Adjustable upper shaft structure of silicon core furnace

Abstract

The utility model relates to the technical field of silicon rod production, in particular to an adjustable upper shaft structure of a silicon core furnace, which comprises a base plate and a bottom plate, a cable trough and a seed crystal rope through hole are arranged on the base plate in a penetrating manner, a seed crystal lifting device is arranged on the bottom plate, adjusting seats are fixedly arranged on the periphery of the base plate, and the adjusting seats are arranged on the base plate. The adjusting seat is in threaded connection with an adjusting bolt, and the front end of the adjusting bolt abuts against the side wall of the bottom plate. According to the utility model, the centering precision is obviously improved, the operation process is simplified, the substrate and devices on the substrate do not need to be disassembled and assembled repeatedly, the operation time and labor force are saved, meanwhile, the production interruption and material waste are reduced, the production continuity and efficiency are improved, the maintenance cost is low, the maintenance requirement is reduced by a simplified adjusting mechanism, and the production efficiency is improved. And the equipment is more economical and practical.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon rod production, and relates to an adjustable upper shaft structure of a silicon core furnace. Background Technique

[0002] In the field of semiconductor material production, the Czochralski multi-crystal growth furnace is a key equipment for preparing silicon rods. During the pulling process, it is required that each seed crystal must be accurately aligned with the corresponding crystal pulling hole on the water-cooled screen during installation. If the alignment is inaccurate, the situation of rod jamming or rod dropping is likely to occur during the pulling process, which will seriously affect the crystal growth quality and output, and increase the production cost and risk.

[0003] In addition, the existing lifting devices have deficiencies in aspects such as centering accuracy, operation convenience, production continuity, and maintenance cost. These limitations restrict the performance and production efficiency of the crystal growth furnace, and at the same time increase the work burden of operators. Summary of the Utility Model

[0004] The utility model provides an adjustable upper shaft structure of a silicon core furnace to solve the problems of the existing technology.

[0005] The purpose of the utility model can be achieved by the following technical solutions: an adjustable upper shaft structure of a silicon core furnace, including: a substrate and a bottom plate. A cable groove and a seed crystal rope through hole are provided through the substrate. A seed crystal lifting device is provided on the bottom plate. Adjusting seats are fixedly provided around the substrate. Adjusting bolts are threadedly connected to the adjusting seats, and the front end of the adjusting bolt abuts against the side wall of the bottom plate.

[0006] For further improvement, a plurality of installation through holes are provided through the bottom plate, and a plurality of installation threaded holes are correspondingly provided on the substrate. An installation bolt is provided between each group of installation through holes and installation threaded holes. A pressing gasket is provided between the nut of the installation bolt and the top of the installation through hole. The diameter of the installation through hole is a, the diameter of the installation threaded hole is b, and the diameter of the pressing gasket is c, satisfying the quantitative relationship: c > a > b.

[0007] For further improvement, the seed crystal lifting device includes a seed crystal cavity and a wire winding cavity fixedly provided on the bottom plate. A rope wheel and a seed crystal rope wound around the rope wheel are rotatably provided in the seed crystal cavity. A wire winding wheel and a cable wire wound around the wire winding wheel are rotatably provided in the wire winding cavity. The seed crystal rope on the rope wheel passes through the bottom plate and enters the silicon core furnace through the seed crystal rope through hole. The cable wire on the wire winding wheel passes through the bottom plate and enters the silicon core furnace through the cable groove.

[0008] For further improvement, a guide groove is provided on the bottom plate, a guide seat is provided in the guide groove, and a seed crystal rope guide hole is provided in the guide seat.

[0009] For further improvement, the rope pulley is in transmission connection with an external driving mechanism, and is in transmission connection with the wire winding wheel through a transmission component.

[0010] For further improvement, the wire winding wheel is in transmission connection with an external driving mechanism, and is in transmission connection with the rope pulley through a transmission component.

[0011] For further improvement, there are multiple groups of the adjusting seats corresponding to the adjusting bolts.

[0012] Compared with the prior art, the utility model has the following beneficial effects:

[0013] 1. The utility model significantly improves the centering accuracy, simplifies the operation process, eliminates the need for repeated disassembly and assembly of the substrate and the devices thereon, saves operation time and labor. At the same time, it reduces production interruptions and material waste, improves production continuity and efficiency, has low maintenance costs, and the simplified adjustment mechanism reduces maintenance requirements, making the equipment more economical and practical;

[0014] 2. The utility model is provided with a guiding seat in the guiding groove, and the guiding hole for the seed crystal rope in the guiding seat provides support and guidance for the seed crystal rope, ensuring that the seed crystal rope is transmitted along a predetermined path, effectively reducing bending and wear, and prolonging the service life of the seed crystal rope. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a schematic structural view of the utility model;

[0016] Figure 2 is a sectional view of the utility model;

[0017] Figure 3 is a partial top view of the utility model;

[0018] Figure 4 is the utility model Figure 3 a sectional view taken along the direction F-F of the utility model;

[0019] Figure 5 is the utility model Figure 2 an enlarged view of the partial area A of the utility model.

[0020] In the figure, 1. Substrate; 11. Cable groove; 12. Seed crystal rope through hole; 2. Bottom plate; 21. Guiding groove; 3. Seed crystal lifting device; 31. Seed crystal cavity; 311. Rope pulley; 32. Wire winding cavity; 321. Wire winding wheel; 51. Adjusting seat; 52. Adjusting bolt; 61. Mounting through hole; 62. Mounting threaded hole; 63. Mounting bolt; 64. Compression gasket; 7. Guiding seat; 71. Seed crystal rope guiding hole. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0022] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0023] The following combines the embodiments and the attached Figures 1 to 5 , and further elaborates on the technical solution of the present utility model.

[0024] Embodiment 1

[0025] An adjustable upper shaft structure of a silicon core furnace, comprising: a substrate 1 and a bottom plate 2. A cable groove 11 and a seed crystal rope through hole 12 are provided through the substrate 1. A seed crystal lifting device 3 is provided on the bottom plate 2. Adjusting seats 51 are fixedly provided around the substrate 1. Adjusting bolts 52 are threadedly connected to the adjusting seats 51, and the front end of the adjusting bolts 52 abuts against the side wall of the bottom plate 2.

[0026] As Figures 1 to 5 shown, the substrate 1 of the present utility model is provided with a cable groove 11 and a seed crystal rope through hole 12, and the bottom plate 2 is equipped with a seed crystal lifting device 3 to ensure the accurate guidance of the seed crystal. Threaded holes are provided on the adjusting seats 51 around the substrate 1 and are threadedly connected to the adjusting bolts 52. The position of the bottom plate 2 can be precisely adjusted by the adjusting bolts in four directions, realizing the precise adjustment of the central axis, ensuring the correct correspondence between the seed crystal and the crystal drawing hole on the water-cooled screen, and effectively avoiding the situations of rod jamming or rod dropping during the drawing process.

[0027] The present utility model significantly improves the centering accuracy, simplifies the operation process, eliminates the need for repeated disassembly and assembly of the substrate 1 and the devices thereon, saves operation time and labor. At the same time, it reduces production interruptions and material waste, improves production continuity and efficiency. The maintenance cost is low, and the simplified adjustment mechanism reduces the maintenance requirements, making the equipment more economical and practical.

[0028] As a further preferred embodiment, a plurality of mounting through holes 61 are provided through the bottom plate 2, and a plurality of mounting threaded holes 62 are correspondingly provided on the base plate 1, a mounting bolt 63 is provided between each group of the mounting through holes 61 and the mounting threaded holes 62, a clamping gasket 64 is provided between the nut of the mounting bolt 63 and the top of the mounting through hole 61, the diameter of the mounting through hole 61 is a, the diameter of the mounting threaded hole 62 is b, and the diameter of the clamping gasket 64 is c, satisfying the quantitative relationship: c>a>b.

[0029] Specifically, by means of a plurality of mounting through holes 61 provided through the bottom plate 2 and corresponding mounting threaded holes 62 on the substrate 1, in combination with mounting bolts 63 and clamping washers 64, a stable and adjustable fixation between the bottom plate and the substrate is achieved, thereby enhancing the stability of the connection between the bottom plate 2 and the substrate 1, reducing the displacement caused by thermal expansion or mechanical vibration, and improving the adjustment accuracy of the center axis, thereby simplifying the maintenance and adjustment process. By tightening or loosening the mounting bolts 63, the position of the substrate 1 can be easily fine-tuned, thereby ensuring accurate centering of the center axis, avoiding sticking or dropping of the seed crystals when multiple seed crystals are pulled simultaneously, and improving the success rate of crystal growth and production efficiency.

[0030] As a further preferred embodiment, the seed crystal lifting device 3 includes a seed crystal cavity 31 and a wire taking-up cavity 32 fixedly arranged on the base plate 2, a rope pulley 311 and a seed crystal rope wound on the rope pulley 311 are rotatably arranged in the seed crystal cavity 31, a wire taking-up wheel 321 and a cable wound on the wire taking-up wheel 321 are rotatably arranged in the wire taking-up cavity 32, the seed crystal rope on the rope pulley 311 penetrates the base plate 2 and enters the silicon core furnace through the seed crystal rope through hole 12, and the cable on the wire taking-up wheel 321 penetrates the base plate 2 and enters the silicon core furnace through the cable trough 11.

[0031] As a further preferred embodiment, a guide groove 21 is provided on the bottom plate 2 , a guide seat 7 is provided in the guide groove 21 , and a seed crystal rope guide hole 71 is provided in the guide seat 7 .

[0032] Specifically, a guide seat 7 is provided in the guide groove 21, and a seed crystal rope guide hole 71 in the guide seat 7 provides support and guidance for the seed crystal rope, ensuring that the seed crystal rope is transmitted along a predetermined path, effectively reducing bending and wear, and extending the service life of the seed crystal rope.

[0033] As a further preferred embodiment, the rope wheel 311 is transmission-connected to an external driving mechanism and is transmission-connected to the take-up wheel 321 via a transmission assembly.

[0034] As a further preferred embodiment, the take-up wheel 321 is transmission-connected to an external driving mechanism and is transmission-connected to the rope wheel 311 via a transmission assembly.

[0035] As a further preferred embodiment, a plurality of sets of the adjusting base 51 and the adjusting bolt 52 are correspondingly arranged.

[0036] The preferred specific embodiments of the present utility model have been described in detail above. It should be understood that those of ordinary skill in the art can make many modifications and variations based on the concept of the present utility model without creative efforts. Therefore, all technical solutions that can be obtained by those skilled in the art in the technical field according to the concept of the present utility model through logical analysis, reasoning or limited experiments on the basis of the prior art should fall within the protection scope determined by the claims.

Claims

1. An adjustable silicon core furnace upper shaft structure, characterized in that: include: A base plate (1) and a bottom plate (2), wherein the base plate (1) is provided with a cable trough (11) and a seed crystal rope through hole (12), the bottom plate (2) is provided with a seed crystal lifting device (3), and an adjustment seat (51) is fixedly provided around the base plate (1), and an adjustment bolt (52) is threadedly connected to the adjustment seat (51), and the front end of the adjustment bolt (52) is against the side wall of the bottom plate (2).

2. The adjustable silicon core furnace upper shaft structure according to claim 1, characterized in that: The bottom plate (2) is provided with a plurality of mounting through holes (61), and the base plate (1) is provided with a plurality of mounting threaded holes (62) correspondingly. A mounting bolt (63) is provided between each group of the mounting through holes (61) and the mounting threaded holes (62), and a clamping gasket (64) is provided between the nut of the mounting bolt (63) and the top of the mounting through hole (61). The diameter of the mounting through hole (61) is a, the diameter of the mounting threaded hole (62) is b, and the diameter of the clamping gasket (64) is c, satisfying the quantitative relationship: c>a>b.

3. The adjustable silicon core furnace upper shaft structure according to claim 1, characterized in that: The seed crystal lifting device (3) comprises a seed crystal cavity (31) and a wire take-up cavity (32) fixedly arranged on the bottom plate (2); a rope wheel (311) and a seed crystal rope wound around the rope wheel (311) are rotatably arranged in the seed crystal cavity (31); a wire take-up wheel (321) and a cable wound around the wire take-up wheel (321) are rotatably arranged in the wire take-up cavity (32); the seed crystal rope on the rope wheel (311) passes through the bottom plate (2) and enters the silicon core furnace through the seed crystal rope through hole (12); the cable on the wire take-up wheel (321) passes through the bottom plate (2) and enters the silicon core furnace through the cable groove (11).

4. The adjustable silicon core furnace upper shaft structure according to claim 3, characterized in that: A guide groove (21) is provided on the bottom plate (2), a guide seat (7) is provided in the guide groove (21), and a seed crystal rope guide hole (71) is provided in the guide seat (7).

5. The adjustable silicon core furnace upper shaft structure according to claim 3 or 4, characterized in that: The rope wheel (311) is transmission-connected to an external driving mechanism and is transmission-connected to a take-up wheel (321) via a transmission assembly.

6. The adjustable silicon core furnace upper shaft structure according to claim 3 or 4, characterized in that: The take-up wheel (321) is transmission-connected to an external driving mechanism and is transmission-connected to the rope wheel (311) via a transmission assembly.

7. The adjustable silicon core furnace upper shaft structure according to claim 1, characterized in that: The adjusting seats (51) and adjusting bolts (52) are arranged in multiple groups correspondingly.

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