Valve leak detection device

Abstract

The utility model discloses a valve leak detection device, relates to the field of semiconductor part testing, and aims to solve the problem that simultaneous long-time leak detection of a plurality of valves is inconvenient. The valve leak detection device comprises a plurality of accommodating grooves, an alarm component, a pressure detection assembly, a timing component, a communication component and a power supply, and each accommodating groove is used for accommodating a valve to be detected; an alarm component is arranged in each accommodating groove and is used for sending out an alarm characteristic and a position signal; a pressure detection assembly is arranged in each accommodating groove and is used for detecting whether the valve to be detected leaks or not; a timing part is arranged in each accommodating groove and is used for presetting detection time and triggering an alarm part when the detection time is up; the communication part is arranged in the accommodating groove, is in communication connection with the alarm part and is used for receiving the position signal and transmitting the position signal to a user terminal or a cloud server; and the power supply is conductively connected with the parts.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor part testing, in particular to a valve leak detection device. Background Art

[0002] In the production process of semiconductors, there are high requirements for the leakage and particulate matter of pipe valves. If leakage occurs, it is very likely to cause a decrease in the chip yield rate, and even the leakage of toxic and harmful gases will pose a danger to the lives of operators.

[0003] After the production of semiconductor-grade valves, they need to be strictly tested. The testing method can be as follows: First, introduce a test gas into the device composed of the valves to be tested, apply a leak detection liquid to the positions where the valves may leak, and observe whether bubbles are generated. If there are no bubbles, it means the valves do not leak; then use a leak detection device for short-term leak detection. Among them, the short term can be three minutes, etc.; then use the leak detection device for long-term leak detection. Among them, the long term can be twelve hours or twenty-four hours, etc., and finally helium detection is carried out.

[0004] When performing long-term leak detection, if still using a hand-held leak detection device for valve leak detection as in the short term, it is not easy to achieve; if placing the leak detection device together with the valve to be tested aside for leak detection, it is easy to be forgotten after a long time; if placing an alarm clock at the position of the valve for long-term leak detection, after the set time ends, the valve to be tested can be taken back. However, when testing multiple valves simultaneously, people will not be able to distinguish which alarm clock's sound is transmitted, resulting in inconvenience when performing long-term leak detection on multiple valves simultaneously. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a valve leak detection device for solving the problem of inconvenience when performing long-term leak detection on multiple valves simultaneously.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A valve leak detection device includes:

[0008] A plurality of accommodation grooves, each accommodation groove is used for accommodating a valve to be tested;

[0009] An alarm component, an alarm component is arranged in each accommodation groove, and the alarm component is used for emitting an alarm feature and a position signal, and the position signal includes the position information of the corresponding accommodation groove;

[0010] A pressure detection component, a pressure detection component is arranged in each accommodation groove, the pressure detection component is communicatively connected with the alarm component, and the pressure detection component is used for detecting the pressure at the valve to be tested to detect whether the valve to be tested leaks, and triggering the alarm component to emit an alarm feature and a position signal when the valve to be tested leaks;

[0011] Timing components, with timing components provided in each accommodation groove. The timing components are communicatively connected to the alarm components. The timing components are used to preset the detection time and trigger the alarm components to emit alarm characteristics and position signals when the detection time is reached.

[0012] Communication components, which are arranged in the accommodation groove. The communication components are communicatively connected to the alarm components. The communication components are used to receive the position signals and transmit them to the user terminal or the cloud server.

[0013] Power supply, which is electrically connected to the alarm components, the pressure detection components, the timing components and the communication components respectively.

[0014] In the case of adopting the above technical solution, place the valve to be tested in the accommodation groove, turn on the power supply, and each component starts to work. The pressure detection component is used to detect the pressure at the valve to be tested to detect whether the valve to be tested leaks. When the valve leaks, the pressure detection component triggers the alarm component communicatively connected to it to make an alarm. When the alarm component is triggered, it shows the alarm characteristics, and transmits the position signal of the valve to be tested where leakage occurs to the user terminal or the cloud server through the communication component communicatively connected to it. Or, preset an observation time for the timing component. When the observation time is reached, the timing component triggers the alarm component communicatively connected to it to make an alarm. When the alarm component is triggered, it shows the alarm characteristics, and transmits the position signal of the valve to be tested at the detection time to the user terminal or the cloud server through the communication component communicatively connected to it. When detecting multiple valves, the valve leak detection device provided by the present invention can be set. Since the communication component can transmit the alarm signal to the user terminal or the cloud server, the operator can accurately distinguish the leaking valve. Therefore, the present invention can assist in accurately detecting the leakage of valves for a long time, is convenient to use, and has a high user experience.

[0015] Optionally, in the above valve leak detection device, the alarm component includes:

[0016] Alarm part, which is used to emit sound alarm characteristics and / or light alarm characteristics;

[0017] Communication part, which is communicatively connected to the communication component. The communication part is used to send the position signal to the communication component.

[0018] Optionally, in the above valve leak detection device, the pressure detection component includes:

[0019] Air pump, which is used to introduce gas into the valve to be tested;

[0020] Two pressure sensors, which are respectively arranged at the gas inlet end and the gas outlet end of the valve to be tested, and are respectively used to detect the inlet pressure and the outlet pressure of the valve to be tested;

[0021] A pressure detection component is communicatively connected to a pressure sensor and also communicatively connected to an alarm component. The pressure detection component is configured to trigger the alarm component according to the change in the pressure difference detected by two pressure sensors.

[0022] Optionally, in the above valve leak detection device, the pressure detection assembly further includes a check valve, which is disposed at the gas inlet end of the valve to be tested and is used to divert the test gas to the valve to be tested.

[0023] Optionally, in the above valve leak detection device, the pressure detection assembly further includes a switching valve, which is disposed at the gas inlet end of the valve to be tested and is used to control the opening and closing of the pressure detection assembly.

[0024] Optionally, in the above valve leak detection device, the valve leak detection device further includes a gas detection component. A gas detection component is disposed in each accommodation groove. The gas detection component is communicatively connected to the alarm component and is configured to trigger the alarm component when the leaked gas in the accommodation groove is detected.

[0025] Optionally, in the above valve leak detection device, the valve leak detection device further includes a weighing component. A weighing component is disposed in each accommodation groove. The weighing component is electrically connected to the power supply. The weighing component is used to support the pressure detection assembly and the valve to be tested. When the pressure detection assembly and the valve to be tested are placed on the weighing component, the weighing component is triggered to turn on the power supply.

[0026] Optionally, in the above valve leak detection device, the multiple accommodation grooves are arranged in a rectangular array.

[0027] Optionally, in the above valve leak detection device, the number of communication components is one or more, and one communication component is communicatively connected to multiple alarm components.

[0028] Optionally, in the above valve leak detection device, the number of power supplies is one or more, and the power supply is electrically connected to the alarm components, the pressure detection assembly, the timing component, and the communication component in one or more accommodation grooves. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The drawings described herein are used to provide a further understanding of the present invention and form a part of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention. In the drawings:

[0030] Figure 1 is a top view of a valve leak detection system provided by an embodiment of the present invention;

[0031] Figure 2 is a front view of a valve leak detection system provided by an embodiment of the present invention;

[0032] Figure 3 The partial enlarged top view of a valve leak detection system provided by an embodiment of the present utility model;

[0033] Figure 4 The partial enlarged front view of a valve leak detection system provided by an embodiment of the present utility model.

[0034] Reference numerals: 1 is a receiving groove, 2 is an alarm component, 3 is a pressure detection component, 31 is a check valve, 32 is a pressure sensor, 33 is a switching valve, 34 is a pressure detection part, 4 is a timing component, 5 is a communication component, 6 is a power source, 7 is a gas detection component, 8 is a weighing component, and 9 is a valve to be tested. Detailed implementation manners

[0035] For the convenience of clearly describing the technical solutions of the embodiments of the present utility model, in the embodiments of the present utility model, terms such as "first" and "second" are used to distinguish identical or similar items with basically the same functions and actions. For example, the first threshold and the second threshold are only used to distinguish different thresholds, and do not limit their sequence. Those skilled in the art can understand that terms such as "first" and "second" do not limit the quantity and execution order, and "first", "second", etc. do not necessarily mean different.

[0036] It should be noted that in the present utility model, words such as "exemplary" or "for example" are used to represent examples, illustrations or explanations. Any embodiment or design solution described as "exemplary" or "for example" in the present utility model should not be construed as being more preferred or having more advantages than other embodiments or design solutions. Exactly speaking, using words such as "exemplary" or "for example" aims to present relevant concepts in a specific manner.

[0037] In the present utility model, "at least one" means one or more, and "a plurality" means two or more. "And / or" describes the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone, where A and B can be singular or plural. The character " / " generally represents an "or" relationship between the front and rear associated objects. "At least one (item)" or its similar expression refers to any combination of these items, including any combination of single item (item) or plural items (items). For example, at least one (item) of a, b or c can represent: a, b, c, the combination of a and b, the combination of a and c, the combination of b and c, or the combination of a, b and c, where a, b, c can be single or multiple.

[0038] Please refer to Figure 1, a valve leak detection device provided by an embodiment of the present utility model includes: a plurality of accommodation grooves 1, an alarm component 2, a pressure detection component 3, a timing component 4, a communication component 5, and a power supply 6. Among them, each accommodation groove 1 is used to accommodate a valve 9 to be tested; an alarm component 2 is arranged in each accommodation groove 1, and the alarm component 2 is used to emit an alarm feature and a position signal, and the position signal includes the position information of the corresponding accommodation groove 1; a pressure detection component 3 is arranged in each accommodation groove 1, the pressure detection component 3 is communicatively connected with the alarm component 2, and the pressure detection component 3 is used to detect the pressure at the valve 9 to be tested to detect whether the valve 9 to be tested leaks, and triggers the alarm component 2 to emit an alarm feature and a position signal when the valve 9 to be tested leaks; a timing component 4 is arranged in each accommodation groove 1, the timing component 4 is communicatively connected with the alarm component 2, and the timing component 4 is used to preset a detection time and trigger the alarm component 2 to emit an alarm feature and a position signal when the detection time is reached; the communication component 5 is arranged in the accommodation groove 1, the communication component 5 is communicatively connected with the alarm component 2, and the communication component 5 is used to receive the position signal and transmit it to a user terminal or a cloud server; the power supply 6 is electrically connected to the alarm component 2, the pressure detection component 3, the timing component 4, and the communication component 5 respectively.

[0039] During specific implementation: Place the valve 9 to be tested in the accommodation groove 1, turn on the power supply 6 to supply power to each component, and each component starts to work. The pressure detection component 3 is used to detect the pressure at the valve 9 to be tested to detect whether the valve 9 to be tested leaks. When the valve leaks, the pressure detection component 3 triggers the alarm component 2 communicatively connected to it to alarm. The alarm component 2 is triggered, displays an alarm feature, and transmits the position signal of the valve 9 to be tested where leakage occurs to a user terminal or a cloud server through the communication component 5 communicatively connected to it. Or, preset an observation time for the timing component 4. When the observation time is reached, the timing component 4 triggers the alarm component 2 communicatively connected to it to alarm. The alarm component 2 is triggered, displays an alarm feature, and transmits the position signal of the valve 9 to be tested when the detection time is reached to a user terminal or a cloud server through the communication component 5 communicatively connected to it. When detecting multiple valves, the valve leak detection device provided by the present utility model can be set. Since the communication component 5 can transmit the position signal to a user terminal or a cloud server, it enables the operator to accurately distinguish the leaking valve. Therefore, the present utility model can assist in accurately detecting the leakage of valves for a long time, is convenient to use, and has a good user experience.

[0040] As a possible implementation manner, the alarm component 2 includes an alarm part and a communication part. Among them, the alarm part is used to emit an audible alarm feature and / or a visual alarm feature; the communication part is communicatively connected with the communication component 5 and is used to send a position signal to the communication component 5.

[0041] Exemplarily, the alarm unit includes a sound alarm unit and / or a light alarm unit. The alarm unit is used to emit a sound alarm feature or a light alarm feature, or, the alarm unit emits both a sound alarm feature and a light alarm feature simultaneously. Herein, no specific limitations are imposed on the specific features of the sound alarm feature and the light alarm feature, which means that the sound alarm feature can be a beeping sound, a roaring sound, or other warning noises; the light alarm feature can be a red light, a blue light, or other warning lights. In some embodiments, the specific features of the sound / light alarm feature can be manually adjusted.

[0042] It is worth mentioning that a self-check component is provided in the alarm component 2. Specifically, after a certain preset time, the self-check component detects whether the current value or voltage value in the sound alarm unit or the light alarm unit deviates from the preset current value or voltage value, and determines whether there is a fault in the sound alarm function or the light alarm function based on the current value and voltage value. If there is a fault, a fault prompt is issued.

[0043] During specific implementation: when the alarm component 2 is triggered, the alarm unit emits a sound alarm feature and / or a light alarm feature, facilitating manual on-site observation of the position of the leaky valve under test 9; meanwhile, when the alarm component 2 is triggered, the communication unit transmits a position signal to the communication component 5 communicatively connected thereto, and then the position signal is transmitted by the communication component 5 to the user terminal or the cloud server. The position signal contains the position information of the accommodation groove 1, so that it can be known remotely which valve under test 9 is leaking.

[0044] As a possible implementation manner, the pressure detection assembly 3 includes two pressure sensors 32 and a pressure detection component 34. Among them, the two pressure sensors 32 are respectively arranged at the gas inlet end and the gas outlet end of the valve under test 9, and are respectively used to detect the inlet pressure and the outlet pressure of the valve under test 9; the pressure detection component 34 is communicatively connected to the pressure sensors 32 and is also communicatively connected to the alarm component 2, and is used to trigger the alarm component 2 according to the change in the pressure difference detected by the two pressure sensors 32.

[0045] Specifically, the two pressure sensors 32 are respectively installed at the gas inlet and the gas outlet of the valve under test 9 to detect the gas pressure signals at the inlet and the outlet, and transmit the gas pressure signals to the pressure detection component 34; the pressure detection component 34 calculates the pressure difference between the inlet and the outlet according to the gas pressure signals. Without adjusting the control valve, the gas inlet pressure of the valve under test 9 is greater than the gas outlet pressure. By detecting the inlet and outlet pressures through the two pressure sensors 32 to obtain P1 and P2, and then according to the pressure difference calculation formula:

[0046] P = P1 - P2

[0047] Among them, P1 is the pressure value at the inlet of the valve 9 to be measured, and P2 is the pressure value at the outlet of the valve 9 to be measured. The pressure difference can be obtained by subtracting the pressure value at the outlet from the pressure value at the inlet. If the pressure difference is less than the threshold value, it means that the valve 9 to be measured has a leakage situation. Subsequently, the pressure detection component 34 transmits the information that the valve 9 to be measured has a leakage to the alarm component 2 which is communicatively connected thereto, and the alarm component 2 is triggered to emit an alarm feature and a position signal. It should be noted that obtaining the pressure difference based on the pressure signal detected by the pressure sensor 32 and comparing the pressure difference with the threshold value is a common processing method, which is a common device combination formed by a common pressure sensor 32 and a component with computing and processing capabilities, and does not belong to the improvement of the control program. It is only to connect common components to enable corresponding functions.

[0048] Furthermore, the pressure detection assembly 3 further includes a check valve 31. The check valve 31 is arranged at the gas inlet end of the valve 9 to be measured and is used to divert the test gas to the valve 9 to be measured.

[0049] When performing leak detection on the valve 9 to be measured, a check valve 31 is arranged at the test gas inlet end of the valve 9 to be measured. The check valve 31 is used to control the flow direction of the test gas when an external gas source is connected, so as to smoothly complete the gas leak detection.

[0050] Furthermore, the pressure detection assembly 3 further includes a switching valve 33. The switching valve 33 is arranged at the gas outlet end of the valve 9 to be measured and is used to control the opening and closing of the pressure detection assembly 3. That is, a switching valve 33 is arranged at the gas outlet end of the valve 9 to be measured. When performing leak detection on the valve 9 to be measured, the working state of the pressure detection assembly 3 can be adjusted by adjusting the opening and closing state of the switching valve 33, which is simple and easy to control.

[0051] It should be noted that when the pressure detection assembly 3 only includes the pressure sensor 32 and the pressure detection component 34, the leak detection operation of the valve 9 to be measured can be completed by continuously using an external gas source to introduce test gas into the valve 9 to be measured. Among them, the external gas source can be components such as an air pump.

[0052] As a possible implementation, the valve leak detection device further includes a gas detection component 7. A gas detection component 7 is provided in each accommodation groove 1. The gas detection component 7 is communicatively connected to the alarm component 2. The gas detection component 7 is configured to trigger the alarm component 2 when detecting leaked gas in the accommodation groove 1. Specifically, in this embodiment, the gas detection component 7 is a catalytic combustion type sensor. The catalytic combustion type sensor includes a control unit and a sensor, etc. The sensor is composed of a detection unit and a compensation unit. In clean air without leakage of the measured gas, the resistance of the detection unit and the compensation unit is balanced; when the measured gas leaks into the air, the combustible measured gas enters the interior of the sensor and undergoes a flameless combustion reaction with the detection unit, resulting in a temperature increase, while the temperature in the compensation unit remains unchanged. Thus, the temperature difference causes the resistance balance to be disrupted, and the change signal is amplified by a differential operational amplifier and output to the control unit. The control unit outputs the signal to the alarm component 2 to achieve the alarm function of the alarm component 2.

[0053] It should be noted that, in this embodiment, the type of the test gas needs to be limited, and the test gas should be detected by the gas detection component 7. The beneficial effect is that if the valve 9 to be tested leaks, the test gas leaks into the accommodation groove 1, and the leaked test gas is detected by the gas detection component 7. The gas detection component 7 causes the alarm component 2 communicatively connected to it to alarm. Since the only way for the outside to have a specific test gas is to leak from the valve, if the alarm component 2 alarms, it can accurately and timely detect the leakage of the valve 9 to be tested.

[0054] As a possible implementation, the valve leak detection device further includes a weighing component 8. A weighing component 8 is provided in each accommodation groove 1. The weighing component 8 is electrically connected to the power supply 6. The weighing component 8 is used to support the pressure detection component 3. When the pressure detection component 3 is placed on the weighing component 8, the weighing component 8 is triggered to turn on the power supply 6 for power supply.

[0055] Specifically, when the pressure detection component 3 is placed on the weighing component 8, the weighing component 8 senses the contact of the pressure detection component 3, thereby turning on the power supply 6. As the start of the valve leak detection work, the weighing component 8 acts as a power supply 6 switch. Just placing the pressure detection component 3 on the weighing component 8 can automatically turn on the power supply 6 by the weighing component 8 to achieve the power supply work for each component, without the need for manual turning on of each power supply 6, simplifying the operation during valve leak detection and enhancing the user experience of the operator.

[0056] Exemplarily, the arrangement of the plurality of accommodating grooves 1 is in a rectangular array arrangement. Specifically, the rectangular array is: 1*1, 2*2, 3*3, etc. The specific arrangement needs to consider the number of valves 9 to be tested in different batches. When leak detection of a plurality of valves 9 to be tested is carried out, the plurality of valves are respectively placed in the plurality of accommodating grooves 1 in a one-to-one correspondence. In this way, leak detection of a plurality of valves 9 to be tested is carried out simultaneously, which is efficient and accurate.

[0057] As a possible implementation manner, the number of communication components 5 is one or more, and one communication component 5 is communicatively connected to a plurality of alarm components 2. That is, only one communication component 5 may be provided, and this communication component 5 is communicatively connected to the plurality of alarm components 2 located in the plurality of accommodating grooves 1. When the pressure detection component 3 detects a leak in the valve 9 to be tested, the alarm component 2 located in the same accommodating groove 1 as the pressure detection component 3 transmits the position information of the leak in the valve 9 to be tested to the communication component 5 for the user to know; when the timing component 4 reaches the preset detection time, the alarm component 2 located in the same accommodating groove 1 as the timing component 4 transmits the information that the timing component 4 has reached the detection time to the communication component 5 for the user to know; when the gas detection component 7 detects a leak in the valve 9 to be tested, the alarm component 2 located in the same accommodating groove 1 as the gas detection component 7 transmits the position information of the leak in the valve 9 to be tested to the communication component 5 for the user to know. The communication component 5 can distinguish the position information transmitted by different alarm components 2, so as to transmit the position information of the specific leaking valve to the user, or transmit the position information of the accommodating groove 1 where the detection time preset by the timing component 4 has been reached to the user.

[0058] Furthermore, the number of power supplies 6 is one or more. It can be understood that the power supply 6 provides power for each component of the valve leak detection device. The power supply 6 may include a power management system, one or more power supplies 6, and other components associated with generating, managing, and distributing power for the valve leak detection device. Preferably, in this embodiment, one power supply 6 can be used to conductively connect a plurality of components in different accommodating grooves 1 at the same time. The beneficial effect is that the working state of the valve leak detection device can be controlled only by controlling this power supply 6, which simplifies the operation and improves the user experience of the operator.

[0059] Although the present invention has been described in conjunction with various embodiments herein, however, in the process of implementing the claimed invention, those skilled in the art can understand and realize other variations of the disclosed embodiments by viewing the drawings, the disclosure, and the appended claims. In the claims, the word "comprising" does not exclude other elements or steps, and "a" or "one" does not exclude a plurality of situations. A single processor or other unit may implement several functions recited in the claims. Certain measures are recited in mutually different dependent claims, but this does not mean that these measures cannot be combined to produce good results.

[0060] Although the present invention has been described in connection with specific features and their embodiments, it will be apparent that various modifications and combinations can be made without departing from the spirit and scope of the invention. Accordingly, the present specification and the drawings are merely exemplary illustrations of the invention defined by the appended claims and are considered to cover any and all modifications, variations, combinations or equivalents within the scope of the invention. Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention is also intended to include these changes and modifications.

Claims

1. A valve leakage detection device, characterized in that: include: A plurality of accommodating grooves (1), each of the accommodating grooves (1) being used to accommodate a valve (9) to be tested; An alarm component (2), each containing groove (1) is provided with the alarm component (2), the alarm component (2) is used to send out an alarm feature and a position signal, the position signal contains the position information of the corresponding containing groove (1); A pressure detection component (3), each of the accommodating grooves (1) is provided with the pressure detection component (3), the pressure detection component (3) is communicatively connected with the alarm component (2), the pressure detection component (3) is used to detect the pressure at the valve to be tested (9) to detect whether the valve to be tested (9) is leaking, and when the valve to be tested (9) is leaking, the alarm component (2) is triggered to emit the alarm feature and the position signal; A timing component (4), each of the containing grooves (1) is provided with the timing component (4), the timing component (4) is communicatively connected with the alarm component (2), the timing component (4) is used to preset a detection time and trigger the alarm component (2) to emit the alarm feature and the position signal when the detection time is reached; A communication component (5), the communication component (5) being arranged in the receiving groove (1), the communication component (5) being communicatively connected with the alarm component (2), and the communication component (5) being used to receive the position signal and transmit it to a user terminal or a cloud server; A power source (6), the power source (6) being respectively conductively connected to the alarm component (2), the pressure detection component (3), the timing component (4) and the communication component (5).

2. The valve leakage detection device according to claim 1, characterized in that: The alarm component (2) comprises: An alarm unit, the alarm unit is used to emit an audible alarm feature and / or a visual alarm feature; A communication unit, the communication unit is communicatively connected to the communication component (5), and the communication unit is used to send the position signal to the communication component (5).

3. The valve leakage detection device according to claim 1, characterized in that: The pressure detection component (3) comprises: Two pressure sensors (32), the two pressure sensors (32) being respectively arranged at the gas inlet end and the gas outlet end of the valve to be tested (9), and being respectively used to detect the inlet pressure and the outlet pressure of the valve to be tested (9); A pressure detection component (34), the pressure detection component (34) is communicatively connected to the pressure sensor (32) and is communicatively connected to the alarm component (2), and the pressure detection component (34) is used to trigger the alarm component (2) according to a change in the difference in pressure detected by the two pressure sensors (32).

4. The valve leakage detection device according to claim 3, characterized in that: The pressure detection assembly (3) further comprises a one-way valve (31), wherein the one-way valve (31) is arranged at the gas inlet end of the valve to be tested (9) and is used to guide the test gas to the valve to be tested (9).

5. The valve leakage detection device according to claim 4, characterized in that: The pressure detection component (3) further comprises a switch valve (33), wherein the switch valve (33) is arranged at the gas outlet end of the valve to be detected (9) and is used to control the opening and closing of the pressure detection component (3).

6. The valve leakage detection device according to claim 1, characterized in that: The valve leakage detection device further comprises a gas detection component (7), each of the containing grooves (1) is provided with the gas detection component (7), the gas detection component (7) is communicatively connected with the alarm component (2), and the gas detection component (7) is used to trigger the alarm component (2) when leaking gas in the containing groove (1) is detected.

7. The valve leakage detection device according to claim 1, characterized in that: The valve leakage detection device also includes a weighing component (8), each of the accommodating grooves (1) is provided with the weighing component (8), the weighing component (8) is conductively connected to the power supply (6), and the weighing component (8) is used to support the pressure detection component (3) and the valve to be tested (9). When the pressure detection component (3) and the valve to be tested (9) are placed on the weighing component (8), the weighing component (8) is triggered and the power supply (6) is turned on.

8. The valve leakage detection device according to claim 1, characterized in that: The multiple accommodating grooves (1) are arranged in a rectangular array.

9. The valve leakage detection device according to claim 1, characterized in that: The number of the communication components (5) is one or more, and one communication component (5) is communicatively connected to a plurality of the alarm components (2).

10. The valve leakage detection device according to claim 1, characterized in that: The power source (6) is provided in one or more pieces and is electrically connected to the alarm component (2), the pressure detection assembly (3), the timing component (4) and the communication component (5) in one or more receiving grooves (1).

Images