Crystal edge protection ring ejector pin
By designing a crystal edge protection ring thimble that includes a thimble structure and a clamping structure, the problem of the crystal edge protection ring being displaced after wear due to small protrusions is solved, and a more stable product etching process and lower usage cost is achieved.
Patent Information
- Application Number
- CN202421999149.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-19
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-08-19
AI Technical Summary
In deep silicon dry etching machines, the crystal edge protection ring thimble pin is small, which can easily lead to offset of the protection ring after wear, causing abnormal product etching area and reducing the practicality of the device.
A crystal edge protection ring thimble including a thimble structure and a clamping structure is designed. The sliding rod, limit block and spring are arranged to realize the disassembly and assembly and replacement of the bumps, ensuring that the main body of the crystal edge protection ring always has connections during the rising and falling process to avoid deviation.
Through the setting of the bumps, the crystal edge protection ring is avoided due to wear, which improves the stability and practicality of product etching. At the same time, the setting of the clamping components is convenient for the disassembly and assembly and replacement of the bumps, reducing the cost of use.
Smart Images
Figure CN223023227U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of protective ring thimbles, and more particularly, to a crystal edge protective ring thimble. Background Art
[0002] A deep silicon dry etcher is a device used in semiconductor manufacturing and belongs to a type of dry etcher. Dry etching is a technology for etching thin films by utilizing the relatively strong chemical activity of plasma. According to the ion etching mechanism used, dry etching can be divided into three types: physical etching, chemical etching, and physical-chemical etching. The deep silicon dry etcher is mainly used for etching silicon materials, especially in integrated circuit manufacturing, where it can precisely remove silicon materials to form the required circuit structures.
[0003] During the product etching process, the protrusion of the crystal edge protective ring thimble is small, and it is prone to causing the protective ring to shift after wear, resulting in abnormal etching areas of the product and reducing the practicality of the device. Summary of the Utility Model
[0004] To make up for the above deficiencies, this application provides a crystal edge protective ring thimble, aiming to improve the problem that during the product etching process, the protrusion of the crystal edge protective ring thimble is small, and it is prone to shifting after wear, resulting in abnormal etching areas of the product and reducing the practicality of the device.
[0005] An embodiment of this application provides a crystal edge protective ring thimble, including a thimble structure and a clamping structure. The thimble structure includes a crystal edge protective ring main body, a thimble main body, a fixing block, and a convex block. The fixing block is connected to the thimble main body, the convex block is slidably connected to the fixing block, the fixing block is attached to the crystal edge protective ring main body, the clamping structure includes a clamping component and a pulling block, the pulling block is connected to the clamping component, the clamping component is disposed in the fixing block, and the clamping component is clamped with the convex block.
[0006] In a specific implementation, the clamping component includes a sliding rod, a limiting block, and a spring. The sliding rod is connected to the pulling block, the sliding rod is slidably connected to the fixing block, the sliding rod is clamped with the convex block, the limiting block is connected to the sliding rod, the limiting block is slidably connected to the fixing block, and the spring is sleeved on the sliding rod.
[0007] In the above implementation process, through the settings of the sliding rod, the limiting block, and the spring, it is convenient to disassemble and replace the convex block, reducing the usage cost.
[0008] In a specific implementation, a first sliding groove is formed in the inner wall of the fixing block, and the limiting block is slidably connected to the first sliding groove.
[0009] In the above implementation process, by sliding the limiting block in the first sliding groove, it is convenient to limit the movement of the limiting block.
[0010] In a specific implementation, a clamping groove is provided on the outer ring of the convex block, and the sliding rod is clamped with the clamping groove.
[0011] In the above implementation process, by clamping the sliding rod with the clamping groove, it is convenient to connect the sliding rod with the convex block.
[0012] In a specific implementation, a slider is provided on the outer ring of the convex block, a second sliding groove is provided on one side of the fixed block, and the slider is slidably connected with the second sliding groove.
[0013] In the above implementation process, by sliding the slider in the second sliding groove, it is convenient to limit the movement of the convex block.
[0014] In a specific implementation, a limiting groove is provided on one side of the main body of the crystal edge protection ring.
[0015] In the above implementation process, by providing a limiting groove on one side of the main body of the crystal edge protection ring, it is convenient to limit and prevent the main body of the crystal edge protection ring from shifting.
[0016] In a specific implementation, the top of the convex block is set to be arc-shaped.
[0017] In the above implementation process, by setting the top of the convex block to be arc-shaped, it is convenient to improve the effect of limiting.
[0018] In a specific implementation, a plurality of grooves are uniformly provided on the outer ring of the pulling block.
[0019] In the above implementation process, by uniformly providing a plurality of grooves on the outer ring of the pulling block, it is convenient to increase the friction force and facilitate the user to pull the pulling block.
[0020] Compared with the prior art, the beneficial effects of the present application are as follows: through the setting of the convex block, it is convenient to maintain the connection during the rising and falling processes of the main body of the crystal edge protection ring, avoiding the shift of the main body of the crystal edge protection ring due to wear. Through the setting of the clamping component, it is convenient to disassemble, install and replace the convex block, reducing the use cost. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and thus should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.
[0022] Figure 1 It is a schematic diagram of a thimble structure of a crystal edge protection ring provided by an embodiment of the present application;
[0023] Figure 2 It is a schematic cross-sectional structure diagram of a thimble structure of a crystal edge protection ring provided by an embodiment of the present application;
[0024] Figure 3 It is a schematic diagram of the connection relationship between the thimble structure and the clamping component provided by an embodiment of the present application;
[0025] Figure 4 It is a schematic cross-sectional structure diagram of the clamping component provided by an embodiment of the present application.
[0026] In the figure: 10 - thimble structure; 110 - crystal edge protection ring body; 120 - thimble body; 130 - fixing block; 140 - convex block; 150 - slider; 160 - limiting groove; 20 - clamping structure; 210 - clamping component; 211 - sliding rod; 212 - limiting block; 213 - spring; 220 - pulling block. Specific embodiments
[0027] Next, the technical solutions in the embodiments of the present application will be described with reference to the accompanying drawings in the embodiments of the present application.
[0028] To make the purpose, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.
[0029] Embodiment
[0030] Please refer to Figure 1 , the present application provides a crystal edge protection ring thimble, including a thimble structure 10 and a clamping structure 20.
[0031] Specifically, the thimble structure 10 facilitates avoiding the offset of the crystal edge protection ring body 110 due to wear.
[0032] Please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 , the thimble structure 10 includes a crystal edge protection ring body 110, a thimble body 120, a fixing block 130, and a convex block 140. The fixing block 130 is connected to the thimble body 120, the convex block 140 is slidably connected to the fixing block 130, and the fixing block 130 is attached to the crystal edge protection ring body 110.
[0033] When specifically set, a slider 150 is arranged on the outer ring of the bump 140. A second sliding groove is formed on one side of the fixed block 130, and the slider 150 is slidably connected to the second sliding groove. Among them, by the sliding connection between the slider 150 and the second sliding groove, the movement of the bump 140 can be conveniently limited.
[0034] When specifically set, a limiting groove 160 is formed on one side of the main body 110 of the crystal edge protection ring. Among them, by forming the limiting groove 160 on one side of the main body 110 of the crystal edge protection ring, limiting can be facilitated and the main body 110 of the crystal edge protection ring can be prevented from shifting.
[0035] When specifically set, the top of the bump 140 is arc-shaped. Among them, by setting the top of the bump 140 to be arc-shaped, the limiting effect can be conveniently improved.
[0036] Please refer to Figure 1 、 Figure 3 and Figure 4 , the clamping structure 20 includes a clamping component 210 and a pulling block 220. The pulling block 220 is connected to the clamping component 210. The clamping component 210 is arranged in the fixed block 130, and the clamping component 210 is clamped with the bump 140.
[0037] When specifically set, the clamping component 210 includes a sliding rod 211, a limiting block 212 and a spring 213. The sliding rod 211 is connected to the pulling block 220. The sliding rod 211 is slidably connected to the fixed block 130. The sliding rod 211 is clamped with the bump 140. The limiting block 212 is connected to the sliding rod 211. The limiting block 212 is slidably connected to the fixed block 130. The spring 213 is sleeved on the sliding rod 211. Among them, through the arrangement of the sliding rod 211, the limiting block 212 and the spring 213, the bump 140 can be conveniently disassembled, assembled and replaced, and the use cost is reduced.
[0038] When specifically set, a first sliding groove is formed on the inner wall of the fixed block 130, and the limiting block 212 is slidably connected to the first sliding groove. Among them, by the sliding connection between the limiting block 212 and the first sliding groove, the movement of the limiting block 212 can be conveniently limited.
[0039] When specifically set, a clamping groove is formed on the outer ring of the bump 140, and the sliding rod 211 is clamped with the clamping groove. Among them, by the clamping connection between the sliding rod 211 and the clamping groove, the clamping connection between the sliding rod 211 and the bump 140 can be facilitated.
[0040] When specifically set, a plurality of grooves are evenly formed on the outer ring of the pulling block 220. Among them, by evenly forming a plurality of grooves on the outer ring of the pulling block 220, the friction force can be conveniently increased and the user can conveniently pull the pulling block 220.
[0041] The working principle of the crystal edge protection ring thimble: When using the crystal edge protection ring thimble, due to the setting of the bump 140, it is convenient to maintain the connection during the up and down movement of the crystal edge protection ring body 110, avoiding the offset of the crystal edge protection ring body 110 caused by wear. By pulling the pull block 220 to drive the sliding rod 211 and the limiting block 212 to move and compress the spring 213, the sliding rod 211 is disengaged from the engagement with the bump 140, which facilitates the disassembly and replacement of the bump 140 and reduces the use cost.
[0042] It should be noted that the specific model specifications of the crystal edge protection ring body 110 need to be selected and determined according to the actual specifications of the device, etc. The specific selection calculation method adopts the existing technology in this field, so it will not be elaborated in detail here.
[0043] The above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should all be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.
Claims
1. A crystal edge protection ring ejector, characterized in that: include An ejector pin structure (10), the ejector pin structure (10) comprising a crystal edge protection ring body (110), an ejector pin body (120), a fixing block (130) and a protrusion (140), the fixing block (130) being connected to the ejector pin body (120), the protrusion (140) being slidably connected to the fixing block (130), and the fixing block (130) being in contact with the crystal edge protection ring body (110); A clamping structure (20), the clamping structure (20) comprising a clamping assembly (210) and a pull block (220), the pull block (220) being connected to the clamping assembly (210), the clamping assembly (210) being arranged in the fixing block (130), and the clamping assembly (210) being clamped to the protrusion (140).
2. The crystal edge protection ring ejector according to claim 1, characterized in that: The clamping assembly (210) comprises a sliding rod (211), a limiting block (212) and a spring (213); the sliding rod (211) is connected to the pulling block (220); the sliding rod (211) is slidably connected to the fixing block (130); the sliding rod (211) is clamped to the protrusion (140); the limiting block (212) is connected to the sliding rod (211); the limiting block (212) is slidably connected to the fixing block (130); and the spring (213) is sleeved on the sliding rod (211).
3. The crystal edge protection ring ejector according to claim 2, characterized in that: The inner wall of the fixing block (130) is provided with a first sliding groove, and the limiting block (212) is slidably connected to the first sliding groove.
4. The crystal edge protection ring ejector according to claim 2, characterized in that: The outer ring of the protrusion (140) is provided with a slot, and the sliding rod (211) is engaged with the slot.
5. The crystal edge protection ring ejector according to claim 1, characterized in that: The outer ring of the protrusion (140) is provided with a sliding block (150), a second sliding groove is opened on one side of the fixed block (130), and the sliding block (150) is slidably connected to the second sliding groove.
6. The crystal edge protection ring ejector according to claim 1, characterized in that: A limiting groove (160) is provided on one side of the crystal edge protection ring body (110).
7. The crystal edge protection ring ejector according to claim 1, characterized in that: The top of the protrusion (140) is arranged to be arc-shaped.
8. The crystal edge protection ring ejector according to claim 1, characterized in that: The outer ring of the pulling block (220) is evenly provided with a plurality of grooves.