Flexible grinding device for end face of quartz furnace tube

Abstract

The utility model belongs to the field of quartz furnace tube end face processing equipment, and particularly relates to a quartz furnace tube end face flexible grinding device which comprises a rack, a lifting plate connected to the rack, a main shaft seat fixedly connected to the lifting plate, a main shaft rotationally connected in the main shaft seat, a main shaft driving assembly connected to one end of the main shaft, and a connecting frame connected to the other end of the main shaft. The connecting frame is fixedly connected with a central shaft, the central shaft is connected with a grinding disc through a joint bearing, the connecting frame is further connected with a plurality of screw sleeves, the left end face of the grinding disc is connected with a plurality of sand strips, the right end face of the grinding disc is fixedly connected with a plurality of pin shafts, the pin shafts are correspondingly inserted into central holes of the screw sleeves, and the pin shafts are sleeved with springs. The grinding disc is connected with the center shaft through the knuckle bearing, so that the grinding disc can be self-adaptive in angle in the grinding process, the grinding strip is always highly attached to the flange end face of the quartz furnace tube, the grinding effect on the end face of the quartz furnace tube is effectively guaranteed, and the machining efficiency is improved.

Description

Technical Field

[0001] The utility model relates to a flexible grinding device for the end face of a quartz furnace tube, belonging to the field of quartz furnace tube end face processing equipment. Background Technique

[0002] The boron diffusion furnace is mainly used for semiconductor production, especially in the processes of diffusion, oxidation, annealing, alloying, and sintering in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices, and optical fibers. In actual production, a quartz furnace tube is usually equipped inside the boron diffusion furnace. During the production and processing of the quartz furnace tube, an end face grinding device is required to grind the flange end face of the quartz furnace tube.

[0003] Most of the existing end face grinding devices are composed of structures such as a main shaft, a grinding disc, and a main shaft driving component. The connection between the main shaft and the grinding disc is rigid. The main shaft driving component drives the main shaft to rotate, thereby driving the grinding disc to rotate to grind the workpiece. For example, the Chinese utility model patent with the authorization announcement number CN219075149U discloses a quartz tube end face grinding mechanism. Since there will be more or less certain errors when the flange and the tube body of the quartz furnace tube are butted during production and processing, when using a feeding device to vertically transport the quartz furnace tube to the grinding disc, the fit between the grinding disc and the flange end face of the quartz furnace tube is not good, which will affect the grinding effect of the quartz furnace tube end face and result in low processing efficiency. Content of the Utility Model

[0004] According to the deficiencies in the above prior art, the technical problem to be solved by the present utility model is: to provide a flexible grinding device for the end face of a quartz furnace tube with a better fit between the grinding disc and the end face of the quartz furnace tube.

[0005] The flexible grinding device for the end face of the quartz furnace tube described in the present utility model includes a frame, a lifting plate is connected to the frame, a main shaft seat is fixedly connected to the lifting plate, a main shaft is rotatably connected inside the main shaft seat, one end of the main shaft is connected with a main shaft driving component, and the other end of the main shaft is connected with a floating grinding disc component. The floating grinding disc component further includes a connecting frame and a grinding disc. A central shaft is fixedly connected to the connecting frame. A spherical plain bearing is connected between the central shaft and the grinding disc. A plurality of abrasive strips are connected to the left end face of the grinding disc. A plurality of elastic bodies are connected between the right end face of the grinding disc and the connecting frame.

[0006] Further, the elastic body includes a plurality of screw sleeves connected to the connecting frame. A plurality of pin shafts corresponding to the screw sleeves one by one are fixedly connected to the right end face of the grinding disc. Each pin shaft is correspondingly inserted into the central hole of the screw sleeve. A spring is sleeved on each pin shaft. The spring is located between the grinding disc and the screw sleeve. In addition, the elastic body can also be made of a soft polymer material.

[0007] Further, the main shaft driving component includes a reducer connected to the main shaft, and the reducer is connected with a grinding motor.

[0008] Further, the screw sleeve is in threaded connection with the connecting frame.

[0009] Further, the number of the abrasive strips is 4 to 8, each abrasive strip is arranged along the radial direction of the grinding disc, and the abrasive strips are evenly distributed in a circumferential manner on the grinding disc.

[0010] Further, the number of the screw sleeves is 3 to 6, and each screw sleeve is evenly distributed in a circumferential manner about the central axis.

[0011] Further, a linear guiding component is fixedly connected to the frame, the lifting plate is fixedly connected to the movable part of the linear guiding component, and the lifting plate is further connected with a lifting driving component.

[0012] Further, the linear guiding component includes two linear guide rails respectively fixedly connected to the left and right ends of the frame, sliders are connected to both linear guide rails, and each slider is fixedly connected to the lifting plate.

[0013] Further, the lifting driving component includes an upper support seat and a lower support seat respectively fixedly connected to the upper and lower ends of the frame, a lead screw is rotatably connected between the upper support seat and the lower support seat, a moving nut is connected to the lead screw, the moving nut is fixedly connected to the lifting plate, and the lead screw is connected with a lifting motor.

[0014] The beneficial effects of the present utility model compared with the prior art are as follows:

[0015] For the flexible grinding device for the end face of the quartz furnace tube of the present utility model, the grinding disc is connected with the central axis through a spherical plain bearing, so that the grinding disc can be angle-adaptive during the grinding process, thereby ensuring that the abrasive strip is always in high fit with the flange end face of the quartz furnace tube, effectively ensuring the grinding effect on the end face of the quartz furnace tube and improving the processing efficiency. Description of the Drawings

[0016] Figure 1 is the three-dimensional structural schematic diagram of the present utility model;

[0017] Figure 2 is the three-dimensional structural schematic diagram of the floating grinding disc assembly of the present utility model;

[0018] Figure 3 is Figure 2 the right view of

[0019] Figure 4 is Figure 3 the sectional view at A-A in

[0020] Figure 5 is Figure 2 the left view of

[0021] Figure 6It is a schematic structural diagram of the linear guiding component and the lifting driving component of the present utility model.

[0022] In the figure: 1, frame; 2, reducer; 3, lifting plate; 4, grinding motor; 5, spindle seat; 6, linear guiding component; 7, lifting driving component; 8, spindle; 9, floating grinding disc component; 10, connecting frame; 11, screw sleeve; 12, spring; 13, pin shaft; 14, grinding disc; 15, spherical plain bearing; 16, abrasive strip; 17, central shaft; 18, linear guide rail; 19, slider; 20, lower support seat; 21, moving nut; 22, lead screw; 23, upper support seat; 24, lifting motor. Specific embodiments

[0023] The following further describes the embodiments of the present utility model with reference to the accompanying drawings:

[0024] Embodiment 1:

[0025] As Figures 1 to 5 shown, the flexible grinding device for the end face of a quartz furnace tube according to the present utility model includes a frame 1, a lifting plate 3 is connected to the frame 1, a spindle seat 5 is fixedly connected to the lifting plate 3, a spindle 8 is rotatably connected inside the spindle seat 5, one end of the spindle 8 is connected to a spindle driving component, the other end of the spindle 8 is connected to a floating grinding disc component 9, the floating grinding disc component 9 further includes a connecting frame 10 and a grinding disc 14, a central shaft 17 is fixedly connected to the connecting frame 10, a spherical plain bearing 15 is connected between the central shaft 17 and the grinding disc 14, a plurality of screw sleeves 11 are also connected to the connecting frame 10, a plurality of abrasive strips 16 are connected to the left end face of the grinding disc 14, a plurality of pin shafts 13 corresponding to the screw sleeves 11 one by one are fixedly connected to the right end face of the grinding disc 14, each pin shaft 13 is correspondingly inserted into the central hole of the screw sleeve 11, and a spring 12 is sleeved on each pin shaft 13, and the spring 12 is located between the grinding disc 14 and the screw sleeve 11.

[0026] During use, the spindle driving component is used to drive the spindle 8 to rotate. The rotation of the spindle 8 can drive the connecting frame 10 to rotate, and thus drive the grinding disc 14 to rotate under the connection action of the elastic body. The rotation of the grinding disc 14 can drive the abrasive strips 16 to rotate to grind the workpiece. Under the cooperation of the spherical plain bearing 15 and the central shaft 17 and the deformation action of the elastic body, the grinding disc 14 can perform angle self-adaptive adjustment during the grinding process, so as to ensure that the abrasive strips 16 are always in high fit with the flange end face of the quartz furnace tube, effectively ensuring the grinding effect on the end face of the quartz furnace tube and improving the processing efficiency.

[0027] Embodiment 2:

[0028] As Figures 1 to 6 shown, on the basis of Embodiment 1,

[0029] Further, the main shaft drive assembly includes a speed reducer 2 coupled to the main shaft 8. The speed reducer 2 is coupled with a grinding motor 4. By the action of the grinding motor 4 and under the effect of the speed reducer 2, the main shaft 8 can be driven to rotate.

[0030] Further, the screw sleeve 11 is threadedly connected to the connecting frame 10. By rotating the screw sleeve 11, the distance between it and the grinding disc 14 can be adjusted, thereby realizing the adjustment of the elastic force of the spring 12.

[0031] Further, the number of the abrasive strips 16 is 4 to 8. In this embodiment, 6 abrasive strips are adopted. The abrasive strips 16 are diamond abrasive strips. Each abrasive strip 16 is arranged along the radial direction of the grinding disc 14, and the abrasive strips 16 are evenly distributed in a circumferential manner on the grinding disc 14, which is beneficial to ensuring the grinding area and grinding uniformity of the abrasive strips 16.

[0032] Further, the number of the screw sleeves 11 is 3 to 6. In this embodiment, 3 screw sleeves are adopted. Each screw sleeve 11 is evenly distributed in a circumferential manner about the central axis 17, which is beneficial to improving the uniform force on the grinding disc 14.

[0033] Further, a linear guiding component 6 is fixedly connected to the frame 1. The lifting plate 3 is fixedly connected to the movable part of the linear guiding component. The lifting plate 3 is also connected with a lifting drive component 7. By the action of the lifting drive component 7, the lifting plate 3 can be driven to move up and down under the effect of the linear guiding component 6, thereby realizing the adjustment of the height position of the grinding disc, and thus the concentricity between the grinding disc 14 and the workpiece to be processed can be ensured.

[0034] Further, the linear guiding component 6 includes two linear guide rails 18 respectively fixedly connected to the left and right ends of the frame 1. Sliders 19 are connected to both linear guide rails 18. Each slider 19 is fixedly connected to the lifting plate 3. Through the cooperation of the linear guide rails 18 and the sliders 19, the directional movement of the lifting plate 3 relative to the frame 1 is realized, with a simple structure and stable operation.

[0035] Further, the lifting drive component 7 includes an upper support seat 23 and a lower support seat 20 respectively fixedly connected to the upper and lower ends of the frame 1. A lead screw 22 is rotatably connected between the upper support seat 23 and the lower support seat 20. A moving nut 21 is connected to the lead screw 22. The moving nut 21 is fixedly connected to the lifting plate 3. The lead screw 22 is coupled with a lifting motor 24. By the action of the lifting motor 24, the lead screw 22 is driven to rotate, and thus the lifting plate 3 can be driven to move through the moving nut 21.

[0036] It should be specifically noted that: in the description of the present utility model, the orientation or positional relationship indicated by terms such as "left", "right", "up", "down", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model rather than requiring the present utility model to be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

Claims

1. A quartz furnace tube end surface flexible grinding device, characterized in that: The invention comprises a frame (1), a lifting plate (3) is connected to the frame (1), a main shaft seat (5) is fixedly connected to the lifting plate (3), a main shaft (8) is rotatably connected inside the main shaft seat (5), one end of the main shaft (8) is connected to a main shaft driving assembly, the other end of the main shaft (8) is connected to a floating grinding disc assembly (9), the floating grinding disc assembly (9) further comprises a connecting frame (10) and a grinding disc (14), a central shaft (17) is fixedly connected to the connecting frame (10), a joint bearing (15) is connected between the central shaft (17) and the grinding disc (14), a plurality of sand strips (16) are connected to the left end surface of the grinding disc (14), and a plurality of elastic bodies are connected to the right end surface of the grinding disc (14) and the connecting frame (10).

2. The quartz furnace tube end surface flexible grinding device according to claim 1, characterized in that: The spindle drive assembly comprises a reducer (2) connected to the spindle (8), and the reducer (2) is connected to a grinding motor (4).

3. The quartz furnace tube end surface flexible grinding device according to claim 1, characterized in that: The elastic body comprises a plurality of screw sleeves (11) connected to a connecting frame (10); a plurality of pins (13) corresponding to the screw sleeves (11) are fixedly connected to the right end surface of the grinding disc (14); each pin (13) is correspondingly inserted into a central hole of the screw sleeve (11); each pin (13) is sleeved with a spring (12); and the spring (12) is located between the grinding disc (14) and the screw sleeve (11).

4. The quartz furnace tube end surface flexible grinding device according to claim 3, characterized in that: The threaded sleeve (11) is threadedly connected to the connecting frame (10).

5. The quartz furnace tube end surface flexible grinding device according to claim 3, characterized in that: The number of the screw sleeves (11) is 3 to 6, and the screw sleeves (11) are evenly distributed around the central axis (17).

6. The quartz furnace tube end surface flexible grinding device according to claim 1, characterized in that: The number of the sand strips (16) is 4 to 6, and each sand strip (16) is arranged along the radial direction of the grinding disc (14), and each sand strip (16) is evenly distributed on the grinding disc (14) in a circumferential manner.

7. The quartz furnace tube end surface flexible grinding device according to any one of claims 1 to 6, characterized in that: The frame (1) is fixedly connected to a linear guide assembly (6), the lifting plate (3) is fixedly connected to a movable part of the linear guide assembly, and the lifting plate (3) is also connected to a lifting drive assembly (7).

8. The quartz furnace tube end surface flexible grinding device according to claim 7, characterized in that: The linear guide assembly (6) comprises two linear guide rails (18) respectively fixedly connected to the left and right ends of the frame (1), and the two linear guide rails (18) are both connected to a slider (19), and each slider (19) is fixedly connected to the lifting plate (3).

9. The quartz furnace tube end surface flexible grinding device according to claim 7, characterized in that: The lifting drive assembly (7) comprises an upper support seat (23) and a lower support seat (20) respectively fixedly connected to the upper and lower ends of the frame (1); a screw rod (22) is rotatably connected between the upper support seat (23) and the lower support seat (20); a movable nut (21) is connected to the screw rod (22); the movable nut (21) is fixedly connected to the lifting plate (3); and the screw rod (22) is connected to a lifting motor (24).

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