Observation window antifouling device for vacuum evaporation rectification purification equipment

Abstract

The utility model provides an observation window antifouling device for vacuum evaporation rectification purification equipment, which is mounted in a front cavity of an observation window lens of the vacuum evaporation rectification purification equipment and comprises a plurality of water-cooling baffle plates, observation holes are formed in the centers of the water-cooling baffle plates, and mounting holes are formed in the edges of the water-cooling baffle plates; the plurality of water-cooling baffle plates are sequentially mounted on a sliding guide rail through the mounting holes, and are fixed on the sliding guide rail through water-cooling baffle plate adjusting blocks; the vacuum evaporation rectification purification equipment comprises a plurality of water-cooling baffle plates, water-cooling circulating pipelines and water-cooling baffle plates, hollow cavities are formed in the water-cooling baffle plates, the water-cooling circulating pipelines are arranged in the hollow cavities, the water-cooling circulating pipelines among the water-cooling baffle plates are communicated in sequence, and the water inlet ends and the water outlet ends of the water-cooling circulating pipelines penetrate out of the vacuum evaporation rectification purification equipment and then are connected with a water supply device. And cooling water is introduced into the water-cooling circulating pipeline. According to the antifouling device, the service life of the observation window lens is prolonged, and the operation cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of metal evaporation rectification equipment, and particularly relates to an anti-fouling device for an observation window of a vacuum evaporation rectification purification device. Background Art

[0002] A vacuum evaporation rectification purification device is an industrial device used to separate and purify substances through vacuum evaporation and condensation processes. This device usually operates under reduced pressure or vacuum conditions to lower the boiling point of substances, facilitating evaporation and subsequent condensation, thereby achieving the separation and purification of components.

[0003] Metal evaporation rectification purification is achieved by heating and evaporating rectifying metals in a vacuum environment, which can remove different impurities therein, thereby achieving purity improvement. An observation window is provided in the evaporation rectification purification device to better facilitate the staff to observe the inside of the rectification cavity and understand the situation inside the cavity. During the vacuum distillation purification process of metals, due to the sputtering and random movement of some metal vapor atoms, it is extremely easy to contaminate the observation window lens of the vacuum device, thereby reducing the service life of the observation window lens of the vacuum device and increasing the operating cost. Summary of the Utility Model

[0004] In view of this, an embodiment of the present application provides an anti-fouling device for an observation window of a vacuum evaporation rectification purification device. By blocking and adsorbing the sputtered and randomly moving metal vapor atoms, the number of metal vapor atoms reaching the observation window lens of the vacuum device is reduced, thereby extending the service life of the observation window lens of the vacuum device and reducing the operating cost.

[0005] The embodiment of the present application provides the following technical solutions: An anti-fouling device for an observation window of a vacuum evaporation rectification purification device, the anti-fouling device is installed in the front cavity of the observation window lens of the vacuum evaporation rectification purification device, and the anti-fouling device includes:

[0006] A plurality of water-cooled shielding plates, an observation hole is opened in the center of the water-cooled shielding plate, an installation hole is opened at the edge of the water-cooled shielding plate, and the plurality of water-cooled shielding plates are sequentially installed on the sliding guide rail through the installation holes. The water-cooled shielding plate can move on the sliding guide rail and is fixed on the sliding guide rail by a water-cooled baffle adjustment block;

[0007] A water-cooled circulation pipeline, the inside of the water-cooled shielding plate is a hollow cavity, the water-cooled circulation pipeline is arranged in the hollow cavity of the water-cooled shielding plate, the water-cooled circulation pipelines between the plurality of water-cooled shielding plates are sequentially connected, and the water inlet end and the water outlet end of the water-cooled circulation pipeline penetrate out of the vacuum evaporation rectification purification device and are connected to a water supply device for introducing cooling water into the water-cooled circulation pipeline.

[0008] According to an embodiment of the present application, the observation hole is a rectangular hole. A sliding long baffle of the water-cooled baffle is arranged at the long-edge of the observation hole, and a sliding short baffle of the water-cooled baffle is arranged at the short-edge of the observation hole. The sliding long baffle of the water-cooled baffle and the sliding short baffle of the water-cooled baffle are respectively slidably connected to the water-cooled baffle through fixing bolts of the sliding baffle of the water-cooled baffle.

[0009] According to an embodiment of the present application, it further includes universal rollers. A plurality of the universal rollers are symmetrically arranged at the edge of the water-cooled baffle for installing and positioning and supporting the anti-fouling device.

[0010] According to an embodiment of the present application, the water-cooling circulation pipeline is arranged in an S shape in the hollow cavity of the water-cooled baffle.

[0011] According to an embodiment of the present application, the water-cooled baffle is made of 316L stainless steel material and its surface is sandblasted.

[0012] According to an embodiment of the present application, the sliding guide rail is a rod-shaped structure made of standard 316L stainless steel material.

[0013] According to an embodiment of the present application, the water-cooled baffle adjustment block is matched with the fixing bolt of the water-cooled baffle adjustment block to fix the water-cooled baffle on the sliding guide rail.

[0014] According to an embodiment of the present application, the water-cooling circulation pipeline is a flexible corrugated pipe made of 316L stainless steel material.

[0015] According to an embodiment of the present application, the sliding long baffle of the water-cooled baffle and the sliding short baffle of the water-cooled baffle are made of oxygen-free copper with good thermal conductivity.

[0016] According to an embodiment of the present application, four installation holes are opened at the edge of the water-cooled baffle, and the four installation holes are evenly spaced and arranged at the edge of the water-cooled baffle.

[0017] Compared with the prior art, the beneficial effects that at least one of the above technical solutions adopted in the embodiments of this specification can achieve at least include: The observation window anti-fouling device of the embodiment of the present utility model not only realizes the protection of the observation window lens of the vacuum device through the adsorption and shielding of multiple water-cooled baffles, but also can ensure the uninterrupted use of the observation window of the vacuum device. And by adjusting or replacing different combination states of different components in the anti-fouling device, it can meet the use under different working conditions and working scenarios. Description of the Drawings

[0018] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the attached drawings required in the embodiments. Obviously, the attached drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other attached drawings can also be obtained based on these attached drawings.

[0019] Figure 1 It is a schematic diagram of an existing ytterbium metal vacuum evaporation and rectification purification device;

[0020] Figure 2 It is a schematic diagram of the overall structure of the anti-fouling device for the observation window in the embodiment of the present invention when used in a vacuum evaporation and rectification purification device;

[0021] Figure 3 It is a schematic diagram of the partial structure of the anti-fouling device for the observation window in the embodiment of the present invention when used in a vacuum evaporation and rectification purification device;

[0022] Figure 4 It is a schematic diagram of the overall structure of the anti-fouling device in the embodiment of the present invention;

[0023] Figure 5 It is a schematic diagram of the water-cooled baffle structure in the anti-fouling device in the embodiment of the present invention;

[0024] Figure 6 It is a schematic diagram of the support structure in the anti-fouling device in the embodiment of the present invention;

[0025] Figure 7 It is a schematic diagram of the movement trajectory of ytterbium metal vapor atoms without installing the anti-fouling device in the embodiment of the present invention;

[0026] Figure 8 It is a schematic diagram of the movement trajectory of ytterbium metal vapor atoms after installing the anti-fouling device in the embodiment of the present invention;

[0027] Among them, 1 - vacuum evaporation and rectification purification equipment cavity; 2 - observation window lens; 3 - anti-fouling device; 4 - water-cooled shielding baffle; 5 - sliding guide rail; 6 - water-cooled baffle adjustment block; 7 - water-cooled shielding baffle water inlet pipe; 8 - water-cooled shielding baffle water outlet pipe; 9 - water-cooled baffle sliding long baffle; 10 - water-cooled baffle sliding short baffle; 11 - water-cooled baffle sliding baffle fixing bolt; 12 - water-cooled baffle adjustment block fixing bolt; 13 - universal roller; 14 - movement trajectory of ytterbium metal vapor atoms without installing the anti-fouling device; 15 - movement trajectory of ytterbium metal vapor atoms after installing the anti-fouling device. Specific embodiments

[0028] The following will describe the embodiments of the present application in detail with reference to the attached drawings.

[0029] The following describes the implementation modes of the present application through specific examples. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation modes. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope protected by the present application.

[0030] As Figure 1 shown, Figure 1 FIG. 1 is a schematic diagram of an existing ytterbium metal vacuum evaporation rectification purification device. The embodiment of the present invention is described by taking the ytterbium metal vacuum evaporation rectification purification device as an example, but the anti-fouling device of the present invention includes, but is not limited to, the ytterbium vacuum evaporation rectification purification device.

[0031] As Figures 2 - 6 shown, the embodiment of the present invention provides an anti-fouling device for an observation window of a vacuum evaporation rectification purification device. The anti-fouling device is installed in the front cavity of the observation window lens 2 of the cavity 1 of the vacuum evaporation rectification purification device. The anti-fouling device 3 includes:

[0032] A plurality of water-cooled shielding plates 4, an observation hole is opened in the center of the water-cooled shielding plate 4, mounting holes are opened at the edges of the water-cooled shielding plate 4, and the plurality of water-cooled shielding plates 4 are sequentially installed on the sliding guide rail 5 through the mounting holes. The water-cooled shielding plate 4 can move on the sliding guide rail 5 and is fixed on the sliding guide rail 5 through a water-cooled baffle adjustment block 6;

[0033] A water-cooling circulation pipeline, the inside of the water-cooled shielding plate 4 is a hollow cavity, the water-cooling circulation pipeline is arranged in the hollow cavity of the water-cooled shielding plate 4, and the water-cooling circulation pipelines between the plurality of water-cooled shielding plates 4 are sequentially communicated. The water inlet end and the water outlet end of the water-cooling circulation pipeline penetrate out of the cavity 1 of the vacuum evaporation rectification purification device and are connected to a water supply device for introducing cooling water into the water-cooling circulation pipeline.

[0034] Specifically, when implemented, the water-cooling circulation pipeline includes a water-cooled shielding plate water inlet pipe 7 and a water-cooled shielding plate water outlet pipe 8, and the water-cooled shielding plate water inlet pipe 7 and the water-cooled shielding plate water outlet pipe 8 are connected to an external cooling water supply device.

[0035] The purpose of the embodiment of the present utility model is to extend the service life of the lens of the observation window of the vacuum device and reduce the operation cost by shielding and adsorbing the sputtered and randomly moving metal vapor atoms during the process of metal evaporation rectification in a vacuum environment.

[0036] Specifically, under the premise of not obstructing the normal use of the observation window, the embodiment of the present utility model can improve the shielding probability by using multiple layers of shielding plates to shield the sputtered and randomly moving metal vapor atoms multiple times. Moreover, the multiple layers of shielding plates are designed as a water-cooled structure, and the shielding plates are cooled in real time during use, which can accelerate the deposition and condensation of metal vapor atoms and improve the adsorption effect. At the same time, it can prevent the temperature of the shielding plates from rising due to absorbing the heat carried by the high-temperature metal vapor, and avoid the reduction of the adsorption effect of the shielding plates on the sputtered and randomly moving metal vapor atoms during use. The water-cooled shielding plates of each layer are installed on a unified sliding guide rail to ensure that the distance between the shielding plates can be adjusted according to different working conditions, thereby increasing the applicability.

[0037] In one embodiment, the observation hole is a rectangular hole, a water-cooled baffle sliding long tab 9 is arranged on the long side edge of the observation hole, a water-cooled baffle sliding short tab 10 is arranged on the short side edge of the observation hole, and the water-cooled baffle sliding long tab 9 and the water-cooled baffle sliding short tab 10 are respectively slidably connected to the water-cooled shielding plate 4 through water-cooled baffle sliding tab fixing bolts 11.

[0038] In this embodiment, a slidable and adjustable tab is designed at the central opening of the water-cooled shielding plate 4. By adjusting the position of the tab, the shielding area of the tab on the observation hole can be adjusted, so as to adjust the size of the observation hole at the central opening of the water-cooled shielding plate 4, thereby meeting different use requirements.

[0039] During specific implementation, by loosening the water-cooled baffle sliding tab fixing bolts 11, the water-cooled baffle sliding long tab 9 and the water-cooled baffle sliding short tab 10 will be in a free sliding state, and the distance between the sliding tabs on the water-cooled shielding plate 4 is adjusted. After adjusting to the target size, the water-cooled baffle sliding tab fixing bolts 11 are tightened. The purpose of adapting to observation windows of different sizes can be achieved by controlling different shielding areas.

[0040] During specific implementation, the water-cooled baffle adjustment block 6 cooperates with the water-cooled baffle adjustment block fixing bolt 12 to fix the water-cooled baffle 4 on the sliding guide rail 5. Install each layer of the water-cooled baffle 4 on the unified sliding guide rail 5. By loosening the water-cooled baffle adjustment block fixing bolt 12, the water-cooled baffle 4 will slide freely on the sliding guide rail 5. Adjust the spacing between each water-cooled baffle according to different installation working conditions. After the adjustment is completed, lock and fix the water-cooled baffle adjustment block fixing bolt 12. By using this method for adjustment, the applicability of the anti-fouling device to different working conditions can be improved.

[0041] In one embodiment, four installation holes are opened at the edge of the water-cooled baffle 4, and the four installation holes are evenly spaced and arranged at the edge of the water-cooled baffle 4.

[0042] During specific implementation of this embodiment, the main body component of the anti-fouling device uses acid-resistant corrosion materials. When the anti-fouling performance of the observation window lens anti-fouling device decreases due to the influence of deposited and condensed metal vapor atoms, the deposited and condensed metal on the main body component can be pickled and dissolved to restore the anti-fouling performance of the observation window lens anti-fouling device.

[0043] In one embodiment, the anti-fouling device further includes universal rollers 13. A plurality of the universal rollers 13 are symmetrically arranged at the edge of the water-cooled baffle for installing and positioning and supporting the anti-fouling device.

[0044] In this embodiment, a plurality of universal rollers 13 are symmetrically arranged at the edge of the water-cooled baffle 4. The universal rollers 13 are used to facilitate installation during the initial installation of the anti-fouling device by the sliding of the rollers, avoiding damage to the components of the anti-fouling device itself or the components of the purification equipment. In addition, after installation, the universal rollers 13 play a supporting role. Each universal roller 13 can be regarded as a fulcrum. By adjusting the protruding degree of each universal roller 13, the assembly relationship between the anti-fouling device module and the cavity can be adjusted, thereby finely adjusting the position of the anti-fouling device module in the evaporation and purification equipment and performing support and fixation.

[0045] During specific implementation, the water-cooled circulation pipeline is arranged in an S shape in the hollow cavity of the water-cooled baffle to ensure good enough cooling effect.

[0046] During specific implementation, the water-cooled baffle 4 is made of 316L stainless steel material, and the surface is sandblasted to increase the surface adsorption area, and cooling water is passed through the inside.

[0047] During specific implementation, the sliding guide rail uses a standard 316L stainless steel polished rod with a unified diameter to ensure that each component can be interchanged.

[0048] During specific implementation, the water-cooled baffle adjustment block 6 ensures that each component can be interchanged and is in sliding fit with the sliding guide 5.

[0049] During specific implementation, the water-cooled baffle inlet pipe 7 and the water-cooled baffle outlet pipe 8 are made of 316L stainless steel flexible corrugated pipes, which are convenient for adjustment during on-site installation.

[0050] During specific implementation, the water-cooled baffle sliding long flap 9 and the water-cooled baffle sliding short flap 10 are made of oxygen-free copper with good thermal conductivity, which conducts the heat carried by the high-temperature metal vapor into the water-cooled baffle 4, and then the cooling circulating water in the water-cooled baffle 4 is used for cooling.

[0051] During installation, the above components are degreased and dewatered, and assembled according to the Figure 4 shown structure. After assembly, they are placed into the cavity of the vacuum evaporation rectification purification equipment. The water-cooled baffle inlet pipe 7 and the water-cooled baffle outlet pipe 8 are connected to the purification equipment cavity, and water is injected for pressure testing and leak detection. The final structure is as shown in Figure 2 and Figure 3 .

[0052] Through theoretical simulation calculations. Before installing the anti-fouling device 3 for the observation window as shown in Figure 7 , Figure 7 shows the movement trajectory 14 of ytterbium metal vapor atoms without the anti-fouling device installed, and ytterbium metal vapor atoms will move near the observation window lens 2 of the vacuum device. After installing the anti-fouling device 3 for the observation window as shown in Figure 8 , Figure 8 shows the movement trajectory 15 of ytterbium metal vapor atoms after installing the anti-fouling device. Most of the sputtered and randomly moving metal vapor atoms will be blocked and adsorbed in the anti-fouling device, thereby prolonging the service life of the observation window lens of the vacuum device and reducing the operating cost.

[0053] The above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed in the present application should be covered by the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An anti-fouling device for an observation window of a vacuum evaporation, distillation and purification equipment, wherein the anti-fouling device is installed in the front cavity of the observation window lens of the vacuum evaporation, distillation and purification equipment, and is characterized in that: The anti-fouling device comprises: A plurality of water-cooled shielding plates, wherein an observation hole is provided in the center of the water-cooled shielding plates, and a mounting hole is provided at the edge of the water-cooled shielding plates, wherein the plurality of water-cooled shielding plates are sequentially mounted on the sliding guide rail through the mounting holes, and the water-cooled shielding plates can be moved on the sliding guide rail and fixed on the sliding guide rail through a water-cooled shielding plate adjustment block; A water-cooling circulation pipeline, the interior of the water-cooling baffle is a hollow cavity, the water-cooling circulation pipeline is arranged in the hollow cavity of the water-cooling baffle, the water-cooling circulation pipelines between multiple water-cooling baffles are connected in sequence, the water inlet and water outlet of the water-cooling circulation pipeline pass through the vacuum evaporation, distillation and purification equipment, and are connected to a water supply device for introducing cooling water into the water-cooling circulation pipeline.

2. The observation window anti-fouling device for vacuum evaporation, rectification and purification equipment according to claim 1, characterized in that: The observation hole is a rectangular hole, and a long water-cooled baffle sliding baffle is set at the edge of the long side of the observation hole, and a short water-cooled baffle sliding baffle is set at the edge of the short side of the observation hole. The long water-cooled baffle sliding baffle and the short water-cooled baffle sliding baffle are respectively slidably connected to the water-cooled shielding plate through water-cooled baffle sliding baffle fixing bolts.

3. The observation window anti-fouling device for vacuum evaporation, rectification and purification equipment according to claim 1, characterized in that: It also includes a universal roller, and a plurality of the universal rollers are symmetrically arranged on the edge of the water-cooled shielding plate for installing and positioning the anti-fouling device.

4. The observation window anti-fouling device for vacuum evaporation, rectification and purification equipment according to claim 1, characterized in that: The water-cooling circulation pipeline is arranged in an S shape in the hollow cavity of the water-cooling shielding plate.

5. The observation window anti-fouling device for vacuum evaporation, rectification and purification equipment according to claim 1, characterized in that: The water-cooling baffle is made of 316L stainless steel, and the surface is sandblasted.

6. The observation window anti-fouling device for vacuum evaporation, rectification and purification equipment according to claim 1, characterized in that: The sliding guide rail is a rod-shaped structure made of standard 316L stainless steel.

7. The observation window anti-fouling device for vacuum evaporation, rectification and purification equipment according to claim 1, characterized in that: The water-cooling baffle adjusting block cooperates with the water-cooling baffle adjusting block fixing bolts to fix the water-cooling baffle on the sliding guide rail.

8. The observation window anti-fouling device for vacuum evaporation, rectification and purification equipment according to claim 1, characterized in that: The water-cooling circulation pipeline is a soft corrugated pipe made of 316L stainless steel.

9. The observation window anti-fouling device for vacuum evaporation, rectification and purification equipment according to claim 2, characterized in that: The long water-cooling baffle sliding baffle and the short water-cooling baffle sliding baffle are made of oxygen-free copper with good thermal conductivity.

10. The observation window anti-fouling device for vacuum evaporation, rectification and purification equipment according to claim 1, characterized in that: Four mounting holes are provided on the edge of the water-cooling shielding plate, and the four mounting holes are evenly spaced and arranged at the edge of the water-cooling shielding plate.

Images