Wire cutting device and wire cutting equipment

Abstract

The utility model provides a wire cutting device and wire cutting equipment, belongs to the technical field of crystalline silicon processing, and solves the problem of poor cutting quality of a wire cutting device in the prior art. The wiring device comprises a base and a wiring assembly. Wherein the machine base comprises a cutting chamber and a wiring area, the cutting chamber is formed on the inner side of the machine base, a plurality of cutting main rollers are arranged in the cutting chamber and used for arranging a cutting wire net, and the wiring area is arranged on the outer side of the machine base and used for installing a wiring assembly; the wiring assembly comprises a take-up and pay-off roller, a wire arranging wheel, a tension wheel and a steering wheel, and the position of at least one of the take-up and pay-off roller, the wire arranging wheel and the tension wheel is adjustable. According to the invention, the position of at least one element in the wiring assembly is adjustable, so that the wire tension is stabilized, and the cutting quality of a silicon wafer is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of diamond wire production, and specifically relates to a wire cutting device and a wire cutting equipment. Background Art

[0002] A wire cutting device generally includes a machine base, a cutting chamber, a cutting main roller, and a wire routing assembly. The wire routing assembly winds wires around multiple cutting main rollers in the cutting chamber to form a cutting wire mesh, which can be used for wire cutting of ingots.

[0003] The existing wire routing assembly includes components such as a wire pay-off and take-up roller, a wire arranging wheel, a tension wheel, and an inclined guide wheel. Generally, there are two groups of wire routing assemblies. The wire routing path of one group is successively from the wire pay-off and take-up roller to the wire arranging wheel, then from the wire arranging wheel to the tension wheel, from the tension wheel to the inclined guide wheel, and from the inclined guide wheel to the cutting main roller. The wire routing path of the other group is opposite to the former, first from the cutting main roller to the inclined guide wheel, then from the inclined guide wheel to the tension wheel, from the tension wheel to the wire arranging wheel, and from the wire arranging wheel to the wire pay-off and take-up roller. Currently, the component composition and quantity of each wire wheel in the wire routing assembly are fixed. Although the arrangement methods of each manufacturer are diverse, they are all fixed arrangements. When facing the requirements of different cutting workpieces, flexible adjustment cannot be performed. If the wire routing is too long, it is easy to make the wire tension unstable, causing wire breakage and reducing the cutting quality. If the wire routing is too short, it is difficult to control the tension wheel to adjust the wire tension in real time, which will also reduce the cutting quality.

[0004] Based on the above content, the technical problem to be solved by this application is: how to improve the cutting quality of the wire cutting device. Summary of the Invention

[0005] The purpose of the utility model is to propose a wire cutting device and a wire cutting equipment for the above problems existing in the prior art, and solve the problem of poor wire cutting quality in the prior art. The technical effect of the solution of this application is: to improve the cutting quality of the wire cutting device.

[0006] The object of the present utility model can be achieved by the following technical solutions: A wire cutting device, comprising: a machine base, the machine base includes: a cutting chamber formed inside the machine base, and a plurality of cutting main rollers are provided in the cutting chamber for arranging a wire cutting mesh; a wiring area provided outside the machine base for arranging wire routing; a wiring assembly, the wiring assembly includes: a wire take-up and pay-off roller provided in the wiring area for taking up or paying off wire; a wire arranging wheel provided in the wiring area, the wire arranging wheel can be connected to the wire take-up and pay-off roller by wire for wire arranging; a tension wheel provided in the wiring area, the tension wheel can be connected to the wire take-up and pay-off roller by wire for adjusting tension; and a turning wheel provided in the wiring area, the turning wheel can be respectively connected to the tension wheel and the cutting main roller by wire, and the turning wheel is used for turning so that the cutting wire can be transmitted; wherein, the position of at least one of the wire take-up and pay-off roller, the wire arranging wheel and the tension wheel is adjustable.

[0007] It can be understood that the machine base is used to support or install each component, the cutting chamber is used to provide a cutting space for the workpiece to be cut, generally there are more than 2 cutting main rollers, and the cutting main rollers are arranged at intervals to facilitate the formation of a wire cutting mesh around them, and the wiring assembly is used to transmit the cutting wire between the cutting main rollers. A plurality of turns of cutting wire are arranged and wound around the wire take-up and pay-off roller, which can either send wire to the wire arranging wheel or take up wire from the wire arranging wheel. The wire arranging wheel generally has a certain degree of freedom of movement in the length direction of the machine base, and it needs to be tangent to the wire outlet direction or wire take-up direction of the wire take-up and pay-off roller. Therefore, the maximum movement stroke of the wire arranging wheel is basically equal to the wiring length of the wire take-up and pay-off roller. The tension wheel is arranged between the wire arranging wheel and the turning wheel, and the tension wheel is also hinged to a support arm, and the support arm is hinged to the machine base. By swinging and adjusting the support arm, the position of the tension wheel can be adjusted, and the distances between the tension wheel and the wire arranging wheel and the turning wheel can also be adjusted, so as to adjust the wire tension among the three. Since there is a certain height difference between the position of the cutting main roller and the position of the turning wheel, the turning wheel is configured to be inclined to prevent the cutting wire between it and the cutting main roller from being twisted and damaged. By making the position of at least one of the wire take-up and pay-off roller, the wire arranging wheel and the tension wheel adjustable, for example, by setting a plurality of workstations in the wiring area, the positions of each component in the wiring assembly can be adaptively adjusted to form a wiring assembly with a long wire routing or a short wire routing. Among them, the long wire routing layout is convenient for wire adjustment, and the short wire routing layout can stabilize the wire tension.

[0008] In the above wire cutting device, the wiring area is provided with at least 2 wire take-up and pay-off workstations in a first direction, and at least 2 wire take-up and pay-off workstations are available for the wire take-up and pay-off roller to be disassembled and installed; at least 2 wire take-up and pay-off workstations respectively correspond to wire arranging workstations in a second direction one by one, and the wire arranging workstations are available for the wire arranging wheel to be disassembled and installed.

[0009] It can be understood that the wiring area has a first installation layout and a second installation layout. Since the positions of the wire winding and unwinding roller and the wire arranging wheel need to match each other to prevent wire twisting during wire feeding, in the first installation layout, after the wire winding and unwinding roller is arranged at the first wire winding and unwinding station, the wire arranging wheel needs to be arranged at the corresponding first wire arranging station, that is, the first wire arranging station is correspondingly arranged in the second direction of the first wire winding and unwinding station. Otherwise, it will cause the wire to skew, resulting in wire twisting and increasing the wire breakage rate. In the second installation layout, after the wire winding and unwinding roller is arranged at the second wire winding and unwinding station, the wire arranging wheel needs to be arranged at the corresponding second wire arranging station. Similarly, the second wire arranging station is correspondingly arranged in the second direction of the second wire winding and unwinding station. Among them, the first direction is defined as the direction parallel or substantially parallel to the cutting main roller, and the second direction is defined as the direction perpendicular or substantially perpendicular to the first direction, and the second direction is generally vertically upward. In some embodiments, more wire winding and unwinding stations and wire arranging stations can also be set to be compatible with more layout methods.

[0010] In the above wire cutting device, the wiring area is provided with at least 2 tension stations in the first direction, and at least 2 tension stations are available for the detachable installation of the tension wheels. The first direction is defined as the direction parallel or substantially parallel to the cutting main roller.

[0011] It can be understood that by adjusting the position of the tension wheel alone, the adjustment of the wire running length can be satisfied, and the positions of the first tension station and the second tension station can be selected from the two ends or the middle area in the length direction of the machine base.

[0012] In the above wire cutting device, the wire winding and unwinding roller and the wire arranging wheel have degrees of freedom of movement in the first direction. It can be understood that in some embodiments, the wire winding and unwinding roller and the wire arranging wheel are respectively slidably connected to the machine base, and the wire winding and unwinding roller and the wire arranging wheel can respectively slide along the first direction to adjust the wire running length. The first direction is defined as the direction parallel or substantially parallel to the cutting main roller.

[0013] In the above wire cutting device, the tension wheel has a degree of freedom of movement in the first direction. It can be understood that in some embodiments, the tension wheel is slidably connected to the machine base, and the tension wheel can slide along the first direction to adjust the wire running length. The first direction is defined as the direction parallel or substantially parallel to the cutting main roller.

[0014] In the above wire cutting device, the wiring assembly has a first wire routing layout; under the first wire routing layout, a first wire routing channel is formed between the wire arranging wheel and the tension wheel, and the length of the first wire routing channel is L1; a second wire routing channel is formed between the turning wheel and the tension wheel, and the length of the second wire routing channel is L2; wherein, the outer diameter length of the tension wheel is D, L1 ≤ 4D, and / or, L2 ≤ 5.5D. It can be understood that the first wire routing channel is for conveying the cutting wire between the wire arranging wheel and the tension wheel of the first wire routing layout, and the second wire routing channel is for conveying the cutting wire between the turning wheel and the tension wheel of the first wire routing layout. The first wire routing layout is a short wire routing layout. Specifically, when the length of the first wire routing channel is less than or equal to 4 times the outer diameter of the tension wheel, and / or, the length of the second wire routing channel is less than or equal to 5.5 times the outer diameter of the tension wheel, a relatively stable wire tension can be provided for the wiring assembly, thereby improving the cutting quality.

[0015] In the above wire cutting device, the wiring assembly has a second wire routing layout. Under the second wire routing layout, a third wire routing channel is formed between the wire arranging wheel and the tension wheel, and the length of the third wire routing channel is L3; a fourth wire routing channel is formed between the turning wheel and the tension wheel, and the length of the fourth wire routing channel is L4; wherein, the outer diameter length of the tension wheel is D, L3 > 4D, and / or, L4 > 5.5D. It can be understood that the third wire routing channel is for conveying the cutting wire between the wire arranging wheel and the tension wheel of the second wire routing layout, and the fourth wire routing channel is for conveying the cutting wire between the turning wheel and the tension wheel of the second wire routing layout. The second wire routing layout is a long wire routing layout. Specifically, when the length of the third wire routing channel is greater than 4 times the outer diameter of the tension wheel, and / or, the length of the fourth wire routing channel is greater than 5.5 times the outer diameter of the tension wheel, a relatively sufficient wire adjustment space can be provided for the wiring assembly.

[0016] It should be noted that the minimum values of L1 and L2 are related to the swing arm arc of the tension wheel and the diameter of the tension wheel. When the swing arc of the tension wheel is too large, it means that it is easy to interfere with the wire arranging wheel or the turning wheel, making it difficult to perform wire routing work. The selection of the first wire routing layout and the second wire routing layout depends on the wiring process. When the wiring on the cutting main roller has just started, the long wire routing layout is applicable to provide sufficient wire adjustment space. When the wiring on the cutting main roller is approaching completion, the short wire routing layout is applicable to provide stable wire tension, thereby improving the cutting quality.

[0017] In the above wire cutting device, the wire winding and unwinding roller is connected to a first driving motor. The first driving motor is arranged on the machine base, and under the first wire routing layout, the output shaft of the first driving motor is closer to the first wire routing channel than the first driving motor body.

[0018] In the above wire cutting device, the wiring assembly includes a first wiring assembly and a second wiring assembly. The first wiring assembly and the second wiring assembly are respectively arranged on both sides of the cutting chamber and are asymmetrically arranged. It can be understood that wiring assemblies are arranged on both sides of the cutting chamber. Among them, the first wiring assembly can be used as the wire releasing part, and the second wiring assembly can be used as the wire winding part. The two cooperate to wind and release the wire for the main cutting roller.

[0019] In the above wire cutting device, a total wire routing channel is formed between the wiring assembly and the main cutting roller. A cleaning assembly is further provided on the machine base. The cleaning assembly includes a blowing member, and the blowing member outputs air flow to act on the total wire routing channel. It can be understood that since there are a large amount of silicon powder and cutting dirty liquid in the cutting operation environment in the cutting chamber, when the cutting wire is transferred from the main cutting roller to the wiring assembly, it is easy to be contaminated with silicon powder and cutting dirty liquid, thereby affecting the wire arranging operation of the wire arranging wheel for the wire winding and releasing rollers. In particular, when it comes to a short wire routing layout, there is more attachment of cutting wire dirt on the wire arranging wheel. Therefore, the present device cleans the silicon powder and cutting dirty liquid on the cutting wire by setting up a cleaning assembly. Specifically, the blowing member outputs air flow to blow the dirt away from the cutting wire.

[0020] In the above wire cutting device, the cleaning assembly further includes a separating member. The separating member is arranged on the total wire routing channel. The separating member has a separating area, and the separating area communicates with the total wire routing channel. The blowing member outputs air flow to the separating area. It can be understood that by adding a separating member, the turning wheel can be separated from the wire arranging wheel or the tension wheel. In some embodiments, the blowing member is arranged outside the separating area, and the air blowing port of the blowing member faces from the outside of the separating area to the inside of the separating area to ensure that the dirt blown away from the cutting wire does not leak from the separating member. In some embodiments, the blowing member is arranged inside the separating area, and the blowing member forms an air screen inside the separating area, and the air screen separates the two sides inside and outside the separating area to prevent dirt from leaking.

[0021] In the above wire cutting device, the separating member is arranged between the turning wheel and the wire arranging wheel. The separating member is provided with through holes, and the separating area communicates with the total wire routing channel through the through holes. It can be understood that by setting the through holes, it is possible to ensure normal wire routing without interference while the work inside the separating area is carried out.

[0022] Another object of the present application is also to provide a wire cutting equipment, including: the above wire cutting device; a cutting fluid device, the cutting fluid device is connected to the wire cutting device through a liquid path; a power supply device, the power supply device is electrically connected to the wire cutting device. It can be understood that the wire cutting device is used to cut workpieces, the cutting fluid device is used to supply and receive cutting fluid and realize recycling, and the power supply device generally includes an electric cabinet for providing electric energy to ensure the stable operation of the wire cutting device and the cutting fluid device.

[0023] Compared with the prior art, the utility model has the following beneficial effects:

[0024] 1. By making the position of at least one element in the wiring assembly adjustable, the present application stabilizes the wire tension, thereby improving the cutting quality of the silicon wafer;

[0025] 2. By arranging multiple workstations in the wiring area, the present application can adaptively adjust the positions of the various elements in the wiring assembly, thereby accommodating multiple wire routing layouts. Among them, the long wire routing layout facilitates wire adjustment, while the short wire routing layout can stabilize the wire tension;

[0026] 3. By providing a cleaning assembly to clean the silicon powder and cutting dirty liquid on the cutting wire, the present application improves the smoothness of wire routing and wiring;

[0027] 4. By using an isolation member to isolate the turning wheel from the wire routing wheel and the tension wheel, the present application prevents the leakage of dirt detached from the cutting wire, and by providing through holes in the isolation member, normal wire routing can be ensured. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a schematic structural diagram of the first embodiment of the wire cutting device of the present application;

[0029] Figure 2 is a schematic structural diagram of the second embodiment of the wire cutting device of the present application;

[0030] Figure 3 is a schematic structural diagram of the third embodiment of the wire cutting device of the present application;

[0031] Figure 4 is Figure 3 a partial schematic structural diagram of the layout area;

[0032] Figure 5 is Figure 4 a schematic structural diagram after adjusting the position of the tension wheel;

[0033] Figure 6 is a schematic structural diagram of the first wire routing layout of the present application;

[0034] Figure 7 is a schematic structural diagram of the second wire routing layout of the present application;

[0035] Figure 8 is a schematic structural diagram of the wire cutting device of the present application after adding a cleaning assembly;

[0036] Figure 9 is a bottom view of the wire cutting device of the present application;

[0037] Figure 10 is a schematic structural diagram of the wire cutting equipment of the present application;

[0038] In the figure, 100 is the machine base; 110 is the cutting chamber; 111 is the main cutting roller; 120 is the wiring area; 121 is the wire winding and unwinding station, 1211 is the first wire winding and unwinding station, 1212 is the second wire winding and unwinding station; 122 is the wire arranging station, 1221 is the first wire arranging station, 1222 is the second wire arranging station; 123 is the tension station, 1231 is the first tension station, 1232 is the second tension station; 200 is the wiring assembly, 200a is the first wiring assembly, 200b is the second wiring assembly; 210 is the wire winding and unwinding roller; 220 is the wire arranging wheel; 230 is the tension wheel; 240 is the turning wheel; 250 is the first driving motor; 260 is the support arm; 300 is the cleaning assembly; 310 is the air blowing part; 320 is the isolating part, 321 is the isolating area, 322 is the through hole; S is the total wire routing channel; S1 is the first wire routing channel; S2 is the second wire routing channel; S3 is the third wire routing channel; S4 is the fourth wire routing channel; S5 is the fifth wire routing channel; S6 is the sixth wire routing channel; 400 is the cutting fluid device; 500 is the power supply device. Detailed implementation manners

[0039] To make the above objects, features, and advantages of the present utility model more apparent and understandable, the following will describe the detailed implementation manners of the present utility model in conjunction with the accompanying drawings. Many specific details are set forth in the following description to facilitate a full understanding of the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.

[0040] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for facilitating the description of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present utility model.

[0041] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present utility model, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0042] In the present utility model, unless otherwise clearly defined and limited, terms such as "installed", "connected", "joined", "fixed", etc. shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal connection of two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0043] In the present utility model, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature is at a higher level than the second feature in terms of horizontal height. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature is at a lower level than the second feature in terms of horizontal height.

[0044] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it may be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are only for the purpose of illustration and do not represent the only implementation.

[0045] Please refer to the Figures 1-3, this application includes a machine base 100 and a wiring assembly 200. Among them, the machine base 100 includes a cutting chamber 110 and a wiring area 120. The cutting chamber 110 is formed inside the machine base 100, and multiple cutting main rollers 111 are provided in the cutting chamber 110. The multiple cutting main rollers 111 are used to arrange a cutting wire mesh. The wiring area 120 is arranged outside the machine base 100, and the wiring area 120 is used to install the wiring assembly 200; the wiring assembly 200 includes a wire winding and unwinding roller 210, a wire arranging wheel 220, a tension wheel 230, and a turning wheel 240. The wire winding and unwinding roller 210 is arranged in the wiring area 120, and the wire winding and unwinding roller 210 is used for winding or unwinding wires. The wire arranging wheel 220 is arranged above the wire winding and unwinding roller 210, and the wire arranging wheel 220 is used for wire connection with the wire winding and unwinding roller 210. The tension wheel 230 is arranged on one side of the wire arranging wheel 220, and the tension wheel 230 is used for wire connection with the wire arranging wheel 220. The turning wheel 240 is arranged on one side of the cutting main roller 111, and the turning wheel 240 is used for wire connection with the tension wheel 230 and the cutting main roller 111 respectively; among them, the position of at least one of the wire winding and unwinding roller 210, the wire arranging wheel 220, and the tension wheel 230 is adjustable.

[0046] It can be understood that the machine base 100 is used to support or install each component. The cutting chamber 110 is used to provide a cutting space for the workpiece to be cut. Generally, there are more than 2 cutting main rollers 111, and the cutting main rollers 111 are arranged at intervals, so as to facilitate the formation of a cutting wire mesh by surrounding. The wiring assembly 200 is used to transfer the cutting wire between the cutting main rollers 111. Multiple turns of cutting wire are arranged and wound on the wire winding and unwinding roller 210, which can either feed wire to the wire arranging wheel 220 or take in wire from the wire arranging wheel 220. The wire arranging wheel 220 generally has a certain degree of freedom of movement in the length direction of the machine base 100, and it needs to be tangent to the wire outlet direction or wire taking-in direction of the wire winding and unwinding roller 210. Therefore, the maximum movement stroke of the wire arranging wheel 220 is basically equal to the wiring length of the wire winding and unwinding roller 210. The tension wheel 230 is arranged between the wire arranging wheel 220 and the turning wheel 240. The tension wheel 230 is also hinged to a support arm 260, and the support arm 260 is hinged to the machine base 100. By swinging and adjusting the support arm 260, the position of the tension wheel 230 can be adjusted, and the distances between the tension wheel 230 and the wire arranging wheel 220 and the turning wheel 240 can also be adjusted, so as to adjust the wire tension among the three. Since there is a certain height difference between the position of the cutting main roller 111 and the position of the turning wheel 240, the turning wheel 240 is configured to be inclined, so as to prevent the cutting wire between it and the cutting main roller 111 from being twisted and damaged. By making the position of at least one of the wire winding and unwinding roller 210, the wire arranging wheel 220, and the tension wheel 230 adjustable, for example, by setting multiple workstations in the wiring area 120, the positions of each component in the wiring assembly 200 can be adaptively adjusted, so as to form a wiring assembly 200 with a long wire path or a short wire path. Among them, the long wire path layout can facilitate wire adjustment, while the short wire path layout can stabilize the wire tension.

[0047] Continue to refer to Figures 1-3 In some embodiments, the wire winding and unwinding station 121 includes a first wire winding and unwinding station 1211 and a second wire winding and unwinding station 1212, and the wire arranging station 122 includes a first wire arranging station 1221 and a second wire arranging station 1222. The first wire winding and unwinding station 1211 and the second wire winding and unwinding station 1212 are respectively arranged along the first direction of the machine base 100, and the first wire arranging station 1221 and the second wire arranging station 1222 are also respectively arranged along the first direction of the machine base 100; the wiring assembly 200 has a first installation layout and a second installation layout; in the first installation layout, the wire winding and unwinding roller 210 is located at the first wire winding and unwinding station 1211, and the wire arranging wheel 220 is located at the first wire arranging station 1221; in the second installation layout, the wire winding and unwinding roller 210 is located at the second wire winding and unwinding station 1212, and the wire arranging wheel 220 is located at the second wire arranging station 1222. It can be understood that since the positions of the wire winding and unwinding roller 210 and the wire arranging wheel 220 need to match each other to prevent wire twisting during wire feeding, therefore, in the first installation layout, after the wire winding and unwinding roller 210 is configured at the first wire winding and unwinding station 1211, the wire arranging wheel 220 needs to be configured at the corresponding first wire arranging station 1221; in the second installation layout, after the wire winding and unwinding roller 210 is configured at the second wire winding and unwinding station 1212, the wire arranging wheel 220 needs to be configured at the corresponding second wire arranging station 1222. In some embodiments, more wire winding and unwinding stations and wire arranging stations can also be provided to be compatible with more layout methods.

[0048] See Figure 4 and Figure 5 In some embodiments, the tension station 123 includes a first tension station 1231 and a second tension station 1232, and the first tension station 1231 and the second tension station 1232 are respectively arranged along the length direction of the machine base 100; the wiring assembly 200 has a third installation layout and a fourth installation layout; in the third installation layout, the tension wheel 230 is located at the first tension station 1231; in the fourth installation layout, the tension wheel 230 is located at the second tension station 1232. It can be understood that by adjusting the position of the tension wheel 230 alone, the adjustment of the wire running length can be satisfied, and the positions of the first tension station 1231 and the second tension station 1232 can be selected from the two ends or the middle area of the length direction of the machine base 100.

[0049] In some embodiments, the wire winding and unwinding roller 210 and the wire arranging wheel 220 have degrees of freedom of movement in the first direction. It can be understood that the wire winding and unwinding roller 210 and the wire arranging wheel 220 are respectively slidably connected to the machine base 100, and the wire winding and unwinding roller 210 and the wire arranging wheel 220 can respectively slide along the first direction to adjust the wire running length. The first direction is defined as the direction parallel or substantially parallel to the cutting main roller 111.

[0050] In some embodiments, the tension pulley 230 has a degree of freedom of movement in the first direction. It can be understood that the tension pulley 230 is slidably connected to the machine base 100, and the tension pulley 230 can slide along the first direction to adjust the wire routing length. The first direction is defined as the direction parallel or substantially parallel to the cutting main roller 111.

[0051] See Figure 6 and Figure 7 , in some embodiments, the wiring assembly 200 has a first wire routing layout and a second wire routing layout; in the first wire routing layout, a first wire routing channel S1 is formed between the wire arranging pulley 220 and the tension pulley 230, and the length of the first wire routing channel S1 is L1; a second wire routing channel S2 is formed between the turning pulley 240 and the tension pulley 230, and the length of the second wire routing channel S2 is L2; wherein, the outer diameter length of the tension pulley 230 is D, L1 ≤ 4D, and / or, L2 ≤ 5.5D. It can be understood that the first wire routing channel S1 is for conveying the cutting wire between the wire arranging pulley 220 and the tension pulley 230 in the first wire routing layout, and the second wire routing channel S2 is for conveying the cutting wire between the turning pulley 240 and the tension pulley 230 in the first wire routing layout. The first wire routing layout is a short wire routing layout. Specifically, when the length L1 of the first wire routing channel S1 is less than or equal to 4 times the outer diameter D of the tension pulley 230, and / or, the length L2 of the second wire routing channel S2 is less than or equal to 5.5 times the outer diameter D of the tension pulley 230, a relatively stable wire tension can be provided for the wiring assembly 200, thereby improving the cutting quality.

[0052] In the second wire routing layout, a third wire routing channel S3 is formed between the wire arranging pulley 220 and the tension pulley 230, and the length of the third wire routing channel S3 is L3; a fourth wire routing channel S4 is formed between the turning pulley 240 and the tension pulley 230, and the length of the fourth wire routing channel S4 is L4; wherein, L1 < L3, and / or, L3 < L4. Among them, the outer diameter length of the tension pulley 230 is D, L3 > 4D, and / or, L4 > 5.5D. It can be understood that the third wire routing channel S3 is for conveying the cutting wire between the wire arranging pulley 220 and the tension pulley 230 in the second wire routing layout, and the fourth wire routing channel S4 is for conveying the cutting wire between the turning pulley 240 and the tension pulley 230 in the second wire routing layout. The second wire routing layout is a long wire routing layout. Specifically, when the length L3 of the third wire routing channel S3 is greater than 4 times the outer diameter D of the tension pulley 230, and / or, the length L4 of the fourth wire routing channel S4 is greater than 5.5 times the outer diameter D of the tension pulley 230, a relatively sufficient wire adjusting space can be provided for the wiring assembly 200.

[0053] It should be noted that the minimum values of L1 and L2 are related to the swing arm arc of the tension pulley 230 and the outer diameter of the tension pulley 230. When the swing arc of the tension pulley 230 is too large, it means that it is likely to interfere with the wire arranging pulley 220 or the turning pulley 240, making it difficult to perform the wire routing operation. The selection between the first wire routing layout and the second wire routing layout depends on the wiring process. When the wiring on the cutting main roller 111 has just started, the long wire routing layout is applicable to provide sufficient wire adjustment space. When the wiring on the cutting main roller 111 is approaching completion, the short wire routing layout is applicable to provide stable wire tension, thereby improving the cutting quality.

[0054] See Figure 6 , in some embodiments, the wire winding and unwinding roller 210 is connected to a first driving motor 250. The first driving motor 250 is arranged on the machine base 100, and in the first wire routing layout, the output shaft of the first driving motor 250 is closer to the first wire routing channel S1 than the body of the first driving motor 250.

[0055] See Figure 8 , in some embodiments, a total wire routing channel S is formed between the wiring assembly 200 and the cutting main roller 111. A cleaning assembly 300 is further provided on the machine base 100. The cleaning assembly 300 includes a blowing member 310, and the blowing member 310 outputs an air flow to act on the total wire routing channel S. It can be understood that since there are a large amount of silicon powder and cutting dirty liquid in the cutting operation environment in the cutting chamber 110, when the cutting wire is transferred from the cutting main roller 111 to the wiring assembly 200, it is likely to be contaminated with silicon powder and cutting dirty liquid, thus affecting the wire arranging operation of the wire arranging pulley 220 for the wire winding and unwinding roller 210. In particular, when it comes to the short wire routing layout, there is more cutting wire dirt attached to the wire arranging pulley 220. Therefore, the present device cleans the silicon powder and cutting dirty liquid on the cutting wire by providing the cleaning assembly 300. Specifically, the blowing member 310 outputs an air flow to blow the dirt away from the cutting wire. In the first wire routing layout, the total wire routing channel S includes a first wire routing channel S1, a second wire routing channel S2, a fifth wire routing channel S5, and a sixth wire routing channel S6. In the second wire routing layout, the total wire routing channel S includes a third wire routing channel S3, a fourth wire routing channel S4, a fifth wire routing channel S5, and a sixth wire routing channel S6.

[0056] Continue to refer to Figure 8, in some embodiments, the cleaning component 300 further includes a separator 320 disposed on the total wire routing channel S. The separator 320 has a separation area 321 that communicates with the total wire routing channel S, and the air blowing member 310 outputs air flow to the separation area 321. It can be understood that by adding the separator 320, the steering wheel 240 can be separated from the wire arranging wheel 220 or the tension wheel 230. In some embodiments, the air blowing member 310 is disposed outside the separation area 321, and the air blowing port of the air blowing member 310 faces from the outside to the inside of the separation area 321 to ensure that the dirt blown off the cutting wire does not leak from the separator 320. In some embodiments, the air blowing member 310 is disposed inside the separation area 321, and the air blowing member 310 forms an air screen inside the separation area 321, and the air screen separates the inside and outside of the separation area 321 to prevent dirt from leaking. The separator 320 is disposed between the steering wheel 240 and the wire arranging wheel 220, and the separator 320 is provided with a through hole 322, and the separation area 321 communicates with the total wire routing channel S through the through hole 322. It can be understood that by providing the through hole 322, it is possible to ensure that the work inside the separation area 321 is carried out without disturbing the normal wire routing.

[0057] See Figure 9 , in some embodiments, the wiring component 200 includes a first wiring component 200a and a second wiring component 200b. The first wiring component 200a and the second wiring component 200b are respectively disposed on both sides of the cutting chamber 110 and are asymmetrically arranged. It can be understood that wiring components 200 are arranged on both sides of the cutting chamber 110. Among them, the first wiring component 200a can be used as the wire feeding part, and the second wiring component 200b can be used as the wire winding part, and the two cooperate to wind and feed the cutting main roller 111.

[0058] See Figure 10 , the wire cutting equipment of the present application includes a wire cutting device, a cutting fluid device 400, and a power supply device 500. The cutting fluid device 400 is connected to the wire cutting device through a liquid path, and the power supply device 500 is electrically connected to the wire cutting device. It can be understood that the wire cutting device is used to cut workpieces, the cutting fluid device 400 is used to supply and receive cutting fluid and realize recycling, and the power supply device 500 generally includes an electric cabinet for providing electric energy to ensure that the wire cutting device and the cutting fluid device can work stably.

[0059] Beneficial effects:

[0060] In this application, by making the position of at least one component in the wiring assembly 200 adjustable, the wire tension is stabilized, thereby improving the cutting quality of the silicon wafer; by arranging a plurality of workstations in the wiring area 120, the positions of the various components in the wiring assembly 200 can be adaptively adjusted, so as to be compatible with a variety of wire routing layouts. Among them, the long wire routing layout is convenient for wire adjustment, while the short wire routing layout can stabilize the wire tension; by arranging the cleaning assembly 300 to clean the silicon powder and cutting dirty liquid on the cutting wire, the smoothness of the wire routing and wire arranging is improved; by using the separator 320 to isolate the turning wheel 240 from the wire arranging wheel 220 and the tension wheel 230, the leakage of dirt detached from the cutting wire is avoided, and by providing through holes 322 in the separator 320, normal wire routing can be ensured.

[0061] The specific embodiments described herein are merely illustrative of the spirit of the present utility model. Those skilled in the art to which the present utility model pertains can make various modifications or supplements to the described specific embodiments or use similar methods for substitution, but will not deviate from the spirit of the present utility model or exceed the scope defined by the appended claims.

Claims

1. A wire cutting device, characterized in that: include: A machine base (100), the machine base (100) comprising: A cutting chamber (110), wherein the cutting chamber (110) is formed inside the machine base (100), and a plurality of main cutting rollers (111) are arranged inside the cutting chamber (110), and the plurality of main cutting rollers (111) are used to arrange a cutting wire network; A wiring area (120), the wiring area (120) being arranged outside the machine base (100), and the wiring area (120) being used for wiring arrangement; A wiring assembly (200), the wiring assembly (200) comprising: a wire-reeling roller (210), the wire-reeling roller (210) being arranged in the wiring area (120), and the wire-reeling roller (210) being used for reeling in or unreeling; A wire arrangement wheel (220), the wire arrangement wheel (220) being disposed in the wiring area (120), and the wire arrangement wheel (220) being connectable to the wire taking-up and paying-off roller (210); A tension wheel (230), the tension wheel (230) being disposed in the wiring area (120), and the tension wheel (230) being connectable to the wiring wheel (220); and A steering wheel (240), the steering wheel (240) being arranged in the wiring area (120), and the steering wheel (240) being respectively connected to the tension wheel (230) and the main cutting roller (111); Wherein, the position of at least one of the wire-reeling roller (210), the wire-arranging wheel (220) and the tension wheel (230) is adjustable.

2. The wire cutting device according to claim 1, characterized in that: The wiring area (120) is provided with at least two wire-reeling and -unreeling stations (121) in the first direction, and at least two of the wire-reeling and -unreeling stations (121) are provided for the wire-reeling and -unreeling roller (210) to be disassembled and installed; at least two of the wire-reeling and -unreeling stations (121) are provided with corresponding wire-arranging stations (122) in the second direction, and the wire-arranging stations (122) are provided for the wire-arranging roller (220) to be disassembled and installed.

3. The wire cutting device according to claim 1, characterized in that: The wiring area (120) is provided with at least two tension stations (123) in a first direction, and the at least two tension stations (123) can be used for the tension wheel (230) to be disassembled and installed.

4. The wire cutting device according to claim 1, characterized in that: The pay-off and take-up roller (210) and the wire arrangement wheel (220) have freedom of movement in a first direction, and / or the tension wheel (230) has freedom of movement in a first direction.

5. The wire cutting device according to claim 1, characterized in that: The wiring assembly (200) has a first wiring layout; Under the first wiring layout, a first wiring channel (S1) is formed between the wiring wheel (220) and the tension wheel (230), and the length of the first wiring channel (S1) is L1; a second wiring channel (S2) is formed between the steering wheel (240) and the tension wheel (230), and the length of the second wiring channel (S2) is L2; Wherein, the outer diameter length of the tension wheel (230) is D, L1≤4D, and / or L2≤5.5D.

6. The wire cutting device according to claim 1, characterized in that: The wiring assembly (200) has a second wiring layout; Under the second wiring layout, a third wiring channel (S3) is formed between the wiring wheel (220) and the tension wheel (230), and the length of the third wiring channel (S3) is L3; a fourth wiring channel (S4) is formed between the steering wheel (240) and the tension wheel (230), and the length of the fourth wiring channel (S4) is L4; Wherein, the outer diameter length of the tension wheel (230) is D, L3>4D, and / or L4>5.5D.

7. The wire cutting device according to claim 1, characterized in that: A main wiring channel (S) is formed between the wiring assembly (200) and the main cutting roller (111), and a cleaning assembly (300) is also provided on the machine base (100). The cleaning assembly (300) comprises a blowing member (310), and the blowing member (310) outputs an airflow to act on the main wiring channel (S).

8. The wire cutting device according to claim 7, characterized in that: The cleaning component (300) further comprises an isolating member (320), wherein the isolating member (320) is arranged on the main wiring channel (S), the isolating member (320) has an isolating area (321), the isolating area (321) is connected to the main wiring channel (S), and the blowing member (310) outputs airflow to the isolating area (321).

9. The wire cutting device according to claim 8, characterized in that: The isolating member (320) is arranged between the steering wheel (240) and the cable arrangement wheel (220), and a through hole (322) is provided on the isolating member (320), and the isolation area (321) is connected to the main wiring channel (S) through the through hole (322).

10. A wire cutting device, characterized in that: include: The wire cutting device according to any one of claims 1 to 9; A cutting fluid device (400), the cutting fluid device (400) being connected to the wire cutting device via a fluid path; as well as A power supply device (500), the power supply device (500) is electrically connected to the wire cutting device.

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