Cleaning roller manufacturing device
By combining the inner mold with the outer mold to cut the tool, the dense layer of the sponge roller is removed to form a porous structure, which solves the problems of water molecules outflow and dirt removal, and achieves the efficient cleaning effect of the cleaning roller.
Patent Information
- Application Number
- CN202422038957.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-21
- Publication Date
- 2025-07-04
- Estimated Expiration
- 2034-08-21
AI Technical Summary
The dense layer of the existing sponge roller for wafer cleaning prevents the outflow of water molecules, resulting in dirt that cannot be effectively removed and is prone to stick to the sponge surface to form defects.
The method of making the inner mold and outer mold are used to combine the cutting tool. By cutting the foam sponge between the inner mold and the outer mold, the dense layer is removed to form a cleaning roller with a porous structure.
It achieves a good water absorption effect of the cleaning roller, does not block the outflow of water molecules, effectively eliminates surface dirt and reduces pollution to the wafer surface.
Smart Images
Figure CN223058207U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer cleaning equipment, in particular to a cleaning roller manufacturing device. Background Art
[0002] After polishing, the wafer needs to be cleaned of surface impurities to avoid contamination of semiconductor devices by dirt particles, etc. The wafer is generally cleaned by a brush roll. At this time, the brush roll used includes a hollow shaft and a sponge outside the hollow shaft. The brush roll is installed on a rotatable brush fixing structure. During the rotation of the brush roll, the cleaning liquid enters the sponge through the hollow shaft and seeps out from the surface of the sponge, thereby completing the cleaning of the wafer.
[0003] The sponge roller used for wafer cleaning is mainly made by sleeving a sponge on a central rod. Depending on the usage requirements, the central rod can be solid or hollow. Currently, the sponge rollers applied to semiconductor manufacturing, especially the cleaning after chemical mechanical polishing (CMP), mainly use a central rod, and the hollow part provides internal water supply to the sponge to keep the sponge moist.
[0004] In the prior art, when manufacturing the sponge roller for wafer cleaning, the sponge is mainly foamed by a mold. The polyvinyl alcohol fiber (PVA) sponge made by this method usually has a dense layer with a thickness of dozens to hundreds of microns on its surface. This dense layer will block the outflow of water molecules from the sponge to the outside, thereby causing dirt to be unable to be effectively removed and adhering to the surface of the sponge. Moreover, this dense layer will also make the sponge more likely to adhere to dirt and form defects on the surface of the wafer during wafer cleaning. Summary of the Utility Model
[0005] Therefore, the technical problem to be solved by the utility model is to overcome the defects that the water molecule outflow performance on the upper surface of the sponge roller for wafer cleaning in the prior art is poor and it is more likely to adhere to dirt, so as to provide a cleaning roller manufacturing device.
[0006] To solve the above technical problem, the utility model provides a cleaning roller manufacturing device, including:
[0007] An inner mold, which is of a hollow structure, is provided with sponge growth through holes, and a central rod of a cleaning roller is suitable for being installed in the inner cavity of the inner mold;
[0008] An outer mold, coaxially sleeved and installed on the inner mold;
[0009] A cutting tool, which is arranged between the inner mold and the outer mold, and is suitable for moving towards or away from the inner mold to cut off the foamed sponge between the sponge growth through hole and the outer mold.
[0010] Optionally, the cutting tool is an annular blade, and the annular blade is adapted to be coaxially inserted between the inner mold and the outer mold.
[0011] Optionally, the inner diameter of the outer mold is greater than the outer diameter of the inner mold, so as to leave a cutting gap between the inner mold and the outer mold, and the cutting tool is adapted to move axially along the inner mold within the cutting gap.
[0012] Optionally, the outer mold is provided with sponge growth grooves, and the sponge growth grooves are arranged in one-to-one correspondence with the sponge growth through holes.
[0013] The present utility model also provides a method for manufacturing a cleaning roller, which uses the cleaning roller manufacturing device of the present utility model and includes the following steps:
[0014] Apply and cure sponge on the central rod, coaxially sleeved and installed the inner mold on the central rod. The inner mold is provided with a plurality of sponge growth through holes, and the outer mold is sleeved and installed outside the inner mold;
[0015] Inject foaming liquid between the central rod and the inner mold to make the cured sponge foam and grow into a foamed sponge until the foamed sponge penetrates the sponge growth through holes;
[0016] Insert the cutting tool between the inner mold and the outer mold, completely cut off the foamed sponge between the sponge growth through holes and the outer mold, and remove the cutting tool, the outer mold and the inner mold to obtain the formed sponge cleaning roller.
[0017] Optionally, the outer mold is provided with sponge growth grooves. After the foamed sponge penetrates the sponge growth through holes, the foamed sponge continues to grow until it extends into the sponge growth grooves.
[0018] Optionally, when installing the outer mold, the sponge growth grooves are arranged in one-to-one correspondence with the sponge growth through holes
[0019] Optionally, the cutting tool is an annular blade, and the annular blade is coaxially inserted between the inner mold and the outer mold.
[0020] Optionally, the inner diameter of the outer mold is greater than the outer diameter of the inner mold, so as to leave a cutting gap between the inner mold and the outer mold when the outer mold is sleeved and installed outside the inner mold;
[0021] The step of inserting the cutting tool between the inner mold and the outer mold is: inserting the annular tool into the cutting gap.
[0022] Optionally, the step of removing the cutting tool, the outer mold and the inner mold includes: first removing the cutting tool and the outer mold, trimming the edge of the foamed sponge, and then removing the inner mold.
[0023] Optionally, the central rod is a hollow rod, and through holes are provided on the side wall of the hollow rod.
[0024] Optionally, one end of the hollow rod is open and the other end is closed.
[0025] Optionally, the foamed sponge completely fills the sponge growth through holes.
[0026] The present utility model also provides a cleaning roller, which is prepared by the cleaning roller manufacturing method described in the present utility model.
[0027] The technical solution of the present utility model has the following advantages:
[0028] 1. For the cleaning roller device provided by the present utility model, when manufacturing the cleaning roller, a curing sponge is coated on the central rod, the inner mold is coaxially sleeved and installed on the central rod, a plurality of sponge growth through holes are provided on the inner mold, and the outer mold is sleeved and installed outside the inner mold; a foaming liquid is injected between the central rod and the inner mold to make the curing sponge foam and grow into a foamed sponge until the foamed sponge penetrates through the sponge growth through holes; a cutting tool is inserted between the inner mold and the outer mold to completely cut off the foamed sponge between the sponge growth through holes and the outer mold, and the cutting tool, the outer mold and the inner mold are removed to obtain the formed sponge cleaning roller.
[0029] After the cutting tool enters the annular cutting space formed between the outer mold and the inner mold, the foamed sponge is cut into two parts, one part is located in the sponge growth through holes of the inner mold, and the other part is cut off and located between the inner mold and the outer mold. After the outer mold is demolded from the inner mold, the cleaning sponge with the dense layer removed is obtained. The cleaning sponge with the dense layer removed has a good water absorption effect, does not block the water molecules from flowing out of the sponge, and can effectively remove the dirt adhering to the sponge surface.
[0030] 2. For the cleaning roller manufacturing device provided by the present utility model, a sponge growth groove is provided on the outer mold. After the foamed sponge penetrates through the sponge growth through holes, the foamed sponge continues to grow until it extends into the sponge growth groove. When cutting, the foamed sponge is divided into two parts from the sponge growth groove and the sponge growth through holes to ensure that the surface of the foamed sponge can be completely cut off.
[0031] 3. For the cleaning roller manufacturing device provided by the present utility model, the cutting tool is an annular blade, and the annular blade is coaxially inserted between the inner mold and the outer mold. By inserting the annular blade between the inner mold and the outer mold, the cutting of the foamed sponge can be completed at one time, and the processing efficiency is high. Description of the Drawings
[0032] In order to more clearly illustrate the specific embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.
[0033] Figure 1 It is a schematic structural diagram of the cooperation of a foaming sponge, a hollow rod and a double-layer mold provided in the embodiments of the present utility model.
[0034] Figure 2 It is a side view of the cooperation structure of a foaming sponge, a hollow rod and a double-layer mold provided in the embodiments of the present utility model.
[0035] Figure 3 It is a schematic diagram of the cutting position of the foaming sponge provided in the embodiments of the present utility model, where the dashed line is the cutting position.
[0036] Figure 4 It is a schematic structural diagram of a cleaning roller manufacturing device provided in the embodiments of the present utility model.
[0037] Figure 5 It is a schematic structural diagram of an outer mold provided in the embodiments of the present utility model.
[0038] Figure 6 It is a schematic structural diagram of an inner mold provided in the embodiments of the present utility model.
[0039] Figure 7 It is a schematic structural diagram of a cleaning roller provided in the embodiments of the present utility model.
[0040] Figure 8 It is a schematic structural diagram of a hollow rod provided in the embodiments of the present utility model.
[0041] Explanation of reference numerals: 1, hollow rod; 2, through hole; 3, inner mold; 4, outer mold; 5, sponge growth through hole; 6, sponge growth groove; 7, foaming sponge; 8, cutting tool. Specific embodiments
[0042] The following will clearly and completely describe the technical solutions of the present utility model with reference to the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the protection scope of the present utility model.
[0043] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.
[0044] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0045] In addition, the technical features involved in different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.
[0046] Embodiment 1
[0047] This embodiment provides a cleaning roller manufacturing device, including an inner mold 3, an outer mold 4, and a cutting tool 8.
[0048] The inner mold 3 is of a hollow structure. The inner mold 3 is provided with sponge growth through holes 5. The center rod of the cleaning roller is suitable for being installed in the inner cavity of the inner mold 3. The outer mold 4 is coaxially sleeved and installed on the inner mold 3. The cutting tool 8 is arranged between the inner mold 3 and the outer mold 4. The cutting tool 8 is suitable for moving towards or away from the inner mold 3 to cut off the foamed sponge 7 between the sponge growth through holes 5 and the outer mold 4. The cutting tool 8 is an annular blade, and the annular blade is suitable for being coaxially inserted between the inner mold 3 and the outer mold 4. The inner diameter of the outer mold 4 is larger than the outer diameter of the inner mold 3, so that a cutting gap is reserved between the inner mold 3 and the outer mold 4. The cutting tool 8 is suitable for moving axially along the inner mold 3 in the cutting gap. The outer mold 4 is provided with sponge growth grooves 6, and the sponge growth grooves 6 are arranged in one-to-one correspondence with the sponge growth through holes 5.
[0049] This embodiment also provides a cleaning roller manufacturing method, which uses the cleaning roller manufacturing device provided in this embodiment, and includes the following steps:
[0050] Such as Figure 1 And Figure 2As shown, a solidified sponge is coated on the central rod, and the inner mold 3 is coaxially sleeved and installed on the central rod. A plurality of sponge growth through-holes 5 are provided on the inner mold 3, and an outer mold 4 is sleeved and installed outside the inner mold 3. Foaming liquid is injected between the central rod and the inner mold 3 to cause the solidified sponge to foam and grow into a foamed sponge 7 until the foamed sponge 7 penetrates through the sponge growth through-holes 5. As Figure 3 and Figure 4 shown, a cutting tool 8 is inserted between the inner mold 3 and the outer mold 4 to completely cut off the foamed sponge 7 between the sponge growth through-holes 5 and the outer mold 4. The cutting tool 8, the outer mold 4 and the inner mold 3 are removed to obtain a formed sponge cleaning roller.
[0051] As Figure 5 shown, a sponge growth groove 6 is provided on the outer mold 4 provided in this embodiment. As Figure 6 shown, sponge growth through-holes 5 are provided on the inner mold 3. After the foamed sponge 7 penetrates through the sponge growth through-holes 5, the foamed sponge 7 continues to grow until it extends into the sponge growth groove 6. The foamed sponge 7 completely fills the sponge growth through-holes 5. When installing the outer mold 4, the sponge growth grooves 6 are arranged in one-to-one correspondence with the sponge growth through-holes 5
[0052] The cutting tool 8 in this embodiment is an annular blade, and the annular blade is coaxially inserted between the inner mold 3 and the outer mold 4. The inner diameter of the outer mold 4 is larger than the outer diameter of the inner mold 3 so that when the outer mold 4 is sleeved and installed outside the inner mold 3, a cutting gap is reserved between the inner mold 3 and the outer mold 4; when the cutting tool 8 is inserted between the inner mold 3 and the outer mold 4, the annular tool is inserted into the cutting gap.
[0053] To ensure the completeness of the cutting of the dense layer and at the same time ensure the aesthetic degree of the foamed sponge 7 after cutting, when removing the cutting tool 8, the outer mold 4 and the inner mold 3, first remove the cutting tool 8 and the outer mold 4, trim the edge of the foamed sponge 7, and then remove the inner mold 3.
[0054] The central rod in this embodiment is a hollow rod 1, and a through-hole 2 is provided on the side wall of the hollow rod 1. One end of the hollow rod 1 is open and the other end is closed. The open end of the hollow rod 1 is used to dock with an external cleaning liquid supply device. When using the cleaning roller to clean the wafer, the cleaning liquid enters the inner cavity of the hollow rod 1 through the open end of the hollow rod 1, and then flows out through the through-hole 2 and soaks into the foamed sponge 7 to wet the foamed sponge 7, and then the foamed sponge 7 is used to clean the wafer.
[0055] The cleaning roller manufacturing method provided in this embodiment processes the dense layer on the surface of the foam sponge 7 to increase the number of pores on the surface of the foam sponge 7, reduce the situation where dirt is stained on the surface of the foam sponge 7 when cleaning the wafer, and further reduce the situation where dirt forms defects on the wafer surface. By using a double-layer mold, the manufacturing size of the cleaning protrusion on the outside of the foam sponge 7 is extended, and the inner mold 3 and the outer mold 4 are matched to form a cutting gap between the inner mold 3 and the outer mold 4 of 0.1 mm to several mm, and the cutting tool 8 is used to pass through the cutting gap to cut off the cleaning protrusion extending outward from the foam sponge 7 to form the required porous sponge brush surface.
[0056] The double-layer mold is two tubular structures of corresponding lengths, including an inner mold 3 and an outer mold 4, both of which are sleeved on the outside of the hollow rod 1. The outer mold 4 is sleeved on the outer circumference of the inner mold 3. The inner diameter of the outer mold 4 is larger than the outer diameter of the inner mold 3, so that the outer mold 4 and the inner mold 3 are adapted to fit. An annular cutting gap for the socket circular ring knife is formed between the inner diameter of the outer mold 4 and the inner mold 3; the width of the annular cutting gap is the difference between the inner diameter of the outer mold 4 and the outer diameter of the inner mold 3, which can be understood as the matching spacing between the inner and outer molds 4. The cutting tool 8 is a tube structure, one end of which has an annular blade for cutting sponges, and the other end is a gripping end for a robotic arm or a human hand. The wall thickness of the annular blade is the difference between the outer diameter and the inner diameter of the annular blade. The inner diameter of the annular blade should be greater than or equal to the outer diameter of the inner mold 3, and the outer diameter of the circular ring knife should be less than or equal to the inner diameter of the outer mold 4, so that the annular blade can be inserted into the annular cutting gap to cut the sponge. When the outer mold 4 is sleeved on the outside of the inner mold 3, the sponge growth grooves 6 provided on the outer mold 4 correspond to the sponge growth through holes 5 of the inner mold 3, and the sponge growth grooves 6 provided on the outer mold 4 and the sponge growth through holes 5 of the inner mold 3 form a complete sponge growth channel. When in use, the operator needs to apply PVA foam to the outer periphery of the hollow rod 1, then sleeve the inner mold 3 concentrically on the outside of the hollow rod 1, and then sleeve the outer mold 4 on the outside of the inner mold 3. After the foamed PVA sponge fills the annular space between the hollow rod 1 and the inner mold 3, it continues to foam into the sponge growth through holes 5 of the inner mold 3, and then enters the corresponding sponge growth grooves 6 provided on the outer mold 4 through the sponge growth through holes 5 of the inner mold 3, until the entire sponge growth channel is filled.
[0057] After the cutting tool 8 enters the annular cutting space formed between the outer mold 4 and the inner mold 3, the foaming sponge 7 is cut into two parts, one part is located in the sponge growth through hole 5 of the inner mold 3, and the other part is cut off and located between the inner mold 3 and the outer mold 4. After the outer mold 4 is demoulded from the inner mold 3, the edges are trimmed to obtain a cleaning sponge with the dense layer removed. The cleaning sponge with the dense layer removed has a good water absorption effect, does not block the water molecules from flowing out of the sponge, and can effectively remove dirt attached to the surface of the sponge.
[0058] As an alternative embodiment, the sponge growth grooves 6 are not provided on the outer mold 4. When the foamed sponge 7 grows during foaming, after growing to abut against the inner wall of the outer mold 4, the cutting tool 8 is inserted between the inner mold 3 and the outer mold 4 to cut the dense layer on the surface of the foamed sponge 7.
[0059] Embodiment 2
[0060] Figure 7 As shown, this embodiment provides a cleaning roller, which is made by the cleaning roller manufacturing method provided in Embodiment 1. The center is a hollow rod 1, and a foamed sponge 7 is sleeved and installed outside the hollow rod 1. As Figure 8 shown, one end of the hollow rod 1 is open and the other end is closed. The open end of the hollow rod 1 is used to dock with an external cleaning liquid supply device. When using the cleaning roller to clean the wafer, the cleaning liquid enters the inner cavity of the hollow rod 1 through the open end of the hollow rod 1, and then flows out through the through holes 2 and soaks into the foamed sponge 7 to wet the foamed sponge 7, and then the foamed sponge 7 is used to clean the wafer. A plurality of cleaning protrusions exposing the porous structure after removing the dense layer are provided on the outer surface of the foamed sponge 7. The cleaning sponge with the dense layer removed has a good water absorption effect, does not block the water molecules from flowing out of the sponge, and can effectively remove the dirt adhering to the surface of the sponge.
[0061] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the embodiments. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the embodiments here. And the obvious changes or modifications derived therefrom are still within the protection scope of the present invention.
Claims
1. A cleaning roller manufacturing device, characterized in that, Comprising: An inner mold (3), which has a hollow structure. A sponge growth through-hole (5) is provided on the inner mold (3), and a central rod for installing a cleaning roller is adapted to be installed in the inner cavity of the inner mold (3); An outer mold (4), coaxially sleeved and installed on the inner mold (3); A cutting tool (8), which is arranged between the inner mold (3) and the outer mold (4). The cutting tool (8) is adapted to move towards or away from the inner mold (3) to cut off the foamed sponge (7) between the sponge growth through-hole (5) and the outer mold (4).
2. The cleaning roller manufacturing device according to claim 1, wherein The cutting tool (8) is an annular blade, and the annular blade is adapted to be coaxially inserted between the inner mold (3) and the outer mold (4).
3. The cleaning roller manufacturing device according to claim 2, wherein, The inner diameter of the outer mold (4) is larger than the outer diameter of the inner mold (3), so as to leave a cutting gap between the inner mold (3) and the outer mold (4). The cutting tool (8) is adapted to move axially along the inner mold (3) within the cutting gap.
4. The cleaning roller manufacturing device according to any one of claims 1 to 3, characterized in that A sponge growth groove (6) is provided on the outer mold (4), and the sponge growth grooves (6) are arranged in one-to-one correspondence with the sponge growth through-holes (5).