Sputtering feeding and discharging equipment

Abstract

The utility model relates to the technical field of sputtering coating equipment, in particular to sputtering coating feeding and discharging equipment which comprises a sputtering coating feeding buffering mechanism. The sputtering coating jig covering and taking mechanism is connected with the sputtering coating feeding buffer mechanism and is used for taking down the jig on the sputtered product and covering the jig on the product to be sputtered; and the sorting and labeling mechanism is connected with the sputtering covering and taking jig mechanism and is used for sorting and correspondingly labeling the sputtered products. According to the scheme, firstly, manual operation is replaced by equipment, the labor cost is reduced, and the feeding efficiency is improved. And the shortage of products with one or more specifications caused by errors in manual feeding can be avoided, so that the overall feeding efficiency is improved. According to the scheme, the stock bin is arranged to store and supply products of various specifications, so that the products of a certain specification on a production line can be supplied in time when the products of the certain specification are in shortage, disorder of the production line and shutdown waiting of the whole production line caused by shortage of the certain specification are avoided, time is saved, and the feeding efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of sputtering equipment, in particular to a sputtering loading and unloading device. Background Art

[0002] Sputtering, usually referring to magnetron sputtering, belongs to the high-speed low-temperature sputtering method. This process requires a vacuum degree of about 1×10-3 Torr, that is, a vacuum state of 1.3×10-3 Pa is filled with inert gas argon (Ar), and a high-voltage direct current is applied between the plastic substrate (anode) and the metal target (cathode). Due to the electrons generated by glow discharge exciting the inert gas, plasma is generated. The plasma bombards the atoms of the metal target and deposits them on the plastic substrate.

[0003] Before sputtering, the products to be sputtered need to be placed in a certain area, and the jig is covered on the products. After sputtering, the jig is removed from the products, and finally the sputtered products are moved to the next process. To improve the sputtering efficiency, multiple specifications of products need to be loaded simultaneously during sputtering loading. On each tray conveyed to the sputtering equipment, products of each specification need to be evenly placed. If the quantity of any one specification of products is insufficient, it will cause the sputtering equipment in the subsequent process to wait. The above work is now completed manually, and the processing speed cannot keep up with the required loading speed, affecting the loading efficiency. And long-term repetitive work will cause the operators to be sleepy and numb, resulting in a shortage of one or several kinds of products, thus causing the sputtering equipment to stop waiting, greatly reducing the production efficiency. Summary of the Utility Model

[0004] In view of the above-mentioned disadvantages of the prior art, the purpose of the utility model is to provide a sputtering loading and unloading device to solve the technical problem of low manual loading efficiency in the prior art.

[0005] To achieve the above purpose and other related purposes, the utility model provides a sputtering loading and unloading device, including:

[0006] A sputtering loading buffer mechanism;

[0007] A sputtering jig removing and covering mechanism, connected to the sputtering loading buffer mechanism, for removing the jig on the sputtered product and covering the jig on the product to be sputtered;

[0008] A sorting and labeling mechanism, connected to the sputtering jig removing and covering mechanism, for sorting the sputtered products and corresponding labeling;

[0009] Wherein, the sputtering loading buffer mechanism includes:

[0010] A first rack;

[0011] The sorting and conveying assembly is arranged on the first rack and is used for conveying products in the first direction;

[0012] The buffer module is arranged on the first rack. The buffer module includes a first buffer component, a second buffer component, a third buffer component, and a fourth buffer component arranged side by side in the second direction. The first buffer component, the second buffer component, the third buffer component, and the fourth buffer component are respectively used for conveying and storing products of different specifications. The first buffer component is connected to the sorting and conveying assembly. The first buffer component, the second buffer component, the third buffer component, and the fourth buffer component all include a bin for storing products, a first buffer conveying unit for conveying products in the first direction, and a second buffer conveying unit for conveying products in the second direction. The bin is matched with the first buffer conveying unit. The first direction, the second direction, and the third direction are respectively perpendicular to each other in pairs;

[0013] The buffer vision recognition component is arranged on the first rack and is matched with the sorting and conveying assembly, and is used for identifying the specifications of products and driving the corresponding first buffer conveying unit and the corresponding second buffer conveying unit to convey the products to the corresponding bin.

[0014] Optionally, the first buffer component, the second buffer component, the third buffer component, and the fourth buffer component all further include a bin driving member. The bin is connected to the driving end of the bin driving member. The bin driving member is used for driving the bin to be movably arranged on the first buffer conveying unit along the third direction.

[0015] Optionally, the bin includes a bin frame and multiple groups of product support components arranged on the bin frame. The multiple groups of product support components are arranged along the third direction.

[0016] Optionally, the first buffer component and the second buffer component are located between the third buffer component and the fourth buffer component.

[0017] Optionally, the heights of the third buffer component and the fourth buffer component are higher than those of the first buffer component and the second buffer component. Each of the second buffer conveying units is movably arranged on the corresponding first buffer conveying unit along the third direction.

[0018] Optionally, a baffle component is arranged on the first buffer conveying unit of the first buffer component. The baffle component includes a baffle driving member and a baffle. The baffle is arranged on the driving end of the baffle driving member. The baffle driving member is used for driving the baffle to move along the third direction. The baffle is used for blocking the products conveyed on the first buffer conveying unit.

[0019] Optionally, the sputtering feeding buffer mechanism further includes two groups of first product transfer modules arranged side by side in the second direction. The first product transfer module is movably arranged on the first rack in the first direction, the second direction, and the third direction, and is located behind each bin in the first direction. The first product transfer module is used to move the products on the two middle groups in the second direction among the first buffer component, the second buffer component, the third buffer component, and the fourth buffer component to the other two groups.

[0020] Optionally, the sputtering cover picking and placing fixture mechanism includes:

[0021] A second rack;

[0022] A transfer module, arranged on the second rack, including a loading transfer unit, an unloading transfer unit, and a stock preparation transfer unit. The loading transfer unit is used to transfer the product to be sputtered in the first direction. The unloading transfer unit is used to transfer the sputtered product in the first direction. The stock preparation transfer unit is used to transfer the tray carrying the sputtered product to the second rack, and transfer the tray carrying the product to be sputtered to the external sputtering equipment;

[0023] A second product transfer module, movably arranged on the second rack in the first direction, the second direction, and the third direction. The first direction, the second direction, and the third direction are perpendicular to each other pairwise. The second product transfer module is used to move the product to be sputtered on the loading transfer unit to the stock preparation transfer unit, and move the sputtered product on the stock preparation transfer unit to the unloading transfer unit;

[0024] A fixture transfer module, movably arranged on the second rack in the first direction, the second direction, and the third direction, for removing the fixture covering the sputtered product and covering the product to be sputtered on the stock preparation transfer unit.

[0025] Optionally, the stock preparation transfer unit includes an upper layer transfer component and a lower layer transfer component arranged in the third direction, and the transfer directions of the upper layer transfer component and the lower layer transfer component are opposite. A supporting component is arranged between the upper layer transfer component and the lower layer transfer component, and the supporting component is used to drive the tray to descend from the upper layer transfer component to the lower layer transfer component.

[0026] Optionally, the upper conveying component includes a return conveying member and a transition conveying member arranged in sequence along its conveying direction. The transition conveying member is arranged directly above the supporting component. The transition conveying member includes a transition driving member and two oppositely arranged transition guide rails. Rollers are rotatably arranged on the opposite sides of the two transition guide rails respectively. The rollers are in transmission connection with the driving end of the transition driving member. The transition driving member is used to drive the two transition guide rails to approach and separate from each other. The supporting component includes a supporting driving member and a supporting member. The supporting member is in transmission connection with the driving end of the supporting driving member. The supporting driving member is used to drive the supporting member to rise and fall.

[0027] As described above, the sputtering loading and unloading equipment of the present utility model has the following beneficial effects:

[0028] The products to be sputtered are conveyed on the sorting conveying component. After the product specifications to be sputtered are identified by the buffer vision recognition component, the products to be sputtered are conveyed from the sorting conveying component to the first buffer conveying unit of the first buffer component docked with it. If the product specifications to be sputtered correspond to the product specifications stored in the first buffer component, the products to be sputtered are directly conveyed backward along the first direction by the first buffer conveying unit to the bin of the first buffer component. If they are other specifications, they are conveyed by the second buffer conveying unit of the first buffer component along the second direction to the corresponding buffer component, and the products to be sputtered are sent into the corresponding bin, waiting for subsequent feeding and use. The products to be sputtered of each specification are conveyed from the first buffer conveying unit to the sputtering cover picking and jigging mechanism. After being covered with a jig by the sputtering cover picking and jigging mechanism, they are conveyed to an external sputtering device for sputtering operation. After sputtering, they are conveyed from the external sputtering device to the sputtering cover picking and jigging mechanism again. The sputtering cover picking and jigging mechanism performs the operation of removing the cover, conveys the sputtered products to the sorting and labeling mechanism, performs the operations of sorting and labeling the product specifications after sputtering and continues to convey backward along the first direction to other external devices. This solution first realizes operations such as feeding, unloading and labeling by the equipment instead of manual operation, reduces labor costs and improves feeding efficiency. It can also avoid shortages of one or more specifications of products caused by incorrect manual feeding, thereby improving the overall feeding efficiency. This solution sets bins to store and supply products of each specification, so that when a certain specification of products is in short supply on the production line, it can be supplied in time, avoiding chaos on the production line and the entire production line waiting for shutdown caused by the shortage of a certain specification, saving time and improving the feeding efficiency. Description of the Drawings

[0029] Figure 1 It is a schematic structural diagram of the sputtering loading buffer mechanism according to an embodiment of the present utility model;

[0030] Figure 2 It is a schematic structural diagram of the sputtering loading buffer mechanism from another angle according to an embodiment of the present utility model;

[0031] Figure 3 The top view of the sputtering feeding buffer mechanism according to an embodiment of the present utility model;

[0032] Figure 4 Another perspective structural schematic diagram of the sputtering feeding buffer mechanism according to an embodiment of the present utility model.

[0033] Figure 5 The side view of the sputtering cover picking and placing fixture mechanism according to an embodiment of the present utility model;

[0034] Figure 6 The front view of the sputtering cover picking and placing fixture mechanism according to an embodiment of the present utility model;

[0035] Figure 7 The top view of the sputtering cover picking and placing fixture mechanism according to an embodiment of the present utility model;

[0036] Figure 8 An overall perspective three-dimensional view of the sputtering cover picking and placing fixture mechanism according to an embodiment of the present utility model;

[0037] Figure 9 Another overall perspective three-dimensional view of the sputtering cover picking and placing fixture mechanism according to an embodiment of the present utility model;

[0038] Figure 10 The structural schematic diagram of the second product transfer module according to an embodiment of the present utility model;

[0039] Figure 11 The structural schematic diagram of the fixture transfer module from one perspective according to an embodiment of the present utility model;

[0040] Figure 12 The structural schematic diagram of the fixture transfer module from another perspective according to an embodiment of the present utility model;

[0041] Figure 13 The structural schematic diagram of the fixture transfer module from yet another perspective according to an embodiment of the present utility model.

[0042] Description of part numbers

[0043] 11 - Cache visual recognition component; 12 - Sorting and conveying component; 131 - First cache component; 132 - Second cache component; 133 - Third cache component; 134 - Fourth cache component; 135 - First cache conveying unit; 136 - Second cache conveying unit; 137 - Bin; 137a - Bin rack; 137b - Product support part; 14 - First product transfer module; 15 - First rack; 21 - Second rack; 22 - Fixture transfer module; 221 - Fixture transfer driving part; 222 - Clamping block; 221a - Groove; 223 - Fixture transfer support component; 224 - Second rotation driving part; 225 - Second visual component; 23 - Second product transfer module; 231 - First rotation driving part; 232 - First visual component; 233 - Disc; 234 - Suction cup; 235 - Suction cup support rod; 235a - Long slot; 24 - Loading conveying unit; 25 - Unloading conveying unit; 26 - Stocking conveying unit; 261 - Upper layer conveying component; 261a - Return conveying part; 261b - Transition conveying part; 262 - Lower layer conveying component. Detailed implementation mode

[0044] The following uses specific specific examples to illustrate the implementation mode of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0045] It should be noted that the diagrams provided in this embodiment only illustrate the basic concept of the present invention in a schematic manner. Therefore, only the components related to the present invention are shown in the diagrams, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex. The structures, ratios, sizes, etc. shown in the diagrams of this specification are only used to cooperate with the content disclosed in the specification for those skilled in this technology to understand and read, and are not used to limit the limiting conditions under which the present invention can be implemented. Therefore, they do not have technical essence. Any modification of the structure, change of the proportional relationship, or adjustment of the size, without affecting the effects that the present invention can produce and the purposes that can be achieved, should still fall within the scope that can be covered by the technical content disclosed in the present invention. At the same time, the terms such as "upper", "lower", "left", "right", "middle", and "one" cited in this specification are only for the convenience of clear narration, rather than used to limit the scope under which the present invention can be implemented. The change or adjustment of their relative relationships, without substantial change in technical content, should also be regarded as the scope under which the present invention can be implemented.

[0046] In this embodiment, the first direction is the length direction of the production line of the sputtering loading buffer mechanism, the second direction is the width direction of the production line of the sputtering loading buffer mechanism, and the third direction is the height direction of the production line of the sputtering loading buffer mechanism.

[0047] Please refer to Figures 1 to 13 , this embodiment provides a sputtering loading and unloading device, including a sputtering loading buffer mechanism, a sputtering cover picking and placing fixture mechanism, and a sorting and labeling mechanism connected in sequence along the first direction. The sorting and labeling mechanism is not shown in the drawings.

[0048] The sputtering loading buffer mechanism is used to provide products to be sputtered for the sputtering cover fixture taking mechanism. The sputtering loading buffer mechanism includes a first frame 15, a sorting and conveying assembly 12, a buffer module, and a buffer vision recognition assembly 11. The sorting and conveying assembly 12 is arranged on the first frame 15 and is used to convey products in a first direction. The buffer module is arranged on the first frame 15 and is arranged behind the sorting and conveying assembly 12 along the first direction. The buffer module includes a first buffer assembly 131, a second buffer assembly 132, a third buffer assembly 133, and a fourth buffer assembly 134 that are closely arranged along a second direction. The first buffer assembly 131, the second buffer assembly 132, the third buffer assembly 133, and the fourth buffer assembly 134 all extend along the first direction. The first buffer assembly 131, the second buffer assembly 132, the third buffer assembly 133, and the fourth buffer assembly 134 can convey products backward along the first direction, and the product specifications stored and conveyed by the first buffer assembly 131, the second buffer assembly 132, the third buffer assembly 133, and the fourth buffer assembly 134 are different. The first buffer assembly 131 is docked and connected to the sorting and conveying assembly 12, and the products on the sorting and conveying assembly 12 are first conveyed to the first buffer assembly 131 and then shunted. The first buffer assembly 131, the second buffer assembly 132, the third buffer assembly 133, and the fourth buffer assembly 134 all include a bin 137 for storing products, a first buffer conveying unit 135 for conveying products along the first direction, and a second buffer conveying unit 136 for conveying products along the second direction. The bin 137 cooperates with the first buffer conveying unit 135. The bin 137 can be arranged on the first buffer conveying unit 135 or directly on the first frame 15. The bin 137 can stack and store products along the first direction, the second direction, or the third direction. The first direction, the second direction, and the third direction are perpendicular to each other. The buffer vision recognition assembly 11 is arranged on the first frame 15 and cooperates with the sorting and conveying assembly 12. It is arranged directly above the sorting and conveying assembly 12 and is used to recognize the product specifications when the sorting and conveying assembly 12 conveys products. The buffer vision recognition assembly 11 is arranged in front of the buffer module along the first direction. Exemplarily, before the products are fed into the sorting and conveying assembly 12, a QR code needs to be pasted, and information such as the product specifications can be recognized by scanning the QR code. The buffer vision recognition assembly 11 is an industrial camera. The industrial camera converts the target captured by digital image into an image signal and transmits it to a dedicated image processing system. The image system performs various operations on these signals to extract the features of the target, and then controls the actions of the on-site equipment according to the discrimination results. Specifically, the image processing system can be a part of this embodiment, for example, built into the buffer vision recognition assembly 11. Recognizing the product specifications through the industrial camera and the image processing system connected to it, and then controlling the actions of the buffer module are technical means that have been publicly disclosed in the prior art. The bins 137 of the third buffer assembly 133 and the fourth buffer assembly 134 are not shown in the figure.

[0049] The product to be sputtered is conveyed to the sputtering cover picking and jigging mechanism by the sputtering loading buffer mechanism. The jig on the sputtered product is removed by the sputtering cover picking and jigging mechanism, and the jig is covered on the product to be sputtered. Then, the product to be sputtered with the jig is conveyed to an external sputtering device. The sputtered product with the jig removed is conveyed to the sorting and labeling mechanism for sorting and labeling operations, and then continues to be conveyed backward to an external device.

[0050] The product to be sputtered is conveyed on the sorting conveyor assembly 12. After the buffer vision recognition assembly 11 recognizes the specifications of the product to be sputtered, the product to be sputtered is conveyed from the sorting conveyor assembly 12 to the first buffer conveyor unit 135 of the first buffer assembly 131 that is docked with it. If the specifications of the product to be sputtered correspond to the product specifications stored in the first buffer assembly 131, the product to be sputtered is directly conveyed backward in the first direction by the first buffer conveyor unit 135 to the bin 137 of the first buffer assembly 131. If it is of other specifications, it is conveyed by the second buffer conveyor unit 136 of the first buffer assembly 131 in the second direction to the corresponding buffer assembly, and the product to be sputtered is sent into the corresponding bin 137 to wait for subsequent feeding and use. Products to be sputtered of various specifications are conveyed from the first buffer conveyor unit 135 to the sputtering cover picking and jigging mechanism. After being covered with a jig by the sputtering cover picking and jigging mechanism, they are conveyed to an external sputtering device for sputtering operations. After sputtering, they are conveyed back to the sputtering cover picking and jigging mechanism from the external sputtering device. The sputtering cover picking and jigging mechanism performs the operation of removing the cover, conveys the sputtered product to the sorting and labeling mechanism, conducts sorting and labeling operations on the sputtered product specifications, and continues to be conveyed backward in the first direction to other external devices. This solution first replaces manual operations with equipment, reduces labor costs, and improves feeding efficiency. It can also avoid shortages of one or more specifications of products caused by incorrect manual feeding, thereby improving the overall feeding efficiency. This solution sets up a bin 137 to store and supply products of various specifications, so that when a certain specification of product is in short supply on the production line, it can be supplied in a timely manner, avoiding chaos on the production line and the entire production line waiting for downtime caused by a shortage of a certain specification, saving time, and improving the feeding efficiency.

[0051] In one embodiment, the first buffer component 131, the second buffer component 132, the third buffer component 133, and the fourth buffer component 134 each further include a silo 137 driving member. The silo 137 is connected to the driving end of the silo 137 driving member, and the silo 137 driving member is configured to drive the silo 137 to move along the third direction. The silo 137 stacks and stores products along the third direction, and the silo 137 driving member is a motor. The first buffer transfer unit 135 is a rotating roller arranged along the first direction, and the rotating roller of the first buffer transfer unit 135 is driven to rotate by a motor. The silo 137 can rise and fall between adjacent rotating rollers of the first buffer transfer unit 135. Sensors such as proximity sensors, optical path sensors, or pressure sensors are correspondingly arranged in front of and behind each silo 137 along the first direction for sensing products. The part of the silo 137 above the first buffer transfer unit 135 is used to store products and is full, and the part below the first buffer transfer unit 135 is empty. Before the product reaches the silo 137, the sensor senses the product, and the silo 137 rises. The product enters the bottommost part of the silo 137 above the first buffer transfer unit 135. At this time, if the subsequent process requires this specification of product, the product is continuously transferred forward by the first buffer transfer unit 135, and the silo 137 descends until the product at its bottommost part is on the first buffer transfer unit 135, waiting to supply materials to the subsequent process; at this time, if the subsequent process does not require this specification of product, the silo 137 remains stationary. Briefly summarized, each silo 137 is provided with no less than ten grids along the third direction, and each grid can accommodate one product. Before each product enters the silo 137, the silo 137 rises by one grid; when a product flows out of the silo 137, the silo 137 descends by one grid, ensuring that there is always a product at the bottommost part of the silo 137 on the first buffer transfer unit 135 so that the product can be transferred forward along the first direction at any time. The above structural arrangement can make the silo 137 more convenient in storing products and feeding materials, improve the fault tolerance of feeding, and avoid equipment shutdown caused by the shortage of a certain specification of product.

[0052] In one embodiment, as Figure 1 shown, the silo 137 includes a silo frame 137a and multiple groups of product support members 137b arranged on the silo frame 137a along the third direction. The silo frame 137a is slidably arranged on the side of the first buffer transfer unit 135, or slidably arranged on the side of the first frame 15 and cooperates with the first buffer transfer unit 135. Each group of product support members 137b includes at least two product support rods arranged along the first direction. The product support rods are horizontally arranged along the second direction. Each product support rod is arranged between two adjacent rotating rollers of the first buffer transfer unit 135, and the product support rods are arranged parallel to the rotating rollers of the first buffer transfer unit 135. The above arrangement has a simple structure and low cost, and can also avoid interference between the silo 137 and the first buffer transfer unit 135 during lifting and lowering.

[0053] In one embodiment, as Figures 1 to 4 shown, the first buffer component 131 is disposed between two adjacent ones of the second buffer component 132, the third buffer component 133, and the fourth buffer component 134 along the second direction. Exemplarily, the first buffer component 131 is disposed between the second buffer component 132 and the third buffer component 133 along the second direction; alternatively, the first buffer component 131 is disposed between the second buffer component 132 and the fourth buffer component 134 along the second direction; alternatively, the first buffer component 131 is disposed between the fourth buffer component 134 and the third buffer component 133 along the second direction. The above arrangement can shorten the distance for the first buffer component 131 to transfer products to other buffer components along the second direction, shorten the transfer time, and thus improve the feeding efficiency.

[0054] In one embodiment, as Figures 1 to 4 shown, the first buffer component 131 and the second buffer component 132 are disposed between the third buffer component 133 and the fourth buffer component 134 along the second direction. The above arrangement can shorten the distance for the first buffer component 131 to transfer products to other buffer components along the second direction, shorten the transfer time, and thus improve the feeding efficiency.

[0055] In one embodiment, as Figure 1 , Figure 2 , Figure 4As shown, the heights of the third cache component 133 and the fourth cache component 134 are higher than those of the first cache component 131 and the second cache component 132. Each second cache transfer unit 136 is movably disposed along a third direction on a corresponding first cache transfer unit 135. The third cache component 133 and the fourth cache component 134 are docked and connected to the loading transfer unit 24 of the sputtering cover picking fixture mechanism. Raising the heights of the third cache component 133 and the fourth cache component 134 can facilitate the backward transfer of products. The second cache transfer unit 136 can be lifted to facilitate the transfer of products to adjacent cache components. Exemplarily, the second cache transfer unit 136 includes a transfer rack and multiple groups of conveyor belts disposed on the transfer rack. The conveyor belts of each group of the second cache transfer unit 136 are spaced apart and arranged along a first direction, that is, the conveyor belts of each group of the second cache transfer unit 136 extend along a second direction and run along the second direction to transfer products. When it is necessary to transfer products to an adjacent cache component, the second cache transfer unit 136 carrying the products rises to the same height as the adjacent cache component, transfers the products to the second cache transfer unit 136 of the adjacent cache component, and then resets. In another embodiment, when the second cache transfer unit 136 rises to the same height as the adjacent cache component, the second cache transfer unit 136 of the adjacent cache component also rises to pick up the transferred products, and then moves the products along the second direction to a position convenient for the forward transfer of the products. Each conveyor belt of the second cache transfer unit 136 is respectively disposed between adjacent rotating rollers of the first cache transfer unit 135, so that each conveyor belt of the second cache transfer unit 136 can be lifted between adjacent rotating rollers, avoiding interference during the operation between the first cache transfer unit 135 and the second cache transfer unit 136.

[0056] In one embodiment, as Figure 1 , Figure 2 , Figure 4 shown, the heights of the first cache component 131 and the second cache component 132 are equal, that is, the first cache transfer unit 135 of the first cache component 131 is equal in height to the first cache transfer unit 135 of the second cache component 132, facilitating the transfer of products from the first cache component 131 to the second cache component 132.

[0057] In one embodiment, a baffle assembly is provided on the first buffer transfer unit 135 of the first buffer component 131. The baffle assembly includes a baffle drive and a baffle. The baffle is disposed on the drive end of the baffle drive. The baffle drive is capable of driving the baffle to move in a third direction. The baffle drive is a motor or a cylinder. The baffle is used to block the products conveyed on the first buffer transfer unit 135. The baffle is located between two adjacent rotating rollers of the first buffer transfer unit 135, and the baffle can rise and fall under the drive of the baffle drive. Under normal conditions, the baffle is higher than the rotating rollers of the first buffer transfer unit 135, and the baffle can block the products conveyed at high speed from the sorting transfer component 12, preventing products of all specifications from entering the bin 137 of the first buffer component 131 under the action of inertia and causing chaos. When the product conveyed from the sorting transfer component 12 is the product corresponding to the first buffer component 131, the baffle descends under the drive of the baffle drive, enabling the product to pass through smoothly and enter the bin 137 of the first buffer component 131. The setting of the baffle assembly can prevent products of all specifications from directly entering the bin 137 of the first buffer component 131 and causing chaos in subsequent feeding.

[0058] In one embodiment, as Figures 1 to 4As shown, the sputtering loading buffer mechanism further includes a first product transfer module 14. The first product transfer module 14 is movably disposed on the first rack 15 along the first direction, the second direction, and the third direction, and is located behind all the bins 137 along the first direction. The first product transfer module 14 is used to move the products on the two middle groups in the second direction among the first buffer assembly 131, the second buffer assembly 132, the third buffer assembly 133, and the fourth buffer assembly 134 to the other two groups. Exemplarily, the third buffer assembly 133, the second buffer assembly 132, the first buffer assembly 131, and the fourth buffer assembly 134 are arranged in sequence along the second direction. The first buffer transfer units 135 of the third buffer assembly 133 and the fourth buffer assembly 134, which are located on the outermost side along the second direction, are respectively docked with the loading transfer unit 24 of the sputtering cover picking and jigging mechanism. To facilitate the continuous transfer of the products on the first buffer transfer units 135 of the first buffer assembly 131 and the second buffer assembly 132 to the subsequent process, the first product transfer module 14 picks up the products on the first buffer transfer units 135 of the first buffer assembly 131 and the second buffer assembly 132 and moves them to the first buffer transfer units 135 of the third buffer assembly 133 and the fourth buffer assembly 134 for transfer to the sputtering cover picking and jigging mechanism. The first product transfer module 14 includes a motor and a suction cup 234 assembly driven by the motor. The suction cup 234 assembly can hold the product more firmly. By respectively providing tracks along the first direction, the second direction, and the third direction on the first rack 15, the suction cup 234 assembly can move along the first direction, the second direction, and the third direction on the first rack 15.

[0059] In one embodiment, as Figures 1 to 4As shown, the number of the first product transfer modules 14 is two groups arranged in parallel along the second direction. One group is responsible for picking up and moving the products on the first buffer transfer unit 135 of the first buffer component 131, and the other group is responsible for picking up and moving the products on the first buffer transfer unit 135 of the second buffer component 132, so as to improve the feeding efficiency when the product feeding demand is large. In one embodiment, the sputtering cover picking fixture mechanism 2 includes a second frame 21, a transfer module, a second product transfer module 23 and a fixture transfer module 22. The transfer module, the second product transfer module 23 and the fixture transfer module 22 are all arranged on the second frame 21. The transfer module includes a loading transfer unit 24, an unloading transfer unit 25 and a stock preparation transfer unit 26. This embodiment can simultaneously process the loading and unloading of at least two specifications of products. In one embodiment, the transfer directions of the loading transfer unit 24 and the unloading transfer unit 25 are the same. The loading transfer unit 24 includes multiple conveyor belts arranged in parallel along the first direction. Each conveyor belt of the loading transfer unit 24 corresponds to transferring one specification of product. The number of conveyor belts of the loading transfer unit 24 may be the same as or different from the number of product specifications. The parallel transfer of multiple product specifications can improve the loading and sputtering efficiency. Exemplarily, the number of conveyor belts of the loading transfer unit 24 is two, and they are respectively docked with the third buffer component and the fourth buffer component located on the outside. The two ends of the second frame 21 along the first direction are respectively connected to the sputtering loading buffer mechanism and the sorting and labeling mechanism, that is, both the upstream and downstream of the sputtering cover picking fixture mechanism 2 are respectively connected to the sputtering loading buffer mechanism and the sorting and labeling mechanism. The products to be sputtered are transferred from the sputtering loading buffer mechanism to the loading transfer unit 24. The parts of the loading transfer unit 24 that are docked with the sputtering loading buffer mechanism have the same height, which can facilitate the loading transfer unit 24 to receive products and improve the loading efficiency of the loading transfer unit 24. The loading transfer unit 24 is used to transfer the products to be sputtered along the first direction, and the unloading transfer unit 25 is used to transfer the sputtered products along the first direction. In one embodiment, the unloading transfer unit 25 includes multiple parallel conveyor belts, which transfer the sputtered products to an external sputtering device. The parallel transfer of multiple specifications of products can improve the unloading efficiency, thereby improving the product production efficiency. The stock preparation transfer unit 26 is provided with trays. The stock preparation transfer unit 26 is used to transfer the trays carrying the sputtered products from an external sputtering device to the second frame 21 of this embodiment, and then transfer the trays carrying the products to be sputtered to the external sputtering device. The second product transfer module 23 can move along the first direction, the second direction and the third direction on the second frame 21, so as to facilitate picking up and placing the products to be sputtered. Tracks for the second product transfer module 23 to move are respectively arranged on the second frame 21 along the first direction, the second direction and the third direction. Tracks for the fixture transfer module 22 to move are also respectively arranged on the second frame 21 along the first direction, the second direction and the third direction.

[0060] In a loading and unloading cycle, the second product transfer module 23 first moves the product to be sputtered on the loading conveyor unit 24 to the tray of the stock preparation conveyor unit 26, and the stock preparation conveyor unit 26 conveys it to an external sputtering device for sputtering operation. Then, the second product transfer module 23 moves the sputtered product on another tray of the stock preparation conveyor unit 26 to the unloading conveyor unit 25, and the unloading conveyor unit 25 conveys it to the sorting and labeling mechanism. The jig transfer module 22 can move on the second rack 21 in the first direction, the second direction, and the third direction, and is used to remove the jig covering the sputtered product and cover the product to be sputtered on the stock preparation conveyor unit 26. The stock preparation conveyor unit 26 conveys the tray carrying the sputtered product from the external sputtering device to the second rack 21 of this embodiment. At the same time, the second product transfer module 23 moves the product to be sputtered on the loading conveyor unit 24 to the stock preparation conveyor unit 26. The jig transfer module 22 removes the jig covering the sputtered product and covers it on the product to be sputtered on the stock preparation conveyor unit 26. After the sputtered product is conveyed to the sorting and labeling mechanism, the sorting and labeling mechanism sorts it according to the specifications of the product and correspondingly labels it, and finally flows to the subsequent processing process outside this embodiment.

[0061] The setting of the sputtering jig picking and covering mechanism 2 can avoid product damage caused by operators' fatigue in picking and covering jigs. The equipment operation replaces manual work, the operation is more precise, the product yield is improved, and the production cost is reduced. Picking the jig from the sputtered product and moving the product to be sputtered to the stock preparation conveyor unit are carried out simultaneously, avoiding the need to wait for one of the two actions, saving the waiting time, further improving the loading and unloading efficiency, reducing the time required for loading and unloading, and thus improving the overall production efficiency.

[0062] In one embodiment, as Figure 6As shown, the stock preparation transfer unit 26 includes an upper transfer assembly 261 and a lower transfer assembly 262 arranged along the third direction (vertical direction). The upper transfer assembly 261 is disposed directly above the lower transfer assembly 262. The transfer directions of the upper transfer assembly 261 and the lower transfer assembly 262 are opposite. A supporting assembly is provided between the upper transfer assembly 261 and the lower transfer assembly 262. The supporting assembly is used to drive the tray to descend from the upper transfer assembly 261 to the lower transfer assembly 262. The upper transfer assembly 261 is used to transfer the tray loaded with the products after sputtering from an external sputtering device to the second rack 21 of this embodiment. The lower transfer assembly 262 is used to transfer the tray loaded with the products to be sputtered to the external sputtering device. Both the upper transfer assembly 261 and the lower transfer assembly 262 extend along the first direction. One end of the upper transfer assembly 261 away from the second rack 21 of this embodiment is connected to the external sputtering device, and one end of the lower transfer assembly 262 away from the second rack 21 of this embodiment is also connected to the external sputtering device, and the connection positions are different. The fixture transfer module 22 removes the fixture on the product after sputtering, and the second product transfer module 23 removes the product after sputtering on the tray. The second product transfer module 23 moves the product to be sputtered onto the tray, the fixture transfer module 22 covers the fixture on the product to be sputtered, the supporting assembly drives the tray to descend onto the lower transfer assembly 262, and the lower transfer assembly 262 transfers the tray loaded with the products to be sputtered to the external sputtering device. The above structural arrangement can save the space occupied by the equipment and reduce the overall volume and floor area of this embodiment.

[0063] In one embodiment, as Figure 7As shown, the upper conveying component 261 includes a return conveying member 261a and a transition conveying member 261b arranged in sequence along its conveying direction. The transition conveying member 261b is arranged directly above the supporting component. A tray filled with products after sputtering (covered with a jig) is arranged on the return conveying member 261a, and an empty tray is arranged on the transition conveying member 261b. And the second product transfer module 23 transfers the product to be sputtered onto the empty tray of the transition conveying member 261b. The transition conveying member 261b includes a transition driving member and two oppositely arranged transition guide rails. Rotating rollers are respectively arranged on the opposite sides of the two transition guide rails, and the rollers are in transmission connection with the driving end of the transition driving member. The transition driving member is used to drive the two transition guide rails to approach and separate from each other. The number of transition driving members can be one or multiple. The transition driving member can be a driving device such as a motor. The transition driving member can drive the rollers to rotate through a transmission structure already disclosed in the prior art, or directly drive. When directly driving, the number of transition driving members is multiple. The return conveying member 261a includes a return driving member and a rotating roller. The driving end of the return driving member is in transmission connection with the rotating roller. The return driving member drives the rotating roller to rotate through a transmission structure already disclosed in the prior art, or directly drive. When directly driving, the number of return driving members is multiple. The tray is conveyed by the rotating roller when passing through the return driving member, and is conveyed by the roller when passing through the transition conveying member 261b. The tray filled with products after sputtering stays on the return conveying member 261a. After the jig and the products after sputtering are removed, the tray is conveyed to the transition conveying member 261b (meanwhile, the tray filled with products after sputtering is conveyed from an external sputtering device to the transition conveying member 261b). The second product transfer module 23 then places the product to be sputtered on the tray, and the jig transfer module 22 covers the product to be sputtered with the jig. The two transition guide rails separate from each other, the supporting component drives the tray to descend onto the lower conveying component 262, the two transition guide rails close, and the lower conveying component 262 conveys the tray filled with products to be sputtered to the external sputtering device. Through the above structure, the various links of this embodiment can be more closely connected, and the waiting time between various links can be minimized as much as possible, thereby improving the feeding and discharging efficiency and the sputtering production efficiency.

[0064] In one embodiment, the supporting component includes a supporting driving member and a supporting member. The driving end of the supporting driving member is in transmission connection with the supporting member. The supporting driving member is used to drive the supporting member to rise and fall. The supporting driving member can be a driving device such as a motor or a cylinder. The supporting driving member can drive the supporting member to rise and fall through a transmission structure disclosed in the prior art, or directly drive the supporting member to rise and fall. The supporting member can be two vertically arranged rectangular frames, respectively abutted against the bottoms at both ends of the tray along the length direction. The lower conveying component 262 can also be driven by a driving device such as a motor to rotate the rotating rollers. The supporting member can rise and fall between adjacent rotating rollers of the lower conveying component 262 to avoid interference therewith. The supporting member can rise from between adjacent rotating rollers of the lower conveying component 262 to abut against the bottom of the tray, or can fall from between adjacent rotating rollers of the lower conveying component 262 below the rotating rollers of the lower conveying component 262 to place the tray on the lower conveying component 262. The above structural arrangement can reduce the occupied space while connecting the upper conveying component 261 and the lower conveying component 262, and also improve the conveying efficiency of the tray.

[0065] In one embodiment, as Figure 10 shown, the second product transfer module 23 includes a first rotation driving member 231, a suction cup assembly, and a first vision component 232. The suction cup assembly is in transmission connection with the driving end of the first rotation driving member 231. The first rotation driving member 231 is used to drive the suction cup assembly to rotate horizontally. The first vision component 232 is used to detect and identify the posture of the product (the posture of the product refers to whether the product is placed along the first direction or the second direction) and drive the first rotation driving member 231 to act. The first vision component 232 is connected to an image processing system, and the action of the first rotation driving member 231 is controlled by the image processing system. The image processing system can be set at any position in this embodiment or outside this embodiment. The suction cup assembly sucks and moves the product by contacting the top surface of the product. Due to the structural arrangement of the product, the suction cup assembly can avoid damaging the product and improve the moving efficiency of the product. The sizes, shapes, etc. of products of different specifications are different. In order to increase the number of products placed on each tray, the tray is a rectangular tray, and the placement directions of products of different specifications are different. The first vision component 232 can include an industrial camera. The industrial camera converts the target captured by digital image into an image signal and transmits it to a dedicated image processing system. The image system performs various operations on these signals to extract the features of the target, and then controls the actions of the on-site equipment according to the discrimination results. So that in this embodiment, the direction of the product can be recognized, and the first rotation driving member 231 can be driven to rotate horizontally to place the product to be sputtered on the specified position on the tray. When taking the sputtered product, the sputtered product can also be adjusted to the required posture and then placed on the blanking conveying unit 25, which is convenient for subsequent process processing.

[0066] In one embodiment, the first vision component 232 is also capable of identifying the specifications of the product to be sputtered through the QR code on the product, so as to move the product to be sputtered to the corresponding position on the tray, thereby improving the loading efficiency and accuracy.

[0067] In one embodiment, as Figure 10 shown, the suction cup assembly includes a disc 233 and at least two suction cups 234. The suction cups 234 are arranged on the bottom of the disc 233, and the suction cups 234 are evenly distributed along the circumferential direction of the disc 233. The driving end of the first rotation driving member 231 is in transmission connection with the top of the disc 233. The first rotation driving member 231 drives the suction cup assembly to rotate by driving the disc 233 to rotate. The first rotation driving member 231 can be a driving device such as a motor. The above setting method can improve the stability of sucking and moving the product, thereby improving the loading and unloading efficiency, and also preventing the product from falling during movement and causing damage, which affects the normal operation of this embodiment.

[0068] In one embodiment, as Figure 10 shown, a plurality of horizontally arranged suction cup support rods 235 are evenly distributed along the circumferential direction on the bottom of the disc 233. The suction cups 234 and the suction cup support rods 235 are respectively arranged in one-to-one correspondence. A long hole 235a extending along its length direction is provided on the suction cup support rod 235. The top end of the suction cup 234 passes through the long hole 235a and is movably arranged in the long hole 235a along the extending direction of the long hole 235a. A fastening member is sleeved on the part of the top end of the suction cup 234 passing through the long hole 235a. The suction cup 234 is arranged on the disc 233 through the suction cup support rod 235. By adjusting the horizontal position of the suction cup 234 in the long hole 235a in the above structure, the relative positions between the suction cups 234 can be adjusted to match products of different specifications and sizes, improving the adaptability of this embodiment. The fastening member can adjust the tightness of the suction cup 234 in the long hole 235a, loosen it when the position needs to be adjusted, and tighten it when fastening is required.

[0069] In one embodiment, as Figures 11 to 13As shown, the fixture transfer module 22 includes a fixture transfer driving member 221 and a clamping assembly. The clamping assembly includes two clamping blocks 222 arranged back to back. The fixture transfer driving member 221 has two driving ends arranged back to back. The two driving ends are respectively in transmission connection with the two clamping blocks 222 and can drive the two clamping blocks 222 to approach and separate from each other. The fixture transfer driving member 221 can be a double-axis cylinder in the prior art, and the two driving ends of the double-axis cylinder are respectively arranged at both ends of the cylinder. The two clamping blocks 222 respectively extend into two holes of the fixture. The double-axis cylinder drives the two clamping blocks 222 to separate from each other to complete the clamping of the fixture. When it is necessary to put down the fixture, the double-axis cylinder drives the two clamping blocks 222 to approach each other, that is, the fixture can be released. The above structure can improve the stability of picking up the fixture and avoid the fixture falling off during the movement of the fixture, which affects the normal feeding and discharging.

[0070] In one embodiment, as Figures 11 to 13 shown, horizontal grooves 221a are respectively arranged on the back sides of the two clamping blocks 222. When clamping the fixture, the grooves 221a are stuck in the inner wall of the hole of the fixture, further improving the clamping stability of the fixture.

[0071] In one embodiment, as Figures 11 to 13 shown, the fixture transfer module 22 further includes a fixture transfer support assembly 223, a second vision assembly 225 and a second rotation driving member 224. The fixture transfer driving member 221 is arranged on the fixture transfer support assembly 223. The driving end of the second rotation driving member 224 is in transmission connection with the fixture transfer support assembly 223 and can drive the fixture transfer support assembly 223 to rotate horizontally. The clamping assembly is arranged on the fixture transfer support assembly 223 and can rotate horizontally with the fixture transfer support assembly 223. The second vision assembly 225 is used to detect and identify the posture of the fixture (placed along the first direction or the second direction) and drive the second rotation driving member 224 to act. Correspondingly, the fixture transfer module 22 can also identify the postures of the fixture and the product, and adjust the horizontal position of the clamping assembly through the above structure to pick up the fixture more accurately and cover the fixture on the product to be sputtered. The second vision assembly 225 can also be an industrial camera, and the second vision assembly 225 is also connected to an image recognition system to drive the second rotation driving member 224 to act through the image recognition system. The fixture transfer support assembly 223 can be a support frame.

[0072] In one embodiment, as Figures 5 to 9 shown, the loading conveyor unit 24 and the unloading conveyor unit 25 are arranged along the third direction (vertical direction). The loading conveyor unit 24 is arranged above the unloading conveyor unit 25, and the conveying directions of the loading conveyor unit 24 and the unloading conveyor unit 25 are opposite. It can reduce the overall volume of this embodiment, reduce the floor space and improve the applicability.

[0073] In one embodiment, the stock preparation transfer unit 26 is disposed in the middle of the second rack 21 along the first direction. The loading transfer unit 24 may include two transfer lines and is respectively disposed on both sides of the stock preparation transfer unit 26 along the first direction; the unloading transfer unit 25 may also include two transfer lines and is respectively disposed on both sides of the stock preparation transfer unit 26 along the first direction. This layout of the present embodiment is reasonable, facilitating the cooperation between various modules, improving the loading and unloading efficiency, and avoiding interference.

[0074] In one embodiment, the loading transfer unit 24 is divided into several segments along the first direction, and baffles capable of lifting in the vertical direction are provided between the segments. The baffles can be driven to lift by a motor. The setting of the baffles can rise to block the subsequent products from being transferred forward when the number of products in the front is sufficient; when the number of products in the front is insufficient, it can descend to enable the products to continue to be transferred forward.

[0075] In one embodiment, parallel running rails are respectively provided on both sides of the second rack 21 along the first direction. The second product transfer module 23 is disposed at the bottom of the running rails and can move along the running rails in the first direction. The fixture transfer module 22 is disposed on the opposite side of the running rails and can move along the running rails in the first direction. The above setting method can save space, avoid interference between the second product transfer module 23 and the fixture transfer module 22, and improve the operation efficiency of the present embodiment.

[0076] In one embodiment, both the second product transfer module 23 and the fixture transfer module 22 include tracks along the second direction and the third direction and corresponding driving members, so that the operating ends of the second product transfer module 23 and the fixture transfer module 22 can move along the second direction and the third direction.

[0077] In one embodiment, as Figures 5 to 9 shown, both the second product transfer module 23 and the fixture transfer module 22 are multiple and are evenly distributed on both sides of the second rack 21 along the first direction, so that the second product transfer module 23 can simultaneously pick up and deliver multiple products to be sputter-coated or sputter-coated products, and the fixture transfer module 22 can simultaneously pick up and deliver multiple fixtures, improving the loading and unloading efficiency.

[0078] In one embodiment, the specific structure of the sorting and labeling mechanism is not shown in the accompanying drawings. The sorting and labeling mechanism includes a first support frame, a sorting component, a third visual component, a first alignment component, a labeling component, and an outflow conveying component. The outflow conveying component is arranged on the first support frame, and the outflow conveying component can be a plurality of conveyor belts arranged in parallel along the first direction, and the number of conveyor belts is the same as the number of product specifications. The outflow conveying component is connected to the unloading conveying unit 25, and the sputtered product is transferred from the unloading conveying unit 25 to the outflow conveying component. The third visual component and the first alignment component are arranged on the outflow conveying component, and the number of the first alignment components is two groups, one of which is arranged before the third visual component along the conveying direction of the outflow conveying component. The first alignment component also includes a cylinder and a pusher, and the cylinder drives the pusher to push the sputtered product to align along the second direction so that the third visual component can recognize the QR code on the product, thereby sorting the product. The third visual component is an industrial camera, and the working principle is the same as the first visual component 232 and the second visual component 225. The third visual component can recognize the QR code on the sputtered product, and drive the second sorting component to sort the sputtered product, and place the same product on the same conveyor belt of the outflow conveying component for subsequent labeling. The second sorting component may include a suction cup 234 that can absorb the product. After the sputtering is sorted, it is placed on the conveyor belt of the corresponding outflow conveying component, and then the sputtered product is aligned along the second direction by another set of first alignment components. The labeling component labels the sputtered product, and the label is a QR code label, which records the time of sputtering, production line and product specifications, etc., for later production tracking. The number of labeling components is the same as the number of conveyor belts of the outflow conveying component, that is, each specification of the product corresponds to a conveyor belt of the outflow conveying component and a set of labeling components. The labeling component includes a cylinder, a labeling rack and a vertically arranged labeling rod, and the labeling rod is arranged on the labeling rack. Driven by a driving device such as a motor, the labeling rack can drive the labeling rod to move along the second direction. The driving end of the cylinder is connected to the labeling rod and can drive the labeling rod to move in the vertical direction. After the labeling rod picks up the label, the labeling rack drives the labeling rod to move in the second direction to above the product. The cylinder drives the labeling rod to move downward to label the sputtered product, and then drives the labeling rod to move upward to reset. The motor and other driving devices drive the labeling rack to retreat so that the labeling rod picks up the label, and the cycle repeats. A sensor can be set before the first alignment component moves in the first direction. After the sensor senses the product, the cylinder of the first alignment component is driven to perform the alignment operation. The sensor can be a proximity sensor, an optical path sensor, or a pressure sensor.

[0079] The above embodiments are only illustrative of the principles and effects of the present utility model, and are not intended to limit the present utility model. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present utility model. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical idea disclosed by the present utility model should still be covered by the claims of the present utility model.

Claims

1. A sputtering loading and unloading device, characterized in that: include: Sputtering material buffer mechanism; A sputtering cover and fixture removal mechanism, connected to the sputtering material loading and caching mechanism, is used to remove the fixture on the sputtered product and cover the fixture on the product to be sputtered; A sorting and labeling mechanism, connected to the sputtering cover taking fixture mechanism, for sorting the sputtered products and labeling them accordingly; Wherein, the sputtering material buffer mechanism comprises: First rack; A sorting and conveying assembly, disposed on the first frame, for conveying products along a first direction; A cache module is arranged on the first rack, the cache module comprises a first cache component, a second cache component, a third cache component and a fourth cache component arranged side by side along the second direction, the first cache component, the second cache component, the third cache component and the fourth cache component are respectively used to convey and store products of different specifications, the first cache component is connected to the sorting conveying component, the first cache component, the second cache component, the third cache component and the fourth cache component all comprise a silo for storing products, a first cache conveying unit for conveying products along the first direction, and a second cache conveying unit for conveying products along the second direction, the silo cooperates with the first cache conveying unit, and the first direction, the second direction and the third direction are respectively perpendicular to each other in pairs; A cache visual recognition component is arranged on the first frame and cooperates with the sorting and conveying component to identify the specifications of the product and drive the corresponding first cache conveying unit and the corresponding second cache conveying unit to convey the product to the corresponding silo.

2. The sputtering loading and unloading equipment according to claim 1 is characterized in that: The first cache assembly, the second cache assembly, the third cache assembly and the fourth cache assembly all further include a silo driving member, the silo is connected to a driving end of the silo driving member, and the silo driving member is used to drive the silo to be movably disposed on the first cache transfer unit along a third direction.

3. The sputtering loading and unloading equipment according to claim 2, characterized in that: The silo includes a silo frame and a plurality of groups of product supporting components arranged on the silo frame, and the plurality of groups of product supporting components are arranged along a third direction.

4. The sputtering loading and unloading equipment according to claim 1, characterized in that: The first cache component and the second cache component are located between the third cache component and the fourth cache component.

5. The sputtering loading and unloading equipment according to claim 4, characterized in that: The third cache assembly and the fourth cache assembly are higher than the first cache assembly and the second cache assembly, and each of the second cache transmission units is movably disposed on the corresponding first cache transmission unit along the third direction.

6. The sputtering loading and unloading equipment according to claim 1, characterized in that: A baffle assembly is arranged on the first cache conveying unit of the first cache assembly, and the baffle assembly includes a baffle driving member and a baffle, wherein the baffle is arranged on the driving end of the baffle driving member, and the baffle driving member is used to drive the baffle to move along a third direction, and the baffle is used to block the products conveyed on the first cache conveying unit.

7. The sputtering loading and unloading equipment according to claim 1, characterized in that: The sputtering loading cache mechanism also includes two groups of first product transfer modules arranged in parallel along the second direction. The first product transfer modules are movably arranged on the first frame along the first direction, the second direction and the third direction, and are located behind each of the material bins along the first direction. The first product transfer modules are used to move products from the two middle groups of the first cache component, the second cache component, the third cache component and the fourth cache component along the second direction to the other two groups.

8. The sputtering loading and unloading equipment according to claim 1, characterized in that: The sputtering cover removal fixture mechanism comprises: Second rack; a conveying module, arranged on the second frame, comprising a loading conveying unit, a unloading conveying unit and a preparation conveying unit, wherein the loading conveying unit is used to convey the product to be sputtered along a first direction, the unloading conveying unit is used to convey the sputtered product along the first direction, the preparation conveying unit is used to convey the tray carrying the sputtered product to the second frame, and convey the tray carrying the product to be sputtered to an external sputtering device; A second product transfer module is movably arranged on the second frame along a first direction, a second direction and a third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other, and the second product transfer module is used to move the product to be sputtered on the loading conveying unit to the preparation conveying unit, and to move the product after sputtering on the preparation conveying unit to the unloading conveying unit; The jig transfer module is movably arranged on the second frame along the first direction, the second direction and the third direction, and is used to remove the jig covering the product after sputtering and cover the product to be sputtered of the material preparation and conveying unit.

9. The sputtering loading and unloading equipment according to claim 8, characterized in that: The material preparation conveying unit includes an upper conveying component and a lower conveying component arranged along a third direction, and the conveying directions of the upper conveying component and the lower conveying component are opposite. A supporting component is arranged between the upper conveying component and the lower conveying component, and the supporting component is used to drive the tray to descend from the upper conveying component to the lower conveying component.

10. The sputtering loading and unloading equipment according to claim 9, characterized in that: The upper conveying component includes a reflux conveying component and a transition conveying component which are sequentially arranged along its conveying direction, the transition conveying component is arranged directly above the supporting component, the transition conveying component includes a transition driving component and two relatively arranged transition guide rails, rollers are rotatably arranged on opposite sides of the two transition guide rails, the rollers are transmission-connected to the driving end of the transition driving component, the transition driving component is used to drive the two transition guide rails to approach and move away from each other, the supporting component includes a supporting driving component and a supporting component, the supporting component is transmission-connected to the driving end of the supporting driving component, and the supporting driving component is used to drive the supporting component to rise and fall.

Images