Sampling device for disilane preparation

Abstract

The utility model discloses a sampling device for disilane preparation, which comprises a processing table, a main engine base and a sampling component, the main engine base is fixedly mounted on one side of the top of the processing table, the sampling component is fixedly mounted on one side of the main engine base, and the sampling component is arranged to facilitate sampling preparation of disilane. The sampling assembly comprises a sampling channel, a sampling tank, a residue storage bottle, a vacuum pump, an air extracting pump and an extracting opening, the sampling channel is fixedly installed on one side of the machining table, the sampling tank is fixedly arranged below one side of the sampling channel, and the residue storage bottle is fixedly installed on one side of the bottom of the sampling channel; a vacuum pump is fixedly mounted on one side of the top of the sampling channel; residual gas in a pipeline in the sampling process is not easy to be thoroughly removed, the residual storage bottle and the vacuum pump are arranged in the sampling channel, internal redundant gas is sucked and stored through the residual storage bottle, air circulation in the channel is conveniently kept, and the sampling purity is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of disilane equipment, in particular to a sampling device for disilane preparation. Background Art

[0002] Disilane, also known as silicoethane, is a toxic compound with the molecular formula Si2H6 and is gaseous at room temperature. Its properties are very similar to those of ethane, both being colorless and flammable gases. However, its silicon-silicon bond is weaker than the carbon-carbon bond of ethane, so it is less stable than ethane. Disilane is usually a good source of hydrogen, and hydrogen can be obtained through a simple chemical reaction. In addition, it can also be used to prepare pure silicon by thin film deposition and is one of the important special electronic grade gases in the semiconductor industry;

[0003] In the existing document 202011210892.X, sampling treatment was not carried out before the reaction of disilane, which would result in insufficient purity of disilane. Generally, sampling devices have problems such as low sampling efficiency, high safety risks, and complex operations. Moreover, the conventional disilane sampling system uses ordinary stop valves for sampling, which is prone to personal safety problems and pipeline residual gas problems during sampling. The sampling purity may be insufficient due to gas mixing during the sampling process. Therefore, the utility model proposes a sampling device for disilane preparation to solve the problems existing in the prior art. Summary of the Utility Model

[0004] Aiming at the above problems, the purpose of the utility model is to propose a sampling device for disilane preparation. The residual gas in the pipeline during the sampling process of this sampling device for disilane preparation is not easy to be completely removed. By setting a residual storage bottle and a vacuum pump inside the sampling channel, the excess gas inside is inhaled and stored by the residual storage bottle, which is convenient for maintaining the air circulation in the channel and ensuring the sampling purity. Through the setting of the vacuum pump, a certain negative pressure can be achieved inside the channel, and then the channel is repeatedly evacuated. Such repeated replacement can completely remove the disilane in the system.

[0005] To achieve the purpose of the present utility model, the present utility model is realized through the following technical solutions: A sampling device for the preparation of disilane, including a processing table, a main seat, and a sampling assembly. One side of the top of the processing table is fixedly installed with a main seat, and one side of the main seat is fixedly installed with a sampling assembly. The setting of the sampling assembly facilitates the sampling and preparation of disilane. The sampling assembly includes a sampling channel, a sampling tank, a residual storage bottle, a vacuum pump, an air extraction pump, and an extraction port. One side of the processing table is fixedly installed with a sampling channel. Below one side of the sampling channel is fixedly provided with a sampling tank. One side of the bottom of the sampling channel is fixedly installed with a residual storage bottle. One side of the top of the sampling channel is fixedly installed with a vacuum pump. The output end of the vacuum pump is arranged inside the sampling channel. One side inside the sampling channel is fixedly installed with an air extraction pump. One side of the bottom of the sampling channel is fixedly installed with an extraction port. The extraction port is arranged above the sampling tank. The output end of the air extraction pump is connected to the extraction port.

[0006] A further improvement lies in that: A storage tank is detachably installed on the surface of the processing table, and a fixing strap is fixedly installed on the surface of the storage tank.

[0007] A further improvement lies in that: A gas guiding hose is fixedly connected to the surface of the storage tank. Multiple sets of connection ports are fixedly installed on the surface of the sampling channel. A control valve is fixedly installed on the surface of the gas guiding hose.

[0008] A further improvement lies in that: An air suction valve is fixedly installed above the residual storage bottle. The air suction valve is arranged inside the sampling channel. An installation cover is rotatably installed above the residual storage bottle.

[0009] A further improvement lies in that: A protection box is fixedly installed outside the vacuum pump. The output end of the vacuum pump is connected to an air extraction port. The air extraction port is arranged inside the sampling channel.

[0010] A further improvement lies in that: Multiple sets of rotating threaded seats are movably installed inside the sampling channel. The rotating threaded seats are rotatably installed with the connection ports.

[0011] A further improvement lies in that: Multiple sets of storage tanks are provided. The size, specification, and function of each set of storage tanks are the same.

[0012] The beneficial effects of the present utility model are as follows: During the sampling process of the present utility model, residues remaining in the pipeline are not easy to be completely removed. By arranging a residual storage bottle and a vacuum pump inside the sampling channel, the residual storage bottle inhales and stores the excess gas inside, which is convenient for maintaining the air circulation in the channel and ensuring the purity of sampling. By setting the vacuum pump, a certain negative pressure can be achieved inside the channel, and then the channel is repeatedly evacuated. Such repeated replacement can completely remove disilane in the system. Through the setting of the air extraction pump and the extraction port, disilane is extracted and sampled. Through the above vacuum treatment, the sampling of disilane can be carried out quickly and effectively, greatly improving the sampling efficiency, and solving problems such as pipeline residues, environmental pollution, and secondary pollution. Description of the Drawings

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0014] Figure 1 It is a side cross-sectional view of the present utility model;

[0015] Figure 2 It is a schematic diagram of the sampling channel of the present utility model.

[0016] Wherein: 1. Processing table; 2. Main machine base; 3. Sampling channel; 4. Sampling tank; 5. Residual storage bottle; 6. Vacuum pump; 7. Air extraction pump; 8. Extraction port; 9. Preservation tank; 10. Fixing belt; 11. Air guide hose; 12. Connection port; 13. Control valve; 14. Suction valve; 15. Installation cover; 16. Protection box; 17. Air extraction port; 18. Rotating thread base. Detailed Embodiment

[0017] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0018] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection" and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0019] According to Figure 1 、 Figure 2 As shown, this embodiment provides a sampling device for the preparation of disilane, which includes a processing table 1, a main seat 2 and a sampling assembly. On one side of the top of the processing table 1, the main seat 2 is fixedly installed, and on one side of the main seat 2, the sampling assembly is fixedly installed. The setting of the sampling assembly facilitates the sampling and preparation of disilane. The sampling assembly includes a sampling channel 3, a sampling tank 4, a residual storage bottle 5, a vacuum pump 6, an air extraction pump 7 and an extraction port 8. On one side of the processing table 1, the sampling channel 3 is fixedly installed. Below one side of the sampling channel 3, the sampling tank 4 is fixedly arranged. Placing the sampling tank 4 on one side of the sampling channel 3 facilitates sampling. On one side of the bottom of the sampling channel 3, the residual storage bottle 5 is fixedly installed. Through the setting of the residual storage bottle 5, the residual gas inside is extracted and saved before and after sampling. On one side of the top of the sampling channel 3, the vacuum pump 6 is fixedly installed. The output end of the vacuum pump 6 is arranged inside the sampling channel 3. Vacuumizing the inside of the sampling channel 3 by the vacuum pump 6 facilitates subsequent continuous sampling. On one side inside the sampling channel 3, the air extraction pump 7 is fixedly installed. On one side of the bottom of the sampling channel 3, the extraction port 8 is fixedly installed. The extraction port 8 is arranged above the sampling tank 4. The output end of the air extraction pump 7 is connected to the extraction port 8. By driving the air extraction pump 7, the extraction port 8 below is driven to extract and sample the inside of the sampling tank 4.

[0020] A storage tank 9 is detachably installed on the surface of the processing table 1. Through the setting of the storage tank 9, the sampled gas is stored. A fixing belt 10 is fixedly installed on the surface of the storage tank 9. Through the setting of the fixing belt 10, the storage tank 9 can be detachably fixed.

[0021] A gas guide hose 11 is fixedly connected to the surface of the storage tank 9. Through the setting of the gas guide hose 11, disilane is extracted. On the surface of the sampling channel 3, multiple groups of connection ports 12 are fixedly installed. A control valve 13 is fixedly installed on the surface of the gas guide hose 11. During extraction, it is introduced through the connection port 12 and finally sent into the storage tank 9. The control valve 13 is driven to control the use of the gas guide hose 11.

[0022] An air intake valve 14 is fixedly installed above the residual storage bottle 5. The air intake valve 14 is arranged in the sampling channel 3. Through the setting of the air intake valve 14, the residual gas inside is introduced into the residual storage bottle 5. Above the residual storage bottle 5, a mounting cover 15 is rotatably installed. The residual storage bottle 5 is rotatably installed and used through the mounting cover 15.

[0023] A protection box 16 is fixedly installed outside the vacuum pump 6. The surface of the vacuum pump 6 is protected through the protection box 16. The output end of the vacuum pump 6 is connected to an air extraction port 17. The air extraction port 17 is arranged inside the sampling channel 3. The air inside the sampling channel 3 is extracted through the air extraction port 17.

[0024] A plurality of rotating threaded seats 18 are movably installed inside the sampling channel 3. The rotating threaded seats 18 are rotatably installed with the connection port 12. Through the setting of the rotating threaded seats 18, the connection port 12 is rotatably installed and used, which is convenient for replacement when not in use.

[0025] A plurality of storage tanks 9 are provided. The size, specifications, and functions of each group of storage tanks 9 are the same. Through the setting of the plurality of storage tanks 9, it is convenient to perform sampling processing on multiple groups of disilane.

[0026] When the sampling device for disilane preparation is in use, through the setting of the sampling assembly, it is convenient to perform sampling and preparation of disilane. By placing the sampling tank 4 on one side of the sampling channel 3, it is convenient for sampling. Through the setting of the residual storage bottle 5, the residual gas inside is extracted and stored before and after sampling. Through the vacuum pump 6, the inside of the sampling channel 3 is evacuated to facilitate subsequent continuous sampling. By driving the air extraction pump 7, the extraction port 8 below is driven to extract and sample the inside of the sampling tank 4. Through the setting of the storage tank 9, the sampled gas is stored. Through the setting of the fixing belt 10, it is convenient to detachably fix the storage tank 9. Through the setting of the air guide hose 11, disilane is extracted. During extraction, it is introduced through the connection port 12 and finally sent into the storage tank 9. The control valve 13 is driven to control the use of the air guide hose 11. Through the setting of the air intake valve 14, the residual gas inside is introduced into the residual storage bottle 5. Through the mounting cover 15, the residual storage bottle 5 is rotatably installed and used. Through the protection box 16, the surface of the vacuum pump 6 is protected. Through the air extraction port 17, the air inside the sampling channel 3 is extracted. Through the setting of the rotating threaded seats 18, the connection port 12 is rotatably installed and used, which is convenient for replacement when not in use. Through the setting of the plurality of storage tanks 9, it is convenient to perform sampling processing on multiple groups of disilane.

[0027] The basic principles, main features and advantages of the present utility model have been shown and described above. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.

Claims

1. A sampling device for preparing disilane, comprising a processing table (1), a main frame (2) and a sampling assembly, characterized in that: A mainframe (2) is fixedly mounted on one side of the top of the processing table (1), a sampling assembly is fixedly mounted on one side of the mainframe (2), the sampling assembly comprising a sampling channel (3), a sampling tank (4), a residue storage bottle (5), a vacuum pump (6), an air extraction pump (7) and an extraction port (8); a sampling channel (3) is fixedly mounted on one side of the processing table (1), a sampling tank (4) is fixedly arranged below one side of the sampling channel (3), a residue storage bottle (5) is fixedly mounted on one side of the bottom of the sampling channel (3), a vacuum pump (6) is fixedly mounted on one side of the top of the sampling channel (3), an air extraction pump (7) is fixedly mounted on one side of the interior of the sampling channel (3), and an extraction port (8) is fixedly mounted on one side of the bottom of the sampling channel (3).

2. A sampling device for preparing disilane according to claim 1, characterized in that: A storage tank (9) is detachably mounted on the surface of the processing table (1), and a fixing belt (10) is fixedly mounted on the surface of the storage tank (9).

3. A sampling device for disilane preparation according to claim 2, characterized in that: The surface of the storage tank (9) is fixedly connected with an air guide hose (11), the surface of the sampling channel (3) is fixedly installed with multiple groups of connection ports (12), and the surface of the air guide hose (11) is fixedly installed with a control valve (13).

4. A sampling device for preparing disilane according to claim 1, characterized in that: An air intake valve (14) is fixedly mounted above the residue storage bottle (5), and the air intake valve (14) is arranged in the sampling channel (3). A mounting cover (15) is rotatably mounted above the residue storage bottle (5).

5. A sampling device for preparing disilane according to claim 1, characterized in that: A protective box (16) is fixedly mounted on the outside of the vacuum pump (6), and the output end of the vacuum pump (6) is connected to an air suction port (17), which is arranged inside the sampling channel (3).

6. A sampling device for disilane preparation according to claim 3, characterized in that: A plurality of sets of rotating thread seats (18) are movably mounted inside the sampling channel (3), and the rotating thread seats (18) and the connecting port (12) are rotatably mounted with each other.

7. A sampling device for disilane preparation according to claim 2, characterized in that: The storage tanks (9) are arranged in a plurality of groups, and the storage tanks (9) in each group have the same size, specification and function.

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