Molten silicon transfer device

Abstract

The utility model provides a molten silicon transfer device. The molten silicon transfer device comprises a mobile platform; the cooling cabin is arranged on the mobile platform, and a crucible is arranged in the cooling cabin; the molten silicon conveying assembly is close to the cooling cabin and is arranged on the mobile platform, the output end of the molten silicon conveying assembly is communicated with the cooling cabin, and the drawing end of the molten silicon conveying assembly telescopically extends to one side far away from the cooling cabin so as to be communicated with a furnace barrel; and the molten silicon in the furnace barrel is transferred into the crucible. According to the molten silicon transfer device disclosed by the embodiment of the utility model, the molten silicon material in the emergency furnace can be conveniently and reliably discharged, so that the accident risk and the production loss are reduced to the maximum extent.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal production, and particularly relates to a molten silicon transfer device. Background Art

[0002] With the sharp increase in the market demand for large-size single crystals, large-size and large-charge furnaces have gradually occupied the production line and become the main production equipment. Among them, as the charge amount increases, more and more silicon materials are in the furnace.

[0003] Once the silicon material enters the furnace, there is no other way to take out the molten silicon material except by pulling it into a single crystal rod or polycrystal. Once an accident such as silicon overflow or silicon leakage occurs, only in-furnace cooling treatment can be carried out. This process is long and has certain safety hazards. Once the cooling treatment is determined, it means that most or even all of the graphite parts in the furnace have been scrapped, resulting in further losses. Summary of the Utility Model

[0004] In view of this, the utility model provides a molten silicon transfer device, which can conveniently and reliably discharge the molten silicon material in an accident single crystal furnace to reduce the accident risk and production losses.

[0005] To solve the above technical problems, the utility model adopts the following technical solutions:

[0006] The molten silicon transfer device according to an embodiment of the utility model includes:

[0007] A mobile platform;

[0008] A cooling chamber, which is arranged on the mobile platform and internally provided with a crucible;

[0009] A molten silicon conveying assembly, which is arranged on the mobile platform close to the cooling chamber. The output end of the molten silicon conveying assembly is communicated with the cooling chamber, and the suction end of the molten silicon conveying assembly can extend telescopically to the side away from the cooling chamber for communicating with a furnace barrel to transfer the molten silicon in the furnace barrel into the crucible.

[0010] Further, the mobile platform includes:

[0011] A platform body, with a detachable interface at one end;

[0012] Four lockable rollers, which are respectively installed at the four corners of the bottom of the platform body.

[0013] Further, the cooling chamber includes:

[0014] A cabin body, the cabin body is arranged on the platform body, a door that can be opened and closed is arranged on the side of the cabin body, and a containing space is formed inside the cabin body to contain the crucible;

[0015] A heat-insulating cylinder is arranged in the accommodating space of the cabin and is detachably located outside the crucible.

[0016] Furthermore, a sub-cabin is provided on the platform body close to the cabin body.

[0017] The molten silicon delivery assembly comprises:

[0018] A silicon nitride pump, wherein the silicon nitride pump is arranged in the auxiliary compartment;

[0019] an output pipe, one end of which is located in the sub-cabin and connected to the output port of the silicon nitride pump, and the other end of which passes through the sub-cabin and the side wall of the cabin body and extends into the upper part of the crucible in the cabin body;

[0020] A telescopic tube assembly, one end of which is located in the sub-cabin and connected to the inlet of the silicon nitride pump inside the sub-cabin, and the other end of which can be telescopically extended toward a side away from the sub-cabin, and the end of which is away from the sub-cabin is used to connect to the furnace barrel.

[0021] Further, the telescopic pipe assembly includes a first pipe and a second pipe having a diameter smaller than that of the first pipe, wherein the second pipe is at least partially located in the first pipe and is axially movable relative to the first pipe.

[0022] One end of the first pipe is connected to the input port of the silicon nitride pump inside the auxiliary compartment, one end of the second pipe extends into the first pipe to connect with the first pipe, and the other end of the second pipe extends to the outside of the first pipe away from the auxiliary compartment.

[0023] Furthermore, the molten silicon delivery assembly also includes an isolation valve, which is connected to the end of the first pipeline away from the sub-chamber and the end of the second pipeline away from the sub-chamber can be extended from or retracted into the isolation valve, and the telescopic tube assembly is detachably connected to the furnace barrel through the isolation valve.

[0024] Furthermore, a toothed surface is formed on the outer wall of the second pipe and is continuous along the axial direction of the second pipe.

[0025] The telescopic tube assembly further includes a transmission assembly, which is disposed inside the isolation valve and includes:

[0026] Drive motor;

[0027] A driving gear connected to an output end of the driving motor;

[0028] A pair of driven gears, the pair of driven gears are arranged correspondingly up and down, the upper driven gear is meshed with the driving gear, and the pair of driven gears are respectively meshed with the toothed surface of the second pipe.

[0029] Furthermore, a plurality of spherical compensators are arranged at intervals on the second pipe, the interior of the spherical compensators is hollow and connected to the second pipe, the diameter of the spherical compensators is larger than the outer diameter of the second pipe and the outer wall is provided with corrugations matching the toothed surface on the outer wall of the second pipe so as to mesh with the driven gear below.

[0030] Furthermore, the telescopic tube assembly further comprises a position compensation device, which is mounted on the bottom surface inside the isolation valve, and the driven gear below is connected to the top of the position compensation device.

[0031] The position compensation device includes a telescopic device. When the spherical compensator on the second pipe passes through the driven gear, the telescopic device is squeezed. After the spherical compensator passes through the driven gear, the telescopic device is reset and the driven gear is meshed with the toothed surface of the second pipe.

[0032] Furthermore, the outer wall of the first pipe is wrapped with a layer of heat-insulating material.

[0033] The above technical solution of the utility model has at least one of the following beneficial effects:

[0034] According to the molten silicon transfer device of the embodiment of the utility model, a mobile platform and a cooling chamber and a molten silicon conveying assembly are provided, the output end of the molten silicon conveying assembly is connected to the crucible in the cooling chamber, and the extraction end of the molten silicon conveying assembly can be telescopically extended to the side away from the cooling chamber for connecting to the furnace barrel, so as to transfer the molten silicon in the furnace barrel to the crucible, thereby realizing quick and reliable connection with a single crystal furnace with silicon overflow or silicon leakage, and transferring and removing the molten silicon material, thereby minimizing the risk of accidents and production losses. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is a three-dimensional structural diagram of a molten silicon transfer device according to an embodiment of the utility model;

[0036] Figure 2 for Figure 1 A magnified schematic diagram of the middle a region;

[0037] Figure 3 A top view of a molten silicon transfer device according to an embodiment of the present utility model;

[0038] Figure 4 is Figure 3 the sectional view taken along the line A-A in

[0039] Figure 5 is Figure 4 the enlarged schematic view of the area b in

[0040] Figure 6 the working state schematic diagram of the molten silicon transfer device according to the embodiment of the present utility model.

[0041] Reference numerals: 100. Moving platform; 110. Platform body; 120. Lockable roller; 130. Detachable connection port;

[0042] 200. Cooling chamber; 210. Chamber body; 211. Chamber door; 220. Crucible; 230. Heat preservation cylinder; 240. Sub-chamber;

[0043] 300. Molten silicon conveying assembly; 310. Silicon nitride pump; 320. Output pipe; 330. Telescopic pipe assembly; 331. First pipe; 332. Second pipe; 333. Serrated surface; 334. Transmission assembly; 3341. Driving gear; 3342. Driven gear; 335. Position compensation device; 3351. Mounting seat; 3352. Limiting ring; 3353. Telescopic device; 336. Spherical compensator; 340. Heat preservation material layer; 350. Isolation valve;

[0044] 400. Furnace barrel. Detailed implementation manners

[0045] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present utility model fall within the scope of protection of the present utility model.

[0046] Unless otherwise defined, the technical terms or scientific terms used in the present utility model shall have the ordinary meanings understood by those of ordinary skill in the art belonging to the field of the present utility model. The "first", "second" and similar terms used in the present utility model do not denote any order, quantity or importance, but are only used to distinguish different components. The terms such as "connection" or "coupling" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms such as "upper", "lower", "left" and "right" are only used to indicate relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationships will also change accordingly.

[0047] Next, the molten silicon transfer device according to the embodiments of the present invention will be specifically described with reference to the accompanying drawings.

[0048] The molten silicon transfer device according to the embodiments of the present invention, as Figure 1 and Figure 3 shown, may include: a mobile platform 100, a cooling chamber 200, and a molten silicon conveying assembly 300.

[0049] Among them, the cooling chamber 200 is provided on the mobile platform 100, and a crucible 220 is arranged inside to accommodate the transferred molten silicon.

[0050] The molten silicon conveying assembly 300 is provided on the mobile platform 100 close to the cooling chamber 200. The output end of the molten silicon conveying assembly 300 is communicated with the cooling chamber 200, and the suction end of the molten silicon conveying assembly 300 extends telescopically to the side away from the cooling chamber 200 for communicating with the furnace barrel 400, so as to transfer the molten silicon in the furnace barrel into the crucible 220 in the cooling chamber 200.

[0051] Specifically, the molten silicon transfer device according to the embodiments of the present invention is provided with a mobile platform 100, and a cooling chamber 200 and a molten silicon conveying assembly 300 are arranged on the mobile platform 100. The cooling chamber 200 is used to hold and collect molten silicon materials. The output end of the molten silicon conveying assembly 300 is communicated with the cooling chamber 200, and the other end, which is the silicon material suction end, is arranged towards the side away from the cooling chamber 200 for detachably communicating with the furnace barrel 400 for producing single crystals. In the accident state of silicon overflow or leakage of the molten silicon transfer device according to the embodiments of the present invention, the mobile platform 100 is pushed to the corresponding accident working area, and the suction end of the molten silicon conveying assembly 300 is connected to the furnace barrel 400. Then, by controlling the molten silicon conveying assembly 300, the silicon liquid in the furnace barrel 400 is transferred into the cooling chamber 200, so as to realize the rapid and reliable transfer of the silicon liquid in the accident furnace barrel 400, minimize the accident risk of silicon overflow and leakage, improve safety, and at the same time, can save the hot field components in the furnace to the greatest extent, enable the accident furnace platform to complete cooling, cleaning and then continue to feed materials and operate in a short time, and reduce the production losses caused by the accident.

[0052] In some embodiments, as Figure 1 and Figure 3 shown, the mobile platform 100 may include: a platform body 110 and four lockable rollers 120.

[0053] Among them, the four lockable rollers 120 are respectively installed at the four corners of the bottom of the platform body 110.

[0054] That is to say, the mobile platform 100 is provided with a platform body 110 and four lockable rollers 120 installed at the bottom of the platform body 110, thereby realizing the movement of the platform. Among them, the selection of lockable rollers 120 facilitates locking the position of the mobile platform 100 within a predetermined area, and facilitates the stable docking of the molten silicon conveying assembly 300 with the furnace barrel 400 for silicon liquid transfer.

[0055] In some embodiments, a detachable connection port 130 is provided at one end of the platform body 110.

[0056] As an example, as Figure 1 and Figure 3 shown, a detachable connection port 130 is provided at the other end of the platform body 110 opposite to the molten silicon conveying assembly 300, so as to facilitate the mobile traction of the mobile platform 100.

[0057] In some embodiments, as Figure 1 and Figure 4 shown, the cooling chamber 200 may include: a chamber body 210, a heat preservation cylinder 230, and a crucible 220.

[0058] Among them, the chamber body 210 is arranged on the platform body 110, and an openable chamber door 211 is provided on the side of the chamber body 210. For example, the chamber door 211 can be opened and closed by installing a lock. An accommodation space is formed inside the chamber body 210, and by closing or opening the chamber door 211, the accommodation space formed inside the chamber body 210 is isolated from or communicated with the outside.

[0059] The heat preservation cylinder 230 is arranged inside the chamber body 210.

[0060] The crucible 220 is detachably arranged inside the heat preservation cylinder 230.

[0061] That is to say, the cooling chamber 200 is provided with a chamber body 210, and the chamber body 210 is provided with an openable chamber door 211. A heat preservation cylinder 230 is arranged inside the chamber body 210 for accommodating the crucible 220 and insulating it, and the crucible 220 is detachably arranged inside the heat preservation cylinder 230, so that when the crucible 220 is filled with silicon liquid, the chamber door 211 can be opened, and the crucible 220 can be lifted away by extending an external device into the interior of the chamber body 210. After emptying the silicon liquid inside the crucible 220, it is put back into the heat preservation cylinder 230, and at this time, the chamber door 211 is closed to facilitate the next silicon liquid transfer work.

[0062] In some embodiments, as Figures 1 - 5 shown, a secondary chamber 240 is also provided on the platform body 110 close to the chamber body 210.

[0063] The molten silicon conveying assembly 300 may include: a silicon nitride pump 310, an output pipe 320, and a telescopic pipe assembly 330.

[0064] Among them, the silicon nitride pump 310 is arranged in the auxiliary cabin 240. Selecting silicon nitride material to make the pump source can resist the high temperature of the silicon liquid and has good durability.

[0065] One end of the output pipe 320 is located in the auxiliary cabin 240 and is connected to the output port of the silicon nitride pump 310. The other end of the output pipe 320 passes through the side walls of the auxiliary cabin 240 and the cabin body 210 and extends into the interior of the cabin body 210. Specifically, it extends above the crucible 220 inside the cabin body 210.

[0066] One end of the telescopic pipe assembly 330 is located in the auxiliary cabin 240 and is connected to the input port of the silicon nitride pump 310 inside the auxiliary cabin 240. The other end of the telescopic pipe assembly 330 can telescopically extend out of the auxiliary cabin 240 from the inside of the auxiliary cabin 240 toward the side away from the auxiliary cabin 240. The other end of the telescopic pipe assembly 330 is used to connect to the furnace barrel 400.

[0067] That is to say, the furnace barrel 400 to which the silicon liquid is to be transferred is connected through the telescopic pipe assembly 330, and the silicon liquid in the furnace barrel is discharged through the telescopic pipe assembly 330 by the silicon nitride pump 310 and transferred to the crucible 220 inside the cabin body 210 through the output pipe 320, thereby completing the extraction of the silicon liquid in the accident furnace. Subsequently, the silicon liquid is taken out after cooling in the crucible 220. It is simple and reliable. Among them, the telescopic pipe assembly 330 can facilitate the extension and connection to the furnace barrel 400 for liquid drainage during the silicon liquid transfer work, and is convenient for retraction and storage in the non-working state.

[0068] In addition, a controller can be arranged outside the auxiliary cabin 240, and the silicon nitride pump 310 is electrically connected through the controller to control its operation.

[0069] In some embodiments, the telescopic pipe assembly 330 includes a first pipe 331 and a second pipe 332 with a diameter smaller than that of the first pipe 331. The second pipe 332 is coaxially arranged inside the first pipe 331, and the second pipe 332 can move axially relative to the first pipe 331.

[0070] One end of the first pipe 331 is connected to the input port of the silicon nitride pump 310 inside the auxiliary cabin 240. One end of the second pipe 332 extends into the first pipe 331 so that the second pipe 332 is connected to the first pipe 331. The other end of the second pipe 332 can extend outside the end of the first pipe 331 away from the auxiliary cabin 240. That is to say, one end of the second pipe 332 extending into the first pipe 331 is slidably connected to the inner wall of the first pipe 331, and one end of the second pipe 332 extending into the first pipe 331 is connected to the first pipe 331. One end of the second pipe 332 slides axially along the inner wall of the first pipe 331, so that the second pipe 332 can be telescoped relative to the first pipe 331.

[0071] As an example, such as Figure 4 、Figure 5 As shown, in the non-working state, a portion of the second pipe 332 close to one end of the first pipe 331 is retracted into the first pipe 331, and the end of the second pipe 332 away from the first pipe 331 is separated from the furnace 400 and partially extends out of the first pipe 331. At this time, the second pipe 332 is stored in a retracted state. Figure 2 , Figure 6 As shown, in the working state, one end of the second pipe 332 away from the auxiliary chamber 240 extends out of the first pipe 331 to connect to the furnace drum 400 for required transfer.

[0072] In some embodiments, Figure 1 and Figure 2 As shown, the molten silicon delivery assembly 300 also includes an isolation valve 350, which is connected to the end of the first pipe 331 away from the sub-chamber 240 and the end of the second pipe 332 away from the sub-chamber 240 can be extended from or retracted into the isolation valve 350, and the telescopic tube assembly 330 can be detachably connected to the furnace barrel 400 through the isolation valve 350.

[0073] That is to say, an isolation valve 350 is provided at the far end of the first pipeline 331 (the end away from the sub-chamber), and an interface is provided at the corresponding position of the side wall of the furnace barrel 400. The isolation valve 350 can be detachably connected to the interface of the furnace barrel 400, which is convenient for installation and disassembly, and also realizes the function of controlling the connection and disconnection of the pipeline of the telescopic tube assembly 330 and the furnace barrel 400, thereby achieving a protective effect.

[0074] In some embodiments, Figure 2 and Figure 5 As shown, a toothed surface 333 which is continuous along the axial direction of the second pipe 332 is formed on the outer wall of the second pipe 332 .

[0075] The telescopic tube assembly 330 may further include a transmission assembly 334 . The transmission assembly 334 is disposed inside the isolation valve 350 . The transmission assembly 334 includes a driving motor (not shown), a driving gear 3341 , and a pair of driven gears 3342 .

[0076] The driving motor is disposed inside the isolation valve 350 .

[0077] The driving gear 3341 is disposed inside the isolation valve 350 and connected to the output end of the driving motor.

[0078] A pair of driven gears 3342 are respectively disposed inside the isolation valve 350 and arranged correspondingly up and down. The upper driven gear 3342 is meshed with the driving gear 3341, and the pair of driven gears 3342 are respectively meshed with the toothed surface 333 on the outer wall of the second pipe 332 at the upper and lower parts of the second pipe 332.

[0079] That is to say, the toothed surface 333 continuous along the axial direction of the second pipe 332 is equivalent to a rack, and a pair of driven gears 3342 are respectively engaged with the toothed surface 333 on the outer wall of the second pipe 332 up and down, and the driving motor drives the driving gear 3341, and the driving gear 3341 drives the pair of driven gears 3342 to rotate, thereby driving the second pipe 332 to move axially relative to the first pipe 331, and the second pipe 332 extends out of the isolation valve 350 or retracts into the isolation valve 350, thereby realizing the telescopic function of the telescopic tube assembly 330, which is simple and reliable.

[0080] In some embodiments, in some embodiments, as Figure 2 and Figure 5 As shown, the telescopic tube assembly 330 further includes a position compensation device 335 , which is installed on the bottom surface inside the isolation valve 350 , and a driven gear 3342 located below the second pipeline 332 is connected to the top of the position compensation device 335 .

[0081] A plurality of spherical compensators 336 are arranged at intervals on the second pipe 332. The spherical compensators 336 are hollow inside and connected to the second pipe 332. The diameter of the spherical compensators 336 is larger than the outer diameter of the second pipe 332 and the outer wall is provided with corrugations that match the toothed surface 333 on the outer wall of the second pipe 332 so as to mesh with the driven gear 3342 below.

[0082] As an example, Figure 5 and Figure 6 As shown, two spherical compensators 336 are provided on the second pipe 332 , dividing the second pipe 332 into three parts, wherein the outer pipe wall of the part of the second pipe 332 farthest away from the first pipe 331 is a smooth surface, and the outer pipe walls of the other two parts are both toothed surfaces 333 .

[0083] When the telescopic tube assembly 330 is in a non-working state, the two parts of the second pipe 332 close to the first pipe 331 are retracted into the first pipe 331, the spherical compensator 336 close to the side of the auxiliary compartment 240 is located in the first pipe 331, and the other spherical compensator 336 is clamped between a pair of driven gears 3342, and the smooth surface portion of the second pipe 332 is placed in the isolation valve 350.

[0084] When the telescopic pipe assembly 330 is in the working state, it drives the driven gear 3342 and drives the spherical compensator 336 at the end far from the auxiliary chamber 240 to move towards the isolation valve 350. The two parts of the second pipe 332 with the toothed surfaces 333 pass through the driven gear 3342 in sequence until the end of the second pipe 332 reaches the end far from the auxiliary chamber 240 inside the first pipe 331. At this time, the second pipe 332 is fully extended. Among them, the two parts of the second pipe 332 in the direction away from the first pipe 331 enter the furnace barrel 400. Under the action of gravity, the two spherical compensators 336 cause the two parts of the second pipe 332 in the direction away from the first pipe 331 to bend downward, just bending the smooth surface part of the second pipe 332 (i.e., the end of the second pipe 332) downward and extending it into the crucible inside the furnace barrel 400, which is convenient for sucking silicon liquid.

[0085] That is to say, a spherical compensator 336 is connected to the side of the second pipe 332 away from the first pipe 331, so that when the distal end of the second pipe 332 extends into the furnace barrel 400, the pipe part connected with the spherical compensator 336 bends naturally under the action of gravity, and then the distal end of the second pipe 332 bends downward and extends into the liquid-containing crucible in the furnace barrel 400, ensuring the reliability of silicon liquid transfer.

[0086] A position compensation device 335 is connected and arranged at the bottom position of the lower driven gear 3342. When the spherical compensator 336 reaches the position between the pair of driven gears 3342, since the upper driven gear 3342 is fixed and the diameter of the spherical compensator 336 is larger than that of the second pipe 332, the spherical compensator 336 is squeezed by the upper driven gear 3342 and moves downward, thus squeezing the lower driven gear 3342 and the position compensation device 335 downward, and the compensation device 335 contracts downward accordingly. After that, when the spherical compensator 336 passes through the position of the driven gear 3342, the lower driven gear 3342 is reset under the action of the position compensation device 335.

[0087] That is to say, a position compensation device 335 is installed on the bottom surface inside the isolation valve 350, and the lower driven gear 3342 is connected to the position compensation device 335 to facilitate the passage of the spherical compensator 336 with a larger diameter. As an example, the position compensation device 335 may include a mounting seat 3351, a limiting ring 3352, and a telescopic device 3353. When the spherical compensator 336 on the second pipe 332 passes through the driven gear 3342, the telescopic device 3353 is squeezed. After the spherical compensator 3342 passes through the driven gear 3342, the telescopic device 3353 resets and the driven gear 3342 meshes with the toothed surface of the second pipe 332.

[0088] Among them, the mounting seat 3351 is provided on the bottom surface inside the isolation valve 350. There is a vertically arranged placement groove in the middle of the mounting seat 3351. The telescopic device 3353 is vertically arranged in the placement groove. The limiting ring 3352 is arranged at the top of the placement groove. The limiting ring 3352 is horizontally penetrated. The top of the telescopic device 3353 extends upward into the limiting ring 3352 from the side wall of the limiting ring 3352. The gear shaft of the lower driven gear 3342 is rotatably connected to the top of the telescopic device 3353 in the limiting ring 3352. The limiting ring 3352 is used to limit the gear shaft of the lower driven gear 3342 in the vertical direction.

[0089] In some embodiments, as Figure 5 shown, the outer wall of the first pipeline 331 is wrapped with a heat insulation material layer 340.

[0090] Specifically, wrapping the heat insulation material layer 340 on the outer wall of the first pipeline 341 can be, for example, waste soft felt, thereby preventing the silicon liquid from cooling during transmission to block the pipeline.

[0091] It should be noted here that the telescopic pipe assembly 330, the driving gear 3341, and the driven gear 3342 in the embodiments of the present invention are all made of silicon nitride material and have the characteristic of high temperature resistance.

[0092] The above is the preferred implementation manner of the present invention. It should be pointed out that for those of ordinary skill in the art of this technology, without departing from the principle described in the present invention, several improvements and refinements can still be made, and these improvements and refinements should also be regarded as the protection scope of the present invention.

Claims

1. A molten silicon transfer device, characterized in that: include: Mobile platforms; A cooling chamber, the cooling chamber is arranged on the mobile platform and has a crucible arranged inside; A molten silicon conveying assembly is disposed on the mobile platform near the cooling chamber, an output end of the molten silicon conveying assembly is connected to the cooling chamber, and a suction end of the molten silicon conveying assembly can be telescopically extended to a side away from the cooling chamber for connecting to a furnace barrel, so as to transfer the molten silicon in the furnace barrel to the crucible.

2. The molten silicon transfer device according to claim 1, characterized in that: The mobile platform comprises: The platform body has a detachable interface at one end; Four lockable rollers are respectively installed at four corners of the bottom of the platform body.

3. The molten silicon transfer device according to claim 2, characterized in that: The cooling cabin comprises: A cabin body, the cabin body is arranged on the platform body, a door that can be opened and closed is arranged on the side of the cabin body, and a containing space is formed inside the cabin body to contain the crucible; A heat-insulating cylinder is arranged in the accommodating space of the cabin and is detachably located outside the crucible.

4. The molten silicon transfer device according to claim 3, characterized in that: The platform body is also provided with a secondary cabin close to the cabin body. The molten silicon delivery assembly comprises: A silicon nitride pump, wherein the silicon nitride pump is arranged in the auxiliary compartment; an output pipe, one end of which is located in the sub-cabin and connected to the output port of the silicon nitride pump, and the other end of which passes through the sub-cabin and the side wall of the cabin body and extends into the upper part of the crucible in the cabin body; A telescopic tube assembly, one end of which is located in the sub-cabin and connected to the inlet of the silicon nitride pump inside the sub-cabin, and the other end of which can be telescopically extended toward a side away from the sub-cabin, and the end of which is away from the sub-cabin is used to connect to the furnace barrel.

5. The molten silicon transfer device according to claim 4, characterized in that: The telescoping tube assembly includes a first pipe and a second pipe having a smaller diameter than the first pipe, the second pipe being at least partially located within the first pipe and being axially movable relative to the first pipe. One end of the first pipe is connected to the input port of the silicon nitride pump inside the auxiliary compartment, one end of the second pipe extends into the first pipe to connect with the first pipe, and the other end of the second pipe extends to the outside of the first pipe away from the auxiliary compartment.

6. The molten silicon transfer device according to claim 5, characterized in that: The molten silicon delivery assembly also includes an isolation valve, which is connected to the end of the first pipeline away from the sub-chamber and the end of the second pipeline away from the sub-chamber can be extended from or retracted into the isolation valve, and the telescopic tube assembly is detachably connected to the furnace barrel through the isolation valve.

7. The molten silicon transfer device according to claim 6, characterized in that: The outer wall of the second pipe is formed with a toothed surface which is continuous along the axial direction of the second pipe. The telescopic tube assembly further includes a transmission assembly, which is disposed inside the isolation valve and includes: Drive motor; A driving gear connected to an output end of the driving motor; A pair of driven gears, the pair of driven gears are arranged correspondingly up and down, the upper driven gear is meshed with the driving gear, and the pair of driven gears are respectively meshed with the toothed surface of the second pipe.

8. The molten silicon transfer device according to claim 7, characterized in that: A plurality of spherical compensators are arranged at intervals on the second pipe. The spherical compensators are hollow inside and connected to the second pipe. The diameter of the spherical compensators is larger than the outer diameter of the second pipe and the outer wall is provided with corrugations matching the toothed surface on the outer wall of the second pipe so as to mesh with the driven gear below.

9. The molten silicon transfer device according to claim 8, characterized in that: The telescopic tube assembly further comprises a position compensation device, which is mounted on the bottom surface of the isolation valve. The driven gear below is connected to the top of the position compensation device. The position compensation device includes a telescopic device. When the spherical compensator on the second pipe passes through the driven gear, the telescopic device is squeezed. After the spherical compensator passes through the driven gear, the telescopic device is reset and the driven gear is meshed with the toothed surface of the second pipe.

10. The molten silicon transfer device according to claim 5, characterized in that: The outer wall of the first pipe is wrapped with a layer of heat-insulating material.

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