Constant-temperature liquid crystal phased array based on semiconductor technology

Abstract

The utility model provides a constant-temperature liquid crystal phased array system based on semiconductor technology, which comprises a liquid crystal phased array module and a semiconductor temperature control module, liquid crystal materials are clamped between an upper quartz glass substrate and a lower quartz glass substrate, the semiconductor temperature control module is arranged below the lower quartz glass substrate, and the semiconductor temperature control module comprises a ceramic substrate, a metal conductor, an N-type semiconductor and a P-type semiconductor. Precise heating or cooling of the liquid crystal phased array is achieved by changing the current direction. The temperature sensor monitors temperature information in real time and feeds back the temperature information to the control unit, and the control unit dynamically adjusts the semiconductor module to ensure that the liquid crystal phased array stably works within a preset temperature range. According to the system, the influence of environment temperature change on the performance of the liquid crystal phased array is solved, the natural recovery speed of liquid crystal molecules can be increased, the dynamic regulation and control capability of the system is improved, and the system is suitable for various stable temperature environments.

Description

Technical Field

[0001] The utility model relates to liquid crystal phased array technology, in particular to a constant temperature liquid crystal phased array based on semiconductor technology. Background Art

[0002] To meet the various services of mobile terminals operating in L, C, Ku, Ka or W bands, such as wireless Internet, multimedia, communication and broadcast services, electronically reconfigurable millimeter-wave systems have become a current research hotspot due to their advantages of small size, multi-function, high spectral efficiency, strong flexibility, etc., and are used in military and industrial ground station applications, including mobile terminals such as airborne, shipborne or automotive. The technical methods commonly used for phased array beam scanning include radio frequency microelectromechanical systems (RF MEMS), semiconductor solutions and ferroelectrics such as strontium barium titanate (BST). Another method is to use liquid crystal materials with low loss in the high frequency band. Among these methods, liquid crystal is superior to MEMS in terms of lifespan, continuity and packaging; and is superior to BST in terms of frequency range and bias voltage, and is an ideal material for developing beam scanning phased arrays. Liquid crystal display panels have mature manufacturing processes, so liquid crystal phased arrays also have unique advantages in manufacturing cost. In the 3rd Generation Partnership Project and new radio bands, cost-competitive and high-performance liquid crystal-based phased array modules capable of supporting beamforming and beam steering capabilities are the key technologies for emerging small cell base stations and client devices. Therefore, researching liquid crystal phased arrays suitable for various mobile terminals is of great significance to wireless communication systems. However, the performance of liquid crystal phased arrays is greatly affected by temperature. Temperature changes may cause changes in the physical properties of liquid crystals, thereby affecting the phase control accuracy of the phased array, the beam pointing accuracy and the signal transmission quality.

[0003] Traditional heat dissipation or temperature control methods have certain limitations in terms of efficiency, accuracy, and adaptability, and it is difficult to meet the temperature stability requirements of liquid crystal phased arrays in complex working environments and high-performance requirements.

[0004] Liquid crystal phased arrays are usually used for beam scanning and phase control, which requires adjusting the phase of electromagnetic waves by changing the arrangement of liquid crystal molecules. During the operation of the liquid crystal phased array module, the arrangement state of liquid crystal molecules needs to be adjusted frequently according to needs to achieve dynamic regulation. When it is necessary to change the direction or phase of the beam, the arrangement state of liquid crystal molecules needs to be adjusted by an externally applied electric field, rearranged under the action of the externally applied electric field, and return to the initial state after the electric field is removed, so as to prepare for the next adjustment of the arrangement state. However, the existing liquid crystal phased array system relies on the natural restoration of liquid crystal molecules, and the restoration speed is slow, which limits the adjustment speed of the liquid crystal phased array to adjust the beam direction or phase.

[0005] It should be noted that the information disclosed in the above background art is only for understanding the background of the present application, and thus may include information that does not constitute the prior art known to those of ordinary skill in the art. Summary of the Invention

[0006] The main object of the present utility model is to solve the problems existing in the above background art, and to provide a constant-temperature liquid crystal phased array based on semiconductor technology.

[0007] To achieve the above object, the present utility model adopts the following technical solutions:

[0008] A constant-temperature liquid crystal phased array based on semiconductor technology includes a liquid crystal phased array module, a semiconductor temperature control module, a temperature sensor, a power supply, and a control unit; the liquid crystal phased array module includes an upper substrate, a lower substrate, a liquid crystal material disposed between the upper substrate and the lower substrate, a feeding network disposed on the upper surface of the lower substrate, a metal ground disposed on the lower surface of the upper substrate, and an antenna array disposed on the upper substrate; the semiconductor temperature control module is disposed on the lower surface of the liquid crystal phased array module and includes a ceramic upper substrate, a ceramic lower substrate, a metal conductor, an N-type semiconductor, and a P-type semiconductor disposed between the ceramic upper substrate and the ceramic lower substrate. The metal conductor, the N-type semiconductor, and the P-type semiconductor are connected in a power supply circuit, and heating or cooling of the liquid crystal phased array module is achieved by changing the direction of the current; the temperature sensor is configured to detect the temperature of the liquid crystal phased array module; the control unit is connected to the semiconductor temperature control module and the temperature sensor, receives signals from the temperature sensor, and controls the semiconductor temperature control module to heat or cool.

[0009] Furthermore:

[0010] The temperature sensor is disposed between the lower substrate and the ceramic upper substrate.

[0011] The liquid crystal phased array module and the semiconductor temperature control module are integrated by a thermosetting adhesive uniformly distributed between the quartz glass lower substrate and the ceramic upper substrate.

[0012] The control unit and the power supply are integrated on an external board.

[0013] In some embodiments, a temperature-controlled liquid crystal phased array system based on semiconductor technology includes: a liquid crystal phased array module, which is composed of an antenna array, a feeding network, a metal ground, liquid crystal materials, and upper and lower quartz glass substrates, and is used to realize the phase control and direction adjustment of electromagnetic beams; a semiconductor temperature control module, including a semiconductor refrigeration ceramic sheet, a heat dissipation ceramic sheet, a metal conductor, an N-type semiconductor, and a P-type semiconductor, and realizing refrigeration or heating effects through current control; temperature sensors, distributed at key positions of the liquid crystal phased array module to monitor temperature changes in real time; a control unit, receiving signals from the temperature sensors and controlling the semiconductor temperature control module to heat or cool; and a power supply module, used to provide electrical energy for each component of the system. The semiconductor temperature control module utilizes the heat absorption or release phenomenon of P-type and N-type semiconductor materials under the action of direct current, and realizes the heating or cooling of the liquid crystal phased array by changing the current direction. The temperature sensors are distributed between the quartz glass substrate of the liquid crystal phased array module and the ceramic substrate of the semiconductor temperature control module to detect the temperature of the liquid crystal phased array in real time. The control unit adjusts the heating or cooling of the semiconductor temperature control module based on the received temperature signal to maintain the optimal working temperature of the liquid crystal phased array. Through closed-loop control, the system can maintain the stable operation of the liquid crystal phased array at different ambient temperatures and improve the natural recovery speed of liquid crystal molecules.

[0014] The utility model has the following beneficial effects:

[0015] By introducing a semiconductor structure into the liquid crystal phased array system to achieve temperature control, the utility model can not only make the liquid crystal phased array always work within the optimal temperature range, providing a constant-temperature liquid crystal phased array system, but also effectively solve the problems that the liquid crystal phased array system is affected by ambient temperature changes and the natural recovery of liquid crystal molecules is slow, realize the stable operation of the liquid crystal phased array in different stable temperature environments and achieve a fast natural recovery response, and improve the dynamic regulation speed. The utility model can achieve high-precision and fast electromagnetic signal transceiver and modulation in various temperature environments. In addition, the structure of the semiconductor temperature control module is compact, suitable for integrated with the liquid crystal phased array module, and conducive to the miniaturization and portable design of the system.

[0016] Compared with the prior art, the remarkable advantages of the utility model are as follows:

[0017] 1. Efficient and precise temperature control: Utilizing the fast response speed of semiconductor refrigeration technology, it can accurately adjust the temperature of the liquid crystal phased array in a short time, ensure that it always works within the optimal temperature range, and improve performance stability.

[0018] 2. Strong adaptability: It can adapt to various complex working environments. Whether it is high temperature, low temperature or a place with drastic temperature changes, it can effectively maintain the normal operation of the liquid crystal phased array.

[0019] 3. Fast response: By controlling the temperature increase to the preset optimal recovery temperature during the recovery process of liquid crystal molecules, the thermal kinetic energy of liquid crystal molecules is increased, effectively shortening the natural recovery time of liquid crystal molecules, which is beneficial to improving the response speed of the liquid crystal phased array when the beam direction or phase needs to be frequently adjusted.

[0020] 4. Miniaturization and integration: The semiconductor refrigeration module has a compact structure and is easy to integrate with the liquid crystal phased array, without significantly increasing the volume and weight of the system, which is beneficial to the miniaturization and portability of the equipment.

[0021] The temperature-controlled liquid crystal phased array system based on semiconductor technology of the present utility model realizes precise control of the working temperature of the liquid crystal phased array by introducing semiconductor temperature control technology, improving the stability and dynamic regulation speed of the system. This system has broad application prospects and provides a new solution for the development of liquid crystal phased array technology.

[0022] Other beneficial effects in the embodiments of the present utility model will be further described below. Description of the Drawings

[0023] Figure 1 is a three-dimensional view of a temperature-controlled liquid crystal phased array system based on semiconductor technology according to an embodiment of the present utility model;

[0024] Figure 2 is a semiconductor temperature control schematic diagram of a temperature-controlled liquid crystal phased array system based on semiconductor technology according to an embodiment of the present utility model;

[0025] Figure 3 is an environmental temperature control logic block diagram of a temperature-controlled liquid crystal phased array system based on semiconductor technology according to an embodiment of the present utility model;

[0026] Figure 4 is a fast response temperature control logic block diagram of a temperature-controlled liquid crystal phased array system based on semiconductor technology according to an embodiment of the present utility model;

[0027] Figure 5 is a liquid crystal electric tuning schematic diagram of a temperature-controlled liquid crystal phased array system based on semiconductor technology according to an embodiment of the present utility model. Detailed Embodiments

[0028] The following makes a detailed description of the embodiments of the present utility model. It should be emphasized that the following description is merely exemplary and not intended to limit the scope and application of the present utility model.

[0029] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element. In addition, the connection can be for a fixing function or for a coupling or communication function.

[0030] It should be understood that the orientation or positional relationship indicated by terms such as "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the present invention.

[0031] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present invention, "a plurality of" means two or more, unless otherwise specifically defined.

[0032] Refer to Figure 1 and Figure 2, an embodiment of the present utility model provides a constant-temperature liquid crystal phased array based on semiconductor technology, which includes a liquid crystal phased array module, a semiconductor temperature control module, a temperature sensor, a power supply, and a control unit; the liquid crystal phased array module includes a quartz glass upper substrate 102, a quartz glass lower substrate 106, a liquid crystal material 104 disposed between the quartz glass upper substrate 102 and the quartz glass lower substrate 106, a feeding network 105 arranged on the upper surface of the quartz glass lower substrate 106, a metal ground 103 arranged on the lower surface of the quartz glass upper substrate 102, and an antenna array 101 arranged on the quartz glass upper substrate 102; the semiconductor temperature control module is disposed on the lower surface of the quartz glass lower substrate 106 and includes a ceramic upper substrate 107, a ceramic lower substrate 110, a metal conductor 108 disposed between the ceramic upper substrate 107 and the ceramic lower substrate 110, and a semiconductor 109. The semiconductor 109 includes an N-type semiconductor and a P-type semiconductor. The metal conductor 108, the N-type semiconductor, and the P-type semiconductor are connected in a power supply circuit, and heating or cooling of the liquid crystal phased array module is achieved by changing the direction of the current; the temperature sensor is arranged to detect the temperature of the liquid crystal phased array module; the control unit is connected to the semiconductor temperature control module and the temperature sensor, receives signals from the temperature sensor, and controls the semiconductor temperature control module to heat or cool. Thus, the temperature of the liquid crystal phased array module can be regulated within a preset temperature range.

[0033] The present utility model can also be used to improve the fast response performance of the liquid crystal phased array when realizing dynamic regulation. During the working process of the liquid crystal phased array module, when it is monitored that the voltage for applying an external electric field to the liquid crystal molecules is removed, the control unit controls the semiconductor temperature control module to heat the liquid crystal phased array module to accelerate the recovery process of the liquid crystal molecules to the initial alignment state (see Figure 5 ). Further, during the recovery process of the liquid crystal molecules, the control unit monitors the temperature of the liquid crystal phased array in real time and compares it with a preset optimal recovery temperature. If the temperature of the liquid crystal phased array is lower than the preset optimal recovery temperature, the control unit controls the working state of the semiconductor temperature control module to continue heating the liquid crystal phased array until the preset optimal recovery temperature is reached (see Figure 4 ). Thus, compared with the traditional liquid crystal phased array, when the DC voltage is withdrawn, the natural recovery process of the liquid crystal molecules to the initial alignment state is usually slow and difficult to meet the requirements of fast regulation response. The present utility model can effectively improve the fast response performance of the liquid crystal phased array when realizing dynamic regulation.

[0034] The temperature-controlled liquid crystal phased array system based on semiconductor technology of the present utility model. The liquid crystal phased array module, temperature sensor, semiconductor temperature control module, control unit, and power supply module form a closed-loop control system. The temperature of the liquid crystal phased array is monitored in real time by the temperature sensor, and the monitored temperature signal is fed back to the control unit. The control unit dynamically adjusts the working state of the semiconductor temperature control module according to the received temperature signal and the preset temperature target to achieve precise temperature control of the liquid crystal phased array module. The temperature-controlled liquid crystal phased array system based on semiconductor technology of the present utility model can maintain the stable operation of the liquid crystal phased array in different temperature environments. In particular, the present utility model can significantly accelerate the natural recovery response of its liquid crystal molecules, thereby improving the response speed of the liquid crystal phased array when the beam direction or phase needs to be adjusted frequently, so as to better meet the requirements of rapid dynamic regulation, and has the potential for wide application in the future wireless communication field.

[0035] The following further describes specific embodiments of the present utility model.

[0036] The temperature-controlled liquid crystal phased array system based on semiconductor technology in an embodiment of the present utility model includes the following parts: The liquid crystal phased array module, including an antenna array, a feeding network, liquid crystal materials, and upper and lower quartz glass substrates, is used to achieve phase control and pointing adjustment of the beam. The semiconductor temperature control module is composed of a semiconductor refrigeration ceramic sheet, a heat dissipation ceramic sheet, a metal conductor, N-type and P-type semiconductors, and realizes refrigeration or heating effects through current control. The temperature sensors are distributed at positions where the temperature of the liquid crystal phased array module can be effectively measured to monitor its temperature change in real time. The control unit receives the signals of the temperature sensors and controls the working state of the semiconductor refrigeration / heating ceramic sheet according to the preset temperature range.

[0037] The overall structure of the system is as Figure 1 shown. The liquid crystal phased array module, temperature sensor, semiconductor temperature control module, control unit, and power supply module together form a closed-loop control system. The temperature of the liquid crystal phased array is monitored in real time by the temperature sensor, and the temperature signal is fed back to the control unit. The control unit adjusts the working state of the semiconductor temperature control module according to the temperature signal and the preset temperature target, thereby realizing temperature control of the liquid crystal phased array module.

[0038] In some embodiments, the temperature sensor monitors the temperature of the liquid crystal phased array in real time and transmits the data to the control unit. The control unit compares the received temperature with the preset optimal working temperature range. If the temperature is higher than the upper limit, the control unit activates the semiconductor refrigeration ceramic sheet to take away the heat until the temperature drops to the appropriate range. If the temperature is lower than the lower limit, the control unit switches to the semiconductor heating ceramic sheet to provide heat for the liquid crystal phased array to ensure its normal operation.

[0039] In some embodiments, a temperature-controlled liquid crystal phased array system based on semiconductor technology includes a liquid crystal phased array module, a temperature sensor, a semiconductor temperature control module, a control unit, and a power supply module, as Figure 1 shown. Among them, the liquid crystal phased array module consists of an antenna array 101, a quartz glass upper substrate 102, a metal ground 103, a liquid crystal material 104, a feeding network 105, and a quartz glass lower substrate 106; the semiconductor temperature control module consists of a ceramic upper substrate 107, a metal conductor 108, a ceramic lower substrate 110, and a semiconductor 109 (N-type and P-type semiconductors). The temperature sensor is loaded between the quartz glass lower substrate 106 and the ceramic upper substrate 107, and the control unit and the power supply module are integrated on an external board. The liquid crystal phased array module and the semiconductor temperature control module are integrated by a thermosetting adhesive evenly distributed between the quartz glass lower substrate 106 and the ceramic upper substrate 107.

[0040] The principle of the semiconductor temperature control module is as Figure 2 shown. The P-type semiconductor material and the N-type semiconductor material are ingeniously integrated and combined. When a direct current flows through this integrated structure, heat absorption or release occurs at the contact point of the two materials. This phenomenon is based on the difference in energy states during the migration of electrons between the P-type and N-type semiconductor materials. By adjusting the direction of the current, precise control of heat absorption and release at the contact point can be achieved, thereby selectively cooling or heating at specific positions.

[0041] As an application of the temperature-controlled liquid crystal phased array system based on semiconductor technology, the environmental temperature control logic block diagram is as Figure 3 shown, and the temperature control method specifically includes:

[0042] Start: Initialize the system components (liquid crystal phased array module, temperature sensor, control unit, semiconductor temperature control module), including powering on the system and establishing communication between the control unit and all modules.

[0043] Temperature monitoring: Continuously monitor the temperature through the temperature sensors distributed in the liquid crystal phased array. The temperature sensors provide real-time data, which is crucial for maintaining the performance of the liquid crystal phased array.

[0044] Temperature evaluation: Compare the measured temperature with the preset optimal temperature range. If the temperature is within the range, maintain the current state (idle). The control unit evaluates whether the current temperature needs to be adjusted.

[0045] Temperature adjustment: According to the temperature deviation, the system cools or heats the liquid crystal phased array, where:

[0046] 1) If the temperature exceeds the upper limit, activate the semiconductor refrigeration module to lower the temperature and monitor the temperature until it returns to the optimal range.

[0047] 2) If the temperature is below the lower limit, activate the semiconductor heating module to raise the temperature and monitor the temperature until it returns to the optimal range.

[0048] System feedback: Continuously feed the data of the temperature sensor back to the control unit to adjust the refrigeration / heating operation and check whether the adjustment has restored the temperature to the expected range.

[0049] Return to the temperature monitoring step and repeat the process to ensure that the system is maintained within the optimal temperature range.

[0050] As an application, the quick-response temperature control logic block diagram of another temperature-controlled liquid crystal phased array system based on semiconductor technology is as Figure 4 shown, and the temperature control method specifically includes:

[0051] Start: Initialize the system components, including the liquid crystal phased array, temperature sensor, control unit, and semiconductor temperature control module.

[0052] Voltage regulation: Apply a voltage to the liquid crystal phased array to align the liquid crystal molecules and achieve the desired phased array effect.

[0053] Voltage removal: Remove the voltage and the liquid crystal molecules start to recover naturally.

[0054] Rapid temperature increase: Immediately after the voltage is removed, quickly raise the temperature through the temperature control module to increase the movement speed of the liquid crystal molecules, thereby accelerating the recovery process.

[0055] Temperature monitoring: Real-time monitor the recovery temperature of the liquid crystal phased array. If the optimal recovery temperature is not reached, continue to raise the temperature (the optimal response time is set by the tester system).

[0056] If the recovery temperature meets the set range: Maintain the current temperature or appropriately lower the temperature to save energy.

[0057] System feedback: Feed the temperature and recovery time data back to the control unit to dynamically adjust the temperature settings.

[0058] Return to the voltage regulation step and repeat the process to ensure that the response time of the liquid crystal molecules is always in the fastest state.

[0059] As Figure 5As shown, the present utility model can be used to accelerate the recovery response time of liquid crystal molecules. When no voltage is applied, the liquid crystal molecules spontaneously arrange due to the existence of the alignment layer, forming a layered structure consistent with the direction of the alignment layer, which is the initial state of the liquid crystal after encapsulation; when a DC voltage is applied, the liquid crystal molecules gradually rearrange under the action of the external electric field, and their long axes point in the direction of the electric field; when the DC voltage is removed, the liquid crystal molecules will naturally return to the initial arrangement state. However, this natural recovery process of liquid crystal molecules is usually relatively slow, making it difficult to meet the requirements of liquid crystal phased arrays for fast regulation response time. Therefore, the present utility model can monitor the temperature of the liquid crystal phased array during the recovery process of liquid crystal molecules, control the semiconductor temperature control module to increase the temperature of the liquid crystal phased array to the set optimal recovery temperature during the recovery process of liquid crystal molecules, increase the thermal kinetic energy of the liquid crystal molecules, and thus effectively accelerate the regulation response speed of the liquid crystal phased array.

[0060] In summary, the present utility model provides a temperature-controlled liquid crystal phased array system based on semiconductor technology. By introducing semiconductor temperature control technology, it realizes precise control of the working temperature of the liquid crystal phased array, improves the stability and dynamic regulation speed of the system. This system has broad application prospects and provides a new solution for the development of liquid crystal phased array technology.

[0061] The above content is a further detailed description of the present utility model in combination with specific / preferred embodiments. It cannot be determined that the specific implementation of the present utility model is only limited to these descriptions. For those of ordinary skill in the technical field to which the present utility model belongs, without departing from the concept of the present utility model, they can make several substitutions or modifications to these described embodiments, and these substitution or modification methods should all be regarded as belonging to the protection scope of the present utility model. In the description of this specification, the description of reference terms such as "one embodiment", "some embodiments", "preferred embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. Without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples. Although the embodiments of the present utility model and their advantages have been described in detail, it should be understood that various changes, substitutions, and alterations can be made herein without departing from the scope of protection of the patent application.

Claims

1. A constant temperature liquid crystal phased array based on semiconductor technology, characterized in that: The invention comprises a liquid crystal phased array module, a semiconductor temperature control module, a temperature sensor, a power supply and a control unit; the liquid crystal phased array module comprises an upper substrate, a lower substrate, a liquid crystal material arranged between the upper substrate and the lower substrate, a feed network arranged on the upper surface of the lower substrate, a metal ground arranged on the lower surface of the upper substrate, and an antenna array arranged on the upper substrate; the semiconductor temperature control module is arranged on the lower surface of the liquid crystal phased array module, comprises a ceramic upper substrate, a ceramic lower substrate, a metal conductor arranged between the ceramic upper substrate and the ceramic lower substrate, an N-type semiconductor and a P-type semiconductor, the metal conductor, the N-type semiconductor and the P-type semiconductor are connected in a power supply circuit, and the liquid crystal phased array module is heated or cooled by changing the direction of the current; the temperature sensor is arranged to detect the temperature of the liquid crystal phased array module; the control unit is connected to the semiconductor temperature control module and the temperature sensor, and receives a signal from the temperature sensor to control the semiconductor temperature control module to heat or cool.

2. The constant temperature liquid crystal phased array based on semiconductor technology as claimed in claim 1, characterized in that: The temperature sensor is disposed between the lower substrate and the ceramic upper substrate.

3. The constant temperature liquid crystal phased array based on semiconductor technology as claimed in claim 1 or 2, characterized in that: The liquid crystal phased array module and the semiconductor temperature control module are integrated by a thermal curing adhesive uniformly distributed between the lower substrate and the ceramic upper substrate.

4. The constant temperature liquid crystal phased array based on semiconductor technology as claimed in claim 1 or 2, characterized in that: The control unit and the power supply are integrated into an external board.

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