Rotor assembly and vacuum pump
By setting up multiple spaced dust collecting grooves on the rotor dust collection section and adopting a continuous curved surface design, the problem of poor vacuum degree of the vacuum pump is solved, and the pumping performance and pump reliability are improved.
Patent Information
- Application Number
- CN202422376663.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-27
- Publication Date
- 2025-07-01
- Estimated Expiration
- 2034-09-27
AI Technical Summary
The rotor dust collection structure of existing vacuum pumps leads to poor vacuum degree, affecting the pump's sealing performance and pumping performance.
A number of smaller dust collecting grooves are arranged along the axial interval on the dust collecting section of the rotor, with spacing between the dust collecting grooves, reducing the communication area between the input cavity and the output cavity, and adopting a continuous curved surface design to facilitate dust falling off.
It effectively improves the vacuum degree and pumping performance of the vacuum pump, reduces the damage to the rotor by dust, and extends the service life of the pump.
Smart Images
Figure CN223049007U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum pumps, in particular to a rotor assembly and a vacuum pump. Background Art
[0002] A dry vacuum pump refers to a non-contact vacuum pump that does not use oil or liquid and is sealed through a small gap. It is a device capable of obtaining a clean vacuum, having the advantages of large pumping speed, long service life, high vacuum degree, energy saving, and isolation of the lubricating medium from the process medium. It is widely used in the semiconductor industry, analytical instruments, the electronics industry, and the chemical industry. During the coating process in the fields of semiconductors and photovoltaics, a large amount of dust is usually generated. Whether it is inhaled dust or by-product dust generated by chemical reactions of unreacted tail gas in the vacuum pump chamber, even with continuous purging of inert gas, dust will still accumulate periodically inside the pump body, increasing the external dimensions of the rotor inside the pump body, causing rubbing between the rotors or between the rotor and the stator, thus affecting the normal operation of the pump.
[0003] Currently, in order to reduce the influence of dust, existing vacuum pumps usually have dust collection groove structures arranged at intervals along the circumferential direction on the circumferential surface of the rotor. To ensure the effect of the dust collection groove structure, each dust collection groove structure is a long strip extending along the axial direction. Although this form of dust collection groove structure can reduce the influence of dust, it will also reduce the sealing performance during rotor mating, resulting in a poor vacuum degree of the pump body. Summary of the Utility Model
[0004] In view of this, the utility model provides a rotor assembly and a vacuum pump to solve the problem that the dust collection structure of the existing rotor results in a poor vacuum degree of the vacuum pump.
[0005] In a first aspect, the utility model provides a rotor assembly applied to a vacuum pump. The rotor assembly includes at least a pair of rotors that are rotationally mated. Each rotor includes: a main body having at least one first circumferential surface that mates with an adjacent rotor. The circumferential surface includes alternately arranged dust collection segments and mating segments. A plurality of dust collection grooves are spaced at intervals along the axial direction of the main body for each dust collection segment. The dust collection segment of one rotor is adapted to mate with the corresponding mating segment of another rotor.
[0006] Beneficial effects: A plurality of dust collection grooves are arranged at intervals along the axial direction of the main body on the dust collection section. The original single relatively large groove body is changed into a plurality of smaller groove bodies. Due to the interval between the dust collection grooves, at this time, the notch area of the plurality of dust collection grooves on the dust collection section is smaller than the area of the original single groove body. When the matching section of the adjacent rotor is matched with the current dust collection section, the communication area between the input cavity and the output cavity is reduced. Therefore, the influence on the internal vacuum degree of the vacuum pump can be effectively reduced, and the dust collection effect of the dust collection groove and the influence on the air extraction performance of the pump body can be better balanced, effectively solving the problem that the vacuum degree of the vacuum pump is poor due to the dust collection structure of the existing rotor.
[0007] In an optional embodiment, the groove wall of the dust collection groove is a continuous curved surface.
[0008] Beneficial effects: It is more conducive to the dust collected inside the groove body to fall off along the inner wall of the curved surface, and can effectively avoid the situation of dust accumulation.
[0009] In an optional embodiment, the inner wall of the dust collection groove is an arc-shaped curved surface.
[0010] Beneficial effects: The dust collection groove with a spherical inner wall has a shallower depth. On the basis of reducing the opening area of the dust collection groove, the depth of the dust collection groove can be further reduced, and then when the two rotors are matched, the communication area between the input cavity and the output cavity can be reduced.
[0011] In an optional embodiment, the inner wall of the dust collection groove is a spherical surface, and the spherical radius is 6-18 mm.
[0012] Beneficial effects: The structure is simple and reliable. This form of dust collection groove is more conducive to processing operations, and can reduce the processing difficulty and processing time.
[0013] In an optional embodiment, the vacuum pump further includes a stator, and the main body further has at least one second circumferential surface that cooperates with the stator, and a plurality of dust collection grooves are arranged at intervals on the second circumferential surface.
[0014] Beneficial effects: The dust collection grooves here can collect the dust between the mating surfaces of the stator and the rotor, and improve the working reliability of the rotor.
[0015] In an optional embodiment, the dust collection grooves located on the second circumferential surface are arranged in an array.
[0016] Beneficial effects: The structure is simple and has a high degree of regularity. While reducing the stress concentration phenomenon, it is more convenient for processing and manufacturing.
[0017] In an optional embodiment, the dust collection grooves on the first circumferential surface are arranged in multiple columns along the axial direction.
[0018] Beneficial effects: This form of dust collection groove is more convenient for processing and manufacturing, and can effectively reduce the manufacturing difficulty.
[0019] In an alternative embodiment, the multi-column dust collection grooves on the first circumferential surfaces of the two rotors that are correspondingly matched are arranged in a staggered manner.
[0020] Beneficial effects: It can further reduce the overlapping degree of the dust collection grooves during the rotation of the rotor, and reduce the influence on the air extraction performance of the vacuum pump.
[0021] In an alternative embodiment, the main body also has two end faces arranged opposite to each other, and a number of dust collection grooves are provided on the end faces.
[0022] Beneficial effects: It can further improve the dust collection ability of the end face of the main body and ensure the dust collection effect.
[0023] In a second aspect, the present utility model also provides a vacuum pump, which includes: a stator with an accommodation cavity inside; the above-mentioned rotor assembly is arranged in the accommodation cavity, and the rotor assembly cooperates with the stator to respectively form an input cavity and an output cavity.
[0024] Beneficial effects: Multiple dust collection grooves are designed on the rotor. The dust collection grooves can collect dust, which can reduce the damage to the rotor and the vacuum pump caused by solid or liquid particles contained in the inhaled gas. At the same time, the structure of the dust collection grooves can also reduce the influence on the air extraction performance of the vacuum pump, which is beneficial to the peeling of dust particles from the rotor under the action of external force, and effectively improves the service life of the pump.
[0025] In an alternative embodiment, the rotor of the rotor assembly is one of a claw type, a screw type, and a leaf shape. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the following drawings are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0027] Figure 1 It is a three-dimensional schematic diagram of the rotor of a rotor assembly according to an embodiment of the present utility model;
[0028] Figure 2 It is Figure 1 a side view of the rotor shown;
[0029] Figure 3 It is Figure 1 a front view sectional schematic diagram of the rotor shown;
[0030] Figure 4 It is Figure 1 a three-dimensional schematic diagram of the assembled rotor assembly shown;
[0031] Figure 5 For Figure 4 a perspective schematic diagram when the first circumferential surfaces of the two rotors of the rotor assembly shown are engaged;
[0032] Figure 6 For Figure 5 a partially enlarged schematic diagram of the mating position of the two rotors of the rotor assembly shown;
[0033] Figure 7 For Figure 1 a three - dimensional schematic diagram in which a dust - collecting groove is provided on the end face of the rotor shown.
[0034] Explanation of reference numerals:
[0035] 1. First circumferential surface; 101. Dust - collecting section; 102. Mating section; 2. Dust - collecting groove; 3. Second circumferential surface; 4. End face; 5. Stator; 501. Input cavity; 502. Output cavity. Specific embodiments
[0036] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the protection scope of the present utility model.
[0037] Next, in combination with Figures 1 to 7 , the embodiments of the present utility model will be described.
[0038] The rotor assembly in the vacuum pump cooperates with the relevant stator 5 and forms an input cavity 501 and an output cavity 502. The communication area between the input cavity 501 and the output cavity 502 usually significantly affects the vacuum degree inside the vacuum pump, and ensuring the vacuum degree inside the vacuum pump will affect the working efficiency of the vacuum pump.
[0039] In the related art, the single dust - collecting groove structure is usually a relatively large groove body extending in a "one - character" shape along the axial direction of the rotor. Since the notch area of this type of dust - collecting groove structure is large and the inside of the groove body is deep, when the two rotors are engaged, the input cavity 501 and the output cavity 502 will communicate through the dust - collecting groove structure, which will greatly reduce the sealing performance of the input cavity 501 and the output cavity 502 while reducing the influence of dust, resulting in a low working efficiency of the vacuum pump.
[0040] According to an embodiment of the present utility model, on the one hand, a rotor assembly is provided, which is applied to a vacuum pump. The rotor assembly includes at least a pair of rotors that are rotationally engaged. Each rotor includes: a main body, the main body having at least one first circumferential surface 1 that cooperates with an adjacent rotor. The circumferential surface includes alternately arranged dust collection sections 101 and mating sections 102. A plurality of dust collection grooves 2 are spaced along the axial direction of the main body on each dust collection section 101. The dust collection section 101 of one rotor is adapted to cooperate with the corresponding mating section 102 of another rotor.
[0041] When applying the rotor assembly of this embodiment, a plurality of dust collection grooves 2 are spaced along the axial direction of the main body on the dust collection section 101. The originally larger single groove body becomes a plurality of smaller groove bodies. Due to the spacing between the dust collection grooves 2, at this time, the notch area of the plurality of dust collection grooves 2 on the dust collection section 101 is smaller than the area of the original single groove body. When the mating section 102 of the adjacent rotor cooperates with the current dust collection section 101, the communication area between the input chamber 501 and the output chamber 502 is reduced. Therefore, the influence on the internal vacuum degree of the vacuum pump can be effectively reduced, and the dust collection effect of the dust collection grooves 2 and the influence on the air extraction performance of the pump body can be better balanced, effectively solving the problem that the dust collection structure of the existing rotor results in poor vacuum degree of the vacuum pump.
[0042] Specifically, the number of dust collection grooves 2 on a single dust collection section 101 is not strictly limited, and it can be two, three or more. As long as it can reduce the communication area between the input chamber 501 and the output chamber 502 while achieving the dust collection effect.
[0043] Furthermore, the type of substances that the dust collection section 101 can accommodate is not limited. It can accommodate solid or liquid particles, reducing the damage of dust particles to the vacuum pump.
[0044] In this embodiment, the groove wall of the dust collection groove 2 is a continuous curved surface, which is more conducive to the dust collected inside the groove body falling off along the inner wall of the curved surface, effectively avoiding the situation of dust accumulation.
[0045] In the related art, the inside of the "one - shaped" groove body is deeper, and the connection line between the side wall and the bottom wall of the groove is a broken line, resulting in easy accumulation of lumps inside the groove body, making it difficult for the dust to fall off automatically. When the accumulated large dust falls off in a lump, it is very easy to form a situation of pump jamming.
[0046] However, the groove wall of the dust collection groove 2 in this embodiment is a continuous curved surface. After the dust enters the groove body of the dust collection groove 2, with the rotation of the rotor, under the scouring force of the purging air flow, it can smoothly peel off from the rotor, and the dust will flow out along with the air flow, thus avoiding the phenomenon of dust accumulation.
[0047] Specifically, in this embodiment, the shape of the groove wall of the dust collecting groove 2 is not specifically limited. It can be a spherical surface, or an approximate spherical surface, such as a parabolic shape, a cycloid, an involute, etc., as long as the particles adhering to the dust collecting groove 2 of the rotor can easily fall off under the action of centrifugal force and air flow scouring force.
[0048] In this embodiment, the inner wall of the dust collecting groove 2 is an arc-shaped curved surface. The depth of the dust collecting groove 2 with an arc-shaped curved surface inner wall is relatively shallow. On the basis of reducing the opening area of the dust collecting groove 2, the depth of the dust collecting groove 2 can be further reduced, so as to reduce the communication area between the input cavity 501 and the output cavity 502 when the two rotors are matched.
[0049] In this embodiment, the inner wall of the dust collecting groove 2 is a spherical surface, and the spherical radius is 6-18 mm. The structure is simple and reliable. This form of the dust collecting groove 2 is more conducive to processing operations, and can reduce the processing difficulty and processing time.
[0050] It should be noted that the spherical radius size of the inner wall of the dust collecting groove 2 here is only a schematic illustration of one of the sizes, and the specific size can also be flexibly selected according to requirements.
[0051] Preferably, the spherical radius is 12.5 mm.
[0052] In this embodiment, the vacuum pump further includes a stator 5, and the main body further has at least one second circumferential surface 3 that cooperates with the stator 5. A plurality of dust collecting grooves 2 are arranged at intervals on the second circumferential surface 3. The dust collecting grooves 2 here can collect the dust between the mating surfaces of the stator 5 and the rotor, and improve the working reliability of the rotor.
[0053] It can be understood that as an alternative embodiment, only one dust collecting groove 2 can also be provided on the second circumferential surface 3, or no dust collecting groove 2 can be provided on the second circumferential surface 3.
[0054] In this embodiment, the dust collecting grooves 2 located on the second circumferential surface 3 are arranged in an array, with a simple structure and high regularity. While reducing the stress concentration phenomenon, it is more convenient for processing and manufacturing.
[0055] Specifically, the dust collecting grooves 2 on the second circumferential surface 3 can also be arranged in other discrete forms, and can be flexibly selected according to requirements.
[0056] In this embodiment, the dust collecting grooves 2 on the first circumferential surface 1 are arranged in multiple columns along the axial direction. This form of the dust collecting groove 2 is more convenient for processing and manufacturing, and can effectively reduce the manufacturing difficulty.
[0057] It should be noted that the dust collecting grooves 2 on the first circumferential surface 1 preferably can adopt an orderly row and column layout, or can also be arranged in other discrete forms, as long as the grooves of the meshing rotors can be misaligned with each other and cover the area of the outer circumferential surface.
[0058] In this embodiment, multiple rows of dust collection grooves 2 on the first circumferential surfaces 1 of two correspondingly matched rotors are arranged in a staggered manner, which can further reduce the overlapping degree of the dust collection grooves 2 during the rotation of the rotors, and reduce the influence on the air extraction performance of the vacuum pump.
[0059] Specifically, as Figure 6 shown, this arrangement method of the dust collection grooves 2 can make the dust collection grooves 2 arranged more closely while ensuring the air extraction performance of the pump body, and ensure the dust collection effect.
[0060] In this embodiment, the main body also has two end faces 4 arranged oppositely, and a number of dust collection grooves 2 are arranged on the end faces 4, further improving the dust collection ability of the end faces 4 of the main body and ensuring the dust collection effect.
[0061] Among them, the number and arrangement method of the dust collection grooves 2 arranged on the end faces 4 are not limited, and it can be the arrangement method as Figure 7 shown, or can be flexibly changed according to requirements.
[0062] According to an embodiment of the present invention, on the other hand, a vacuum pump is provided, which includes: a stator 5 and the above-mentioned rotor assembly. The stator 5 has an accommodation cavity inside, the rotor assembly is arranged in the accommodation cavity, and the rotor assembly cooperates with the stator 5 to form an input cavity 501 and an output cavity 502 respectively.
[0063] Applying the vacuum pump of this embodiment, multiple dust collection grooves 2 are designed on the rotor. The dust collection grooves 2 can collect dust, which can reduce the damage of solid or liquid particles contained in the inhaled gas to the rotor and the vacuum pump. At the same time, the structure of the dust collection grooves 2 can also reduce the influence on the air extraction performance of the vacuum pump, which is beneficial to the peeling of dust particles from the rotor under the action of external force, and effectively improves the service life of the pump.
[0064] In this embodiment, the rotor of the rotor assembly is one of a claw type, a screw type and a leaf shape. The rotor in the rotor assembly is preferably a claw type. It should be noted that the rotor can also be a Roots pump rotor or a screw pump rotor, and the dust collection grooves 2 can be arranged in the above-mentioned manner.
[0065] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.
Claims
1. A rotor assembly, applied to a vacuum pump, characterized in that: The rotor assembly comprises at least one pair of rotatably matched rotors, each of the rotors comprising: The main body has at least one first circumferential surface (1) that cooperates with the adjacent rotor, the circumferential surface includes dust collecting segments (101) and matching segments (102) that are alternately arranged, each of the dust collecting segments (101) is provided with a plurality of dust collecting grooves (2) spaced apart along the axial direction of the main body, and the dust collecting segment (101) of one of the rotors is suitable for cooperating with the matching segment (102) corresponding to the other rotor.
2. The rotor assembly according to claim 1, characterized in that The groove wall of the dust collecting groove (2) is a continuous curved surface.
3. The rotor assembly according to claim 2, characterized in that: The inner wall of the dust collecting groove (2) is an arc-shaped curved surface.
4. The rotor assembly according to claim 3, characterized in that: The inner wall of the dust collecting groove (2) is a spherical surface, and the radius of the spherical surface is 6 to 18 mm.
5. The rotor assembly according to any one of claims 1 to 4, characterized in that: The vacuum pump further comprises a stator (5), and the main body further comprises at least one second circumferential surface (3) cooperating with the stator (5), and a plurality of dust collecting grooves (2) are arranged at intervals on the second circumferential surface (3).
6. The rotor assembly according to claim 5, characterized in that The dust collecting grooves (2) located on the second circumferential surface (3) are arranged in an array.
7. The rotor assembly according to any one of claims 1 to 4, characterized in that: The dust collecting grooves (2) of the first circumferential surface (1) are arranged in multiple rows along the axial direction.
8. The rotor assembly according to claim 5, characterized in that: The multiple rows of dust collecting grooves (2) on the first circumferential surfaces (1) of the two corresponding rotors are staggered.
9. The rotor assembly according to any one of claims 1 to 4, characterized in that: The main body also has two end surfaces (4) arranged opposite to each other, and a plurality of dust collecting grooves (2) are arranged on the end surfaces (4).
10. A vacuum pump, characterized in that: include: A stator (5) having a receiving cavity therein; The rotor assembly according to any one of claims 1 to 9 is arranged in the accommodating cavity, and the rotor assembly cooperates with the stator (5) to form an input cavity (501) and an output cavity (502) respectively.
11. The vacuum pump according to claim 10, characterized in that The rotor of the rotor assembly is one of a claw type, a screw type and a blade type.