Liquid supply device for semiconductor device

Abstract

The utility model relates to a liquid supply device of semiconductor equipment. The liquid supply device comprises a liquid supply barrel, a liquid inlet pipeline mechanism and a pressure regulating mechanism, one end of the liquid inlet pipeline mechanism is communicated with the liquid supply barrel, and the other end of the liquid inlet pipeline mechanism is provided with a liquid inlet; one end of the liquid supply pipeline mechanism is communicated with the liquid supply barrel, and the other end is provided with a liquid supply port for supplying liquid medicine to the semiconductor equipment; the pressure regulating mechanism comprises a pressure regulating valve, a pressure measuring device and a controller in communication connection with the pressure regulating valve and the pressure measuring device, the pressure regulating valve is arranged between the liquid supply barrel and the liquid supply opening and used for regulating the pressure of the liquid medicine between the pressure regulating valve and the liquid supply opening, and the pressure measuring device is used for detecting the actual pressure of the liquid medicine between the pressure regulating valve and the liquid supply opening; the controller is used for comparing the actual liquid medicine pressure with the preset liquid medicine pressure of the liquid supply port and adjusting the pressure adjusting valve when the actual liquid medicine pressure is different from the preset liquid medicine pressure so that the actual liquid medicine pressure can be the same as the preset liquid medicine pressure. The liquid supply device can effectively reduce the fluctuation of the liquid medicine flow of the liquid supply port.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, and particularly relates to a liquid supply device for a semiconductor device. Background Art

[0002] When a semiconductor device is working, a liquid supply device is often required to supply a liquid medicine to the semiconductor device. For example, when a single wafer cleaning machine is working, a liquid supply device is required to supply a cleaning liquid. The liquid supply device usually uses a pressure regulating valve to regulate the flow rate of the liquid supply port of the liquid supply device. However, the pressure regulating accuracy of the pressure regulating valve cannot meet the stability of the flow rate of the liquid supply port of the liquid supply device, resulting in large fluctuations in the liquid medicine flow rate at the liquid supply port. Summary of the Utility Model

[0003] Based on this, it is necessary to provide a liquid supply device for a semiconductor device that can effectively reduce the fluctuation of the liquid medicine flow rate at the liquid supply port in view of the above problems.

[0004] A liquid supply device for a semiconductor device includes:

[0005] A liquid supply bucket for containing a liquid medicine;

[0006] An inlet pipeline mechanism, one end of which is communicated with the liquid supply bucket and the other end of which has an inlet for conveying the liquid medicine into the liquid supply bucket;

[0007] A liquid supply pipeline mechanism, one end of which is communicated with the liquid supply bucket and the other end of which has a liquid supply port for outputting the liquid medicine in the liquid supply bucket to provide the liquid medicine to the semiconductor device; and

[0008] A pressure regulating mechanism, including a pressure regulating valve, a pressure gauge, and a controller communicatively connected to the pressure regulating valve and the pressure gauge respectively. The pressure regulating valve is arranged between the liquid supply bucket and the liquid supply port for regulating the liquid medicine pressure between the pressure regulating valve and the liquid supply port. The pressure gauge is used for detecting the actual liquid medicine pressure between the pressure regulating valve and the liquid supply port. The controller is used for comparing the actual liquid medicine pressure with the preset liquid medicine pressure of the liquid supply port and adjusting the pressure regulating valve when the actual liquid medicine pressure is different from the preset liquid medicine pressure so that the actual liquid medicine pressure is the same as the preset liquid medicine pressure.

[0009] In one embodiment, the pressure regulating valve includes a pneumatic pressure regulating valve, the pressure gauge includes a transmitter, and the controller stores a PID control algorithm.

[0010] In one embodiment, a pressure drainage pipeline mechanism is further included. One end of the pressure drainage pipeline mechanism is connected to the liquid supply pipeline mechanism and is located between the liquid supply bucket and the pressure regulating valve. The other end has a pressure drainage port for draining the liquid medicine in the liquid supply bucket; and / or

[0011] It further includes a liquid medicine detection pipeline mechanism. One end of the liquid medicine detection pipeline mechanism is connected to the liquid supply pipeline mechanism and is located between the liquid supply barrel and the pressure regulating valve, and the other end has a detection port; and / or

[0012] It further includes a liquid medicine recovery pipeline mechanism. One end of the liquid medicine recovery pipeline mechanism is connected to the liquid supply barrel, and the other end has a liquid medicine recovery port for recovering the liquid medicine in the semiconductor device into the liquid supply barrel.

[0013] In one embodiment, it further includes a heating pipeline mechanism. One end of the heating pipeline mechanism is connected to the liquid supply pipeline mechanism and is located between the liquid supply port and the pressure regulating mechanism, and the other end is connected to the liquid supply barrel for circulating and heating the liquid medicine flowing out of the liquid supply barrel and flowing back to the liquid supply barrel through the pressure regulating mechanism and the heating pipeline mechanism in sequence.

[0014] In one embodiment, on the liquid medicine flow path, the heating pipeline mechanism includes a heat exchanger and a heater connected in sequence.

[0015] In one embodiment, the heating pipeline mechanism further includes a filter and a flow meter. On the liquid medicine flow path, the filter, the flow meter, the heat exchanger and the heater are connected in sequence.

[0016] In one embodiment, it further includes a liquid discharge pipeline mechanism. The liquid discharge pipeline mechanism includes a first liquid discharge pipeline mechanism connected to the filter, a second liquid discharge pipeline mechanism connected to the heat exchanger, and a third liquid discharge pipeline mechanism connected to the heater. One end of the first liquid discharge pipeline mechanism away from the filter, one end of the second liquid discharge pipeline mechanism away from the heat exchanger, and one end of the third liquid discharge pipeline mechanism away from the heater all have liquid discharge ports; and / or

[0017] It further includes an exhaust pipeline mechanism. The exhaust pipeline mechanism includes a first exhaust pipeline mechanism, a second exhaust pipeline mechanism and a third exhaust pipeline mechanism. One end of the first exhaust pipeline mechanism is connected to the liquid supply barrel, and the other end has an exhaust port. One end of the second exhaust pipeline mechanism is connected to the filter, and the other end is connected to the first exhaust pipeline mechanism and is located between the liquid supply barrel and the exhaust port. One end of the third exhaust pipeline mechanism is connected to the heater, and the other end is connected to the first exhaust pipeline mechanism and is located between the liquid supply barrel and the exhaust port; and / or

[0018] The heat exchanger includes a heat exchanger body, a cooling water inlet pipeline and a cooling water outlet pipeline. The heat exchanger body has a first channel and a second channel capable of heat exchange. Two ends of the first channel are respectively communicated with the flow meter and the heater for transporting the liquid medicine, and two ends of the second channel are respectively communicated with the cooling water inlet pipeline and the cooling water outlet pipeline for transporting the cooling water.

[0019] In one embodiment, a liquid discharge pipeline mechanism and an exhaust pipeline mechanism are further included;

[0020] The liquid discharge pipeline mechanism includes a first liquid discharge pipeline mechanism connected to the filter, a second liquid discharge pipeline mechanism connected to the heat exchanger, and a third liquid discharge pipeline mechanism connected to the heater. One ends of the first liquid discharge pipeline mechanism far from the filter, the second liquid discharge pipeline mechanism far from the heat exchanger, and the third liquid discharge pipeline mechanism far from the heater all have liquid discharge ports; Liquid discharge manual valves are arranged on the first liquid discharge pipeline mechanism, the second liquid discharge pipeline mechanism, and the third liquid discharge pipeline mechanism;

[0021] The exhaust pipeline mechanism includes a first exhaust pipeline mechanism, a second exhaust pipeline mechanism, and a third exhaust pipeline mechanism. One end of the first exhaust pipeline mechanism is connected to the liquid supply bucket, and the other end has an exhaust port. One end of the second exhaust pipeline mechanism is connected to the filter, and the other end is connected to the first exhaust pipeline mechanism and is located between the liquid supply bucket and the exhaust port. One end of the third exhaust pipeline mechanism is connected to the heater, and the other end is connected to the first exhaust pipeline mechanism and is located between the liquid supply bucket and the exhaust port; An exhaust manual valve is arranged on the second exhaust pipeline mechanism, and an exhaust needle valve is arranged on the third exhaust pipeline mechanism;

[0022] The heat exchanger includes a heat exchanger body, a cooling water inlet pipeline and a cooling water outlet pipeline. The heat exchanger body has a first channel and a second channel capable of heat exchange. Two ends of the first channel are respectively communicated with the flow meter and the heater for transporting the liquid medicine, and two ends of the second channel are respectively communicated with the cooling water inlet pipeline and the cooling water outlet pipeline for transporting the cooling water. On the flow path of the cooling water, a water outlet pneumatic valve, a water outlet needle valve, and a water outlet manual valve are sequentially arranged on the cooling water outlet pipeline.

[0023] In one embodiment, the liquid supply bucket includes a first liquid supply bucket and a second liquid supply bucket;

[0024] The liquid inlet pipeline mechanism includes a total liquid inlet pipeline mechanism, a first liquid inlet pipeline mechanism, and a second liquid inlet pipeline mechanism. One end of the total liquid inlet pipeline mechanism has the liquid inlet. The first liquid inlet pipeline mechanism connects the first liquid supply bucket and the end of the total liquid inlet pipeline mechanism away from the liquid inlet. The second liquid inlet pipeline mechanism connects the second liquid supply bucket and the end of the total liquid inlet pipeline mechanism away from the liquid inlet;

[0025] The liquid supply pipeline mechanism includes a total liquid supply pipeline mechanism, a first liquid supply pipeline mechanism, and a second liquid supply pipeline mechanism. One end of the total liquid supply pipeline mechanism has the liquid supply port. The first liquid supply pipeline mechanism connects the first liquid supply bucket and the end of the total liquid supply pipeline mechanism away from the liquid supply port. The second liquid supply pipeline mechanism connects the second liquid supply bucket and the end of the total liquid supply pipeline mechanism away from the liquid supply port. The pressure regulating valve is arranged on the total liquid supply pipeline mechanism;

[0026] Among them, the total liquid inlet pipeline mechanism, the first liquid inlet pipeline mechanism, the first liquid supply bucket, and the first liquid supply pipeline mechanism form a first liquid medicine pipeline. The total liquid inlet pipeline mechanism, the second liquid inlet pipeline mechanism, the second liquid supply bucket, and the second liquid supply pipeline mechanism form a second liquid medicine pipeline. The first liquid medicine pipeline and the second liquid medicine pipeline can supply liquid to the total liquid supply pipeline mechanism separately or jointly.

[0027] In one embodiment, on the liquid flow path of the liquid medicine, a total liquid inlet manual valve and a total liquid inlet pneumatic valve are sequentially arranged on the total liquid inlet pipeline mechanism. A first liquid inlet pneumatic valve is arranged on the first liquid inlet pipeline mechanism. A second liquid inlet pneumatic valve is arranged on the second liquid inlet pipeline mechanism. A first liquid supply pneumatic pump and a first liquid supply pneumatic valve are sequentially arranged on the first liquid supply pipeline mechanism. A second liquid supply pneumatic pump and a second liquid supply pneumatic valve are sequentially arranged on the second liquid supply pipeline mechanism. A temperature sensor and a total liquid supply pneumatic valve are arranged on the total liquid supply pipeline mechanism between the pressure regulating valve and the liquid supply port;

[0028] The liquid supply device further includes a pressure drainage pipeline mechanism. The pressure drainage pipeline mechanism includes a first pressure drainage pipeline mechanism and a second pressure drainage pipeline mechanism. One end of the first pressure drainage pipeline mechanism is connected to the first liquid supply pipeline mechanism and is located between the first liquid supply pneumatic pump and the first liquid supply pneumatic valve. The other end has a first pressure drainage port for draining the liquid medicine in the first liquid supply bucket. One end of the second pressure drainage pipeline mechanism is connected to the second liquid supply pipeline mechanism and is located between the second liquid supply pneumatic pump and the second liquid supply pneumatic valve. The other end has a second pressure drainage port for draining the liquid medicine in the second liquid supply bucket.

[0029] The liquid supply device further includes a liquid medicine recovery pipeline mechanism. One end of the liquid medicine recovery pipeline mechanism has a liquid medicine recovery port, and the other end has a first liquid medicine recovery pipeline mechanism and a second liquid medicine recovery pipeline mechanism. A first recovery pneumatic valve and a second recovery pneumatic valve are respectively arranged on the first liquid medicine recovery pipeline mechanism and the second liquid medicine recovery pipeline mechanism;

[0030] The liquid supply device further includes a first liquid level sensing mechanism arranged on the first liquid supply bucket and a second liquid level sensing mechanism arranged on the second liquid supply bucket. Both the first liquid level sensing mechanism and the second liquid level sensing mechanism include a low-low liquid level sensor, a low liquid level sensor, a high liquid level sensor, and a high-high liquid level sensor arranged in sequence;

[0031] The liquid supply device further includes a first temperature detection mechanism and a second temperature detection mechanism. The first temperature detection mechanism is arranged on the first liquid supply bucket and is used to detect the temperature of the liquid medicine in the first liquid supply bucket. The second temperature detection mechanism is arranged on the second liquid supply bucket and is used to detect the temperature of the liquid medicine in the second liquid supply bucket.

[0032] When the liquid supply device of the above semiconductor device works, the liquid medicine can enter the liquid inlet pipeline mechanism through the liquid inlet, and then enter the liquid supply bucket through the liquid inlet pipeline mechanism, so that the liquid medicine is placed in the liquid supply bucket. The liquid medicine in the liquid supply bucket can enter the liquid supply pipeline mechanism and be transported to the semiconductor device (for example, the cavity of the semiconductor device) through the liquid supply port to provide the liquid medicine for the semiconductor device. Among them, the pressure regulating valve can regulate the liquid medicine pressure between the pressure regulating valve and the liquid supply port, so that the liquid medicine flow rate at the liquid supply port can be set by setting the pressure of the pressure regulating valve, meeting the basic requirements of the semiconductor device for the liquid medicine flow rate. By detecting the actual liquid medicine pressure between the pressure regulating valve and the liquid supply port through the pressure gauge, and then comparing the actual liquid medicine pressure with the preset liquid medicine pressure at the liquid supply port through the controller, and adjusting the pressure regulating valve when the actual liquid medicine pressure is different from the preset liquid medicine pressure, so that the actual liquid medicine pressure is the same as the preset liquid medicine pressure, thereby improving the pressure regulating accuracy of the pressure regulating mechanism, and further meeting the stability of the flow rate at the liquid supply port and effectively reducing the fluctuation of the liquid medicine flow rate at the liquid supply port. Description of the Drawings

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0034] Figure 1 It is a schematic structural diagram of the liquid supply device of the semiconductor device in an embodiment of the present utility model. Detailed Embodiments

[0035] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following describes in detail the specific embodiments of the present utility model with reference to the accompanying drawings. Many specific details are set forth in the following description to facilitate a full understanding of the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.

[0036] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present utility model.

[0037] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, "a plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0038] In the present utility model, unless otherwise clearly defined and limited, the terms "installed", "connected", "connected to", "fixed", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0039] In the present utility model, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may mean that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0040] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation.

[0041] As Figure 1 shown, the present utility model discloses a liquid supply device 10 for a semiconductor device. The liquid supply device 10 for the semiconductor device includes a liquid supply barrel 100, a liquid inlet pipeline mechanism 200, a liquid supply pipeline mechanism 300 and a pressure regulating mechanism 400. The liquid supply barrel 100 is used for containing liquid medicine. One end of the liquid inlet pipeline mechanism 200 is communicated with the liquid supply barrel 100, and the other end has a liquid inlet 210 for conveying liquid medicine into the liquid supply barrel 100. One end of the liquid supply pipeline mechanism 300 is communicated with the liquid supply barrel 100, and the other end has a liquid supply port 310 for outputting the liquid medicine in the liquid supply barrel 100 to provide liquid medicine for the semiconductor device. The pressure regulating mechanism 400 includes a pressure regulating valve 410, a pressure gauge 420 and a controller 430 that is communicatively connected to the pressure regulating valve 410 and the pressure gauge 420 respectively. The pressure regulating valve 410 is disposed between the liquid supply barrel 100 and the liquid supply port 310 for regulating the liquid medicine pressure between the pressure regulating valve 410 and the liquid supply port 310. The pressure gauge 420 is used for detecting the actual liquid medicine pressure between the pressure regulating valve 410 and the liquid supply port 310. The controller 430 is used for comparing the actual liquid medicine pressure with the preset liquid medicine pressure of the liquid supply port 310 and adjusting the pressure regulating valve 410 when the actual liquid medicine pressure is different from the preset liquid medicine pressure so that the actual liquid medicine pressure is the same as the preset liquid medicine pressure.

[0042] When the liquid supply device 10 of the above semiconductor device is working, the liquid medicine can enter the liquid inlet pipeline mechanism 200 through the liquid inlet 210, and then enter the liquid supply bucket 100 through the liquid inlet pipeline mechanism 200, so that the liquid medicine is placed in the liquid supply bucket 100. The liquid medicine in the liquid supply bucket 100 can enter the liquid supply pipeline mechanism 300 and be transported to the semiconductor device (for example, the cavity of the semiconductor device) through the liquid supply port 310 to provide the liquid medicine for the semiconductor device. Among them, the pressure regulating valve 410 can regulate the liquid medicine pressure between the pressure regulating valve 410 and the liquid supply port 310. Therefore, the liquid medicine flow rate at the liquid supply port 310 can be set by setting the pressure of the pressure regulating valve 410 to meet the basic requirements of the semiconductor device for the liquid medicine flow rate. In practical applications, although the value of the set pressure of the pressure regulating valve 410 is the same as the value of the preset liquid medicine pressure, the actual liquid medicine pressure between the pressure regulating valve 410 and the liquid supply port 310 is often different from the set pressure (preset liquid medicine pressure). That is to say, the pressure regulating accuracy of the pressure regulating valve 410 is poor, and it cannot meet the stability of the flow rate at the liquid supply port 310, easily resulting in large fluctuations in the liquid medicine flow rate at the liquid supply port 310.

[0043] To solve the above problems, in this embodiment, the actual liquid medicine pressure between the pressure regulating valve 410 and the liquid supply port 310 is detected by the pressure detector 420, and then the controller 430 compares the actual liquid medicine pressure with the preset liquid medicine pressure at the liquid supply port 310, and adjusts the pressure regulating valve 410 when the actual liquid medicine pressure is different from the preset liquid medicine pressure, so that the actual liquid medicine pressure is the same as the preset liquid medicine pressure, thereby improving the pressure regulating accuracy of the pressure regulating mechanism 400, and further meeting the stability of the flow rate at the liquid supply port 310, effectively reducing the fluctuations in the liquid medicine flow rate at the liquid supply port 310.

[0044] In this embodiment, the pressure regulating valve 410 includes a pneumatic pressure regulating valve. The pressure detector 420 includes a pressure transmitter. The controller 430 stores a PID control algorithm. By performing closed-loop control on the pneumatic pressure regulating valve through the PID control algorithm, the purpose of accurately controlling the pressure and flow rate can be achieved. It can be understood that in other embodiments, the pressure regulating valve 410 is not limited to a pneumatic pressure regulating valve as long as it can set the pressure to adjust the flow rate, the pressure detector 420 is not limited to a pressure transmitter as long as it can detect the pressure, and the controller 430 is not limited to storing a PID control algorithm as long as it can compare the pressure and adjust the pressure regulating valve 410.

[0045] In this embodiment, the liquid supply device 10 of the semiconductor device further includes a pressure drainage pipeline mechanism 500. One end of the pressure drainage pipeline mechanism 500 is connected to the liquid supply pipeline mechanism 300 and is located between the liquid supply bucket 100 and the pressure regulating valve 410, and the other end has a pressure drainage port 510 for draining the liquid medicine in the liquid supply bucket 100. In this way, it is very convenient to drain the liquid medicine in the liquid supply bucket 100. It can be understood that in other embodiments, the pressure drainage pipeline mechanism 500 can be omitted.

[0046] In this embodiment, the liquid supply device 10 of the semiconductor device further includes a liquid medicine detection pipeline mechanism 600. One end of the liquid medicine detection pipeline mechanism 600 is connected to the liquid supply pipeline mechanism 300 and is located between the liquid supply barrel 100 and the pressure regulating valve 410, and the other end has a detection port 610. In this way, it is very convenient to sample through the detection port 610 for sampling and detecting the liquid medicine in the liquid supply barrel 100. Specifically, in this embodiment, the liquid medicine detection pipeline mechanism 600 is located between the pressure drainage pipeline mechanism 500 and the pressure regulating valve 410. It can be understood that in other embodiments, the liquid medicine detection pipeline mechanism 600 can be omitted.

[0047] In this embodiment, the liquid supply device 10 of the semiconductor device further includes a liquid medicine recovery pipeline mechanism 700. One end of the liquid medicine recovery pipeline mechanism 700 is connected to the liquid supply barrel 100, and the other end has a liquid medicine recovery port 710 for recovering the liquid medicine in the semiconductor device into the liquid supply barrel 100. In this way, when there is unused and uncontaminated liquid medicine in the semiconductor device, the liquid medicine can be recovered into the liquid supply barrel 100 through the liquid medicine recovery pipeline mechanism 700 for use next time. It can be understood that in other embodiments, the liquid medicine recovery pipeline mechanism 700 can be omitted.

[0048] In this embodiment, the liquid supply device 10 of the semiconductor device further includes a heating pipeline mechanism 800. One end of the heating pipeline mechanism 800 is connected to the liquid supply pipeline mechanism 300 and is located between the liquid supply port 310 and the pressure regulating mechanism 400, and the other end is connected to the liquid supply barrel 100 for circulating and heating the liquid medicine flowing out of the liquid supply barrel 100 and flowing back to the liquid supply barrel 100 through the pressure regulating mechanism 400 and the heating pipeline mechanism 800 in sequence. In practical applications, the liquid supply device 10 often needs to provide liquid medicine with a certain temperature for the semiconductor device, which requires heating the liquid medicine before it reaches the semiconductor device. However, in the related art, the liquid medicine in the liquid supply device 10 is locally heated, resulting in uneven liquid medicine temperature and a large temperature change range, which cannot guarantee the equipment process accuracy. To solve the above problems, in this embodiment, the heating pipeline mechanism 800 is provided, and the heating pipeline mechanism 800 can circulate and heat the liquid medicine flowing out of the liquid supply barrel 100 and flowing back to the liquid supply barrel 100 through the pressure regulating mechanism 400 and the heating pipeline mechanism 800 in sequence, thereby solving the problem of uneven liquid medicine temperature in the liquid supply device 10 and resulting in fluctuations in the liquid supply temperature, and the liquid supply temperature of the liquid supply device 10 can guarantee the equipment process accuracy.

[0049] In this embodiment, in the liquid medicine flow path, the heating pipeline mechanism 800 includes a heat exchanger 810 and a heater 820 connected in sequence. In this way, before the liquid medicine is heated by the heater 820, it can first undergo heat exchange through the heat exchanger 810, causing the gaseous liquid medicine to become liquid, thereby ensuring that the liquid medicine entering the heater 820 is basically liquid, and further facilitating the heating by the heater 820. It can be understood that in other embodiments, the heat exchanger 810 can be omitted.

[0050] In this embodiment, the heating pipeline mechanism 800 further includes a filter 830 and a flow meter 840. In the liquid medicine flow path, the filter 830, the flow meter 840, the heat exchanger 810, and the heater 820 are connected in sequence. The liquid medicine is first filtered by the filter 830, which can better protect the flow meter 840, the heat exchanger 810, and the heater 820. By controlling the amount of liquid medicine entering the heat exchanger 810 and the heater 820 through the flow meter 840, it is beneficial to control the temperature of the liquid medicine after passing through the heat exchanger 810 and the heater 820. It can be understood that in other embodiments, at least one of the filter 830 and the flow meter 840 can be omitted.

[0051] In this embodiment, the heat exchanger 810 includes a heat exchanger body 812, a cooling water inlet pipeline 814, and a cooling water outlet pipeline 816. The heat exchanger body 812 has a first channel and a second channel capable of heat exchange. The two ends of the first channel are respectively communicated with the flow meter 840 and the heater 820 for transporting the liquid medicine. The two ends of the second channel are respectively communicated with the cooling water inlet pipeline 814 and the cooling water outlet pipeline 816 for transporting the cooling water. In this way, heat exchange is very convenient. In this embodiment, in the cooling water flow path, an outlet pneumatic valve 8162, an outlet needle valve 8164, and an outlet manual valve 8166 are sequentially arranged on the cooling water outlet pipeline 816. In this way, it is very convenient to control the temperature of the liquid medicine after passing through the heat exchanger 810.

[0052] In this embodiment, the heating pipeline mechanism 800 further includes a liquid discharge pipeline mechanism. The liquid discharge pipeline mechanism includes a first liquid discharge pipeline mechanism 850a connected to the filter 830, a second liquid discharge pipeline mechanism 850b connected to the heat exchanger 810, and a third liquid discharge pipeline mechanism 850c connected to the heater 820. The ends of the first liquid discharge pipeline mechanism 850a away from the filter 830, the ends of the second liquid discharge pipeline mechanism 850b away from the heat exchanger 810, and the ends of the third liquid discharge pipeline mechanism 850c away from the heater 820 all have liquid discharge ports 852. In this way, the waste liquid in the filter 830, the heat exchanger 810, and the heater 820 can be discharged through the liquid discharge ports 852. In this embodiment, liquid discharge manual valves 854 are arranged on the first liquid discharge pipeline mechanism 850a, the second liquid discharge pipeline mechanism 850b, and the third liquid discharge pipeline mechanism 850c. In this way, it is very convenient to control the liquid discharge.

[0053] In this embodiment, the heating pipeline mechanism 800 further includes an exhaust pipeline mechanism. The exhaust pipeline mechanism includes a first exhaust pipeline mechanism 860a, a second exhaust pipeline mechanism 860b, and a third exhaust pipeline mechanism 860c. One end of the first exhaust pipeline mechanism 860a is connected to the liquid supply barrel 100, and the other end has an exhaust port 862. One end of the second exhaust pipeline mechanism 860b is connected to the filter 830, and the other end is connected to the first exhaust pipeline mechanism 860a and is located between the liquid supply barrel 100 and the exhaust port 862. One end of the third exhaust pipeline mechanism 860c is connected to the heater 820, and the other end is connected to the first exhaust pipeline mechanism 860a and is located between the liquid supply barrel 100 and the exhaust port 862. In this way, the waste gas in the liquid supply barrel 100, the filter 830, and the heater 820 can be discharged through the drain port 852. In this embodiment, an exhaust manual valve 864 is provided on the second exhaust pipeline mechanism 860b. An exhaust needle valve 866 is provided on the third exhaust pipeline mechanism 860c. In this way, it is very convenient to control the exhaust.

[0054] In this embodiment, the liquid supply barrel 100 includes a first liquid supply barrel 100a and a second liquid supply barrel 100b. The liquid inlet pipeline mechanism 200 includes a total liquid inlet pipeline mechanism 200a, a first liquid inlet pipeline mechanism 200b, and a second liquid inlet pipeline mechanism 200c. One end of the total liquid inlet pipeline mechanism 200a has a liquid inlet 210. The first liquid inlet pipeline mechanism 200b connects the first liquid supply barrel 100a and the end of the total liquid inlet pipeline mechanism 200a away from the liquid inlet 210, and the second liquid inlet pipeline mechanism 200c connects the second liquid supply barrel 100b and the end of the total liquid inlet pipeline mechanism 200a away from the liquid inlet 210. The liquid supply pipeline mechanism 300 includes a total liquid supply pipeline mechanism 300a, a first liquid supply pipeline mechanism 300b, and a second liquid supply pipeline mechanism 300c. One end of the total liquid supply pipeline mechanism 300a has a liquid supply port 310. The first liquid supply pipeline mechanism 300b connects the first liquid supply barrel 100a and the end of the total liquid supply pipeline mechanism 300a away from the liquid supply port 310. The second liquid supply pipeline mechanism 300c connects the second liquid supply barrel 100b and the end of the total liquid supply pipeline mechanism 300a away from the liquid supply port 310. A pressure regulating valve 410 is provided on the total liquid supply pipeline mechanism 300a. Among them, the total liquid inlet pipeline mechanism 200a, the first liquid inlet pipeline mechanism 200b, the first liquid supply barrel 100a, and the first liquid supply pipeline mechanism 300b form a first liquid medicine pipeline. The total liquid inlet pipeline mechanism 200a, the second liquid inlet pipeline mechanism 200c, the second liquid supply barrel 100b, and the second liquid supply pipeline mechanism 300c form a second liquid medicine pipeline. The first liquid medicine pipeline and the second liquid medicine pipeline can supply liquid to the total liquid supply pipeline mechanism 300a separately or jointly.

[0055] In practical applications, the liquid supply bucket 100 needs to be cleaned regularly. During the cleaning process, the equipment cannot operate normally, resulting in property losses due to the equipment shutdown. To solve the above problems, in this embodiment, by providing a first liquid medicine pipeline and a second liquid medicine pipeline, the first liquid medicine pipeline and the second liquid medicine pipeline can supply liquid to the total liquid supply pipeline mechanism 300a alone or jointly. Thus, when one of the first liquid medicine pipeline and the second liquid medicine pipeline is being cleaned, the other can continue to work, enabling the equipment to operate continuously and avoiding property losses caused by the equipment shutdown. It can be understood that in other embodiments, the number of liquid medicine pipelines can also be greater than or equal to three.

[0056] In this embodiment, on the liquid flow path of the liquid medicine, a total inlet liquid pipeline mechanism 200a is sequentially provided with a total inlet liquid manual valve 220 and a total inlet liquid pneumatic valve 230. A first inlet liquid pipeline mechanism 200b is provided with a first inlet liquid pneumatic valve 240. A second inlet liquid pipeline mechanism 200c is provided with a second inlet liquid pneumatic valve 250. On the liquid flow path of the liquid medicine, a first liquid supply pipeline mechanism 300b is sequentially provided with a first liquid supply pneumatic pump 320 and a first liquid supply pneumatic valve 330. On the liquid flow path of the liquid medicine, a second liquid supply pipeline mechanism 300c is sequentially provided with a second liquid supply pneumatic pump 340 and a second liquid supply pneumatic valve 350. On the liquid flow path of the liquid medicine, the total liquid supply pipeline mechanism 300a is provided with a temperature sensor 360 located between a pressure regulating valve 410 and a liquid supply port 310 and a total liquid supply pneumatic valve 370.

[0057] In practical applications, devices such as pumps in the liquid supply pipeline mechanism 300 need to be maintained regularly. During the maintenance process, the equipment cannot operate normally, resulting in property losses due to the equipment shutdown. To solve the above problems, in this embodiment, a liquid supply pneumatic pump and a liquid supply pneumatic valve are respectively provided on the first liquid medicine pipeline and the second liquid medicine pipeline. The provided temperature sensor 360 can monitor the temperature of the supplied liquid medicine in real time, and the provided total liquid supply pneumatic valve 370 can more conveniently control the supply of the liquid medicine.

[0058] In this embodiment, the pressure drainage pipeline mechanism 500 includes a first pressure drainage pipeline mechanism 500a and a second pressure drainage pipeline mechanism 500b. One end of the first pressure drainage pipeline mechanism 500a is connected to the first liquid supply pipeline mechanism 300b and is located between the first liquid supply pneumatic pump 320 and the first liquid supply pneumatic valve 330, and the other end has a first pressure drainage port 510a for draining the liquid medicine in the first liquid supply bucket 100a. One end of the second pressure drainage pipeline mechanism 500b is connected to the second liquid supply pipeline mechanism 300c and is located between the second liquid supply pneumatic pump 340 and the second liquid supply pneumatic valve 350, and the other end has a second pressure drainage port 510b for draining the liquid medicine in the second liquid supply bucket 100b. In this way, it is very convenient to drain the liquid medicine in the first liquid supply bucket 100a and the second liquid supply bucket 100b.

[0059] In this embodiment, a liquid medicine detection pneumatic valve 620 is provided on the liquid medicine detection pipeline mechanism 600. In this way, it is very convenient to sample through the detection port 610 for the liquid medicine in the liquid supply barrel 100 for sampling detection.

[0060] In this embodiment, one end of the liquid medicine recovery pipeline mechanism 700 has a liquid medicine recovery port 710, and the other end has a first liquid medicine recovery pipeline mechanism 700a and a second liquid medicine recovery pipeline mechanism 700b. A first recovery pneumatic valve 720 and a second recovery pneumatic valve 730 are respectively provided on the first liquid medicine recovery pipeline mechanism 700a and the second liquid medicine recovery pipeline mechanism 700b. In this way, it is very convenient to recover the liquid medicine into the first liquid supply barrel 100a and the second liquid supply barrel 100b.

[0061] In this embodiment, the first liquid supply barrel 100a and the second liquid supply barrel 100b are respectively connected to the heater 820. A first heated liquid medicine pneumatic valve 870 is provided between the first liquid supply barrel 100a and the heater 820. A second heated liquid medicine pneumatic valve 880 is provided between the second liquid supply barrel 100b and the heater 820. In this way, it is very convenient to control the liquid medicine to enter the first liquid supply barrel 100a and the second liquid supply barrel 100b respectively.

[0062] In this embodiment, the liquid supply device 10 of the semiconductor device further includes a first liquid level sensing mechanism provided on the first liquid supply barrel 100a and a second liquid level sensing mechanism provided on the second liquid supply barrel 100b. Both the first liquid level sensing mechanism and the second liquid level sensing mechanism include a low-low liquid level sensor 910, a low liquid level sensor 920, a high liquid level sensor 930, and a high-high liquid level sensor 940 arranged in sequence. In this way, it is very convenient to monitor the liquid levels of the liquid medicine in the first liquid supply barrel 100a and the second liquid supply barrel 100b.

[0063] In this embodiment, the liquid supply device 10 of the semiconductor device further includes a first temperature detection mechanism 950 and a second temperature detection mechanism 960. The first temperature detection mechanism 950 is provided on the first liquid supply barrel 100a for detecting the temperature of the liquid medicine in the first liquid supply barrel 100a. The second temperature detection mechanism 960 is provided on the second liquid supply barrel 100b for detecting the temperature of the liquid medicine in the second liquid supply barrel 100b. In this way, it is very convenient to monitor the temperatures of the liquid medicine in the first liquid supply barrel 100a and the second liquid supply barrel 100b.

[0064] When the liquid supply device 10 of the semiconductor device works, it can use either the second liquid supply barrel 100b for liquid supply or the first liquid supply barrel 100a for liquid supply.

[0065] When using the second liquid supply bucket 100b for liquid supply: Open the main inlet manual valve 220, the main inlet pneumatic valve 230, and the second inlet pneumatic valve 250, and close the first inlet pneumatic valve 240. Inject the liquid medicine into the second liquid supply bucket 100b through the liquid inlet 210. Among them, the position of the liquid medicine is judged by the ultra-low liquid level sensor 910, the low liquid level sensor 920, the high liquid level sensor 930, and the ultra-high liquid level sensor 940 of the second liquid supply bucket 100b. When the liquid medicine is full, close the main inlet pneumatic valve 230 and the second inlet pneumatic valve 250 to complete the liquid inlet; When heating the liquid medicine in the second liquid supply bucket 100b, open the second liquid supply pneumatic pump 340, the second liquid supply pneumatic valve 350, and the second liquid heating pneumatic valve 880. The liquid medicine flows back to the second liquid supply bucket 100b through the second liquid supply pneumatic pump 340, the pressure regulating valve 410, the filter 830, the flow meter 840, the heat exchanger 810, and the heater 820 to complete the circulating heating. Among them, when both the second temperature detection mechanism 960 of the second liquid supply bucket 100b and the temperature sensor 360 meet the temperature requirements, close the second liquid heating pneumatic valve 880 to end the circulating heating; When the semiconductor device needs liquid supply, open the second liquid supply pneumatic pump 340, the second liquid supply pneumatic valve 350, and the main liquid supply pneumatic valve 370, so that the liquid medicine is supplied into the semiconductor device through the liquid supply port 310. Among them, the temperature sensor 360 monitors the temperature of the liquid medicine at the liquid supply port 310.

[0066] When using the first liquid supply bucket 100a for liquid supply: Open the main inlet manual valve 220, the main inlet pneumatic valve 230, and the first inlet pneumatic valve 240, and close the second inlet pneumatic valve 250. Inject the liquid medicine into the first liquid supply bucket 100a through the liquid inlet 210. Among them, the position of the liquid medicine is judged by the ultra-low liquid level sensor 910, the low liquid level sensor 920, the high liquid level sensor 930, and the ultra-high liquid level sensor 940 of the first liquid supply bucket 100a. When the liquid medicine is full, close the main inlet pneumatic valve 230 and the first inlet pneumatic valve 240 to complete the liquid inlet; When heating the liquid medicine in the first liquid supply bucket 100a, open the first liquid supply pneumatic pump 320, the first liquid supply pneumatic valve 330, and the first liquid heating pneumatic valve 870. The liquid medicine flows back to the first liquid supply bucket 100a through the first liquid supply pneumatic pump 320, the pressure regulating valve 410, the filter 830, the flow meter 840, the heat exchanger 810, and the heater 820 to complete the circulating heating. Among them, when both the first temperature detection mechanism 950 of the first liquid supply bucket 100a and the temperature sensor 360 meet the temperature requirements, close the first liquid heating pneumatic valve 870 to end the circulating heating; When the semiconductor device needs liquid supply, open the first liquid supply pneumatic pump 320, the first liquid supply pneumatic valve 330, and the main liquid supply pneumatic valve 370, so that the liquid medicine is supplied into the semiconductor device through the liquid supply port 310. Among them, the temperature sensor 360 monitors the temperature of the liquid medicine at the liquid supply port 310.

[0067] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as falling within the scope described in this specification.

[0068] The above-described embodiments only represent several implementation manners of the present utility model. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can still be made, and these all belong to the protection scope of the present utility model. Therefore, the protection scope of the present utility model patent shall be subject to the appended claims.

Claims

1. A liquid supply device for semiconductor equipment, characterized in that: include: Liquid supply barrel, used to hold liquid medicine; A liquid inlet pipeline mechanism, one end of which is connected to the liquid supply barrel and the other end of which has a liquid inlet for conveying liquid medicine into the liquid supply barrel; A liquid supply pipeline mechanism, one end of which is connected to the liquid supply barrel and the other end of which has a liquid supply port for outputting the liquid in the liquid supply barrel to provide the liquid to the semiconductor device; as well as The pressure regulating mechanism comprises a pressure regulating valve, a pressure measuring device and a controller respectively connected to the pressure regulating valve and the pressure measuring device for communication, wherein the pressure regulating valve is arranged between the liquid supply barrel and the liquid supply port, and is used to regulate the pressure of the liquid medicine between the pressure regulating valve and the liquid supply port, the pressure measuring device is used to detect the actual liquid medicine pressure between the pressure regulating valve and the liquid supply port, the controller is used to compare the actual liquid medicine pressure with the preset liquid medicine pressure of the liquid supply port, and when the actual liquid medicine pressure is different from the preset liquid medicine pressure, adjust the pressure regulating valve to make the actual liquid medicine pressure the same as the preset liquid medicine pressure.

2. The liquid supply device for semiconductor equipment according to claim 1, characterized in that: The pressure regulating valve comprises a pneumatic pressure regulating valve, the pressure measuring device comprises a transmitter, and the controller stores a PID control algorithm.

3. The liquid supply device for semiconductor equipment according to claim 1, characterized in that: It also includes a pressure liquid discharge pipeline mechanism, one end of which is connected to the liquid supply pipeline mechanism and is located between the liquid supply barrel and the pressure regulating valve, and the other end of which is provided with a pressure liquid discharge port for discharging the liquid in the liquid supply barrel; and / or It also includes a liquid medicine detection pipeline mechanism, one end of which is connected to the liquid supply pipeline mechanism and is located between the liquid supply barrel and the pressure regulating valve, and the other end of which has a detection port; and / or It also includes a liquid medicine recovery pipeline mechanism, one end of which is connected to the liquid supply barrel, and the other end of which has a liquid medicine recovery port for recovering the liquid into the semiconductor device into the liquid supply barrel.

4. The liquid supply device for semiconductor equipment according to claim 1, characterized in that: It also includes a heating pipeline mechanism, one end of which is connected to the liquid supply pipeline mechanism and is located between the liquid supply port and the pressure regulating mechanism, and the other end is connected to the liquid supply barrel, and is used for circulating heating of the liquid that flows out of the liquid supply barrel and flows back to the liquid supply barrel through the pressure regulating mechanism and the heating pipeline mechanism in sequence.

5. The liquid supply device for semiconductor equipment according to claim 4, characterized in that: On the flow path of the drug solution, the heating pipeline mechanism includes a heat exchanger and a heater connected in sequence.

6. The liquid supply device for semiconductor equipment according to claim 5, characterized in that: The heating pipeline mechanism also includes a filter and a flow meter. On the flow path of the liquid medicine, the filter, the flow meter, the heat exchanger and the heater are connected in sequence.

7. The liquid supply device for semiconductor equipment according to claim 6, characterized in that: The device further comprises a liquid discharge pipeline mechanism, wherein the liquid discharge pipeline mechanism comprises a first liquid discharge pipeline mechanism connected to the filter, a second liquid discharge pipeline mechanism connected to the heat exchanger, and a third liquid discharge pipeline mechanism connected to the heater, wherein one end of the first liquid discharge pipeline mechanism away from the filter, one end of the second liquid discharge pipeline mechanism away from the heat exchanger, and one end of the third liquid discharge pipeline mechanism away from the heater all have liquid discharge ports; and / or It also includes an exhaust pipeline mechanism, the exhaust pipeline mechanism includes a first exhaust pipeline mechanism, a second exhaust pipeline mechanism and a third exhaust pipeline mechanism, one end of the first exhaust pipeline mechanism is connected to the liquid supply barrel, and the other end has an exhaust port, one end of the second exhaust pipeline mechanism is connected to the filter, and the other end is connected to the first exhaust pipeline mechanism, and is located between the liquid supply barrel and the exhaust port, one end of the third exhaust pipeline mechanism is connected to the heater, and the other end is connected to the first exhaust pipeline mechanism, and is located between the liquid supply barrel and the exhaust port; and / or The heat exchanger includes a heat exchanger body, a cooling water inlet pipeline and a cooling water outlet pipeline. The heat exchanger body has a first channel and a second channel that can perform heat exchange. The two ends of the first channel are respectively connected to the flow meter and the heater for conveying medical solution. The two ends of the second channel are respectively connected to the cooling water inlet pipeline and the cooling water outlet pipeline for conveying cooling water.

8. The liquid supply device for semiconductor equipment according to claim 6, characterized in that: It also includes a liquid discharge pipeline mechanism and an exhaust pipeline mechanism; The drainage pipeline mechanism comprises a first drainage pipeline mechanism connected to the filter, a second drainage pipeline mechanism connected to the heat exchanger, and a third drainage pipeline mechanism connected to the heater, wherein one end of the first drainage pipeline mechanism away from the filter, one end of the second drainage pipeline mechanism away from the heat exchanger, and one end of the third drainage pipeline mechanism away from the heater all have drainage ports; the first drainage pipeline mechanism, the second drainage pipeline mechanism, and the third drainage pipeline mechanism are all provided with drainage manual valves; The exhaust pipeline mechanism includes a first exhaust pipeline mechanism, a second exhaust pipeline mechanism and a third exhaust pipeline mechanism, one end of the first exhaust pipeline mechanism is connected to the liquid supply barrel, and the other end has an exhaust port, one end of the second exhaust pipeline mechanism is connected to the filter, and the other end is connected to the first exhaust pipeline mechanism, and is located between the liquid supply barrel and the exhaust port, one end of the third exhaust pipeline mechanism is connected to the heater, and the other end is connected to the first exhaust pipeline mechanism, and is located between the liquid supply barrel and the exhaust port; the second exhaust pipeline mechanism is provided with an exhaust manual valve, and the third exhaust pipeline mechanism is provided with an exhaust needle valve; The heat exchanger includes a heat exchanger body, a cooling water inlet pipeline and a cooling water outlet pipeline. The heat exchanger body has a first channel and a second channel capable of performing heat exchange. The two ends of the first channel are respectively connected to the flow meter and the heater for conveying the medicine. The two ends of the second channel are respectively connected to the cooling water inlet pipeline and the cooling water outlet pipeline for conveying cooling water. On the cooling water flow path, the cooling water outlet pipeline is sequentially provided with a water outlet pneumatic valve, a water outlet needle valve and a water outlet manual valve.

9. The liquid supply device for semiconductor equipment according to claim 1, characterized in that: The liquid supply barrel comprises a first liquid supply barrel and a second liquid supply barrel; The liquid inlet pipeline mechanism comprises a total liquid inlet pipeline mechanism, a first liquid inlet pipeline mechanism and a second liquid inlet pipeline mechanism, one end of the total liquid inlet pipeline mechanism has the liquid inlet, the first liquid inlet pipeline mechanism connects the first liquid supply barrel and an end of the total liquid inlet pipeline mechanism away from the liquid inlet, and the second liquid inlet pipeline mechanism connects the second liquid supply barrel and an end of the total liquid inlet pipeline mechanism away from the liquid inlet; The liquid supply pipeline mechanism comprises a main liquid supply pipeline mechanism, a first liquid supply pipeline mechanism and a second liquid supply pipeline mechanism, one end of the main liquid supply pipeline mechanism has the liquid supply port, the first liquid supply pipeline mechanism connects the first liquid supply barrel and the end of the main liquid supply pipeline mechanism away from the liquid supply port, the second liquid supply pipeline mechanism connects the second liquid supply barrel and the end of the main liquid supply pipeline mechanism away from the liquid supply port, and the pressure regulating valve is arranged on the main liquid supply pipeline mechanism; Among them, the total liquid inlet pipeline mechanism, the first liquid inlet pipeline mechanism, the first liquid supply barrel and the first liquid supply pipeline mechanism constitute a first liquid medicine pipeline, the total liquid inlet pipeline mechanism, the second liquid inlet pipeline mechanism, the second liquid supply barrel and the second liquid supply pipeline mechanism constitute a second liquid medicine pipeline, and the first liquid medicine pipeline and the second liquid medicine pipeline can supply liquid to the total liquid supply pipeline mechanism individually or jointly.

10. The liquid supply device for semiconductor equipment according to claim 9, characterized in that: On the flow path of the liquid medicine, the total liquid inlet pipeline mechanism is sequentially provided with a total liquid inlet manual valve and a total liquid inlet pneumatic valve, the first liquid inlet pipeline mechanism is provided with a first liquid inlet pneumatic valve, the second liquid inlet pipeline mechanism is provided with a second liquid inlet pneumatic valve, the first liquid supply pipeline mechanism is sequentially provided with a first liquid supply pneumatic pump and a first liquid supply pneumatic valve, the second liquid supply pipeline mechanism is sequentially provided with a second liquid supply pneumatic pump and a second liquid supply pneumatic valve, and the total liquid supply pipeline mechanism is provided with a temperature sensor and a total liquid supply pneumatic valve located between the pressure regulating valve and the liquid supply port; The liquid supply device further comprises a pressure discharge pipeline mechanism, the pressure discharge pipeline mechanism comprises a first pressure discharge pipeline mechanism and a second pressure discharge pipeline mechanism, one end of the first pressure discharge pipeline mechanism is connected to the first liquid supply pipeline mechanism and is located between the first liquid supply pneumatic pump and the first liquid supply pneumatic valve, and the other end has a first pressure discharge port for discharging the liquid medicine in the first liquid supply barrel, one end of the second pressure discharge pipeline mechanism is connected to the second liquid supply pipeline mechanism and is located between the second liquid supply pneumatic pump and the second liquid supply pneumatic valve, and the other end has a second pressure discharge port for discharging the liquid medicine in the second liquid supply barrel; The liquid supply device further comprises a liquid medicine recovery pipeline mechanism, one end of the liquid medicine recovery pipeline mechanism has a liquid medicine recovery port, and the other end has a first liquid medicine recovery pipeline mechanism and a second liquid medicine recovery pipeline mechanism, and the first liquid medicine recovery pipeline mechanism and the second liquid medicine recovery pipeline mechanism are respectively provided with a first recovery pneumatic valve and a second recovery pneumatic valve; The liquid supply device further comprises a first liquid level sensing mechanism provided on the first liquid supply barrel and a second liquid level sensing mechanism provided on the second liquid supply barrel, wherein the first liquid level sensing mechanism and the second liquid level sensing mechanism both comprise an overly low liquid level sensor, a low liquid level sensor, a high liquid level sensor and an overly high liquid level sensor which are arranged in sequence; The liquid supply device also includes a first temperature detection mechanism and a second temperature detection mechanism. The first temperature detection mechanism is arranged on the first liquid supply barrel and is used to detect the temperature of the medicine in the first liquid supply barrel. The second temperature detection mechanism is arranged on the second liquid supply barrel and is used to detect the temperature of the medicine in the second liquid supply barrel.

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