Rapid silicon wafer detection device
By designing an automated rapid detection device for silicon wafers, the problems of high risk and low efficiency of residual detection of surface elements of silicon wafers are solved, and uniform spraying and efficient detection of the drug solution are achieved.
Patent Information
- Application Number
- CN202422117834.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-30
- Publication Date
- 2025-07-01
- Estimated Expiration
- 2034-08-30
AI Technical Summary
In the prior art, the detection of surface elements of silicon wafers has problems of high risk and low efficiency.
A silicon wafer rapid detection device including a workbench, a gantry, a medicine liquid spraying mechanism, a sliding plate, a rotating shaft, a C-shaped frame and a clamping mechanism is designed. By automatically controlling the position of the spray head and the rotation of the silicon wafer, uniform spraying of the medicine liquid is achieved.
The automation of residual detection of surface elements of silicon wafers is achieved, which improves work efficiency and reduces the risk of manual operation.
Smart Images
Figure CN223051301U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon wafer detection, in particular to a rapid silicon wafer detection device. Background Art
[0002] As the most basic material in the semiconductor industry, silicon wafers have many and complex preparation processes. The main preparation processes include: polycrystalline silicon raw materials and dopants are formed into single crystal silicon rods after crystal pulling, and then subsequent processes such as separation cutting, grinding, stick bonding, wire cutting, cleaning, chamfering, polishing, and marking are carried out and processed multiple times to finally obtain silicon wafers with a relatively flat surface and good edge roughness.
[0003] After the silicon wafers are produced, it is necessary to detect the residual elements on their surfaces. The detection is carried out by spraying HF (hydrofluoric acid) solution on the surface of the silicon wafers. The prior art uses manual spraying and pouring of HF solution, which has certain dangers and low work efficiency. Summary of the Utility Model
[0004] In order to overcome the above-mentioned defects existing in the prior art, the utility model provides a rapid silicon wafer detection device.
[0005] The technical solution adopted by the utility model to solve its technical problems is: a rapid silicon wafer detection device, including a workbench, a gantry is fixedly installed on the outside of the workbench, a liquid medicine spraying mechanism is arranged on the gantry, two groups of sliding plates are slidably installed on the upper end of the workbench, a rotating shaft is movably installed on the inner side of each group of sliding plates, a C-shaped frame is fixedly installed on the inner side of the rotating shaft, a clamping mechanism is arranged on the C-shaped frame, and a waste liquid collection component is arranged inside the workbench.
[0006] Further, the liquid medicine spraying mechanism includes a first motor, a lead screw is fixedly connected to the power output shaft of the first motor, the end of the lead screw is movably installed on a fixed block, the fixed block is fixedly installed at the lower end of the gantry, a slider is movably installed on the lead screw, and a spray head is fixedly installed at the lower end of the slider.
[0007] Further, the waste liquid collection component includes a collection tank, the collection tank is arranged in the middle of the workbench, a collection pipe is connected to the bottom of the collection tank, and the collection pipe is connected and communicated with the outside.
[0008] Further, a first telescopic device is fixedly installed on each of the left and right sides of the upper end of the workbench, the telescopic end of the first telescopic device is fixedly installed with a sliding plate, and the sliding plate is located above the collection tank.
[0009] Further, a second motor is fixedly installed at the right end of the right sliding plate, and a rotating shaft is fixedly connected to the power output shaft of the second motor.
[0010] Further, the clamping mechanism includes a second telescopic device, which is fixedly installed at the upper end of the C-shaped frame, and the telescopic end of the second telescopic device is fixedly installed with a pressing plate.
[0011] Further, several groups of elastic components are fixedly installed at the inner bottom of the C-shaped frame, and a placing plate is fixedly installed at the upper end of the elastic components.
[0012] The beneficial effects of the present utility model are as follows: By starting the first telescopic device to adjust the distance between the two C-shaped frames to be applicable to silicon wafers of different diameters, then placing the silicon wafers on the two placing plates, then starting the second telescopic device to make the pressing plate press the silicon wafers, then buffering through the elastic components to prevent the silicon wafers from being damaged, then starting the first motor to adjust the position of the spray head for spraying, and then starting the second motor to rotate the silicon wafers to make the liquid medicine spraying more uniform, realizing automatic detection and improving work efficiency. Description of the Drawings
[0013] The following further describes the present utility model in conjunction with the drawings and embodiments.
[0014] Figure 1 It is a front cross-sectional view of the present utility model;
[0015] Figure 2 It is an enlarged view of part A of the present utility model.
[0016] In the figure: 1. Workbench, 2. Gantry, 3. First motor, 4. Fixed block, 5. Slide block, 6. Lead screw, 7. First telescopic device, 8. Slide plate, 9. Second motor, 10. Rotating shaft, 11. C-shaped frame, 12. Second telescopic device, 13. Pressing plate, 14. Elastic component, 15. Placing plate, 16. Collection tank, 17. Collection pipe, 18. Spray head. Specific Embodiments
[0017] In order to more clearly illustrate the technical solutions of the present utility model, the following further describes the present utility model in conjunction with the drawings. Obviously, the following described drawings are only one embodiment of the present utility model. For those of ordinary skill in the art, without creative efforts, other embodiments obtained based on this drawing and embodiment all belong to the protection scope of the present utility model.
[0018] Such as Figure 1As shown in the figure, the utility model includes a workbench 1. A gantry 2 is fixedly installed on the outer side of the workbench 1. A liquid medicine spraying mechanism is arranged on the gantry 2. The liquid medicine spraying mechanism includes a first motor 3. The first motor 3 is fixedly installed at the lower end of the gantry 2 through bolts. A lead screw 6 is fixedly connected to the power output shaft of the first motor 3. The end of the lead screw 6 is movably installed on a fixed block 4. The fixed block 4 is fixedly installed at the lower end of the gantry 2. A slider 5 is movably installed on the lead screw 6. A spray head 18 is fixedly installed at the lower end of the slider 5.
[0019] As Figure 1 shown, a waste liquid collection assembly is arranged inside the workbench 1. The waste liquid collection assembly includes a collection tank 16. The collection tank 16 is arranged in the middle of the workbench 1. A collection pipe 17 is connected to the bottom of the collection tank 16. The collection pipe 17 is connected and communicated with the outside. A set of first telescopic devices 7 are fixedly installed on the left and right sides of the upper end of the workbench 1 respectively. A sliding plate 8 is fixedly installed at the telescopic end of the first telescopic device 7. The sliding plate 8 is located above the collection tank 16.
[0020] As Figure 1 and Figure 2 shown, a set of rotating shafts 10 are movably installed inside each sliding plate 8. A second motor 9 is fixedly installed at the right end of the right sliding plate 8. A rotating shaft 10 is fixedly connected to the power output shaft of the second motor 9. A C-shaped frame 11 is fixedly installed inside the rotating shaft 10. A clamping mechanism is arranged on the C-shaped frame 11.
[0021] As Figure 1 and Figure 2 shown, the clamping mechanism includes a second telescopic device 12. The second telescopic device 12 is fixedly installed at the upper end of the C-shaped frame 11. A pressing plate 13 is fixedly installed at the telescopic end of the second telescopic device 12. A number of elastic components 14 are fixedly installed at the inner bottom of the C-shaped frame 11. A placing plate 15 is fixedly installed at the upper end of the elastic components 14.
[0022] When the utility model is in use, the distance between the two C-shaped frames 11 is adjusted by starting the first telescopic device 7 to be suitable for silicon wafers of different diameters. Then the silicon wafers are placed on the two placing plates 15. Then the second telescopic device 12 is started to make the pressing plate 13 press the silicon wafers. Then the silicon wafers are buffered by the elastic components 14 to prevent them from being damaged. Then the first motor 3 is started to adjust the position of the spray head 18 for spraying. Then the second motor 9 is started to rotate the silicon wafers to make the liquid medicine spraying more uniform, realizing automatic detection and improving work efficiency.
[0023] The above embodiments are only exemplary embodiments of the present utility model and are not used to limit the present utility model. The protection scope of the present utility model is defined by the claims. Those skilled in the art can make various modifications or equivalent substitutions within the essence and protection scope of the present utility model, and such modifications or equivalent substitutions should also be regarded as falling within the protection scope of the present utility model.
Claims
1. A silicon wafer rapid detection device, comprising a workbench (1), characterized in that: A gantry (2) is fixedly mounted on the outer side of the workbench (1), and a liquid medicine spraying mechanism is arranged on the gantry (2). Two groups of sliding plates (8) are slidably mounted on the upper end of the workbench (1), and a group of rotating shafts (10) are movably mounted on the inner side of each group of sliding plates (8). A C-shaped frame (11) is fixedly mounted on the inner side of the rotating shaft (10), and a clamping mechanism is arranged on the C-shaped frame (11). A waste liquid collection component is arranged inside the workbench (1).
2. A silicon wafer rapid detection device according to claim 1, characterized in that: The liquid medicine spraying mechanism comprises a first motor (3), a lead screw (6) is fixedly connected to the power output shaft of the first motor (3), the end of the lead screw (6) is movably mounted on a fixed block (4), the fixed block (4) is fixedly mounted on the lower end of the gantry (2), a sliding block (5) is movably mounted on the lead screw (6), and a spray head (18) is fixedly mounted on the lower end of the sliding block (5).
3. A silicon wafer rapid detection device according to claim 1, characterized in that: The waste liquid collection component comprises a collection tank (16), wherein the collection tank (16) is arranged in the middle of the workbench (1), and the bottom of the collection tank (16) is connected to a collection pipe (17), and the collection pipe (17) is connected to the outside.
4. A silicon wafer rapid detection device according to claim 3, characterized in that: A set of first telescopic devices (7) is fixedly installed on both sides of the upper end of the workbench (1), and a sliding plate (8) is fixedly installed on the telescopic end of the first telescopic device (7), and the sliding plate (8) is located at the upper end of the collecting trough (16).
5. A silicon wafer rapid detection device according to claim 4, characterized in that: A second motor (9) is fixedly mounted on the right end of the sliding plate (8) on the right side, and a rotating shaft (10) is fixedly connected to the power output shaft of the second motor (9).
6. A silicon wafer rapid detection device according to claim 5, characterized in that: The clamping mechanism comprises a second telescopic device (12), the second telescopic device (12) is fixedly mounted on the upper end of the C-shaped frame (11), and a pressing plate (13) is fixedly mounted on the telescopic end of the second telescopic device (12).
7. A silicon wafer rapid detection device according to claim 6, characterized in that: A plurality of groups of elastic components (14) are fixedly mounted on the inner bottom of the C-shaped frame (11), and a placement plate (15) is fixedly mounted on the upper end of the elastic component (14).