Intelligent vacuum calibration device

Abstract

The utility model discloses an intelligent vacuum calibration device which comprises a rack, a vacuum pump fixedly connected to the inner wall of the rack, a vacuum chamber welded to the top of the rack, an electric gate valve fixedly connected to the inner wall of the rack, and a connector and a first stretching elbow fixedly connected to the outer wall of the vacuum chamber. The interfaces comprise a detected gauge interface and a standard gauge interface, the tail end of the first stretching elbow is fixedly connected with the detected gauge interface, the tail end of the first electromagnetic baffle valve is fixedly connected with the standard gauge interface, the inner cavity of the rack is fixedly connected with a full-scale vacuum gauge, and the outer wall of the full-scale vacuum gauge is fixedly connected with a full-scale gauge valve. And the standard gauge interface and the full-scale vacuum gauge are connected in parallel with the vacuum chamber through the film gauge valve and the full-scale gauge valve. The method has the advantages that zero point and full point correction can be rapidly carried out on site, inspection processing is not needed, defect elimination and verification time is greatly shortened, and maintenance cost and failure influence of the vacuum gauge are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum calibration, in particular to an intelligent vacuum calibration device. Background Art

[0002] The miniaturization, desktopization and integration of special scientific research and testing instrument and equipment involving vacuum environment have become an inevitable development trend, and the pressure control element of the vacuum system has become an indispensable core component in scientific research in the vacuum environment.

[0003] When the existing intelligent vacuum calibration device is used, it is easy to drift, and the correction of zero point and full point on site is slow, and it needs to be sent for inspection, which increases the maintenance cost and failure impact of the vacuum gauge. Therefore, an intelligent vacuum calibration device is needed to reduce the maintenance cost and failure impact of the vacuum gauge. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an intelligent vacuum calibration device to solve the problems in the above background art that when the existing intelligent vacuum calibration device is used, it is easy to drift, the correction of zero point and full point on site is slow, and it needs to be sent for inspection, which increases the maintenance cost and failure impact of the vacuum gauge.

[0005] To solve the above technical problems, the utility model is realized through the following technical solutions:

[0006] The utility model is an intelligent vacuum calibration device, including:

[0007] A frame and a first electromagnetic baffle valve. A vacuum pump is fixedly connected to the inner wall of the frame. A vacuum chamber is welded to the top of the frame. An electric gate valve is fixedly connected to the inner wall of the frame. An interface and a first elbow are fixedly connected to the outer wall of the vacuum chamber. The interface includes an interface for the gauge to be tested and an interface for the standard gauge. The end of the first elbow is fixedly connected to the interface for the gauge to be tested. The end of the interface for the gauge to be tested is fixedly connected to a thin-film gauge valve. The end of the first electromagnetic baffle valve is fixedly connected to the interface for the standard gauge. A full-range vacuum gauge is fixedly connected to the inner cavity of the frame. A full-range gauge valve is fixedly connected to the outer wall of the full-range vacuum gauge;

[0008] Further, the interface for the standard gauge and the full-range vacuum gauge are connected in parallel with the vacuum chamber through the thin-film gauge valve and the full-range gauge valve, and the interfaces for the gauges to be tested are connected in series at both ends of the vacuum chamber;

[0009] Further, a transition pipeline is fixedly connected to the outer wall of the vacuum chamber. The end of the transition pipeline is fixedly connected to a molecular pump. One side of the molecular pump is fixedly connected to the electric gate valve. An adjustable butterfly valve is fixedly connected to the outer wall of one side of the transition pipeline. A helium gas cylinder is fixedly connected to the inner cavity of the frame;

[0010] Further, a handle and a touch screen are fixedly connected to the outer wall of the frame. A second electromagnetic baffle valve is fixedly connected to the end of the molecular pump. A tee pipe is fixedly connected to the outer wall of the helium gas cylinder. A straight pipe is fixedly connected to the outer wall of the adjustable butterfly valve. A second stretching elbow is fixedly connected to the end of the straight pipe.

[0011] Further, a first pipe and a second pipe are fixedly connected to the outer wall of the second electromagnetic baffle valve. A process gas source is fixedly connected to the top of the helium gas cylinder. A ferrule elbow is fixedly connected to the outer wall of the process gas source.

[0012] Further, the vacuum chamber and the helium gas cylinder are connected in series through a stop valve, a flow meter and a pressure reducing valve, are connected in parallel with the helium gas cylinder through a stop valve, a fine tuning valve and a stop valve, are connected in series with the vacuum pump through a vacuum valve, a molecular pump, a molecular sieve and an electromagnetic isolation valve, and are connected in parallel with the vacuum pump through a vacuum valve.

[0013] Further, the;

[0014] Compared with the prior art, the advantages of the present utility model are as follows:

[0015] For the present utility model, this calibration device is applicable to the calibration of vacuum gauges in complex environments, with an ultimate vacuum lower than 1×10-4 Pa. In a system with a compact structure, limited installation space and high automation requirements, when the on-site instruments in a complex production situation show or may show drift, this device can be used to quickly correct the zero point and full scale point on-site without the need for sending for inspection, greatly shortening the defect elimination and verification time and reducing the maintenance cost and failure impact of the vacuum gauge. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present utility model, and those of ordinary skill in the art can also obtain other drawings based on these drawings without creative efforts.

[0017] Figure 1 Is the cross-sectional view of the overall structure of the present utility model Figure 1 ;

[0018] Figure 2 Is the cross-sectional view of the overall structure of the present utility model Figure 2 ;

[0019] Figure 3 Is the present utility model as Figure 1 Front view;

[0020] Figure 4 Is the present utility model as Figure 1 Top view;

[0021] Figure 5 This is the calibration process circuit diagram of the present utility model.

[0022] In the attached drawings, the list of components represented by each label is as follows:

[0023] 1. Frame; 2. Vacuum pump; 3. Vacuum chamber; 4. Electric gate valve; 5. First expansion elbow; 6. First electromagnetic baffle valve; 7. Interface; 701. Interface for the gauge to be tested; 702. Interface for the standard gauge; 8. Full-range vacuum gauge; 9. Helium gas cylinder; 10. Handle; 11. Touch screen; 12. Transition pipeline; 13. Molecular pump; 14. Second electromagnetic baffle valve; 15. Adjustable butterfly valve; 16. Three-way pipeline; 17. Straight pipeline; 18. Second expansion elbow; 19. First pipeline; 20. Second pipeline; 21. Process gas source; 22. Ferrule elbow. Specific embodiments

[0024] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the specific embodiments of the present utility model will be described in detail below with reference to the attached drawings.

[0025] In the following description, many specific details are set forth in order to fully understand the present utility model. However, the present utility model can also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.

[0026] To make the purpose, technical solution, and advantages of the present utility model clearer, the embodiments of the present utility model will be further described in detail below with reference to the attached drawings.

[0027] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the attached drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the present application. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0028] Please refer to Figures 1-5 As shown, this embodiment is an intelligent vacuum calibration device, including:

[0029] Frame 1, first electromagnetic baffle valve 6. Inside the frame 1, a vacuum pump 2 is fixedly connected to the inner wall. On the top of the frame 1, a vacuum chamber 3 is welded. Inside the frame 1, an electric gate valve 4 is fixedly connected to the inner wall. On the outer wall of the vacuum chamber 3, an interface 7 and a first elbow 5 are fixedly connected. The interface 7 includes a gauge under test interface 701 and a standard gauge interface 702. The end of the first elbow 5 is fixedly connected to the gauge under test interface 701. At the end of the gauge under test interface 701, a diaphragm gauge valve is fixedly connected. The end of the first electromagnetic baffle valve 6 is fixedly connected to the standard gauge interface 702. Inside the frame 1, a full-range vacuum gauge 8 is fixedly connected. On the outer wall of the full-range vacuum gauge 8, a full-range gauge valve is fixedly connected;

[0030] Full penetration welding and reinforced welding are combined to improve the strength and sealing performance of the vacuum chamber 3. Through 7, the standard gauge and the measuring gauge can be replaced. The interface 7 is adjusted through the electric gate valve 4, and the full-range vacuum gauge 8 is adjusted through the first electromagnetic baffle valve 6;

[0031] The standard gauge interface 702 and the full-range vacuum gauge 8 are connected in parallel with the vacuum chamber 3 through the diaphragm gauge valve and the full-range gauge valve. The gauge under test interface 701 is connected in series at both ends of the vacuum chamber 3;

[0032] On the outer wall of the vacuum chamber 3, a transition pipe 12 is fixedly connected. At the end of the transition pipe 12, a molecular pump 13 is fixedly connected. One side of the molecular pump 13 is fixedly connected to the electric gate valve 4. On one side outer wall of the transition pipe 12, an adjustable butterfly valve 15 is fixedly connected. Inside the frame 1, a helium cylinder 9 is fixedly connected;

[0033] Vacuum extraction is carried out through the molecular pump 13, and the helium cylinder 9 is adjusted through the butterfly valve 15;

[0034] On the outer wall of the frame 1, a handle 10 and a touch screen 11 are fixedly connected. At the end of the molecular pump 13, a second electromagnetic baffle valve 14 is fixedly connected. On the outer wall of the helium cylinder 9, a three-way pipe 16 is fixedly connected. On the outer wall of the adjustable butterfly valve 15, a straight pipe 17 is fixedly connected. At the end of the straight pipe 17, a second elbow 18 is fixedly connected;

[0035] The whole device is moved through the handle 10, the calibration device is adjusted through the touch screen 11, helium is transmitted through the three-way pipe 16, the three-way pipe 16 is adjusted through the second electromagnetic baffle valve 14, and the straight pipe 17 is fixed through the second elbow 18;

[0036] On the outer wall of the second electromagnetic baffle valve 14, a first pipe 19 and a second pipe 20 are fixedly connected. On the top of the helium cylinder 9, a process gas source 21 is fixedly connected. On the outer wall of the process gas source 21, a ferrule elbow 22 is fixedly connected;

[0037] The second electromagnetic baffle valve 14 is controlled through the first pipe 19 and the second pipe 20, and waste gas is reduced through the process gas source 21;

[0038] The vacuum chamber 3 is connected in series with the helium gas cylinder 9 through a stop valve, a flow meter and a pressure reducing valve, is connected in parallel with the helium gas cylinder 9 through a stop valve, a fine adjustment valve and a stop valve, is connected in series with the vacuum pump 2 through a vacuum valve, a molecular pump 13, a molecular sieve and an electromagnetic isolation valve, and is connected in parallel with the vacuum pump 2 through a vacuum valve;

[0039] Working principle: Connect the calibrated gauge to the vacuum chamber 3. Open the corresponding valves of the calibrated gauge, the thin film gauge valves, the thin film gauge valves, the thin film gauge valves, the full range gauge valves in sequence, and close the inflation valve to connect all pipelines and gauges. Start the mechanical pump and open the butterfly valve 15. When the fore-vacuum of the molecular pump 13 and the vacuum of the calibration chamber (G4) ≤ 10 Pa, close the butterfly valve 15, open the gate valve, start the molecular pump 13, and start pumping the ultimate vacuum. When the vacuum value of the calibration chamber reaches the set value (≤ 1 Pa), stabilize for a period of time to meet the zero adjustment requirement. At this time, the display error between the calibrated vacuum gauge 8 and the high vacuum gauge is within the range, indicating that the zero point is correct and no correction is required. If the display is not this value, such as 2.5E 0 or 5.0E-1, etc., correction should be made. After the zero point correction is completed, two-point pressure value calibration can be carried out as required.

[0040] In this step, the zero point and full point corrections are quickly carried out on-site without the need for sending for inspection, greatly shortening the defect elimination and verification time, and reducing the maintenance cost and failure impact of the vacuum gauge 8.

[0041] In the description of the present invention, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0042] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An intelligent vacuum calibration device, characterized in that: include: A frame (1), a first electromagnetic baffle valve (6), the inner wall of the frame (1) is fixedly connected to a vacuum pump (2), the top of the frame (1) is welded with a vacuum chamber (3), the inner wall of the frame (1) is fixedly connected to an electric plug valve (4), the outer wall of the vacuum chamber (3) is fixedly connected to an interface (7) and a first stretching elbow (5), the interface (7) comprises a gauge interface (701) and a standard gauge interface (702), the end of the first stretching elbow (5) is fixedly connected to the gauge interface (701), the end of the gauge interface (701) is fixedly connected to a diaphragm gauge valve, the end of the first electromagnetic baffle valve (6) is fixedly connected to the standard gauge interface (702), the inner cavity of the frame (1) is fixedly connected to a full-range vacuum gauge (8), and the outer wall of the full-range vacuum gauge (8) is fixedly connected to a full-range gauge valve.

2. The intelligent vacuum calibration device according to claim 1, characterized in that: The standard gauge interface (702) and the full-range vacuum gauge (8) are connected in parallel with the vacuum chamber (3) via a thin-film gauge valve and a full-range gauge valve, and the two ends of the vacuum chamber (3) are connected in series with the gauge interface (701) to be tested.

3. The intelligent vacuum calibration device according to claim 1, characterized in that: The outer wall of the vacuum chamber (3) is fixedly connected to a transition pipe (12), the end of the transition pipe (12) is fixedly connected to a molecular pump (13), one side of the molecular pump (13) is fixedly connected to an electric gate valve (4), one side of the outer wall of the transition pipe (12) is fixedly connected to an adjustable butterfly valve (15), and the inner cavity of the frame (1) is fixedly connected to a helium cylinder (9).

4. The intelligent vacuum calibration device according to claim 1, characterized in that: The outer wall of the frame (1) is fixedly connected with a handle (10) and a touch screen (11); the end of the molecular pump (13) is fixedly connected with a second electromagnetic baffle valve (14); the outer wall of the helium cylinder (9) is fixedly connected with a three-way pipeline (16); the outer wall of the adjustable butterfly valve (15) is fixedly connected with a straight pipeline (17); and the end of the straight pipeline (17) is fixedly connected with a second stretching elbow (18).

5. The intelligent vacuum calibration device according to claim 4, characterized in that: The outer wall of the second electromagnetic baffle valve (14) is fixedly connected to a first pipeline (19) and a second pipeline (20), the top of the helium cylinder (9) is fixedly connected to a process gas source (21), and the outer wall of the process gas source (21) is fixedly connected to a ferrule elbow (22).

6. The intelligent vacuum calibration device according to claim 1, characterized in that: The vacuum chamber (3) is connected in series with the helium cylinder (9) via a stop valve, a flow meter and a pressure reducing valve, connected in parallel with the helium cylinder (9) via a stop valve, a fine adjustment valve and a stop valve, connected in series with the vacuum pump (2) via a vacuum valve, a molecular pump (13), a molecular sieve and an electromagnetic isolation valve, and connected in parallel with the vacuum pump (2) via a vacuum valve.

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