Large-displacement high-precision actuator

Abstract

A large-displacement high-precision actuator comprises an electric driving structure, a piezoelectric stack, a moving part, an upper fixing part and a lower fixing part. The electric driving structure and the piezoelectric stack are fixedly connected with the upper fixing piece, and the driving end of the electric driving structure is connected with the lower fixing piece. And the moving piece is connected with the end part of the piezoelectric stack. In the working process, the lower fixing piece is fixed, the driving end of the electric driving structure drives the upper fixing piece and the piezoelectric stack to move in the direction close to or away from the lower fixing piece, the coarse adjustment effect on the moving piece is achieved, and / or the piezoelectric stack drives the moving piece to move in the direction close to or away from the piezoelectric stack, and the fine adjustment effect on the moving piece is achieved. The efficiency and the precision can be greatly improved after the moving part is subjected to coarse adjustment and fine adjustment.

Description

Technical Field

[0001] The utility model relates to the technical field of actuators, and particularly relates to a large-displacement high-precision actuator. Background Art

[0002] The name of the piezoelectric actuator is combined by its driving power source and its function. "Piezoelectric" refers to its driving source, that is, using PZT piezoelectric ceramics as the driving source to generate motion; while "actuator" is its function, and its moving end can produce an actuating effect, that is, used to carry an object for micro-displacement adjustment. The piezoelectric actuator applies a pre-tightening force to the PZT piezoelectric ceramics and is encapsulated with a metal shell. At the same time, it is equipped with mechanical fixed installation interfaces and load installation interfaces.

[0003] Under normal circumstances, the piezoelectric actuator itself can drive the load for micro-displacement adjustment, and the threaded hole or rod at its moving end can be directly connected to the load. Of course, it can also drive the mechanical structure, and then the mechanical structure completes the motion adjustment.

[0004] Application Publication No. CN118335678A discloses a workpiece suction head assembly, a workpiece picking device and a semiconductor device, which specifically disclose: A workpiece suction head assembly for a workpiece picking device is provided, which may include: a suction head, the suction head is provided with a suction nozzle and a suction hole, and the suction nozzle and the suction hole are communicated; a first actuator, the first actuator is connected to the suction head, and the first actuator is configured to adjust the displacement of the suction head in the first direction x; a second actuator, the second actuator is connected to the suction head, and the second actuator is configured to adjust the displacement of the suction head in the second direction y; wherein, the first direction x and the second direction y are substantially perpendicular, and when the suction head works, both the first direction x and the second direction y are horizontal directions. The workpiece suction head assembly provided by the present disclosure finely adjusts the picking position in the first direction x on the horizontal plane through the first actuator, and finely adjusts the picking position in the second direction y on the horizontal plane through the second actuator to complete accurate picking. Similarly, during the placement process, fine adjustment can also be performed to ensure the accuracy of the bonding lead installation position, ensure the quality of the semiconductor device, improve the yield of the semiconductor device, and greatly reduce the production cost. In some embodiments, the workpiece suction head assembly may further include: a lifter, the lifter is arranged at one end far away from the suction head, and the lifter is configured to adjust the displacement of the suction head in the third direction z; wherein, the first direction x, the second direction y and the third direction z are perpendicular to each other in pairs. Through the lifter, the suction head can be moved along the third direction z, and the power of the lifter is sufficient to drive the suction head, the first actuator and the second actuator to move together, and can accurately control the moving distance to complete the fine adjustment in the third direction z.

[0005] The above-mentioned invention patent can solve the fine adjustment of the device in the x, y, and z-axis directions, but there are still the following problems: In the same direction, since only one piezoelectric actuator is provided in the above-mentioned invention, only one displacement adjustment can be performed. Such a design will result in the device not achieving the expected accuracy in one direction, so it cannot be applied to high-precision equipment. Therefore, it is necessary to invent a component that can achieve both coarse adjustment and fine adjustment in the same direction. Summary of the Utility Model

[0006] Aiming at the problems existing in the above prior art, the purpose of the present utility model is to provide a large-displacement and high-precision actuator that can achieve both coarse adjustment and fine adjustment in the same direction.

[0007] To achieve the above purpose, the technical solution of the present utility model is as follows:

[0008] A large-displacement and high-precision actuator includes an electric drive structure, a piezoelectric stack, a moving member, an upper fixing member, and a lower fixing member; the electric drive structure and the piezoelectric stack are fixedly connected to the upper fixing member, and the drive end of the electric drive structure is connected to the lower fixing member; the moving member is connected to the end of the piezoelectric stack; during operation, the lower fixing member is fixed, and the drive end of the electric drive structure drives the upper fixing member and the piezoelectric stack to move in a direction close to or away from the lower fixing member, and / or the piezoelectric stack drives the moving member to move in a direction close to or away from the piezoelectric stack.

[0009] Further, the electric drive structure is a motor, a rod-shaped structure is provided at the drive end of the motor, and an external thread is provided on the outer wall of the rod-shaped structure.

[0010] Further, a hole-shaped structure is provided on the lower fixing member; an internal thread is provided on the inner wall of the hole-shaped structure, the rod-shaped structure is arranged in the hole-shaped structure, and the internal thread and the external thread are in threaded cooperation. During operation, the rod-shaped structure moves back and forth in the hole-shaped structure.

[0011] Further, the hole-shaped structure is a first through hole.

[0012] Further, the hole-shaped structure is a first blind hole.

[0013] Further, a second through hole is provided on the lower fixing member; the end of the piezoelectric stack and the moving member are arranged in the second through hole and move back and forth in the second through hole.

[0014] Further, the upper fixing member is provided with a third through hole, and the drive end of the electric drive structure is fixedly connected to the third through hole through a fixing structure.

[0015] Furthermore, the inner wall diameter of the third perforation is greater than the diameter of the driving end of the electric drive structure.

[0016] Furthermore, the fixing structure is sleeved on the driving end of the electric drive structure, and the fixing structure is fixedly connected to the lower surface of the upper fixing member.

[0017] Furthermore, the number of the fixing structures is two. The two fixing structures are sleeved on both ends of the driving end of the electric drive structure and are respectively fixedly connected to the upper surface and the lower surface of the upper fixing member.

[0018] Furthermore, on the projection plane of the upper fixing member in the horizontal direction, the projection of the moving member and the projection of the lower fixing member are located below the projection of the upper fixing member.

[0019] Furthermore, on the projection plane of the upper fixing member in the horizontal direction, the projection of the moving member is located above the projection of the upper fixing member, and the projection of the lower fixing member is located below the projection of the upper fixing member.

[0020] Furthermore, the electric drive structure is an electric lead screw, and the driving end of the electric lead screw is threadedly connected to the lower fixing member.

[0021] Furthermore, a baffle is provided on the upper surface of the upper fixing member. The baffle and the upper surface of the upper fixing member form a first placement space and a second placement space; the electric drive structure is arranged in the first placement space, and the piezoelectric stack is arranged in the second placement space.

[0022] Furthermore, the baffle includes a first sub-baffle and a second sub-baffle; one side surface of the first sub-baffle, the top surface of the upper fixing member, and one side surface of the second sub-baffle define the first placement space; the other side surface of the second sub-baffle and the top surface of the upper fixing member define the second placement space.

[0023] The beneficial effects of the present utility model are as follows:

[0024] In the present utility model, the electric drive structure and the piezoelectric stack are fixedly connected to the upper fixing member. The driving end of the electric drive structure is connected to the lower fixing member, and the moving member is arranged at the end of the piezoelectric stack. After starting the electric drive structure, the driving end of the electric drive structure can drive the upper fixing member together with the piezoelectric stack and the moving member to move in a direction close to or away from the lower fixing member, achieving the effect of coarse adjustment. Further, a voltage is applied to the piezoelectric stack to cause it to deform, thereby adjusting the displacement of the moving member and achieving the effect of fine adjustment. After coarse adjustment and fine adjustment, the efficiency and precision of the large-displacement high-precision actuator can be greatly improved. Description of the Drawings

[0025] Figure 1 is a schematic plan view of an embodiment of the present utility model;

[0026] Figure 2 is Figure 1 an exploded structural view of;

[0027] Figure 3 is Figure 1 a top view of the lower fixing member in;

[0028] Figure 4 is Figure 1 a bottom view of the lower fixing member in;

[0029] Figure 5 is a schematic plan view of another embodiment of the present utility model;

[0030] Figure 6 is an exploded structural view of the third embodiment of the present utility model;

[0031] Figure 7 is a schematic three - dimensional view of the fourth embodiment of the present utility model;

[0032] Figure 8 is Figure 7 a bottom view of the lower fixing member in.

[0033] Reference numerals

[0034] 100, large - displacement high - precision actuator; 1, electric drive structure; 2, piezoelectric stack; 3, moving member; 4, upper fixing member; 5, lower fixing member; 6, rod - shaped structure; 61, first rod - shaped structure; 62, second rod - shaped structure; 7, hole - shaped structure; 71, first blind hole; 72, first through - hole; 8, second through - hole; 81, limiting portion; 9, third through - hole; 10, fixing structure; 11, fourth through - hole; 12, baffle; 121, first sub - baffle; 122, second sub - baffle; 123, first placement space; 124, second placement space. Detailed implementation manners

[0035] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "top surface", "bottom surface", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the indicated position or element must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the present utility model.

[0036] In addition, terms such as "first" and "second" are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more such features. In the description of the present utility model, the meaning of "several" is two or more, unless otherwise specifically defined.

[0037] In the present utility model, unless otherwise clearly specified and defined, terms such as "assembled", "connected", and "joined" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may also be a mechanical connection; it may be directly connected or connected through an intermediate medium, and it may be internally connected and communicated between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0038] The following further elaborates on the utility model in conjunction with the accompanying drawings and specific embodiments. The following description is merely exemplary and does not limit the protection scope of the utility model.

[0039] Please refer to Figures 1-4 , a large-displacement high-precision actuator 100, comprising an electric drive structure 1, a piezoelectric stack 2, a moving member 3, an upper fixing member 4, and a lower fixing member 5. The electric drive structure 1 and the piezoelectric stack 2 are fixedly connected to the upper fixing member 4, and the drive end of the electric drive structure 1 is connected to the lower fixing member 5; the moving member 3 is connected to the end of the piezoelectric stack 2; during operation, the lower fixing member 5 is fixed, and the drive end of the electric drive structure 1 drives the upper fixing member 4 and the piezoelectric stack 2 to move in a direction close to or away from the lower fixing member 5, and / or the piezoelectric stack 2 drives the moving member 3 to move in a direction close to or away from the piezoelectric stack 2.

[0040] In this embodiment, the electric drive structure 1 is a motor, and the drive end of the motor is threadedly connected to the lower fixing member 5 through a rod-shaped structure 6, thereby driving the upper fixing member 4 and the piezoelectric stack 2 to move back and forth.

[0041] Specifically, in this embodiment, the rod-shaped structure 6 is divided into upper and lower ends, which are the first rod-shaped structure 61 and the second rod-shaped structure 62 respectively. The first rod-shaped structure 61 is fixedly connected to the driving end of the motor. The diameter of the first rod-shaped structure 61 is larger than that of the second rod-shaped structure 62, and the ratio of the diameters between the first rod-shaped structure 61 and the second rod-shaped structure 62 is at least 2.3:1. This is only an example, and this embodiment is not limited thereto. The outer wall of the first rod-shaped structure 61 is provided with external threads. A hole-shaped structure 7 is provided in the lower fixing member 5. In this embodiment, the hole-shaped structure 7 is a first blind hole 71. The inner wall of the first blind hole 71 is provided with internal threads. The external threads on the outer wall of the first rod-shaped structure 61 will mesh with the internal threads on the inner wall of the first blind hole 71, so that the external threads on the outer wall of the first rod-shaped structure 61 will move along the path of the internal threads on the inner wall of the first blind hole 71. When the first rod-shaped structure 61 rotates, it not only rotates but also moves linearly along the axis of the first blind hole 71. Specifically, when the first rod-shaped structure 61 rotates, the spiral shape of the internal threads on the inner wall of the first blind hole 71 is equivalent to pushing the first rod-shaped structure 61 forward along the inclined plane of the internal threads with the rotating force. Equivalently, when the first rod-shaped structure 61 rotates, due to the combined action of the slopes and frictions of the external and internal threads, the first rod-shaped structure 61 can move linearly along the central axis of the first blind hole 71. Specifically, the pitch of the external threads on the outer wall of the first rod-shaped structure 61 is at least 0.1 mm. This is only an example, and this embodiment is not limited thereto. When the external threads on the outer wall of the first rod-shaped structure 61 cooperate with the internal threads on the inner wall of the first blind hole 71, the first rod-shaped structure 61 can drive the upper fixing member 4 together with the piezoelectric stack 2 and the moving member 3 to move in a direction close to or away from the lower fixing member 5, achieving a coarse adjustment effect.

[0042] Further, when the external threads on the outer wall of the first rod-shaped structure 61 are in threaded engagement with the internal threads on the inner wall of the first blind hole 71 and move a certain distance, the second rod-shaped structure 62 will contact the bottom surface of the first blind hole 71 and finally be tightly pressed. To prevent the first rod-shaped structure 61 from extending too far into the first blind hole 71, causing the upper fixing member 4 to collide or rub against the lower fixing member 5.

[0043] In this embodiment, the moving member 3 is arranged at the lower end of the piezoelectric stack 2. The positional relationship among the moving member 3, the upper fixing member 4, and the lower fixing member 5 is as follows: on the projection plane of the upper fixing member 4 in the horizontal direction, the projections of the moving member 3 and the lower fixing member 5 are located below the projection of the upper fixing member 4. That is, the moving member 3 and the lower fixing member 5 are arranged on the same side.

[0044] Specifically, a second through-hole 8 is provided on the lower fixing member 5. The end of the piezoelectric stack 2 and the moving member 3 are disposed in the second through-hole 8. The piezoelectric stack 2 is spaced apart from the second through-hole 8 by a certain distance, which is approximately 1 mm. This is only for illustration and is not limited in this embodiment. When the rod-shaped structure 6 is threadedly connected to the first through-hole 72, the upper fixing member 4 drives the piezoelectric stack 2 together with the moving member 3 to move back and forth in the second through-hole 8. This is the first moving distance (coarse precision) of the moving member 3. The provision of the second through-hole 8 is equivalent to providing a guiding function for the piezoelectric stack 2, enabling the moving member 3 at the lower end of the piezoelectric stack 2 to be disposed at a specific position.

[0045] Further, when a voltage is applied to the piezoelectric stack 2, the piezoelectric stack 2 deforms and causes the moving member 3 to move a second moving distance. The movement direction of the second moving distance is the same as that of the first moving distance, and the second moving distance is in the unit of micrometers. Therefore, a fine-tuning effect is achieved.

[0046] Still further, a hollow limiting portion 81 is provided in the second through-hole 8. When the piezoelectric stack 2 moves downward to the lower fixing member 5 by a certain distance, the moving member 3 passes through the limiting portion 81 and extends out of the second through-hole 8, and the lower end face of the piezoelectric stack 2 contacts the limiting portion 81.

[0047] In this embodiment, a third through-hole 9 is provided on the upper fixing member 4. The driving end of the motor is disposed in the third through-hole 9. Specifically, the diameter of the driving end of the motor is smaller than the diameter of the third through-hole 9, and the ratio of their diameters is approximately 1:2.5. This is only for illustration and this embodiment is not limited thereto. Therefore, the driving end of the motor needs to be fixedly disposed in the third through-hole 9 of the upper fixing member 4 through the fixing structure 10.

[0048] Specifically, the fixing structure 10 is sleeved on the driving end of the motor, and the fixing structure 10 is fixedly connected to the driving end of the motor (equivalent to the fixing structure 10 tightly wrapping the driving end of the motor). The fixing structure 10 is installed on the driving end of the motor, and the top surface of the fixing structure 10 is fixedly connected to the bottom surface of the upper fixing member 4. When the driving end of the motor is in threaded cooperation with the first blind hole 71 through the rod-shaped structure 6, the upper fixing member 4 moves downward under the action of gravity. However, since the fixing structure 10 is fixedly connected to the driving end of the motor, the fixing structure 10 gives an acting force to the upper fixing member 4 in a direction opposite to the gravity direction of the upper fixing member 4, and this acting force cancels out the gravity of the upper fixing member 4. Therefore, the driving end of the motor can be fixedly connected to the upper fixing member 4.

[0049] Preferably, in this embodiment, there are two fixing structures 10. The two fixing structures 10 are tightly sleeved at both ends of the driving end of the motor at a predetermined distance. This predetermined distance is the distance between the top surface and the bottom surface of the upper fixing member 4. Among them, the bottom surface of the first fixing structure 10 is fixedly connected to the top surface of the upper fixing member 4, and the top surface of the second fixing structure 10 is fixedly connected to the bottom surface of the upper fixing member 4. This design is equivalent to two fixing members "clamping" the upper fixing member 4, thereby fixing the motor in the upper fixing member 4. The advantage of this design is that no matter what direction the large-displacement high-precision actuator 100 is placed, the two fixing members can "clamp" the upper fixing member 4, which can further prevent the output end of the motor from disengaging from the third through hole 9.

[0050] Specifically, the fixing structure 10 can be any one of parts such as bearings and nuts.

[0051] In this embodiment, a fourth through hole 11 is provided on the upper fixing member 4. The piezoelectric stack 2 is disposed in the fourth through hole 11 and abuts against the fourth through hole 11.

[0052] In this embodiment, a baffle 12 is provided on the upper surface of the upper fixing member 4. The baffle 12 and the upper fixing member 4 cooperate to form a first placement space 123 and a second placement space 124. Specifically, the baffle 12 includes a first sub-baffle 121 and a second sub-baffle 122. The first sub-baffle 121 is located at the left edge of the top surface of the upper fixing member 4, and the second sub-baffle 122 is located near the center of the top surface of the upper fixing member 4. The right side surface of the first sub-baffle 121, the top surface of the upper fixing member 4, and the left side surface of the second sub-baffle 122 define the "concave"-shaped first placement space 123. The right side surface of the second sub-baffle 122 and the top surface of the upper fixing member 4 define the "L"-shaped second placement space 124. The motor is disposed in the first placement space 123, and the piezoelectric stack 2 is disposed in the second placement space 124.

[0053] The working principle of the present invention will be introduced below for better understanding of the present invention:

[0054] First, the motor is turned on. The external thread on the outer wall of the first rod-shaped structure 61 at the driving end of the motor meshes with the internal thread on the lower fixing member 5, thereby driving the upper fixing member 4 together with the piezoelectric stack 2 and the moving member 3 at the end of the piezoelectric stack 2 to move a first moving distance in the direction of approaching or departing from the lower fixing member 5, achieving the effect of coarse adjustment. Subsequently, a voltage is applied to the piezoelectric stack 2 to cause it to deform and push the moving member 3 to move a second moving distance, achieving the effect of fine adjustment. Therefore, in the whole process, the moving distance of the moving member 3 is the sum of the first moving distance and the second moving distance.

[0055] In the present utility model, the electric drive structure 1 and the piezoelectric stack 2 are fixedly connected to the upper fixing member 4. The drive end of the electric drive structure 1 is connected to the lower fixing member 5, and the moving member 3 is arranged at the end of the piezoelectric stack 2. After starting the electric drive structure 1, the drive end of the electric drive structure 1 can drive the upper fixing member 4 together with the piezoelectric stack 2 and the moving member 3 to move in a direction close to or away from the lower fixing member 5, achieving the effect of coarse adjustment. Further, a voltage is applied to the piezoelectric stack 2 to cause it to deform, thereby adjusting the displacement of the moving member 3 and achieving the effect of fine adjustment. After coarse adjustment and fine adjustment, the efficiency and precision of the large-displacement high-precision actuator 100 can be greatly improved.

[0056] Please refer to Figure 5 , the present utility model further includes a second embodiment. The difference between the second embodiment and the first embodiment lies in that the installation position of the moving member 3 has changed. Specifically:

[0057] In this embodiment, the positional relationship among the moving member 3, the upper fixing member 4, and the lower fixing member 5 is as follows: on the projection plane of the upper fixing member 4 in the horizontal direction, the projection of the moving member 3 is located above the projection of the upper fixing member 4, and the projection of the lower fixing member 5 is located below the projection of the upper fixing member 4. That is, the moving member 3 and the lower fixing member 5 are arranged on opposite sides of the upper fixing member 4 with the upper fixing member 4 as the midline.

[0058] Therefore, in this embodiment, only the first blind hole 71 needs to be opened on the lower fixing member 5, and there is no need to reserve the position of the second through hole 8, thereby reducing the overall weight of the lower fixing member 5.

[0059] Other technical features and technical effects are basically the same as those in the first embodiment and will not be elaborated here.

[0060] The present utility model further includes a third embodiment. The difference between the third embodiment and the first embodiment lies in that another type of electric drive structure 1 is used. Specifically:

[0061] In this embodiment, the electric drive structure 1 is an electric lead screw, and the drive end of the electric drive structure 1 can be directly threadedly engaged with the internal thread on the inner wall of the first blind hole 71. Therefore, there is no need to provide the rod-shaped structure 6, effectively simplifying the complexity of the entire large-displacement high-precision actuator 100 and reducing the mass of the entire large-displacement high-precision actuator 100. The advantage is that it can improve the convenience during installation and reduce the mechanical structure delay caused by inertia.

[0062] Other technical features and technical effects are basically the same as those in the first embodiment and will not be elaborated here.

[0063] The present utility model further includes a fourth embodiment. The difference between the fourth embodiment and the first embodiment lies in that another type of hole structure 7 is selected. Specifically:

[0064] In this embodiment, the hole-like structure 7 is the first through-hole 72. The first through-hole 72 penetrates the top surface and the bottom surface of the lower fixing member 5. Internal threads are provided on the inner wall of the first through-hole 72, and external threads on the outer wall of the first rod-like structure 61 are threadedly connected to the internal threads on the inner wall of the first through-hole 72. The advantage of this structure is that it reduces the mass of the entire large-displacement high-precision actuator 100 and reduces the delay of the mechanical structure caused by inertia.

[0065] Other technical features and technical effects are basically the same as those in the first embodiment, and will not be elaborated here.

[0066] The present utility model is not limited to the above embodiments. If various modifications or deformations of the present utility model do not depart from the spirit and scope of the present utility model, and if these modifications and deformations fall within the scope of the claims of the present utility model and equivalent technical scope, then the present utility model also intends to include these modifications and deformations.

Claims

1. A large displacement and high precision actuator, characterized in that: include: An electric drive structure, a piezoelectric stack, a moving part, an upper fixing part and a lower fixing part; The electric drive structure and the piezoelectric stack are fixedly connected to the upper fixing member, and the driving end of the electric drive structure is connected to the lower fixing member; The moving member is connected to an end of the piezoelectric stack; During operation, the lower fixing member is fixed, and the driving end of the electric driving structure drives the upper fixing member and the piezoelectric stack to move toward or away from the lower fixing member, and / or the piezoelectric stack drives the movable member to move toward or away from the piezoelectric stack.

2. The large displacement and high precision actuator according to claim 1, characterized in that: The electric drive structure is a motor, a driving end of the motor is provided with a rod-shaped structure, and an outer wall of the rod-shaped structure is provided with an external thread.

3. The large displacement and high precision actuator according to claim 2, characterized in that: The lower fixing member is provided with a hole-shaped structure; The inner wall of the hole-like structure is provided with an internal thread, the rod-like structure is arranged in the hole-like structure, the internal thread and the external thread are threadably matched, and during operation, the rod-like structure moves back and forth in the hole-like structure.

4. The large displacement and high precision actuator according to claim 3, characterized in that: The hole-like structure is a first perforation.

5. The large displacement and high precision actuator according to claim 3, characterized in that: The hole-shaped structure is a first blind hole.

6. The large displacement and high precision actuator according to claim 1, characterized in that: A second through hole is provided on the lower fixing member; The end of the piezoelectric stack and the moving member are disposed in the second through hole and move back and forth in the second through hole.

7. The large displacement and high precision actuator according to claim 1, characterized in that: The upper fixing member is provided with a third through hole, and the driving end of the electric driving structure is fixedly connected to the third through hole via a fixing structure.

8. The large displacement and high precision actuator according to claim 7, characterized in that: The inner wall diameter of the third through hole is larger than the diameter of the driving end of the electric driving structure.

9. The large displacement and high precision actuator according to claim 8, characterized in that: The fixing structure is sleeved on the driving end of the electric driving structure, and the fixing structure is fixedly connected to the lower surface of the upper fixing member.

10. The large displacement and high precision actuator according to claim 8, characterized in that: There are two fixing structures, which are sleeved on both ends of the driving end of the electric driving structure and are fixedly connected to the upper surface and the lower surface of the upper fixing member respectively.

11. The large displacement and high precision actuator according to claim 1, characterized in that: On the projection plane of the upper fixing member in the horizontal direction, the projection of the moving member and the projection of the lower fixing member are located at the lower side of the projection of the upper fixing member.

12. The large displacement and high precision actuator according to claim 1, characterized in that: On the projection plane of the upper fixing member in the horizontal direction, the projection of the moving member is located on the upper side of the projection of the upper fixing member, and the projection of the lower fixing member is located on the lower side of the projection of the upper fixing member.

13. The large displacement and high precision actuator according to claim 1, characterized in that: The electric drive structure is an electric screw, and the driving end of the electric screw is threadedly connected to the lower fixing member.

14. The large displacement and high precision actuator according to claim 1, characterized in that: A baffle is disposed on the upper surface of the upper fixing member, and the baffle and the upper surface of the upper fixing member form a first placement space and a second placement space; The electric drive structure is arranged in the first placement space, and the piezoelectric stack is arranged in the second placement space.

15. The large displacement and high precision actuator according to claim 14, characterized in that: The baffle comprises a first sub-baffle and a second sub-baffle; A side surface of the first sub-baffle, a top surface of the upper fixing member, and a side surface of the second sub-baffle define the first placement space; The other side surface of the second sub-baffle and the top surface of the upper fixing member define the second placement space.

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