Monocrystalline silicon wafer degumming machine clamp
By designing a single crystal silicon wafer degumming machine fixture with stepper motor and damping pad, the problems of poor degumming effect of single crystal silicon wafers and inconvenient fixtures in the prior art are solved, and more efficient degumming effect and more convenient use of single crystal silicon wafers are achieved.
Patent Information
- Application Number
- CN202422073420.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-26
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-08-26
AI Technical Summary
The existing single crystal silicon wafer degumming machine fixtures and degumming machines are fixedly installed, resulting in insufficient contact between the single crystal silicon wafer and the degumming liquid, poor degumming effect, and the fixtures are inconvenient to quickly degumming into the degumming machine, resulting in inconvenient access to the single crystal silicon wafer after degumming.
A single crystal silicon wafer degumming machine fixture is designed, including a degumming box, stepper motor, screw rod, threaded block and motor protective case. The stepper motor drives the movement of the screw rod and threaded block to realize the lifting and rotating of the fixture body, so that the single crystal silicon wafer can fully contact the degumming liquid, and increase the friction with the single crystal silicon wafer through the damping pad to ensure its stable installation.
The contact area and contact strength between the single crystal silicon wafer and the degumming liquid are improved, and the degumming effect is significantly improved. Through the lifting and rotating functions of the fixture, the acquisition of the single crystal silicon wafer is facilitated, solving the problem that the fixture is inconvenient to quickly detach from the degumming machine.
Smart Images
Figure CN223023229U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon slice debonding, in particular to a single crystal silicon slice debonding machine clamp. Background Art
[0002] Debonding of single crystal silicon wafers refers to the process of removing the adhesive film attached to the surface of the silicon wafer. During the manufacturing process, a layer of adhesive film is applied to the silicon wafer to protect its surface, but for subsequent processing and application, this film needs to be removed. Usually, this process uses chemical solvents to remove the adhesive film to ensure that the surface of the silicon wafer is clean and its performance and quality are guaranteed. After debonding, the silicon wafer can be further processed or assembled.
[0003] When degumming a single crystal silicon wafer, it is necessary to use a clamp to fix the single crystal silicon wafer, and then put the single crystal silicon wafer fixed on the clamp into a degumming machine for degumming. However, most of the existing clamps are fixedly installed on the degumming machine, and the single crystal silicon wafer on the clamp is not in sufficient contact with the degumming liquid in the degumming machine, the degumming effect of the single crystal silicon wafer is not good, and the clamp is not convenient to quickly remove from the degumming machine, which is not convenient for taking the single crystal silicon wafer after degumming. For this reason, we propose a clamp for a single crystal silicon wafer degumming machine. Utility Model Content
[0004] The utility model aims to provide a single crystal silicon wafer degumming machine clamp to solve the problems in the above background technology that the single crystal silicon wafer degumming effect is poor and the clamp is not convenient to quickly detach from the degumming machine, resulting in inconvenient access to the single crystal silicon wafer after degumming.
[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0006] A single crystal silicon wafer degumming machine fixture comprises a degumming box, a left L-shaped plate is installed on the top of the left side wall of the degumming box, a stepper motor is installed on the left L-shaped plate, and the output end of the stepper motor is connected to a lead screw, the bottom end of the lead screw is rotatably connected to the bottom wall of the inner cavity of the degumming box through a bearing, a threaded block is threadedly connected to the lead screw, a motor protection shell is installed on the outer wall of the threaded block, and a motor is arranged in the motor protection shell, the output end of the motor is connected to a fixture body, a right L-shaped plate is installed on the top of the right side wall of the degumming box, a vertical rod is connected between the inner side surface of the right L-shaped plate and the bottom wall of the inner cavity of the degumming box, a slider is slidably connected to the vertical rod, and the slider is rotatably connected to the fixture body.
[0007] Further: the fixture body includes a cylinder, the outer wall of the cylinder is provided with multiple groups of upper grooves and lower grooves passing through the single crystal silicon wafer, and the inner wall of each group of upper grooves and lower grooves is provided with a damping pad, and a support plate is installed in the middle of the inner cavity of the cylinder, and the top wall and bottom wall of the support plate are provided with multiple groups of notches.
[0008] Furthermore: a through hole is provided on the sliding block, and the through hole is slidably connected to the vertical rod.
[0009] Further: The right outer wall of the cylinder is rotatably connected to the slider through a bearing.
[0010] Further: A drain pipe is provided at the bottom end of the rear side wall of the degumming box body, and a valve is installed on the drain pipe.
[0011] Further: A backing plate is provided at the bottom of the degumming box body, and an anti-slip pad is provided on the lower surface of the backing plate.
[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:
[0013] The damping pads on the inner walls of the upper slot and the lower slot on the outer wall of the fixture main body of the present utility model can increase the friction force in contact with the single-crystal silicon wafer, so that the single-crystal silicon wafer is stably installed on the fixture main body, preventing the single-crystal silicon wafer from detaching. The motor in the motor protection shell can drive the fixture main body to rotate, enabling the single-crystal silicon wafer fixed on the fixture main body to fully contact the degumming liquid in the degumming box body, improving the degumming effect of the single-crystal silicon wafer; through the operation of the stepping motor, the lead screw can be driven to rotate. After the threaded block threadedly connected to the lead screw is slidably limited by the vertical rod and the slider, the fixture main body can be driven to lift and lower, facilitating the removal of the single-crystal silicon wafer after degumming. Description of the Drawings
[0014] Figure 1 is a structural schematic diagram of the present utility model;
[0015] Figure 2 is a structural schematic diagram of the other side of the present utility model;
[0016] Figure 3 is a structural schematic diagram of the fixture main body of the present utility model.
[0017] In the figure: 1, degumming box body; 2, fixture main body; 200, cylinder; 201, upper slot; 202, lower slot; 203, support plate; 204, notch; 205, damping pad; 3, left L-shaped plate; 4, stepping motor; 5, lead screw; 6, right L-shaped plate; 7, vertical rod; 8, threaded block; 9, slider; 10, motor protection shell; 11, through hole. Specific Embodiments
[0018] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.
[0019] Embodiment 1:
[0020] Please refer toFigures 1-3 , the utility model provides a technical solution: a debonding machine fixture for single crystal silicon wafers, including a debonding box body 1. At the top of the left side wall of the debonding box body 1, a left L-shaped plate 3 is installed. A stepping motor 4 is installed on the left L-shaped plate 3, and the output end of the stepping motor 4 is connected to a lead screw 5. The bottom end of the lead screw 5 is rotationally connected to the inner cavity bottom wall of the debonding box body 1 through a bearing. A threaded block 8 is threadedly connected to the lead screw 5. An outer wall of the threaded block 8 is installed with a motor protection shell 10, and a motor is provided inside the motor protection shell 10. The output end of the motor is connected to a fixture main body 2. At the top of the right side wall of the debonding box body 1, a right L-shaped plate 6 is installed. A vertical rod 7 is connected between the inner side surface of the right L-shaped plate 6 and the inner cavity bottom wall of the debonding box body 1, and a slider 9 is slidably connected to the vertical rod 7. The slider 9 is rotationally connected to the fixture main body 2.
[0021] Before use, the electrical ends of each electrical device are electrically connected to an external power supply and the electrical end of a controller. The threaded block 8 is fixedly connected to the motor protection shell 10. The left L-shaped plate 3 and the right L-shaped plate 6 are both fixedly connected to the outer wall of the debonding box body 1. The debonding box body 1 is filled with a debonding liquid. Multiple single crystal silicon wafers are placed in the fixture main body 2, which can stably install the single crystal silicon wafers on the fixture main body 2 and prevent the single crystal silicon wafers from detaching. The motor inside the motor protection shell 10 works to drive the fixture main body 2 to rotate, enabling the single crystal silicon wafers fixed on the fixture main body 2 to fully contact the debonding liquid in the debonding box body, improving the debonding effect of the single crystal silicon wafers. Among them, through the operation of the stepping motor 4, the lead screw 5 can be driven to rotate. After the threaded block 8 threadedly connected to the lead screw 5 is slidably limited by the vertical rod 7 and the slider 9, the fixture main body 2 can be driven to lift, facilitating the removal of the single crystal silicon wafers after debonding.
[0022] Among them, preferably, the fixture main body 2 includes a cylinder 200. Multiple upper slots 201 and lower slots 202 for passing single crystal silicon wafers are opened on the outer wall of the cylinder 200. And damping pads 205 are provided on the inner walls of each group of upper slots 201 and lower slots 202. A support plate 203 is installed in the middle of the inner cavity of the cylinder 200. Multiple notches 204 are opened on the top wall and the bottom wall of the support plate 203; the upper slots 201 and the lower slots 202 are used for the passage of single crystal silicon wafers. The other end of the passed single crystal silicon wafer contacts the notches 204 to limit the position of the single crystal silicon wafer. Among them, the damping pads 205 can increase the friction force with the outer wall of the single crystal silicon wafer, improving the friction force between the single crystal silicon wafer and the fixture main body 2 and enhancing the stability of the installation of the single crystal silicon wafer and the cylinder 200.
[0023] Preferably, the slider 9 is provided with a through hole 11 penetrating through it, and the through hole 11 is slidably connected to the vertical rod 7.
[0024] Preferably, the right outer wall of the cylinder 200 is rotationally connected to the slider 9 through a bearing.
[0025] Preferably, a drain pipe is provided at the bottom end of the rear side wall of the degumming box body 1, and a valve is installed on the drain pipe; when the degumming box in the degumming box body 1 needs to be replaced, the valve is opened, and the waste liquid is discharged through the drain pipe.
[0026] Embodiment 2:
[0027] Refer to Figure 1 , the difference between this embodiment and the first embodiment is that a backing plate is provided at the bottom of the degumming box body 1, and an anti-slip pad is provided on the lower surface of the backing plate; the backing plate and the anti-slip pad can increase the friction with the workbench surface and improve the stability of the entire degumming machine during use.
[0028] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A single crystal silicon wafer debonding machine fixture, comprising a debonding box (1), characterized in that: A left L-shaped plate (3) is installed at the top of the left side wall of the degumming box (1), a stepper motor (4) is installed on the left L-shaped plate (3), and the output end of the stepper motor (4) is connected to a screw rod (5), the bottom end of the screw rod (5) is rotatably connected to the bottom wall of the inner cavity of the degumming box (1) through a bearing, a threaded block (8) is threadedly connected to the screw rod (5), a motor protection shell (10) is installed on the outer wall of the threaded block (8), and a motor is arranged in the motor protection shell (10), and the output end of the motor is connected to a clamp body (2), and a right L-shaped plate (6) is installed at the top of the right side wall of the degumming box (1), a vertical rod (7) is connected between the inner side surface of the right L-shaped plate (6) and the bottom wall of the inner cavity of the degumming box (1), and a slider (9) is slidably connected to the vertical rod (7), and the slider (9) is rotatably connected to the clamp body (2).
2. The single crystal silicon wafer debonding machine fixture according to claim 1, characterized in that: The clamp body (2) comprises a cylinder (200), the outer wall of which is provided with a plurality of groups of upper slots (201) and lower slots (202) passing through the single crystal silicon wafer, and the inner wall of each group of upper slots (201) and lower slots (202) is provided with a damping pad (205).
3. The single crystal silicon wafer debonding machine fixture according to claim 2, characterized in that: A support plate (203) is installed in the middle of the inner cavity of the cylinder (200), and the top wall and the bottom wall of the support plate (203) are both provided with multiple groups of notches (204).
4. The single crystal silicon wafer debonding machine fixture according to claim 1, characterized in that: The sliding block (9) is provided with a through hole (11) which is arranged to penetrate therethrough, and the through hole (11) is slidably connected to the vertical rod (7).
5. The single crystal silicon wafer debonding machine fixture according to claim 2, characterized in that: The right outer wall of the cylinder (200) is rotatably connected to the slider (9) via a bearing.
6. The single crystal silicon wafer debonding machine fixture according to claim 1, characterized in that: A drain pipe is provided at the bottom end of the rear side wall of the degumming box (1) and is connected thereto, and a valve is installed on the drain pipe.
7. The single crystal silicon wafer debonding machine fixture according to claim 1, characterized in that: The bottom of the degumming box (1) is provided with a pad, and the lower surface of the pad is provided with an anti-slip pad.