Middle supporting device for quartz tube

Abstract

The utility model discloses a quartz tube middle supporting device which comprises a furnace body, a quartz tube is arranged in the furnace body, three supporting mechanisms are arranged between the furnace body and the quartz tube, the three supporting mechanisms are distributed at equal intervals around the circumferential face of the outer side of the quartz tube, each supporting mechanism comprises a sleeve, a lead screw, an arc-shaped plate and a ball, and the inner wall of the furnace body is fixedly connected with the sleeve. The quartz tube is supported by the three supporting mechanisms, and the screw rod is matched with the sleeve, so that the position of the arc-shaped plate can be manually adjusted outside the furnace body, the rotary supporting effect can be achieved in the middle area of the quartz tube and in the furnace body when the ball is attached to the quartz tube, the rotating coaxiality of the quartz tube is kept, and the rotating coaxiality of the quartz tube is kept when the ball is not in contact with the quartz tube. The supporting effect on the middle area of the quartz tube is relieved, the middle area of the quartz tube can be conveniently disassembled outside the furnace body when the quartz tube is overhauled, the phenomenon that the furnace body needs to be disassembled is avoided, and the workload of overhauling the quartz tube is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of quartz sand chlorination purification furnaces, and particularly relates to a middle support device for a quartz tube. Background Art

[0002] The quartz sand chlorination purification furnace is a commonly used purification device in industries such as optics, semiconductors, and microelectronics, used to remove impurities in quartz sand. The quartz tube is one of the important components of the furnace body. The quartz sand is subjected to a chlorination reaction through a rotatable quartz tube under high-temperature conditions.

[0003] The existing position of the coaxial support mechanism for the quartz tube is mainly located at both ends of the furnace body to maintain the coaxiality of the rotation of the quartz tube after installation. However, the middle area of the quartz tube inside the furnace body lacks a coaxial support effect and can only achieve a single support ability for the quartz tube. The difficulty lies in that if a conventional method is used, such as using the support mechanism at both ends of the furnace body inside the furnace as well. However, the quartz tube is easily damaged when used at high temperatures and needs to be disassembled regularly for maintenance. The support mechanisms at both ends of the furnace body are located outside the furnace body, and manual disassembly can be directly carried out outside the furnace body. For the coaxial support mechanism inside the furnace body, if disassembly is required, the furnace body needs to be disassembled first, resulting in a heavy workload.

[0004] Therefore, there is a need for a mechanism that can perform coaxial support on the middle area of the quartz tube inside the furnace body. The purpose is that while this mechanism can maintain the coaxiality of the rotation of the quartz tube, it can also facilitate the disassembly of the quartz tube when the quartz tube is being repaired, and it is convenient to disassemble the middle area of the quartz tube outside the furnace body. Summary of the Utility Model

[0005] To solve the problems existing in the prior art, the utility model provides a middle support device for a quartz tube. The quartz tube is supported by three support mechanisms. The position of the arc-shaped plate can be adjusted manually outside the furnace body through the cooperation of the lead screw and the sleeve. When the ball is in contact with the quartz tube, the middle area of the quartz tube can achieve a rotating support effect inside the furnace body, maintaining the coaxiality of the rotation of the quartz tube. When the ball is not in contact with the quartz tube, the support effect on the middle area of the quartz tube is released, facilitating the disassembly of the middle area of the quartz tube outside the furnace body during the repair of the quartz tube, avoiding the need to disassemble the furnace body, and reducing the workload of repairing the quartz tube.

[0006] To achieve the above object, the utility model provides the following technical solutions:

[0007] A quartz tube middle support device, comprising a furnace body, a quartz tube is arranged inside the furnace body, three support mechanisms are arranged between the furnace body and the quartz tube, and the three support mechanisms are equidistantly distributed around the circumferential surface outside the quartz tube. The support mechanism includes a sleeve, a lead screw, an arc-shaped plate and a ball. The inner wall of the furnace body is fixedly connected with the sleeve, the lead screw is threadedly connected inside the sleeve, the end of the lead screw close to the quartz tube is rotatably connected with the arc-shaped plate, the other end of the lead screw penetrates to the outside of the furnace body, and a plurality of balls are movably embedded on the side of the arc-shaped plate close to the quartz tube, and the balls are in contact with the outer wall of the quartz tube.

[0008] Further, a threaded hole corresponding to the inside of the sleeve is opened on the outer wall of the furnace body, the lead screw penetrates out of the furnace body from the threaded hole, and the lead screw is threadedly connected with the threaded hole.

[0009] Further, a fixing ring is fixedly connected to the end of the lead screw located outside the furnace body.

[0010] Compared with the prior art, the beneficial effects of the present utility model are:

[0011] 1. The quartz tube is supported by three support mechanisms. The lead screw and the sleeve cooperate to enable manual adjustment of the position of the arc-shaped plate outside the furnace body. When the ball is in contact with the quartz tube, a rotating support effect can be achieved in the middle area of the quartz tube inside the furnace body, maintaining the coaxiality of the rotation of the quartz tube. When the ball is not in contact with the quartz tube, the support effect on the middle area of the quartz tube is released, facilitating the disassembly of the middle area of the quartz tube outside the furnace body during the maintenance of the quartz tube, avoiding the need to disassemble the furnace body, and reducing the workload of maintaining the quartz tube.

[0012] 2. By opening the hole as a threaded hole, it is convenient for the opening to cooperate with the lead screw for sealing, and the fixing ring facilitates the screwing of the lead screw. Description of the Drawings

[0013] Figure 1 It is a schematic structural diagram of the present utility model;

[0014] In the figure: 1 furnace body, 2 quartz tube, 3 sleeve, 4 lead screw, 5 arc-shaped plate, 6 ball, 7 fixing ring. Detailed Embodiment

[0015] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present utility model.

[0016] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. Embodiment

[0017] See the attached Figure 1 As shown, a quartz tube middle support device includes a furnace body 1. A quartz tube 2 is arranged inside the furnace body 1. Three support mechanisms are arranged between the furnace body 1 and the quartz tube 2. The three support mechanisms are equidistantly distributed around the circumferential surface outside the quartz tube 2. The support mechanism includes a sleeve 3, a lead screw 4, an arc-shaped plate 5 and a ball 6. The inner wall of the furnace body 1 is fixedly connected with the sleeve 3. The lead screw 4 is threadedly connected inside the sleeve 3. The end of the lead screw 4 close to the quartz tube 2 is rotatably connected with the arc-shaped plate 5. The other end of the lead screw 4 penetrates to the outside of the furnace body 1. A plurality of balls 6 are movably embedded on the side of the arc-shaped plate 5 close to the quartz tube 2. The balls 6 are in contact with the outer wall of the quartz tube 2. A threaded hole corresponding to the inside of the sleeve 3 is opened on the outer wall of the furnace body 1. The lead screw 4 penetrates out of the furnace body 1 from the threaded hole. The lead screw 4 is threadedly connected with the threaded hole. A fixed ring 7 is fixedly connected to the end of the lead screw 4 located outside the furnace body 1.

[0018] Working principle: In this utility model, when installing the quartz tube 2, first pass the quartz tube 2 through the furnace body 1, and use the supporting devices at both ends of the furnace body 1 to install the quartz tube 2. This supporting device can be completely realized by existing technologies. For example, an annular part is rotatably sleeved outside the quartz tube 2, and then the annular part is fixedly installed with the furnace body 1, or two semi-circular parts are buckled outside the quartz tube 2, and then the semi-circular parts are rotatably installed with the furnace body 1. All such methods that can achieve the coaxial rotation support of the quartz tube 2 are acceptable. When supporting the middle area of the quartz tube 2, turn the ends of the three lead screws 4. During the rotation of the lead screws 4, drive the arc-shaped plate 5 to approach the quartz tube 2 along the track of the sleeve 3. The arc-shaped plate 5 drives the ball 6 to move until the balls 6 on the three arc-shaped plates 5 are all in contact with the quartz tube 2. At this time, the middle area of the quartz tube 2 is clamped by the three arc-shaped plates 5, and the coaxial rotation support effect can be achieved. When the quartz tube 2 rotates during operation, the balls 6 roll by friction with the outer wall of the quartz tube 2 to maintain the coaxial rotation of the quartz tube 2. When the quartz tube 2 is overhauled, turn the lead screw 4 located above the furnace body 1. Due to the high temperature in the furnace body 1 being conducted to the lead screw 4, a rod-shaped tool can be passed through the fixed ring 7 to rotate the lead screw 4 in the reverse direction to replace the hand contacting the lead screw 4. The lead screw 4 resets during the reverse rotation, and then the arc-shaped plate 5 on the upper side of the quartz tube 2 no longer clamps the quartz tube 2. Furthermore, the support mechanism in the middle area of the quartz tube 2 no longer limits the quartz tube 2. After the supporting devices at both ends of the furnace body 1 are disassembled, the quartz tube 2 can be taken out of the furnace body 1.

[0019] The above shows and describes the basic principles, main features and advantages of the present utility model. For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic features of the present utility model. Therefore, in any aspect, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present utility model, and any reference signs in the claims should not be regarded as limiting the claimed rights.

[0020] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A quartz tube middle support device, comprising a furnace body (1), wherein a quartz tube (2) is arranged inside the furnace body (1), and is characterized in that: There are three supporting mechanisms provided between the furnace body (1) and the quartz tube (2), and the three supporting mechanisms are equidistantly distributed around the circumferential surface outside the quartz tube (2). The supporting mechanism includes a sleeve (3), a lead screw (4), an arc-shaped plate (5) and a ball (6). The inner wall of the furnace body (1) is fixedly connected with the sleeve (3), the inside of the sleeve (3) is threadedly connected with the lead screw (4), the end of the lead screw (4) close to the quartz tube (2) is rotatably connected with the arc-shaped plate (5), the other end of the lead screw (4) penetrates to the outside of the furnace body (1), and a number of balls (6) are movably embedded on the side of the arc-shaped plate (5) close to the quartz tube (2), and the balls (6) are in contact with the outer wall of the quartz tube (2).

2. The middle support device for a quartz tube according to claim 1, characterized in that: Threaded holes corresponding to the inside of the sleeve (3) are provided on the outer wall of the furnace body (1), the lead screw (4) penetrates out of the furnace body (1) from the threaded holes, and the lead screw (4) is threadedly connected with the threaded holes.

3. The middle support device for a quartz tube according to claim 1, characterized in that: A fixing ring (7) is fixedly connected to the end of the lead screw (4) located outside the furnace body (1).

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