Cutting assembly and wire cutting machine
By setting the flow cover and debris box between the main roller components of the online cutting machine, the problem of cutting liquid droplets falling on the main roller components is solved, and the stable operation of the main roller components and effective protection of the equipment is achieved.
Patent Information
- Application Number
- CN202421866486.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-02
- Publication Date
- 2025-07-04
- Estimated Expiration
- 2034-08-02
AI Technical Summary
During the cutting process of existing wire cutting machines, the cutting liquid can easily fall on the main roller assembly, affecting its stable operation.
A flow cover and a debris box are arranged between the main roller components. The debris box penetrates vertically to collect the cutting fluid and guides it to the bottom of the cutting chamber. The debris box collects the dripping cutting fluid to prevent it from dripping onto the wire net below the main roller.
Effectively reduce or avoid cutting liquid drops on the main roller assembly, ensure the stable operation of the main roller assembly, improve cutting efficiency and equipment protection effect.
Smart Images

Figure CN223058081U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of cutting equipment, and particularly relates to a cutting assembly and a wire cutting machine. Background Art
[0002] Wire cutting is a processing method in which a cutting wire reciprocates at a high speed and moves relative to a workpiece to be cut (such as materials like photovoltaic silicon rods, semiconductors, silicon carbide, sapphires, or magnetic materials), so that the cutting wire cuts the workpiece to be cut.
[0003] Existing wire cutting machines mainly include a main roller assembly. The cutting wire is wound around the main roller assembly to form a wire mesh. During cutting operations, cutting fluid needs to be sprayed for cooling. However, during cutting and spraying, the cutting fluid will fall onto the lower main roller assembly, thereby affecting the stable operation of the main roller assembly.
[0004] Correspondingly, a new technical solution is needed in this field to solve the above problems. Summary of the Utility Model
[0005] In order to solve at least one of the above problems in the prior art, that is, to solve the problem of how to reduce the cutting fluid falling onto the main roller assembly.
[0006] In a first aspect, the present application provides a cutting assembly, including:
[0007] A cutting frame, within which a cutting chamber is formed;
[0008] A main roller assembly, which is installed on the cutting frame. The main roller assembly includes a first main roller and a second main roller. The first main roller and the second main roller are spaced apart along the feeding direction. The number of the first main rollers is two and they are spaced apart along a direction perpendicular to the feeding direction;
[0009] A flow guide cover, which is located between the two first main rollers. The flow guide cover extends along the axial direction of the first main roller. The flow guide cover is penetrated along the feeding direction so that a crystal bar can pass through the flow guide cover; and
[0010] A debris box, which is located below the flow guide cover. The bottom of the debris box is closed, and the top of the debris box has an opening. The cutting fluid falling from the flow guide cover can pass through the opening and enter the debris box.
[0011] By arranging a diversion cover between two first main rollers, the diversion cover penetrates vertically up and down, which can collect the cutting fluid and guide the cutting fluid towards the bottom of the cutting chamber. In addition, a debris box is arranged below the diversion cover, and the debris box can collect the cutting fluid falling from the diversion cover, which is beneficial to reducing or even avoiding the cutting fluid from dripping onto the second main roller and the wire mesh (i.e., the lower main roller assembly) below the second main roller, thereby being beneficial to ensuring the stable operation of the main roller assembly.
[0012] In the preferred technical solution of the above cutting assembly, the number of the second main rollers is two and they are spaced apart in a direction perpendicular to the feeding direction. The debris box is located between the two second main rollers, and water baffle plates extending towards the outside of the debris box are arranged on both sides of the debris box in its width direction, and the water baffle plates are located above the second main rollers.
[0013] By arranging water baffle plates extending towards the outside of the debris box on the debris box and making the water baffle plates located above the second main rollers, it is more beneficial to avoid the cutting fluid from dripping onto the second main roller and improve the protection effect on the main roller assembly.
[0014] In the preferred technical solution of the above cutting assembly, the feeding direction is the vertical direction, and the water baffle plates are arranged to incline upwards in a direction away from the debris box.
[0015] By arranging the water baffle plates to be inclined, the cutting fluid can flow smoothly into the debris box. In addition, it can also reduce the lateral space occupied by the debris box and is more convenient for layout.
[0016] In the preferred technical solution of the above cutting assembly, a water retaining structure is arranged at the edge of the water baffle plate.
[0017] By arranging a water retaining structure at the edge of the water baffle plate, it can ensure that all the cutting fluid on the water baffle plate flows smoothly towards the debris box.
[0018] In the preferred technical solution of the above cutting assembly, the water retaining flanges include two first water retaining flanges spaced apart in the length direction of the debris box, and the first water retaining flanges extend from the end of the water baffle plate away from the debris box to the opening.
[0019] Through the above arrangement, it can prevent the cutting fluid on the water baffle plate from flowing out from the front edge and the rear edge of the water baffle plate, and the water retaining effect is better.
[0020] In the preferred technical solution of the above cutting assembly, the first water retaining flanges are perpendicularly arranged to the water baffle plate.
[0021] By arranging the first water retaining flanges to be perpendicularly to the water baffle plate, the first water retaining flanges can play a better water retaining effect.
[0022] In the preferred technical solution of the above-mentioned cutting assembly, the water baffle flange further includes a second water baffle flange located between the two first water baffle flanges, and both ends of the second water baffle flange are respectively connected to the first water baffle flanges.
[0023] By arranging the second water baffle flange between the two first water baffle flanges, the edge of the water baffle can be completely surrounded, and the water blocking effect is better.
[0024] In the preferred technical solution of the above-mentioned cutting assembly, the top opening of the flow guide cover is larger than the bottom opening of the flow guide cover.
[0025] Through the above setting, more cutting fluid can flow along the flow guide cover to the debris box, further improving the protection effect. In addition, it is also beneficial to enable the ingot to smoothly enter the flow guide cover.
[0026] In the preferred technical solution of the above-mentioned cutting assembly, the debris box includes a box bottom plate and two relatively arranged box side plates, and the bottom of the box side plates is fixedly connected or integrally formed with the box bottom plate.
[0027] Through the above setting, the structure is simpler, the occupied space can be reduced, and it is convenient for layout.
[0028] In the second aspect of the present application, a wire cutting machine is further provided, and the wire cutting machine includes the cutting assembly described in the above technical solution.
[0029] The wire cutting machine further provided in the present application on the basis of the above technical solution includes the above-mentioned cutting assembly, and thus has the technical effects possessed by the above-mentioned cutting assembly. Compared with the wire cutting machine before improvement, the wire cutting machine of the present application can more effectively protect the main roller assembly, is beneficial to avoiding cutting fluid from dripping onto the main roller assembly, and ensures the stable operation of the main roller assembly. Description of the Drawings
[0030] The wire cutting machine of the present application will be described below with reference to the drawings. In the drawings:
[0031] Figure 1 is a schematic structural diagram of the wire cutting machine of the present application;
[0032] Figure 2 is a schematic structural diagram of the cutting assembly of the present application Figure 1 ;
[0033] Figure 3 is a schematic structural diagram of the cutting assembly of the present application Figure 2 ;
[0034] Figure 4 is a schematic structural diagram of the debris box device of the present application;
[0035] Figure 5Structural schematic diagram of the spray degumming device of the present application;
[0036] Figure 6 Structural schematic of the cutting assembly of the present application Figure 3 ;
[0037] Figure 7 Structural schematic of the cutting assembly of the present application Figure 4 ;
[0038] Figure 8 Structural schematic of the cutting assembly of the present application Figure 5 ;
[0039] Fig. 9 Structural schematic of the cutting assembly of the present application Figure 6 ;
[0040] Fig.10 Structural schematic diagram of the track, moving trolley and chain of the cutting assembly of the present application;
[0041] Fig.11 Structural schematic diagram of the chain of the second drive assembly of the present application;
[0042] Fig.12 Structural schematic of the water retaining device of the present application Figure 1 ;
[0043] Fig.13 Structural schematic of the water retaining device of the present application Figure 2 ;
[0044] Fig.14 Cross-sectional view of the water retaining device of the present application;
[0045] Fig.15 Top view of the guide plate of the water retaining device of the present application;
[0046] Fig.16 Top view of the water retaining block of the water retaining device of the present application.
[0047] Reference numerals list
[0048] 10. Cutting frame; 11. Discharge port; 13. First main roller; 14. Second main roller; 15. Wire mesh; 16. Collection member; 17. Crystal bar;
[0049] 20. Feeding device;
[0050] 21. Deflector; 22. Debris box; 211. Long plate; 212. Short plate; 213. Hanging ear; 2111. Flanging structure; 221. Water baffle; 222. Box bottom plate; 223. Box side plate; 2211. First water baffle flange; 2212. Second water baffle flange; 2221. Connecting flange; 2222. Connecting column;
[0051] 3. Spray degumming device; 31. Spray pipe; 32. Nozzle; 33. Protective member; 331. First guard plate; 332. Second guard plate;
[0052] 41. Rail; 42. Mobile trolley; 43. Sprocket; 44. Chain; 45. Second motor; 46. Driving pulley; 47. Driven pulley; 48. Timing belt; 49. Storage box; 411. Horizontal guide rail; 412. Strip-shaped groove; 4121. Straight section; 4122. Arc section; 441. Body; 442. Rotating shaft; 443. Roller;
[0053] 51. Lifting seat; 52. First motor; 53. Lift; 54. Guide post; 55. Linear bearing; 56. Fixed seat;
[0054] 6. Clamping assembly; 61. Airbag; 62. Clamping plate; 621. Elastic buffer pad;
[0055] 7. Water retaining device; 71. First water retaining member; 72. Second water retaining member; 73. Third water retaining member; 74. Guide plate; 75. Fixed bracket; 711. First water baffle; 712. Second water baffle; 713. Connecting plate; 714. Third water baffle; 741. First guide groove; 742. Second guide groove; 743. Guide rib; 731. Third guide groove; 751. Water receiving groove;
[0056] 81. First diversion plate; 82. Second diversion plate; 83. Diversion box; 811. First bottom plate; 812. First side plate; 813. First end plate; 814. First diversion opening; 821. Second bottom plate; 822. Second side plate; 823. Second end plate. Detailed implementation manners
[0057] The following describes the preferred implementation manners of the present application with reference to the accompanying drawings. Those skilled in the art should understand that these implementation manners are only used to explain the technical principle of the present application and are not intended to limit the protection scope of the present application.
[0058] It should be noted that in the description of the present application, terms indicating directions or positional relationships such as "left" and "right" are based on the directions or positional relationships shown in the drawings. This is only for convenience of description and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.
[0059] In addition, it should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "installation", "setting", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific situations.
[0060] Specifically, this application provides a wire cutting machine. As Figure 1 shown, the wire cutting machine of this application includes a cutting assembly, a feeding device 20, and a wire winding assembly (not shown in the figure).
[0061] Among them, the cutting assembly includes a plurality of main rollers and main roller motors for driving the main rollers to rotate. The plurality of main rollers are generally arranged in parallel and are located in the cutting chamber of the wire cutting machine. The plurality of main roller motors are respectively drivingly connected to the corresponding main rollers, and the main roller motors can drive their respective main rollers to rotate. Cutting wires are arranged on the main rollers, and the cutting wires are spirally arranged on the plurality of main rollers at a certain distance to form a wire mesh 15. Multi-wire cutting work is achieved through the grinding between the wire mesh 15 and the ingot 17.
[0062] It should be noted that the number of main rollers can be three, four, etc. Correspondingly, the number of main roller motors for driving the main rollers to rotate can also be three, four, etc. Such adjustments and changes to the specific number of main rollers do not deviate from the principle and scope of this application and should all be limited within the protection scope of this application.
[0063] Among them, the wire winding assembly includes a wire pay-off and take-up mechanism and a tension mechanism. The wire pay-off and take-up mechanism is used for paying off and taking up the cutting wire. The number of wire pay-off and take-up mechanisms is two, which are respectively located on both sides of the cutting assembly. During the working process, one is used for paying off the cutting wire, and the other is used for taking up the cutting wire. The tension mechanism is used for controlling the tension of the cutting wire to ensure that the entire cutting wire is stretched and tightened by the tension during the running process.
[0064] Among them, the wire pay-off and take-up mechanism includes a wire roller and a wire roller motor for driving the wire roller to rotate. The cutting wire is wound around the wire roller. When the wire roller motor drives the wire roller to rotate forward, the wire roller is in the wire pay-off state. When the wire roller motor drives the wire roller to rotate backward, the wire roller is in the wire take-up state.
[0065] Among them, the tension mechanism includes a tension swing rod, a tension guide wheel, and a swing rod motor for driving the tension swing rod to swing. The bottom end of the tension swing rod is fixedly connected to the output shaft of the swing rod motor, and the tension guide wheel is rotatably installed at the top end of the tension swing rod.
[0066] It should be noted that, in addition to the wire winding and unwinding mechanism and the tension mechanism described above, the wire winding assembly further includes a wire arranging mechanism and a turning wheel mechanism. Among them, the wire arranging mechanism is installed between the wire roller and the tension mechanism and is used to wind the cutting wire on the wire roller with a certain pitch. The turning wheel mechanism is installed between the tension mechanism and the main roller and is used to change the direction of the cutting wire so that the cutting wire can be smoothly wound on the main roller. The wire cutting machine of the present application can adopt wire arranging mechanisms and turning wheel mechanisms of any structural form in the prior art.
[0067] In order to solve the problem of low cutting efficiency existing in the existing wire cutting machines, the present application provides a brand-new cutting assembly. As shown in Figure 1 , Figure 2 , Figure 3 and Figure 7 , the cutting assembly of the present application includes a cutting frame 10, a blanking device, and a main roller assembly and a degumming device installed on the cutting frame 10.
[0068] Among them, a cutting chamber is formed inside the cutting frame 10. An outlet 11 communicating with the cutting chamber is provided on the cutting frame 10. The main roller assembly is located inside the cutting chamber. Each main roller in the main roller assembly is rotatably arranged between two opposite side walls of the cutting frame 10. The cutting wire is wound around the main roller assembly to form a wire mesh 15. A feed opening communicating with the cutting chamber is formed at the top of the cutting frame 10. The feed device 20 of the wire cutting machine is installed at the feed opening at the top and can perform a feed movement in the vertical direction.
[0069] It should be noted that the feed direction is not limited to the vertical direction. For example, it can also be fed horizontally or obliquely. The technical solution of the present application will be further described below by taking the vertical feed as an example.
[0070] A wafer bar assembly can be installed on the feed device 20. As shown in Figure 3 , the wafer bar assembly includes a plurality of wafer bars 17 adhesively bonded together in the vertical direction. The feed device 20 is used to feed the wafer bar assembly towards the wire mesh 15. The wire mesh 15 can cut the wafer bar into a plurality of silicon wafers. The degumming device can degum the cut silicon wafers. The blanking device can receive the degummed silicon wafers and transport the silicon wafers outside the cutting chamber.
[0071] It should be noted that those skilled in the art can also install only one wafer bar on the feed device 20 in actual applications.
[0072] Preferably, as shown in Figure 3 and Figure 7As shown, the blanking device includes a collection member 16. The collection member 16 is located in the cutting chamber and corresponds to the discharge port 11. More specifically, the collection member 16 is located in the space surrounded by the wire mesh 15. The collection member 16 is used to collect the degummed wafers, and the collection member 16 can pass through the discharge port 11 to transport the collected wafers outside the cutting chamber.
[0073] It should be noted that multiple ingots 17 (such as two, three, or four, etc.) are bonded together along the feeding direction to form an ingot assembly. Adjacent ingots 17 are bonded by glue to form an adhesive layer. The axes of all the ingots 17 are arranged in the vertical direction. The feeding device 20 drives the ingot assembly to feed towards the wire mesh 15, and during the feeding process, multiple ingots 17 are successively cut into multiple wafers by the wire mesh 15, improving the cutting efficiency.
[0074] Preferably, as Figure 2 and Figure 3 shown, the main roller assembly of the present application includes a first main roller 13 and a second main roller 14. The first main roller 13 and the second main roller 14 are spaced apart along the feeding direction. The number of the first main rollers 13 is two and they are spaced apart along the direction perpendicular to the feeding direction. The number of the second main rollers 14 is two and they are spaced apart along the direction perpendicular to the feeding direction.
[0075] Among them, the plane where the axes of the two first main rollers 13 are located is perpendicular to the feeding direction, and the plane where the axes of the two second main rollers 14 are located is also perpendicular to the feeding direction. For example, if the feeding direction is the vertical direction, the two first main rollers 13 are spaced apart along the horizontal direction and are at the same horizontal height, and the two second main rollers 14 are also spaced apart along the horizontal direction and are at the same horizontal height.
[0076] That is to say, the main roller assembly of the present application includes four main rollers arranged in parallel. Among them, two first main rollers are located above, and two second main rollers are located below. An upper wire mesh is formed between the two first main rollers 13, and a lower wire mesh is formed between the two second main rollers 14. The upper wire mesh is used to cut the ingot 17, which can also be called the cutting section. The collection member 16 is located between the upper wire mesh and the lower wire mesh and is used to collect the wafers.
[0077] It should be noted that the number of the second main rollers 14 is not limited to the above two. For example, only one second main roller can also be provided.
[0078] In addition, it should also be noted that the specific structural form of the collection member 16 is not limited in the present application. For example, those skilled in the art can set the collection member 16 as a shell structure ( Figure 7 the collection member 16 shown in Figure 8The collecting member 16 shown in [description] is a frame structure. Alternatively, the collecting member 16 can also be set as a flat plate structure, etc. Such adjustments and changes to the specific structural form of the collecting member 16 do not deviate from the principles and scope of this application and should all be defined within the protection scope of this application.
[0079] Preferably, as Figure 3 shown, the wire mesh wrap angle of the first main roller 13 and / or the wire mesh wrap angle of the second main roller 14 is not less than 80°.
[0080] By defining the wire mesh wrap angle of the main rollers (the first main roller 13 and the second main roller 14) as not less than 80°, it can ensure that there is sufficient friction between the main rollers and the wire mesh 15, which is beneficial to avoiding wire jumping and slipping and ensuring the normal operation of the main roller assembly.
[0081] Among them, as Figure 3 shown, taking the first main roller 13 as an example, there are two tangent points between the cutting line and the first main roller 13. The included angle α between the connecting lines of the two tangent points and the axis of the first main roller 13 is the wire mesh wrap angle of the first main roller 13. Or, it can also be understood as the angle corresponding to the contact arc length between the cutting line and the first main roller 13. The same applies to the second main roller 14.
[0082] Preferably, as Figure 7 shown, the collecting member 16 of this application is a housing with a closed bottom and four sides, and the top of the housing has an opening allowing the ingot 17 to pass through.
[0083] That is to say, the bottom and four sides of the housing are closed. By setting the collecting member 16 as a closed housing, some cutting fluid can be injected into the housing. When the silicon wafer falls into the housing, the cutting fluid can play a buffering role to prevent the silicon wafer from being damaged.
[0084] Exemplarily, the collecting member 16 is a rectangular housing, and a receiving cavity is formed inside the housing to accommodate the cut silicon wafers. The top of the receiving cavity is open, and after the cut silicon wafers are degummed, they can directly fall into the receiving cavity of the housing.
[0085] Preferably, as Figure 3 shown, the horizontal distance between the two second main rollers 14 is greater than the horizontal distance between the two first main rollers 13.
[0086] By increasing the horizontal distance between the two second main rollers 14, the collecting member 16 has a larger installation space, which is convenient for layout, and is also convenient for collecting silicon wafers and transporting the silicon wafers outside the cutting chamber.
[0087] Preferably, as Figures 2 to 4 shown, the cutting assembly of this application further includes a debris box device, and the debris box device is installed in the cutting chamber.
[0088] Among them, the debris box device is fixedly connected to the cutting frame 10, the main body part of the debris box device is also located within the space enclosed by the wire mesh 15, and the collection member 16 is located within the debris box device.
[0089] Preferably, as Figure 3 and Figure 4 shown, the debris box device of the present application includes a diversion cover 21 and a debris box 22 located below the diversion cover 21.
[0090] Among them, both the top and bottom of the diversion cover 21 are open, the diversion cover 21 is located between the two first main rollers 13, the debris box 22 is located between the two second main rollers 14, and the collection member 16 is located within the debris box 22.
[0091] That is to say, the diversion cover 21 is vertically through, and with such a setting, the ingot 17 can pass through the diversion cover 21. Both the diversion cover 21 and the debris box 22 extend along the axis direction of the first main roller 13. The diversion cover 21 is located below the upper wire mesh and is mainly used for guiding the cutting fluid. The cutting fluid can drip along the inner wall of the diversion cover 21 into the debris box 22, preventing the cutting fluid from flowing onto the first main roller 13. The two ends of the debris box 22 in the length direction are preferably set to be open, so that the cutting fluid in the debris box 22 can flow back to the bottom of the cutting chamber and allows the collection member 16 to pass through. The top of the debris box 22 has an opening, and the cutting fluid falling from the diversion cover 21 can pass through the opening and enter the debris box 22. The bottom of the debris box 22 is closed, which can prevent the cutting fluid from falling onto the wire mesh located at the bottom of the second main roller 14.
[0092] Preferably, as Figure 3 and Figure 4 shown, water baffle plates 221 extending towards the outside of the debris box 22 are provided on both sides of the debris box 22 of the present application in the width direction, and the water baffle plates 221 are located above the second main roller 14.
[0093] By providing the water baffle plates 221 on the debris box 22 and making the water baffle plates 221 located above the second main roller 14, it is possible to prevent the cutting fluid from dripping onto the second main roller 14.
[0094] Preferably, as Figure 3 and Figure 4 shown, the top opening of the diversion cover 21 is larger than the bottom opening of the diversion cover 21.
[0095] By increasing the size of the top opening of the diversion cover 21, more cutting fluid can enter the diversion cover 21. At the same time, it is also more conducive to enabling the ingot 17 to pass through the diversion cover 21 smoothly.
[0096] Exemplarily, as Figure 4As shown, the fairing 21 includes two relatively arranged long plates 211 and two relatively arranged short plates 212. Hanging ears 213 are provided on the short plates 212, and the hanging ears 213 are fixedly connected to the inner wall of the cutting chamber. The two long plates 211 and the two short plates 212 together enclose a box structure, and the cross-section of the box structure is rectangular. At the top of each of the two long plates 211, there is a flanging structure 2111 extending obliquely outward, thereby increasing the size of the top opening of the fairing 21.
[0097] Preferably, as Figure 3 and Figure 4 shown, the water baffle 221 of the present application is arranged obliquely upward in a direction away from the debris box 22.
[0098] By arranging the water baffle 221 obliquely, the cutting fluid can flow smoothly into the debris box 22. In addition, it can also reduce the lateral space occupied by the debris box 22, making it more convenient for layout.
[0099] Exemplarily, as Figure 3 shown, two water baffles 221 are provided at the top of the debris box 22. The water baffle 221 on the left side inclines towards the upper left, and the water baffle 221 on the right side inclines towards the upper right. The two water baffles 221 are arranged in an inverted "V" shape to converge the cutting fluid dripping from above into the debris box 22.
[0100] Preferably, as Figure 3 and Figure 4 shown, a water retaining structure is provided at the edge of the water baffle 221 of the present application.
[0101] By providing a water retaining structure at the edge of the water baffle 221 and extending the water retaining structure upward, it can ensure that the cutting fluid on the water baffle 221 flows smoothly into the debris box 22.
[0102] It should be noted that the water retaining structure can be a flanging formed by bending the edge of the water baffle upward, or it can also be set as a raised water retaining rib, etc. Such adjustments and changes to the specific structural form of the water retaining structure do not deviate from the principle and scope of the present application and should be limited within the protection scope of the present application.
[0103] Preferably, as Figure 3 and Figure 4 shown, the water retaining structure of the present application includes two first water retaining flangings 2211 spaced apart along the length direction of the debris box 22, and the first water retaining flangings 2211 extend from the end of the water baffle 221 away from the debris box 22 to the opening at the top of the debris box 22.
[0104] That is to say, a first water retaining flange 2211 is provided at each of the two edges distributed along the length direction of the water retaining plate 221. The first water retaining flange 2211 extends along the width direction of the water retaining plate 221 and extends from the top end of the water retaining plate 221 to the opening at the top of the debris box 22.
[0105] Preferably, as Figure 3 and Figure 4 shown, the first water retaining flange 2211 of the present application is perpendicularly arranged to the water retaining plate 221.
[0106] By arranging the first water retaining flange 2211 perpendicularly to the water retaining plate 221, a better water retaining effect can be achieved.
[0107] Preferably, as Figure 3 and Figure 4 shown, the water retaining structure of the present application further includes a second water retaining flange 2212 located between the two first water retaining flanges 2211. The two ends of the second water retaining flange 2212 are respectively connected to the two first water retaining flanges 2211.
[0108] That is to say, the second water retaining flange 2212 extends along the length direction of the water retaining plate 221. The extending direction of the second water retaining flange 2212 is perpendicular to the extending direction of the first water retaining flange 2211. In this way, the water retaining plate 221 can be surrounded, and the water retaining effect is better.
[0109] Preferably, as Figure 3 and Figure 4 shown, the second water retaining flange 2212 of the present application is inclined towards the outside of the debris box 22.
[0110] By arranging the second water retaining flange 2212 to be inclined outwards, the water retaining plate 221 can receive more cutting fluid.
[0111] Wherein, the inclination angle (the included angle with the vertical direction) of the second water retaining flange 2212 is smaller than the inclination angle of the water retaining plate 221. Exemplarily, the inclination angle of the water retaining plate 221 is 45 degrees, and the inclination angle of the second water retaining flange 2212 is 10 degrees.
[0112] Preferably, as Figure 4 shown, the debris box 22 of the present application includes a box bottom plate 222 and two relatively arranged box side plates 223. The bottom of the box side plate 223 is fixedly connected or integrally provided with the box bottom plate 222. The water retaining plate 221 extends from the top of the box side plate 223 towards the outside of the debris box 22.
[0113] Exemplarily, as Figure 4As shown, the box bottom plate 222 is a rectangular plate and is horizontally arranged. The two box side plates 223 are also rectangular plates and are spaced apart along the width direction of the box bottom plate 222. The two box side plates 223 are vertically arranged and are respectively connected to both sides of the box bottom plate 222 in the width direction. The collecting member 16 is located between the two box side plates 223. A water baffle 221 extending outwardly and obliquely is provided at the top of each box side plate 223. The two ends of the debris box 22 in the length direction are open. Each end of the box bottom plate 222 is provided with a connecting flange 2221 bent downward. A connecting post 2222 extending horizontally is provided on the connecting flange 2221. The connecting post 2222 is fixedly connected to the cutting frame 10. The two ends of the second water baffle flange 2212 are also fixedly connected to the cutting frame 10, for example, by screw connection.
[0114] Preferably, as Figure 1 and Figure 3 shown, the degumming device of the present application is arranged between the first main roller and the second main roller, and is also located between the diversion cover 21 and the debris box 22. When the ingot 17 is cut or nearly cut, the degumming device is started to perform degumming operation on the ingot 17, so that the ingot 17 falls into the collecting member 16 below.
[0115] In the technical solution of the present application, by arranging the degumming device and the collecting member 16 on the cutting frame 10, the degumming and collection of the cut ingot 17 can be realized without stopping the machine during the cutting process, which is beneficial to greatly improving the cutting efficiency of the wire cutting machine and reducing the process flow.
[0116] It should be noted that the present application does not limit the specific type of the degumming device. For example, those skilled in the art can adopt a laser degumming device or a spray degumming device, etc.
[0117] In the first preferred embodiment, as Figure 5 and Figure 6 shown, the degumming device of the present application is set as a spray degumming device 3. The spray degumming device 3 is connected to the cutting frame 10 and is used to spray degumming liquid on the ingot 17 to degum the cut ingot 17. In the present application, the degumming liquid can be selected according to the specific type of the glue layer, and those skilled in the art can flexibly choose. For example, when the glue layer uses water-soluble glue, the degumming liquid can be selected from pure water, tap water or cutting fluid, etc.
[0118] Furthermore, as Figure 3 、 Figure 5 and Figure 6 shown, the spray degumming device 3 of the present application includes a spray assembly connected to the cutting frame 10. The spray assembly is communicated with the degumming liquid source, and the spray assembly is used to spray degumming liquid on the ingot 17.
[0119] Among them, the spraying component is located between the first main roller 13 and the second main roller 14. When the cutting of the ingot 17 is completed or nearly completed, the spraying degumming device 3 is started, and the spraying component sprays the cutting fluid onto the adhesive layer of the ingot 17.
[0120] It should be noted that the present application does not limit the structural form of the spraying component. For example, those skilled in the art can set the spraying component as a structure of a spraying pipe + nozzle, or set it as a structure with spraying holes opened on the spraying pipe, or set it as a structure of a spraying shower head, and so on.
[0121] Furthermore, as Figure 3 and Figure 5 shown, the spraying component of the present application includes a spraying pipe 31 connected to the cutting frame 10 and a nozzle 32. The spraying pipe 31 is communicated with the degumming liquid source, and one end of the nozzle 32 is communicated with the spraying pipe 31.
[0122] Exemplarily, as Figure 3 and Figure 5 shown, the spraying pipe 31 is located between the first main roller 13 and the second main roller 14, and is arranged closer to the first main roller 13. The spraying pipe 31 extends along the axial direction of the first main roller 13. After the spraying degumming device 3 is started, the degumming liquid from the degumming liquid source enters the spraying pipe 31, and then is ejected by the nozzle 32 and sprayed onto the adhesive layer of the ingot 17.
[0123] Among them, the water flow ejected by the nozzle 32 is a conical jet surface, and the taper of the conical jet surface is preferably 60°, which has a large coverage range and is beneficial to improving the processing efficiency.
[0124] Furthermore, as Figure 3 and Figure 5 shown, the nozzle 32 is arranged towards the cutting section of the wire mesh 15.
[0125] Among them, the cutting section of the wire mesh 15 refers to the wire mesh between the two first main rollers 13, and this section of the wire mesh is used for cutting. Viewed from Figure 3 above, the cutting section of the wire mesh 15 is located above the nozzle 32. Therefore, the nozzle 32 is arranged obliquely upward.
[0126] By arranging the nozzle 32 towards the cutting section of the wire mesh 15, the degumming liquid ejected by the nozzle 32 can contact the adhesive layer on the ingot 17 as early as possible, which is beneficial to improving the processing efficiency.
[0127] It should be noted that the present application does not limit the angle between the nozzle 32 and the horizontal direction (i.e., the inclination angle of the nozzle 32). For example, those skilled in the art can set the angle between the nozzle 32 and the horizontal direction to 20°, 50° or 70°, and so on.
[0128] Furthermore, as Figure 3As shown, the included angle between the nozzle 32 and the horizontal direction is 30° to 60°.
[0129] By limiting the included angle between the nozzle 32 and the horizontal direction to 30° to 60°, the nozzle 32 can cover a larger degumming range, thereby further improving the processing efficiency.
[0130] Wherein, the included angle between the nozzle 32 and the horizontal direction is the included angle between the axis direction of the nozzle 32 and the horizontal direction.
[0131] It should be noted that the present application does not limit the specific number of nozzles 32. For example, those skilled in the art can set multiple nozzles 32 in actual applications, or only one nozzle 32 can be set. In the case of setting one nozzle 32, it is preferably to set a sliding mechanism to drive the nozzle 32 to reciprocate along the length direction of the collecting member 16.
[0132] Furthermore, as Figure 5 shown, the number of nozzles 32 is multiple, and the multiple nozzles 32 are spaced apart along the length direction of the spray pipe 31.
[0133] Wherein, the spray pipe 31 extends along the length direction of the collecting member 16, and multiple nozzles 32 are spaced apart along the length direction of the spray pipe 31. The distance between two adjacent nozzles 32 can be determined according to the coverage range of the nozzle 32.
[0134] Furthermore, as Figure 3 shown, the number of spray pipes 31 is two and they are spaced apart horizontally.
[0135] Wherein, the two spray pipes 31 are respectively located on both sides of the collecting member 16 in the width direction, and the nozzles 32 on the two spray pipes 31 are arranged oppositely and all spray towards the side close to the collecting member 16. In this way, degumming can be realized simultaneously from two directions, thereby greatly improving the degumming efficiency.
[0136] It should be noted that in the present application, the length direction of the collecting member 16 is parallel to the axial direction of the first main roller 13, and the width direction of the collecting member 16 is perpendicular to the axial direction of the first main roller 13 and is horizontal.
[0137] Furthermore, as Figure 3 and Figure 5 shown, the spray degumming device 3 of the present application further includes a protective member 33. The protective member 33 is located between the spray assembly and the main roller assembly, and the protective member 33 can block the degumming liquid sprayed from the spray assembly from spraying onto the main roller assembly.
[0138] By arranging the protective member 33 between the spray assembly and the main roller assembly, the cutting liquid can be blocked to prevent the cutting liquid from spraying onto the main roller assembly, effectively protecting the main roller assembly.
[0139] Specifically, as Figure 3 shown, the protection member 33 is located between the nozzle 32 and the first main roller 13, and can effectively protect the first main roller 13. In the case where two spray pipes 31 are provided, the number of protection members 33 is also two. The two protection members 33 are respectively located between the corresponding nozzles 32 and the first main roller 13 to protect both first main rollers 13.
[0140] Furthermore, the protection member 33 is connected to the spray pipe 31.
[0141] Exemplarily, as Figure 5 and Figure 6 shown, both ends of the spray pipe 31 are fixedly installed on the cutting frame 10 through connectors, and the protection member 33 is fixedly installed on the spray pipe 31.
[0142] It should be noted that those skilled in the art can, in actual applications, connect the protection member 33 to the cutting frame 10 through connectors and fixedly install the spray pipe 31 on the protection member 33. Or, the protection member 33 and the spray pipe 31 can also be set as a split type, and the protection member 33 is directly connected to the cutting frame 10 through connectors, etc.
[0143] Of course, in this application, it is preferably to connect the protection member 33 and the spray pipe 31 together and then install them on the cutting frame 10 together. In this way, it is beneficial to ensure a stable positional relationship between the protection member 33 and the nozzle 32, play a better protection role, and is also beneficial to improving the assembly efficiency.
[0144] Furthermore, as Figure 3 shown, the top of the protection member 33 extends to the flow guide cover 21.
[0145] By extending the top of the protection member 33 to the flow guide cover 21, there is no longer a gap between them in the vertical direction, and a better protection effect can be achieved.
[0146] It should be noted that in actual applications, the top of the protection member 33 can be in contact with the bottom of the flow guide cover 21, or the top of the protection member 33 can also be in contact with the side of the flow guide cover 21, that is, there is a part of overlap between them in the vertical direction.
[0147] Furthermore, as Figure 3 and Figure 5 shown, the protection member 33 of this application includes a first guard plate 331. The first guard plate 331 is located above the spray pipe 31, and the extending direction of the cross-section of the first guard plate 331 is inclined towards the wire mesh between the two first main rollers 13. The first guard plate 331 is located between the nozzle 32 and the first main roller 13.
[0148] Compared with setting the first guard plate 331 horizontally or vertically, by setting the first guard plate 331 to incline upward, it is possible to not only reduce the influence on the spraying range of the nozzle 32, but also reduce the vertical space occupied by the first guard plate 331, which is convenient for layout. Among them, it is preferred that the top of the first guard plate 331 extends to the flow guide cover 21. In addition, the first guard plate 331 extends along the length direction of the spray pipe 31, and the length of the first guard plate 331 is preferably greater than or equal to the length of the spray pipe 31.
[0149] Furthermore, the angle between the first guard plate 331 and the horizontal direction is greater than the angle between the nozzle 32 and the horizontal direction.
[0150] That is to say, the inclination direction of the first guard plate 331 is not parallel to the inclination direction of the nozzle 32, and the inclination angle of the first guard plate 331 is greater than the inclination angle of the nozzle 32. In this way, it is possible to further reduce or even eliminate the influence on the spraying range of the nozzle 32 and ensure that the nozzle 32 has the maximum spraying range.
[0151] Among them, the specific value of the angle between the extending direction of the first guard plate 331 and the extending direction of the nozzle 32 can be determined through experiments.
[0152] Furthermore, as Figure 3 and Figure 5 shown, the protection member 33 of the present application further includes a second guard plate 332. The second guard plate 332 is located on the side of the spray pipe 31 away from the nozzle 32. The top of the second guard plate 332 is fixedly connected or integrally provided with the bottom of the first guard plate 331, and the extending direction of the second guard plate 332 intersects with the extending direction of the first guard plate 331.
[0153] That is to say, the second guard plate 332 extends downward from the bottom of the first guard plate 331. In this way, it is possible to prevent the cutting fluid reflected from the ingot 17 from splashing onto the wire mesh 15 between the first main roller 13 and the second main roller 14. In addition, it is also possible to guide the degumming fluid blocked by the first guard plate 331 to the bottom of the cutting chamber.
[0154] Furthermore, as Figure 3 and Figure 5 shown, the second guard plate 332 is arranged in the vertical direction.
[0155] By arranging the second guard plate 332 in the vertical direction, it is possible to make the second guard plate 332 have the maximum protection range.
[0156] It should be noted that those skilled in the art can also make the second guard plate 332 incline downward toward the side close to the nozzle 32 in actual application. From Figure 3Viewed from above, the second guard plate 332 on the left side is inclined downward to the right, and the second guard plate 332 on the right side is inclined downward to the left. In this way, it is more conducive to guiding the cutting fluid to the bottom of the cutting chamber and preventing the cutting fluid from dropping onto the second main roller 14.
[0157] In addition, it should be noted that the protective member 33 includes a first guard plate 331 and a second guard plate 332. Only the first guard plate 331 or the second guard plate 332 can be connected to the spray pipe 31, or both the first guard plate 331 and the second guard plate 332 can be connected to the spray pipe 31 at the same time.
[0158] In the second preferred embodiment, the debonding device of the present application is a laser generator. The number of laser generators is two and they are respectively located on both sides of the width direction of the collection member 16. A sliding mechanism is provided between the two side walls of the cutting frame 10 opposite to the length direction of the collection member 16. The sliding mechanism is selected as an electric cylinder, and the two laser generators are respectively fixed on the corresponding sliding mechanisms.
[0159] During the debonding process, the two electric cylinders drive the two laser generators to move along the length direction of the collection member 16. The two laser generators respectively emit laser from both sides of the crystal bar assembly to the same glue layer. The chemical bonds of the glue are destroyed by the cavitation erosion effect of the laser, causing cavitation inside the glue layer and generating tiny holes. The liquid can quickly enter the inside of the glue layer, causing the glue layer to fall off from the silicon wafer, and finally realizing the debonding of the silicon wafer.
[0160] Of course, the specific setting method of the above laser generator is not fixed. Those skilled in the art can adjust it so that the present application is applicable to more specific application scenarios. For example, the laser generator can also be fixedly arranged or rotated around a rotating shaft instead of being movably arranged. When fixedly arranged, multiple laser generators need to be set, or the laser range generated by the laser generator is controlled to be sufficient to cause the entire glue layer to fall off. For another example, the number of laser generators can be set to at least one, and of course, more can also be set. The setting positions of the laser generators, in addition to being distributed on both sides of the collection member 16, can also be located on the same side or outside both ends of the length direction of the collection member 16. Of course, being located on the same side or outside both ends of the length direction of the collection member 16 is not conducive to realizing rapid debonding. For another example, in addition to using an electric cylinder, the sliding mechanism can also use a cylinder or a hydraulic cylinder, etc.
[0161] Preferably, as Figure 7 and Figure 8 shown, the blanking device of the present application further includes a first driving component, and the first driving component can drive the collection member 16 to move up and down in the vertical direction.
[0162] By setting the first driving component to drive the collecting component 16 to move up and down, it is convenient to adjust the vertical distance between the collecting component 16 and the ingot 17 according to specific situations, which is beneficial to safely collect the silicon wafers and prevent the silicon wafers from being damaged due to too large a distance from the collecting component 16.
[0163] It should be noted that the present application does not limit the specific structural form of the first driving component. For example, those skilled in the art can set the first driving component as a motor driving component, a hydraulic driving component or a pneumatic driving component, etc. Such adjustments and changes to the specific structural form of the first driving component do not deviate from the principle and scope of the present application and should all be limited within the protection scope of the present application.
[0164] Preferably, as Figure 2 、 Figures 7 to 11 shown, the blanking device of the present application further includes a second driving component, and the second driving component can drive the collecting component 16 to move from the discharge port 11 to the outside of the cutting chamber.
[0165] After all the silicon wafers after debonding have fallen into the collecting component 16, the second driving component drives the collecting component 16 to pass through the discharge port 11 and move to the outside of the cutting chamber.
[0166] It should be noted that the present application does not limit the specific structural form of the second driving component. For example, those skilled in the art can set the second driving component as a motor driving component, a hydraulic driving component or a pneumatic driving component, etc. Such adjustments and changes to the specific structural form of the second driving component do not deviate from the principle and scope of the present application and should all be limited within the protection scope of the present application.
[0167] Preferably, as Figures 7 to 10 shown, the blanking device of the present application further includes a track 41 and a moving trolley 42. Among them, the collecting component 16 is placed on the moving trolley 42, the moving trolley 42 is located on the track 41, a part of the track 41 passes through the discharge port 11 and extends into the cutting chamber, the second driving component is connected to the moving trolley 42 and can drive the moving trolley 42 to move along the track 41.
[0168] Exemplarily, as Figure 3 、 Figures 7 to 10As shown in the figure, the second driving component is installed on the rail 41. A horizontal guide rail 411 is provided on the rail 41. The second driving component can drive the moving trolley 42 to move along the horizontal guide rail 411. A debris box 22 is installed between the two second main rollers 14. The discharge port 11 on the cutting frame 10 is arranged opposite to the debris box 22. The rail 41 is horizontally arranged, and a part of the rail 41 passes through the discharge port 11 and extends into the debris box 22. The first driving component is located outside the cutting chamber and is supported under the other part of the rail 41. Driven by the first driving component, the rail 41, the moving trolley 42, the second driving component and the collecting member 16 move up and down together. The discharge port 11 is rectangular and extends in the vertical direction, allowing the rail 41 to move up and down. Wheels are installed on both sides of the bottom of the moving trolley 42, enabling the moving trolley 42 to move smoothly on the horizontal guide rail 411.
[0169] After the silicon wafer falls into the collecting member 16, the first driving component drives the rail 41 and the second driving component, the moving trolley 42 and the collecting member 16 on the rail 41 to move downward. After moving to the set initial position, the first driving component stops running, and the second driving component is started to pull the moving trolley 42 and the collecting member 16 on the moving trolley 42 to move along the rail 41, pass through the discharge port 11 and reach the outside of the cutting chamber. Then, the collecting member 16 and the silicon wafer on the collecting member 16 are taken off the moving trolley 42 together. Then, an empty collecting member 16 is placed on the moving trolley 42. The collecting member 16 taken off the moving trolley 42 is transferred to a dedicated wafer-taking station, and then the silicon wafer is taken out of the collecting member 16.
[0170] It should be noted that those skilled in the art can cancel the setting of the moving trolley 42 in actual applications. In this case, the second driving component can be directly connected to the collecting member 16.
[0171] Preferably, as Figure 7 and Figure 8 shown, the blanking device of the present application further includes a lifting seat 51 and a guiding mechanism. The rail 41 is installed on the lifting seat 51. The first driving component is connected to the lifting seat 51 and can drive the lifting seat 51 to move up and down in the vertical direction. The guiding mechanism is used to guide the lifting seat 51.
[0172] Exemplarily, as Figure 7 and Figure 8As shown, the blanking device of the present application further includes a fixed seat 56. The fixed seat 56 is fixedly connected to the cutting frame 10. The lifting seat 51 is fixedly installed at the bottom of the track 41. The guiding mechanism includes a plurality of vertically arranged guiding columns 54 and linear bearings 55 sleeved on each guiding column 54. The top of the guiding column 54 is fixedly connected to the lifting seat 51. The linear bearings 55 and the first driving assembly are fixedly installed on the fixed seat 56. During the process of the first driving assembly driving the lifting seat 51 to move up and down, the guiding column 54 slides up and down in the linear bearing 55 to guide the lifting seat 51.
[0173] It should be noted that the guiding mechanism is not limited to the combination form of the guiding column 54 and the linear bearing 55 introduced above. For example, the linear bearing 55 can be replaced with a guiding cylinder, or the guiding mechanism can be set as a structural form in which a guiding groove formed on the cutting frame 10 cooperates with a guiding block provided on the lifting seat 51, etc. Such adjustments and changes to the specific structural form of the guiding mechanism do not deviate from the principle and scope of the present application and should all be limited within the protection scope of the present application.
[0174] In addition, it should also be noted that the fixed seat can be cancelled. In this case, the first driving assembly and the guiding mechanism can be installed on the base of the wire cutting machine.
[0175] In addition, it should also be noted that the present application does not limit the structural form of the first driving assembly. For example, those skilled in the art can set the first driving assembly as a motor driving assembly, a hydraulic driving assembly or a pneumatic driving assembly, etc. Such adjustments and changes to the specific structural form of the first driving assembly do not deviate from the principle and scope of the present application and should all be limited within the protection scope of the present application.
[0176] Preferably, as Figure 7 and Figure 8 shown, the first driving assembly of the present application includes a first motor 52 and a lifter 53 connected to the lifting seat 51. The first motor 52 is drivingly connected to the lifter 53.
[0177] Exemplarily, the lifter 53 is a ball screw lifter. The first motor 52 drives the lifting seat 51 to move up and down through the ball screw lifter.
[0178] It should be noted that the lifter 53 is not limited to the above-mentioned ball screw lifter. For example, a worm screw lifter can also be used.
[0179] Preferably, as Figures 7 to 11 shown, the second driving assembly of the present application includes a second driving mechanism, a sprocket 43 and a chain 44 meshing with the sprocket 43. The chain 44 is connected to the moving trolley 42. The second driving mechanism is connected to the sprocket 43 and can drive the sprocket 43 to rotate.
[0180] When the collecting member 16 needs to be moved outside the cutting chamber, the second driving mechanism drives the sprocket 43 to rotate, and the sprocket 43 moves with the chain 44, and the chain 44 pulls the moving trolley 42 and the collecting member 16 on the moving trolley 42 to move together.
[0181] For example, Figure 7 and Figure 8 As shown, the sprocket 43 is pivotally mounted on the track 41 and is located at the outer end of the track 41 (from Figure 7 The second drive mechanism is also mounted on the track 41, and the right end of the chain 44 is connected to the outer end of the moving trolley 42 (from the left end). Figure 7 The left end (as viewed from above) is fixedly connected.
[0182] It should be noted that the present application does not limit the structural form of the second drive mechanism. For example, a person skilled in the art may set the second drive mechanism to be in the structural form of a motor + gear transmission group, or to be in the structural form of a motor + synchronous belt transmission group, etc. Such adjustments and changes to the specific structural form of the second drive mechanism do not deviate from the principle and scope of the present application, and should be limited within the protection scope of the present application.
[0183] Preferably, if Figure 7 and Figure 8 As shown, the second driving mechanism of the present application includes a second motor 45, a driving pulley 46, a driven pulley 47 and a synchronous belt 48 for connecting the driving pulley 46 and the driven pulley 47. The driving shaft of the second motor 45 is connected to the driving pulley 46, and the driven pulley 47 is installed on the sprocket 43.
[0184] For example, Figure 7 and Figure 8 As shown, the second motor 45 is fixedly mounted at the bottom of the track 41, the driving shaft of the second motor 45 is horizontally arranged, specifically extending along the width direction of the track 41, the driving pulley 46 is fixedly mounted on the driving shaft, the driven pulley 47 is fixedly mounted on the side of the sprocket 43, and the driving pulley 46 and the driven pulley 47 are connected by a synchronous belt 48. The second motor 45 drives the driving pulley 46 to rotate, and the driving pulley 46 drives the driven pulley 47 and the sprocket 43 to rotate synchronously through the synchronous belt 48.
[0185] Preferably, if Figures 9 to 11As shown, the chain 44 of the present application includes a plurality of pivotally connected chain monomers. Each chain monomer includes a body 441, a rotating shaft 442 horizontally installed within the body 441, and rollers 443 installed at both ends of the rotating shaft 442. A chain guide rail is further provided on the track 41. The chain guide rail includes two strip-shaped grooves 412 spaced apart along the width direction of the track 41. One side of the two strip-shaped grooves 412 close to each other is open. The rollers 443 are located within the strip-shaped grooves 412. The dimension of the strip-shaped groove 412 in the vertical direction matches the dimension of the roller 443 in the vertical direction to confine the roller 443 within the strip-shaped groove 412.
[0186] Exemplarily, as Figures 9 to 11 shown, the chain monomers extend along the length direction of the track 41. Adjacent chain monomers are pivotally connected. An installation hole is provided at the middle position of each chain monomer. The installation hole extends along the width direction of the track 41. The rotating shaft 442 is installed within this installation hole and can rotate. Two strip-shaped grooves 412 are provided on the track 41. The two strip-shaped grooves 412 are spaced apart along the width direction of the track 41. The chain 44 is located between the two strip-shaped grooves 412. One side of the two strip-shaped grooves 412 close to each other is open, that is, the cross-section of the strip-shaped groove 412 is approximately C-shaped, so that the roller 443 can extend into the corresponding strip-shaped groove 412. The dimension of the strip-shaped groove 412 in the vertical direction, that is, the distance between the top wall and the bottom wall of the strip-shaped groove 412, matches the height of the roller 443. In this way, the chain 44 also has the function of pushing the moving trolley 42. After taking out the silicon wafer on the collecting member 16, under the drive of the second driving mechanism, the moving trolley 42 and the collecting member 16 on the moving trolley 42 can also be pushed back into the cutting chamber by the chain 44.
[0187] Preferably, as Figure 7 shown, the strip-shaped groove 412 on the track 41 includes a straight segment 4121 and an arc segment 4122. One end of the straight segment 4121 is connected to the top end of the arc segment 4122. The arc segment 4122 corresponds to the sprocket 43.
[0188] Exemplarily, as Figure 7 shown, the arc segment 4122 is located at the outer end of the track 41. The sprocket 43 is located between the two arc segments 4122. The other end of the chain 44 extends out from the bottom end of the arc segment 4122.
[0189] Preferably, as Figure 7 and Figure 8 shown, the second driving assembly of the present application further includes a storage box 49 for storing the chain 44. The storage box 49 is located below the sprocket 43. The top of the storage box 49 has an opening allowing the chain 44 to pass through.
[0190] By providing a storage box 49 below the sprocket 43, the chain 44 extending from the bottom end of the arc section 4122 enters the storage box 49, preventing the chain 44 from swinging randomly.
[0191] Preferably, as Fig. 9 shown, the blanking device of the present application further includes a clamping mechanism installed on the collecting member 16, and the clamping mechanism is used to clamp the ingot 17 located on the collecting member 16.
[0192] By clamping the silicon wafer with the clamping mechanism, it is possible to prevent the silicon wafer from tipping over, avoiding damage to the silicon wafer.
[0193] It should be noted that the present application does not limit the structural form of the clamping mechanism. For example, those skilled in the art can set the clamping mechanism as a motor clamping mechanism, a hydraulic clamping mechanism, or a pneumatic clamping mechanism, etc. Such adjustments and changes to the specific structural form of the clamping mechanism do not deviate from the principle and scope of the present application and should all be limited within the protection scope of the present application.
[0194] Preferably, as Fig. 9 shown, the clamping mechanism of the present application includes two relatively arranged clamping components 6, and relative movement can occur between the two clamping components 6 in a direction close to / away from each other to clamp / loosen the silicon wafer.
[0195] Exemplarily, the two clamping components 6 are relatively arranged along the width direction of the collecting member 16. When the silicon wafer falls into the collecting member 16, the two clamping components 6 move relatively in a direction close to each other to clamp the silicon wafer in the collecting member 16. When the second driving component moves the collecting member 16 outside the cutting chamber and transfers the collecting member 16 and the silicon wafer to a dedicated wafer-taking station, the two clamping components 6 move in a direction away from each other to loosen the silicon wafer, and then the silicon wafer in the collecting member 16 is taken out.
[0196] It should be noted that the two clamping components 6 can also be relatively arranged along the length direction of the collecting member 16. Of course, it is preferably to arrange the two clamping components 6 relatively along the width direction of the collecting member 16, as this setting is less likely to damage the silicon wafer.
[0197] Preferably, as Fig. 9 shown, the clamping component 6 of the present application includes an airbag 61, an air pump (not shown in the figure) communicated with the airbag 61, and a clamping plate 62, and one side of the clamping plate 62 is connected to the airbag 61.
[0198] Exemplarily, the airbag 61 is fixedly installed on the inner sidewalls of the collecting member 16 distributed in the width direction. The airbag 61 is communicated with an air pump through an air pipe. The clamping plate 62 is fixedly connected to the inner side surface of the airbag 61. The clamping plate 62 is located between the silicon wafer and the airbag 61 and can provide rigid support for the silicon wafer. For example, it is set as a rectangular steel plate, etc. The clamping plate 62 extends along the length direction of the collecting member 16, and the length of the clamping plate 62 is slightly greater than the length of the crystal bar 17. When it is necessary to clamp the silicon wafer in the collecting member 16, the air pumps of the two clamping assemblies 6 respectively inflate their respective airbags 61, so that the two clamping plates 62 move towards the silicon wafer simultaneously to clamp the silicon wafer. When it is necessary to take out the silicon wafer, the exhaust valve on the airbag 61 can be opened to discharge the gas in the airbag 61, thereby loosening the silicon wafer.
[0199] It should be noted that the airbag 61 can realize the functions of clamping and loosening through the switching of two modes of positive pressure and negative pressure. Or, springs can also be installed inside the airbag 61 or between the airbag 61 and the collecting member 16. The airbag 61 is inflated by positive pressure to clamp the silicon wafer, and the airbag 61 is loosened by the spring compressing after the air supply stops, etc. Such flexible adjustments and changes do not deviate from the principle and scope of this application and should all be limited within the protection scope of this application.
[0200] Preferably, as Fig. 9 shown, an elastic buffer structure is provided on the other side (i.e., the inner side surface) of the clamping plate 62 of this application.
[0201] By providing an elastic buffer structure on the inner side surface (the side close to the silicon wafer) of the clamping plate 62, the silicon wafer can be better protected and damage to the silicon wafer can be prevented.
[0202] It should be noted that this application does not limit the specific structural form of the elastic buffer structure. For example, the elastic buffer structure can be set as a plurality of elastic dot-shaped protrusions, or set as an elastic buffer pad, etc.
[0203] Preferably, as Fig. 9 shown, the elastic buffer structure of this application is an elastic buffer pad 621.
[0204] Exemplarily, the elastic buffer pad 621 is made of polyurethane material.
[0205] Preferably, as Figure 2 and Figure 7 shown, the cutting assembly of this application further includes a water blocking device 7. The water blocking device 7 is installed at the discharge port 11 to prevent the cutting fluid in the cutting chamber from overflowing from the discharge port 11.
[0206] Among them, the water blocking device 7 is arranged around the track 41 of the blanking device to prevent the cutting fluid in the cutting chamber from overflowing through the gap between the discharge port 11 and the track 41, and the water blocking device 7 can move up and down along the vertical direction with the track 41.
[0207] It should be noted that those skilled in the art can set the water blocking device 7 as an integral annular structure surrounding the track 41 in practical applications. Or, the water blocking device 7 can also be set to include multiple split water blocking structures, which are respectively arranged above, below and on the side of the track 41, etc. Such flexible adjustments and changes do not deviate from the principle and scope of this application and should all be limited within the protection scope of this application.
[0208] Preferably, as Figure 7 、 Figure 12 to Figure 14 shown, the water blocking device 7 of this application includes a first water blocking member 71. The first water blocking member 71 is located above the track 41, and the bottom of the first water blocking member 71 abuts against the top surface of the track 41. The first water blocking member 71 can move up and down along the vertical direction together with the track 41.
[0209] Through such a setting, when it is necessary to open the discharge port 11, only the first water blocking member 71 needs to be lifted, without other operations, which improves work efficiency.
[0210] Under the action of its own gravity, the first water blocking member 71 abuts against the top surface of the track 41. When the track 41 rises, the track 41 supports the first water blocking member 71 to rise together. When the track 41 descends, the first water blocking member 71 descends together with the track 41 under the action of its own gravity.
[0211] Preferably, as Figure 7 、 Figure 12 to Figure 14 shown, the water blocking device 7 of this application further includes a second water blocking member 72. The second water blocking member 72 is located below the track 41, and the top of the second water blocking member 72 is connected to the bottom surface of the track 41. The second water blocking member 72 can expand and contract with the lifting of the track 41.
[0212] Among them, the bottom of the second water blocking member 72 is fixed. When the track 41 rises, the second water blocking member 72 extends and becomes longer as the track 41 rises, closing the part of the discharge port 11 below the track 41. When the track 41 descends, the second water blocking member 72 is compressed and shortened.
[0213] Preferably, as Figure 7 、 Figure 12 to Figure 14As shown, the water retaining device 7 of the present application further includes a third water retaining member 73. The third water retaining member 73 is located on the side of the track 41 and is connected to the side surface of the track 41. The third water retaining member 73 can move up and down in the vertical direction together with the track 41.
[0214] Among them, the first water retaining member 71, the second water retaining member 72, and the third water retaining member 73 are three independent members, which are respectively used to retain water on the upper, lower, and side surfaces of the track 41. When the first driving assembly drives the track 41 to move up and down, the first water retaining member 71, the second water retaining member 72, and the third water retaining member 73 can all move up and down together with the track 41. In this way, during the cutting process, the discharge port 11 is always in a closed state, and the water retaining effect is better.
[0215] Preferably, as Figure 12 to Figure 14 shown, the water retaining device 7 of the present application further includes a guiding member, which is used to guide the first water retaining member 71, the second water retaining member 72, and the third water retaining member 73 during the up and down movement.
[0216] By arranging the guiding member to guide the first water retaining member 71, the second water retaining member 72, and the third water retaining member 73, the first water retaining member 71, the second water retaining member 72, and the third water retaining member 73 will not deviate during the up and down movement, thus playing a more stable water retaining role.
[0217] It should be noted that the present application does not limit the specific structural forms of the first water retaining member 71, the second water retaining member 72, and the third water retaining member 73. For example, they can be set as water retaining plates, water retaining blocks, or water retaining covers, etc., as long as they can achieve the water retaining function.
[0218] In addition, it should also be noted that those skilled in the art can install the first water retaining member 71, the second water retaining member 72, and the third water retaining member 73 inside the cutting chamber during actual application. Or, the first water retaining member 71, the second water retaining member 72, and the third water retaining member 73 can also be installed between the track 41 and the inner wall of the discharge port 11. Or, the first water retaining member 71, the second water retaining member 72, and the third water retaining member 73 can also be installed outside the cutting chamber, etc. Such flexible adjustments and changes do not deviate from the principle and scope of the present application and should all be limited within the protection scope of the present application.
[0219] Preferably, as Figures 12 to 15 shown, the guiding member of the present application is provided with a first guiding groove 741 on the side facing the track 41. The first guiding groove 741 extends in the vertical direction, and the edge of the first water retaining member 71 is located in the first guiding groove 741.
[0220] Exemplarily, as Figures 12 to 15 As shown, both the guiding member and the first water blocking member 71 are located outside the cutting chamber. The guiding member includes two vertically arranged guiding plates 74, which are respectively located on both sides of the rail 41. On the side of the guiding plate 74 facing the rail 41, there is a vertically extending first guiding groove 741. The left and right edges of the first water blocking member 71 are respectively located in the corresponding first guiding grooves 741. The width of the first guiding groove 741 matches the thickness of the edge of the first water blocking member 71. By guiding the first water blocking member 71 with the first guiding groove 741, it is beneficial to prevent the cutting fluid inside the first water blocking member 71 from flowing to the outside of the first water blocking member 71 along the edge of the first water blocking member 71, and the waterproof effect is better.
[0221] Preferably, as Figures 12 to 15 shown, on the side of the guiding member of the present application facing the rail 41, there is a second guiding groove 742, which extends in the vertical direction, and the edge of the second water blocking member 72 is located in the second guiding groove 742.
[0222] Exemplarily, as Figures 12 to 15 shown, the second water blocking member 72 is also located outside the cutting chamber. On the side of the guiding plate 74 facing the rail 41, there is also a vertically extending second guiding groove 742. The left and right edges of the second water blocking member 72 are respectively located in the corresponding second guiding grooves 742. Among them, the first guiding groove 741 and the second guiding groove 742 can be located in the same vertical plane, and the bottom end of the first guiding groove 741 is communicated with the top end of the second guiding groove 742, or, as Fig.15 shown, the first guiding groove 741 and the second guiding groove 742 can be arranged in a horizontal offset manner.
[0223] Preferably, as Figures 12 to 16 shown, on the side of the guiding member of the present application facing the rail 41, there is a guiding rib 743, which extends in the vertical direction. The third water blocking member 73 is provided with a third guiding groove 731 at a position corresponding to the guiding rib 743, and the guiding rib 743 is adapted to the third guiding groove 731.
[0224] Exemplarily, as Figures 12 to 16As shown, the first guiding groove 741 and the second guiding groove 742 on the guiding plate 74 are distributed at intervals in the horizontal direction. The part between the first guiding groove 741 and the second guiding groove 742 forms a guiding rib 743. A part of the third water blocking member 73 is located between the side of the track 41 and the side wall of the discharge port 11 and is attached to the side wall of the discharge port 11. Another part of the third water blocking member 73 is located outside the cutting chamber and between the track 41 and the guiding plate 74. A vertically extending third guiding groove 731 is provided at this part. The guiding rib 743 is located in the third guiding groove 731, which can play a guiding role and also a waterproof role while guiding.
[0225] Preferably, the first water blocking member 71 of the present application is located outside the cutting chamber.
[0226] By arranging the first water blocking member 71 outside the cutting chamber, when it is necessary to move the collecting member 16 outside the cutting chamber, it is convenient to lift the first water blocking member 71, thereby opening the discharge port 11. That is to say, the first water blocking member 71 is equivalent to a door, closing the part of the discharge port 11 above the track 41. Among them, when it is necessary to open the discharge port 11, the first water blocking member 71 can be lifted manually, automatically or semi-automatically.
[0227] Preferably, as Figure 12 to Figure 14 shown, the first water blocking member 71 of the present application includes a vertically arranged first water blocking plate 711, a vertically arranged second water blocking plate 712 and a connecting plate 713 for connecting the first water blocking plate 711 and the second water blocking plate 712. The first water blocking plate 711 and the second water blocking plate 712 are distributed at intervals along the length direction of the track 41. The first water blocking plate 711 is located between the second water blocking plate 712 and the cutting frame 10.
[0228] By arranging the first water blocking plate 711 and the second water blocking plate 712 distributed at intervals along the length direction of the track 41, double protection can be formed, and the water blocking effect is better.
[0229] Exemplarily, as Figure 12 to Figure 14 shown, the tops of the first water blocking plate 711 and the second water blocking plate 712 are connected by a horizontally arranged connecting plate 713. The two sides of the first water blocking plate 711 and the second water blocking plate 712 are respectively connected by a vertically arranged connecting plate 713. The width of the second water blocking plate 712 is greater than the width of the first water blocking plate 711. The edge of the second water blocking plate 712 is located in the first guiding groove 741.
[0230] Preferably, as Fig.10 and Fig.12As shown, the horizontal guide rail 411 on the rail 41 is a rail groove formed on the top surface of the rail 41. The first water retaining member 71 further includes a third water baffle 714. The third water baffle 714 is installed on the second water baffle 712, and the third water baffle 714 can move up and down relative to the second water baffle 712 so that the bottom of the third water baffle 714 can abut against the bottom wall of the rail groove.
[0231] Under normal working conditions, there is less cutting fluid on the rail 41, and the bottom of the third water baffle 714 is flush with or slightly higher than the bottom of the second water baffle 712. When there is more cutting fluid on the rail 41, the third water baffle 714 can be moved down so that the bottom of the third water baffle 714 crosses the bottom of the second water baffle 712 and abuts against the bottom wall of the rail groove on the rail 41 to block the cutting fluid and prevent the cutting fluid from flowing outwards, achieving a better water retaining effect.
[0232] Exemplarily, as Fig.10 shown, two rail grooves are formed on the top surface of the rail 41, and the two rail grooves are spaced apart along the width direction of the rail 41. As Fig.12 shown, the third water baffle 714 is arranged in an inverted U shape and can just be inserted into the two rail grooves.
[0233] Preferably, as Figure 12 to Figure 14 shown, the second water retaining member 72 of the present application is a bellows shield, and the top of the bellows shield is fixedly connected to the bottom surface of the rail 41.
[0234] Among them, the bellows shield can stretch / compress in the vertical direction, and the bottom end of the bellows shield is fixed. When the rail 41 rises, the bellows shield stretches and becomes longer as the rail 41 rises to enclose the part of the discharge port 11 located below the rail 41. When the rail 41 descends, the bellows shield is compressed and becomes shorter.
[0235] It should be noted that those skilled in the art can install the bellows shield inside the cutting chamber in actual application. Or, the bellows shield can also be installed between the rail 41 and the bottom wall of the discharge port 11. Or, the bellows shield can also be installed outside the cutting chamber. Such adjustments and changes to the specific installation position of the bellows shield do not deviate from the principle and scope of the present application and should all be limited within the protection scope of the present application.
[0236] Preferably, the bellows shield of the present application is located outside the cutting chamber.
[0237] Preferably, as Figure 12 to Figure 14As shown, the water retaining device 7 of the present application also includes a fixing frame 75 fixedly connected to the cutting frame 10, the guide member and the second water retaining member 72 are installed on the fixing frame 75, and a water receiving groove 751 is provided at the bottom of the fixing frame 75, and the bottom of the guide member and the bottom of the second water retaining member 72 are both connected to the water receiving groove 751.
[0238] For example, Figure 12 to Figure 14 As shown, the fixing frame 75 is located outside the cutting chamber, and a flange is provided on one side of the fixing frame 75 close to the cutting frame 10, and the flange is fixedly connected to the cutting frame 10 by bolts, and the bottom end of the accordion shield is fixedly connected to the inner bottom wall of the water receiving tank 751, and the cutting fluid blocked by the accordion shield can flow along the accordion shield into the water receiving tank 751, effectively preventing the cutting fluid from flowing out. Further, two guide plates 74 are fixedly mounted on the fixing frame 75, and the first guide groove 741 and the second guide groove 742 provided on the guide plate 74 are both connected to the water receiving tank 751 on the fixing frame 75, and if there is cutting fluid entering the first guide groove 741 and the second guide groove 742, it will also flow into the water receiving tank 751, effectively preventing the cutting fluid from flowing out.
[0239] Preferably, if Figures 12 to 16 As shown, the third water retaining member 73 of the present application includes two water retaining blocks, and the two water retaining blocks are respectively located on both sides of the track 41 .
[0240] That is to say, a water retaining block is installed on the left and right sides of the track 41, for example, the water retaining block can be fixed to the side of the track 41 by screws, wherein a part of the water retaining block is located between the track 41 and the side wall of the discharge port 11, and the other part of the water retaining block is located outside the cutting chamber, and the side of the part facing away from the track 41 is provided with a third guide groove 731 adapted to the guide rib 743 on the guide plate 74.
[0241] Preferably, if Figure 8 and Fig. 9 As shown, the cutting assembly of the present application also includes a flow guide component, which is used to receive part of the cutting fluid during the cutting process and / or the feeding process.
[0242] The cutting process refers to the process of cutting the crystal rod, and the unloading process refers to the process of removing the collecting component 16 and the silicon wafers in the collecting component 16 from the moving cart 42. When the collecting component 16 and the silicon wafers in the collecting component 16 are removed from the moving cart 42, the cutting liquid on the outer surface of the collecting component 16 will drip, and the dripping cutting liquid can be received by the guide component.
[0243] The flow guide component may be installed on the track 41 and / or the moving trolley 42 of the unloading device. Furthermore, the flow guide component may be connected to the cutting chamber so as to guide the received cutting fluid back to the cutting chamber.
[0244] By providing a diversion component, during the cutting process, it can receive the cutting fluid dripping from above, playing a role in buffering the cutting fluid, preventing the cutting fluid from splashing everywhere. During the process of removing the collection component 16 from the mobile trolley 42, it can collect the cutting fluid dripping from the collection component 16 and divert the cutting fluid back into the cutting chamber, avoiding waste caused by the outflow of the cutting fluid. In addition, in the case where a first driving component is provided, it can also prevent the cutting fluid from falling onto the first driving component located below the track 41, effectively protecting the first driving component. In addition, it can also avoid polluting the working environment.
[0245] Preferably, as Figure 8 and Fig. 9 shown, the diversion component of the present application includes a first diversion plate 81 installed on the blanking device. A first collection port is provided at the top of the first diversion plate 81, and the cutting fluid can pass through the first collection port and enter the first diversion plate 81.
[0246] Exemplarily, the first diversion plate 81 is installed on the mobile trolley 42 of the blanking device. During the process of removing the collection component 16 from the mobile trolley 42, it can collect the cutting fluid dripping from the collection component 16 to prevent the cutting fluid from dripping onto other places. In addition, in the case where a first driving component is provided, when the collection component 16 is inside the cutting chamber, the first diversion plate 81 can also rise along with the track 41 to receive the cutting fluid dripping from above, playing a role in buffering the cutting fluid.
[0247] Exemplarily, as Fig. 9 and Fig.10 shown, the mobile trolley 42 is a flatbed truck, and the first diversion plate 81 is installed on the top surface of the mobile trolley 42.
[0248] Preferably, as Figure 8 and Fig. 9 shown, the lower part of the collection component 16 is located inside the first diversion plate 81, and the width of the first diversion plate 81 is greater than the width of the collection component 16.
[0249] In this way, a space for storing the cutting fluid can be formed between the side wall of the first diversion plate 81 and the collection component 16.
[0250] Preferably, as Figure 8 and Fig. 9 shown, a first diversion opening 814 is provided on the first diversion plate 81, and the cutting fluid inside the first diversion plate 81 can flow out from the first diversion opening 814 and drip onto the bottom of the track 41 or the cutting chamber.
[0251] Among them, when the first diversion disk 81 is inside the cutting chamber, the cutting fluid flowing out from the first diversion opening 814 can directly drip onto the bottom of the cutting chamber. When the first diversion disk 81 is outside the cutting chamber, the cutting fluid flowing out from the first diversion opening 814 can directly drip onto the track 41.
[0252] Exemplarily, the first diversion opening 814 is provided at the inner end of the first diversion disk 81 (the right end when viewed from Figure 8 above), and the inner end of the track 41 (the right end when viewed from Figure 8 above) is set to be open. After the cutting fluid flows onto the track 41, it flows out from the opening at the inner end of the track 41 and falls onto the bottom of the cutting chamber. Alternatively, an opening can also be provided at the middle position of the track 41, and this opening is communicated with the cutting chamber through a drain pipe.
[0253] Preferably, as Figure 8 and Fig. 9 shown, the first diversion disk 81 includes a first bottom plate 811, two relatively arranged first side plates 812, and two relatively arranged first end plates 813. The first bottom plate 811, the two first side plates 812, and the two first end plates 813 together enclose a water-containing space. The first bottom plate 811 is fixedly connected to the moving trolley 42. The first side plates 812 extend along the length direction of the moving trolley 42, and the bottom ends of the first side plates 812 are fixedly connected or integrally formed with the first bottom plate 811. The first end plates 813 extend along the width direction of the moving trolley 42, and the bottom ends of the first end plates 813 are fixedly connected or integrally formed with the first bottom plate 811. The first diversion opening 814 is formed on the inner first end plate 813.
[0254] It should be noted that those skilled in the art can also cancel the inner first end plate 813 in actual application. That is to say, the inner end of the first diversion disk 81 is open, and an opening is formed between the two first side plates 812 to form the first diversion opening 814.
[0255] Preferably, as Figure 8 and Fig. 9 shown, the diversion assembly of the present application further includes a diversion box 83 installed on the track 41. A second diversion opening (not shown in the figure) is provided on the track 41. The diversion box 83 is located below the track 41 and is communicated with the second diversion opening. The diversion box 83 is communicated with the cutting chamber through a drain pipe.
[0256] Exemplarily, the second diversion opening is preferably arranged at the middle position in the length direction of the track 41. The diversion box 83 is fixedly installed at the bottom of the track 41. The top of the diversion box 83 is open, so as to communicate with the second diversion opening on the track 41. The bottom of the diversion box 83 has a drain port communicated with the drain pipe. The cutting fluid on the track 41 enters the diversion box 83 through the second diversion opening, and then flows back to the cutting chamber along the drain pipe.
[0257] Preferably, as Figure 8 and Fig. 9 shown, the diversion assembly of the present application further includes a second diversion plate 82 installed on the track 41. The top of the second diversion plate 82 is provided with a second collection port. The cutting fluid dripping from the collection member 16 can pass through the second collection port and enter the second diversion plate 82. The second diversion plate 82 is located on the side of the track 41.
[0258] Exemplarily, as Figure 8 and Fig. 9 shown, a second diversion plate 82 is installed on each of the left and right sides of the track 41. The length of the second diversion plate 82 is less than the length of the track 41 and is located outside the cutting chamber. During the process of removing the silicon wafer from the collection member 16, the cutting fluid dripping from the silicon wafer will fall onto the second diversion plate 82. Of course, in practical applications, those skilled in the art can also only set the second diversion plate 82 on one side of the track 41.
[0259] It should be noted that those skilled in the art can, in practical applications, extend the second diversion plate 82 into the cutting chamber and set the inner end of the second diversion plate 82 to be open, so that the cutting fluid in the second diversion plate 82 directly flows back into the cutting chamber, or the second diversion plate 82 can also be communicated with the cutting chamber through a drain pipe.
[0260] Preferably, as Figure 8 and Fig. 9 shown, the second diversion plate 82 of the present application is communicated with the cutting chamber through a drain pipe.
[0261] Exemplarily, as Figure 8 and Fig. 9 shown, a drain port is arranged at the middle position of the bottom of the second diversion plate 82. The drain port is communicated with the drain pipe. The cutting fluid in the second diversion plate 82 enters the drain pipe through the drain port and flows back to the cutting chamber along the drain pipe.
[0262] Preferably, as Figure 8 and Fig. 9As shown, the second flow guiding plate 82 of the present application includes a second bottom plate 821, second side plates 822, and two relatively arranged second end plates 823. One side of the second bottom plate 821 is fixedly connected to the side wall of the track 41. The second side plates 822 extend along the length direction of the track 41. The bottom end of the second side plates 822 is fixedly connected to or integrally formed with the other side of the second bottom plate 821. The bottom ends of the second end plates 823 are fixedly connected to or integrally formed with the second bottom plate 821. The left and right ends of the second end plates 823 are respectively connected to the side wall of the track 41 and the second side plates 822.
[0263] That is to say, both the front and rear ends of the second flow guiding plate 82 are blocked. All the cutting fluid in the second flow guiding plate 82 flows back to the cutting chamber through the drain pipe. Exemplarily, a drain port communicating with the drain pipe is provided at the middle position of the second bottom plate 821.
[0264] Preferably, as Figure 8 and Fig. 9 shown, the second side plates 822 of the present application are inclined in a direction away from the track 41.
[0265] By inclining the second side plates 822 of the second flow guiding plate 82, the receiving area of the second flow guiding plate 82 is larger, so that more cutting fluid can be received.
[0266] Finally, the working process of the wire cutting machine of the present application is introduced. Before cutting starts, the ingot assembly needs to be installed at the bottom of the feeding device 20. After cutting starts, the main roller motor of the main roller assembly is started to drive the first main roller 13 and the second main roller 14 to rotate at high speed, and the ingot assembly is driven by the feeding device 20 to feed downward, that is, move towards the wire mesh on the main roller assembly. The first driving assembly is started to drive the lifting seat 51, the track 41 on the lifting seat 51, the second driving assembly on the track 41, the moving trolley 42, and the collecting member 16 on the moving trolley 42 to move upward. When the distance between the collecting member 16 and the ingot 17 at the bottommost position reaches the set safety distance, the collecting member 16 is stopped from rising, and the first driving assembly drives the collecting member 16 to move downward with the feeding of the feeding device 20, so that the distance between the collecting member 16 and the ingot 17 at the bottommost position is always maintained at the safety distance.
[0267] When the bottommost ingot is completely cut, start the spray degumming device 3 to spray degumming liquid onto the glue layer on the ingot, so as to separate the cut silicon wafers from the upper ingot. After the silicon wafers are degummed, they just fall into the lower collecting member 16. Start the clamping mechanism to clamp the silicon wafers in the collecting member 16, and make the first driving assembly drive the lifting seat 51, the track 41 on the lifting seat 51, the second driving assembly on the track 41, the moving trolley 42 and the collecting member 16 on the moving trolley 42 to move quickly downward. After moving to the set initial position, turn off the first driving assembly and start the second driving assembly, pulling the moving trolley 42, the collecting member 16 on the moving trolley 42 and the silicon wafers in the collecting member 16 through the discharge port 11 and moving them outside the cutting chamber.
[0268] Then remove the collecting member 16 and the silicon wafers together from the moving trolley 42, and then place an empty collecting member 16 on the moving trolley. Start the second driving assembly to push the moving trolley 42 and the collecting member 16 on the moving trolley 42 back into the cutting chamber. Turn off the second driving assembly and start the first driving assembly to drive the lifting seat 51, the track 41 on the lifting seat 51, the second driving assembly on the track 41, the moving trolley 42 and the collecting member 16 on the moving trolley 42 to move upward, and then repeat the above steps. During the discharging process, the feeding device 20 does not stop and continues to feed.
[0269] In addition, those skilled in the art can understand that although some of the embodiments described herein include certain features included in other embodiments rather than other features, the combination of the features of different embodiments means that it is within the scope of the present application and forms different embodiments. For example, in the claims of the present application, any one of the claimed embodiments can be used in any combination.
[0270] So far, the technical solutions of the present application have been described in conjunction with the preferred embodiments shown in the drawings. However, it is easy for those skilled in the art to understand that the protection scope of the present application is obviously not limited to these specific embodiments. Without departing from the principle of the present application, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of the present application.
Claims
1. A cutting assembly, characterized in that, Comprising: A cutting frame, within which a cutting chamber is formed; A main roller assembly, which is mounted on the cutting frame. The main roller assembly includes a first main roller and a second main roller. The first main roller and the second main roller are spaced apart along the feeding direction. The number of the first main rollers is two and they are spaced apart along a direction perpendicular to the feeding direction; A flow guide cover, which is located between the two first main rollers. The flow guide cover extends along the axial direction of the first main roller. The flow guide cover is penetrated along the feeding direction so that a crystal bar can pass through the flow guide cover; And A debris box, which is located below the flow guide cover. The bottom of the debris box is closed, and the top of the debris box has an opening. The cutting fluid falling from the flow guide cover can pass through the opening and enter the debris box.
2. The cutting assembly according to claim 1, wherein The number of the second main rollers is two and they are spaced apart along a direction perpendicular to the feeding direction. The debris box is located between the two second main rollers. Water baffle plates extending towards the outside of the debris box are provided on both sides of the debris box along its width direction. The water baffle plates are located above the second main rollers.
3. The cutting assembly according to claim 2, wherein, The feeding direction is the vertical direction, and the water baffle plates are inclined upwards along the direction away from the debris box.
4. The cutting assembly according to claim 2, wherein, A water blocking structure is provided at the edge of the water baffle plate.
5. The cutting assembly according to claim 4, wherein The water blocking structure includes two first water blocking flanges spaced apart along the length direction of the debris box. The first water blocking flanges extend from one end of the water baffle plate away from the debris box to the opening.
6. The cutting assembly according to claim 5, characterized in that, The first water blocking flanges are perpendicular to the water baffle plate.
7. The cutting assembly according to claim 5, wherein The water blocking flange further includes a second water blocking flange located between the two first water blocking flanges. The two ends of the second water blocking flange are respectively connected to the first water blocking flanges.
8. The cutting assembly according to any one of claims 1 to 7, characterized in that, The top opening of the flow guide cover is larger than the bottom opening of the flow guide cover.
9. The cutting assembly according to any one of claims 1 to 7, characterized in that, The debris box includes a box bottom plate and two relatively arranged box side plates. The bottom of the box side plates is fixedly connected or integrally provided with the box bottom plate.
10. A wire cutting machine, characterized in that, Comprising the cutting assembly according to any one of claims 1 to 9.