Photovoltaic silicon wafer drying device

Abstract

The utility model relates to a photovoltaic silicon wafer drying device, and belongs to the technical field of semiconductor production equipment. According to the photovoltaic silicon wafer drying device, the transportation device is arranged at the bottom of the workbench and is isolated from the upper portion of the workbench, pollution of the transportation device to the top is avoided, however, a transportation groove needs to be formed for the supporting mechanism to penetrate through so as to support the hanging basket to move, and therefore the transportation efficiency is greatly improved. And a blocking mechanism needs to be arranged for blocking airflow below the conveying groove, so that the dry gas flowing out of the conveying groove is reduced, the hot air loss is reduced, and the drying effect is improved.

Description

Technical Field

[0001] This application belongs to the technical field of semiconductor production equipment, and particularly relates to a drying device for photovoltaic silicon wafers. Background Art

[0002] During the production process of photovoltaic silicon wafers, cleaning needs to be carried out multiple times according to the process, and drying is also required after each cleaning. The flower basket is used to load photovoltaic silicon wafers and is commonly used for large-scale processing of photovoltaic silicon. Therefore, it is necessary to place the photovoltaic silicon wafers in the flower basket for cleaning and drying. For example, in the Chinese utility model patent document CN116259564A, a cleaning system for photovoltaic silicon wafers with a drying device, in this document, a manipulator on a gantry is used to carry the flower basket. Since the manipulator is located at the top, the moving mechanical mechanism is prone to generating debris and contaminating the photovoltaic silicon wafers, and the drying air is likely to escape from the position where the manipulator is set, resulting in a poor drying effect. At the same time, the device cannot perform closed-air blowing drying on the photovoltaic silicon wafers. Summary of the Utility Model

[0003] The technical problem to be solved by the present utility model is: to solve the deficiencies in the prior art that are prone to polluting photovoltaic silicon wafers and have a poor drying effect, so as to provide a drying device for photovoltaic silicon wafers that improves the cleanliness and drying effect of photovoltaic silicon wafers.

[0004] The technical solution adopted by the present utility model to solve its technical problems is:

[0005] A drying device for photovoltaic silicon wafers, comprising:

[0006] A workbench, on which a hanging basket fixing seat is provided and an air passing opening is formed. The hanging basket fixing seat is used for placing the hanging basket, and a transportation groove is formed on the workbench;

[0007] A transportation device capable of transporting the hanging basket so that the hanging basket enters or leaves the workbench;

[0008] A blowing device is arranged at the workbench, and an air passing opening is further formed on the workbench. The air passing opening is located between two hanging basket fixing seats for fixing the same hanging basket. The blowing device includes an upper outer cover arranged on the workbench, a lower outer cover arranged on the workbench, and a circulation fan; the drying air generated by the circulation fan enters above the workbench through the upper outer cover, then passes through the air passing opening on the workbench and enters the lower outer cover and returns to the circulation fan to form a circulating air flow;

[0009] The transportation device includes: a transportation mechanism, a slide rail arranged under the workbench, a driving member for driving the transportation mechanism to move on the slide rail, and a blocking mechanism for blocking the transportation groove. The transportation mechanism passes through the transportation groove and is provided with a transportation platform for carrying the hanging basket at the top. The transportation platform is located above the workbench. The transportation mechanism can also drive the transportation platform to lift to place the hanging basket on the transportation platform onto the hanging basket fixing seat or take the hanging basket off the hanging basket fixing seat.

[0010] The blocking mechanism includes: a pulley assembly arranged inside the bottom frame of the workbench, a shielding belt that can move on the pulley assembly. The shielding belt is respectively an upper shielding part and a lower shielding part according to whether it is above or below the pulley assembly. The upper shielding part can move together with the transportation mechanism and is always located below the transportation groove.

[0011] Preferably, for the photovoltaic silicon wafer drying device of the present invention, the transportation mechanism includes a sliding table arranged on the slide rail, a lifting driving member arranged on the sliding table, a horizontal mounting plate arranged on the lifting driving member, a vertical mounting plate arranged on the horizontal mounting plate and passing through the transportation groove, a transportation platform arranged on the vertical mounting plate and located above the workbench. A sliding member that can freely slide and is located below the workbench is arranged on the vertical mounting plate. The upper shielding part is connected to both ends of the sliding member.

[0012] Preferably, for the photovoltaic silicon wafer drying device of the present invention, a vertical mounting plate is arranged above one side of the horizontal mounting plate, and the lower shielding part passes through below it. The other side is slidably connected to the sliding table through a slide bar.

[0013] Preferably, for the photovoltaic silicon wafer drying device of the present invention, the pulley assembly includes a mounting seat, a first pulley and a second pulley arranged on the mounting seat along the height direction. Arranging the first pulley and the second pulley can form a certain distance between the upper shielding part and the lower shielding part, so that necessary mechanical components can be placed between the upper shielding part and the lower shielding part.

[0014] Preferably, for the photovoltaic silicon wafer drying device of the present invention, a support plate is further arranged at the bottom of the upper shielding part and / or the lower shielding part to support the upper shielding part and / or the lower shielding part.

[0015] Preferably, for the photovoltaic silicon wafer drying device of the present invention, fixing strips are respectively arranged on both sides of the transportation platform, and positioning grooves are arranged on the fixing strips.

[0016] Preferably, for the photovoltaic silicon wafer drying device of the present invention, the top of the hanging basket fixing seat is wavy.

[0017] Preferably, for the photovoltaic silicon wafer drying device of the present invention, through holes are formed in the hanging basket fixing seat to form a gas circulation channel.

[0018] Preferably, for the photovoltaic silicon wafer drying device of the present utility model, lifting doors are provided at both ends of the upper outer cover along the transportation direction of the transportation device. When the hanging basket passes through the upper outer cover during transportation by the transportation device, the lifting doors are opened, and during the drying process, the lifting doors are closed.

[0019] Preferably, for the photovoltaic silicon wafer drying device of the present utility model, a through hole for the transportation table to pass through is further opened on the lifting door, and a curtain is provided at the through hole.

[0020] The beneficial effects of the present utility model are as follows:

[0021] For the photovoltaic silicon wafer drying device of the present utility model, the transportation device is arranged at the bottom of the workbench and is isolated from the upper part of the workbench, avoiding pollution to the top by the transportation device (inevitably generating some debris during the movement of the transportation device). However, this requires setting a transportation groove for the support mechanism to pass through to support the movement of the hanging basket. Therefore, it is necessary to set a shielding of the blocking mechanism to block the airflow below the transportation groove, reduce the outflow of the drying gas from the transportation groove, reduce the loss of hot air, and improve the drying effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The technical solutions of the present application will be further described below with reference to the drawings and embodiments.

[0023] Figure 1 is a perspective view of the photovoltaic silicon wafer drying equipment according to an embodiment of the present application (the arrow indicates the flow direction of the hot air inside);

[0024] Figure 2 is a perspective view of the workbench according to an embodiment of the present application;

[0025] Figure 3 is a structural schematic diagram of the shielding component according to an embodiment of the present application;

[0026] Figure 4 is a perspective view of the transportation mechanism according to an embodiment of the present application;

[0027] Figure 5 is a perspective view of the belt pulley assembly according to an embodiment of the present application;

[0028] Figure 6 is an enlarged perspective view of the workbench of the photovoltaic silicon wafer drying device according to an embodiment of the present application.

[0029] The reference numerals in the drawings are as follows:

[0030] 1 Loading device;

[0031] 2 Photovoltaic silicon wafer drying device;

[0032] 3 Unloading device;

[0033] 4 Blowing device;

[0034] 5 Transport device;

[0035] 6 Hanging basket fixing seat;

[0036] 9 Hanging basket;

[0037] 10 Workbench;

[0038] 11 Transport trough;

[0039] 12 Air passage;

[0040] 40 Upper outer cover;

[0041] 41 Lifting door;

[0042] 42 Through hole;

[0043] 43 Lower outer cover;

[0044] 51 Transport mechanism;

[0045] 52 Slide rail;

[0046] 53 Driving part;

[0047] 54 Belt pulley assembly;

[0048] 55 Shielding belt;

[0049] 56 Support plate;

[0050] 61 Through hole;

[0051] 510 Slide table;

[0052] 511 Transport table;

[0053] 512 Lifting driving part;

[0054] 513 Horizontal mounting plate;

[0055] 514 Vertical mounting plate;

[0056] 516 Slide bar;

[0057] 541 Mounting seat;

[0058] 542 First belt pulley;

[0059] 543 Second belt pulley;

[0060] 551 Upper shielding part;

[0061] 552 Lower shielding part;

[0062] 553 Sliding part;

[0063] 5111 Fixed bar;

[0064] 5112 Positioning groove. Specific implementation mode

[0065] It should be noted that, without conflict, the embodiments in this application and the features in the embodiments can be combined with each other.

[0066] In the description of this application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the protection scope of this application. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality" is two or more.

[0067] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood through specific situations.

[0068] The technical solution of this application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0069] This embodiment provides a photovoltaic silicon wafer drying device, including:

[0070] Workbench 10, as Figure 2 shown, a hanging basket fixing seat 6 is arranged on the workbench 10 and an air passing opening 12 is provided. The hanging basket fixing seat 6 is used for placing the hanging basket 9; the workbench 10 is supported by a bottom frame, and the inside of the bottom frame is hollow; a transport groove 11 is provided on the workbench 10;

[0071] Transport device 5, which can transport the hanging basket 9 so that the hanging basket 9 enters or leaves the workbench 10;

[0072] A blowing device 4 is arranged at the workbench 10. An air passing opening 12 is also formed in the workbench 10. The air passing opening 12 is located between two hanging basket fixing seats 6 that fix the same hanging basket 9. The blowing device 4 includes an upper outer cover 40 arranged on the workbench 10, a lower outer cover 43 arranged on the workbench 10, and a circulation fan. The drying air generated by the circulation fan enters above the workbench 10 through the upper outer cover 40, then passes through the air passing opening 12 on the workbench and enters the lower outer cover 43 and flows back to the circulation fan to form circulating air (a heating device can also be arranged to heat the circulating air to keep the circulating air at a certain temperature).

[0073] The transport device 5, as Figure 3 shown, includes: a transport mechanism 51, a slide rail 52 arranged below the workbench 10, a driving member 53 for driving the transport mechanism 51 to move on the slide rail 52, and a blocking mechanism for blocking the transport groove 11. The transport mechanism 51 passes through the transport groove 11 and is provided with a transport table 511 for carrying the hanging basket 9 at the top. The transport table 511 is located above the workbench 10. The transport mechanism 51 can also drive the transport table 511 to lift to place the hanging basket 9 on the transport table 511 onto the hanging basket fixing seat 6 or take the hanging basket 9 off the hanging basket fixing seat 6.

[0074] The blocking mechanism includes: a pulley assembly 54 located inside the bottom frame of the workbench 10, and a shielding belt 55 that can move on the pulley assembly 54. The shielding belt 55 is respectively an upper shielding portion 551 and a lower shielding portion 552 according to whether it is above or below the pulley assembly 54. The upper shielding portion 551 can move together with the transport mechanism 51 and is always located below the transport groove 11. The blocking mechanism blocks the bottom of the transport groove 11, which can reduce the amount of drying air passing through the transport groove 11, improve the utilization rate of the drying air, and reduce energy consumption. Note that the blocking mechanism cannot strictly seal the transport groove 11.

[0075] In the photovoltaic silicon wafer drying device of this embodiment, the transport device 5 is arranged at the bottom of the workbench 10 and is isolated from the upper part of the workbench 10, avoiding the pollution of the transport device 5 to the top (some debris will inevitably be generated when the transport device 5 moves). However, this requires the setting of a transport groove 11 for the support mechanism to pass through to support the movement of the hanging basket 9. Therefore, it is necessary to set the shielding belt 55 of the blocking mechanism to block the air flow below the transport groove 11, reduce the outflow of the drying gas from the transport groove 11, reduce the loss of hot air, and improve the drying effect.

[0076] As Figure 1As shown in the figure, a feeding device 1 and a discharging device 3 are also provided on both sides of the photovoltaic silicon wafer drying device 2. The workbench 10 of the feeding device 1 and the discharging device 3 is connected to the workbench 10 of the photovoltaic silicon wafer drying device 2. The transportation device 5 can also transport the hanging basket 9 between the feeding device 1, the photovoltaic silicon wafer drying device 2 and the discharging device 3.

[0077] Furthermore, a support plate 56 is also provided at the bottom of the upper shielding part 551 and / or the lower shielding part 552 to support the upper shielding part 551 and / or the lower shielding part 552, preventing the upper shielding part 551 and the lower shielding part 552 from sagging due to gravity. Especially in the middle area between the upper shielding part 551 and the lower shielding part 552, the sagging effect is obvious, and the support plate 56 can effectively improve the sagging effect.

[0078] Furthermore, the transportation mechanism 51, such as Figure 4 As shown in the figure, it includes a sliding table 510 arranged on the slide rail 52, a lifting driving part 512 arranged on the sliding table 510, a horizontal mounting plate 513 arranged on the lifting driving part 512, a vertical mounting plate 514 arranged on the horizontal mounting plate 513 and passing through the transportation groove 11, a transportation table 511 arranged on the vertical mounting plate 514 and located above the workbench 10. A sliding part 553 that can slide freely and is located below the workbench 10 is arranged on the vertical mounting plate 514. The upper shielding part 551 is connected to both ends of the sliding part 553, and the upper shielding part 551 tightens the sliding part 553 to make the sliding part 553 at a stable height.

[0079] Furthermore, a vertical mounting plate 514 is arranged above one side of the horizontal mounting plate 513, and the lower shielding part 552 passes through below. The other side is slidably connected to the sliding table 510 through a slide bar 516. A linear bearing is arranged on the sliding table 510, and the top end of the slide bar 516 is fixed to the lower part of the vertical mounting plate 514 and extends into the linear bearing. Since an installation space needs to be left for the lower shielding part 552, the horizontal mounting plate 513 needs to extend to one side, which results in unbalanced force. Therefore, it is necessary to balance the force by arranging a slide bar 516 on the other side.

[0080] Furthermore, as Figure 5 As shown in the figure, the belt pulley assembly 54 includes a mounting seat 541, a first belt pulley 542 and a second belt pulley 543 arranged on the mounting seat 541 along the height direction. Arranging the first belt pulley 542 and the second belt pulley 543 can form a certain distance between the upper shielding part 551 and the lower shielding part 552, so that necessary mechanical components can be placed between the upper shielding part 551 and the lower shielding part 552.

[0081] Further, fixing bars 5111 are respectively arranged on both sides of the transport table 511, and positioning grooves 5112 are arranged on the fixing bars 5111. The connecting rods on the hanging basket 9 can be placed into the positioning grooves 5112 to fix the fixing bars 5111.

[0082] Further, the top of the hanging basket fixing seat 6 is wavy to reduce the contact area with the bottom of the hanging basket 9.

[0083] Further, as Figure 6 shown, through holes 61 are formed in the hanging basket fixing seat 6 to form a channel for gas circulation, so that air flow can flow from the outside of the hanging basket fixing seat 6 to the inside and flow out from the air outlet 12, preventing water accumulation at the hanging basket fixing seat 6.

[0084] Further, lifting doors 41 are arranged at both ends of the upper outer cover 40 along the transport direction of the transport device 5. When the hanging basket 9 is transported by the transport device 5 and passes through the upper outer cover 40, the lifting doors 41 are opened. During the drying process, the lifting doors 41 are closed to prevent the loss of drying air.

[0085] Further, through holes 42 for the transport table 511 to pass through are formed in the lifting doors 41, and a curtain is arranged at the through holes 42. The curtain is flexible. When the transport table 511 does not transport the hanging basket 9, it can directly pass through the through holes 42 without opening the lifting doors 41, improving the transmission efficiency.

[0086] It should be noted that Figure 2 There are two parallel photovoltaic silicon wafer drying devices 2. Each photovoltaic silicon wafer drying device is divided into left and right parts, and two hanging baskets 9 can be placed front and back in each part. Therefore, there are two transport devices 5, and each transport device 5 can transport two hanging baskets 9. The photovoltaic silicon wafers in the hanging baskets 9 are in a vertical state. An outer cover is arranged above each photovoltaic silicon wafer drying device 2, and there are 4 air outlets 12 on the workbench 10 of each photovoltaic silicon wafer drying device 2. The two middle air outlets 12 can be considered as the same due to their close distance. Therefore, there are three air duct pipes in the bottom frame to connect the four air outlets 12. The air flow above the upper outer cover 40 passes through the hanging baskets 9 on the workbench 10, passes through the air outlets 12, and then converges together through the air duct pipes at the bottom.

[0087] The blowing device 4 includes a fan, a heating device, etc. The hot air circulates in this way to dry the hanging basket 9 and the photovoltaic silicon wafers loaded therein. Since it is a prior art, it will not be elaborated here.

[0088] In this embodiment, the lifting driving member 512 uses a cylinder, and the driving member 53 uses a motor, but other types of driving members can also be used.

[0089] Inspired by the above-described ideal embodiments of the present application, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of this application. The technical scope of this application is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A photovoltaic silicon wafer drying device, characterized in that: include: A workbench (10), wherein a hanging basket fixing seat (6) is provided on the workbench (10) and an air outlet (12) is provided, wherein the hanging basket fixing seat (6) is used for placing the hanging basket (9), and a transport trough (11) is provided on the workbench (10); A transport device (5) capable of transporting the hanging basket (9) so that the hanging basket (9) enters the workbench (10) or leaves the workbench (10); A blowing device (4) is arranged on the workbench (10); an air outlet (12) is also provided on the workbench (10); the air outlet (12) is located between two hanging basket fixing seats (6) fixing the same hanging basket (9); the blowing device (4) comprises an upper outer cover (40) arranged on the workbench (10), a lower outer cover (43) arranged on the workbench (10), and a circulating fan; dry air generated by the circulating fan enters above the workbench (10) through the upper outer cover (40), then passes through the air outlet (12) on the workbench, enters the lower outer cover (43), and flows back to the circulating fan to form circulating air; The transport device (5) comprises: a transport mechanism (51), a slide rail (52) arranged below the workbench (10), a driving member (53) for driving the transport mechanism (51) to move on the slide rail (52), and a blocking mechanism for blocking the transport trough (11); the transport mechanism (51) passes through the transport trough (11) and is provided with a transport platform (511) for carrying a hanging basket (9) on the top; the transport platform (511) is located above the workbench (10); the transport mechanism (51) can also drive the transport platform (511) to rise and fall so as to place the hanging basket (9) on the transport platform (511) on the hanging basket fixing seat (6) or remove the hanging basket (9) from the hanging basket fixing seat (6); The blocking mechanism comprises: a pulley assembly (54) arranged inside the bottom frame of the workbench (10), a shielding belt (55) capable of moving on the pulley assembly (54), the shielding belt (55) being respectively an upper shielding part (551) and a lower shielding part (552) according to being located above and below the pulley assembly (54), and the upper shielding part (551) being capable of moving together with the transport mechanism (51) and being always located below the transport trough (11).

2. The photovoltaic silicon wafer drying device according to claim 1, characterized in that: The transport mechanism (51) comprises a slide (510) arranged on a slide rail (52), a lifting drive member (512) arranged on the slide (510), a horizontal mounting plate (513) arranged on the lifting drive member (512), a vertical mounting plate (514) arranged on the horizontal mounting plate (513) and passing through a transport trough (11), a transport platform (511) arranged on the vertical mounting plate (514) and located above the workbench (10), a sliding member (553) capable of sliding freely and located below the workbench (10) being arranged on the vertical mounting plate (514), and the upper shielding portion (551) being connected to both ends of the sliding member (553).

3. The photovoltaic silicon wafer drying device according to claim 2, characterized in that: A vertical mounting plate (514) is arranged above one side of the horizontal mounting plate (513), and a lower shielding portion (552) passes through the lower side. The lower side of the other side is slidably connected to the slide platform (510) via a sliding rod (516).

4. The photovoltaic silicon wafer drying device according to claim 2, characterized in that: The pulley assembly (54) includes a mounting seat (541), a first pulley (542) and a second pulley (543) arranged along the height direction on the mounting seat (541), and the first pulley (542) and the second pulley (543) are arranged so that a certain distance is formed between the upper shielding portion (551) and the lower shielding portion (552), so that necessary mechanical components can be placed between the upper shielding portion (551) and the lower shielding portion (552).

5. The photovoltaic silicon wafer drying device according to claim 2, characterized in that: A support plate (56) is also provided at the bottom of the upper shielding portion (551) and / or the lower shielding portion (552) to support the upper shielding portion (551) and / or the lower shielding portion (552).

6. The photovoltaic silicon wafer drying device according to claim 1, characterized in that: Fixing bars (5111) are respectively arranged on both sides of the transport platform (511), and positioning grooves (5112) are arranged on the fixing bars (5111).

7. The photovoltaic silicon wafer drying device according to claim 1, characterized in that: The top of the hanging basket fixing seat (6) is wave-shaped.

8. The photovoltaic silicon wafer drying device according to claim 1, characterized in that: The hanging basket fixing seat (6) is provided with a through hole (61) to form a channel for gas circulation.

9. The photovoltaic silicon wafer drying device according to claim 1, characterized in that: Lifting doors (41) are provided on both ends of the upper outer cover (40) along the transport direction of the transport device (5); when the hanging basket (9) is transported by the transport device (5) and passes through the upper outer cover (40), the lifting doors (41) are opened; during the drying process, the lifting doors (41) are closed.

10. The photovoltaic silicon wafer drying device according to claim 9, characterized in that: The lifting door (41) is also provided with a through hole (42) for the transport platform (511) to pass through, and a blocking curtain is arranged at the through hole (42).

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