Wet etching equipment convenient to clean

Abstract

The utility model discloses wet etching equipment convenient to clean, and relates to the technical field of wet etching equipment, the wet etching equipment comprises a workbench, the upper surface of the top of the workbench is provided with a telescopic cylinder in a movable connection mode, the inner surface of the telescopic cylinder is provided with a telescopic rod in a movable connection mode, and the telescopic rod is connected with the workbench. The surface of one side of the telescopic cylinder is movably connected with a limiting block, the upper surface of the top of the telescopic rod is fixedly connected with the wet etching equipment, the limiting block is pressed for fixation, after fixation, an object to be cleaned is placed above the workbench for cleaning, convenience is provided for height adjustment of the wet etching equipment, and the wet etching equipment is convenient to use before and after use. According to the size of a to-be-cleaned object, the cleaning device can be placed on a workbench for cleaning or the wet etching equipment can be taken down for use, when the cleaning device needs to be taken down, the clamping block is taken out, then the telescopic cylinder is moved in the sliding groove, the telescopic cylinder is taken out from the clamping block, the telescopic cylinder can be adjusted according to the actual situation after being taken out, and the practicability of the cleaning device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wet etching equipment, and particularly relates to a wet etching equipment convenient for cleaning. Background Art

[0002] The etching equipment includes, arranged in sequence: a loading and buffer area, a first etching chamber, a cleaning chamber that uses a high-pressure water column to remove the by-products formed on the surface of the substrate after etching in the first etching chamber, a second etching chamber, and a rinsing and drying transfer area.

[0003] An existing wet etching equipment convenient for cleaning cannot be adjusted according to the actual situation during use. It often can only be fixed in a certain place for use, with strong limitations. It cannot be adjusted in height, and high-temperature splashing will occur during cleaning. If the staff is too close, there may be potential safety hazards, which brings certain adverse effects to the use process. To solve the deficiencies of the existing technology, we propose a wet etching equipment convenient for cleaning. Summary of the Utility Model

[0004] The main purpose of the utility model is to provide a wet etching equipment convenient for cleaning, which can effectively solve the problems in the background art.

[0005] The utility model is realized by the following technical solutions: A wet etching equipment convenient for cleaning includes a workbench. The upper surface of the top of the workbench is provided with a telescopic cylinder in a movable connection manner. The inner surface of the telescopic cylinder is provided with a telescopic rod in a movable connection manner. One side surface of the telescopic cylinder is provided with a limiting block in a movable connection manner. The upper surface of the top of the telescopic rod is fixedly connected with a wet etching equipment.

[0006] Preferably, a sliding groove is fixedly opened on the upper surface of the top of the workbench. The inner surface of the sliding groove is movably connected with both side surfaces of the telescopic cylinder. Both side surfaces of the sliding groove are provided with clamping blocks in a movable connection manner.

[0007] Preferably, both side surfaces of the telescopic cylinder are fixedly connected with fastening rings, and the fastening rings are made of elastic materials.

[0008] Preferably, a bottom plate is fixedly connected to the upper surface of the top of the workbench, and the bottom plate is made of high-temperature resistant material.

[0009] Preferably, sliding rails are fixedly opened on both side surfaces of the workbench. A protective shell is fixedly connected to the inner surface of the sliding rails. A box door is movably connected to one side surface of the protective shell.

[0010] Preferably, a slider is fixedly connected to the inner surface of the protective shell. The number of the sliders is two, and the protective shell is movably connected in the slide rail through the sliders.

[0011] Preferably, the number of the box doors is two. The box doors are movably connected to one side surface of the protective shell through hinges. An observation port is fixedly opened on one side surface of the box door, and a handle is fixedly connected to one side surface of the observation port.

[0012] Advantages

[0013] Compared with the prior art, the utility model has the following advantages:

[0014] 1. In the utility model, through the arranged limiting block, wet etching equipment, telescopic cylinder and clamping block, press the limiting block for fixation. After fixation, place the object to be cleaned above the workbench for cleaning, which provides convenience for the height adjustment of the wet etching equipment. Before and after use, according to the size of the object to be cleaned, it can be selected to place it on the workbench for cleaning or remove the wet etching equipment for use. When it needs to be removed, take out the clamping block, then move the position of the telescopic cylinder in the sliding groove, take out the telescopic cylinder from it, and use it after taking it out, which can be adjusted according to the actual situation, and improves the practicability of the cleaning device.

[0015] 2. In the utility model, through the arranged protective shell, observation port, handle and slider, the arranged protective shell can prevent high-temperature splashing during the cleaning process, improving the safety of the device. The box door can be opened and closed. By moving the slider on the protective shell out of the slide rail, the protective shell can be taken out and installed, providing convenience for protection. By pulling the handle to open the box door, the cleaning object can be taken out, and the cleaning situation can be observed through the observation port during cleaning, improving its practicability. Description of the Drawings

[0016] Figure 1 is the overall structural schematic diagram of the utility model;

[0017] Figure 2 is the internal structural schematic diagram of the utility model;

[0018] Figure 3 is the structural schematic diagram of the protective shell of the utility model;

[0019] Figure 4 is the structural schematic diagram of the wet etching equipment of the utility model.

[0020] In the figure: 1, workbench; 2, wet etching equipment; 3, telescopic cylinder; 4, telescopic rod; 5, chute; 6, clamping block; 7, fastening ring; 8, bottom plate; 9, slide rail; 10, protective shell; 11, box door; 12, observation port; 13, handle; 14, slider; 15, limit block. Detailed implementation manners

[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0022] As Figures 1-4 shown, a wet etching equipment convenient for cleaning includes a workbench 1. The upper surface of the top of the workbench 1 is provided with a telescopic cylinder 3 in a manner of movable connection. The inner surface of the telescopic cylinder 3 is provided with a telescopic rod 4 in a manner of movable connection. One side surface of the telescopic cylinder 3 is provided with a limit block 15 in a manner of movable connection. The upper surface of the top of the telescopic rod 4 is fixedly connected with a wet etching equipment 2. The upper surface of the top of the workbench 1 is fixedly provided with a chute 5. The inner surface of the chute 5 is movably connected with both side surfaces of the telescopic cylinder 3. Both side surfaces of the chute 5 are provided with clamping blocks 6 in a manner of movable connection. Press the limit block 15 for fixation. After fixation, place the object to be cleaned above the workbench 1 for cleaning, which provides convenience for the height adjustment of the wet etching equipment 2. Before and after use, according to the size of the object to be cleaned, it can be selected to place it on the workbench 1 for cleaning or remove the wet etching equipment 2 for use. When it needs to be removed, take out the clamping block 6, then move the position of the telescopic cylinder 3 in the chute 5, and take out the telescopic cylinder 3 from it. After taking it out, it can be used, which can be adjusted according to the actual situation and improves the practicability of the cleaning device.

[0023] Both side surfaces of the telescopic cylinder 3 are fixedly connected with a fastening ring 7, and the fastening ring 7 is made of elastic material. The upper surface of the top of the workbench 1 is fixedly connected with a bottom plate 8, and the bottom plate 8 is made of high-temperature resistant material. Both side surfaces of the workbench 1 are fixedly provided with slide rails 9. The inner surface of the slide rails 9 is fixedly connected with a protective shell 10. One side surface of the protective shell 10 is provided with a box door 11 in a manner of movable connection. When removing the wet etching equipment 2, the fastening ring 7 can be put on the user's hand for fixation, which provides convenience for holding the wet etching equipment 2. Place the object to be cleaned on the bottom plate 8 and then clean it. The provided high-temperature resistant material bottom plate 8 can improve its durability. Connect the box door 11 into the slide rail 9 for clamping.

[0024] On the inner surface of the protective shell 10, there are fixedly connected sliders 14. The number of sliders 14 is set to two. The protective shell 10 is movably connected in the slide rail 9 through the sliders 14. The number of the box doors 11 is set to two. The box doors 11 are movably connected to one side surface of the protective shell 10 through hinges. On one side surface of the box door 11, an observation port 12 is fixedly opened. On one side surface of the observation port 12, a handle 13 is fixedly connected. By providing the protective shell 10, high-temperature splashing during the cleaning process can be prevented, improving the safety of the device. By providing the box door 11, it can be opened and closed. By moving the slider 14 on the protective shell 10 out of the slide rail 9, the protective shell 10 can be taken out and installed, providing convenience for protection. By pulling the handle 13 to open the box door 11, the cleaning object can be taken out. During cleaning, the cleaning situation can be observed through the observation port 12, improving its practicability.

[0025] The working principle and process of the present utility model:

[0026] First, place the workbench 1 in the corresponding position. After placement, adjust the position of the telescopic rod 4 in the telescopic cylinder 3 to adjust the height of the wet etching device 2. Then, press the limit block 15 for fixation. After fixation, place the object to be cleaned above the workbench 1 for cleaning, providing convenience for the height adjustment of the wet etching device 2. Before and after use, according to the size of the object to be cleaned, it can be selected to place it on the workbench 1 for cleaning or remove the wet etching device 2 for use. When it needs to be removed, take out the clamping block 6, and then move the position of the telescopic cylinder 3 in the chute 5 to take out the telescopic cylinder 3 and use it after taking it out. It can be adjusted according to the actual situation, improving the practicability of the cleaning device. When removing the wet etching device 2, the fastening ring 7 can be put on the user's hand for fixation, providing convenience for holding the wet etching device 2. By placing the object to be cleaned on the bottom plate 8 and then cleaning it, the high-temperature resistant material bottom plate 8 provided can improve its durability. Connect the box door 11 into the slide rail 9 for clamping. By providing the protective shell 10, high-temperature splashing during the cleaning process can be prevented, improving the safety of the device. By providing the box door 11, it can be opened and closed. By moving the slider 14 on the protective shell 10 out of the slide rail 9, the protective shell 10 can be taken out and installed, providing convenience for protection. By pulling the handle 13 to open the box door 11, the cleaning object can be taken out. During cleaning, the cleaning situation can be observed through the observation port 12, improving its practicability.

[0027] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0028] Although embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A wet etching device that is easy to clean, comprising a workbench (1), characterized in that: A telescopic cylinder (3) is provided on the top upper surface of the workbench (1) in a movable manner, a telescopic rod (4) is provided on the inner surface of the telescopic cylinder (3) in a movable manner, a limit block (15) is provided on one side surface of the telescopic cylinder (3) in a movable manner, and a wet etching device (2) is fixedly connected to the top upper surface of the telescopic rod (4).

2. The wet etching device that is easy to clean according to claim 1, characterized in that: A slide groove (5) is fixedly provided on the top upper surface of the workbench (1), the inner surface of the slide groove (5) is movably connected to the two side surfaces of the telescopic cylinder (3), and the two side surfaces of the slide groove (5) are provided with clamping blocks (6) in a movably connected manner.

3. The wet etching device that is easy to clean according to claim 1, characterized in that: The two side surfaces of the telescopic cylinder (3) are fixedly connected with fastening rings (7), and the fastening rings (7) are made of elastic material.

4. The wet etching device that is easy to clean according to claim 1, characterized in that: A bottom plate (8) is fixedly connected to the top upper surface of the workbench (1), and the bottom plate (8) is made of a high temperature resistant material.

5. The wet etching device that is easy to clean according to claim 1, characterized in that: Slide rails (9) are fixedly provided on both side surfaces of the workbench (1), a protective shell (10) is fixedly connected to the inner surface of the slide rail (9), and a box door (11) is provided on one side surface of the protective shell (10) in a movable manner.

6. The wet etching device that is easy to clean according to claim 5, characterized in that: A slider (14) is fixedly connected to the inner surface of the protective shell (10), the number of the sliders (14) is set to two, and the protective shell (10) is movably connected to the slide rail (9) via the slider (14).

7. The wet etching device that is easy to clean according to claim 5, characterized in that: The number of the box doors (11) is set to two, and the box doors (11) are movably connected to a side surface of the protective shell (10) through hinges, and an observation port (12) is fixedly provided on one side surface of the box door (11), and a handle (13) is fixedly connected to one side surface of the observation port (12).

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