Detection assembly and wire cutting machine

Abstract

The utility model relates to the technical field of hard and brittle material processing, particularly provides a detection assembly and a wire cutting machine comprising the detection assembly, and aims to solve the technical problem of how to ensure the cleanliness of a detection mechanism and the environment where the detection mechanism is located when an existing slicing machine realizes automatic operation. The detection assembly comprises a laser detection part; the protection part comprises a protection shell assembly, a protection space is formed in the protection shell assembly, the laser detection component is contained in the protection space, and the protection shell assembly is provided with an opening allowing laser to penetrate through; and the light-transmitting sealing part is arranged at the position, corresponding to the opening, of the protective shell assembly. By means of the structure, the cleanliness of the environment where the laser detection component is located can be guaranteed through wrapping type protection on the premise that the detection reliability is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of processing hard and brittle materials, and particularly provides a detection component and a wire cutting machine comprising the detection component. Background Art

[0002] Taking a silicon rod as an example of a hard and brittle material, the device for processing it usually includes a cutting machine for cutting the rod material (round rod) according to the length specification, a squaring machine for cutting a round rod of a certain length into a square rod, a grinding machine for grinding the square rod, and a slicing machine for slicing the square rod with qualified precision after grinding. Among them, the working principle of the slicing machine is as follows: after bonding the square rod to the crystal carrier, the square rod is sliced by the high-speed reciprocating operation of the wire mesh of a cutting wire (such as a diamond wire, etc.). Usually, each complete slicing operation corresponding to the wire mesh is called a one-knife cutting operation of the slicing machine.

[0003] The slicing operation of the existing slicing machine is concentrated near the slicing station. Each one-knife cutting operation usually includes dozens of operation steps and is usually completed by one or two operators. Such a processing method often has the following problems: the operation of the slicing machine has high requirements for the professionalism and proficiency of the operator, and the labor cost is relatively high; the large number of steps makes it easy for the operator to make mistakes, and once the operator makes a mistake, it may lead to cutting abnormalities of different degrees. In view of this, after fully researching and analyzing the operation of the slicing machine, the inventor aims to propose a structural framework that can realize automatic slicing operation.

[0004] In the structural framework, it is necessary to detect the wire mesh characteristic data through a detection component, and based on the detected wire mesh characteristic data, timely discover problems such as wire jumping, and ensure the sustainability of the operation of the slicing machine by timely handling the problems. Correspondingly, how to ensure that the detection component can detect the wire mesh at an ideal position is quite necessary for the accuracy of detection and the timeliness of problem discovery. In addition to movement, the detection component for realizing visual detection is a component with relatively high sensitivity. Moreover, in order to ensure the reliability of detection, the detection component has relatively high requirements for clarity and cleanliness during the process of detecting the wire mesh characteristic data. Therefore, how to ensure the cleanliness of the detection component and its surrounding environment is quite necessary. Summary of the Utility Model

[0005] The utility model aims to solve at least part of the above technical problems. Specifically, it solves the technical problem of how to ensure the cleanliness of the detection component and its surrounding environment during the automatic operation of the existing slicing machine.

[0006] In a first aspect, the present utility model provides a detection component, which includes: a laser detection component; and a protection part, which includes: a protection shell component that forms a protection space, the laser detection component is accommodated in the protection space, and the protection shell component has an opening that allows laser to pass through; a light-transmitting sealing component, and the light-transmitting sealing component is arranged at a position of the protection shell component corresponding to the opening.

[0007] With such a structure, it is possible to ensure the cleanliness of the environment where the laser detection component is located through a wrapping type of protection while ensuring the detection reliability.

[0008] For the above-mentioned line detection component, in a possible implementation manner, the light-transmitting sealing component is fixedly connected to the protection shell component through a light-transmitting sealing component pressing plate.

[0009] With such a structure, a specific implementation manner for connecting the light-transmitting sealing component and the protection shell component is given.

[0010] For the above-mentioned line detection component, in a possible implementation manner, a first sealing gasket is arranged between the light-transmitting sealing component and the light-transmitting sealing component pressing plate and / or between the light-transmitting sealing component pressing plate and the protection shell component.

[0011] With such a structure, it is possible to ensure the sealing effect at the connection.

[0012] For the above-mentioned line detection component, in a possible implementation manner, a hydrophobic coating is arranged on the light-transmitting sealing component.

[0013] With such a structure, it is possible to ensure the detection reliability of the laser detection component.

[0014] For the above-mentioned line detection component, in a possible implementation manner, the protection part includes a compressed gas component, and the compressed gas component can introduce compressed air into the protection space.

[0015] With such a structure, it is possible to achieve air circulation in the protection space by introducing compressed air, so that the protection space is in a dry and moisture-free state.

[0016] For the above-mentioned line detection component, in a possible implementation manner, the protection part includes a flushing component, and the flushing component can at least flush the light-transmitting sealing component.

[0017] With such a structure, it is possible to ensure the detection reliability of the laser detection component through an active cleaning method. For example, the flushing medium can be gas, liquid, etc.

[0018] For the above-mentioned wire detection component, in a possible implementation, the laser detection component is connected to an external circuit through a lead wire, and the protective housing component is provided with a waterproof joint at a position corresponding to the lead wire.

[0019] With such a configuration, it is possible to ensure the protective effect at the lead wire outlet.

[0020] For the above-mentioned wire detection component, in a possible implementation, the protective housing component includes a protective cover and a protective cover plate. The protective cover and the protective cover plate form the protective space, and the opening is provided on the protective cover.

[0021] With such a configuration, a possible structural form of the protective housing component is given.

[0022] For the above-mentioned wire detection component, in a possible implementation, a second sealing gasket is provided between the protective cover and the protective cover plate.

[0023] With such a configuration, it is possible to ensure the sealing effect at the connection between the protective cover and the protective cover plate.

[0024] In a second aspect, the present invention provides a wire cutting machine, which includes the detection component described in any one of the foregoing items.

[0025] It can be understood that this wire cutting machine has all the technical effects of the detection component described in any one of the foregoing items, which will not be elaborated here.

[0026] For the above-mentioned wire cutting machine, in a possible implementation, the wire cutting machine is a slicing machine.

[0027] With such a configuration, a specific equipment form of the wire cutting machine is given. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Taking a silicon rod to be sliced (hereinafter simply referred to as a silicon rod, and the product obtained by the slicing operation is a silicon wafer) as an example of the workpiece, the preferred embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings:

[0029] Figure 1 Shows a schematic structural diagram of a slicing machine according to an embodiment of the present invention;

[0030] Figure 2 Shows an installation schematic diagram of the detection mechanism of the slicing machine according to the first embodiment of the present invention;

[0031] Figure 3 Shows an installation schematic diagram of the detection mechanism of the slicing machine according to the second embodiment of the present invention;

[0032] Figure 4Schematic diagram of the detection mechanism of a slicing machine according to an embodiment of the present utility model Figure 1 , in the figure, the detection components, the first movable component, the second movable component and the connection component of the detection mechanism are mainly shown;

[0033] Figure 5 Schematic diagram of the detection mechanism of a slicing machine according to an embodiment of the present utility model Figure 2 , in the figure, the connection component and the adjustment component of the detection mechanism are mainly shown;

[0034] Figure 6 Schematic diagram of the detection mechanism of a slicing machine according to an embodiment of the present utility model Figure 3 , in the figure, the connection plate in the connection component and part of the adjustment component arranged on the connection plate are mainly shown;

[0035] Figure 7 Schematic diagram of the structure of a slicing machine with a longitudinally adjustable component according to an embodiment of the present utility model,

[0036] Figure 8 Schematic diagram of the detection mechanism of a slicing machine according to an embodiment of the present utility model Figure 4 , in the figure, the second movable component is mainly shown;

[0037] Figure 9 Schematic diagram of the structure of the first protective component of a slicing machine according to an embodiment of the present utility model Figure 1 ;

[0038] Figure 10 Schematic diagram of the structure of the first protective component of a slicing machine according to an embodiment of the present utility model Figure 2 ;

[0039] Figure 11 Cross-sectional view of the connection seat in the connection component of a slicing machine according to an embodiment of the present utility model, showing a spindle-shaped structure in the figure;

[0040] Figure 12 Schematic diagram of the cooperation between the sealing rubber sheet and the spindle-shaped structure in the first protective component of a slicing machine according to an embodiment of the present utility model;

[0041] Figure 13 Schematic diagram of the principle of the sealing strip in the first protective component of a slicing machine according to an embodiment of the present utility model;

[0042] Figure 14 Explosion diagram of the second protective component of a slicing machine according to an embodiment of the present utility model; and

[0043] Figure 15 Schematic diagram of the structure of the second protective component of a slicing machine according to an embodiment of the present utility model.

[0044] Reference Signs:

[0045] 100, Slicing machine;

[0046] 1, Frame;

[0047] 2, Cutting mechanism;

[0048] 21, First cutting main roller; 22, Second cutting main roller;

[0049] 3, Feed mechanism;

[0050] 4, Wire mesh;

[0051] 5, Detection mechanism;

[0052] 51, Laser sensor; 511, Distance measurement sensor fixing bracket;

[0053] 52, Movable component;

[0054] 521, First movable component;

[0055] 5211, Module mounting plate; 5212, First movable transmission component;

[0056] 522, Second movable component;

[0057] 5221, Second movable rotating shaft; 5222, Second movable angle adjustment screw; 5223, Second movable slotted hole;

[0058] 523, Connection component;

[0059] 5231, Connection seat;

[0060] 52311, Connection seat body; 52312, Spindle-shaped structure;

[0061] 5232, Adjustment plate; 5233, Connection plate;

[0062] 524, Adjustment component;

[0063] 5241, Connection plate adjustment slotted hole; 5242, Connection plate guide groove; 5243, Connection plate adjustment lifting lug; 5244, Adjustment plate adjustment slotted hole;

[0064] 525, Longitudinal movement component;

[0065] 6, Protection component;

[0066] 61, First protection component;

[0067] 611, Protection sheet metal; 6111, Protection sheet metal gasket;

[0068] 612. Open sealing assembly;

[0069] 6121. Sealing rubber sheet; 61211. Sealing rubber sheet pressing plate;

[0070] 6122. Sealing strip; 61221. Sealing strip support;

[0071] 62. Second protection assembly;

[0072] 6211. Sensor protection cover; 6212. Sensor protection cover plate; 6213. Protection cover sealing gasket;

[0073] 622. Waterproof connector;

[0074] 623. Light-transmitting sealing plate;

[0075] 6231. Light-transmitting sealing plate pressing plate; 6232. Light-transmitting sealing plate sealing gasket;

[0076] 6241. Compressed air inlet; 6242. Compressed air outlet;

[0077] 625. Flushing assembly;

[0078] 200. Silicon rod. Detailed implementation manners

[0079] The preferred implementation manners of the present utility model will be described below with reference to the accompanying drawings. Those skilled in the art should understand that these implementation manners are only used to explain the technical principle of the present utility model and are not intended to limit the protection scope of the present utility model. For example, although these implementation manners are introduced in combination with a specific combination of operation steps, obviously, those skilled in the art can make adjustments such as addition, subtraction, and replacement to the steps according to actual needs.

[0080] It should be noted that in the description of the present utility model, unless otherwise clearly specified and limited, the terms "installation", "setting", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can also be the communication inside two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0081] In addition, in order to better illustrate the present utility model, numerous specific details are given in the following detailed implementation manners. Those skilled in the art should understand that the present utility model can also be implemented without some specific details. In some instances, the principles of the slicing machine well-known to those skilled in the art are not described in detail in order to highlight the gist of the present utility model.

[0082] The slicing machine is mainly a device that uses a wire mesh of a cutting wire (such as a diamond wire) of a wire cutting machine to cut a silicon rod (usually called a square rod or a finished square rod) with qualified grinding accuracy along its radial direction (for a workpiece with a strip structure having a length, for the convenience of description, the length direction of the workpiece is called the axial direction, and the direction of the cross-section perpendicular to the axial direction is called the radial direction) to obtain monocrystalline silicon wafers. The following will refer to Figures 1 to 15 at least a part of

[0083] mainly refer to Figure 1 , in a possible implementation manner, the slicing machine 100 includes a slicing machine main body, and the slicing machine main body mainly includes a frame 1. The frame forms a cutting chamber, and a cutting mechanism 2 and a feed mechanism 3 are arranged in the cutting chamber. For example, in this example, the cutting mechanism includes three main cutting rollers distributed in an inverted triangle shape, and the feed mechanism is arranged above the cutting mechanism. The silicon rod 200 to be sliced can be fixed to the feed mechanism, and the feed mechanism carrying the silicon rod to be sliced can move in the vertical direction in a direction close to / away from the cutting mechanism. After the feed mechanism approaches the cutting mechanism, the silicon rod can be sliced by the wire mesh 4 wound around the cutting mechanism. After the slicing operation is completed, the feed mechanism moves away from the cutting mechanism to complete the retraction operation.

[0084] Taking the slicing operation as an example, generally, the process of a complete slicing operation includes: after completing stick-wafer (sticking the square rod to be sliced to a backing plate, and then sticking the backing plate to a crystal carrier. For example, the backing plate can be a plastic plate, a resin plate, a glass plate, etc.), fixing the crystal carrier on the feed mechanism. During the reciprocating movement of the wire mesh between the three main cutting rollers of the slicing machine, by driving the silicon rod to approach the wire mesh by the feed mechanism, the wire mesh can slice the silicon rod by wire sawing. For example, during the slicing operation of the slicing machine on the silicon rod, the liquid supply system of the slicing machine needs to continuously spray cutting fluid to the slicing operation area at the slicing station. For example, the spray pipe of the liquid supply system discharges the cutting fluid continuously to the wire mesh and the square rod with a set flow rate as the spraying parameter. Among them, the cutting fluid is mainly used to play roles such as cooling and lubrication during the slicing operation, and to carry away silicon powder and the like generated at the cutting seam during the slicing operation.

[0085] In a possible implementation manner, the slicing machine 100 further includes a vision processing unit, and the vision processing unit mainly realizes the automatic control of the slicing machine based on vision observation data. For example, the vision processing unit mainly includes a detection mechanism 5 and a controller (such as can be set in the slicing machine, a remote central control room, etc.). Among them, the detection mechanism is mainly used to collect wire mesh feature data and the like related to the slicing operation in real time, and the controller judges whether there are problems such as wire jumping, excessive wire bow, the silicon rod not being cut through by the wire mesh, and wire hanging during retraction according to the collected data. Specifically:

[0086] (1) During the slicing operation, each diamond wire segment of the wire mesh is wound in the wire grooves at corresponding positions on the cutting main roller, so as to complete the slicing operation of the silicon rod in the form of wire saw cutting along with the reciprocating movement of the wire mesh. However, during the slicing operation, a jumper problem may occur between adjacent diamond wire segments in the wire mesh. Specifically, the diamond wire corresponding to one or several wire grooves jumps out of the groove and overlaps with the diamond wire in the adjacent wire groove. If the jumper problem is not handled in time, it will lead to wire breakage, which not only affects the sustainability of the automated operation of the slicing machine, but also affects the quality of monocrystalline silicon wafers.

[0087] (2) During the slicing operation, the feeding mechanism of the slicing machine drives the silicon rod to feed towards the wire mesh, and during this period, the wire mesh will be pressed down to form a wire bow. If the wire bow is too large and not intervened in time, it will lead to risks such as wire breakage of the wire mesh.

[0088] (3) After each cut is completed, it is necessary to manually judge whether the silicon rod is completely cut through by the wire mesh of the diamond wire. As in the normal situation, the conditions for manually judging that the silicon rod is completely cut through by the wire mesh are: the diamond wire cuts into the backing plate to a specific depth (such as usually 3 - 6 mm) and the wire mesh remains flat as a whole.

[0089] (4) After each cut is completed, the processed silicon wafer needs to be lifted (retracted) relative to the cutting mechanism (mainly including the cutting main roller) that constructs the wire mesh. During the retraction process, it is necessary to manually judge whether there is a problem of wire hanging during retraction. The specific manifestation of wire hanging during retraction is that one or more diamond wire segments in the wire mesh are pulled up by the silicon wafer during the lifting of the silicon rod. If not discovered and handled in time, it will lead to the breakage of the diamond wire, which will affect the quality of the silicon wafer and the production change efficiency of the slicing machine.

[0090] The present utility model aims to obtain the wire mesh characteristic data in the case of one or more of the above problems through a detection mechanism. Through relevant analysis, it is expected to achieve automated operation based on visual detection.

[0091] In a possible implementation manner, an operation door is respectively arranged on the left and right sides of the cutting chamber, and two detection mechanisms 5 are respectively arranged in the cutting chamber near the two operation doors. For example, in the Figure 2 shown embodiment, the two detection mechanisms 5 are respectively installed above the cutting chamber. For example, in the Figure 3 shown embodiment, the two detection mechanisms 5 are respectively installed below the cutting chamber. The two detection mechanisms 5 are respectively used to collect the wire mesh characteristic data on the cutting main rollers corresponding to the upper left and upper right (such as respectively denoted as the first cutting main roller 21 and the second cutting main roller 22) to complete the automated control of the slicing machine based on visual observation. Obviously, a detection mechanism can also be configured only for one of the cutting main rollers.

[0092] Main reference Figures 1 to 4 , in a possible implementation, the detection mechanism 5 mainly includes a ranging sensor as a detection component and a movable component 52. For example, the ranging sensor can be a laser sensor 51. For example, the laser sensor can be a point laser ranging sensor or a line laser ranging sensor. The movable component 52 is arranged on the frame 1, and the laser sensor is arranged on the movable component 52. The movable component can drive the laser sensor to move so that the ranging sensor can collect the wire mesh feature data of a set position / area or collect the dynamic wire mesh feature data. On this basis, it is expected to comprehensively and accurately detect the slicing operation through the wire mesh feature data collected by the laser sensor. For example, in the case of problems such as the silicon rod not being cut through by the wire mesh, wire jumping, and wire hanging during retraction of the tool, it can be detected in time and corresponding countermeasures can be given. Obviously, the laser sensor is just a specific form of the ranging sensor, and those skilled in the art can also use other types of optical sensors as detection components according to actual needs to achieve the collection of wire mesh feature data.

[0093]

Movable component

[0094] Continue to refer Figure 4 , in a possible implementation, the movable component 52 mainly includes a first movable component 521 and a second movable component 522. Among them, the first movable component can drive the laser sensor to move in a direction substantially parallel to the axis of the cutting main roller, and the second movable component can drive the laser sensor to rotate a certain amount within the area where the wire mesh feature data can be collected. Among them, the first movable component can be arranged at the top or bottom of the cutting chamber, and the second movable component can be arranged on the first movable component in a direct or indirect connection manner. In this way, it is expected to make the laser sensor collect the wire mesh feature data of the target position through the combination of the linear motion corresponding to the first movable component and the rotation corresponding to the second movable component.

[0095] In a possible implementation, the first movable component 521 mainly includes a first movable driving component and a first movable transmission component 5212. For example, in this example, the first movable driving component is a driving motor, and the first movable transmission component is a lead screw nut mechanism. Among them, the second movable component can be fixedly connected to the nut of the lead screw nut mechanism. In this way, the laser sensor arranged on the second movable component can move along the lead screw under the drive of the driving motor. To ensure the reliability of the linear movement, for example, a first movable guiding component can be added to the first movable component. For example, the first movable guiding component can include structures such as linear guide rails, optical axes, and hard rails.

[0096] Obviously, the structural form of the above-mentioned first movable component is only an exemplary description, and those skilled in the art can flexibly change it according to actual needs. For example, the first movable transmission component can also be a rack and pinion mechanism, etc., and the first movable component can also be a power cylinder capable of outputting linear motion (such as a pneumatic cylinder, an electric cylinder, a hydraulic cylinder, etc.) or any form of linear module, etc.

[0097] Mainly referring to Figure 4 and Figure 5 , in a possible implementation manner, the movable component 52 further includes a connection component 523, and the second movable component 522 is connected to the first movable component 521 through the connection component 523. Among them, the connection component 523 mainly includes a connection seat 5231 serving as a first connection part connected to the first movable component, an adjustment plate 5232 serving as a second connection part connected to the second movable component, and a connection plate 5233 serving as a third connection part disposed between the connection seat and the adjustment plate. As shown in the figure, the X-axis direction represents the axial direction of the cutting main roller, the Y-axis direction represents the running direction of the diamond wire, and the Z-axis direction represents the vertical direction (the feeding direction of the feeding mechanism).

[0098] In a possible implementation manner, the connection seat 5231 includes a connection seat main body 52311, and a spindle-shaped structure 52312 serving as a connection seat mating part is formed on or provided on the connection seat main body 52311. For example, in this example, the connection seat main body generally includes a connection seat horizontal part and a connection seat vertical part. The connection seat horizontal part is fixedly connected to the nut of the lead screw nut mechanism by means of fasteners such as screws. The connection seat vertical part forms a spindle-shaped structure in the area near the horizontal part. The spindle-shaped structure is clamped between two sealing rubber sheets described below, and thus can reduce the influence of the laser sensor on the reliability of the rubber sheet protection during its movement in the X direction. Specifically, the spindle-shaped structure can reduce the gap opened between the sealing strips, and thus is expected to obtain a better sealing effect. Obviously, the connection seat mating part can also be other structural forms than the spindle-shaped structure, such as one side of the cross-section of the connection seat mating part being a narrow side of a rectangle protruding outward, changing the long side and the narrow side of the rectangle into arc structures, changing the rectangle into an oblong ellipse, etc.

[0099] In a possible implementation manner, the movable component 52 further includes an adjustment component 524, and the adjustment component is mainly used to adjust the position of the laser sensor relative to the first connection part / wire mesh. For example, in this example, the adjustment component 524 can adjust the position of the laser sensor relative to the first connection part / wire mesh along the Y / Z axis directions.

[0100] Mainly referring to Figure 5 and Figure 6, in a possible implementation, the connecting plate 5233 generally includes a horizontal portion and a vertical portion of the connecting plate. A pair of connecting plate adjustment slotted holes 5241 as the first adjustment structure are provided on the upper horizontal portion of the connecting plate along the Y-axis direction. Correspondingly, a connecting seat mounting portion is provided on the vertical portion of the connecting seat below the connecting seat. A pair of adjustment screws that can cooperate with the connecting plate adjustment slotted holes 5241 are provided on the connecting seat mounting portion. By the cooperation of the first adjustment slotted holes and the corresponding adjustment screws, the relative position relationship between the connecting plate and the connecting seat along the Y-axis direction can be adjusted.

[0101] In a possible implementation, the vertical portion of the connecting plate 5233 below forms a connecting plate guiding groove 5242 as the second adjustment structure in the area near the adjustment plate. The adjustment plate can move vertically in the guiding groove. In this way, the adjustment of the adjustment plate in the Z-axis direction can be realized, or during the process of realizing the Z-axis direction adjustment by means of the following third / fourth adjustment structures, the movement reliability of the adjustment plate during the Z-axis direction adjustment can be ensured.

[0102] In a possible implementation, a connecting plate adjustment lug 5243 as the third adjustment structure is provided on the vertical portion of the connecting plate 5233 below corresponding to the connecting plate guiding groove 5242. A through hole is provided on the connecting plate adjustment lug. Correspondingly, an adjustment screw and nut assembly can be configured for the through hole of the connecting plate adjustment lug. For example, in the case where the height is determined, the nut above the connecting plate adjustment lug and the screw are tightened at the position corresponding to the current height.

[0103] In a possible implementation, a pair of adjustment plate adjustment slotted holes 5244 extending vertically are machined on the adjustment plate 5232 near the upper position as the fourth adjustment structure. A pair of adjustment screws are configured on the connecting plate at the position corresponding to the adjustment plate adjustment slotted holes. In this way, the relative position relationship between the connecting seat and the adjustment plate along the Z-axis direction can be adjusted by the combination of the adjustment plate adjustment slotted holes 5244 and the adjustment screws. In this example, the connecting plate adjustment lug is located between the adjustment plate adjustment slotted holes 5244.

[0104] In this way, the adjustment component composed of the first / second / third / fourth adjustment structures can realize the adjustment of the adjustment plate along the Y-axis (the first adjustment structure) and the Z-axis (the second / third / fourth adjustment structures). In addition, in cases where the specifications of the main cutting roller change when replacing the main cutting roller, or when switching the axle distance, etc., the detection mechanism can also be adapted to different cutting mechanisms through the adjustment function of the adjustment component. It can be understood that the specific structures and combination methods of the above first / second / third adjustment structures are only an exemplary description of the adjustment component, and those skilled in the art can flexibly adjust it according to actual needs. For example, it can include but is not limited to: swapping the installation positions of the slotted holes and the adjustment screws, omitting one of the slotted holes and the lugs, replacing the current guide groove with a structure in which the protrusions provided on the adjustment plate can move along the strip-shaped groove provided in the middle of the connecting plate, etc.

[0105]

Longitudinal Adjustment Component

[0106] Especially for the aforementioned situation where the specifications of the main cutting roller change when replacing the main cutting roller, in addition to realizing the adjustment along the Z-axis direction through the aforementioned second / third / fourth adjustment components, it can also be achieved through the following methods:

[0107] Mainly referring to Figure 7 , in a possible implementation manner, the movable component 52 includes a longitudinal movement component 525, and the aforementioned first movable component is slidably arranged on the Z-direction movable component, so that the laser sensor and other parts of the movable component can realize the movement along the Z-axis direction by means of the longitudinal movement component.

[0108] Obviously, the longitudinal adjustment component can also be jointly arranged with the aforementioned second / third / fourth adjustment components to better adjust the position of the laser sensor along the Z-axis direction. Exemplarily, a larger range of adjustment is realized through the longitudinal movement component, and a smaller range of adjustment is realized through the aforementioned ones.

[0109] In a possible implementation manner, the longitudinal movement component 525 includes a longitudinal movement driving component and a longitudinal movement transmission component. For example, the longitudinal movement driving component can be a driving motor, a rotating module, etc., and the longitudinal movement transmission component can be a lead screw nut mechanism, a gear rack mechanism, etc. To ensure the reliability of linear movement, a longitudinal movement guiding component can be added to the longitudinal movement component. For example, the longitudinal movement guiding component can include structures such as linear guide rails, optical axes, and hard rails.

[0110] Obviously, the above-described structural form of the longitudinal movement component is only an exemplary description, and those skilled in the art can flexibly change it according to actual needs. For example, the structures of the longitudinal movement component and the first movable component may be the same or different. Similar to the foregoing first movable component, the longitudinal movement component may also be a power cylinder capable of outputting linear motion (such as a pneumatic cylinder, an electric cylinder, a hydraulic cylinder, etc.) or any form of linear module, etc.

[0111] Mainly referring to Figure 4 and Figure 8 , in a possible implementation manner, the laser sensor 51 is disposed on the laser sensor fixing bracket 511 serving as the laser sensor mounting portion, and the laser sensor fixing bracket 511 is rotatably connected to the adjustment plate 5232 by means of the second movable component 522. Among them, the second movable component 522 mainly includes a second movable rotating shaft 5221 and a second movable angle adjustment screw 5222. For example, in this example, the second movable rotating shaft 5221 is disposed on the adjustment plate 5232. Correspondingly, a through hole cooperating with the second movable rotating shaft 5221 is provided on the laser sensor fixing bracket 511. The second movable angle adjustment screw 5222 is disposed on the side portion of the adjustment plate 5232 in the vertical direction. The second movable angle adjustment screw includes two angle adjustment screws. By adjusting the positions of the two angle adjustment screws in the horizontal direction and cooperating with the rotation of the laser sensor fixing bracket 511 around the second movable rotating shaft 5221, the rotation of the laser sensor fixing bracket relative to the adjustment plate can be realized, thereby realizing the angle fine adjustment of the laser sensor fixing bracket around the second movable rotating shaft.

[0112] In a possible implementation manner, the second movable component 522 further includes one or more second movable elongated holes 5223. For example, in this example, there are two second movable elongated holes and they are disposed on the laser sensor fixing bracket 511. Correspondingly, fixing screws capable of cooperating with the two second movable elongated holes 5223 are provided on the adjustment plate 5232. In this way, after the adjustment is completed, the laser sensor fixing bracket can be reliably fixedly connected to the adjustment plate through the fixing screws, so as to ensure that the laser sensor mounted on the laser sensor fixing bracket can detect the wire mesh features at an ideal angle.

[0113] Obviously, the above-described structural form of the second movable component is only an exemplary description, and those skilled in the art can flexibly change it according to actual needs. For example, any structure capable of realizing pivotal connection between the adjustment plate and the laser sensor fixing bracket can be used as the second movable component, such as a combination of a motor and a gear pair, a rotating module, etc.

[0114] It can be seen that through the setting of the movable component, the position of the laser sensor relative to the wire mesh can be adjusted flexibly. On this basis, it is expected to combine the aforementioned linear motion and rotation with the adjustment in the Y / Z axis directions so that the laser sensor can better collect the wire mesh feature data.

[0115]

Protective Component

[0116] Mainly referring to Figures 9 to 15 , during the slicing operation, the multi-wire high-speed cutting of the square bar by the diamond wire will cause the cutting fluid to splash, so the internal environment of the cutting chamber is very harsh, which is very unfriendly to the detection mechanism inside the cutting chamber. In a possible implementation manner, the detection mechanism is configured with a protective component. For example, the protective component is mainly used to prevent the intrusion of cutting fluid / dust, the accumulation of silicon powder, etc., so as to ensure the sustainability of the slicing operation and the reliability of the detection mechanism.

[0117] Mainly referring to Figures 9 to 13 , in a possible implementation manner, the protective component 6 includes a first protective component 61 for the first movable component 521. This is because the first movable component 521 includes a driving / transmission mechanism. For example, the driving transmission mechanism usually includes precision components such as a lead screw nut mechanism. Assuming that silicon powder, silicon mud, etc. enter the inside of the precision components, it will affect the reliability of the transmission and cause the driving transmission to fail. Therefore, in this embodiment, mainly through the setting of the first protective component, the intrusion of cutting fluid / silicon dust, etc. into the inside of the first movable component is prevented.

[0118] In a possible implementation manner, the first movable component 521 further includes a module mounting plate 5211 as an installation part. The first movable component is installed in the cutting chamber of the slicing machine 100 through the module mounting plate 5211, and the first movable transmission component 5212 is arranged on the module mounting plate 5211 by means of fasteners such as screws. Among them, the first protective component 61 mainly includes a protective sheet metal 611, and the first movable driving part and the first movable transmission component 5212 are accommodated in the space formed by the protective sheet metal 611 and the module mounting plate 5211, thus forming a preliminary, wrapped protective form.

[0119] In a possible implementation manner, a sealing structure such as a protective sheet metal gasket 6111 is provided between the protective sheet metal 611 and the module mounting plate 5211 to improve the sealing performance.

[0120] Among them, an opening is provided on the protective sheet metal 611 to facilitate the fixation of the connection component and the first movable component. Through the protruding position of the connection component, the first protective component 61 further includes an opening sealing component 612 provided for the opening. Among them, the opening sealing component adopts at least one sealing method to ensure the sealing effect corresponding to the opening area.

[0121] In this example, the opening sealing assembly 612 includes a first opening sealing structure and a second opening sealing structure. Both opening sealing assemblies use a soft sealing method to achieve sealing protection for the opening area. The first opening sealing structure is located above the second opening sealing structure. Obviously, those skilled in the art can determine the number of sealing layers, the specific form of each sealing layer, the relative position between each sealing layer, etc. according to actual needs.

[0122] In a possible implementation manner, the first opening sealing structure includes a sealing rubber sheet 6121. For example, the sealing rubber sheet is made of silica gel. For example, sealing rubber sheets are respectively arranged on both sides of the connection assembly. For example, the sealing rubber sheet can be fixedly connected to the protective sheet metal 611 through a sealing rubber sheet pressing plate 61211. The shuttle-shaped structure on the aforementioned connecting seat is adapted to the area of the sealing rubber sheet. Compared with the rectangular structure, the end of the shuttle-shaped structure can effectively reduce the gap opened between the two sealing rubber sheets, thereby ensuring the first sealing effect.

[0123] In a possible implementation manner, the second opening sealing structure includes a sealing strip 6122 with a hollow structure. For example, the sealing strip is snap-fitted on a sealing strip bracket 61221, and the sealing strip bracket is fixedly arranged on the protective sheet metal. Similar to the sealing rubber sheet, the sealing strips are also symmetrically arranged on both sides of the connection assembly. Among them, the installation distance a between the snap-fitting positions of the sealing strips on both sides should be less than twice the size (width along the horizontal direction) of the hollow chamber formed by the sealing strip, so as to ensure that the two sealing strips can be mutually extruded, so that there is no gap between the two sealing strips in the non-passing area of the connecting bracket, thereby ensuring the second sealing effect.

[0124] In a possible implementation manner, the protection assembly includes a second protection assembly 62 for the laser sensor. This is because the laser sensor is a detection component with relatively high sensitivity, and it has relatively high requirements for clarity and cleanliness during the detection process. Therefore, in this embodiment, the integrity of the detection component and the cleanliness of its environment are mainly ensured by setting the second protection assembly.

[0125] Mainly refer to Figure 14 and Figure 15In a possible implementation, the second protection component 62 includes a sensor protection shell assembly. In this example, the sensor protection shell assembly includes a sensor protection cover 6211 with one side open and a sensor protection cover 6222. The sensor protection cover 6211 and the sensor protection cover 6222 form a receiving space, and the laser sensor is arranged inside the sensor protection cover with the aid of fasteners such as screws. Obviously, other structural forms can also be used to form the sensor protection shell assembly, such as two half-shell structures (such as left and right half shells, upper and lower half shells, etc.), a lower cover shell and an upper top plate, etc. Based on this, a preliminary method can be achieved by wrapping protection. In this example, a protection cover sealing gasket 6223 is provided between the sensor protection cover 6211 and the sensor protection cover 6222 to ensure the sealing effect of the sensor protection shell assembly.

[0126] In a possible implementation, a connector is provided on the sensor protective cover 6211, and the sensor cable and other related leads can be led out through the connector. For example, a connector is provided on the side of the sensor protective cover facing away from the network (such as the back side), wherein the connector is a waterproof connector 622. It is understandable that those skilled in the art can select any connector form with a waterproof function.

[0127] In a possible implementation, a light-transmitting hole is provided on the side of the sensor protective cover close to the wire mesh (such as the front side) to allow the laser sensor to transmit / receive laser through the light-transmitting hole to collect the characteristic data of the wire mesh. A light-transmitting sealing plate 623 is provided at the position of the sensor protective cover corresponding to the light-transmitting hole to protect the area of ​​the light-transmitting hole, such as providing a light-transmitting sealing plate 623 outside the light-transmitting hole. For example, the light-transmitting sealing plate is preferably sapphire glass. Preferably, a hydrophobic coating can be added to the light-transmitting sealing plate to reduce the adhesion of the cutting fluid on the light-transmitting sealing plate.

[0128] In a possible implementation, the light-transmitting sealing plate 623 is fixed to the sensor protective shell assembly via a light-transmitting sealing plate pressing plate 6231. Light-transmitting sealing plate sealing gaskets 6232 are respectively provided between the light-transmitting sealing plate pressing plate 6231 and the light-transmitting sealing plate 623 and between the light-transmitting sealing plate 623 and the sensor shield 621 to improve the sealing performance of the sensor shield corresponding to the light-transmitting hole.

[0129] In a possible implementation, to ensure that the internal space of the sensor protective housing assembly is dry and free of water vapor, a compressed gas assembly is configured for the sensor protective cover. For example, a compressed air outlet 6241 and a compressed air inlet 6242 are provided on the sensor protective cover. The compressed air source, the compressed air outlet, the compressed air inlet in the compressed gas assembly and the internal space of the sensor protective cover form a loop, and compressed air is introduced into the loop through the compressed air source to realize the air circulation in the internal space, so as to ensure that the internal space of the protective cover can be in a dry state without water vapor.

[0130] In a possible implementation, the second protective component 62 further includes a flushing component 625, which is mainly used to clean the light-transmitting sealing plate 623 to ensure good light transmittance. For example, in this example, a flushing component 625 is respectively provided above and below the sensor protective housing assembly at positions (outside) close to the light-transmitting sealing plate 623, and the two flushing components are arranged approximately symmetrically. For example, the flushing component includes a backflush nozzle, which can emit a flushing medium and enter the internal space of the sensor protective housing assembly through the backflush inlet to clean the light-transmitting sealing plate 623. For example, the flushing medium can be a liquid, a gas or a water vapor mixture, etc. Obviously, those skilled in the art can determine the structural form, number, relative position relationship between the flushing components and their installation positions on the sensor protective cover according to actual needs. Exemplarily, only one flushing component is provided.

[0131] It can be seen that through the settings of the first protective component and the second protective component, effective protection can be provided for the first moving component and the laser sensor of the detection mechanism. On this basis, the reliability of the detection mechanism can be ensured.

[0132] Based on the above structure, visual inspection for the slicing machine can be achieved. Taking the jumper wire as an example, wire mesh feature data wound around the first cutting main roller and the second cutting main roller of the cutting mechanism can be collected by two laser sensors respectively. Specifically, the distance between two adjacent diamond wire segments in the wire mesh is detected. Among them, when one of the diamond wire segments has a jumper wire situation, the distance between it and the adjacent diamond wire segment will be significantly greater than the distance between two other diamond wire segments without jumper wire. Specifically, assume that the distance (groove pitch) between two adjacent wire grooves on the cutting main roller is m, and the distance between two diamond wire segments in two adjacent wire grooves wound around the cutting main roller is b (m≈b). When one or more diamond wire segments in the wire mesh have a jumper wire situation, there will be an obvious situation where m≠b. Exemplarily, if the distance of the corresponding diamond wire segment is denoted as a, by comparing the distances between two adjacent diamond wire segments, when a situation of 0.1≤|a - b|≤m occurs for a certain diamond wire segment, it can be determined that the position of this diamond wire segment has a jumper wire problem. If it is determined that there is a jumper wire problem with the diamond wire, an alarm is issued at the position corresponding to the cutting chamber or the central control room to call relevant operators for manual intervention to eliminate the jumper wire problem in a timely manner. After the jumper wire problem is solved, the slicing machine can be restored to the normal automated operation state.

[0133] It can be seen that in the preferred embodiment of the present invention, by introducing a laser sensor in the detection mechanism, visual acquisition of wire mesh feature data can be performed, and based on this, automated slicing operation based on visual acquisition can be achieved. Through the setting of the movable component, the laser sensor can perform visual acquisition of wire mesh feature data through the combination of movement and rotation, so that problems such as jumper wire, excessive wire bow, the silicon rod not being cut through by the diamond wire, and wire hanging during retraction of the tool can be discovered in a timely manner, thus ensuring the reliability of the automated slicing operation. Through the setting of the adjustment component, it can be ensured that the laser sensor can perform more accurate visual acquisition of wire mesh features, thereby further ensuring the reliability of the automated slicing operation. Through the setting of the protection component, the working reliability of the movable component and the distance measuring sensor during the automated slicing operation can be ensured.

[0134] So far, the technical solution of the present invention has been described in combination with the preferred embodiments shown in the drawings. However, it is easy for those skilled in the art to understand that the protection scope of the present invention is obviously not limited to these specific embodiments. Without departing from the principle of the present invention, those skilled in the art can make equivalent changes or substitutions to relevant technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of the present invention.

Claims

1. A detection component, characterized in that, The detection component includes: a laser detection component; and a protection part, which includes: a protective shell component, which forms a protection space, the laser detection component is accommodated in the protection space, and the protective shell component has an opening allowing laser to pass through; a light-transmitting sealing component, which is arranged at the position of the protective shell component corresponding to the opening.

2. The detection component according to claim 1, characterized in that The light-transmitting sealing component is fixedly connected to the protective shell component through a light-transmitting sealing component pressing plate.

3. The detection component according to claim 2, wherein A first sealing gasket is arranged between the light-transmitting sealing component and the light-transmitting sealing component pressing plate and / or between the light-transmitting sealing component pressing plate and the protective shell component.

4. The detection component according to claim 1, characterized in that, A hydrophobic coating is arranged on the light-transmitting sealing component.

5. The detection component according to claim 1, wherein The protection part includes a compressed gas component, and the compressed gas component can introduce compressed air into the protection space.

6. The detection component according to claim 1, wherein The protection part includes a flushing component, and the flushing component can at least flush the light-transmitting sealing component.

7. The detection component according to claim 1, characterized in that, The laser detection component is connected to an external circuit through a lead wire, and a waterproof connector is arranged at the position of the protective shell component corresponding to the lead wire.

8. The detection component according to claim 1, characterized in that, The protective shell component includes a protective cover and a protective cover plate, and the protective cover and the protective cover plate form the protection space, and the opening is arranged on the protective cover.

9. The detection component according to claim 8, wherein A second sealing gasket is arranged between the protective cover and the protective cover plate.

10. A wire cutting machine, characterized in that, The wire cutting machine includes the detection component according to any one of claims 1 to 9.

11. The wire cutting machine according to claim 10, characterized in that, The wire cutting machine is a slicing machine.

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