for single crystal silicon wafers. At present, by setting a magnetic field generating device (usually a magnet) on the single crystal furnace, the Lorentz force generated by the magnetic field can effectively inhibit the convection of the melt during the growth of Czochralski single crystal silicon, stabilize the temperature of the solid-liquid interface, and thus reduce the oxygen content in the crystal.

[0004] However, there are mainly two ways for the magnets on the existing single crystal furnaces. One is to install the magnet outside the furnace body of the single crystal furnace through the base of the single crystal furnace. When disassembling or cleaning the single crystal furnace, the magnet needs to be lowered below the furnace body, and the lifting amplitude is large. The lifting device installed on the base of the single crystal furnace is large in volume, complex in structure, occupies a lot of space, affects the cleaning of the pipelines below the furnace body of the single crystal furnace and the daily equipment maintenance. And due to the large lifting amplitude, it is difficult to ensure the stability and centering accuracy, and safety hazards are likely to occur. The other is to embed the magnet into the furnace body of the single crystal furnace. The problems with this method are that the cooling device required by the magnet consumes a large amount of energy and has a poor effect, and the position of the magnet is fixed and cannot be adjusted arbitrarily according to the crystal pulling requirements, and it cannot meet different crystal pulling requirements. Summary of the Utility Model

[0005] In view of this, the utility model provides an upper furnace body with a magnet lifting device and a single crystal furnace, which can be flexibly adjusted according to the crystal pulling requirements without affecting the daily cleaning and maintenance of the single crystal furnace and ensuring the safety of the operators.

[0006] To solve at least one of the above technical problems, the utility model adopts the following technical solutions:

[0007] The upper furnace body with a magnet lifting device according to the first aspect embodiment of the utility model, for a single crystal furnace, includes:

[0008] The upper furnace tube body, which is cylindrical;

[0009] A magnet is sleeved on the outer sidewall of the upper furnace barrel body in a vertically movable manner relative to the upper furnace barrel body.

[0010] A lifting device is fixed on the outer sidewall of the upper furnace barrel body and connected to the magnet to drive the magnet to move up and down axially relative to the upper furnace barrel body.

[0011] A guiding mechanism is arranged between the magnet and the outer sidewall of the upper furnace barrel body and is fixedly connected to the magnet and the outer sidewall of the upper furnace barrel body respectively to guide the lifting of the magnet.

[0012] Further, the magnet is an annular magnet, and the axis of the annular magnet coincides with the axis of the upper furnace barrel body.

[0013] Further, there are multiple lifting devices, and the multiple lifting devices are evenly distributed along the circumferential direction of the upper furnace barrel body.

[0014] There are multiple guiding mechanisms, and the multiple guiding mechanisms are evenly distributed along the circumferential direction of the outer sidewall of the upper furnace barrel body.

[0015] Further, the lifting device is located above the magnet, and the lifting device includes:

[0016] A servo motor is arranged on the top of the magnet.

[0017] A worm and worm gear reducer, the input end of which is connected to the output end of the servo motor.

[0018] A lifting screw rod is arranged vertically, and the lower end of the lifting screw rod is connected to the output end of the worm and worm gear reducer.

[0019] A fixing plate is arranged horizontally on the outer sidewall of the upper furnace barrel body, the fixing plate is located above the worm and worm gear reducer and close to the top of the upper furnace barrel body, and the fixing plate is threadedly connected to the upper end of the lifting screw rod.

[0020] Further, an encoder is arranged at the output end of each servo motor.

[0021] A grating is also arranged on the outer sidewall of the upper furnace barrel body, the grating is arranged vertically, and the grating is used to calibrate the position of the magnet.

[0022] Further, the guiding mechanism includes:

[0023] A linear guide rail is arranged vertically on the outer sidewall of the upper furnace barrel body.

[0024] A slider is fixedly connected to the inner sidewall of the magnet, and the slider is slidably connected to the linear guide rail.

[0025] Further, the upper furnace body with the magnet lifting device further includes:

[0026] A plurality of swing arm hooks are arranged at the upper end of the outer side wall of the upper furnace barrel body and are evenly distributed along the circumferential direction of the outer side wall of the upper furnace barrel body. The plurality of swing arm hooks are used to provide a grasping point for the swing arm manipulator claw.

[0027] Furthermore, the upper furnace body with the magnet lifting device further includes:

[0028] A support plate is arranged on the outer side wall of the upper furnace barrel body and is located below the magnet. The upper surface of the support plate is perpendicular to the axis of the upper furnace barrel body, and the upper surface of the support plate is used to support the bottom of the magnet.

[0029] Furthermore, the support plate is an arc-shaped flat plate. There are a plurality of support plates, and the plurality of support plates are evenly distributed along the circumferential direction of the outer side wall of the upper furnace barrel body. The outer side surface of the support plate is an arc surface and is coaxial with the upper furnace barrel body. The outer diameter of the support plate is greater than or equal to the outer diameter of the magnet.

[0030] The single crystal furnace according to the embodiment of the second aspect of the present invention includes:

[0031] An upper furnace body, which is the upper furnace body with the magnet lifting device according to any one of the above embodiments of the first aspect;

[0032] A lower furnace body, and the upper furnace body is used to be arranged on the lower furnace body;

[0033] A swing arm manipulator claw, which is used to move the upper furnace body away from the lower furnace body or place the upper furnace body on the lower furnace body.

[0034] At least one of the above technical solutions of the present invention has the following beneficial effects:

[0035] The upper furnace body with the magnet lifting device according to the embodiment of the present invention, which is used for a single crystal furnace, may include: an upper furnace barrel body, a magnet, a lifting device, and a guiding mechanism. Among them, the upper furnace barrel body is cylindrical, and the magnet is sleeved on the outer side wall of the upper furnace barrel body in a vertically movable manner relative to the upper furnace barrel body, and is used to generate a magnetic field to control the convection of the melt so as to reduce the oxygen content in the silicon single crystal. The lifting device is fixed on the outer side wall of the upper furnace barrel body and is connected to the magnet to drive the magnet to move up and down axially relative to the upper furnace barrel body. The lifting device can flexibly adjust the position of the magnet according to the specific requirements of crystal pulling. The guiding mechanism is arranged between the magnet and the outer side wall of the upper furnace barrel body and is fixedly connected to the magnet and the outer side wall of the upper furnace barrel body respectively to guide the lifting of the magnet, so as to ensure the stability and centering accuracy during the lifting of the magnet, improve the safety during the lifting process, and ensure the centering accuracy, that is, ensure the uniform magnetic field distribution, which is helpful for the stable growth conditions of the silicon single crystal.

[0036] Thus, in the present utility model, the magnet and the upper furnace barrel body are combined into a whole through the lifting device and the guiding mechanism. When it is necessary to unscrew the upper furnace body for the maintenance or cleaning of the single crystal furnace, the magnet can be unscrewed together with the upper furnace barrel body, without affecting the cleaning of the pipelines below the single crystal furnace body and the daily maintenance. Moreover, in the present utility model, by directly sleeving the magnet on the outer side wall of the upper furnace barrel body, the lifting device can adjust the height position of the magnet. On the one hand, the distance between the magnet and the melt is reduced, and thus the magnet can more effectively control the convection in the melt. The lifting device has a simple structure, occupies less space, and is convenient for the cleaning of the pipelines below the furnace body and the daily equipment maintenance. On the other hand, since the magnet is sleeved on the outer side wall of the upper furnace barrel instead of being arranged inside the upper furnace barrel, when a cooling device needs to be set to ensure the working temperature of the magnet, the energy consumption is low and the effect is good.

[0037] In addition, through the coordinated action of the lifting device and the guiding mechanism, the present utility model improves the safety, stability and centering accuracy during the lifting process of the magnet, can flexibly and precisely adjust the position of the magnet according to the crystal pulling requirements, ensures the uniform magnetic field distribution, helps to stabilize the growth conditions of the silicon single crystal, thereby more effectively suppressing the convection in the melt, reducing the oxygen content in the silicon single crystal, and improving the product quality. The structure of the present utility model is simple and compact, has a wide application range and low cost, and is suitable for large-scale popularization. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 Schematic structural diagram of the upper furnace body with a magnet lifting device according to an embodiment of the present utility model;

[0039] Figure 2 Schematic structural diagram of the upper furnace barrel body according to an embodiment of the present utility model;

[0040] Figure 3 Top view of the upper furnace body with a magnet lifting device according to an embodiment of the present utility model;

[0041] Figure 4 Full sectional view of the upper furnace body with a magnet lifting device according to an embodiment of the present utility model;

[0042] Figure 5 Partial sectional view of the upper furnace body with a magnet lifting device according to an embodiment of the present utility model;

[0043] Figure 6 Schematic diagram of the opening and closing of the single crystal furnace according to an embodiment of the present utility model.

[0044] Reference numerals: 1. Upper furnace barrel body;

[0045] 2. Magnet; 21. Magnetic field; 22. Magnetic field zero potential surface;

[0046] 3. Lifting device; 31. Servo motor; 32. Worm and worm gear reducer; 33. Lifting screw; 34. Fixed plate;

[0047] 4. Guide mechanism; 41. Linear guide rail; 42. Slide block;

[0048] 5. Grating;

[0049] 6. Rotary arm hook;

[0050] 7. Support plate;

[0051] 100. Upper furnace body; 200. Rotary arm manipulator claw; 300. Crucible; 400. Silicon melt; 500. Solid-liquid crystallization interface. Detailed implementation mode

[0052] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present utility model fall within the scope of protection of the present utility model.

[0053] Unless otherwise defined, the technical terms or scientific terms used in the present utility model should have the ordinary meanings understood by those of ordinary skill in the art to which the present utility model belongs. The "first", "second" and similar terms used in the present utility model do not denote any order, quantity or importance, but are only used to distinguish different components. Similarly, terms such as "a" or "one" do not denote a quantity limitation, but mean that there is at least one. The terms "connected" or "coupled" and the like are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms "upper", "lower", "left", "right" and the like are only used to represent relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship also changes accordingly.

[0054] Next, the upper furnace body with a magnet lifting device according to the first aspect embodiment of the present utility model will be specifically described with reference to the accompanying drawings.

[0055] Specifically, as Figures 1 to 6 shown, the upper furnace body with a magnet lifting device according to the first aspect embodiment of the present utility model, for a single crystal furnace, may include: an upper furnace tube body 1, a magnet 2, a lifting device 3 and a guide mechanism 4.

[0056] Among them, the upper furnace barrel body 1 is cylindrical. The magnet 2 is sleeved on the outer side wall of the upper furnace barrel body 1 in a liftable manner, and is used to generate a magnetic field 21 to control the convection of the silicon melt 400 so as to reduce the oxygen content in the single crystal silicon. The lifting device 3 is fixed on the outer side wall of the upper furnace barrel body 1 and is connected to the magnet 2 to drive the magnet 2 to lift axially relative to the upper furnace barrel body 1. The lifting device 3 can flexibly adjust the position of the magnet 2 according to the specific requirements of crystal pulling. The guiding mechanism 4 is arranged between the magnet 2 and the outer side wall of the upper furnace barrel body 1, and is fixedly connected to the magnet 2 and the outer side wall of the upper furnace barrel body 1 respectively to guide the lifting of the magnet 2, so as to ensure the stability and centering accuracy during the lifting of the magnet 2, improve the safety during the lifting process and ensure the centering accuracy, that is, ensure the uniform distribution of the magnetic field 21, which is helpful for the stable growth conditions of the single crystal silicon.

[0057] Specifically, as Figures 1 to 6 shown, in the present utility model, the magnet 2 and the upper furnace barrel body 1 are combined into a whole through the lifting device 3 and the guiding mechanism 4. When it is necessary to unscrew the upper furnace body 100 for the maintenance or cleaning of the single crystal furnace, the magnet 2 can be unscrewed together with the upper furnace barrel body 1, without affecting the cleaning of the pipeline below the single crystal furnace body and the daily maintenance. Moreover, in the present utility model, by directly sleeving the magnet 2 on the outer side wall of the upper furnace barrel body 1, the lifting device 3 can adjust the height position of the magnet 2. On the one hand, the distance between the magnet 2 and the silicon melt 400 is reduced, and thus the magnet 2 can more effectively control the convection in the silicon melt 400. The lifting device 3 has a simple structure, occupies less space, and is convenient for the cleaning of the pipeline below the furnace body and the daily equipment maintenance; on the other hand, since the magnet 2 is sleeved on the outer side wall of the upper furnace barrel instead of being arranged inside the upper furnace barrel, when a cooling device needs to be set to ensure the working temperature of the magnet, the energy consumption is low and the effect is good. In addition, the present utility model also improves the safety, stability and centering accuracy of the magnet 2 during the lifting process through the synergistic effect of the lifting device 3 and the guiding mechanism 4, can accurately adjust the position of the magnet 2 flexibly according to the requirements of crystal pulling, ensures the uniform distribution of the magnetic field, is helpful for the stable growth conditions of the single crystal silicon, thereby more effectively suppressing the convection in the silicon melt 400, reducing the oxygen content in the single crystal silicon, and improving the product quality. The structure of the present utility model is simple and compact, has a wide application range and low cost, and is suitable for large-scale popularization.

[0058] In some embodiments of the present utility model, as Figure 1 、 Figures 3 to 6As shown, the magnet 2 is an annular magnet, and the axis of the annular magnet coincides with the axis of the upper furnace barrel body 1. Specifically, the annular magnet can generate a more uniformly distributed magnetic field 21, which helps to control the convection in the silicon melt 400. The annular design enables it to closely surround the outside of the upper furnace barrel body 1, reducing the occupied space. Moreover, it can be made of lightweight materials, reducing the burden on the lifting device 3 and facilitating installation and maintenance. At the same time, the axis of the annular magnet coincides with the axis of the upper furnace body 100, which can better control the stability and centering accuracy during the lifting process of the magnet 2, improving safety and enhancing the effect of the magnetic field 21, thus contributing to improving the crystal growth quality.

[0059] In some other embodiments, the annular magnet can be a permanent magnet, an electromagnet or a superconducting magnet. The present application does not limit the type of the magnet 2, as long as it can generate a uniform magnetic field 21 to control the convection in the silicon melt 400. When the magnet 2 used is an electromagnet or a superconducting magnet and a cooling device needs to be provided to ensure the working temperature, compared with the prior art of arranging the magnet 2 inside the single crystal furnace, the energy consumption is low and the effect is good. Of course, the above is only an example. The present application has no special restrictions on the internal structure of the specific magnet 2 and the cooling device, which is not within the scope required by the present application, as long as the corresponding effects can be obtained. For example, commercially available permanent magnets, electromagnets or superconducting magnets can be directly used. Exemplarily, as Figure 4 shown, the annular magnet can form a hook-shaped magnetic field 21 in the silicon melt 400. By cooperating with the guiding mechanism 4 through the lifting device 3 to adjust the position of the magnet 2, the magnetic field zero potential surface 22 of the hook-shaped magnetic field 21 is made flush with the solid-liquid crystallization surface 500 of the silicon melt 400 in the crucible 300. Thus, the hook-shaped magnetic field 21 can effectively suppress the longitudinal thermal convection, transverse thermal convection and thermal convection in other directions of the silicon melt 400, so as to reduce the erosion of the silicon melt 400 on the crucible wall, reduce the impurity content in the silicon melt 400 and improve the quality of the ingot.

[0060] It should be supplemented here that, as Figure 4 shown, the hook-shaped magnetic field 21 of the present utility model is composed of a series of magnetic induction lines. The hook-shaped magnetic field (CUSP magnetic field) is a non-uniform magnetic field, and the distribution of the magnetic induction lines of the hook-shaped magnetic field 21 is axisymmetric, ensuring the axial and radial uniformity of the silicon single crystal. The longitudinal magnetic field (i.e., the magnetic field along the crystal pulling direction) of the hook-shaped magnetic field 21 on the crystal pulling surface (i.e., the solid-liquid crystallization surface 500) is basically zero, which will not interfere with the evaporation of oxygen, and at the same time can effectively suppress the thermal convection in the crucible 300, thereby improving the quality of the silicon single crystal.

[0061] In some embodiments of the present utility model, as Figures 1 to 6As shown, there are multiple lifting devices 3, and the multiple lifting devices 3 are evenly distributed along the circumferential direction of the upper furnace barrel body 1. There are multiple guiding mechanisms 4, and the multiple guiding mechanisms 4 are evenly distributed along the circumferential direction of the outer side wall of the upper furnace barrel body 1.

[0062] Exemplarily, as Figures 1 to 6 shown, both the lifting device 3 and the guiding mechanism 4 can be four. The four lifting devices 3 and the four guiding mechanisms 4 are both evenly distributed around the circumferential direction of the upper furnace barrel. Thereby, the stability, centering accuracy, and overall safety of the device during the lifting process are improved, and it is avoided that a single lifting device 3 or guiding mechanism 4 fails due to excessive load.

[0063] In some embodiments of the present invention, as Figures 1 to 6 shown, the lifting device 3 is located above the magnet 2. The lifting device 3 includes: a servo motor 31, a worm and worm gear reducer 32, a lifting screw 33, and a fixing plate 34. Among them, the servo motor 31 is arranged on the top of the magnet 2. The input end of the worm and worm gear reducer 32 is connected to the output end of the servo motor 31, and the worm and worm gear reducer 32 is used to reduce the speed and increase the torque. The lifting screw 33 is arranged in the vertical direction, and the lower end of the lifting screw 33 is connected to the output end of the worm and worm gear reducer 32. The fixing plate 34 is arranged in the horizontal direction on the outer side wall of the upper furnace barrel body 1. The fixing plate 34 is located above the worm and worm gear reducer 32 and close to the top of the upper furnace barrel body 1. The fixing plate 34 is threadedly connected to the upper end of the lifting screw 33, and the fixing plate 34 may be provided with a nut threadedly connected to the lifting screw 33.

[0064] That is to say, as Figures 1 to 6 shown, when it is necessary to adjust the height of the magnet 2, the servo motor 31 drives the lifting screw 33 to rotate through the worm and worm gear reducer 32. The lifting screw 33 is threadedly connected to the fixing plate 34 on the outside of the upper furnace barrel body 1, and the fixing plate 34 is fixed. Thus, as the lifting screw 33 rotates, the lifting screw 33 moves up and down relative to the fixing plate 34, converting the rotational motion into a linear up and down motion. At the same time, the lifting screw 33 drives the magnet 2 to move up and down along the guiding mechanism 4 together. Exemplarily, the lifting range of the magnet 2 is within 100 mm above and 100 mm below the set position to adjust the relative position between the magnetic field zero potential surface 22 and the solid-liquid crystallization surface 500 of the silicon melt 400, so as to better control the impurity content and uniformity at the solid-liquid crystallization surface 500. Regarding the set position, the set position can be equivalent to the zero position of the magnet 2, that is, the lifting device 3 can drive the magnet 2 to move 100 mm downward from the zero position, or can also drive the magnet 2 to move 100 mm upward from the zero position.

[0065] Thus, through the coordinated action of the servo motor 31, the worm and worm gear reducer 32, the lifting screw 33, the fixing plate 34, and the guiding mechanism 4, the stability of the magnet 2 during the lifting process is effectively ensured. The position of the magnet 2 can be flexibly adjusted according to the specific requirements of crystal pulling. The coordinated action of the fixing plate 34 and the guiding mechanism 4 reduces the sway of the magnet 2 during the lifting process, ensures the centering accuracy, and improves the safety of the device. The overall structure of the lifting device 3 is simple, easy to maintain, occupies less space, and does not affect the daily maintenance and cleaning of the single crystal furnace body.

[0066] In some embodiments of the present utility model, an encoder (not shown) is provided at the output end of each servo motor 31. The encoder is used to detect the rotation speed and speed of the servo motor 31, etc., to ensure that the lifting device 3 drives the magnet 2 to lift synchronously and smoothly. A grating 5 is also provided on the outer side wall of the upper furnace barrel body 1. The grating 5 is arranged in the vertical direction and is used to calibrate the position of the magnet 2. In some other embodiments, the lifting device 3 may further include a control system (not shown). The encoder detects the rotation speed and speed of the servo motor 31, etc., and converts the detection information into an electrical signal and feeds it back to the control system. The grating 5 calibrates the position of the magnet 2 and detects the signal and feeds it back to the control system, so as to accurately control the lifting position of the magnet 2. Thus, the synchronism and accuracy of the magnet 2 during the lifting process are ensured.

[0067] In some embodiments of the present utility model, as Figures 4 to 5 shown, the guiding mechanism 4 includes: a linear guide rail 41 and a slider 42. Among them, the linear guide rail 41 is arranged on the outer side wall of the upper furnace barrel body 1 in the vertical direction, and the slider 42 is fixedly connected to the inner side wall of the magnet 2, and the slider 42 is slidably connected to the linear guide rail 41. Exemplarily, there are multiple linear guide rails 41, and the multiple linear guide rails 41 are evenly distributed along the outer side of the upper furnace barrel body 1. Each linear guide rail 41 is slidably connected with a slider 42, and each slider 42 is respectively connected to the inner side wall of the magnet 2, so as to ensure the stability and centering accuracy of the magnet 2 during the lifting process. Thus, the magnet 2 moves up and down along the linear guide rail 41 through the slider 42, ensuring that the lifting device 3 drives the magnet 2 to lift smoothly in a straight line, improving the lifting stability and safety of the magnet 2, making the lifting movement of the magnet 2 more balanced and smooth, and having a simple structure and good effect.

[0068] In some embodiments of the present utility model, as Figures 1 to 3 shown, in combination with Figure 6 , the upper furnace body 100 with a magnet lifting device further includes: a plurality of swing hooks 6. The plurality of swing hooks 6 are arranged at the upper end of the outer side wall of the upper furnace barrel body 1 and are evenly distributed along the circumferential direction of the outer side wall of the upper furnace barrel body 1. The plurality of swing hooks 6 are used to provide a grasping point for the swing manipulator claw 200.

[0069] Exemplarily, as Figure 3As shown, in some embodiments, the number of the swing arm hooks 6 can be three. The three swing arm hooks 6 are arranged at the upper end of the outer side wall of the upper furnace barrel body 1 and are evenly distributed along the circumferential direction of the outer side wall of the upper furnace barrel body 1. The three swing arm hooks 6 are staggered from the multiple fixing plates 34 without interference. Correspondingly, the swing arm manipulator claw 200 can also be a three-claw swing arm manipulator. The three-claw swing arm manipulator corresponds to the three swing arm hooks 6 one by one, so as to suspend the upper furnace barrel body 1 to rotate to the furnace opening position or the furnace closing position during the cleaning and maintenance of the single crystal furnace. Therefore, the design of the swing arm hooks 6 makes the disassembly and assembly during the furnace disassembly or cleaning of the single crystal furnace convenient and fast. It only needs to use the swing arm manipulator claw 200 to grab the corresponding swing arm hook 6, reducing the cleaning and maintenance time.

[0070] In some embodiments of the present invention, such as Figure 2 and Figure 5 As shown, the upper furnace body 100 with the magnet lifting device further includes: a support plate 7. The support plate 7 is arranged on the outer side wall of the upper furnace barrel body 1 and is located below the magnet 2. The upper surface of the support plate 7 is perpendicular to the axis of the upper furnace barrel body 1. The upper surface of the support plate 7 is used to support the bottom of the magnet 2.

[0071] Specifically, in some embodiments, the distance between the upper end surface of the support plate 7 and the lower end surface of the set position of the magnet 2 during the lifting process can be 100 mm. The support plate 7 is used to position the lower limit position of the lifting movement of the magnet 2. At the same time, the support plate 7 is used to support the magnet 2 during installation and maintenance. The upper surface of the support plate 7 is perpendicular to the axis of the upper furnace barrel body 1, so that the magnet 2 is stably placed on the support plate 7.

[0072] In some embodiments of the present invention, such as Figure 2 and Figure 5 As shown, the support plate 7 is an arc-shaped flat plate. There are multiple support plates 7. The multiple support plates 7 are evenly distributed along the circumferential direction of the outer side wall of the upper furnace barrel body 1. The outer side surface of the support plate 7 is an arc surface and is coaxial with the upper furnace barrel body 1. The outer diameter of the support plate 7 is greater than or equal to the outer diameter of the magnet 2. That is to say, the multiple support plates 7 are evenly distributed along the circumferential direction of the outer side wall of the upper furnace barrel body 1, which can evenly distribute the weight of the magnet 2 to make its placement more stable, reduce shaking and offset. At the same time, the multiple support plates 7 are spaced apart, reducing materials and lowering costs. The outer diameter of the support plate 7 is greater than the inner diameter of the magnet 2, ensuring that the bottom of the magnet 2 is fully supported.

[0073] According to the single crystal furnace of the second aspect embodiment of the present invention, such as Figures 1 to 6As shown, it may include: an upper furnace body 100, a lower furnace body (not shown), and a swing arm manipulator gripper 200. The upper furnace body 100 is the upper furnace body 100 with a magnet lifting device according to any embodiment of the first aspect above. The upper furnace body 100 is configured to be arranged on the lower furnace body. The swing arm manipulator gripper 200 is used to move the upper furnace body 100 away from the lower furnace body or place the upper furnace body 100 on the lower furnace body.

[0074] That is to say, as Figures 1 to 6 shown, the upper furnace body 100 is the upper furnace body 100 with a magnet lifting device according to any embodiment of the first aspect. The magnet 2 sleeved outside the upper furnace body 100 can adjust its position through the lifting device 3 to meet different crystal pulling requirements. The guiding mechanism 4 further ensures the stability and centering accuracy of the magnet 2 during the lifting process. The lower furnace body is used to carry the upper furnace body 100 to form a complete single crystal furnace structure. The swing arm manipulator gripper 200 cooperates with the swing arm hook 6 to move the upper furnace body 100 away from the lower furnace body or place the upper furnace body 100 on the lower furnace body (as marked at A in the attachment Figure 6 is the furnace opening position, and B is the furnace closing position). For the single crystal furnace of the present invention, when it is necessary to swing open the upper furnace body 100 for single crystal furnace maintenance or cleaning, the magnet 2 can be swung open together with the upper furnace barrel body 1. It does not affect the cleaning and daily maintenance of the pipelines below the single crystal furnace body, can effectively inhibit the convection in the silicon melt 400, reduce the oxygen content in the silicon single crystal, and improve the product quality.

[0075] Based on the above embodiments of the present invention, without explicit negation or conflict, the technical features of one embodiment can be beneficially combined with one or more other embodiments.

[0076] The above is the preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. An upper furnace body with a magnet lifting device, used in a single crystal furnace, characterized in that: include: The upper furnace body is cylindrical; A magnet, wherein the magnet is mounted on the outer wall of the upper furnace drum body so as to be liftable relative to the upper furnace drum body; A lifting device, the lifting device is fixed on the outer side wall of the upper furnace drum body and connected to the magnet to drive the magnet to lift and lower axially relative to the upper furnace drum body; The guide mechanism is arranged between the magnet and the outer side wall of the upper furnace drum body, and is fixedly connected to the magnet and the outer side wall of the upper furnace drum body respectively to guide the lifting and lowering of the magnet.

2. The upper furnace body with a magnet lifting device according to claim 1, characterized in that: The magnet is an annular magnet, and the axis of the annular magnet coincides with the axis of the upper furnace drum body.

3. The upper furnace body with a magnet lifting device according to claim 2, characterized in that: There are multiple lifting devices, and the multiple lifting devices are evenly distributed along the circumferential direction of the upper furnace drum body; There are multiple guide mechanisms, and the multiple guide mechanisms are evenly distributed along the circumferential direction of the outer side wall of the upper furnace drum body.

4. The upper furnace body with a magnet lifting device according to claim 1, characterized in that: The lifting device is located above the magnet, and the lifting device comprises: A servo motor, wherein the servo motor is arranged on top of the magnet; A worm gear reducer, wherein the input end of the worm gear reducer is connected to the output end of the servo motor; A lifting screw, the lifting screw is arranged in a vertical direction, and the lower end of the lifting screw is connected to the output end of the worm gear reducer; A fixing plate is horizontally arranged on the outer side wall of the upper furnace drum body, the fixing plate is located above the worm gear reducer and close to the top of the upper furnace drum body, and the fixing plate is threadedly connected to the upper end of the lifting screw.

5. The upper furnace body with a magnet lifting device according to claim 4, characterized in that: An encoder is provided at the output end of each servo motor; A grating is also provided on the outer side wall of the upper furnace drum body. The grating is arranged along the vertical direction and is used to mark the position of the magnet.

6. The upper furnace body with a magnet lifting device according to claim 1, characterized in that: The guiding mechanism comprises: A linear guide rail, the linear guide rail is arranged on the outer side wall of the upper furnace body along the vertical direction; A slider is fixedly connected to the inner wall of the magnet and is slidably connected to the linear guide rail.

7. The upper furnace body with a magnet lifting device according to claim 1, characterized in that: Also includes: A plurality of rotary arm hooks are arranged at the upper end of the outer side wall of the upper furnace drum body and are evenly distributed along the circumferential direction of the outer side wall of the upper furnace drum body, and are used to provide gripping points for the rotary arm manipulator claws.

8. The upper furnace body with a magnet lifting device according to claim 1, characterized in that: Also includes: A support plate is arranged on the outer side wall of the upper furnace drum body and is located below the magnet. The upper surface of the support plate is perpendicular to the axis of the upper furnace drum body, and the upper surface of the support plate is used to support the bottom of the magnet.

9. The upper furnace body with a magnet lifting device according to claim 8, characterized in that: The support plate is an arc-shaped flat plate. There are multiple support plates, which are evenly distributed along the circumferential direction of the outer wall of the upper furnace drum body. The outer side surface of the support plate is an arc surface and is coaxial with the upper furnace drum body. The outer diameter of the support plate is greater than or equal to the outer diameter of the magnet.

10. A single crystal furnace, characterized in that: include: An upper furnace body, wherein the upper furnace body is an upper furnace body with a magnet lifting device as described in any one of claims 1 to 9; A lower furnace body, wherein the upper furnace body is used to be arranged on the lower furnace body; A rotary arm manipulator claw is used to remove the upper furnace body from the lower furnace body or place the upper furnace body on the lower furnace body.

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