Pressing plate assembly, fixing device and coating equipment

Abstract

The utility model discloses a pressing plate assembly, a fixing device and coating equipment, and the pressing plate assembly comprises a pressing plate and an insulating part. The insulating part is provided with a first surface and a second surface which are back to back, the first surface is used for being in contact with the substrate to abut against the substrate, the second surface is connected to the pressing plate, the insulating part is limited to form a partition groove, the partition groove extends to the side face of the pressing plate assembly in the first direction, and the first direction is the direction, facing the middle area of the substrate, of the pressing plate assembly. Therefore, in the film coating process, the partition groove forms a partition area between the substrate and the pressing plate, connection between the film coating layers on the pressing plate and the film coating layers on the substrate can be effectively reduced, the risk of electrical connection between the substrate and the pressing plate is reduced, the sparking phenomenon between the base table and the pressing plate is reduced, and the film coating effect of the substrate is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating, in particular to a pressing plate assembly, a fixing device and a coating device. Background Art

[0002] Physical Vapor Deposition (PVD) is a technology that, under vacuum conditions, physically vaporizes the material source (solid or liquid) into gaseous atoms, molecules or partially ionizes them into ions on the surface, and deposits a thin film with a special function on the substrate surface through low-pressure gas (or plasma). The main methods of physical vapor deposition include vacuum evaporation coating, sputtering coating, arc plasma plating, ion plating, molecular beam epitaxy, etc.

[0003] During the coating process, in order to prevent the edges of the substrate from warping, a pressing plate is used to press the edges of the substrate. In some technologies, in order to improve the strength of the pressing plate, a metal pressing plate is usually used. At the same time, in order to avoid arcing between the pressing plate and the substrate table for supporting the substrate, an insulating member is provided between the pressing plate and the substrate to insulate the pressing plate from the substrate. However, during the coating process, the target material will not only cover the substrate to form a film layer, but also cover the pressing plate to form a film layer. Therefore, in the actual coating process, there is a risk that the film layer on the substrate and the film layer on the pressing plate assembly are connected, resulting in arcing between the pressing plate and the substrate table and affecting the coating quality. Summary of the Utility Model

[0004] The utility model aims to at least solve one of the technical problems existing in the prior art. For this purpose, the utility model provides a pressing plate assembly for pressing the edges of a substrate in a coating process, which can reduce the risk of arcing between the pressing plate and the substrate table, thereby improving the coating quality.

[0005] The utility model also provides a fixing device including the above pressing plate assembly.

[0006] The utility model also provides a coating device including the above fixing device.

[0007] The pressing plate assembly according to the first aspect embodiment of the utility model includes: a pressing plate and an insulating member.

[0008] The insulating member has a first surface and a second surface facing away from each other. The first surface is used to contact the substrate to press against the substrate, and the second surface is connected to the pressing plate. The insulating member defines a partition groove that extends along a first direction to the side surface of the pressing plate assembly, where the first direction is the direction in which the pressing plate assembly faces the central region of the substrate.

[0009] In this embodiment, the insulating member defines a partition groove that extends along a first direction to the side surface of the pressing plate assembly. Therefore, during the coating process, it is difficult for the target material to enter the partition groove, so it is difficult to form a film layer on the inner wall of the partition groove. Furthermore, a separation region is formed between the film layer on the substrate and the pressing plate, thereby reducing the electrical connection between the substrate and the pressing plate, reducing the occurrence of arcing between the base and the pressing plate, and improving the coating effect of the substrate.

[0010] According to some embodiments of the present invention, the insulating member has a third surface facing in the first direction. The pressing plate protrudes from the insulating member along the first direction and defines a first partition groove with the third surface. The partition groove includes the first partition groove.

[0011] According to some embodiments of the present invention, the surface of the pressing plate facing the insulating member has a second partition groove that extends along the first direction to the edge of the pressing plate. The partition groove includes the second partition groove.

[0012] According to some embodiments of the present invention, in the first direction, the size of the second partition groove is L1, and in the second direction, the size of the second partition groove is L2, where L1 / L2 ≥ 10. The second direction is the direction from the pressing plate to the insulating member.

[0013] According to some embodiments of the present invention, the surface of the pressing plate facing away from the insulating member has a plurality of protrusions for increasing the roughness of the surface of the pressing plate facing away from the insulating member.

[0014] According to some embodiments of the present invention, a sprayed coating layer is provided on the surface of the pressing plate facing away from the insulating member for increasing the roughness of the surface of the pressing plate facing away from the insulating member.

[0015] According to some embodiments of the present invention, the insulating member is detachably connected to the pressing plate.

[0016] The fixing device according to the second aspect embodiment of the present invention includes a plurality of pressing plate assemblies according to the first aspect embodiments, and each of the pressing plate assemblies is respectively used to press different edges of the substrate.

[0017] The fixing device according to the embodiment of the present invention has at least the following beneficial effects:

[0018] Using the pressing plate assembly of the first aspect embodiment, the insulating member defines a partition groove, and the partition groove extends along the first direction to the side surface of the pressing plate assembly. Therefore, during the coating process, it is difficult for the target material to enter the partition groove, so it is difficult to form a film layer on the inner wall of the partition groove. Furthermore, a separation region is formed between the film layer on the substrate and the pressing plate, thereby reducing the electrical connection between the substrate and the pressing plate, reducing the arcing phenomenon between the substrate table and the pressing plate, and improving the coating effect of the substrate.

[0019] The coating equipment according to the third aspect embodiment of the present invention includes: the fixing device of the second aspect embodiment.

[0020] The coating equipment according to the embodiment of the present invention has at least the following beneficial effects:

[0021] Using the fixing device of the first aspect embodiment, wherein the insulating member of the pressing plate assembly defines a partition groove, and the partition groove extends along the first direction to the side surface of the pressing plate assembly. Therefore, during the coating process, it is difficult for the target material to enter the partition groove, so it is difficult to form a film layer on the inner wall of the partition groove. Furthermore, a separation region is formed between the film layer on the substrate and the pressing plate, thereby reducing the electrical connection between the substrate and the pressing plate, reducing the arcing phenomenon between the substrate table and the pressing plate, and improving the coating effect of the substrate.

[0022] The additional aspects and advantages of the present invention will be partially given in the following description, partially become apparent from the following description, or be understood through the practice of the present invention. Description of the Drawings

[0023] The following further describes the present invention in conjunction with the drawings and embodiments, wherein:

[0024] Figure 1 is a cross-sectional view of the pressing plate assembly according to the first aspect embodiment of the present invention;

[0025] Figure 2 is Figure 1 a schematic diagram of the pressing plate assembly and the substrate in the prior art in

[0026] Figure 3 is a cross-sectional view of another pressing plate assembly according to the first aspect embodiment of the present invention;

[0027] Figure 4 is a schematic structural diagram of the second aspect embodiment of the present invention.

[0028] Reference Signs:

[0029] Substrate 1;

[0030] Pressing plate assembly 10;

[0031] Pressing plate 100, second partition groove 110, convex portion 120;

[0032] Insulating part 200, first surface 210, second surface 230, third surface 240;

[0033] Partition groove 300, first partition groove 400, third partition groove 500. Specific embodiments

[0034] Embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0035] In the description of the present invention, it should be understood that with respect to the orientation description, such as up, down, front, back, left, right, etc., the orientation or positional relationship indicated is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

[0036] In the description of the present invention, the meaning of "several" is more than one, the meaning of "multiple" is more than two, and understandings such as "greater than", "less than", "exceeding", etc. do not include the present number, and understandings such as "above", "below", "within", etc. include the present number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0037] In the description of the present invention, unless otherwise clearly defined, terms such as "arrangement", "installation", "connection", etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific content of the technical solution.

[0038] Physical Vapor Deposition (PVD) is a technology that, under vacuum conditions, uses physical methods to vaporize the surface of a material source (solid or liquid) into gaseous atoms, molecules, or partially ionize them into ions, and deposit a thin film with a certain special function on the surface of a substrate through low-pressure gas (or plasma). The main methods of physical vapor deposition include vacuum evaporation, sputtering coating, arc plasma plating, ion plating, and molecular beam epitaxy, etc.

[0039] During the coating process, in order to prevent the edges of the substrate from warping, a pressing plate is used to press the edges of the substrate. In some technologies, in order to improve the strength of the pressing plate, a metal pressing plate is usually adopted. At the same time, in order to avoid arcing between the pressing plate and the substrate table used to support the substrate, an insulating member is provided between the pressing plate and the substrate to insulate the pressing plate from the substrate. However, during the coating process, the target material will not only cover the substrate to form a film layer, but also cover the pressing plate to form a film layer. Therefore, during the actual coating process, there is a risk that the film layer on the substrate and the film layer on the pressing plate assembly are connected, resulting in arcing between the pressing plate and the substrate table and affecting the coating quality.

[0040] Based on the above problems, the first aspect embodiment of the present invention proposes a pressing plate assembly 10, which can reduce the risk of arcing between the pressing plate and the substrate table to improve the coating quality of the substrate. Refer to Figure 1 and Figure 2 , Figure 1 is a cross-sectional view of the pressing plate assembly according to the first aspect embodiment of the present invention, Figure 2 is Figure 1 a schematic diagram of the pressing plate assembly in

[0041] and the substrate in the prior art. The pressing plate assembly 10 of this embodiment includes: a pressing plate 100 and an insulating member 200.

[0041] Among them, the pressing plate 100 is made of materials such as aluminum alloy or stainless steel, etc., so that the pressing plate assembly 10 has sufficient strength and certain high-temperature resistance. The insulating member 200 is made of insulating materials such as ceramics or silicon oxide, etc. The insulating member 200 has opposite first surface 210 and second surface 230. The first surface 210 is used to contact the substrate 1 to press against the substrate 1, and the second surface 230 is connected to the pressing plate 100. The insulating member 200 defines a partition groove 300. For example, the partition groove 300 is formed in the insulating member 200, or the insulating member 200 and the pressing plate 100 jointly define the partition groove 300. The partition groove 300 extends along the first direction to the side surface of the pressing plate assembly 10. The first direction is the middle region of the pressing plate assembly 10 facing the substrate, that is, during the working process, the insulating member 200 presses against the edge of the substrate 1, and the partition groove 300 faces the middle region of the substrate 1 (as Figure 2 shown).

[0042] It can be understood that since the partition groove 300 faces the middle region of the substrate 1, and during the coating process, the target material is deposited on the substrate 1 in a direction approximately perpendicular to the substrate 1, that is, the orientation of the partition groove 300 is approximately perpendicular to the direction of the target material facing the substrate 1. Thus, it can make it difficult for the target material to enter the partition groove 300, thereby forming a separation region between the substrate 1 and the pressing plate 100, which can effectively reduce the connection between the coating layer on the pressing plate 100 and the coating layer on the substrate 1, thereby reducing the risk of energization between the substrate 1 and the pressing plate 100, and reducing the occurrence of arcing between the substrate table and the pressing plate 100, thereby improving the coating effect of the substrate 1.

[0043] Referring to Figure 1 , on the basis of the above embodiments, the insulating member 200 has a third surface 240 facing in the first direction. The pressing plate 100 protrudes from the insulating member 200 in the first direction and defines a first partition groove 400 with the third surface 240. The partition groove 300 includes the first partition groove 400, that is, the insulating member 200 and the pressing plate 100 jointly define the partition groove 300. Specifically, in this embodiment, the first partition groove 400 can be formed only by the misaligned installation of the insulating member 200 and the pressing plate 100, without the need for additional processing of the pressing plate 100 or the insulating member 200, so that the formation of the partition groove 300 is simpler and the processing cost of the pressing plate assembly 10 is reduced.

[0044] Referring to Figure 3 , Figure 3 is a cross-sectional view of another pressing plate assembly according to the first aspect of the present invention. In some embodiments, the surface of the pressing plate 100 facing the insulating member 200 has a second partition groove 110. The second partition groove 110 extends in the first direction to the side surface of the pressing plate 100. The inner wall of the second partition groove 110 and the second surface 230 define a third partition groove 500. The partition groove 300 includes the third partition groove 500. Specifically, since the pressing plate 100 is a metal structure, compared with forming the second partition groove 110 in the insulation, it is easier to form the second partition groove 110 on the pressing plate 100, and the size of the second partition groove 110 in the first direction can be made large enough according to requirements, so as to increase the isolation effect of the partition groove 300, thereby further reducing the risk of arcing between the pressing plate 100 and the base.

[0045] On the basis of the above embodiments, in the first direction, the size of the second partition groove 110 is L1, and in the second direction (the second direction is the direction from the pressing plate 100 to the insulating member 200), the size of the second partition groove 110 is L2, and L1 / L2≥10. That is, the third partition groove 500 formed by the inner wall of the second partition groove 110 and the second surface 230 is a narrow gap, which can further increase the difficulty of the target material entering the third partition groove 500, thereby improving the isolation effect of the partition groove 300, reducing the risk of arcing between the pressing plate 100 and the base, and thus improving the coating efficiency of the substrate 1.

[0046] Referring to Figure 1, in some embodiments, the surface of the pressing plate 100 facing away from the insulating member 200 has a plurality of protrusions 120, and the protrusions 120 are used to increase the roughness of the surface of the pressing plate 100 facing away from the insulating member 200. Specifically, as described above, during the coating process, the target material will not only cover the surface of the substrate 1 but also cover the surface of the pressing plate 100. As the usage time of the pressing plate 100 increases, the film layer on the surface of the pressing plate 100 becomes thicker. If the pressing plate 100 is not cleaned, the film layer covering the surface of the pressing plate 100 will automatically fall off and contaminate the coating chamber. Therefore, during actual construction, the pressing plate 100 needs to be regularly maintained and cleaned, which affects the coating efficiency. For this reason, in this embodiment, a plurality of protrusions 120 are formed on the surface of the pressing plate 100 facing away from the insulating member 200 by machining or knurling, etc., to increase the roughness of the surface of the pressing plate 100, thereby improving the adhesion of the surface of the pressing plate 100, making the film layer on the surface of the pressing plate 100 not easily fall off, and thus reducing the frequency of maintenance and cleaning of the pressing plate 100, thereby improving the coating efficiency of the equipment.

[0047] Similarly, in some embodiments, a sprayed layer is provided on the surface of the pressing plate 100 facing away from the insulating member 200. For example, the pressing plate 100 is made of aluminum, and the sprayed layer is an aluminum sprayed layer. The sprayed layer is used to increase the roughness of the surface of the pressing plate 100 facing away from the insulating member 200, thereby improving the adhesion of the surface of the pressing plate 100, and thus making the film layer on the surface of the pressing plate 100 not easily fall off. This can reduce the frequency of maintenance and cleaning of the pressing plate 100, thereby improving the coating efficiency of the equipment. In addition, it should be noted that in order to increase the adhesion of the film layer, both protrusions 120 and a sprayed layer can be provided on the surface of the pressing plate 100.

[0048] In some embodiments, the insulating member 200 is detachably connected to the pressing plate 100 by screw connection or snap connection. Therefore, when one of the pressing plate 100 or the insulating member 200 is damaged, only the damaged one needs to be replaced separately, without replacing the entire pressing plate assembly 10, thereby reducing the maintenance cost of the pressing plate assembly 10.

[0049] Refer to Figure 4 , Figure 4The structural schematic diagram of the second aspect embodiment of the present utility model. The fixing device of the second aspect embodiment of the present utility model includes: a plurality of pressing plate assemblies 10 of the first aspect embodiment, and each pressing plate assembly 10 is respectively used to press different edges of the substrate 1. For example, the substrate 1 is a quadrilateral structure, the fixing device includes four pressing plate assemblies 10, and each pressing plate assembly 10 abuts against one edge of the pole piece. The insulating member 200 of the pressing plate assembly 10 defines a partition groove 300, and the partition groove 300 extends along the first direction to the side surface of the pressing plate assembly 10. Therefore, during the coating process, the partition groove 300 forms a separation area between the substrate 1 and the pressing plate 100, which can effectively reduce the connection between the coating layer on the pressing plate 100 and the coating layer on the substrate 1, thereby reducing the risk of electrical connection between the substrate 1 and the pressing plate 100, and reducing the occurrence of arcing between the base and the pressing plate 100, thereby improving the coating effect of the substrate 1.

[0050] It should be noted that since this embodiment adopts all the technical features of the first aspect embodiment, this embodiment has all the beneficial effects brought by the first aspect embodiment. In addition, in order to clearly show the fixing device, Figure 4 only some of the protruding portions 120 are shown.

[0051] The coating equipment of the third aspect embodiment of the present utility model includes: the fixing device of the second aspect embodiment. The insulating member 200 of the pressing plate assembly 10 in the fixing device defines a partition groove 300, and the partition groove 300 extends along the first direction to the side surface of the pressing plate assembly 10. Therefore, during the coating process, the partition groove 300 forms a separation area between the substrate 1 and the pressing plate 100, which can effectively reduce the connection between the coating layer on the pressing plate 100 and the coating layer on the substrate 1, thereby reducing the risk of electrical connection between the substrate 1 and the pressing plate 100, and reducing the occurrence of arcing between the base and the pressing plate 100, thereby improving the coating effect of the substrate 1.

[0052] The above has described the embodiments of the present utility model in detail with reference to the drawings, but the present utility model is not limited to the above embodiments. Within the knowledge scope of those of ordinary skill in the art to which the present utility model pertains, various changes can be made without departing from the purpose of the present utility model. In addition, in the description of the present utility model, the description of reference terms such as "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

Claims

1. Pressing plate assembly, characterized in that, Comprising: Pressing plate; Insulating member, having a first surface and a second surface facing away from each other, the first surface being used to contact the substrate to press against the substrate tightly, the second surface being connected to the pressing plate, the insulating member defining a partition groove, the partition groove extending along a first direction to the side surface of the pressing plate assembly; Wherein, the first direction is the direction in which the pressing plate assembly faces the middle region of the substrate.

2. The pressing plate assembly according to claim 1, wherein The insulating member has a third surface facing in the first direction, the pressing plate protrudes from the insulating member along the first direction and defines a first partition groove with the third surface, and the partition groove includes the first partition groove.

3. The pressing plate assembly according to claim 1 or 2, characterized in that The surface of the pressing plate facing the insulating member has a second partition groove, the second partition groove extends along the first direction to the side surface of the pressing plate, and the inner wall of the second partition groove and the second surface define a third partition groove, and the partition groove includes the second partition groove.

4. The pressing plate assembly according to claim 3, wherein In the first direction, the size of the second partition groove is L1, and in the second direction, the size of the second partition groove is L2, L1 / L2≥10, and the second direction is the direction from the pressing plate to the insulating member.

5. The pressing plate assembly according to claim 1, wherein, The surface of the pressing plate facing away from the insulating member has a plurality of protrusions, and the protrusions are used to increase the roughness of the surface of the pressing plate facing away from the insulating member.

6. The pressing plate assembly according to claim 1 or 5, characterized in that, A spraying layer is provided on the surface of the pressing plate facing away from the insulating member, and the spraying layer is used to increase the roughness of the surface of the pressing plate facing away from the insulating member.

7. The pressing plate assembly according to claim 1, wherein The insulating member is detachably connected to the pressing plate.

8. Fixing device, characterized in that, Comprising a plurality of pressing plate assemblies according to any one of claims 1 to 7, each of the pressing plate assemblies being respectively used to press different edges of the substrate.

9. Coating equipment, characterized in that, Comprising the fixing device according to claim 8.

Images