Sliding type lifting tool for silicon source tube

Abstract

The utility model belongs to the technical field of semiconductor diffusion equipment, and particularly relates to a sliding type lifting tool for a silicon source tube. The device comprises a tray, a bracket and a sliding rail assembly, baffles are arranged on the periphery of the tray, and the baffles are folded to be connected with the tray to form a semi-surrounding structure with an upward opening; the bracket is arranged in the semi-surrounding structure of the tray, the bracket comprises an arc-shaped supporting plate attached to the periphery of the silicon source tube and two limiting supporting feet arranged at the bottom of the supporting plate, and the two limiting supporting feet arranged at intervals are attached to the inner side of the baffle in a limiting mode; the sliding rail assembly is fixedly installed at a furnace opening of the diffusion furnace, and the output end of the sliding rail assembly is connected with the bottom of the tray through the telescopic base so as to drive the tray to get close to the furnace opening in the axial direction. The device is used for solving the problem that the source pipe is difficult to accurately feed into the diffusion furnace.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor diffusion equipment, and in particular relates to a sliding type lifting tool for a silicon source tube. Background Art

[0002] Diffusion is an important process in the semiconductor chip manufacturing process, and many parameters are determined by this process. Diffusion equipment is usually composed of a furnace body that can control the temperature rise and fall / constant temperature and a system that can control the input gas flow.

[0003] Before diffusion, the silicon wafer usually needs to be placed on a silicon boat, and the silicon boat is placed in the source tube. Then the entire source tube is placed in the diffusion furnace. Since the source tube itself, the silicon boat and the silicon wafer are all heavy, and there is usually a certain height difference between the furnace mouth and the operating table of the diffusion furnace, it is usually difficult to place the source tube as a whole into the diffusion furnace smoothly. It requires the coordinated operation of multiple people. At present, in order to facilitate the placement of the source tube, a bracket is usually placed at the furnace mouth. The bracket is usually formed by welding. When the source tube needs to be placed, the bracket is moved to align the bracket with the furnace mouth, and then the source tube is lifted and pushed into the furnace mouth. This alignment process is often difficult to achieve. If there is a slight deviation, the source tube is prone to collision with the furnace mouth, thereby damaging the source tube and the internal silicon wafer, causing unnecessary losses. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a silicon source tube sliding lifting tool for solving the problem that the source tube is difficult to accurately deliver into a diffusion furnace.

[0005] The utility model solves the above technical problems with the following technical solutions: a silicon source tube sliding lifting tool, which includes:

[0006] A tray, wherein baffles are arranged around the tray, and the baffles are closed and connected to the tray to form a semi-enclosed structure with an opening facing upward;

[0007] A bracket, the bracket is placed in the semi-enclosed structure of the tray, the bracket includes an arc-shaped support plate that fits the outer periphery of the silicon source tube, and two limit support legs arranged at the bottom of the support plate, and the two limit support legs are arranged at intervals and are limitedly fitted to the inner side of the baffle;

[0008] The slide rail track assembly is fixedly installed at the furnace mouth of the diffusion furnace. The output end of the slide rail track assembly is connected to the bottom of the tray through a telescopic base to drive the tray to approach the furnace mouth along its axial direction.

[0009] Compared with the prior art, the above technical solution has the following beneficial effects:

[0010] By arranging a slide rail track assembly at the position of the diffusion furnace opening, the tray is installed at the output end of the slide rail track assembly, driving the tray to approach the opening along the axis. This not only allows for loading and unloading the source tube at a position far from the opening, but also enables the direct transportation of the source tube on the tray to the opening position, which is convenient, fast, and efficient. At the same time, a bracket is placed on the tray in a limited position, and the arc-shaped support plate in the bracket can stably hold the source tube, preventing the source tube from shaking left and right. Moreover, the bracket is restricted within the semi-enclosed structure in the tray, so there will be no displacement deviation when moving the source tube on the support plate.

[0011] Based on the above technical solutions, the embodiments of the present application can also be improved as follows:

[0012] In one embodiment, the slide rail track assembly includes:

[0013] A track, the sliding direction of which is consistent with the inlet and outlet direction of the diffusion furnace;

[0014] A sliding table, which is slidably connected to the track;

[0015] A support rod, one end of which is connected to the sliding table and the other end is connected to the telescopic base.

[0016] In one embodiment, a number of mounting holes are arranged at intervals on the support rod for adjusting the distance between the tray and the sliding table.

[0017] In one embodiment, a limit ring is connected to one end of the track close to the diffusion furnace to limit the extreme position of the sliding table on the track.

[0018] In one embodiment, a support frame is arranged in the tray, and an arc-shaped support plate that fits the bottom of the support plate is formed at the top of the support frame.

[0019] In one embodiment, both ends of the support frame are fitted to the inner sides of the limit support feet, and a limit space for limiting the limit support feet is formed between the support frame and the outer baffle.

[0020] In one embodiment, the telescopic base includes:

[0021] A number of support screws, which are connected to the bottom of the tray;

[0022] A connecting plate, which is installed on the support rod, and the bottom ends of the support screws are fixedly connected to the connecting plate.

[0023] In one embodiment, waist-shaped holes are formed in the radial direction of the diffusion furnace on the connecting plate, and the support screws are passed through and fixedly connected to the waist-shaped holes.

[0024] In one embodiment, the bracket is a quartz bracket.

[0025] In one embodiment, it further includes a push rod, and the first end of the push rod is detachably connected to the tray. Description of the Drawings

[0026] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0027] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0028] Figure 2 It is Figure 1 an exploded structure diagram of the middle bracket and the tray.

[0029] Reference Numerals:

[0030] 1. Tray; 2. Baffle;

[0031] 3. Bracket; 4. Arc-shaped support plate; 5. Limit support feet;

[0032] 6. Slide rail track assembly; 601. Track; 602. Slide table; 603. Support rod;

[0033] 7. Telescopic base; 701. Support screw; 702. Connecting plate; 703. Oval hole;

[0034] 8. Limit ring;

[0035] 9. Support frame; 10. Arc-shaped support plate;

[0036] 11. Diffusion furnace. Detailed Embodiments

[0037] The following will describe in detail the embodiments of the technical solutions of the present invention with reference to the drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention, so they are only examples and cannot be used to limit the protection scope of the present invention.

[0038] It should be noted that unless otherwise specified, the technical terms or scientific terms used in this application should have the ordinary meaning understood by those skilled in the art to which the present invention belongs.

[0039] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0040] In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. In the description of the present utility model, the meaning of "a plurality" is more than two, unless otherwise specifically defined.

[0041] In the present application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected to", "fixed", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0042] As Figure 1-2 shown, a silicon source tube sliding type lifting tooling provided by the present utility model includes: a tray, a bracket, and a slide rail track assembly.

[0043] Baffles are arranged around the tray. The baffles are closed and connected to the tray to form a semi-enclosed structure with an upward opening. The bracket is placed in the semi-enclosed structure of the tray. The semi-enclosed structure plays a limiting role on the bracket to prevent the lifted object from moving in the tray. The bracket includes an arc-shaped support plate that fits the outer circumference of the silicon source tube, and two limiting support feet arranged at the bottom of the support plate. The two spaced limiting support feet are limited and attached to the inner side of the baffle. The slide rail track assembly is fixedly installed at the furnace mouth of the diffusion furnace. The output end of the slide rail track assembly is connected to the bottom of the tray through a telescopic base to drive the tray to approach the furnace mouth along its axis.

[0044] By arranging a slide rail track assembly at the furnace mouth position of the diffusion furnace and installing the tray on the output end of the slide rail track assembly to drive the tray to approach the furnace mouth along the axis, not only can the source tube be loaded and unloaded at a position far from the furnace mouth, but also the source tube on the tray can be directly sent to the furnace mouth position, which is convenient, fast, and efficient. At the same time, the bracket is placed on the tray in a limited way. The arc-shaped support plate in the bracket can stably hold the source tube to avoid the source tube shaking left and right, and the bracket is restricted in the semi-enclosed structure in the tray, so that there will be no displacement deviation when moving the source tube on the support plate.

[0045] The tray fixed by the slide rail track assembly can not only ensure the stability during the translation process and prevent misalignment with the furnace opening, but also move the tray with less effort, ensuring more convenient loading and unloading of the source tube on the tray.

[0046] Among them, the slide rail track assembly includes: a track, a slide table and two support rods. The track is fixed on the wall at the furnace opening of the diffusion furnace, and the sliding direction of the track is consistent with the inlet and outlet direction of the diffusion furnace, that is, the length direction of the track is consistent with the length direction of the diffusion furnace, which is convenient for aligning the tray with the furnace opening of the diffusion furnace. The slide table is slidably connected to the track. One end of the two support rods is connected to the slide table, and the other end is connected to the telescopic base to support the entire tray.

[0047] To facilitate adjusting the position of the tray on the support rod, a number of mounting holes are provided at intervals on the support rod for adjusting the distance between the tray and the slide table, and further adjusting the lateral movement position of the tray in the horizontal direction to adjust the radial position of the end of the tray aligned with the furnace opening. When facing source tubes of different specifications, it is possible to conveniently adjust the position of the tray on the support rod, so that source tubes of different specifications can be better aligned with the furnace opening.

[0048] A limit ring is connected to one end of the track close to the diffusion furnace to limit the extreme position of the slide table on the track, so as to prevent the source tube from colliding with the furnace opening when the tray moves through the track close to the furnace opening. After setting the limit ring, the slide table can be stopped in time, and then the tray can be stopped.

[0049] To improve the support of the tray for the bracket, a support frame is provided in the tray. An arc-shaped support plate that fits the bottom of the tray is formed on the top of the support frame. The arc-shaped support plate fits the bottom of the arc-shaped tray, achieving a better support effect.

[0050] Among them, the bracket is a quartz bracket, which is more convenient to clean and ensure cleanliness. Moreover, the surface of the quartz bracket is smooth with small friction, which is convenient for pushing the source tube thereon and avoids the contact between the source tube and the lower tray.

[0051] Specifically, the support frame and the arc-shaped support plate on the top are integrally arranged between the two limit support feet at the bottom of the bracket. The outer ends of the support frame are fitted to the inner sides of the limit support feet. The support frame and the outer baffle form a limit space for the limit support feet, restricting the axial displacement of the bracket.

[0052] In this embodiment, the telescopic base includes: four support screws and two connecting plates.

[0053] The supporting screw rods are connected to the bottom of the tray. Four supporting screw rods are connected to the four corners of the bottom of the tray. The connecting plate is installed on the supporting rod, and the connecting plate and the mounting holes on the supporting rod are fixedly connected by fasteners such as bolts. The bottom ends of the supporting screw rods are fixedly connected to the connecting plate.

[0054] Specifically, waist-shaped holes are formed in the radial direction of the diffusion furnace on the connecting plate. The supporting screw rods are inserted and fixedly connected in the waist-shaped holes. The tray can be finely adjusted horizontally in the transverse direction through the waist-shaped holes. Specifically, the supporting screw rods are fixed on the connecting plate by fasteners such as nuts.

[0055] It further includes a push-pull rod. The first end of the push-pull rod is detachably connected to the tray. By bending the end of the push-pull rod to hook the tray, the entire tray can be pushed and pulled along the track direction to move the source tube in the bracket on the tray, avoiding scalding the operator by the source tube with too high temperature. The push-pull rod is not shown in the figure.

[0056] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A sliding lifting tool for silicon source tube, characterized in that: include: A tray, wherein baffles are arranged around the tray, and the baffles are closed and connected to the tray to form a semi-enclosed structure with an opening facing upward; A bracket, the bracket is placed in the semi-enclosed structure of the tray, the bracket includes an arc-shaped support plate that fits the outer periphery of the silicon source tube, and two limit support legs arranged at the bottom of the support plate, and the two limit support legs are arranged at intervals and are limitedly fitted to the inner side of the baffle; The slide rail track assembly is fixedly installed at the furnace mouth of the diffusion furnace. The output end of the slide rail track assembly is connected to the bottom of the tray through a telescopic base to drive the tray to approach the furnace mouth along its axial direction.

2. The silicon source tube sliding lifting tool according to claim 1 is characterized in that: The slide rail assembly comprises: A track, wherein the sliding direction of the track is consistent with the in-and-out direction of the diffusion furnace; A slide table, slidably connected to the track; A support rod has one end connected to the slide table and the other end connected to the telescopic base.

3. The silicon source tube sliding lifting tool according to claim 2 is characterized in that: A plurality of mounting holes are arranged at intervals on the support rod to adjust the distance between the tray and the slide.

4. The silicon source tube sliding lifting tool according to claim 2 is characterized in that: A limiting ring is connected to one end of the track close to the diffusion furnace to limit the extreme position of the slide on the track.

5. The silicon source tube sliding lifting tool according to claim 1, characterized in that: A support frame is arranged in the tray, and an arc-shaped support plate is formed on the top of the support frame and fits the bottom of the support plate.

6. The silicon source tube sliding lifting tool according to claim 5, characterized in that: The two ends of the support frame are fitted on the inner side of the limiting support leg, and the support frame and the outer baffle form a limiting space for limiting the limiting support leg.

7. The silicon source tube sliding lifting tool according to claim 2 is characterized in that: The telescopic base comprises: A plurality of support screws connected to the bottom of the tray; A connecting plate is installed on the supporting rod, and the bottom end of the supporting screw rod is connected and fixed on the connecting plate.

8. The silicon source tube sliding lifting tool according to claim 7, characterized in that: The connecting plate is provided with a waist-shaped hole along the radial direction of the diffusion furnace, and the supporting screw is passed through and fixedly connected to the waist-shaped hole.

9. The silicon source tube sliding lifting tool according to claim 1, characterized in that: The bracket is a quartz bracket.

10. The silicon source tube sliding lifting tool according to claim 1, characterized in that: It also includes a push-pull rod, a first end of which is detachably connected to the tray.

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