Disilane preparation equipment

Abstract

The utility model discloses disilane preparation equipment. The disilane preparation equipment comprises a waste gas treatment barrel, a transmission driving mechanism and a spraying device, a waste gas inlet pipe is mounted at the bottom of the waste gas treatment barrel; an ignition device is mounted in the waste gas treatment barrel; the transmission driving mechanism comprises a ventilation pipeline, a semicircular convex frame is arranged on the ventilation pipeline, a transmission supporting rod is inserted into the ventilation pipeline, a plurality of uniformly distributed driving hinge plates are mounted on the part, arranged in the ventilation pipeline, of the transmission supporting rod, and an air suction pipeline is fixedly connected to the ventilation pipeline; the spraying device comprises a storage box, a driving liquid pump is installed on the storage box, a dispersing frame is installed below the storage box, and a plurality of sprayers are installed on the dispersing frame. By arranging corresponding mechanisms, the treatment effect on waste gas generated in the disilane preparation process is improved, and harmful components in the waste gas can be fully purified, so that the bodies of workers are not easily harmed after the waste gas is discharged, and the surrounding environment is not easily polluted.

Description

Technical Field

[0001] The utility model belongs to the technical field of disilane tail gas treatment, and particularly relates to a disilane preparation device. Background Art

[0002] Disilane is one of the attractive special gases in the semiconductor industry. It can be used as an excellent raw material for amorphous silicon thin films, optical chemical fibers, and siloxanes, etc., and has broad application prospects and practical values in the fields of semiconductors, optoelectronic materials, etc.

[0003] During the preparation process of disilane, due to different preparation methods, different waste gases will be additionally generated, and some of these waste gases will cause harm to the human body and environmental pollution (including: hydrogen, hydrogen chloride, silane, phosphine, etc.). However, at present, there is a lack of a good waste gas treatment device in the preparation and production process of disilane, so that the waste gas generated during the preparation process of disilane cannot be fully purified, and thus will cause harm to the staff and environmental pollution after being discharged.

[0004] Therefore, in view of the above technical problems, it is necessary to provide a disilane preparation device.

[0005] The information disclosed in this background art section is only intended to enhance the overall understanding of the utility model and should not be regarded as an admission or any form of suggestion that this information constitutes prior art already known to those of ordinary skill in the art. Summary of the Utility Model

[0006] The purpose of the utility model is to provide a disilane preparation device, which can solve the problem that the waste gas generated during the preparation process of disilane in the prior art is not easy to be thoroughly purified.

[0007] To achieve the above purpose, a specific embodiment of the utility model provides a disilane preparation device, including: a waste gas treatment cylinder, a transmission driving mechanism, and a spraying device;

[0008] A waste gas inlet pipe is installed at the bottom of the waste gas treatment cylinder, and an ignition

[0009] device is installed inside the waste gas treatment cylinder;

[0010] The transmission driving mechanism is installed inside the waste gas treatment cylinder. The transmission driving mechanism includes a ventilation pipe, a semi-circular convex frame is arranged on the ventilation pipe, a transmission support rod is inserted into the ventilation pipe, a plurality of uniformly distributed driving vanes are installed on the part of the transmission support rod located inside the ventilation pipe, and a suction pipe is fixedly connected to the ventilation pipe;

[0011] The spray device is installed on one side of the ventilation pipe. The spray device includes a storage tank, a driving liquid pump is installed on the storage tank, a liquid suction pipe and a liquid delivery pipe are fixedly connected to the driving liquid pump. The other end of the liquid suction pipe is inserted into the storage tank. A dispersion frame is installed below the storage tank. The other end of the liquid delivery pipe is communicated with the dispersion frame, and a plurality of sprayers are installed on the dispersion frame.

[0012] In one or more embodiments of the present invention, a support ring frame is fixed on the waste gas treatment cylinder for fixing and supporting the waste gas treatment cylinder, so that the waste gas treatment cylinder is not prone to shaking and skew, improving the stability of the device. A plurality of support column legs are fixedly arranged below the support ring frame for providing support force.

[0013] In one or more embodiments of the present invention, a support partition box is installed in the waste gas treatment cylinder for collecting the solution for purification, so as to facilitate its centralized discharge. A plurality of uniformly distributed downward seepage holes are drilled on the support partition box, so that the purification solution can flow downward into the support partition box; a drain pipe is fixedly connected to the support partition box for discharging the solution.

[0014] In one or more embodiments of the present invention, a control valve is installed on the drain pipe for conveniently controlling the rotation of the control plate, thereby controlling the on and off of the drain pipe. A control plate is rotatably arranged in the control valve, and a rotating handle is fixedly connected to the control plate for controlling the rotation of the control plate, which is convenient for operation.

[0015] In one or more embodiments of the present invention, a gas delivery pipe is also fixedly connected below the ventilation pipe for discharging gas above the support partition box. A plurality of air dispersion holes are drilled at the other end of the gas delivery pipe to facilitate the discharge of gas.

[0016] In one or more embodiments of the present invention, a support thin rod is fixedly connected to the end of the gas delivery pipe far away from the ventilation pipe for supporting the cover plate, so that the cover plate is not prone to falling off. The

[0017] other end is fixed with a cover plate for covering the gas delivery pipe, so that the purification solution is not easy to flow into the gas delivery pipe, and thus it is not easy to affect the discharge of gas.

[0018] In one or more embodiments of the present invention, a plurality of upper discharge dispersion plates and lower disturbing plates are fixed on the transmission support rod, and both the upper discharge dispersion plates and the lower disturbing plates are used to assist in patting and dispersing the purification solution and the waste gas.

[0019] In one or more embodiments of the present invention, a plurality of uniformly distributed upward gas pipes are installed on the dispersion frame for the gas to float upward, and a plurality of the upward gas pipes are arranged on the side far away from the storage tank.

[0020] In one or more embodiments of the present utility model, fixed bearings are fixedly connected between the transmission support rod and the ventilation pipe and the dispersion frame respectively, which are used to fix the transmission support rod, so that the transmission support rod is not prone to shaking and skew, and the stability of the device is improved.

[0021] In one or more embodiments of the present utility model, activated carbon blocks are installed on the waste gas treatment cylinder, which are used to perform the last purification treatment on the waste gas, so that the harmful components in the waste gas are not easily discharged.

[0022] Compared with the prior art, through the setting of corresponding mechanisms, the present utility model improves the treatment effect of the waste gas generated in the process of disilane preparation, so that the harmful components in the waste gas can be fully purified, and thus it is not easy to cause harm to the health of workers and pollution to the surrounding environment after emission. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments recorded in the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0024] Figure 1 It is a three-dimensional view of a disilane preparation device in an embodiment of the present utility model;

[0025] Figure 2 It is a sectional view of a disilane preparation device in an embodiment of the present utility model;

[0026] Figure 3 It is Figure 2 the structural schematic diagram shown at A in

[0027] Figure 4 It is Figure 2 the structural schematic diagram shown at B in

[0028] Figure 5 It is Figure 2 the structural schematic diagram shown at C in

[0029] Figure 6 It is a sectional view of the ventilation pipe in an embodiment of the present utility model;

[0030] Figure 7 It is a structural schematic diagram of the transmission drive mechanism in an embodiment of the present utility model.

[0031] MAIN REFERENCE NUMERAL DESCRIPTION:

[0032] 1 - Exhaust gas treatment cylinder, 101 - Exhaust gas inlet pipe, 102 - Ignition device, 103 - Support ring frame, 104 - Support column leg, 105 - Support partition box, 106 - Infiltration hole, 107 - Drain pipe, 108 - Control valve, 109 - Control rotating plate, 110 - Rotating handle, 2 - Transmission drive mechanism, 201 - Ventilation pipeline, 202 - Semi - circular convex frame, 203 - Transmission support rod, 204 - Driving vane, 205 - Suction pipeline, 206 - Air supply pipeline, 207 - Support thin rod, 208 - Cover plate, 209 - Upper exhaust plate, 210 - Lower disturbing plate, 3 - Spraying device, 301 - Storage tank, 302 - Driving liquid pump, 303 - Dispersion box, 304 - Sprayer, 305 - Fixed bearing, 306 - Rising gas pipe, 4 - Activated carbon block. Detailed implementation mode

[0033] In order to enable the personnel in the technical field to better understand the technical solutions in the present utility model, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0034] As Figures 1-7 shown, a disilane preparation device in an embodiment of the present utility model includes: an exhaust gas treatment cylinder 1, a transmission drive mechanism 2, and a spraying device 3.

[0035] As Figures 1-2 shown, an exhaust gas inlet pipe 101 is installed at the bottom of the exhaust gas treatment cylinder 1. The exhaust gas inlet pipe 101 is used to introduce exhaust gas into the exhaust gas treatment cylinder 1. An ignition device 102 is installed inside the exhaust gas treatment cylinder 1 for ignition, so that the exhaust gas can burn, and thus hydrogen in the exhaust gas can be removed. Among them, a support ring frame 103 is fixed on the exhaust gas treatment cylinder 1 for fixing and supporting the exhaust gas treatment cylinder 1, so that the exhaust gas treatment cylinder 1 is not prone to shaking and tilting, improving the stability of the device. A plurality of support column legs 104 are fixedly arranged below the support ring frame 103 for providing support force.

[0036] As Figures 1-5 shown, a support partition box 105 is installed inside the exhaust gas treatment cylinder 1 for collecting and purifying

[0037] the solution used, so as to facilitate its centralized discharge. A plurality of uniformly distributed infiltration holes 106 are drilled on the support partition box 105, so that the purification solution can flow downward into the support partition box 105; a drain pipe 107 is fixedly connected to the support partition box 105 for discharging the solution.

[0038] As Figure 5 shown, a control valve 108 is installed on the liquid discharge pipe 107 to facilitate the control of the rotation of the rotating plate 109, thereby controlling the on and off of the liquid discharge pipe 107. A control rotating plate 109 is rotatably arranged in the control valve 108, and a rotating handle 110 is fixedly connected to the control rotating plate 109 for controlling the rotation of the control rotating plate 109, which is convenient for operation.

[0039] As Figures 1-3 shown, the transmission driving mechanism 2 is installed in the waste gas treatment cylinder 1. The transmission driving mechanism 2 includes a ventilation pipe 201 for the flow of waste gas. A semi-circular convex frame 202 is arranged on the ventilation pipe 201 to facilitate the rotation of a plurality of driving vane plates 204. A transmission support rod 203 is inserted into the ventilation pipe 201 for driving the rotation of a plurality of upper discharge plates 209 and lower disturbing plates 210, so that the purification solution and the waste gas are in full contact, improving the waste gas purification effect.

[0040] Specifically, a plurality of uniformly distributed driving vane plates 204 are installed on the part of the transmission support rod 203 arranged in the ventilation pipe 201, so that the waste gas can drive the rotation of a plurality of driving vane plates 204 during the flow process, and then the transmission support rod 203 drives the rotation of a plurality of upper discharge plates 209 and lower disturbing plates 210. An air suction pipe 205 is fixedly connected to the ventilation pipe 201, so that the waste gas generated by combustion and the original waste gas in the waste gas treatment cylinder 1 can be introduced into the ventilation pipe 201 through the air suction pipe 205.

[0041] As Figures 6-7 shown, a gas supply pipe 206 is also fixedly connected below the ventilation pipe 201 for discharging gas above the support partition box 105. A plurality of air dispersion holes are drilled at the other end of the gas supply pipe 206 to facilitate the discharge of gas. A support thin rod 207 is fixedly connected to the end of the gas supply pipe 206 away from the ventilation pipe 201 for supporting the cover plate 208 to prevent the cover plate 208 from falling off easily. The other end of the support thin rod 207 is fixed with a cover plate 208 for covering the gas supply pipe 206, so that the purification solution is not easy to flow into the gas supply pipe 206, and thus the discharge of gas is not easily affected.

[0042] Specifically, a plurality of upper discharge plates 209 and lower disturbing plates 210 are fixed on the transmission support rod 203, and both the upper discharge plates 209 and the lower disturbing plates 210 are used to assist in patting and dispersing the purification solution and the waste gas.

[0043] As Figures 1-3 shown, the spraying device 3 is installed on one side of the ventilation pipe 201. The spraying device 3 includes

[0044] It includes a storage tank 301 for storing the purification solution, which facilitates its rapid ejection to achieve the function of purifying the waste gas. A driving liquid pump 302 is installed on the storage tank 301 to provide power for the purification solution. A liquid suction pipe and a liquid delivery pipe are fixedly connected to the driving liquid pump 302. The other end of the liquid suction pipe is inserted into the storage tank 301. A dispersion frame 303 is installed below the storage tank 301. The other end of the liquid delivery pipe is communicated with the dispersion frame 303. A plurality of sprayers 304 are installed on the dispersion frame 303.

[0045] As Figures 1-3 shown, a plurality of evenly distributed upward gas pipes 306 are installed on the dispersion frame 303 for the gas to float upward. The plurality of upward gas pipes 306 are located on the side away from the storage tank 301. Fixed bearings 305 are fixedly connected between the transmission support rod 203 and the ventilation pipe 201 and the dispersion frame 303 respectively, which are used to fix the transmission support rod 203 so that the transmission support rod 203 is not prone to shaking and skew, improving the stability of the device.

[0046] Specifically, activated carbon blocks 4 are installed on the waste gas treatment cylinder 1 for performing a final purification treatment on the waste gas, so that harmful components in the waste gas are not easily discharged.

[0047] During specific use, first, the waste gas is introduced into the waste gas treatment cylinder 1 through the waste gas inlet pipe 101, and then the waste gas is ignited by the ignition device 102 to burn the waste gas, so that hydrogen in the waste gas can be removed. The gas generated by the combustion and the remaining gas will be introduced into the ventilation pipe 201 through the suction pipe 205. The passing of the gas will drive a plurality of driving vanes 204 to rotate, and then the transmission support rod 203 will drive the upper dispersion plate 209 and the lower disturbing plate 210 to rotate;

[0048] Then the gas will be conveyed through the air supply pipe 206 and discharged through the air dispersion holes at one end of the air supply pipe 206. During the upward floating process of the gas, it will be disturbed by the lower disturbing plate 210 to achieve the effect of dispersing the gas. The start of the driving liquid pump 302 will suck out the solution in the storage tank 301, then transport it to the dispersion frame 303, and finally spray it through a plurality of sprayers 304, so that the sprayed solution contacts the waste gas to achieve the secondary purification treatment of the waste gas. Then the waste gas is discharged through the upward gas pipes 306 and the activated carbon blocks 4, and the activated carbon blocks 4 will also perform an adsorption purification treatment on the waste gas, so that the discharged waste gas no longer contains harmful components.

[0049] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above-mentioned exemplary embodiments, and the present utility model can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present utility model. Any reference signs in the claims should not be construed as limiting the claims involved.

[0050] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A disilane preparation device, characterized in that: include: An exhaust gas treatment tube, wherein an exhaust gas inlet pipe is installed at the bottom of the exhaust gas treatment tube, and an ignition device is installed in the exhaust gas treatment tube; A transmission drive mechanism is installed in the exhaust gas treatment cylinder, the transmission drive mechanism includes a ventilation pipe, a semicircular convex frame is provided on the ventilation pipe, a transmission support rod is inserted in the ventilation pipe, a portion of the transmission support rod provided in the ventilation pipe is provided with a plurality of evenly distributed drive leaf plates, and an air intake pipe is fixedly connected to the ventilation pipe; A spray device is installed on one side of the ventilation duct, and the spray device includes a storage box, a driving liquid pump is installed on the storage box, a liquid extraction tube and a liquid infusion tube are fixedly connected to the driving liquid pump, the other end of the liquid extraction tube is inserted into the storage box, a dispersion frame is installed below the storage box, the other end of the liquid infusion tube is connected to the dispersion frame, and a plurality of sprayers are installed on the dispersion frame.

2. A disilane preparation device according to claim 1, characterized in that: A support ring frame is fixed on the exhaust gas treatment tube, and a plurality of support column legs are fixedly arranged below the support ring frame.

3. A disilane preparation device according to claim 1, characterized in that: A supporting baffle box is installed in the waste gas treatment cylinder, a plurality of evenly distributed downward infiltration holes are drilled on the supporting baffle box, and a drainage pipe is fixedly connected to the supporting baffle box.

4. A disilane preparation device according to claim 3, characterized in that: A control valve is installed on the discharge pipe, a control rotating plate is rotatably arranged in the control valve, and a turning handle is fixedly connected to the control rotating plate.

5. A disilane preparation device according to claim 1, characterized in that: An air supply pipe is fixedly connected to the lower part of the ventilation pipe, and a plurality of air diffusion holes are drilled at the other end of the air supply pipe.

6. A disilane preparation device according to claim 5, characterized in that: One end of the air supply pipe away from the ventilation pipe is fixedly connected to a thin supporting rod, and the other end of the thin supporting rod is fixed to a covering plate.

7. A disilane preparation device according to claim 1, characterized in that: A plurality of upper scattering plates and lower disrupting plates are fixed on the transmission support rod.

8. A disilane preparation device according to claim 1, characterized in that: A plurality of evenly distributed ascending air pipes are installed on the dispersion frame, and the plurality of ascending air pipes are arranged on a side away from the storage box.

9. A disilane preparation device according to claim 1, characterized in that: The transmission support rod is fixedly connected with the ventilation pipe and the dispersion frame by a fixed bearing.

10. The disilane preparation device according to claim 1, characterized in that: An activated carbon block is installed on the exhaust gas treatment cylinder.

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